CN101459103A - Stage apparatus - Google Patents

Stage apparatus Download PDF

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Publication number
CN101459103A
CN101459103A CNA2008100870894A CN200810087089A CN101459103A CN 101459103 A CN101459103 A CN 101459103A CN A2008100870894 A CNA2008100870894 A CN A2008100870894A CN 200810087089 A CN200810087089 A CN 200810087089A CN 101459103 A CN101459103 A CN 101459103A
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CN
China
Prior art keywords
base station
mentioned
upper frame
frame
tank component
Prior art date
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Granted
Application number
CNA2008100870894A
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Chinese (zh)
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CN101459103B (en
Inventor
吉田达矢
中森靖仁
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Sumitomo Heavy Industries Ltd
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Sumitomo Heavy Industries Ltd
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Publication of CN101459103A publication Critical patent/CN101459103A/en
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Publication of CN101459103B publication Critical patent/CN101459103B/en
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Abstract

The present invention provides a stage apparatus to precisely process a substrate on a base stand without lowering its throughput, by heightening rigidity of the base stand. The stage apparatus 1 includes the base stand 10, a gantry part 30 mounted movably on the base stand 10, and a vibration isolating unit 50 to support the base stand 10. The base stand 10 includes an upper frame 12 formed by connecting can materials in a frame shape, a lower frame 22 formed by connecting can materials in a frame shape and arranged vertically apart from the upper frame 12, and a connecting member 18 to connect the upper frame 12 and the lower frame 22.

Description

Table apparatus
Technical field
The present invention relates to have table apparatus in the stand portion that base station upper edge one direction of principal axis that is equipped with substrate moves.
Background technology
In the past, as the table apparatus that uses in the manufacturing of the various substrates of liquid crystal panel or semiconductor etc. etc., known had a for example disclosed device in patent documentation 1.This table apparatus possesses the base station of the system jar structure that tank component is linked with the frame shape and make up, a pair of guide shoe and the beam of crossbearer between a pair of guide shoe that is located at the pair of guide rails of the both sides of base station, is directed along these guide rails.Beam moves along guide rail, by carrying that camera on this beam and apparatus for correcting etc. detect the defective of substrate and with its reparation.Base station shakes unit supports on pallet via removing.In addition, base station is erected at the reinforcement jar reinforcement in the frame abreast.
[patent documentation 1] TOHKEMY 2006-269509 communique
But, in the base station of above-mentioned system jar structure in the past, strengthen jar even be provided with, rigidity is also not enough, move to when right-hand so for example move to carrying objects such as nearside and camera along guide rail, on base station, produce the distortion of tens micron levels, so that the nearside right corner of base station is subsided at beam.Therefore,, in the relative position of carrying object and base station, also can produce error, can not correctly carry out the processing of substrate corresponding to the deflection of this base station even make the carrying object of camera etc. move correct distance.At this moment, if the processing of retardation substrate is got back to original state up to the distortion of base station, the possibility that then has production capacity to descend significantly.
Summary of the invention
The present invention In view of the foregoing makes, purpose provide a kind of by improving base station rigidity, can not reduce production capacity and on base station the table apparatus of treatment substrate correctly.
Relevant table apparatus of the present invention is to possess base station, can and support the table apparatus that removes the unit that shakes of above-mentioned base station along a stand (ガ Application ト リ) that is provided with moving axially on above-mentioned base station.Above-mentioned base station has: upper frame links tank component and makes up with the frame shape; Lower frame links tank component and makes up with the frame shape, leave up and down and be provided with above-mentioned upper frame; And the binding parts, above-mentioned upper frame and above-mentioned lower frame are linked.
In this table apparatus, because base station has upper frame and lower frame, and it is linked with linking parts, made so-called box structure, so although constitute and realize lightweight also having improved rigidity by tank component.Therefore, even because of the mobile load that applies of stand removes the unit sinking of shaking, base station inclination, by suppressing the distortion of base station self, the error of the relative position of stand and base station is also very little, can carry out the correct processing of substrate.In addition, owing to do not need the processing delay of substrate is restored to the original state up to the distortion of base station, so can not reduce production capacity yet.
Its feature also can be that table apparatus possesses the pallet that removes the above-mentioned base station of unit supports that shakes via above-mentioned.If like this, then can on pallet, support base station to remove the state that shakes.
Its feature also can be that the profile of above-mentioned upper frame is rectangular-shaped; Above-mentioned lower frame is along the profile of above-mentioned upper frame and four corner recess rectangular-shaped; Above-mentioned pallet has four jiaos pillar along the rectangular-shaped framework of the profile of above-mentioned upper frame and four jiaos depression by above-mentioned lower frame from the above-mentioned upper frame of supported underneath; The above-mentioned unit that shakes that removes is located between the upper end of four jiaos of above-mentioned upper frame and above-mentioned pillar at least.Like this, then can support base station in higher position, so can suppress the swing of moving the base station that produces because of stand via removing the unit that shakes near center of gravity.In addition, bring into play function as weight, can further suppress the swing of base station by lower frame.
Its feature also can be, above-mentioned base station has and is used for this base station along continuous straight runs is divided into a plurality of cutting part.Like this, base station maximizes even be accompanied by the maximization of substrate, also can not use special oversize vehicle and base station is cut apart conveying.
Its feature also can be, above-mentioned cutting part is that the tank component that will constitute above-mentioned upper frame and above-mentioned lower frame cuts off in corresponding up and down position and constitutes.Like this, owing to the cutting part that is located on upper frame and the lower frame leaves along the vertical direction, so aspect rigidity, be favourable.
Its feature also can be to be provided with the flange towards foreign side on the section of above-mentioned tank component.Like this, then the piece of cutting apart easily can be linked via the flange towards foreign side each other.
Its feature also can be, at least one frame of above-mentioned upper frame and above-mentioned lower frame, along inclined direction set up strengthening part.Like this, compare the rigidity that can improve base station fully with the situation of in frame, setting up strengthening part abreast.That is, can improve the torsional rigid that reverses of contingent base station under the situation that stand and its loading device move simultaneously.
According to the present invention, rigidity by improving base station can be provided, can not reduce production capacity and on base station the table apparatus of treatment substrate correctly.
Description of drawings
Fig. 1 is the stereogram of the table apparatus of relevant the 1st execution mode of the present invention of expression.
Fig. 2 is a stereogram of observing the base station that the table apparatus of Fig. 1 possesses from the top.
Fig. 3 is the stereogram from the beneath base station.
Fig. 4 is that the expression binding has the lower frame of the base station that links parts to be supported on the stereogram that removes the state on the unit that shakes.
Fig. 5 is Dinged Disk with workpiece die holder () be arranged on the stereogram in the table apparatus shown in Figure 1.
Fig. 6 is the front view of expression cutting part.
Fig. 7 is the part enlarged drawing of the configuration of expression cable carriage (ケ-Block Le キ ャ リ ア).
Fig. 8 is the end view of table apparatus shown in Figure 1.
Fig. 9 is the figure of the variation of expression cutting part.
Figure 10 is the stereogram of the table apparatus of relevant the 2nd execution mode of the present invention of expression.
Figure 11 is a stereogram of observing the base station that the table apparatus of Figure 10 possesses from the top.
Figure 12 is the stereogram from the beneath base station.
Figure 13 is a stereogram of observing the piece of the rear side of having cut apart base station from the top.
Figure 14 is the stereogram of lower frame that expression has linked the base station of parts.
Figure 15 is expression pallet and the stereogram that removes the unit that shakes.
Figure 16 is the part enlarged drawing of the configuration of expression cable carriage.
Figure 17 is the end view of table apparatus shown in Figure 10.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.In addition, in the description of the drawings, give identical label and the repetitive description thereof will be omitted for identical key element.
[the 1st execution mode]
Fig. 1 is the stereogram of the table apparatus 1 of relevant the 1st execution mode of the present invention of expression, Fig. 2 is a stereogram of observing the base station that the table apparatus 1 of Fig. 1 possesses from the top, Fig. 3 is the stereogram from the beneath base station, and Fig. 4 is that the expression binding has the lower frame of the base station that links parts to be supported on the stereogram that removes the state on the unit that shakes.
As shown in Figure 1, table apparatus 1 possesses the base station 10 that is equipped with substrate, in the stand portion 30 that moves on the base station 10, be located on the base station 10, the guide rail 40 and the permanent magnet 42 that move of guiding stand portion 30 and be located at stand portion 30 the bottom, be subjected to guide rail 40 guiding guide shoe 44 and with permanent magnet 42 opposed electromagnet 46, be the structure that this stand portion 30 moves along guide rail 40.In addition, in Fig. 1, the length direction of establishing base station 10 is a Y direction, and the horizontal direction of establishing with its quadrature is an X-direction, and the direction of establishing with they quadratures is a Z-direction.
Base station 10 has upper frame 12, leaves the lower frame 22 of setting and the binding parts 18 that upper frame 12 and lower frame 22 are linked up and down with upper frame 12.
Upper frame 12 is that the inboard that tank component 12a, the 12b by will be by will extending along X-direction with a plurality of strengthening part 14a, 14b, 14c, 14d, the tank component 12c, the 12d that extend along Y direction link the rectangular-shaped framework that forms is respectively strengthened constituting.Here, tank component 12a, 12b, 12c, 12d are the bars of hollow, use the shape of the mouth as one speaks steel of cross section as the mouth shape in the present embodiment.In addition, strengthening part 14a, 14b, 14c, 14d hollow, solid can, be the bar of crossbearer in the inboard of framework, use the cross section to be the I-steel of I-shaped shape and cross section shape of the mouth as one speaks steel in the present embodiment as the mouth shape.
Here, narration in detail in the back, base station 10 can divided in horizontal direction along its length be a plurality of (they being two here), the tank component 12c, the 12d that extend along the Y direction of upper frame 12 are cut off halfway, and are provided with cutting part 16.And for clipping cutting part 16 each piece at front side and rear side, crossbearer has the strengthening part 14a that is made of shape of the mouth as one speaks steel between tank component 12c, the 12d of cut-off parts, so that it extends along X-direction.
And in the frame of the rear side that is formed by tank component 12a, tank component 12c, 12d and strengthening part 14a, the strengthening part 14b that is made of I-steel is parallel to tank component 12c, 12d and sets up, and is parallel to tank component 12a and strengthening part 14a sets up.In addition, the strengthening part 14c that constitutes by I-steel with respect to tank component 12a, 12c, 12d and strengthening part 14a obliquely with to the horn shape crossbearer.Therefore, strengthening part 14b, 14c a bit intersect central authorities, become from here with the state of radial extension.
In addition, in the frame of the nearside that is formed by tank component 12c, 12d, tank component 12b and strengthening part 14a, the strengthening part 14d that is made of I-steel is with respect to tank component 12b, 12c, 12d and strengthening part 14a crossbearer obliquely.
Lower frame 22 is by strengthening constituting by tank component 22a, the 22b that will extend along X-direction with along the inboard that tank component 22c, 22d that Y direction is extended link the rectangular-shaped framework that forms respectively with strengthening part 24b.Make the diameter of tank component 22a, 22b, 22c, 22d littler than tank component 12a, 12b, 12c, the 12d of upper frame 12.The strengthening part 24b that is made of shape of the mouth as one speaks steel is along the central portion of X-direction crossbearer at the length direction of tank component 22c, 22d.
Here, as mentioned above, base station 10 can divided in horizontal direction along its length be a plurality of (being two here), and the tank component 22c, the 22d that extend along the Y direction of lower frame 22 are cut off halfway, and are provided with cutting part 26.
Linking parts 18 links upper frame 12 and lower frame 22 under the state that leaves along Z-direction.In the present embodiment, link parts 18 and constitute by the tank component that constitutes by shape of the mouth as one speaks steel, and with upper frame 12 and 22 4 jiaos of bindings of lower frame.And then, in order to improve rigidity, between tank component 12c, 22c up and down,, set up the binding parts 18 that constitute by shape of the mouth as one speaks steel, so that it extends along Z-direction at the nearside of cutting part 16,26.In addition, between tank component 22d, 22d up and down,, set up the binding parts 18 that constitute by shape of the mouth as one speaks steel, so that it extends along Z-direction at the nearside of cutting part 16,26.
Removing the unit 50 that shakes is located between the face that is provided with and base station 10 that table apparatus 1 is set.More particularly, remove and shake unit 50, can remove and support base station 10 with shaking in four jiaos and the bottom midway of tank component 22c, 22d of lower frame 22.Remove the unit 50 that shakes and be from the unit that vibration that face is delivered to base station 10 is removed is set, the structure that for example can use the elastomeric element by air spring or rubber etc. to constitute.
Guide rail 40 is located at the upper surface of tank component 12c, 12d respectively, and extends along Y direction.More particularly, at the upper surface of tank component 12c, 12d, the side is provided with and stretches out sheet 52 outward, and this stretches out sheet 52 and extends continuously along Y direction.And, be provided with guide rail 40 at this upper surface that stretches out sheet 52.In addition, permanent magnet 42 is adjacent to be located on the position in outside upper surface, guide rail 40 of stretching out sheet 52, extends along Y direction.This permanent magnet 42 is the parts that repeat the prescribed model of the S utmost point and the N utmost point on Y direction.
Above guide rail 40 and permanent magnet 42, dispose the web 46 that is attached to along the bottom of the both sides of the stand portion 30 that X-direction is extended, at the lower surface of this web 46, be adjacent to be provided with guide shoe 44 and electromagnet 48 respectively.Electromagnet 48 makes magnetic pole cooperate the pattern of the S utmost point of permanent magnet 42 and the N utmost point and changes, by and permanent magnet 42 between produce repulsive force, while can use guide rail 40 to guide to make stand portion 30 to move along Y direction.
In addition, at the lower surface that stretches out sheet 52, along Y direction with predetermined distance be provided be erected at and the lateral surface of tank component 12c, 12d between a plurality of reinforcements 54.
Stand portion 30 possesses support portion 30a, the 30b of linear motor portion and the moving part 30c that extends along X-direction.Moving part 30c can move to X-direction at the 30b of this linear motor portion of the effect lower edge of linear motor part 30b.And by set up the predetermined process device in this moving part 30c, processing unit moves along X-direction, the processing that the substrate that carries on base station 10 is put rules into practice.As this processing unit, can be check the camera of the defective on the substrate or repair coloured filter decolouring etc. substrate surface treatment state apparatus for correcting or substrate is carried out the applying device etc. of layout process.
As shown in Figure 5, on the base station 10 of table apparatus 1, be provided with and be used for the workpiece die holder 11 of substrate of mounting liquid crystal panel etc.In addition, table apparatus 1 is loaded in the waggon with the state that is provided with this workpiece die holder 11 when being transferred the car conveying.
In the present embodiment, as shown in Figure 5, base station 10, guide rail 40, permanent magnet 42, stretch out sheet 52 and workpiece die holder 11 is being cut apart with the divisional plane of Y direction quadrature.And, by the base station 10 after cutting apart at cutting part 16,26 by bindings such as bolts.Promptly, on cutting part 26 (16), as shown in Figure 6, be provided with towards the flange 26a of foreign side (16a), so that it is it surrounds the section of cut tank component 22c (12c), connected to each other via the piece of this base station 10 after the flange 26a of foreign side (16a) will be cut apart.In addition, on the cutting part 16 of upper frame 12, reinforcement 54 double as are the flange 16a towards foreign side.
Like this, owing to base station 10, guide rail 40, permanent magnet 42, stretch out sheet 52 and workpiece die holder 11 and on Y direction, dividually constitute, so table apparatus 1 may be partitioned into two pieces and constitutes.In addition, cutting part 16,26 is located on the position on up and down the Z-direction, corresponding, and be formed on the Y direction, each piece becomes on the position that can be loaded in the size in the waggon.
In addition, two sides of base station 10, stretching out sheet 52 below, as Fig. 1 and shown in Figure 7, be provided with cable carriage 60.In stand portion 30, be connected with not shown electric power cable, reach not shown signal cable etc., this not shown electric power cable is supplied with the electric power that moves that is used for controlling stand portion 30 self and moving part 30c, this not shown signal cable be used for and be attached to the various signals of transmitting-receiving between the processing unit among the moving part 30c.These cables are via 60 wirings of cable carriage.
Cable carriage 60 is a plurality of flat materials to be connected to be provided with form, and each material rotates freely in the angle of restriction mutually and links.The cable that will compile leads in the inside of this cable carriage 60.One end 60a of cable carriage 60 is fixed on the brace table 62 of the side of being located at base station 10.In addition, the other end 60b of cable carriage 60 is fixed on the communication component 64.Communication component 64 is parts of tubular, is attached on stand portion 30 and the cable carriage 60, will be directed to from the cable of cable carriage 60 in the stand portion 30.
Therefore, as shown in Figure 8, cable carriage 60 is out of shape freely as crawler belt (キ ャ ピ ラ) (registered trade mark), along with stand portion 30 moves along Y direction, can be bent into U word shape on the position arbitrarily of the length direction of base station 10.And the cable profiling of inside of leading to cable carriage 60 is in the distortion of cable carriage 60 and be out of shape.
Like this, by cable carriage 60 being located at two sides of base station 10, the below of stretching out sheet 52, different with the situation in the inside that is located at base station 10, the degree of freedom that reaches the utilization in the space between tank component 12d, 22d between tank component 12c, 22c improves, can here dispose and link parts 18 or, improved rigidity and vibrationproof except that shaking unit 50.In addition, stretch out sheet 52 and arrangement guide rail 40 and permanent magnet 42 thereon by setting, compare with the situation on the tank component 12c, the 12d that they are configured in upper frame 12, can reduce the size of the X-direction of base station 10, realize reducing of overlay area (Off ッ ト プ リ Application ト).
Like this, in the table apparatus 1 of relevant present embodiment, base station 10 has upper frame 12 and lower frame 22, and it is linked with linking parts 18, has made so-called box structure, so although constituted and realized lightweight also having improved rigidity by tank component.Therefore, even because of moving of stand portion 30 applies load, to remove the unit 50 that the shakes base stations 10 that sink and tilt, by suppressing the distortion of base station 10 self, the error of the relative position of stand portion 30 and base station 10 is also very little, can carry out the correct processing of substrate.In addition, owing to do not need the processing delay of substrate to the distortion of base station 10 is returned to original state, so can not reduce production capacity.
In addition,, base station 10 is used for base station 10 along continuous straight runs are divided into a plurality of cutting part 16,26, so, also can not use special oversize vehicle and base station 10 is cut apart conveying even base station 10 maximizes along with the maximization of substrate because having.In addition, when machining constitutes tank component 12c, 12d, 22c, the 22d of base station 10, also can carry out, so can easily carry out machining according to the part after cutting apart.
In addition, under the situation that base station 10 is cut apart, if base station 10 is made of tank component, then the rigidity on composition surface is lower, when the driving of stand portion 30 strain might take place, but the base station 10 of present embodiment is a box structure, if upper frame 12 is cooperated with the composition surface up and down of lower frame 26, then the composition surface increases, so can reduce to produce the possibility of strain, becomes the structure that helps base station 10.
In addition, cutting part 16,26 constitutes owing to the tank component that will constitute upper frame 12 and lower frame 26 cuts off in corresponding up and down position, so leave along the vertical direction by the cutting part 16,26 that is located on upper frame 12 and the lower frame 22, being reinforced with respect to the moment that divisional plane is separated, is favourable aspect rigidity.
In addition, owing on the section of tank component, be provided with flange 16a, 26a, so can be with the piece after cutting apart each other via easily linking by bolt etc. towards flange 16a, the 26a of foreign side towards foreign side.
In addition, at the lower surface that stretches out sheet 52, be provided be erected at and the lateral surface of tank component 12c, 12d between a plurality of reinforcements 54, the base station 10 after cutting apart also links via this reinforcement 54.Here, under the situation that platform is in the past constructed, if need be arranged to want to cut apart then the flange that is used for linking is flown out in the side of platform, there is horizontal size to become big problem, but in the present embodiment, fly out to and stretch out the side of sheet 52 owing to can suppress reinforcement 54 and cutting part 16,26, so can suppress to maximize.
In addition, owing in the frame of upper frame 12, along inclined direction set up strengthening part 14c, 14d,, can improve the rigidity of base station 10 fully so compare with the situation that strengthening part is erected in the frame abreast.
In addition, by cable carriage 60 being located at two sides of base station 10, the below of stretching out sheet 52, different with the situation of the inside that is located at base station 10, the degree of freedom that reaches the utilization in the space between tank component 12d, 22d between tank component 12c, 22c improves, can here dispose and link parts 18 or, can improve rigidity and vibrationproof except that shaking unit 50.In addition, owing to can shorten the length of the Z-direction of communication component 64, so can reduce the vibration of the base station 10 that brings by interference.In addition, stretch out sheet 52 and guide rail 40 and permanent magnet 42 are set thereon by setting, compare with the situation on the tank component 12c, the 12d that they are configured in upper frame 12, can reduce the size of the X-direction of base station 10, can realize reducing of overlay area.
In addition,, only in the frame of upper frame 12, along inclined direction be provided with strengthening part here, but also strengthening part can be set along inclined direction in the frame of lower frame 22.
In addition, make with link parts 18 usefulness shape of the mouth as one speaks steel constitute, with upper frame 12 and lower frame 22 structure bindings such as four jiaos, be not limited to shape of the mouth as one speaks steel but link parts 18, also can make by sheet material upper frame 12 and lower frame 22 are surrounded the structure that links fully.
In addition, as shown in Figure 9, also the flange 26a towards foreign side towards the cutting part 26 of the flange 16a of foreign side and lower frame 22 of the cutting part 16 of upper frame 12 can be made of one structure.If like this, then can further improve the rigidity of base station 10.
[the 2nd execution mode]
Then, the 2nd execution mode of the present invention is described.In addition, give identical label for the key element identical and the repetitive description thereof will be omitted with above-mentioned the 1st execution mode.
Figure 10 is the side view of the table apparatus 101 of relevant the 2nd execution mode of the present invention of expression, Figure 11 is a stereogram of observing the base station 110 that the table apparatus 101 of Figure 10 possesses from the top, Figure 12 is the stereogram from beneath base station 110, Figure 13 is a stereogram of observing the piece of the rear side of having cut apart base station 110 from the top, Figure 14 is the stereogram of lower frame 122 that expression has linked the base station 110 of parts 118, and Figure 15 is an expression pallet 170 and except that the stereogram of the unit 150 that shakes.
The 2nd execution mode point different with the 1st execution mode is to support base station 110 this point and therefore changed the structure this point of base station 110 by pallet 170.
As shown in figure 10, table apparatus 101 possesses the base station 110 that is equipped with substrate, in the stand portion 130 that moves on the base station 110, be located on the base station 110, the guide rail 140 and the permanent magnet 142 that move of guiding stand portion 130 and be located at stand portion 130 the bottom, be subjected to guide rail 140 guiding guide shoe 144 and with permanent magnet 142 opposed electromagnet 146, be the structure that this stand portion 130 moves along guide rail 140.In addition, in Figure 10, the length direction of establishing base station 110 is a Y direction, and the horizontal direction of establishing with its quadrature is an X-direction, and the direction of establishing with they quadratures is a Z-direction.
Base station 110 has upper frame 112, leaves the lower frame 122 of setting and the binding parts 118 that upper frame 112 and lower frame 122 are linked up and down with upper frame 112.
Upper frame 112 is that the inboard that tank component 112a, the 112b by will be by will extending along X-direction with a plurality of strengthening part 114a, 114b, 114c, 114d, the tank component 112c, the 112d that extend along Y direction link the rectangular-shaped framework that forms is respectively strengthened constituting.Here, tank component 112a, 112b, 112c, 112d are the bars of hollow, in the present embodiment, use the shape of the mouth as one speaks steel of cross section as the shape of the mouth as one speaks.In addition, strengthening part 114a, 114b, 114c, 114d hollow, solid can, be the bar of crossbearer in the inboard of framework, use the cross section to be the I-steel of I-shaped shape and cross section shape of the mouth as one speaks steel in the present embodiment as the mouth shape.
Here, narration in detail in the back, base station 110 can divided in horizontal direction along its length be a plurality of (they being two here), the tank component 112c, the 112d that extend along the Y direction of upper frame 112 are cut off halfway, are provided with cutting part 116.And for clipping cutting part 116 each piece at front side and rear side, crossbearer has the strengthening part 114a that is made of shape of the mouth as one speaks steel between tank component 112c, the 112d of cut-off parts, so that it extends along X-direction.
And, in the frame of the nearside that forms by tank component 112a, tank component 112c, 112d and strengthening part 114a, the strengthening part 114b that is made of I-steel is parallel to tank component 112c, 112d and sets up, and is parallel to tank component 112a and strengthening part 114a sets up.In addition, the strengthening part 114c that constitutes by I-steel with respect to tank component 112a, 112c, 112d and strengthening part 114a obliquely with to the horn shape crossbearer.Therefore, strengthening part 114b, 114c a bit intersect central authorities, become from here with the state of radial extension.
In addition, in the frame of the rear side that is formed by tank component 112c, 112d, tank component 112b and strengthening part 114a, the strengthening part 114d that is made of I-steel is with respect to tank component 112b, 112c, 112d and strengthening part 114a crossbearer obliquely.
Lower frame 122 is by strengthening constituting by the inboard that links the rectangular-shaped framework that tank component 122a, 122b that extends along X-direction and tank component 122c, the 122d that extends along Y direction form respectively with a plurality of strengthening part 124a, 124b, 124c.Make the diameter of tank component 122a, 122b, 122c, 122d littler than tank component 112a, 112b, 112c, the 112d of upper frame 12.
Here, as mentioned above, base station 110 can divided in horizontal direction along its length be a plurality of (being two here), and the tank component 122c, the 122d that extend along the Y direction of lower frame 122 are cut off halfway, are provided with cutting part 126.And, the piece of the nearside of cutting part 126, crossbearer has the strengthening part 124a that is made of shape of the mouth as one speaks steel between tank component 122c, the 122d of cut-off parts, so that it extends along X-direction.
In addition, in the frame of the nearside that forms by tank component 122a, tank component 122c, 122d and strengthening part 124a, the strengthening part 124b that is made of I-steel is parallel to tank component 122c, 122d and sets up, and is parallel to tank component 122a and strengthening part 124a sets up.In addition, the strengthening part 124c that constitutes by I-steel with respect to tank component 122a, 122c, 122d and strengthening part 124a obliquely with to the horn shape crossbearer.Therefore, strengthening part 124b, 124c a bit intersect central authorities, become from here with the state of radial extension.
In addition, lower frame 122 is the essentially rectangular shapes that cave in around the profile of upper frame 112, and by this depression 119, the pillar 178 of pallet 170 described later is from four jiaos of supported underneath upper frame 112.
Linking parts 118 links upper frame 112 and lower frame 122 under the state that leaves along Z-direction.In the present embodiment, link parts 118 and constitute, upper frame 112 and lower frame 122 are linked near four jiaos by the tank component that constitutes by shape of the mouth as one speaks steel.
Pallet 170 is by strengthening constituting by the inboard that links the rectangular-shaped framework that tank component 172a, 172b that extends along X-direction and tank component 172c, the 172d that extends along Y direction form respectively with a plurality of strengthening part 174a, 174b as shown in figure 15. Tank component 172a, 172b, 172c, 172d are the bars of hollow, use the shape of the mouth as one speaks steel of cross section mouth shape in the present embodiment.In addition, strengthening part 174a, 174b hollow, solid can, be the bar of crossbearer in the inboard of framework, use the shape of the mouth as one speaks steel of cross section in the present embodiment as the mouth shape.
Here, as mentioned above, base station 110 can divided in horizontal direction along its length be a plurality of (being two here), and meanwhile, pallet 170 also can be divided into a plurality of.The tank component 172c, the 172d that extend along the Y direction of pallet 170 are cut off halfway, and are provided with cutting part 176.And on the piece of nearside that clips cutting part 176 and rear side, crossbearer has the strengthening part 174a that is made of shape of the mouth as one speaks steel between tank component 172c, the 172d of cut-out portion, so that it extends along X-direction.In addition, in the frame of nearside, going back crossbearer has the strengthening part 174a that is made of shape of the mouth as one speaks steel, so that it extends along X-direction.In addition, in the frame of pallet 170, crossbearer has the strengthening part 174b that is made of shape of the mouth as one speaks steel, so that it extends along Y direction.This strengthening part 174b is cut off halfway, and is provided with cutting part 176.
Four jiaos at pallet 170 are provided with pillar 178, so that it extends along Z-direction.Removing the unit 150 that shakes is located on the upper end of pillar 178 of pallet 170 and each tank component 172a, 172b, 172c, the 172d.More particularly, remove the unit 150 that shakes can be except that supporting base station 110 between tank component 122a, the 122b of between the upper end of the pillar 178 of four jiaos of upper frame 112 and the pallet 170 and top midway of each tank component 172a, 172b, 172c, 172d and lower frame 122,122c, 122d with shaking.Remove the unit 150 that shakes and be from the unit that vibration that face is delivered to base station 110 is removed is set, the structure that for example can use the elastomeric element by air spring or rubber etc. to constitute.
Guide rail 140 is located at the upper surface of tank component 112c, 112d respectively, extends along Y direction.More particularly, at the upper surface of tank component 112c, 112d, the side is provided with and stretches out sheet 152 outward, and this stretches out sheet 152 and extends continuously along Y direction.And, be provided with guide rail 140 at this upper surface that stretches out sheet 152.In addition, permanent magnet 142 is adjacent to be located on the position in outside upper surface, guide rail 140 of stretching out sheet 152, extends along Y direction.This permanent magnet 142 is the parts that repeat the prescribed model of the S utmost point and the N utmost point on Y direction.
Above guide rail 140 and permanent magnet 142, dispose the web 146 that is attached to along the bottom of the both sides of the stand portion 130 that X-direction is extended, at the lower surface of this web 146, be adjacent to be provided with guide shoe 144 and electromagnet 148 respectively.Electromagnet 148 makes magnetic pole cooperate the pattern of the S utmost point of permanent magnet 142 and the N utmost point and changes, by and permanent magnet 142 between produce repulsive force, while can use guide rail 140 to guide to make stand portion 130 to move along Y direction.
In addition, at the lower surface that stretches out sheet 152, be provided with a plurality of reinforcements 54 between the lateral surface that is erected at tank component 112c, 112d with predetermined distance along Y direction.
Stand portion 130 possesses support portion 130a, the 130b of linear motor portion and the moving part 130c that extends along X-direction.Moving part 130c can move to X-direction at the 130b of this linear motor portion of the effect lower edge of linear motor part 130b.And by set up the predetermined process device in this moving part 130c, processing unit moves along X-direction, the processing that the substrate that carries on base station 110 is put rules into practice.As this processing unit, can be check the camera of the defective on the substrate or repair coloured filter decolouring etc. substrate surface treatment state apparatus for correcting or substrate is carried out the applying device etc. of layout process.
In addition, same with the 1st execution mode on the base station 110 of table apparatus 101, be provided with and be used for the not shown workpiece die holder of substrate of mounting liquid crystal panel etc.In addition, table apparatus 101 is loaded in the waggon with the state that is provided with this workpiece die holder when being transferred the car conveying.
In the present embodiment, as shown in figure 10, base station 110, guide rail 140, permanent magnet 142, stretch out sheet 152, pallet 170 and workpiece die holder and cut apart with the divisional plane of Y direction quadrature.And, by the base station 110 after cutting apart at cutting part 116,126 by bindings such as bolts.
In addition, at the lower surface that stretches out sheet 152, be provided with a plurality of reinforcements 154 between the lateral surface that is erected at tank component 112c, 112d, divided base station 110 also links via this reinforcement 154.Here, under the situation that platform is in the past constructed, if need be arranged to want to cut apart then the flange that is used for linking is flown out in the side of platform, there is horizontal size to become big problem, but in the present embodiment, fly out to and stretch out the side of sheet 152 owing to can suppress reinforcement 154 and cutting part 116,126, so can suppress to maximize.
Like this, owing to base station 110, guide rail 140, permanent magnet 142, stretch out sheet 152, pallet 170 and workpiece die holder and on Y direction, dividually constitute, so table apparatus 101 may be partitioned into two pieces and constitutes.In addition, cutting part 116,126,176 is located on the position of Z-direction correspondence up and down, and is formed on that each piece becomes on the position that can be loaded in the size in the waggon on the Y direction.
In addition, two sides of base station 110, stretching out sheet 152 below, as Figure 10 and shown in Figure 16, be provided with cable carriage 160.In stand portion 130, be connected with not shown electric power cable, reach not shown signal cable etc., this not shown electric power cable is supplied with the electric power that moves that is used for controlling stand portion 130 self and moving part 130c, this not shown signal cable be used for and be attached to the various signals of transmitting-receiving between the processing unit among the moving part 130c.These cables are via 160 wirings of cable carriage.
Cable carriage 160 is a plurality of flat materials to be connected to be provided with form, and each material rotates freely in the angle of restriction mutually and links.The cable that will compile leads to the inside of cable carriage 160.One end 160a of cable carriage 160 is fixed on the brace table 162 of the side of being located at base station 110.In addition, the other end 160b of cable carriage 160 is fixed on the communication component 164.Communication component 164 is parts of tubular, is attached on stand portion 130 and the cable carriage 160, will be directed to stand portion 130 from the cable of cable carriage 160.
Therefore, as shown in figure 17, cable carriage 160 is out of shape freely as crawler belt (registered trade mark), along with stand portion 130 moves along Y direction, can be bent into U word shape on the position arbitrarily of the length direction of base station 110.And the cable profiling of inside of leading to cable carriage 160 is in the distortion of cable carriage 160 and be out of shape.
Like this, by cable carriage 160 being located at two sides of base station 110, the below of stretching out sheet 152, different with the situation in the inside that is located at base station 110, the degree of freedom that reaches the utilization in the space between tank component 112d, 122d between tank component 112c, 122c improves, can here dispose and link parts 118 or, improved rigidity and vibrationproof except that shaking unit 150.In addition, stretch out sheet 152 and arrangement guide rail 140 and permanent magnet 142 thereon by setting, compare with the situation on the tank component 112c, the 112d that they are configured in upper frame 112, can reduce the size of the X-direction of base station 110, realize reducing of overlay area.
Like this, in the table apparatus 101 of relevant present embodiment, base station 110 has upper frame 112 and lower frame 122, and with its usefulness binding parts 118 bindings, made so-called box structure, not only realized lightweight, also improved rigidity so constitute by tank component.Therefore, even because of moving of stand portion 130 applies load, removes unit 150 sinking base stations, 110 inclinations of shaking, by having suppressed the distortion of base station 110 self, stand portion 130 is also very little with the error of the relative position of base station 110, can carry out the correct processing of substrate.In addition, owing to do not need the processing delay of substrate to the distortion of base station 110 is returned to original state, so can not reduce production capacity.
In addition, because having, base station 110 is used for base station 110 along continuous straight runs are divided into a plurality of cutting part 116,126, even base station 110 maximizes so follow the maximization of substrate, also can not use special oversize vehicle and base station was ceded territory to carry in 110 minutes.In addition, when machining constitutes tank component 112c, 112d, 122c, the 122d of base station 110, also can carry out, so can easily carry out machining according to the part after cutting apart.
In addition, under the situation that base station 110 is cut apart, if base station 110 is made of tank component, then the rigidity on composition surface is lower, when the driving of stand portion 130 strain might take place, but the base station 110 of present embodiment is a box structure, if upper frame 112 is cooperated with the composition surface up and down of lower frame 126, then the composition surface increases, so can reduce to produce the possibility of strain, becomes the structure of cutting apart that helps base station 110.
In addition, cutting part 116,126 constitutes owing to the tank component that will constitute upper frame 112 and lower frame 126 cuts off in corresponding up and down position, so leave along the vertical direction by the cutting part 116,126 that is located on upper frame 112 and the lower frame 122, being reinforced with respect to the moment that divisional plane is separated, is favourable aspect rigidity.
In addition, owing on the section of tank component, be provided with flange 116a, 126a, so can be with the piece after cutting apart each other via easily linking by bolt etc. towards flange 116a, the 126a of foreign side towards foreign side.In addition, owing on the section of the tank component of pallet 170, also be provided with same flange, so the piece cut apart easily can be linked by bolt etc. each other towards foreign side.
In addition, owing in the frame of upper frame 112, along inclined direction set up strengthening part 114c, 114d, in the frame of lower frame 122, along inclined direction set up strengthening part 124c, so compare the rigidity that can improve base station 110 fully with situation about strengthening part being erected at abreast in the frame.
In addition, by cable carriage 160 being located at two sides of base station 110, the below of stretching out sheet 152, different with the situation in the inside that is located at base station 110, the degree of freedom that reaches the utilization in the space between tank component 112d, 122d between tank component 112c, 122c improves, can here dispose and link parts 118 or, can improve rigidity and vibrationproof except that shaking unit 150.In addition, owing to can shorten the length of the Z-direction of communication component 164, so can reduce the vibration of the base station 110 that brings by interference.In addition, stretch out sheet 152 and guide rail 140 and permanent magnet 142 are set thereon by setting, compare the size of the X-direction that can reduce base station 110 with the situation on the tank component 112c, the 112d that they are configured in upper frame 112, can realize reducing of overlay area.
In addition, because table apparatus 101 possesses via removing the pallet 170 that the unit 150 that shakes supports base station 110, so can support base station 110 to remove the state that shakes on pallet 170.
In addition, because four jiaos depression 119 by lower frame 122 is supported four jiaos of upper frames 112 from the below via removing the unit 150 that shakes by pillar 178, so can support base station 110 in the higher position of approaching center of gravity via removing the unit 150 that shakes, can suppress the swing of moving the base station 110 that produces because of stand portion 130.In addition, as weight performance function, can further suppress the swing of base station 110 by lower frame 122.
In addition, made will link parts 118 usefulness shape of the mouth as one speaks steel constitute, with upper frame 112 and lower frame 122 on the structures that link such as four jiaos, be not limited to shape of the mouth as one speaks steel but link parts 118, also can make by for example sheet material upper frame 112 and lower frame 122 are surrounded the structure that links fully.
In addition, the present invention is not limited to above-mentioned execution mode, can carry out various distortion.For example, in the above-described embodiment, described the application along the table apparatus 1,101 of the biaxial type that Y direction moves, moving part 30c, 130c move along X-direction, but also can use for the single-shaft variant that stand portion 30,130 only moves to stand portion 30,130.
In addition, stand portion 30,130 and moving part 30c, 130c mobile is which kind of of contact-type, non-contact type can.

Claims (7)

1, a kind of table apparatus possesses base station, can and support the unit that shakes that removes of above-mentioned base station along a stand that is provided with moving axially on above-mentioned base station, it is characterized in that,
Above-mentioned base station has:
Upper frame links tank component and makes up with the frame shape;
Lower frame links tank component and makes up with the frame shape, leave up and down and be provided with above-mentioned upper frame; And
Link parts, above-mentioned upper frame and above-mentioned lower frame are linked.
2, table apparatus as claimed in claim 1 is characterized in that, possesses the pallet that removes the above-mentioned base station of unit supports that shakes via above-mentioned.
3, table apparatus as claimed in claim 2 is characterized in that,
The profile of above-mentioned upper frame is rectangular-shaped;
Above-mentioned lower frame is along the profile of above-mentioned upper frame and four corner recess rectangular-shaped;
Above-mentioned pallet has four jiaos pillar along the rectangular-shaped framework of the profile of above-mentioned upper frame and four jiaos depression by above-mentioned lower frame from the above-mentioned upper frame of supported underneath;
The above-mentioned unit that shakes that removes is located between the upper end of four jiaos of above-mentioned upper frame and above-mentioned pillar at least.
As each described table apparatus in the claim 1～3, it is characterized in that 4, above-mentioned base station has and is used for this base station along continuous straight runs is divided into a plurality of cutting part.
5, table apparatus as claimed in claim 4 is characterized in that, above-mentioned cutting part is that the tank component that will constitute above-mentioned upper frame and above-mentioned lower frame cuts off in corresponding up and down position and constitutes.
6, table apparatus as claimed in claim 5 is characterized in that, is provided with the flange towards foreign side on the section of above-mentioned tank component.
7, as each described table apparatus in the claim 1～6, it is characterized in that, at least one frame of above-mentioned upper frame and above-mentioned lower frame, along inclined direction set up strengthening part.
CN2008100870894A 2007-12-12 2008-04-11 Stage apparatus Expired - Fee Related CN101459103B (en)

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CN110000578A (en) * 2019-04-29 2019-07-12 广船国际有限公司 A kind of processing method of the support construction and flange of boring equipment

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JP2008060614A (en) 2008-03-13
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CN101459103B (en) 2011-11-30
KR100993473B1 (en) 2010-11-10
TWI383467B (en) 2013-01-21

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