200926345 九、發明說明 【發明所屬之技術領域】 本發明，是有關一種載台裝置，具有在搭載了基板的 基台上可朝一軸方向移動的高架部。 【先前技術】 以往，使用於液晶面板或半導體等的各種基板的製造 φ 等的載台裝置，已知例如專利文獻1。此載台裝置，是具 備：將罐材連結構築成框狀製罐構造的基台、及設置於基 台的兩側的一對的導引軌道、及沿著這些導引軌道被導引 的一對導引滑件、及横架於一對的導引滑件之間的樑。樑 ，是沿著導引軌道移動，藉由搭載於此樑的照相機或維修 裝置等，檢出基板的缺陷並且進行修復。基台，是隔著除 振組件被支撐於架台上。且基台，是藉由平行架設於框內 的補強罐被補強。 φ [專利文獻1]日本特開2006-269509號公報 【發明內容】 [發明的揭示] (本發明所欲解決的課題） 但是，在上述習知的製罐構造的基台中，因爲例如即 使設置補強罐剛性也不充分，所以例如當樑沿著導引軌道 朝前方移動並且照相機等的搭載物朝右方移動時，使基台 的前方側右角會陷落，而在基台產生數十微米級的變形。 -4- 200926345 因此，照相機等的搭載物即使只移動正確地距離，此基台 的變形量仍會讓搭載物及基台的相對位置產生誤差，基板 的處理就無法正確地進行。這時，等待基台的變形回復至 原形爲止停止基板的處理的話，處理量會顯著下降。 本發明，是鑑於上述狀況，其目的爲提供一種載台裝 置，藉由提高基台的剛性，處理量不會下降且在基台上可 正確地處理基板。 e (解決上述課題的手段） 本發明的載台裝置’是具備：基台、及朝一軸方向可 移動設置於前述基台上的高架部、及支撐前述基台的除振 組件。前述基台，是具有：將罐材連結構築成框狀的上部 框架、及將罐材連結構築成框狀且與前述上部框架呈上下 分離設置的下部框架、及連結前述上部框架及前述下部框 架的連結材。 G 在此載台裝置中，因爲基台是具有上部框架及下部框 架’並將其由連結材連結的盒構造，所以藉由罐材結構謀 求輕量化，但剛性也被提高。因此，即使因爲高架部的移 動而受到負荷使除振組件沈下導致基台傾斜，藉由抑制基 台本身的變形，就可使與高架部及基台的相對位置的誤差 非常小，就可進行基板的正確處理。且，因爲不需要等待 基台的變形是回復至原形爲止停止基板的處理，處理量就 不會下降。 載台裝置，是具備隔著前述除振組件支撐前述基台用 -5- 200926345 的架台也可以。如此的話，在架台上可以由除 基台。 前述上部框架的外形是矩形狀，前述下部 前述上部框架的外形但四角凹陷的矩形狀，前 有：沿著前述上部框架的外形的矩形狀的框體 述下部框架的四角的凹陷從下方支撐前述上部 的支柱，前述除振組件，是至少設在前述上部 @ 及前述支柱的上端之間也可以。如此的話，因 除振組件將基台支撐於接近重心的更高位置， 制因高架部的移動所產生的基台的擺動。且， 可揮錘的功能，可以進一步抑制基台的擺動。 前述基台，是具有將該基台在水平方向分 體用的分割部也可以。如此的話，即使隨著基 使基台大型化，不需使用特殊的大型車輛就可 基台。 φ 前述分割部，是在上下對應位置將構成前 及前述下部框架的罐材切斷也可以。如此的話 部框架及下部框架的分割部因爲是上下方向分 於剛性有利。 在前述罐材的切斷面設有向外的凸緣也可 話，分割的塊體彼此可以容易透過向外的凸緣 在前述上部框架及前述下部框架的至少一 呈傾斜方向架設補強材也可以。如此的話，與 平行的補強材的情況相比可以充分地提高基台 振狀態支撐 框架是沿著 述架台是具 、及通過前 框架的四角 框架的四角 爲可以通過 所以可以抑 下部框架發 割成複數塊 板大型化而 分割供運送 述上部框架 ，設置於上 離，所以對 以。如此的 相互連結。 方的框內， 在框內架設 的剛性。即 -6- 200926345 ，對於高架部及其搭載裝置同時移動時可能發生的基台的 扭轉，可以提高扭轉剛性。 [發明的效果] 依據本發明，可以提供一種載台裝置，藉由提高基台 的剛性，處理量不會下降且在基台上可正確地處理基板。 【實施方式】 以下，參照添付圖面說明本發明的實施例。又，對於 圖面的說明的同一要素是附加同一的符號，省略重複說明[Technical Field] The present invention relates to a stage device having an elevated portion that is movable in a single axis direction on a base on which a substrate is mounted. [Prior Art] For example, Patent Document 1 is known as a stage device for manufacturing φ or the like of various substrates such as a liquid crystal panel or a semiconductor. The stage device includes a base for constructing a can structure of a can material, a pair of guide rails provided on both sides of the base, and guided along the guide rails. A pair of guide slides and a beam transversely disposed between the pair of guide slides. The beam is moved along the guide rail, and the defect of the substrate is detected and repaired by a camera or a maintenance device mounted on the beam. The abutment is supported on the gantry through the vibration isolation assembly. And the abutment is reinforced by a reinforcing tank that is placed in parallel in the frame. [Explanation of the Invention] [Problems to be Solved by the Invention] However, in the above-described base of the conventional can making structure, for example, even if it is provided The rigidity of the reinforcing tank is also insufficient. Therefore, for example, when the beam moves forward along the guide rail and the load of the camera or the like moves to the right, the right corner of the front side of the base is collapsed, and the base generates tens of micrometers. The deformation. -4- 200926345 Therefore, even if the mounted object such as a camera moves only at the correct distance, the amount of deformation of the base causes an error in the relative position of the mounted object and the base, and the processing of the substrate cannot be performed correctly. At this time, if the processing of stopping the substrate is stopped while waiting for the deformation of the base to return to the original shape, the amount of processing is remarkably lowered. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and an object thereof is to provide a stage device which can improve the rigidity of a base without reducing the amount of processing and accurately process the substrate on the base. e (Means for Solving the Problem) The stage device of the present invention includes a base, an elevated portion that is movably provided on the base in one axial direction, and a vibration-isolating module that supports the base. The abutment includes an upper frame in which a can material connection structure is framed, a lower frame in which a can material connection structure is frame-shaped, and is vertically separated from the upper frame, and the upper frame and the lower frame are coupled to each other. The connecting material. In the stage device, since the base is a box structure having an upper frame and a lower frame and connected by a connecting material, the weight of the can material structure is reduced, but the rigidity is also improved. Therefore, even if the load is removed due to the movement of the elevated portion, the base is tilted, and by suppressing the deformation of the base itself, the error between the relative position of the elevated portion and the base can be made very small, and the operation can be performed. Correct handling of the substrate. Further, since it is not necessary to wait for the deformation of the base to return to the original form, the processing of the substrate is stopped, and the amount of processing does not decrease. The stage device may be provided with a gantry for supporting the base for -5-200926345 via the vibration-damping unit. In this case, the abutment can be removed from the abutment. The outer frame of the upper frame has a rectangular outer shape, and the outer shape of the lower frame is rectangular, and the rectangular shape is recessed at four corners. The front side of the upper frame has a rectangular frame. The four corners of the lower frame support the aforementioned recesses from below. The upper pillar and the vibration-damping module may be provided at least between the upper portion @ and the upper end of the pillar. In this case, since the vibration isolating assembly supports the base at a higher position close to the center of gravity, the base is swung by the movement of the overhead portion. Moreover, the function of the hammer can further suppress the swing of the base. The base may have a divided portion for separating the base in the horizontal direction. In this case, even if the base is enlarged, the base can be used without using a special large vehicle. φ The divided portion may be formed by cutting the can material constituting the front and the lower frame at the upper and lower corresponding positions. In this case, the divided portions of the frame and the lower frame are advantageous in that the vertical direction is divided into rigidity. If the cut surface of the can material is provided with an outward flange, the divided blocks may be easily permeable to the outward flange, and the reinforcing material may be erected in at least one of the upper frame and the lower frame. can. In this case, the base vibration state can be sufficiently improved compared with the case of the parallel reinforcing material. The support frame is the same as the four corners of the four-corner frame of the front frame, and the lower frame can be cut into plural numbers. The block plate is enlarged and divided for transporting the upper frame, and is placed on the upper side. Such interconnections. Within the square frame, the rigidity is erected inside the frame. That is, -6-200926345, the torsional rigidity can be improved by twisting the abutment which may occur when the elevated portion and the mounting device are simultaneously moved. [Effects of the Invention] According to the present invention, it is possible to provide a stage device which can improve the rigidity of the base, the amount of processing does not decrease, and the substrate can be accurately processed on the base. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. In addition, the same elements in the description of the drawings are denoted by the same reference numerals, and overlapping description will be omitted.
第 2 圖 的 體見 立所 的方 1 上 置台 裝基 台從 載 1 Tmor 的置 例裝 施台 實載 1 的 第圖 的 1 明第 發備 本具 Π是將 例圖是 桓 預 1¾ φ 立體圖，第3圖將基台從下方所見的立體圖，第4圖是連 結了連結材的基台的下部框架被除振組件支撐狀態的立體 圖。 如第1圖所示，載台裝置1，是具備：搭載有基板的 基台10、及移動於基台10上的高架部30、及設置於基台 10供導引局架部30的移動用的導引軌道40及永久磁鐵 42、及設置於高架部30的下部被導引軌道40導引的導引 滑件44及與永久磁鐵42相面對的電磁鐵48，此高架部 30是沿著導引軌道40移動。又，在第1圖中，基台10 200926345 的長度方向爲Y軸方向，與其相互垂直的水平方向爲X 軸方向，與這些相互垂直的方向爲Z軸方向。 基台10，是具有：上部框架12、及與上部框架12上 下分離設置的下部框架22、及連結上部框架12及下部框 架22的連結材18。 上部框架12，是在藉由連結各朝X軸方向延伸的罐 材12a、12b、及朝Y軸方向延伸的罐材12c、12d而形成 @ 矩形狀的框體的內側，藉由複數補強材14a、14b、14c、 14d補強的結構。在此，罐材12a、12b、12c、12d是中 空的棒材，在本實施例是利用剖面口狀的口型（方型）鋼 。且，補強材 14a、14b、14c、14d，不論是中空或中實 皆是横架框體內側的棒材，在本實施例中利用剖面Η狀 的Η型鋼及剖面口狀的口型鋼。 在此，雖詳細如後述，但是基台10是在長度方向的 水平方向可分割成複數塊體（在此爲2塊體），朝上部框 ❹ 架12的Υ軸方向延伸的罐材12c、12d是在途中被切斷， 且設有分割部1 6。而且，對於從前方側及後側挾持分割 部16的各塊體，在切斷部分的罐材12c、12d之間，朝X 軸方向延伸的方式横架由口型鋼組成的補強材14a。 而且，在由罐材12a及罐材12c、12d及補強材14a 所形成的前方的框內，由Η型鋼構成的補強材14b,是與 罐材12c、12d平行架設，並且與罐材12a及補強材14a 平行架設。且，由Η型鋼構成的補強材14c，是對於罐材 12a、12c、12d及補強材14a呈傾斜對角狀横架。因此， -8- 200926345 補強材14b，14c是成爲在中央的一點交叉，並從此放射 狀延伸的狀態。 且，在由罐材12c、12d及罐材12b及補強材14a所 形成的後面的框內，由Η型鋼構成的補強材14d，是對於· 罐材12b、12c、12d及補強材14a傾斜横架。 下部框架22，是在藉由分別連結朝X軸方向延伸的 罐材22a、22b、及朝Y軸方向延伸的罐材22c、22d而形 φ 成矩形狀的框體的內側，藉由補強材24b所補強的結構。 罐材22a、22b、22c、22d的徑，是比上部框架12的罐材 12a、12b、12c、12d小。由口型鋼構成的補強材24b，是 在罐材22c、22d的長度方向的中央部，横架於X軸方向 〇 在此，如前述，基台10是在長度方向的水平方向可 分割成複數塊體（在此爲2塊體），下部框架22的朝γ 軸方向延伸的罐材22c、22d是在途中被切斷，並設有分 ⑩ 割部26。 連結材18，是在Z軸方向分離的狀態下，連結上部 框架12及下部框架22。在本實施例中，連結材18是由 口型鋼的罐材所構成，在四角連結上部框架12及下部框 架22。進一步，爲了提高剛性，而在上下的罐材12c、 22c之間，在分割部16、26的前方側，朝Z軸方向延伸 的如在口型鋼組成連結材18是架設。且，在上下的罐材 22d、22d間中，在分割部16、26的前方側，朝Z軸方向 延伸地架設由口型鋼構成連結材18。 -9- 200926345 除振組件50，是設在載台裝置1的設置面及基台l〇 之間。更詳細的話，除振組件5 0，是在下部框架22的四 角、及罐材22c、22 d的途中的下部，可除振地支撐基台 10。除振組件50，是供去除從設置面傳遞至基台10的振 動，可以使用例如由空氣彈簧或橡膠等的彈性材所構成者 〇 導引軌道40，是分別設在罐材12c、12d的上面，朝 Y軸方向延伸。更詳細的話，在罐材12c、12d的上面， 朝向外側方設有突出片52，此突出片52是朝Y軸方向連 續延伸。而且，在此突出片52的上面，設有導引軌道40 。且，永久磁鐵42，是對於突出片52的上面被設在比導 引軌道40更鄰接於外側的位置，並朝Y軸方向延伸。此 永久磁鐵42，是在Y軸方向返覆S極及N極的預定模式 〇 在導引軌道40及永久磁鐵42的上方，配置有與朝X 軸方向延伸的高架部30的兩側的下部連結的連結板46, 在此連結板46的下面分別鄰接設有導引滑件44及電磁鐵 48。電磁鐵48，是配合永久磁鐵42的S極及N極的模式 變化磁極，藉由在永久磁鐵42之間發生反抗力可以一邊 由導引軌道40導引高架部30 —邊朝Y軸方向移動。 又，在突出片52的下面，架設於與罐材12c、12d的 外側面之間的複數補強肋54是設成在Y軸方向隔有預定 間隔。 高架部30，是具備：朝X軸方向延伸的支撐部30a、 -10- 200926345 線形馬達部30b及移動部30c。移動部30c可藉由線形馬 達部3 0b沿著該線形馬達部3 0b朝X軸方向移動。而且 ，藉由在此移動部30c附設預定的處理裝置，使處理裝置 是朝X軸方向移動’對於被搭載於基台10的基板實行預 定的處理。此處理裝置’可以是：檢査基板上的缺陷的照 相機、修復濾色板的色脫落等的基板的表面處理狀態的維 修裝置、對於基板進行模式處理的塗抹裝置。 φ 如第5圖所示’在載台裝置1的基台1〇上，設有供 載置液晶面板等的基板用的工件壓板11。又，由運送車 運送載台裝置1時’在設有此工件壓板11的狀態積載於 運送車。 在本實施例中，是如第5圖所示，基台1〇、導引軌 道40、永久磁鐵42、突出片52及工件壓板11，是由與 Y軸方向垂直的分割面所分割。而且，分割基台1〇，是 在分割部16、26藉由螺絲等連結。即，在分割部26(16 φ )中，如第6圖所示，設有將切斷罐材22c(12c)的切 斷面圍起來並向外的凸緣26a(16a)，通過此向外的凸 緣26a( 16a)連結被分割的基台1〇的塊體彼此。又，在 上部框架12的分割部16中’補強肋54是兼具向外的凸 緣 1 6 a。 如此，基台10、導引軌道40、永久磁鐵42、突出片 52及工件壓板11因爲是在γ軸方向可分割的結構，所以 載台裝置1可分割成2個塊體。又，分割部16、26，是 對於上下的Z軸方向設在對應的位置，對於γ軸方向各 -11 - 200926345 塊體是形成於可積載於運送車的大小的位置。 且，在基台10的雨側方的突出片52的下方 1圖及第7圖所示，設有纜線載體60。在高架音| 連接：供給供控制高架部30本身或移動部30c 的電力的無圖示電力纜線、或在與附設於移動部 理裝置之間送收訊各種訊號用的無圖示訊號纜線 纜線，是通過纜線載體60地被配線。 φ 纜線載體60，是連設扁平的複數筒材的， 在相互限制的角度內可轉動自如地連結。匯集的 通過此纜線載體60的內部。纜線載體60的一端 固定在被設置於基台1〇的側方的支撐台62上。 載體60的另一端60b，是固定於連絡構件64。 64，是筒狀的構件並與高架部30及纜線載體60 來自纜線載體60的纜線導引至高架部30。In the second figure, the square 1 of the stand-up base station is loaded from the 1 Tmor set-up table. The first version of the load-bearing 1 is the first one. The figure is the first plan. 3 is a perspective view of the base seen from below, and FIG. 4 is a perspective view showing a state in which the lower frame of the base to which the connecting material is connected is supported by the vibration isolating assembly. As shown in Fig. 1, the stage device 1 includes a base 10 on which a substrate is mounted, an overhead portion 30 that is moved on the base 10, and a movement provided on the base 10 for guiding the frame portion 30. The guide rail 40 and the permanent magnet 42 and the guide slider 44 disposed at the lower portion of the elevated portion 30 are guided by the guide rail 40 and the electromagnet 48 facing the permanent magnet 42. The elevated portion 30 is Move along the guide track 40. Further, in the first drawing, the longitudinal direction of the base 10 200926345 is the Y-axis direction, and the horizontal direction perpendicular to each other is the X-axis direction, and the mutually perpendicular directions are the Z-axis directions. The base 10 has an upper frame 12, a lower frame 22 that is separated from the upper frame 12, and a connecting member 18 that connects the upper frame 12 and the lower frame 22. The upper frame 12 is formed by connecting the can bodies 12a and 12b extending in the X-axis direction and the can bodies 12c and 12d extending in the Y-axis direction to form an inner side of the @ rectangular frame, and the plurality of reinforcing members are provided. 14a, 14b, 14c, 14d reinforced structure. Here, the cans 12a, 12b, 12c, and 12d are hollow bars, and in the present embodiment, a port-shaped (square) steel having a cross-sectional shape is used. Further, the reinforcing members 14a, 14b, 14c, and 14d are hollow or medium-sized bars which are inside the cross frame, and in the present embodiment, a cross-sectional shape of a Η-shaped steel and a cross-sectional shape of a mouth-shaped steel are used. Here, as will be described later in detail, the base 10 is divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the can 12c extending in the z-axis direction of the upper frame truss 12, 12d is cut off on the way, and a dividing portion 16 is provided. In addition, each of the blocks that hold the divided portion 16 from the front side and the rear side crosses the reinforcing material 14a composed of the profiled steel so as to extend between the cans 12c and 12d in the cut portion in the X-axis direction. Further, in the frame formed in front of the can 12a, the cans 12c and 12d, and the reinforcing material 14a, the reinforcing material 14b made of Η-shaped steel is placed in parallel with the cans 12c and 12d, and the can 12a and The reinforcing material 14a is erected in parallel. Further, the reinforcing member 14c made of a Η-shaped steel has a slanted diagonal cross frame for the can bodies 12a, 12c, and 12d and the reinforcing member 14a. Therefore, -8-200926345 reinforcing members 14b and 14c are in a state of being slightly extended at the center and extending radially therefrom. Further, in the rear frame formed by the can bodies 12c and 12d, the can body 12b, and the reinforcing material 14a, the reinforcing material 14d made of Η-shaped steel is inclined to the cans 12b, 12c, and 12d and the reinforcing material 14a. frame. The lower frame 22 is formed by connecting the tanks 22a and 22b extending in the X-axis direction and the tanks 22c and 22d extending in the Y-axis direction to the inside of the frame which is formed in a rectangular shape, and is made of a reinforcing material. The structure of 24b is strong. The diameters of the cans 22a, 22b, 22c, and 22d are smaller than the cans 12a, 12b, 12c, and 12d of the upper frame 12. The reinforcing material 24b made of a profiled steel is a central portion in the longitudinal direction of the cans 22c and 22d, and is transversely arranged in the X-axis direction. As described above, the base 10 can be divided into a plurality in the horizontal direction in the longitudinal direction. The block (here, two blocks) and the cans 22c and 22d extending in the γ-axis direction of the lower frame 22 are cut in the middle, and are provided with the divided portions 26. The connecting material 18 is coupled to the upper frame 12 and the lower frame 22 in a state of being separated in the Z-axis direction. In the present embodiment, the connecting material 18 is made of a can material of a profiled steel, and the upper frame 12 and the lower frame 22 are joined at the four corners. Further, in order to increase the rigidity, between the upper and lower tank members 12c and 22c, the mouth-shaped steel-constituting connecting member 18 is stretched in the Z-axis direction on the front side of the divided portions 16 and 26. Further, between the upper and lower tank members 22d and 22d, a connecting member 18 made of a profiled steel is stretched in the Z-axis direction on the front side of the divided portions 16 and 26. -9- 200926345 The vibration isolating assembly 50 is provided between the installation surface of the stage device 1 and the base 10b. More specifically, the vibration eliminating unit 50 is a lower portion of the lower frame 22 and a lower portion of the middle of the cans 22c and 22d, and the base 10 can be supported in a vibration-removing manner. The vibration isolating unit 50 is for removing vibration transmitted from the installation surface to the base 10, and may be formed of, for example, an elastic material such as an air spring or rubber, and is provided on the can bodies 12c and 12d, respectively. Above, it extends in the Y-axis direction. More specifically, on the upper surfaces of the can bodies 12c and 12d, projecting pieces 52 are provided toward the outer side, and the projecting pieces 52 are continuously extended in the Y-axis direction. Further, on the upper surface of the protruding piece 52, a guide rail 40 is provided. Further, the permanent magnet 42 is provided at a position closer to the outer side than the guide rail 40 with respect to the upper surface of the protruding piece 52, and extends in the Y-axis direction. The permanent magnet 42 is in a predetermined mode in which the S pole and the N pole are returned in the Y-axis direction. The guide rail 40 and the permanent magnet 42 are disposed above the lower side of the elevated portion 30 extending in the X-axis direction. The connecting web 46 is provided with a guide slider 44 and an electromagnet 48 adjacent to the lower surface of the web 46. The electromagnet 48 is a mode-changing magnetic pole that matches the S pole and the N pole of the permanent magnet 42. By causing a countermeasure force between the permanent magnets 42, the elevated portion 30 can be guided by the guide rail 40 to move in the Y-axis direction. . Further, on the lower surface of the protruding piece 52, the plurality of reinforcing ribs 54 which are placed between the outer surfaces of the cans 12c and 12d are arranged at predetermined intervals in the Y-axis direction. The elevated portion 30 includes a support portion 30a, a-10-200926345 linear motor portion 30b, and a moving portion 30c that extend in the X-axis direction. The moving portion 30c is movable in the X-axis direction along the linear motor portion 30b by the linear portion 30b. Further, by attaching a predetermined processing device to the moving portion 30c, the processing device is moved in the X-axis direction. A predetermined process is performed on the substrate mounted on the base 10. The processing device 'may be a camera that inspects a defect on the substrate, a repair device that repairs the surface treatment state of the substrate such as the color drop of the color filter, and a coating device that performs pattern processing on the substrate. φ As shown in Fig. 5, a workpiece pressing plate 11 for a substrate on which a liquid crystal panel or the like is placed is provided on the base 1 of the stage device 1. Further, when the stage device 1 is transported by the transport vehicle, the workpiece is placed on the transport vehicle in a state where the workpiece presser 11 is provided. In the present embodiment, as shown in Fig. 5, the base 1, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the workpiece pressing plate 11 are divided by a dividing surface perpendicular to the Y-axis direction. Further, the split base 1 is connected to the divided portions 16 and 26 by screws or the like. In other words, as shown in Fig. 6, the dividing portion 26 (16 φ ) is provided with a flange 26a (16a) that encloses the cut surface of the cut pot material 22c (12c) and is outward. The outer flange 26a (16a) connects the blocks of the divided bases 1〇 to each other. Further, in the divided portion 16 of the upper frame 12, the 'reinforcing rib 54 has both the outward flanges 16a. As described above, since the base 10, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the workpiece pressing plate 11 are separable in the γ-axis direction, the stage device 1 can be divided into two blocks. Further, the divided portions 16 and 26 are provided at corresponding positions in the Z-axis direction of the upper and lower sides, and the blocks -11 - 200926345 in the γ-axis direction are formed at positions that can be stowed in the transport vehicle. Further, a cable carrier 60 is provided on the lower side of the protruding piece 52 on the rain side of the base 10, as shown in Fig. 7 and Fig. 7. In the overhead sound | connection: a non-illustrated power cable for supplying power for controlling the overhead portion 30 itself or the moving portion 30c, or a non-illustrated signal cable for transmitting various signals to and from the mobile device The cable wires are wired through the cable carrier 60. The φ cable carrier 60 is connected to a flat plurality of cylindrical members, and is rotatably coupled to each other within a mutually restricted angle. The collection passes through the interior of this cable carrier 60. One end of the cable carrier 60 is fixed to a support base 62 provided on the side of the base 1〇. The other end 60b of the carrier 60 is fixed to the contact member 64. 64 is a tubular member and is guided to the elevated portion 30 with the overhead portion 30 and the cable carrier 60 from the cable carrier 60.
因此，如第8圖所示，纜線載體6 0是如履 φ 註冊商標）地可變形自如，高架部30隨著朝Y 動，於基台10的長度方向的任意的位置可彎曲^ 。而且，通過纜線載體60內部的纜線，會順著 60的變形而變形。 如此，藉由將纜線載體60設在基台10的兩 出片52的下方，與設置於基台1〇的內部的情況 材12c、22c間或罐材12d、22d間的空間的利用 提高，可在此配置連結材18或除振組件50’就 性或制振性。且’藉由設置突出片52並在此上 ，是如第 "0中， 的移動用 30c的處 等。這些 各筒材是 纜線，是 60a，是 且，纜線 連絡構件 連結，將 帶（曰本 軸方向移 交U字狀 纜線載體 側方的突 不同，罐 的自由度 可提高剛 配置導引 -12 - 200926345 軌道40或永久磁鐵42，與在上部框架12的罐材12c、 1 2d上配置這些的情況相比，可以縮小的基台1 0的X軸 方向的尺寸，可謀求降低突軌部（foot print )的發生。 如此，本實施例的載台裝置1中，基台10因爲是具 有上部框架12及下部框架22且由連結材18加以連結的 盒構造，所以即使由罐材構成輕量化，剛性也可提高。因 此，即使因爲高架部30的移動而承受負荷使除振組件50 φ 下沈而導致基台10傾斜，也可抑制基台10本身的變形， 高架部30及基台10的相對位置的誤差非常小，可正確地 處理基板。且，因爲不需要等待基台10的變形回復至原 形爲止就可進行基板的處理，處理量不會下降。 且，基台10，是因爲具有將基台10在水平方向分割 成複數塊體用的分割部1 6、26，所以即使隨著基板的大 型化使基台10大型化，也不需使用特殊的大型車輛就可 將基台10分割運送。且，將構成基台10的罐材12c、 φ 12d、22c、22d機械加工時，因爲可各分割部分分別進行 ，所以機械加工容易進行。 且，分割基台1 〇的情況，基台1 0是由罐材構成的話 ’接合面的剛性低，高架部3 0的驅動時有產生變形的可 能性，但是本實施例的基台10因爲是盒構造，配合上部 框架12及下部框架22中的上下的接合面的話，接合面會 增加’可以降低產生變形的可能性，成爲有利於基台1 〇 的分割的構造。 且，分割部16、26，因爲是將構成上部框架12及下 -13- 200926345 部框架22的罐材在上下對應位置切斷的結構，所以設置 於上部框架12及下部框架22的分割部16、26是藉由上 下方向分離，可對於讓分割面脫落的力矩進行強化’在剛 性上有利。 且，在罐材的切斷面中因爲設置向外的凸緣16a、 2 6a，所以被分割的塊體彼此透過向外的凸緣16a、26a藉 由螺絲等可以容易相互連結。 U 又，在突出片52的下面設有架設於罐材12c、12d的 外側面之間的複數補強肋54,分割的基台1〇,也是透過 此補強肋54連結。在此，習知的平台構造的情況，若欲 分割的話，連結用的凸緣有需要設成伸出平台的側面，而 有橫方向的尺寸變大的問題，但是在本實施例中，因爲可 以抑制補強肋5 4或分割部1 6、26比突出片52更朝側方 伸出，所以可以抑制大型化。 且，因爲在上部框架12的框內以傾斜方向架設補強 φ 材14c、14d，所以與在框內平行架設的補強材的情況相 比可以充分地提高基台1 〇的剛性。 且，藉由將纜線載體60設在基台10的兩側方突出片 52的下方，與設在基台10的內部的情況不同，罐材12c 、22c之間或罐材12d、22d之間的空間利用的自由度提 高，在此可以配置連結材1 8或除振組件5 0，可以提高剛 性或制振性。且，因爲可縮短連絡構件64的Z軸方向的 長度，降低可以因外亂的影響所產生的基台10的振動。 且，藉由設置突出片52進一步配置導引軌道40或永久磁 -14- 200926345 鐵42，與將這些配置於上部框架12的罐材12c、i2d上 的情況相比，可以縮小基台10的X軸方向的尺寸，可謀 求降低突軌部（footprint)的發生。 又，在此，雖只有在上部框架12的框內朝傾斜方向 設置補強材，但是在下部框架22的框內朝傾斜方向設置 補強材也可以。 且，連結材18雖由口型鋼構成，將上部框架12及下 φ 部框架22的四角等連結的結構，但是連結材18不限定於 口型鋼，例如藉由板材將上部框架12及下部框架22包圍 而連結的結構也可以。 且，如第9圖所示，上部框架12的分割部16的向外 的凸緣16a、及下部框架22的分割部26的向外凸緣26a 爲一體構造也可以。如此的話，可以更提高基台1 〇的剛 性。 〇 [第2實施例] 接著，說明本發明的第2實施例。又，與上述第1實 施例同一的要素使用同一符號，省略重複說明。 第10圖，是本發明的第2實施例的載台裝置ιοί的 側面圖，第11圖是將具備第10圖的載台裝置1〇1的基台 110從上方所見的立體圖，第12圖是將基台110從下方 所見的立體圖，第1 3圖，是將分割的基台1 1 〇的後側的 塊體從上方所見的立體圖，第14圖是連結有連結材118 的基台110的下部框架122的立體圖，第15圖是架台 200926345 170及除振組件150的立體圖。 此第2實施例與第1實施例的相異點’是藉由架台 170支撐基台110的點、及因此變更基台11〇的結構的點 〇 如第10圖所不，載台裝置101，是具備：搭載有基 板的基台110、及移動於基台110上的高架部130、及設 置於基台1 10供導引高架部130移動的導引軌道140及永 0 久磁鐵142、及設置於高架部13〇的下部被導引至導引軌 道140的導引滑件144及與永久磁鐵142相面對的電磁鐵 146’此高架部130是沿著導引軌道140移動。又，在第 10圖中’基台110的長度方向爲Y軸方向，與其垂直的 水平方向爲X軸方向，與這些垂直的方向爲Z軸方向。 基台11〇’是具有：上部框架112、及與上部框架 112上下分離設置的下部框架122、及連結上部框架112 及下部框架122的連結材118。 Q 上部框架112,是在藉由分別連結朝X軸方向延伸的 罐材112a、112b、及朝Y軸方向延伸的罐材112c、112d 而形成矩形狀的框體的內側，由複數補強材114a、114b 、114c、114d補強而構成。在此，罐材112a、112b、 112c、112d是中空的棒材，在本實施例中是使用剖面口 狀的口型鋼。且，補強材114a、 114b、 114c、 114d，是 無論中空或中實皆橫架於框體的內側的棒材，在本實施例 中使用剖面Η狀的Η型鋼及剖面口狀的口型鋼。 在此，雖詳細如後述，基台110在長度方向的水平方 -16- 200926345 向可分割成複數塊體（在此爲2塊體），上部框架Η2的 朝Y軸方向延伸的罐材112c、112d是在途中被切斷’並 設有分割部116。而且，對於各別挾持分割部116的前方 側及後側的塊體，在切斷部分的罐材1 12c、1 12d之間， 朝X軸方向延伸地横架由口型鋼構成之補強材114a。 而且，在由罐材112a及罐材112c、112d及補強材 11 4a所形成的前方的框內，由Η型鋼構成的補強材114b @ ，是與罐材112c、U2d平行地架設，並且與罐材1 12. a 及補強材114a平行地架設。且，由Η型鋼構成的補強材 114c，是對於罐材112a、U2c、112d及補強材114a呈傾 斜對角狀地横架。因此，補強材1 14b，1 14c是成爲由中 央的一點交叉並從此放射狀延伸的狀態。 且’在由罐材 U2c、112d及罐材 112b及補強材 114a所形成的後方的框內，由Η型鋼構成的補強材ll4d ’是對於罐材1 12b、1 12c、1 12d及補強材1 14a傾斜地横 ❹ 架。 下部框架122,是在藉由分別連結朝X軸方向延伸的 罐材12 2a、12 2b、及朝Y軸方向延伸的罐材122c、122d 而形成矩形狀的框體的內側，藉由複數補強材124a、 124b、124c 所補強的結構。罐材 i 22a、122b、122c、 122d的徑，是比上部框架的罐材112a' n2b、112c、 1 1 2 d 小。 在此’如前述，基台110是在長度方向的水平方向可 分割成複數塊體（在此爲2塊體），下部框架122的朝γ -17- 200926345 軸方向延伸的罐材122c、122d是在途中被切斷，並設有 分割部126。而且，對於分割部126前方側的塊體，在切 斷部分的罐材122c、122d之間，朝X軸方向延伸地横架 由口型鋼構成的補強材124a。 且，在由罐材 122a及罐材 122c、112d及補強材 1 24a所形成的前方的框內，由Η型鋼構成的補強材1 24b ，是與罐材122c、122d平行地架設，並且與罐材122a及 0 補強材124a平行地架設。且，由Η型鋼構成的補強材 124c，是對於罐材122a、122c、122d及補強材124a呈傾 斜對角狀地横架。因此，補強材124b，12 4c是成爲由中 央的一點交叉，並從此放射狀延伸的狀態。 且，下部框架122，是沿著上部框架112的外形但四 角凹陷的略矩形狀。後述架台170的支柱178，是通過此 凹陷119從下方支撐上部框架112的四角。 連結材118，是在Z軸方向分離的狀態下，連結上部 φ 框架112及下部框架122。在本實施例中，連結材118是 由口型鋼的罐材所構成，將上部框架112及下部框架122 在四角附近連結。 架台170，是如第1 5圖所示，在藉由分別連結朝X 軸方向延伸的罐材172a、172b、及朝 Y軸方向延伸的罐 材172c、172d而形成的矩形狀的框體的內側，藉由複數 補強材174a、盤74b所補強的結構。在此，罐材172a、 17 2b、172c、172d是中空的棒材，在本實施例中使用剖 面口狀的口型鋼。且，補強材174a、174b，無論是中空Therefore, as shown in Fig. 8, the cable carrier 60 is deformable as shown in Fig. φ, and the elevated portion 30 can be bent at any position in the longitudinal direction of the base 10 as it moves toward Y. Moreover, the cable passing through the inside of the cable carrier 60 is deformed along the deformation of 60. Thus, by providing the cable carrier 60 under the two sheets 52 of the base 10, the utilization of the space between the materials 12c and 22c provided in the interior of the base 1 or between the cans 12d and 22d is improved. Here, the connecting member 18 or the vibration-damping member 50' can be disposed in a manner or vibration-damping property. And by setting the protruding piece 52 and here, it is the position of the movement 30c as in the "0. Each of the cylindrical members is a cable, which is 60a. In addition, the cable connecting members are connected, and the belt is transferred to the side of the U-shaped cable carrier, and the degree of freedom of the tank can be improved. -12 - 200926345 The rail 40 or the permanent magnet 42 can be reduced in size in the X-axis direction of the base 10 as compared with the case where the rails 12c and 1 2d of the upper frame 12 are disposed. In the stage device 1 of the present embodiment, since the base 10 has a box structure having the upper frame 12 and the lower frame 22 and connected by the connecting member 18, even if it is composed of a can. The weight can be increased, and the rigidity can be improved. Therefore, even if the load is removed by the movement of the elevated portion 30, the vibration damping unit 50 φ is sunk and the base 10 is tilted, and the deformation of the base 10 itself can be suppressed. The error in the relative position of the stage 10 is extremely small, and the substrate can be processed correctly. Further, since the substrate can be processed without waiting for the deformation of the base 10 to return to the original shape, the amount of processing does not decrease. because Since the base 10 is divided into the divided portions 16 and 26 for the plurality of blocks in the horizontal direction, even if the base 10 is enlarged in size as the size of the substrate increases, the base can be removed without using a special large vehicle. In the case of machining the cans 12c, φ12d, 22c, and 22d constituting the base 10, since the divided portions can be separately performed, the machining can be easily performed. Further, when the base 1 is divided, When the base 10 is made of a can material, the rigidity of the joint surface is low, and the base portion 30 may be deformed during driving. However, the base 10 of the present embodiment has a box structure and fits the upper frame 12 and the lower portion. In the upper and lower joint faces of the frame 22, the joint surface is increased by 'the possibility of deformation is reduced, and the structure is advantageous for the division of the base 1 。. Moreover, the divided portions 16, 26 are constituting the upper frame 12 In the lower-13-200926345, the cans of the frame 22 are cut at the upper and lower corresponding positions. Therefore, the divided portions 16 and 26 provided in the upper frame 12 and the lower frame 22 are separated by the vertical direction, and the split surface can be removed. The falling moment is enhanced 'in terms of rigidity. Moreover, since the outward flanges 16a, 26a are provided in the cut surface of the can, the divided blocks are mutually transmitted through the outward flanges 16a, 26a. Further, it is easy to connect to each other by screws, etc. U. Further, a plurality of reinforcing ribs 54 are provided between the outer surfaces of the cans 12c and 12d on the lower surface of the protruding piece 52, and the divided bases 1 are also passed through the reinforcing ribs 54. Here, in the case of the conventional platform structure, if the flange is to be divided, the flange for connection needs to be provided as a side surface extending from the platform, and the size in the lateral direction becomes large, but in the present embodiment, Since the reinforcing ribs 5 4 or the divided portions 16 and 26 can be prevented from projecting more laterally than the protruding pieces 52, it is possible to suppress an increase in size. Further, since the reinforcing φ materials 14c and 14d are placed in the inclined direction in the frame of the upper frame 12, the rigidity of the base 1 可以 can be sufficiently improved as compared with the case of the reinforcing material placed in parallel in the frame. Further, by providing the cable carrier 60 under the both side protruding pieces 52 of the base 10, unlike the case of being provided inside the base 10, the cans 12c, 22c or the cans 12d, 22d are The degree of freedom in space utilization is improved, and the connecting member 18 or the vibration isolating member 50 can be disposed here to improve rigidity or vibration damping. Further, since the length of the contact member 64 in the Z-axis direction can be shortened, the vibration of the base 10 which can be caused by the influence of the disturbance can be reduced. Further, by further providing the guide rail 40 or the permanent magnet-14-200926345 iron 42 by providing the protruding piece 52, the base 10 can be reduced as compared with the case where these are disposed on the cans 12c, i2d of the upper frame 12. The size in the X-axis direction can be reduced to reduce the occurrence of a footprint. Here, although the reinforcing member is provided in the oblique direction in the frame of the upper frame 12, the reinforcing member may be provided in the frame of the lower frame 22 in the oblique direction. Further, the connecting member 18 is formed of a profiled steel, and the four frames of the upper frame 12 and the lower φ frame 22 are connected to each other. However, the connecting member 18 is not limited to the profiled steel, and the upper frame 12 and the lower frame 22 are formed by, for example, a plate material. It is also possible to surround and connect the structure. Further, as shown in Fig. 9, the outward flange 16a of the divided portion 16 of the upper frame 12 and the outward flange 26a of the divided portion 26 of the lower frame 22 may have an integral structure. In this case, the rigidity of the base 1 can be improved.第 [Second embodiment] Next, a second embodiment of the present invention will be described. The same elements as those in the above-described first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated. FIG. 10 is a side view of the stage device ιοί of the second embodiment of the present invention, and FIG. 11 is a perspective view of the base 110 including the stage device 1〇1 of FIG. 10 as seen from above, FIG. A perspective view of the base 110 as seen from below, and FIG. 1 is a perspective view of the block on the rear side of the divided base 1 1 从 from above, and FIG. 14 is a base 110 to which the connecting material 118 is connected. A perspective view of the lower frame 122, and a fifteenth view of the gantry 200926345 170 and the vibration isolation assembly 150. The difference between the second embodiment and the first embodiment is the point at which the base 110 is supported by the gantry 170, and thus the structure of the base 11 is changed. As shown in Fig. 10, the stage device 101 is not provided. The base 110 having the substrate and the elevated portion 130 moving on the base 110, and the guide rail 140 and the permanent magnet 142 provided on the base 1 10 for guiding the elevated portion 130 to move, And a lower portion of the elevated portion 13A is guided to the guide slider 144 of the guide rail 140 and an electromagnet 146' facing the permanent magnet 142. The elevated portion 130 moves along the guide rail 140. Further, in Fig. 10, the longitudinal direction of the base 110 is the Y-axis direction, the horizontal direction perpendicular thereto is the X-axis direction, and the vertical direction is the Z-axis direction. The base 11'' has an upper frame 112, a lower frame 122 that is vertically separated from the upper frame 112, and a connecting material 118 that connects the upper frame 112 and the lower frame 122. The upper frame 112 is formed by connecting the tank members 112a and 112b extending in the X-axis direction and the tank members 112c and 112d extending in the Y-axis direction to form a rectangular frame body, and the plurality of reinforcing members 114a are formed. 114b, 114c, and 114d are reinforced. Here, the cans 112a, 112b, 112c, and 112d are hollow bars, and in the present embodiment, a profiled steel having a cross-sectional shape is used. Further, the reinforcing members 114a, 114b, 114c, and 114d are rods which are transversely arranged on the inner side of the casing, whether hollow or medium. In the present embodiment, a cross-sectional shape of a Η-shaped steel and a cross-sectional shape of a mouth-shaped steel are used. Here, as will be described in detail later, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction of the horizontal direction -16 to 200926345, and the can 112c extending in the Y-axis direction of the upper frame Η2. And 112d is cut off on the way' and the division part 116 is provided. Further, for each of the blocks on the front side and the rear side of the divided portion 116, a reinforcing member 114a made of a profiled steel is formed to extend in the X-axis direction between the can bodies 1 12c and 1 12d in the cut portion. . Further, in the frame formed in front of the can body 112a, the cans 112c and 112d, and the reinforcing material 11 4a, the reinforcing material 114b @ made of Η-shaped steel is placed in parallel with the cans 112c and U2d, and the can is The material 1 12. a and the reinforcing material 114a are erected in parallel. Further, the reinforcing member 114c made of a Η-shaped steel is transversely inclined with respect to the can bodies 112a, U2c, and 112d and the reinforcing member 114a. Therefore, the reinforcing members 1 14b, 1 14c are in a state of being radially extended from the center point and extending therefrom. Further, in the frame formed by the tank materials U2c and 112d, the can material 112b, and the reinforcing material 114a, the reinforcing material ll4d' made of Η-shaped steel is for the cans 1 12b, 1 12c, 1 12d and the reinforcing material 1 14a slanted across the frame. The lower frame 122 is formed by connecting the can bodies 12 2a and 12 2b extending in the X-axis direction and the cans 122c and 122d extending in the Y-axis direction to form a rectangular frame body, and is reinforced by a plurality of frames. The structure of the materials 124a, 124b, and 124c is enhanced. The diameters of the cans i 22a, 122b, 122c, and 122d are smaller than the cans 112a' n2b, 112c, and 1 2 2 d of the upper frame. Here, as described above, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 122c and 122d extending in the γ-17-200926345 axial direction of the lower frame 122. It is cut off on the way and is provided with a dividing portion 126. Further, the block body on the front side of the dividing portion 126 has a reinforcing member 124a made of a profiled steel extending in the X-axis direction between the cut-off portions of the cans 122c and 122d. Further, in the front frame formed by the can 122a, the cans 122c and 112d, and the reinforcing material 146a, the reinforcing material 1 24b made of Η-shaped steel is erected in parallel with the cans 122c and 122d, and the can is The material 122a and the 0 reinforcing material 124a are erected in parallel. Further, the reinforcing member 124c made of Η-shaped steel is transversely inclined with respect to the cans 122a, 122c, and 122d and the reinforcing member 124a. Therefore, the reinforcing members 124b, 12 4c are in a state of being radially extended from the center point and extending therefrom. Further, the lower frame 122 is a substantially rectangular shape which is recessed along the outer shape of the upper frame 112 but has four corners. The pillars 178 of the gantry 170, which will be described later, support the four corners of the upper frame 112 from below by the recesses 119. The connecting material 118 is connected to the upper φ frame 112 and the lower frame 122 in a state of being separated in the Z-axis direction. In the present embodiment, the connecting member 118 is made of a can material of a profiled steel, and the upper frame 112 and the lower frame 122 are joined at the vicinity of the four corners. As shown in FIG. 15, the gantry 170 is a rectangular frame formed by connecting the cans 172a and 172b extending in the X-axis direction and the cans 172c and 172d extending in the Y-axis direction. The inner side is reinforced by a plurality of reinforcing members 174a and 74b. Here, the cans 172a, 17 2b, 172c, and 172d are hollow bars, and in the present embodiment, a sectioned mouth-shaped steel is used. Moreover, the reinforcing materials 174a, 174b are hollow
200926345 或中實皆是横架框體內側的棒材，在本實 口狀的口型鋼。 在此，如前述基台110是在長度方向的 複數塊體可分割成複數塊體（在此爲2塊體 170也可分割成複數塊體。架台170的朝Y 罐材172c、172d是在途中被切斷，並設有 而且，對於各別挾持分割部1 76前方側及後 切斷部分的罐材172c、172d之間，朝X軸 架由口型鋼構成的補強材174a。且，在前 進一步朝X軸方向延伸地横架由口型鋼 174a。且，在架台170的框內，朝Y軸方向 口型鋼構成的補強材174b。此補強材174b 斷，並設有分割部176。 在架台170的四角中，朝Z軸方向延 178。除振組件150，是設置於架台170的 端及各罐材 172a、 172b、 172c、 172d 上。 除振組件150，是在上部框架112的四角及 柱 178的上端之間、及在各罐材 172a、 172d的途中的上部及下部框架122的罐材 122c、122d之間，可除振地支撐基台1 10。 ，是供去除從設置面傳遞至基台的振動 如由空氣彈簧或橡膠等的彈性材所構成者。 導引軌道140，是分別設在罐材112c ，並朝Y軸方向延伸。更詳細的話，在罐? 例中使用剖面 水平方向在的 )，並且架台 軸方向延伸的 分割部176。 側的塊體，在 方向延伸地横 方側的框內， 構成的補強材 延伸地横架由 是在途中被切 伸地設有支柱 支柱1 7 8的上 更詳細的話， 架台1 70的支 172b、 172c、 122a ' 122b、 除振組件150 ，可以使用例 、1 12d的上面 时 112c、11 2d -19- 200926345 的上面設有朝向於外側方的突出片152,此突出片152是 朝Y軸方向連續延伸。而且，在此突出片152的上面設 有導引軌道140。且，永久磁鐵142，是在突出片152的 上面設在比導引軌道140更鄰接於外側的位置，並朝Y 軸方向延伸。此永久磁鐵142,是在Y軸方向返覆S極及 N極的預定模式。 在導引軌道140及永久磁鐵142的上方，配置有與朝 ^ X軸方向延伸的高架部1 3 0的兩側的下部連結的連結板 146，在此連結板146的下面，分別鄰接設置導引滑件 144及電磁鐵148»電磁鐵148，是配合永久磁鐵142的S 極及N極的模式變化磁極，可以藉由在永久磁鐵142之 間發生的反抗力一邊將高架部130由導引軌道140導引一 邊朝Y軸方向移動。 又，在突出片152的下面，架設於罐材112c、112d 的外側面之間的複數補強肋154是在Y軸方向隔有預定 φ 間隔地設置。 高架部130,是具備：朝X軸方向延伸的支撐部130a 、線形馬達部13 0b及移動部130c。移動部13 0c，可藉由 線形馬達部130b沿著該線形馬達部130b朝X軸方向移 動。而且，藉由在此移動部130c附設預定的處理裝置， 使處理裝置朝X軸方向移動，並對於被搭載於基台110 的基板實行預定的處理。此處理裝置，可以是檢查基板上 的缺陷的照相機、修復濾色板的色脫落等基板的表面處理 狀態的維修裝置、對於基板進行模式處理的塗抹裝置。 -20- 200926345 又，在載台裝置101的基台110上’與第1實施例同 樣’設有供載置液晶面板等的基板用的無圖示工件壓板。 又，由運送車運送載台裝置101時，在設置有此工件壓板 的狀態下積載於運送車。 在本實施例，是如第10圖所示’基台11〇、導引軌 道140、永久磁鐵142、突出片152、架台170及工件壓 板，是在與Y軸方向垂直的分割面被分割。而且’分割 的基台110，是在分割部116、126藉由螺絲等連結。 又，在突出片152的下面設有架設於罐材112c、 1 1 2d的外側面之間的複數補強肋1 54，分割的基台1 1 0， 也透過此補強肋1 54連結。在此，習知的平台構造的情況 ，若欲分割的話，有需要將連結用的凸緣朝平台的側面伸 出地設置，而有橫方向的尺寸變大的問題，但是在本實施 例中，因爲可以抑制補強肋154或分割部116、126比突 出片1 52更朝側方伸出，所以可以抑制大型化。 如此，基台1 10、導引軌道140、永久磁鐵142、突 出片152、架台170及工件壓板因爲是在Y軸方向可分割 的結構，所以載台裝置1Ό1可分割成2個塊體。又，分割 部116、126、176,是在上下的Z軸方向設在對應的位置 ’所以對於Y軸方向各塊體是形成於可積載於運送車的 大小的位置。 且，在基台110的兩側方的突出片152的下方，是如 第10圖及第16圖所示，設有纜線載體160。在高架部 130中，連接：供給供控制高架部130本身或移動部i30c -21 - 200926345 的移動用的電力的無圖示電力纜線、或在附設於移動部 13 0c的處理裝置之間送收訊各種訊號用的無圖示訊號纜 線等。這些纜線，是通過纜線載體1 60地配線。 纜線載體160，是連設扁平的複數筒材，各筒材是在 相互限制的角度內可轉動自如地連結。匯集的纜線，是通 過此纜線載體160的內部。纜線載體160的一端160a， 是固定在被設置於基台110的側方的支撐台162上。且， 0 纜線載體160的另一端160b，是固定於連絡構件164。連 絡構件164，是筒狀的構件並與高架部130及纜線載體 160連結，將來自纜線載體160的纜線導引至高架部130 〇 因此，如第17圖所示，纜線載體160是如履帶（曰 本註冊商標）地可變形自如，隨著高架部130朝Y軸方 向移動，於基台110的長度方向的任意的位置可彎曲成U 字狀。而且，通過於纜線載體160的內部的纜線，會順著 φ 纜線載體160的變形而變形。 如此，藉由將纜線載體160設在基台110的兩側方突 出片152的下方’與設置於基台110的內部的情況不同’ 罐材1 1 2 c、1 2 2 c之間或罐材1 1 2 d、1 2 2 d之間的空間的利 用自由度提高’在此可配置連結材Π8或除振組件150’ 提高剛性或制振性。且，藉由設置突出片152進一步配置 導引軌道140或永久磁鐵142，與在上部框架112的罐材 1 1 2c、1 1 2d上配置這些的情況相比，可以縮小的基台1 1 〇 的X軸方向的尺寸，可謀求降低突軌部（foot Print)的 -22- 200926345 發生。 如此，本實施例的載台裝置101中，基台110因爲是 具有上部框架112及下部框架122、及連結這些的連結材 1 1 8的盒構造，所以即使藉由罐材結構謀求輕量化，剛性 也可提高。因此’藉由高架部130的移動而承受負荷使除 振組件150下沈讓基台110傾斜，也可抑制基台110本身 的變形，使高架部130及基台11〇的相對位置的誤差非常 U 小，就可正確地處理基板。且，因爲不需要等待基台110 的變形回復至原形爲止就可進行基板的處理，所以處理量 不會下降。 且’基台110，因爲具有將基台110在水平方向分割 成複數塊體用的分割部116、126，即使隨著基板的大型 化而使基台110大型化，也不需使用特殊的大型車輛就可 將基台10分割運送。且，將構成基台110的罐材112c、 112d、122c、122d機械加工時，因爲可各分割部分分別 φ 進行，所以機械加工容易進行》 且，分割基台110的情況，基台110是由罐材構成的 話，接合面的剛性低，高架部130的驅動時有產生變形的 可能性，但是本實施例的基台110因爲是盒構造，配合上 部框架112及下部框架122中的上下的接合面的話，接合 面會增加，可以降低產生變形的可能性，成爲有利於基台 1 1 〇的分割的構造。 且，分割部116、126，因爲是將構成上部框架112 及下部框架122的罐材在上下對應位置切斷的結構，所以 -23- 200926345 設置於上部框架112及下部框架122的分割部116、126 是藉由上下方向分離，可對於讓分割面脫落的力矩進行強 化，在剛性上有利。 且，在罐材的切斷面中因爲設置向外的凸緣116a、 126a，所以被分割的塊體彼此透過向外的凸緣 116a、 126a藉由螺絲等可以容易相互連結。且，在架台170的 罐材的切斷面因爲也同樣設置向外的凸緣，所以分割的塊 體彼此可以藉由螺絲等容易連結。 且，因爲在上部框架112的框內以傾斜方向架設補強 材114c、114d，在下部框架122的框內以傾斜方向架設 補強材1 24c，所以與在框內平行架設補強材的情況相比 ，可以充分地提高基台1 1 0的剛性。 且，藉由將纜線載體160設在基台110的兩側方的突 出片152的下方，與設置於基台110的內部的情況不同， 罐材112c、122c間或罐材112d、122d間的空間的利用的 自由度提高，可在此配置連結材118或除振組件150，就 可提高剛性或制振性。且，因爲可以縮短連絡構件1 64的 Z軸方向的長度’可以降低因爲外亂的影響所造成的基台 110的振動。且’藉由設置突出片152並在此上配置導引 軌道140或永久磁鐵142，與在上部框架112的罐材112c 、112d上配置這些的情況相比，可以縮小的基台ho的 X軸方向的尺寸’可謀求降低突軌部（foot print )的發生 〇 且’載台裝置101，因爲具備隔著除振組件150支撐 -24- 200926345 基台110的架台170，所以可以在架台170上由除振狀態 支撐基台1 10。 且，因爲通過下部框架122的四角的凹陷119從下方 隔著除振組件150藉由支柱178支撐上部框架112的四角 ，所以可以隔著除振組件1 5 0將基台1 1 0支撐於接近重心 的更高的位置，可以抑制因爲高架部130的移動所產生的 基台110的擺動。且，因爲下部框架122作爲錘的功能， A 所以可以更抑制基台1 1 0的擺動。 0 又，雖連結材118爲口型鋼的結構且爲將上部框架 112及下部框架122由四角等連結的結構，但是連結材 118不限定於口型鋼，例如藉由板材包圍上部框架112及 下部框架1 22地連結的結構也可以。 又’本發明不限定於上述實施例，可進行各種的變形 。例如，在上述實施例中，雖説明適用高架部30、130朝 Y軸方向移動且移動部30c、13 0c朝X軸方向移動的2軸 φ 型的載台裝置1、101，但是只有高架部30、130移動的1 軸型也可適用。 且，高架部30、130或移動部30c、130c的移動，是 接觸型、非接觸型的任一種也可以。 【圖式簡單說明】 [第1圖]本發明的第1實施例的載台裝置的立體圖。 [第2圖]將具備第1圖的載台裝置的基台從上方所見 的立體圖。 -25- 200926345 [第3圖]將基台從下方所見的立體圖。 [第4圖]連結有連結材的基台的下部框架是被支撐在 除振組件的狀態的立體圖。 [第5圖]將工件壓板組裝於第1圖的載台裝置的立體 圖。 [第6圖]顯示分割部的前視圖。 [第7圖]顯示纜線載體的配置的部分擴大圖。 U [第8圖]如第1圖所示的載台裝置的側面圖。 [第9圖]顯示分割部的變形例的圖。 [第10圖]本發明的第2實施例的載台裝置的立體圖 〇 [第11圖]將具備第10圖的載台裝置的基台從上方所 見的立體圖。 [第12圖]將基台從下方所見的立體圖。 [第1 3圖]將基台分割後的後側的塊體從上方所見的 φ 立體圖。 [第14圖]連結有連結材的基台的下部框架的立體圖 〇 [第15圖]顯示架台及除振組件的立體圖。 [第16圖]顯示纜線載體的配置的部分擴大圖。 [第17圖]如第1〇圖所示的載台裝置的側面圖。 【主要元件符號說明】 1 :載台裝置 -26- 200926345200926345 or Nakasaka is the bar inside the frame of the cross frame, in the shape of the mouth-shaped steel. Here, as described above, the plurality of blocks in the longitudinal direction of the base 110 can be divided into a plurality of blocks (here, the two blocks 170 can be divided into a plurality of blocks. The Y-shaped cans 172c and 172d of the gantry 170 are In the middle of the process, the reinforcing members 174a made of the profiled steel are formed between the cans 172c and 172d which are respectively held between the front side and the rear cut portion of the divided portion 1 76, and are formed in the X-frame. Further, the profiled steel 174a is transversely extended in the X-axis direction, and a reinforcing member 174b made of a profiled steel in the Y-axis direction is formed in the frame of the gantry 170. The reinforcing member 174b is broken and a dividing portion 176 is provided. The four corners of the gantry 170 extend 178 in the Z-axis direction. The vibration-isolating assembly 150 is disposed at the end of the gantry 170 and the respective cans 172a, 172b, 172c, and 172d. The vibration-damping assembly 150 is at the four corners of the upper frame 112. Between the upper ends of the columns 178 and between the upper portions of the respective cans 172a and 172d and the cans 122c and 122d of the lower frame 122, the bases 1 10 can be supported in a vibration-removing manner. The vibration transmitted to the base is composed of an elastic material such as an air spring or rubber. The guide rails 140, respectively, is provided in the can material 112c, and extends in the Y-axis direction. In more detail, then, using cross-sectional view of the tank in the horizontal direction? In the embodiment), and the divided portion 176 extending in the axial direction of the stage. In the frame of the side block, in the frame on the lateral side of the direction extending, the reinforcing material is formed to extend transversely by the support of the support post 187 in the middle of the block, and in more detail, the support of the stand 1 70 172b, 172c, 122a' 122b, vibration-damping assembly 150, useable example, 1 12d upper surface 112c, 11 2d -19-200926345 are provided with a protruding piece 152 facing the outer side, the protruding piece 152 is facing Y The axial direction extends continuously. Further, a guide rail 140 is provided on the upper surface of the protruding piece 152. Further, the permanent magnet 142 is provided on the upper surface of the protruding piece 152 at a position adjacent to the outer side of the guide rail 140, and extends in the Y-axis direction. This permanent magnet 142 is a predetermined mode in which the S pole and the N pole are returned in the Y-axis direction. Above the guide rail 140 and the permanent magnet 142, a coupling plate 146 that is coupled to a lower portion of both sides of the elevated portion 1300 extending in the X-axis direction is disposed, and the lower surface of the connecting plate 146 is adjacently disposed. The sliding member 144 and the electromagnet 148»electromagnet 148 are mode-changing magnetic poles that match the S pole and the N pole of the permanent magnet 142, and the elevated portion 130 can be guided by the opposing force generated between the permanent magnets 142. The track 140 guides the side while moving in the Y-axis direction. Further, on the lower surface of the protruding piece 152, the plurality of reinforcing ribs 154 which are stretched between the outer side faces of the can bodies 112c and 112d are provided at intervals of a predetermined φ in the Y-axis direction. The elevated portion 130 includes a support portion 130a extending in the X-axis direction, a linear motor portion 130b, and a moving portion 130c. The moving portion 130c can be moved in the X-axis direction along the linear motor portion 130b by the linear motor portion 130b. Further, by attaching a predetermined processing device to the moving portion 130c, the processing device is moved in the X-axis direction, and predetermined processing is performed on the substrate mounted on the base 110. The processing apparatus may be a camera that inspects defects on the substrate, a maintenance device that repairs the surface treatment state of the substrate such as a color drop of the color filter, and an application device that performs pattern processing on the substrate. -20-200926345 In the same manner as in the first embodiment, the base 110 of the stage device 101 is provided with a workpiece pressing plate (not shown) for mounting a substrate such as a liquid crystal panel. Further, when the stage device 101 is transported by the transport vehicle, it is stowed in the transport vehicle with the workpiece presser plate installed. In the present embodiment, as shown in Fig. 10, the "base 11", the guide rail 140, the permanent magnet 142, the protruding piece 152, the gantry 170, and the workpiece pressing plate are divided in a dividing plane perpendicular to the Y-axis direction. Further, the divided base 110 is connected to the divided portions 116 and 126 by screws or the like. Further, a base 110p which is divided by a plurality of reinforcing ribs 15.4 which are spanned between the outer surfaces of the cans 112c and 1 1 2d is provided on the lower surface of the protruding piece 152, and is also connected by the reinforcing ribs 1 54. Here, in the case of the conventional platform structure, if it is desired to divide, it is necessary to provide the flange for connection so as to protrude toward the side surface of the platform, and the size in the lateral direction becomes large, but in the present embodiment, Since the reinforcing ribs 154 or the divided portions 116 and 126 can be prevented from projecting more laterally than the protruding pieces 152, it is possible to suppress an increase in size. As described above, since the base 10, the guide rail 140, the permanent magnet 142, the protruding piece 152, the gantry 170, and the workpiece pressing plate are separable in the Y-axis direction, the stage device 1Ό1 can be divided into two blocks. Further, the division portions 116, 126, and 176 are provided at the corresponding positions in the upper and lower Z-axis directions. Therefore, the blocks in the Y-axis direction are formed at positions that can be carried on the transport vehicle. Further, below the protruding pieces 152 on both sides of the base 110, as shown in Figs. 10 and 16, a cable carrier 160 is provided. In the elevated portion 130, a non-illustrated power cable for supplying power for movement for controlling the elevated portion 130 itself or the moving portions i30c - 21 - 200926345 or a processing device attached to the moving portion 130c is connected. Receive unillustrated signal cables for various signals. These cables are wired through the cable carrier 160. The cable carrier 160 is a flat plurality of cylindrical members, and the respective cylindrical members are rotatably coupled at mutually restricted angles. The assembled cable is passed through the interior of the cable carrier 160. One end 160a of the cable carrier 160 is fixed to a support table 162 provided on the side of the base 110. Moreover, the other end 160b of the 0 cable carrier 160 is fixed to the contact member 164. The contact member 164 is a tubular member and is coupled to the elevated portion 130 and the cable carrier 160 to guide the cable from the cable carrier 160 to the elevated portion 130. Therefore, as shown in Fig. 17, the cable carrier 160 The crawler belt (registered trademark) can be deformed freely, and can be bent in a U shape at an arbitrary position in the longitudinal direction of the base 110 as the elevated portion 130 moves in the Y-axis direction. Moreover, the cable passing through the inside of the cable carrier 160 is deformed along the deformation of the φ cable carrier 160. Thus, by providing the cable carrier 160 under the both side protruding pieces 152 of the base 110, 'the case is different from the case of being disposed inside the base 110', between the cans 1 1 2 c, 1 2 2 c or The degree of freedom of use of the space between the cans 1 1 2 d and 1 2 2 d is improved. Here, the connecting material 8 or the vibration isolating assembly 150' can be arranged to improve rigidity or vibration damping. Further, the guide rail 140 or the permanent magnet 142 is further disposed by providing the protruding piece 152, and the base 1 1 can be reduced as compared with the case where the above-described cans 1 1 2 2c and 1 1 2d of the upper frame 112 are disposed. The size of the X-axis direction can be reduced by the occurrence of the foot print (-22-200926345). As described above, in the stage device 101 of the present embodiment, since the base 110 has the box structure of the upper frame 112 and the lower frame 122 and the connecting member 1 18 that connects these, the weight of the can material structure is reduced. The rigidity can also be increased. Therefore, 'the load is relieved by the movement of the elevated portion 130, and the vibration isolating assembly 150 is sunk to tilt the base 110, and the deformation of the base 110 itself can be suppressed, so that the relative position error between the elevated portion 130 and the base 11 is very small. The substrate can be processed correctly. Further, since the processing of the substrate can be performed without waiting for the deformation of the base 110 to return to the original shape, the amount of processing does not decrease. Further, since the base 110 has the divided portions 116 and 126 for dividing the base 110 into a plurality of blocks in the horizontal direction, even if the base 110 is enlarged in size as the size of the substrate increases, it is not necessary to use a special large-sized one. The vehicle can be divided and transported by the base 10 . Further, when the cans 112c, 112d, 122c, and 122d constituting the base 110 are machined, since the divided portions can be respectively φ, the machining can be easily performed, and when the base 110 is divided, the base 110 is composed of In the case of the can material, the rigidity of the joint surface is low, and the overhang portion 130 may be deformed during driving. However, the base 110 of the present embodiment has a box structure and fits the upper and lower joints of the upper frame 112 and the lower frame 122. In the case of a surface, the joint surface is increased, and the possibility of deformation is reduced, and the structure which contributes to the division of the base 1 1 〇 is obtained. Further, since the divided portions 116 and 126 are configured to cut the cans constituting the upper frame 112 and the lower frame 122 at the upper and lower corresponding positions, -23-200926345 is provided in the divided portions 116 of the upper frame 112 and the lower frame 122, 126 is separated by the vertical direction, and it is possible to strengthen the moment at which the divided surface is detached, which is advantageous in rigidity. Further, since the outward flanges 116a and 126a are provided in the cut surface of the can material, the divided blocks are transmitted through the outward flanges 116a and 126a so as to be easily coupled to each other by screws or the like. Further, since the outwardly facing flange is also provided on the cut surface of the can material of the gantry 170, the divided blocks can be easily coupled to each other by screws or the like. Further, since the reinforcing members 114c and 114d are placed in the inclined direction in the frame of the upper frame 112, the reinforcing members 14c are placed in the inclined direction in the frame of the lower frame 122. Therefore, compared with the case where the reinforcing members are placed in parallel in the frame, The rigidity of the base 110 can be sufficiently increased. Further, by providing the cable carrier 160 under the protruding pieces 152 on both sides of the base 110, unlike the case of being disposed inside the base 110, between the cans 112c, 122c or between the cans 112d, 122d The degree of freedom of use of the space is improved, and the connection member 118 or the vibration isolating unit 150 can be disposed therein to improve rigidity or vibration damping. Further, since the length ' of the contact member 1 64 in the Z-axis direction can be shortened', the vibration of the base 110 due to the influence of the disturbance can be reduced. And by providing the protruding piece 152 and arranging the guide rail 140 or the permanent magnet 142 thereon, the X axis of the base ho which can be reduced can be reduced as compared with the case where these are arranged on the cans 112c and 112d of the upper frame 112. The size of the direction can be reduced to reduce the occurrence of a foot print, and the 'stage device 101' can be mounted on the gantry 170 because it has a gantry 170 that supports the base station 110 from the -24 to 200926345 via the vibration-isolating assembly 150. The base 1 10 is supported by the vibration-removing state. Moreover, since the four corners of the upper frame 112 are supported by the pillars 178 from the lower side through the recesses 119 of the lower frame 122, the bases 110 can be supported close to each other via the vibration removing assembly 150. The higher position of the center of gravity can suppress the swing of the base 110 due to the movement of the elevated portion 130. Moreover, since the lower frame 122 functions as a hammer, A can suppress the swing of the base 110. Further, the connecting member 118 has a structure of a profiled steel and has a structure in which the upper frame 112 and the lower frame 122 are connected by four corners or the like. However, the connecting member 118 is not limited to the profiled steel, and the upper frame 112 and the lower frame are surrounded by, for example, a plate member. The structure of 1 22 ground connection is also possible. Further, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above-described embodiment, the two-axis φ type stage devices 1 and 101 in which the elevated portions 30 and 130 move in the Y-axis direction and the moving portions 30c and 130c move in the X-axis direction are applied, but only the overhead portion is provided. The 30-130 moving 1-axis type is also applicable. Further, the movement of the elevated portions 30, 130 or the moving portions 30c, 130c may be either a contact type or a non-contact type. BRIEF DESCRIPTION OF THE DRAWINGS [FIG. 1] A perspective view of a stage device according to a first embodiment of the present invention. [Fig. 2] A perspective view of a base including the stage device of Fig. 1 as seen from above. -25- 200926345 [Fig. 3] A perspective view of the abutment seen from below. [Fig. 4] A perspective view of a lower frame to which a base of a connecting material is connected is supported by a vibration isolating module. Fig. 5 is a perspective view showing the assembly of the workpiece presser in the stage device of Fig. 1. [Fig. 6] A front view showing the divided portion. [Fig. 7] A partially enlarged view showing the arrangement of the cable carrier. U [Fig. 8] A side view of the stage device shown in Fig. 1. [Fig. 9] A view showing a modification of the divided portion. [Fig. 10] Fig. 10 is a perspective view of a stage device according to a second embodiment of the present invention. [Fig. 11] A perspective view of a base including the stage device of Fig. 10 is seen from above. [Fig. 12] A perspective view of the base seen from below. [Fig. 1 3] A φ perspective view of the block on the rear side after the base is divided from above. [Fig. 14] A perspective view of a lower frame of a base to which a connecting material is connected. [Fig. 15] A perspective view showing the gantry and the vibration isolating assembly. [Fig. 16] A partially enlarged view showing the arrangement of the cable carrier. Fig. 17 is a side view of the stage device shown in Fig. 1 . [Main component symbol description] 1 : Stage device -26- 200926345
1 ο ·基台 1 1 :工件壓板 12 :上部框架 1 2a :罐材 1 2b :罐材 1 2c :罐材 1 2d :罐材 1 4 a :補強材 1 4 b :補強材 1 4 c :補強材 1 4 d :補強材 1 6 :分割部 1 6 a :向外凸緣 1 8 :連結材 22 :下部框架 22a :罐材 22b :罐材 22c :罐材 22d :罐材 2 4 b :補強材 26 :分割部 2 6 a :向外凸緣 3 0 :高架部 3 0 a :支撐部 -27 200926345 3 0 b :線形馬達部 30c :移動部 40 :導引軌道 42 :永久磁鐵 44 :導引滑件 4 6 :連結板 48 :電磁鐵1 ο · Base table 1 1 : Workpiece pressure plate 12 : Upper frame 1 2a : Can material 1 2b : Can material 1 2c : Can material 1 2d : Can material 1 4 a : Reinforcing material 1 4 b : Reinforcing material 1 4 c : Reinforcing material 1 4 d : reinforcing material 16: dividing portion 1 6 a : outer flange 18: connecting material 22: lower frame 22a: can 22b: can 22c: can 22d: can 2 4 b : Reinforcing material 26: dividing portion 2 6 a : outer flange 3 0 : elevated portion 3 0 a : support portion -27 200926345 3 0 b : linear motor portion 30c : moving portion 40 : guide rail 42 : permanent magnet 44 : Guide slider 4 6 : link plate 48 : electromagnet
5 0 :除振組件 52 :突出片 54 :補強肋 60 :纜線載體 60a: — 端 60b :另一端 62 :支撐台 6 4 :連絡構件 74b :盤 1 0 1 :載台裝置 1 1 0 :基台 1 1 2 :上部框架 112a :罐材 112b :罐材 112c :罐材 122d :罐材 1 1 4 a :補強材 -28 200926345 1 14b :補強材 114c :補強材 1 1 4d :補強材 116： 分割部 1 16a :向外凸緣 118： 連結材 119： 凹陷 赢 122 : ❹ 下部框架 122a :罐材 122b :罐材 122c :罐材 1 22d :罐材 124a :補強材 124b :補強材 124c :補強材 〇 126 : 分割部 130 ： 高架部 130a :支撐部 130b :線形馬達部 130c =移動部 140 ： 導引軌道 142 ： 永久磁鐵 144 ： 導引滑件 146 ： 連結板 -29- 20092634550: vibration-removing assembly 52: protruding piece 54: reinforcing rib 60: cable carrier 60a: - end 60b: other end 62: support table 6 4: contact member 74b: disk 1 0 1 : stage device 1 1 0 : Base 1 1 2 : upper frame 112a : can material 112b : can material 112c : can material 122d : can material 1 1 4 a : reinforcing material -28 200926345 1 14b : reinforcing material 114c : reinforcing material 1 1 4d : reinforcing material 116 : Division part 1 16a : Outer flange 118 : Connection material 119 : Sag win 122 : 下部 Lower frame 122a : Can material 122b : Can material 122c : Can material 1 22d : Can material 124a : Reinforcing material 124b : Reinforcing material 124c : Reinforcing material 〇 126 : dividing portion 130 : elevated portion 130 a : supporting portion 130 b : linear motor portion 130 c = moving portion 140 : guiding rail 142 : permanent magnet 144 : guiding slider 146 : connecting plate -29 - 200926345
1 1 1 1 1 1 1 1 1 1 1 1 1 1 ❹ 1 1 1 1 電磁鐵 電磁鐵 除振組件 突出片 補強肋 纜線載體 :一端 : 另一端 支撐台 連絡構件 架台 :罐材 :罐材 :罐材 :罐材 :補強材 :補強材 分割部 支柱 -301 1 1 1 1 1 1 1 1 1 1 1 1 1 ❹ 1 1 1 1 Electromagnet electromagnet vibration-removing component protruding piece reinforcing rib cable carrier: one end: the other end support table connecting member frame: can: material: Cans: Cans: Reinforcing materials: Reinforcement division section pillars-30