TWI383467B - Stage device - Google Patents
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- TWI383467B TWI383467B TW097109874A TW97109874A TWI383467B TW I383467 B TWI383467 B TW I383467B TW 097109874 A TW097109874 A TW 097109874A TW 97109874 A TW97109874 A TW 97109874A TW I383467 B TWI383467 B TW I383467B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
Description
本發明，是有關一種載台裝置，具有在搭載了基板的基台上可朝一軸方向移動的高架部。The present invention relates to a stage device having an elevated portion that is movable in an axial direction on a base on which a substrate is mounted.
以往，使用於液晶面板或半導體等的各種基板的製造等的載台裝置，已知例如專利文獻1。此載台裝置，是具備：將罐材連結構築成框狀製罐構造的基台、及設置於基台的兩側的一對的導引軌道、及沿著這些導引軌道被導引的一對導引滑件、及橫架於一對的導引滑件之間的樑。樑，是沿著導引軌道移動，藉由搭載於此樑的照相機或維修裝置等，檢出基板的缺陷並且進行修復。基台，是隔著除振組件被支撐於架台上。且基台，是藉由平行架設於框內的補強罐被補強。Conventionally, for example, Patent Document 1 discloses a stage device used for production of various substrates such as a liquid crystal panel or a semiconductor. The stage device includes a base for constructing a can structure of a can material, a pair of guide rails provided on both sides of the base, and guided along the guide rails. A pair of guide slides and a beam transversely disposed between the pair of guide slides. The beam is moved along the guide rail, and the defect of the substrate is detected and repaired by a camera or a maintenance device mounted on the beam. The abutment is supported on the gantry via the vibration isolation assembly. And the abutment is reinforced by a reinforcing tank that is placed in parallel in the frame.
[專利文獻1]日本特開2006－269509號公報[Patent Document 1] Japanese Laid-Open Patent Publication No. 2006-269509
但是，在上述習知的製罐構造的基台中，因為例如即使設置補強罐剛性也不充分，所以例如當樑沿著導引軌道朝前方移動並且照相機等的搭載物朝右方移動時，使基台的前方側右角會陷落，而在基台產生數十微米級的變形。 因此，照相機等的搭載物即使只移動正確地距離，此基台的變形量仍會讓搭載物及基台的相對位置產生誤差，基板的處理就無法正確地進行。這時，等待基台的變形回復至原形為止停止基板的處理的話，處理量會顯著下降。However, in the above-described base for the can making structure, for example, even if the rigidity of the reinforcing can is not sufficient, for example, when the beam moves forward along the guide rail and the load of the camera or the like moves to the right, The right side of the front side of the abutment will fall, and the base will produce tens of microns of deformation. Therefore, even if the mounted object such as a camera moves only at a correct distance, the amount of deformation of the base causes an error in the relative position of the mounted object and the base, and the processing of the substrate cannot be performed correctly. At this time, if the processing of stopping the substrate is stopped while waiting for the deformation of the base to return to the original shape, the amount of processing is remarkably lowered.
本發明，是鑑於上述狀況，其目的為提供一種載台裝置，藉由提高基台的剛性，處理量不會下降且在基台上可正確地處理基板。The present invention has been made in view of the above circumstances, and an object thereof is to provide a stage device capable of accurately processing a substrate on a base without increasing the amount of processing by increasing the rigidity of the base.
本發明的載台裝置，是具備：基台、及朝一軸方向可移動設置於前述基台上的高架部、及支撐前述基台的除振組件。前述基台，是具有：將罐材連結構築成框狀的上部框架、及將罐材連結構築成框狀且與前述上部框架呈上下分離設置的下部框架、及連結前述上部框架及前述下部框架的連結材。A stage device according to the present invention includes a base, an elevated portion that is movably disposed on the base in an axial direction, and a vibration isolation assembly that supports the base. The abutment includes an upper frame in which a can material connection structure is framed, a lower frame in which a can material connection structure is frame-shaped, and is vertically separated from the upper frame, and the upper frame and the lower frame are coupled to each other. The connecting material.
在此載台裝置中，因為基台是具有上部框架及下部框架，並將其由連結材連結的盒構造，所以藉由罐材結構謀求輕量化，但剛性也被提高。因此，即使因為高架部的移動而受到負荷使除振組件沈下導致基台傾斜，藉由抑制基台本身的變形，就可使與高架部及基台的相對位置的誤差非常小，就可進行基板的正確處理。且，因為不需要等待基台的變形是回復至原形為止停止基板的處理，處理量就不會下降。In this stage device, since the base is a box structure having an upper frame and a lower frame and connected by a connecting material, the weight of the can material structure is reduced, but the rigidity is also improved. Therefore, even if the load is removed due to the movement of the elevated portion, the base is tilted, and by suppressing the deformation of the base itself, the error between the relative position of the elevated portion and the base can be made very small, and the operation can be performed. Correct handling of the substrate. Further, since it is not necessary to wait for the deformation of the base to return to the original shape, the processing of the substrate is stopped, and the amount of processing does not decrease.
載台裝置，是具備隔著前述除振組件支撐前述基台用 的架台也可以。如此的話，在架台上可以由除振狀態支撐基台。The stage device includes the base supporting the vibration isolation unit The stand can also be. In this case, the abutment can be supported by the vibration-removing state on the gantry.
前述上部框架的外形是矩形狀，前述下部框架是沿著前述上部框架的外形但四角凹陷的矩形狀，前述架台是具有：沿著前述上部框架的外形的矩形狀的框體、及通過前述下部框架的四角的凹陷從下方支撐前述上部框架的四角的支柱，前述除振組件，是至少設在前述上部框架的四角及前述支柱的上端之間也可以。如此的話，因為可以通過除振組件將基台支撐於接近重心的更高位置，所以可以抑制因高架部的移動所產生的基台的擺動。且，下部框架發可揮錘的功能，可以進一步抑制基台的擺動。The upper frame has a rectangular outer shape, and the lower frame has a rectangular shape which is recessed at four corners along the outer shape of the upper frame, and the gantry has a rectangular frame body along the outer shape of the upper frame and the lower portion The four corners of the frame support the four corner struts of the upper frame from below, and the vibration isolating assembly may be provided at least between the four corners of the upper frame and the upper end of the struts. In this case, since the base can be supported at a higher position close to the center of gravity by the vibration isolating assembly, the swing of the base due to the movement of the elevated portion can be suppressed. Moreover, the lower frame emits a hammering function, which can further suppress the swing of the base.
前述基台，是具有將該基台在水平方向分割成複數塊體用的分割部也可以。如此的話，即使隨著基板大型化而使基台大型化，不需使用特殊的大型車輛就可分割供運送基台。The base may have a divided portion for dividing the base into a plurality of blocks in the horizontal direction. In this case, even if the base is increased in size as the size of the substrate increases, the base for transport can be divided without using a special large vehicle.
前述分割部，是在上下對應位置將構成前述上部框架及前述下部框架的罐材切斷也可以。如此的話，設置於上部框架及下部框架的分割部因為是上下方向分離，所以對於剛性有利。In the divided portion, the cans constituting the upper frame and the lower frame may be cut at the upper and lower positions. In this case, since the divided portions provided in the upper frame and the lower frame are separated in the vertical direction, they are advantageous for rigidity.
在前述罐材的切斷面設有向外的凸緣也可以。如此的話，分割的塊體彼此可以容易透過向外的凸緣相互連結。An outward flange may be provided on the cut surface of the can. In this case, the divided blocks can be easily connected to each other through the outward flange.
在前述上部框架及前述下部框架的至少一方的框內，呈傾斜方向架設補強材也可以。如此的話，與在框內架設平行的補強材的情況相比可以充分地提高基台的剛性。即 ，對於高架部及其搭載裝置同時移動時可能發生的基台的扭轉，可以提高扭轉剛性。In the frame of at least one of the upper frame and the lower frame, a reinforcing material may be placed in an inclined direction. In this case, the rigidity of the base can be sufficiently increased as compared with the case where the reinforcing material is placed in parallel in the frame. which is The torsional rigidity can be improved by twisting the abutment which may occur when the elevated portion and the mounting device are simultaneously moved.
依據本發明，可以提供一種載台裝置，藉由提高基台的剛性，處理量不會下降且在基台上可正確地處理基板。According to the present invention, it is possible to provide a stage device which can improve the rigidity of the base, the amount of processing does not decrease, and the substrate can be correctly processed on the base.
以下，參照添付圖面說明本發明的實施例。又，對於圖面的說明的同一要素是附加同一的符號，省略重複說明。Hereinafter, embodiments of the present invention will be described with reference to the drawings. The same elements in the description of the drawings are denoted by the same reference numerals, and the description thereof will not be repeated.
第1圖是本發明的第1實施例的載台裝置1的立體圖，第2圖是將具備第1圖的載台裝置1從基台上方所見的立體圖，第3圖將基台從下方所見的立體圖，第4圖是連結了連結材的基台的下部框架被除振組件支撐狀態的立體圖。1 is a perspective view of a stage device 1 according to a first embodiment of the present invention, and FIG. 2 is a perspective view of the stage device 1 including the first view taken from above the base, and FIG. 3 shows the base from below. The perspective view of Fig. 4 is a perspective view showing a state in which the lower frame of the base to which the connecting material is connected is supported by the vibration isolating assembly.
如第1圖所示，載台裝置1，是具備：搭載有基板的基台10、及移動於基台10上的高架部30、及設置於基台10供導引高架部30的移動用的導引軌道40及永久磁鐵42、及設置於高架部30的下部被導引軌道40導引的導引滑件44及與永久磁鐵42相面對的電磁鐵48，此高架部30是沿著導引軌道40移動。又，在第1圖中，基台10 的長度方向為Y軸方向，與其相互垂直的水平方向為X軸方向，與這些相互垂直的方向為Z軸方向。As shown in Fig. 1, the stage device 1 includes a base 10 on which a substrate is mounted, an overhead portion 30 that is moved on the base 10, and a movement that is provided on the base 10 to guide the elevated portion 30. The guiding rail 40 and the permanent magnet 42 and the guiding slider 44 disposed at the lower portion of the elevated portion 30 are guided by the guiding rail 40 and the electromagnet 48 facing the permanent magnet 42. The elevated portion 30 is along The guide track 40 moves. Also, in Fig. 1, the base 10 The longitudinal direction is the Y-axis direction, and the horizontal direction perpendicular to each other is the X-axis direction, and the mutually perpendicular directions are the Z-axis directions.
基台10，是具有：上部框架12、及與上部框架12上下分離設置的下部框架22、及連結上部框架12及下部框架22的連結材18。The base 10 has an upper frame 12, a lower frame 22 that is vertically separated from the upper frame 12, and a connecting member 18 that connects the upper frame 12 and the lower frame 22.
上部框架12，是在藉由連結各朝X軸方向延伸的罐材12a、12b、及朝Y軸方向延伸的罐材12c、12d而形成矩形狀的框體的內側，藉由複數補強材14a、14b、14c、14d補強的結構。在此，罐材12a、12b、12c、12d是中空的棒材，在本實施例是利用剖面口狀的口型(方型)鋼。且，補強材14a、14b、14c、14d，不論是中空或中實皆是橫架框體內側的棒材，在本實施例中利用剖面H狀的H型鋼及剖面口狀的口型鋼。The upper frame 12 is formed inside the rectangular frame by connecting the can bodies 12a and 12b extending in the X-axis direction and the can bodies 12c and 12d extending in the Y-axis direction, and the plurality of reinforcing members 14a are provided. , 14b, 14c, 14d reinforcing structure. Here, the cans 12a, 12b, 12c, and 12d are hollow bars, and in the present embodiment, a port-shaped (square) steel having a cross-sectional shape is used. Further, the reinforcing members 14a, 14b, 14c, and 14d are the rods on the inner side of the cross frame, whether hollow or medium, and in the present embodiment, H-shaped steel having a cross-sectional H shape and a mouth-shaped steel having a cross-sectional shape are used.
在此，雖詳細如後述，但是基台10是在長度方向的水平方向可分割成複數塊體(在此為2塊體)，朝上部框架12的Y軸方向延伸的罐材12c、12d是在途中被切斷，且設有分割部16。而且，對於從前方側及後側挾持分割部16的各塊體，在切斷部分的罐材12c、12d之間，朝X軸方向延伸的方式橫架由口型鋼組成的補強材14a。Here, as will be described in detail later, the base 10 is divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 12c and 12d extending in the Y-axis direction of the upper frame 12 are It is cut off on the way, and the division part 16 is provided. In addition, each of the blocks that hold the divided portion 16 from the front side and the rear side crosses the reinforcing material 14a composed of the profiled steel so as to extend between the cans 12c and 12d of the cut portion in the X-axis direction.
而且，在由罐材12a及罐材12c、12d及補強材14a所形成的前方的框內，由H型鋼構成的補強材14b，是與罐材12c、12d平行架設，並且與罐材12a及補強材14a平行架設。且，由H型鋼構成的補強材14c，是對於罐材12a、12c、12d及補強材14a呈傾斜對角狀橫架。因此， 補強材14b，14c是成為在中央的一點交叉，並從此放射狀延伸的狀態。Further, in the front frame formed by the can material 12a, the can bodies 12c and 12d, and the reinforcing material 14a, the reinforcing material 14b made of H-shaped steel is placed in parallel with the can bodies 12c and 12d, and the can material 12a and The reinforcing members 14a are erected in parallel. Further, the reinforcing member 14c made of H-shaped steel has an inclined diagonal cross frame for the can bodies 12a, 12c, and 12d and the reinforcing member 14a. therefore, The reinforcing members 14b and 14c are in a state of being radially extended at a point in the center.
且，在由罐材12c、12d及罐材12b及補強材14a所形成的後面的框內，由H型鋼構成的補強材14d，是對於罐材12b、12c、12d及補強材14a傾斜橫架。Further, in the rear frame formed by the can bodies 12c and 12d, the can 12b and the reinforcing material 14a, the reinforcing material 14d made of H-shaped steel is inclined to the transverse direction of the cans 12b, 12c, 12d and the reinforcing material 14a. .
下部框架22，是在藉由分別連結朝X軸方向延伸的罐材22a、22b、及朝Y軸方向延伸的罐材22c、22d而形成矩形狀的框體的內側，藉由補強材24b所補強的結構。罐材22a、22b、22c、22d的徑，是比上部框架12的罐材12a、12b、12c、12d小。由口型鋼構成的補強材24b，是在罐材22c、22d的長度方向的中央部，橫架於X軸方向。The lower frame 22 is formed inside the rectangular frame by connecting the can bodies 22a and 22b extending in the X-axis direction and the cans 22c and 22d extending in the Y-axis direction, respectively, and is provided by the reinforcing member 24b. Reinforced structure. The diameters of the cans 22a, 22b, 22c, and 22d are smaller than the cans 12a, 12b, 12c, and 12d of the upper frame 12. The reinforcing material 24b made of a profiled steel is a central portion in the longitudinal direction of the can bodies 22c and 22d, and is transversely arranged in the X-axis direction.
在此，如前述，基台10是在長度方向的水平方向可分割成複數塊體(在此為2塊體)，下部框架22的朝Y軸方向延伸的罐材22c、22d是在途中被切斷，並設有分割部26。Here, as described above, the base 10 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the cans 22c and 22d extending in the Y-axis direction of the lower frame 22 are on the way. The cutting portion 26 is provided.
連結材18，是在Z軸方向分離的狀態下，連結上部框架12及下部框架22。在本實施例中，連結材18是由口型鋼的罐材所構成，在四角連結上部框架12及下部框架22。進一步，為了提高剛性，而在上下的罐材12c、22c之間，在分割部16、26的前方側，朝Z軸方向延伸的如在口型鋼組成連結材18是架設。且，在上下的罐材22d、22d間中，在分割部16、26的前方側，朝Z軸方向延伸地架設由口型鋼構成連結材18。The connecting material 18 is connected to the upper frame 12 and the lower frame 22 in a state of being separated in the Z-axis direction. In the present embodiment, the connecting material 18 is made of a can material of a profiled steel, and the upper frame 12 and the lower frame 22 are joined at the four corners. Further, in order to increase the rigidity, between the upper and lower cans 12c and 22c, the connecting member 18 which is formed in the profiled steel extending in the Z-axis direction on the front side of the divided portions 16 and 26 is stretched. Further, between the upper and lower tank members 22d and 22d, a connecting member 18 made of a profiled steel is stretched in the Z-axis direction on the front side of the divided portions 16 and 26.
除振組件50，是設在載台裝置1的設置面及基台10之間。更詳細的話，除振組件50，是在下部框架22的四角、及罐材22c、22d的途中的下部，可除振地支撐基台10。除振組件50，是供去除從設置面傳遞至基台10的振動，可以使用例如由空氣彈簧或橡膠等的彈性材所構成者。The vibration eliminating unit 50 is provided between the installation surface of the stage device 1 and the base 10. More specifically, the vibration isolating unit 50 supports the base 10 in a vibration-removing manner at the four corners of the lower frame 22 and the lower portion of the middle of the cans 22c and 22d. The vibration isolating unit 50 is for removing vibration transmitted from the installation surface to the base 10, and may be formed of, for example, an elastic material such as an air spring or rubber.
導引軌道40，是分別設在罐材12c、12d的上面，朝Y軸方向延伸。更詳細的話，在罐材12c、12d的上面，朝向外側方設有突出片52，此突出片52是朝Y軸方向連續延伸。而且，在此突出片52的上面，設有導引軌道40。且，永久磁鐵42，是對於突出片52的上面被設在比導引軌道40更鄰接於外側的位置，並朝Y軸方向延伸。此永久磁鐵42，是在Y軸方向返覆S極及N極的預定模式。The guide rails 40 are provided on the upper surfaces of the can bodies 12c and 12d, respectively, and extend in the Y-axis direction. More specifically, on the upper surfaces of the can bodies 12c and 12d, projecting pieces 52 are provided toward the outer side, and the projecting pieces 52 continuously extend in the Y-axis direction. Further, on the upper surface of the protruding piece 52, a guide rail 40 is provided. Further, the permanent magnet 42 is provided on the upper surface of the protruding piece 52 at a position adjacent to the outer side of the guide rail 40, and extends in the Y-axis direction. This permanent magnet 42 is a predetermined mode in which the S pole and the N pole are returned in the Y-axis direction.
在導引軌道40及永久磁鐵42的上方，配置有與朝X軸方向延伸的高架部30的兩側的下部連結的連結板46，在此連結板46的下面分別鄰接設有導引滑件44及電磁鐵48。電磁鐵48，是配合永久磁鐵42的S極及N極的模式變化磁極，藉由在永久磁鐵42之間發生反抗力可以一邊由導引軌道40導引高架部30一邊朝Y軸方向移動。Above the guide rail 40 and the permanent magnet 42, a connecting plate 46 that is connected to a lower portion of both sides of the elevated portion 30 that extends in the X-axis direction is disposed, and a guide slider is adjacently disposed on the lower surface of the connecting plate 46. 44 and electromagnet 48. The electromagnet 48 is a mode-changing magnetic pole that matches the S pole and the N pole of the permanent magnet 42, and the opposing portion 30 is guided by the guide rail 40 while moving in the Y-axis direction by the opposing force between the permanent magnets 42.
又，在突出片52的下面，架設於與罐材12c、12d的外側面之間的複數補強肋54是設成在Y軸方向隔有預定間隔。Further, on the lower surface of the protruding piece 52, the plurality of reinforcing ribs 54 which are placed between the outer surfaces of the can bodies 12c and 12d are arranged at predetermined intervals in the Y-axis direction.
高架部30，是具備：朝X軸方向延伸的支撐部30a、 線形馬達部30b及移動部30c。移動部30c可藉由線形馬達部30b沿著該線形馬達部30b朝X軸方向移動。而且，藉由在此移動部30c附設預定的處理裝置，使處理裝置是朝X軸方向移動，對於被搭載於基台10的基板實行預定的處理。此處理裝置，可以是：檢查基板上的缺陷的照相機、修復濾色板的色脫落等的基板的表面處理狀態的維修裝置、對於基板進行模式處理的塗抹裝置。The elevated portion 30 includes a support portion 30a that extends in the X-axis direction, The linear motor portion 30b and the moving portion 30c. The moving portion 30c is movable in the X-axis direction along the linear motor portion 30b by the linear motor portion 30b. Further, by attaching a predetermined processing device to the moving portion 30c, the processing device is moved in the X-axis direction, and predetermined processing is performed on the substrate mounted on the base 10. The processing apparatus may be a camera that inspects a defect on the substrate, a maintenance device that repairs a surface of the substrate such as a color drop of the color filter, or an application device that performs pattern processing on the substrate.
如第5圖所示，在載台裝置1的基台10上，設有供載置液晶面板等的基板用的工件壓板11。又，由運送車運送載台裝置1時，在設有此工件壓板11的狀態積載於運送車。As shown in Fig. 5, on the base 10 of the stage device 1, a workpiece pressing plate 11 for mounting a substrate such as a liquid crystal panel is provided. Moreover, when the stage device 1 is transported by the transport vehicle, the workpiece press plate 11 is placed on the transport vehicle.
在本實施例中，是如第5圖所示，基台10、導引軌道40、永久磁鐵42、突出片52及工件壓板11，是由與Y軸方向垂直的分割面所分割。而且，分割基台10，是在分割部16、26藉由螺絲等連結。即，在分割部26(16)中，如第6圖所示，設有將切斷罐材22c(12c)的切斷面圍起來並向外的凸緣26a(16a)，通過此向外的凸緣26a(16a)連結被分割的基台10的塊體彼此。又，在上部框架12的分割部16中，補強肋54是兼具向外的凸緣16a。In the present embodiment, as shown in Fig. 5, the base 10, the guide rail 40, the permanent magnet 42, the projecting piece 52, and the workpiece pressing plate 11 are divided by a dividing surface perpendicular to the Y-axis direction. Further, the divided base 10 is connected to the divided portions 16 and 26 by screws or the like. In other words, in the dividing portion 26 (16), as shown in Fig. 6, a flange 26a (16a) that encloses the cut surface of the cut can 22c (12c) and is outward is provided. The flange 26a (16a) connects the blocks of the divided base 10 to each other. Further, in the divided portion 16 of the upper frame 12, the reinforcing rib 54 has an outward flange 16a.
如此，基台10、導引軌道40、永久磁鐵42、突出片52及工件壓板11因為是在Y軸方向可分割的結構，所以載台裝置1可分割成2個塊體。又，分割部16、26，是對於上下的Z軸方向設在對應的位置，對於Y軸方向各 塊體是形成於可積載於運送車的大小的位置。As described above, since the base 10, the guide rail 40, the permanent magnet 42, the protruding piece 52, and the workpiece pressing plate 11 are separable in the Y-axis direction, the stage device 1 can be divided into two blocks. Further, the divided portions 16 and 26 are provided at corresponding positions in the Z-axis direction of the upper and lower sides, and are respectively arranged in the Y-axis direction. The block is formed at a position that can be stowed in the size of the transport vehicle.
且，在基台10的兩側方的突出片52的下方，是如第1圖及第7圖所示，設有纜線載體60。在高架部30中，連接：供給供控制高架部30本身或移動部30c的移動用的電力的無圖示電力纜線、或在與附設於移動部30c的處理裝置之間送收訊各種訊號用的無圖示訊號纜線等。這些纜線，是通過纜線載體60地被配線。Further, below the protruding pieces 52 on both sides of the base 10, as shown in Figs. 1 and 7, a cable carrier 60 is provided. The overhead portion 30 is connected to a non-illustrated power cable for supplying power for controlling the movement of the overhead portion 30 itself or the moving portion 30c, or for transmitting various signals to and from the processing device attached to the moving portion 30c. A non-illustrated signal cable used. These cables are wired through the cable carrier 60.
纜線載體60，是連設扁平的複數筒材的，各筒材是在相互限制的角度內可轉動自如地連結。匯集的纜線，是通過此纜線載體60的內部。纜線載體60的一端60a，是固定在被設置於基台10的側方的支撐台62上。且，纜線載體60的另一端60b，是固定於連絡構件64。連絡構件64，是筒狀的構件並與高架部30及纜線載體60連結，將來自纜線載體60的纜線導引至高架部30。The cable carrier 60 is connected to a flat plurality of cylindrical members, and the respective cylindrical members are rotatably coupled at mutually restricted angles. The assembled cable is passed through the interior of this cable carrier 60. One end 60a of the cable carrier 60 is fixed to a support base 62 provided on the side of the base 10. Moreover, the other end 60b of the cable carrier 60 is fixed to the contact member 64. The contact member 64 is a tubular member and is coupled to the elevated portion 30 and the cable carrier 60 to guide the cable from the cable carrier 60 to the elevated portion 30.
因此，如第8圖所示，纜線載體60是如履帶(日本註冊商標)地可變形自如，高架部30隨著朝Y軸方向移動，於基台10的長度方向的任意的位置可彎曲成U字狀。而且，通過纜線載體60內部的纜線，會順著纜線載體60的變形而變形。Therefore, as shown in Fig. 8, the cable carrier 60 is deformable like a crawler belt (registered trademark of Japan), and the elevated portion 30 is bendable at an arbitrary position in the longitudinal direction of the base 10 as it moves in the Y-axis direction. In a U shape. Moreover, the cable passing through the inside of the cable carrier 60 is deformed along the deformation of the cable carrier 60.
如此，藉由將纜線載體60設在基台10的兩側方的突出片52的下方，與設置於基台10的內部的情況不同，罐材12c、22c間或罐材12d、22d間的空間的利用的自由度提高，可在此配置連結材18或除振組件50，就可提高剛性或制振性。且，藉由設置突出片52並在此上配置導引 軌道40或永久磁鐵42，與在上部框架12的罐材12c、12d上配置這些的情況相比，可以縮小的基台10的X軸方向的尺寸，可謀求降低突軌部(foot print)的發生。Thus, by providing the cable carrier 60 under the protruding pieces 52 on both sides of the base 10, unlike the case of being disposed inside the base 10, between the cans 12c, 22c or between the cans 12d, 22d The degree of freedom in utilization of the space is improved, and the connection member 18 or the vibration isolating unit 50 can be disposed therein to improve rigidity or vibration damping. And, by providing the protruding piece 52 and arranging the guiding thereon When the rail 40 or the permanent magnet 42 is disposed on the cans 12c and 12d of the upper frame 12, the size of the base 10 in the X-axis direction can be reduced, and the foot print can be reduced. occur.
如此，本實施例的載台裝置1中，基台10因為是具有上部框架12及下部框架22且由連結材18加以連結的盒構造，所以即使由罐材構成輕量化，剛性也可提高。因此，即使因為高架部30的移動而承受負荷使除振組件50下沈而導致基台10傾斜，也可抑制基台10本身的變形，高架部30及基台10的相對位置的誤差非常小，可正確地處理基板。且，因為不需要等待基台10的變形回復至原形為止就可進行基板的處理，處理量不會下降。As described above, in the stage device 1 of the present embodiment, since the base 10 has the box structure in which the upper frame 12 and the lower frame 22 are connected by the connecting member 18, the rigidity can be improved even if the can material is made lightweight. Therefore, even if the load is applied by the movement of the elevated portion 30 to cause the vibration isolating assembly 50 to sink and the base 10 is tilted, the deformation of the base 10 itself can be suppressed, and the relative position error of the elevated portion 30 and the base 10 is extremely small. The substrate can be processed correctly. Further, since it is not necessary to wait for the deformation of the base 10 to return to the original shape, the processing of the substrate can be performed, and the amount of processing does not decrease.
且，基台10，是因為具有將基台10在水平方向分割成複數塊體用的分割部16、26，所以即使隨著基板的大型化使基台10大型化，也不需使用特殊的大型車輛就可將基台10分割運送。且，將構成基台10的罐材12c、12d、22c、22d機械加工時，因為可各分割部分分別進行，所以機械加工容易進行。Further, since the base 10 has the divided portions 16 and 26 for dividing the base 10 into a plurality of blocks in the horizontal direction, even if the base 10 is enlarged in size as the size of the substrate increases, it is not necessary to use a special one. A large vehicle can transport the base 10 in sections. Further, when the cans 12c, 12d, 22c, and 22d constituting the base 10 are machined, since the divided portions can be separately performed, the machining can be easily performed.
且，分割基台10的情況，基台10是由罐材構成的話，接合面的剛性低，高架部30的驅動時有產生變形的可能性，但是本實施例的基台10因為是盒構造，配合上部框架12及下部框架22中的上下的接合面的話，接合面會增加，可以降低產生變形的可能性，成為有利於基台10的分割的構造。Further, in the case where the base 10 is divided, when the base 10 is made of a can material, the rigidity of the joint surface is low, and the elevated portion 30 may be deformed during driving. However, the base 10 of the present embodiment is a box structure. When the upper and lower joint faces of the upper frame 12 and the lower frame 22 are fitted, the joint surface is increased, the possibility of deformation is reduced, and the structure for facilitating the division of the base 10 is obtained.
且，分割部16、26，因為是將構成上部框架12及下 部框架22的罐材在上下對應位置切斷的結構，所以設置於上部框架12及下部框架22的分割部16、26是藉由上下方向分離，可對於讓分割面脫落的力矩進行強化，在剛性上有利。Moreover, the divided portions 16, 26 will constitute the upper frame 12 and below Since the cans of the frame 22 are cut at the upper and lower corresponding positions, the divided portions 16 and 26 provided in the upper frame 12 and the lower frame 22 are separated by the vertical direction, and the moment at which the divided faces are detached can be enhanced. It is advantageous in rigidity.
且，在罐材的切斷面中因為設置向外的凸緣16a、26a，所以被分割的塊體彼此透過向外的凸緣16a、26a藉由螺絲等可以容易相互連結。Further, since the outward flanges 16a and 26a are provided in the cut surface of the can material, the divided blocks are transmitted through the outward flanges 16a and 26a so as to be easily coupled to each other by screws or the like.
又，在突出片52的下面設有架設於罐材12c、12d的外側面之間的複數補強肋54，分割的基台10，也是透過此補強肋54連結。在此，習知的平台構造的情況，若欲分割的話，連結用的凸緣有需要設成伸出平台的側面，而有橫方向的尺寸變大的問題，但是在本實施例中，因為可以抑制補強肋54或分割部16、26比突出片52更朝側方伸出，所以可以抑制大型化。Further, a plurality of reinforcing ribs 54 spanned between the outer surfaces of the can bodies 12c and 12d are provided on the lower surface of the protruding piece 52, and the divided bases 10 are also connected by the reinforcing ribs 54. Here, in the case of the conventional platform structure, if it is intended to be divided, the flange for connection needs to be provided as a side surface extending from the platform, and there is a problem that the size in the lateral direction becomes large, but in the present embodiment, It is possible to suppress the reinforcing ribs 54 or the divided portions 16 and 26 from projecting more laterally than the protruding pieces 52, so that it is possible to suppress an increase in size.
且，因為在上部框架12的框內以傾斜方向架設補強材14c、14d，所以與在框內平行架設的補強材的情況相比可以充分地提高基台10的剛性。Further, since the reinforcing members 14c and 14d are placed in the inclined direction in the frame of the upper frame 12, the rigidity of the base 10 can be sufficiently increased as compared with the case of the reinforcing member that is placed in parallel in the frame.
且，藉由將纜線載體60設在基台10的兩側方突出片52的下方，與設在基台10的內部的情況不同，罐材12c、22c之間或罐材12d、22d之間的空間利用的自由度提高，在此可以配置連結材18或除振組件50，可以提高剛性或制振性。且，因為可縮短連絡構件64的Z軸方向的長度，降低可以因外亂的影響所產生的基台10的振動。且，藉由設置突出片52進一步配置導引軌道40或永久磁 鐵42，與將這些配置於上部框架12的罐材12c、12d上的情況相比，可以縮小基台10的X軸方向的尺寸，可謀求降低突軌部(foot print)的發生。Further, by providing the cable carrier 60 under the both side protruding pieces 52 of the base 10, unlike the case of being provided inside the base 10, the cans 12c, 22c or the cans 12d, 22d are The degree of freedom in space utilization is improved, and the connecting member 18 or the vibration isolating assembly 50 can be disposed here to improve rigidity or vibration damping. Further, since the length of the contact member 64 in the Z-axis direction can be shortened, the vibration of the base 10 which can be caused by the influence of the disturbance can be reduced. And, the guide rail 40 or the permanent magnet is further configured by providing the protruding piece 52 The iron 42 can reduce the size of the base 10 in the X-axis direction as compared with the case where these are disposed on the cans 12c and 12d of the upper frame 12, and the occurrence of a foot print can be reduced.
又，在此，雖只有在上部框架12的框內朝傾斜方向設置補強材，但是在下部框架22的框內朝傾斜方向設置補強材也可以。Moreover, although the reinforcing material is provided in the inclined direction in the frame of the upper frame 12, the reinforcing material may be provided in the direction of the inclination in the frame of the lower frame 22.
且，連結材18雖由口型鋼構成，將上部框架12及下部框架22的四角等連結的結構，但是連結材18不限定於口型鋼，例如藉由板材將上部框架12及下部框架22包圍而連結的結構也可以。In addition, the connecting member 18 is formed of a profiled steel, and the four frames of the upper frame 12 and the lower frame 22 are connected to each other. However, the connecting member 18 is not limited to the profiled steel, and the upper frame 12 and the lower frame 22 are surrounded by a plate material, for example. The structure of the link is also possible.
且，如第9圖所示，上部框架12的分割部16的向外的凸緣16a、及下部框架22的分割部26的向外凸緣26a為一體構造也可以。如此的話，可以更提高基台10的剛性。Further, as shown in Fig. 9, the outward flange 16a of the divided portion 16 of the upper frame 12 and the outward flange 26a of the divided portion 26 of the lower frame 22 may have an integral structure. In this case, the rigidity of the base 10 can be further increased.
接著，說明本發明的第2實施例。又，與上述第1實施例同一的要素使用同一符號，省略重複說明。Next, a second embodiment of the present invention will be described. The same elements as those in the first embodiment are denoted by the same reference numerals, and the description thereof will not be repeated.
第10圖，是本發明的第2實施例的載台裝置101的側面圖，第11圖是將具備第10圖的載台裝置101的基台110從上方所見的立體圖，第12圖是將基台110從下方所見的立體圖，第13圖，是將分割的基台110的後側的塊體從上方所見的立體圖，第14圖是連結有連結材118的基台110的下部框架122的立體圖，第15圖是架台 170及除振組件150的立體圖。Fig. 10 is a side view of the stage device 101 according to the second embodiment of the present invention, and Fig. 11 is a perspective view of the base 110 including the stage device 101 of Fig. 10 as seen from above, and Fig. 12 is a view A perspective view of the base 110 as seen from below, FIG. 13 is a perspective view of the block on the rear side of the divided base 110 from above, and FIG. 14 is a lower frame 122 of the base 110 to which the connecting material 118 is coupled. Stereogram, Figure 15 is the stand A perspective view of 170 and vibration isolation assembly 150.
此第2實施例與第1實施例的相異點，是藉由架台170支撐基台110的點、及因此變更基台110的結構的點。The difference between the second embodiment and the first embodiment is a point at which the base 110 is supported by the gantry 170, and thus the structure of the base 110 is changed.
如第10圖所示，載台裝置101，是具備：搭載有基板的基台110、及移動於基台110上的高架部130、及設置於基台110供導引高架部130移動的導引軌道140及永久磁鐵142、及設置於高架部130的下部被導引至導引軌道140的導引滑件144及與永久磁鐵142相面對的電磁鐵146，此高架部130是沿著導引軌道140移動。又，在第10圖中，基台110的長度方向為Y軸方向，與其垂直的水平方向為X軸方向，與這些垂直的方向為Z軸方向。As shown in FIG. 10, the stage device 101 includes a base 110 on which a substrate is mounted, an overhead portion 130 that is moved on the base 110, and a guide that is provided on the base 110 to guide the movement of the elevated portion 130. The lead rail 140 and the permanent magnet 142 and the lower portion of the elevated portion 130 are guided to the guiding slider 144 of the guiding rail 140 and the electromagnet 146 facing the permanent magnet 142. The elevated portion 130 is along The guide track 140 moves. Further, in Fig. 10, the longitudinal direction of the base 110 is the Y-axis direction, the horizontal direction perpendicular thereto is the X-axis direction, and the vertical direction is the Z-axis direction.
基台110，是具有：上部框架112、及與上部框架112上下分離設置的下部框架122、及連結上部框架112及下部框架122的連結材118。The base 110 has an upper frame 112, a lower frame 122 that is vertically separated from the upper frame 112, and a connecting material 118 that connects the upper frame 112 and the lower frame 122.
上部框架112，是在藉由分別連結朝X軸方向延伸的罐材112a、112b、及朝Y軸方向延伸的罐材112c、112d而形成矩形狀的框體的內側，由複數補強材114a、114b、114c、114d補強而構成。在此，罐材112a、112b、112c、112d是中空的棒材，在本實施例中是使用剖面口狀的口型鋼。且，補強材114a、114b、114c、114d，是無論中空或中實皆橫架於框體的內側的棒材，在本實施例中使用剖面H狀的H型鋼及剖面口狀的口型鋼。The upper frame 112 is formed by connecting the tank members 112a and 112b extending in the X-axis direction and the tank members 112c and 112d extending in the Y-axis direction to form a rectangular frame body, and the plurality of reinforcing members 114a and 114b, 114c, and 114d are reinforced to form. Here, the cans 112a, 112b, 112c, and 112d are hollow bars, and in the present embodiment, a cross-sectional port-shaped die steel is used. Further, the reinforcing members 114a, 114b, 114c, and 114d are rods that are transversely mounted on the inner side of the casing regardless of hollow or medium, and in the present embodiment, H-shaped steel having a cross-sectional H shape and a profiled steel having a cross-sectional shape are used.
在此，雖詳細如後述，基台110在長度方向的水平方 向可分割成複數塊體(在此為2塊體)，上部框架112的朝Y軸方向延伸的罐材112c、112d是在途中被切斷，並設有分割部116。而且，對於各別挾持分割部116的前方側及後側的塊體，在切斷部分的罐材112c、112d之間，朝X軸方向延伸地横架由口型鋼構成之補強材114a。Here, as will be described later in detail, the horizontal direction of the base 110 in the longitudinal direction is as follows. The can bodies 112c and 112d extending in the Y-axis direction of the upper frame 112 are cut into a plurality of blocks (here, two blocks), and are provided with the dividing portions 116. In the block body on the front side and the rear side of the respective divided portions 116, the reinforcing members 114a made of the profiled steel are transversely extended in the X-axis direction between the cut-off portions 112c and 112d.
而且，在由罐材112a及罐材112c、112d及補強材114a所形成的前方的框內，由H型鋼構成的補強材114b，是與罐材112c、112d平行地架設，並且與罐材112a及補強材114a平行地架設。且，由H型鋼構成的補強材114c，是對於罐材112a、112c、112d及補強材114a呈傾斜對角狀地横架。因此，補強材114b，114c是成為由中央的一點交叉並從此放射狀延伸的狀態。Further, in the frame formed in front of the can body 112a, the cans 112c and 112d, and the reinforcing member 114a, the reinforcing member 114b made of H-shaped steel is placed in parallel with the cans 112c and 112d, and the can 112a The reinforcing material 114a is erected in parallel. Further, the reinforcing member 114c made of H-shaped steel is transversely inclined with respect to the can bodies 112a, 112c, and 112d and the reinforcing member 114a. Therefore, the reinforcing members 114b and 114c are in a state of being radially extended from the center point.
且，在由罐材112c、112d及罐材112b及補強材114a所形成的後方的框內，由H型鋼構成的補強材114d，是對於罐材112b、112c、112d及補強材114a傾斜地横架。Further, in the frame formed by the tank members 112c and 112d, the tank member 112b, and the reinforcing member 114a, the reinforcing member 114d made of H-shaped steel is inclined to the tank members 112b, 112c, and 112d and the reinforcing member 114a. .
下部框架122，是在藉由分別連結朝X軸方向延伸的罐材122a、122b、及朝Y軸方向延伸的罐材122c、122d而形成矩形狀的框體的內側，藉由複數補強材124a、124b、124c所補強的結構。罐材122a、122b、122c、122d的徑，是比上部框架12的罐材112a、112b、112c、112d小。The lower frame 122 is formed inside by connecting the can bodies 122a and 122b extending in the X-axis direction and the cans 122c and 122d extending in the Y-axis direction to form a rectangular frame body, and the plurality of reinforcing members 124a are provided. , 124b, 124c to strengthen the structure. The diameters of the cans 122a, 122b, 122c, and 122d are smaller than the cans 112a, 112b, 112c, and 112d of the upper frame 12.
在此，如前述，基台110是在長度方向的水平方向可分割成複數塊體(在此為2塊體)，下部框架122的朝Y 軸方向延伸的罐材122c、122d是在途中被切斷，並設有分割部126。而且，對於分割部126前方側的塊體，在切斷部分的罐材122c、122d之間，朝X軸方向延伸地横架由口型鋼構成的補強材124a。Here, as described above, the base 110 can be divided into a plurality of blocks (here, two blocks) in the horizontal direction in the longitudinal direction, and the Y of the lower frame 122 is turned toward Y. The cans 122c and 122d extending in the axial direction are cut off in the middle, and a dividing portion 126 is provided. Further, the block body on the front side of the dividing portion 126 has a reinforcing member 124a made of a profiled steel extending in the X-axis direction between the cut-off portions of the cans 122c and 122d.
且，在由罐材122a及罐材122c、112d及補強材124a所形成的前方的框內，由H型鋼構成的補強材124b，是與罐材122c、122d平行地架設，並且與罐材122a及補強材124a平行地架設。且，由H型鋼構成的補強材124c，是對於罐材122a、122c、122d及補強材124a呈傾斜對角狀地横架。因此，補強材124b，124c是成為由中央的一點交叉，並從此放射狀延伸的狀態。Further, in the front frame formed by the can 122a, the cans 122c and 112d, and the reinforcing material 124a, the reinforcing material 124b made of H-shaped steel is laid in parallel with the cans 122c and 122d, and the can 122a And the reinforcing material 124a is erected in parallel. Further, the reinforcing member 124c made of H-shaped steel is transversely inclined with respect to the cans 122a, 122c, and 122d and the reinforcing member 124a. Therefore, the reinforcing members 124b and 124c are in a state of being radially extended from the center point.
且，下部框架122，是沿著上部框架112的外形但四角凹陷的略矩形狀。後述架台170的支柱178，是通過此凹陷119從下方支撐上部框架112的四角。Further, the lower frame 122 is a substantially rectangular shape that is recessed along the outer shape of the upper frame 112 but recessed at four corners. The pillars 178 of the gantry 170, which will be described later, support the four corners of the upper frame 112 from below by the recesses 119.
連結材118，是在Z軸方向分離的狀態下，連結上部框架112及下部框架122。在本實施例中，連結材118是由口型鋼的罐材所構成，將上部框架112及下部框架122在四角附近連結。The connecting material 118 connects the upper frame 112 and the lower frame 122 in a state of being separated in the Z-axis direction. In the present embodiment, the connecting material 118 is made of a can material of a profiled steel, and the upper frame 112 and the lower frame 122 are connected in the vicinity of the four corners.
架台170，是如第15圖所示，在藉由分別連結朝X軸方向延伸的罐材172a、172b、及朝Y軸方向延伸的罐材172c、172d而形成的矩形狀的框體的內側，藉由複數補強材174a、174b所補強的結構。在此，罐材172a、172b、172c、172d是中空的棒材，在本實施例中使用剖面口狀的口型鋼。且，補強材174a、174b，無論是中空 或中實皆是橫架框體內側的棒材，在本實施例中使用剖面口狀的口型鋼。As shown in Fig. 15, the gantry 170 is connected to the inside of a rectangular frame formed by connecting the cans 172a and 172b extending in the X-axis direction and the cans 172c and 172d extending in the Y-axis direction. The structure is reinforced by the plurality of reinforcing members 174a and 174b. Here, the cans 172a, 172b, 172c, and 172d are hollow bars, and in the present embodiment, a cross-sectional mouth-shaped die steel is used. Moreover, the reinforcing materials 174a, 174b are hollow Or the middle is a bar inside the cross frame, and in the present embodiment, a cross-sectional mouth-shaped steel is used.
在此，如前述基台110是在長度方向的水平方向在的複數塊體可分割成複數塊體(在此為2塊體)，並且架台170也可分割成複數塊體。架台170的朝Y軸方向延伸的罐材172c、172d是在途中被切斷，並設有分割部176。而且，對於各別挾持分割部176前方側及後側的塊體，在切斷部分的罐材172c、172d之間，朝X軸方向延伸地橫架由口型鋼構成的補強材174a。且，在前方側的框內，進一步朝X軸方向延伸地橫架由口型鋼構成的補強材174a。且，在架台170的框內，朝Y軸方向延伸地橫架由口型鋼構成的補強材174b。此補強材174b是在途中被切斷，並設有分割部176。Here, as described above, the plurality of blocks in the horizontal direction in the longitudinal direction may be divided into a plurality of blocks (here, two blocks), and the gantry 170 may be divided into a plurality of blocks. The cans 172c and 172d extending in the Y-axis direction of the gantry 170 are cut off in the middle, and a dividing portion 176 is provided. In addition, the reinforcing members 174a made of a profiled steel are extended in the X-axis direction between the cans 172c and 172d of the cut portions, respectively, between the blocks on the front side and the rear side of the divided portions 176. Further, in the frame on the front side, a reinforcing member 174a made of a profiled steel is further extended in the X-axis direction. Further, in the frame of the gantry 170, a reinforcing member 174b made of a profiled steel is transversely extended in the Y-axis direction. This reinforcing material 174b is cut off in the middle and is provided with a dividing portion 176.
在架台170的四角中，朝Z軸方向延伸地設有支柱178。除振組件150，是設置於架台170的支柱178的上端及各罐材172a、172b、172c、172d上。更詳細的話，除振組件150，是在上部框架112的四角及架台170的支柱178的上端之間、及在各罐材172a、172b、172c、172d的途中的上部及下部框架122的罐材122a、122b、122c、122d之間，可除振地支撐基台110。除振組件150，是供去除從設置面傳遞至基台110的振動，可以使用例如由空氣彈簧或橡膠等的彈性材所構成者。In the four corners of the gantry 170, a stay 178 is provided extending in the Z-axis direction. The vibration isolating assembly 150 is disposed on the upper end of the support 178 of the gantry 170 and on the respective cans 172a, 172b, 172c, and 172d. More specifically, the vibration isolating module 150 is a can of the upper and lower frames 122 between the four corners of the upper frame 112 and the upper ends of the pillars 178 of the gantry 170, and the middle of each of the cans 172a, 172b, 172c, and 172d. Between 122a, 122b, 122c, and 122d, the base 110 can be supported by vibration. The vibration isolating assembly 150 is for removing vibration transmitted from the installation surface to the base 110, and may be formed of, for example, an elastic material such as an air spring or rubber.
導引軌道140，是分別設在罐材112c、112d的上面，並朝Y軸方向延伸。更詳細的話，在罐材112c、112d 的上面設有朝向於外側方的突出片152，此突出片152是朝Y軸方向連續延伸。而且，在此突出片152的上面設有導引軌道140。且，永久磁鐵142，是在突出片152的上面設在比導引軌道140更鄰接於外側的位置，並朝Y軸方向延伸。此永久磁鐵142，是在Y軸方向返覆S極及N極的預定模式。The guide rails 140 are respectively provided on the upper surfaces of the can bodies 112c and 112d and extend in the Y-axis direction. In more detail, in the cans 112c, 112d The upper surface is provided with a protruding piece 152 facing the outer side, and the protruding piece 152 is continuously extended in the Y-axis direction. Further, a guide rail 140 is provided on the upper surface of the protruding piece 152. Further, the permanent magnet 142 is provided on the upper surface of the protruding piece 152 at a position adjacent to the outer side of the guide rail 140, and extends in the Y-axis direction. This permanent magnet 142 is a predetermined mode in which the S pole and the N pole are returned in the Y-axis direction.
在導引軌道140及永久磁鐵142的上方，配置有與朝X軸方向延伸的高架部130的兩側的下部連結的連結板146，在此連結板146的下面，分別鄰接設置導引滑件144及電磁鐵148。電磁鐵148，是配合永久磁鐵142的S極及N極的模式變化磁極，可以藉由在永久磁鐵142之間發生的反抗力一邊將高架部130由導引軌道140導引一邊朝Y軸方向移動。Above the guide rail 140 and the permanent magnet 142, a coupling plate 146 that is coupled to a lower portion of both sides of the elevated portion 130 that extends in the X-axis direction is disposed, and a guide slider is disposed adjacent to the lower surface of the connecting plate 146. 144 and electromagnet 148. The electromagnet 148 is a mode-changing magnetic pole that matches the S pole and the N pole of the permanent magnet 142. The overhang portion 130 can be guided by the guide rail 140 while being opposed to the Y-axis direction by the opposing force generated between the permanent magnets 142. mobile.
又，在突出片152的下面，架設於罐材112c、112d的外側面之間的複數補強肋154是在Y軸方向隔有預定間隔地設置。Further, on the lower surface of the protruding piece 152, a plurality of reinforcing ribs 154 spanned between the outer surfaces of the can bodies 112c and 112d are provided at predetermined intervals in the Y-axis direction.
高架部130，是具備：朝X軸方向延伸的支撐部130a、線形馬達部130b及移動部130c。移動部130c，可藉由線形馬達部130b沿著該線形馬達部130b朝X軸方向移動。而且，藉由在此移動部130c附設預定的處理裝置，使處理裝置朝X軸方向移動，並對於被搭載於基台110的基板實行預定的處理。此處理裝置，可以是檢查基板上的缺陷的照相機、修復濾色板的色脫落等基板的表面處理狀態的維修裝置、對於基板進行模式處理的塗抹裝置。The elevated portion 130 includes a support portion 130a that extends in the X-axis direction, a linear motor portion 130b, and a moving portion 130c. The moving portion 130c is movable in the X-axis direction along the linear motor portion 130b by the linear motor portion 130b. Further, by attaching a predetermined processing device to the moving portion 130c, the processing device is moved in the X-axis direction, and predetermined processing is performed on the substrate mounted on the base 110. The processing apparatus may be a camera that inspects a defect on the substrate, a maintenance device that repairs a surface treatment state of the substrate such as a color drop of the color filter, and an application device that performs pattern processing on the substrate.
又，在載台裝置101的基台110上，與第1實施例同樣，設有供載置液晶面板等的基板用的無圖示工件壓板。又，由運送車運送載台裝置101時，在設置有此工件壓板的狀態下積載於運送車。Further, in the base 110 of the stage device 101, a workpiece pressing plate (not shown) for mounting a substrate such as a liquid crystal panel is provided in the same manner as in the first embodiment. Moreover, when the stage device 101 is transported by the transport vehicle, it is stowed in the transport vehicle with the workpiece presser plate installed.
在本實施例，是如第10圖所示，基台110、導引軌道140、永久磁鐵142、突出片152、架台170及工件壓板，是在與Y軸方向垂直的分割面被分割。而且，分割的基台110，是在分割部116、126藉由螺絲等連結。In the present embodiment, as shown in Fig. 10, the base 110, the guide rail 140, the permanent magnet 142, the protruding piece 152, the gantry 170, and the workpiece pressing plate are divided in a dividing plane perpendicular to the Y-axis direction. Further, the divided base 110 is connected to the divided portions 116 and 126 by screws or the like.
又，在突出片152的下面設有架設於罐材112c、112d的外側面之間的複數補強肋154，分割的基台110，也透過此補強肋154連結。在此，習知的平台構造的情況，若欲分割的話，有需要將連結用的凸緣朝平台的側面伸出地設置，而有橫方向的尺寸變大的問題，但是在本實施例中，因為可以抑制補強肋154或分割部116、126比突出片152更朝側方伸出，所以可以抑制大型化。Further, a plurality of reinforcing ribs 154 spanned between the outer surfaces of the cans 112c and 112d are provided on the lower surface of the protruding piece 152, and the divided bases 110 are also connected by the reinforcing ribs 154. Here, in the case of the conventional platform structure, if it is desired to divide, it is necessary to provide the flange for connection so as to protrude toward the side surface of the platform, and the size in the lateral direction becomes large, but in the present embodiment, Since the reinforcing ribs 154 or the divided portions 116 and 126 can be prevented from projecting more laterally than the protruding pieces 152, it is possible to suppress an increase in size.
如此，基台110、導引軌道140、永久磁鐵142、突出片152、架台170及工件壓板因為是在Y軸方向可分割的結構，所以載台裝置101可分割成2個塊體。又，分割部116、126、176，是在上下的Z軸方向設在對應的位置，所以對於Y軸方向各塊體是形成於可積載於運送車的大小的位置。As described above, since the base 110, the guide rail 140, the permanent magnet 142, the protruding piece 152, the gantry 170, and the workpiece pressing plate are separable in the Y-axis direction, the stage device 101 can be divided into two blocks. Further, since the divided portions 116, 126, and 176 are provided at the corresponding positions in the vertical Z-axis direction, the respective blocks in the Y-axis direction are formed at positions that can be carried on the transport vehicle.
且，在基台110的兩側方的突出片152的下方，是如第10圖及第16圖所示，設有纜線載體160。在高架部130中，連接：供給供控制高架部130本身或移動部130c 的移動用的電力的無圖示電力纜線、或在附設於移動部130c的處理裝置之間送收訊各種訊號用的無圖示訊號纜線等。這些纜線，是通過纜線載體160地配線。Further, below the protruding pieces 152 on both sides of the base 110, as shown in Figs. 10 and 16, a cable carrier 160 is provided. In the elevated portion 130, the connection is supplied to the control elevated portion 130 itself or the moving portion 130c. A non-illustrated power cable for moving power or a non-illustrated signal cable for receiving various signals between processing devices attached to the moving unit 130c. These cables are wired through the cable carrier 160.
纜線載體160，是連設扁平的複數筒材，各筒材是在相互限制的角度內可轉動自如地連結。匯集的纜線，是通過此纜線載體160的內部。纜線載體160的一端160a，是固定在被設置於基台110的側方的支撐台162上。且，纜線載體160的另一端160b，是固定於連絡構件164。連絡構件164，是筒狀的構件並與高架部130及纜線載體160連結，將來自纜線載體160的纜線導引至高架部130。The cable carrier 160 is a flat plurality of tubular materials, and each of the tubular members is rotatably coupled to each other within a mutually restricted angle. The assembled cable is passed through the interior of this cable carrier 160. One end 160a of the cable carrier 160 is fixed to a support table 162 provided on the side of the base 110. Moreover, the other end 160b of the cable carrier 160 is fixed to the contact member 164. The contact member 164 is a tubular member and is coupled to the elevated portion 130 and the cable carrier 160 to guide the cable from the cable carrier 160 to the elevated portion 130.
因此，如第17圖所示，纜線載體160是如履帶(日本註冊商標)地可變形自如，隨著高架部130朝Y軸方向移動，於基台110的長度方向的任意的位置可彎曲成U字狀。而且，通過於纜線載體160的內部的纜線，會順著纜線載體160的變形而變形。Therefore, as shown in Fig. 17, the cable carrier 160 is deformable like a crawler belt (registered trademark of Japan), and can be bent at any position in the longitudinal direction of the base 110 as the elevated portion 130 moves in the Y-axis direction. In a U shape. Moreover, the cable passing through the inside of the cable carrier 160 is deformed along the deformation of the cable carrier 160.
如此，藉由將纜線載體160設在基台110的兩側方突出片152的下方，與設置於基台110的內部的情況不同，罐材112c、122c之間或罐材112d、122d之間的空間的利用自由度提高，在此可配置連結材118或除振組件150，提高剛性或制振性。且，藉由設置突出片152進一步配置導引軌道140或永久磁鐵142，與在上部框架112的罐材112c、112d上配置這些的情況相比，可以縮小的基台110的X軸方向的尺寸，可謀求降低突軌部(foot print)的 發生。Thus, by providing the cable carrier 160 under the both side protruding pieces 152 of the base 110, unlike the case of being disposed inside the base 110, the cans 112c, 122c or the cans 112d, 122d The degree of freedom of use of the space between the spaces is increased, and the connecting member 118 or the vibration isolating assembly 150 can be disposed here to improve rigidity or vibration damping. Further, the guide rail 140 or the permanent magnet 142 is further disposed by providing the protruding piece 152, and the size of the base 110 in the X-axis direction can be reduced as compared with the case where these are disposed on the cans 112c and 112d of the upper frame 112. Can seek to reduce the foot print occur.
如此，本實施例的載台裝置101中，基台110因為是具有上部框架112及下部框架122、及連結這些的連結材118的盒構造，所以即使藉由罐材結構謀求輕量化，剛性也可提高。因此，藉由高架部130的移動而承受負荷使除振組件150下沈讓基台110傾斜，也可抑制基台110本身的變形，使高架部130及基台110的相對位置的誤差非常小，就可正確地處理基板。且，因為不需要等待基台110的變形回復至原形為止就可進行基板的處理，所以處理量不會下降。In the stage device 101 of the present embodiment, since the base 110 has the upper frame 112 and the lower frame 122 and the box structure that connects the connecting members 118, the rigidity of the can material structure is reduced. Can be improved. Therefore, the load is relieved by the movement of the elevated portion 130, and the vibration damping unit 150 is sunk to tilt the base 110, and the deformation of the base 110 itself can be suppressed, so that the relative position error between the elevated portion 130 and the base 110 is extremely small. The substrate can be processed correctly. Further, since the processing of the substrate can be performed without waiting for the deformation of the base 110 to return to the original shape, the amount of processing does not decrease.
且，基台110，因為具有將基台110在水平方向分割成複數塊體用的分割部116、126，即使隨著基板的大型化而使基台110大型化，也不需使用特殊的大型車輛就可將基台110分割運送。且，將構成基台110的罐材112c、112d、122c、122d機械加工時，因為可各分割部分分別進行，所以機械加工容易進行。Further, since the base 110 has the divided portions 116 and 126 for dividing the base 110 into a plurality of blocks in the horizontal direction, even if the base 110 is enlarged in size as the size of the substrate increases, it is not necessary to use a special large size. The vehicle can be divided and transported by the base 110. Further, when the cans 112c, 112d, 122c, and 122d constituting the base 110 are machined, since the divided portions can be separately performed, the machining can be easily performed.
且，分割基台110的情況，基台110是由罐材構成的話，接合面的剛性低，高架部130的驅動時有產生變形的可能性，但是本實施例的基台110因為是盒構造，配合上部框架112及下部框架122中的上下的接合面的話，接合面會增加，可以降低產生變形的可能性，成為有利於基台110的分割的構造。Further, in the case where the base 110 is divided, when the base 110 is formed of a can material, the rigidity of the joint surface is low, and the elevation portion 130 may be deformed during driving. However, the base 110 of the present embodiment is a box structure. When the upper and lower joint faces of the upper frame 112 and the lower frame 122 are fitted, the joint surface is increased, and the possibility of deformation is reduced, and the structure for facilitating the division of the base 110 is obtained.
且，分割部116、126，因為是將構成上部框架112及下部框架122的罐材在上下對應位置切斷的結構，所以 設置於上部框架112及下部框架122的分割部116、126是藉由上下方向分離，可對於讓分割面脫落的力矩進行強化，在剛性上有利。Further, since the divided portions 116 and 126 are configured to cut the cans constituting the upper frame 112 and the lower frame 122 at the upper and lower corresponding positions, The divided portions 116 and 126 provided in the upper frame 112 and the lower frame 122 are separated by the vertical direction, and the torque for dropping the divided surface can be strengthened, which is advantageous in rigidity.
且，在罐材的切斷面中因為設置向外的凸緣116a、126a，所以被分割的塊體彼此透過向外的凸緣116a、126a藉由螺絲等可以容易相互連結。且，在架台170的罐材的切斷面因為也同樣設置向外的凸緣，所以分割的塊體彼此可以藉由螺絲等容易連結。Further, since the outward flanges 116a and 126a are provided in the cut surface of the can material, the divided blocks are transmitted through the outward flanges 116a and 126a so as to be easily coupled to each other by screws or the like. Further, since the outwardly facing flange is also provided on the cut surface of the can material of the gantry 170, the divided blocks can be easily coupled to each other by screws or the like.
且，因為在上部框架112的框內以傾斜方向架設補強材114c、114d，在下部框架122的框內以傾斜方向架設補強材124c，所以與在框內平行架設補強材的情況相比，可以充分地提高基台110的剛性。Further, since the reinforcing members 114c and 114d are placed in the inclined direction in the frame of the upper frame 112, the reinforcing member 124c is placed in the inclined frame in the frame of the lower frame 122. Therefore, compared with the case where the reinforcing member is placed in parallel in the frame, The rigidity of the base 110 is sufficiently increased.
且，藉由將纜線載體160設在基台110的兩側方的突出片152的下方，與設置於基台110的內部的情況不同，罐材112c、122c間或罐材112d、122d間的空間的利用的自由度提高，可在此配置連結材118或除振組件150，就可提高剛性或制振性。且，因為可以縮短連絡構件164的Z軸方向的長度，可以降低因為外亂的影響所造成的基台110的振動。且，藉由設置突出片152並在此上配置導引軌道140或永久磁鐵142，與在上部框架112的罐材112c、112d上配置這些的情況相比，可以縮小的基台110的X軸方向的尺寸，可謀求降低突軌部(foot print)的發生。Further, by providing the cable carrier 160 under the protruding pieces 152 on both sides of the base 110, unlike the case of being disposed inside the base 110, between the cans 112c, 122c or between the cans 112d, 122d The degree of freedom of use of the space is improved, and the connection member 118 or the vibration isolating unit 150 can be disposed therein to improve rigidity or vibration damping. Moreover, since the length of the contact member 164 in the Z-axis direction can be shortened, the vibration of the base 110 due to the influence of the disturbance can be reduced. Further, by providing the protruding piece 152 and arranging the guide rail 140 or the permanent magnet 142 thereon, the X axis of the base 110 can be reduced as compared with the case where these are disposed on the cans 112c, 112d of the upper frame 112. The size of the direction can be reduced to reduce the occurrence of a foot print.
且，載台裝置101，因為具備隔著除振組件150支撐 基台110的架台170，所以可以在架台170上由除振狀態支撐基台110。Moreover, the stage device 101 is supported by the vibration isolation unit 150. The gantry 170 of the base 110 allows the base 110 to be supported on the gantry 170 by the vibration-removing state.
且，因為通過下部框架122的四角的凹陷119從下方隔著除振組件150藉由支柱178支撐上部框架112的四角，所以可以隔著除振組件150將基台110支撐於接近重心的更高的位置，可以抑制因為高架部130的移動所產生的基台110的擺動。且，因為下部框架122作為錘的功能，所以可以更抑制基台110的擺動。Moreover, since the four corners of the upper frame 112 are supported by the pillars 178 from the lower side through the recesses 119 of the lower frame 122, the base 110 can be supported closer to the center of gravity via the vibration isolating assembly 150. The position can suppress the swing of the base 110 due to the movement of the elevated portion 130. Moreover, since the lower frame 122 functions as a hammer, the swing of the base 110 can be further suppressed.
又，雖連結材118為口型鋼的結構且為將上部框架112及下部框架122由四角等連結的結構，但是連結材118不限定於口型鋼，例如藉由板材包圍上部框架112及下部框架122地連結的結構也可以。Further, the connecting member 118 is a structure of a profiled steel and has a structure in which the upper frame 112 and the lower frame 122 are connected by four corners or the like. However, the connecting member 118 is not limited to the profiled steel, and the upper frame 112 and the lower frame 122 are surrounded by, for example, a plate material. The structure of the ground connection is also possible.
又，本發明不限定於上述實施例，可進行各種的變形。例如，在上述實施例中，雖説明適用高架部30、130朝Y軸方向移動且移動部30c、130c朝X軸方向移動的2軸型的載台裝置1、101，但是只有高架部30、130移動的1軸型也可適用。Further, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the above-described embodiment, the two-axis type stage devices 1 and 101 in which the elevated portions 30 and 130 are moved in the Y-axis direction and the moving portions 30c and 130c are moved in the X-axis direction are described. However, only the elevated portion 30, The 130-moving 1-axis type is also applicable.
且，高架部30、130或移動部30c、130c的移動，是接觸型、非接觸型的任一種也可以。Further, the movement of the elevated portions 30 and 130 or the moving portions 30c and 130c may be either a contact type or a non-contact type.
1‧‧‧載台裝置1‧‧‧ stage device
10‧‧‧基台10‧‧‧Abutment
11‧‧‧工件壓板11‧‧‧Working platen
12‧‧‧上部框架12‧‧‧ upper frame
12a‧‧‧罐材12a‧‧‧cans
12b‧‧‧罐材12b‧‧‧cans
12c‧‧‧罐材12c‧‧‧cans
12d‧‧‧罐材12d‧‧‧cans
14a‧‧‧補強材14a‧‧‧ reinforcing materials
14b‧‧‧補強材14b‧‧‧ reinforcing materials
14c‧‧‧補強材14c‧‧‧ reinforcing material
14d‧‧‧補強材14d‧‧‧ reinforcing materials
16‧‧‧分割部16‧‧‧ Division
16a‧‧‧向外凸緣16a‧‧‧Outward flange
18‧‧‧連結材18‧‧‧Links
22‧‧‧下部框架22‧‧‧ Lower frame
22a‧‧‧罐材22a‧‧‧cans
22b‧‧‧罐材22b‧‧‧cans
22c‧‧‧罐材22c‧‧‧cans
22d‧‧‧罐材22d‧‧‧cans
24b‧‧‧補強材24b‧‧‧ reinforcing materials
26‧‧‧分割部26‧‧‧ Division
26a‧‧‧向外凸緣26a‧‧‧Outward flange
30‧‧‧高架部30‧‧‧Elevated Department
30a‧‧‧支撐部30a‧‧‧Support
30b‧‧‧線形馬達部30b‧‧‧Linear Motor Division
30c‧‧‧移動部30c‧‧‧Mobile Department
40‧‧‧導引軌道40‧‧‧Guided track
42‧‧‧永久磁鐵42‧‧‧ permanent magnet
44‧‧‧導引滑件44‧‧‧Guide slider
46‧‧‧連結板46‧‧‧link board
48‧‧‧電磁鐵48‧‧‧Electromagnet
50‧‧‧除振組件50‧‧‧ Vibration isolation components
52‧‧‧突出片52‧‧‧ highlights
54‧‧‧補強肋54‧‧‧ reinforcing ribs
60‧‧‧纜線載體60‧‧‧ cable carrier
60a‧‧‧一端60a‧‧‧End
60b‧‧‧另一端60b‧‧‧The other end
62‧‧‧支撐台62‧‧‧Support table
64‧‧‧連絡構件64‧‧‧Contact components
101‧‧‧載台裝置101‧‧‧Terminal device
110‧‧‧基台110‧‧‧Abutment
112‧‧‧上部框架112‧‧‧ upper frame
112a‧‧‧罐材112a‧‧‧cans
112b‧‧‧罐材112b‧‧‧cans
112c‧‧‧罐材112c‧‧‧cans
112d‧‧‧罐材112d‧‧‧cans
114a‧‧‧補強材114a‧‧‧ reinforcing material
114b‧‧‧補強材114b‧‧‧ reinforcing materials
114c‧‧‧補強材114c‧‧‧ reinforcing materials
114d‧‧‧補強材114d‧‧‧ reinforcing materials
116‧‧‧分割部116‧‧‧ Division
116a‧‧‧向外凸緣116a‧‧‧Outward flange
118‧‧‧連結材118‧‧‧Links
119‧‧‧凹陷119‧‧‧ dent
122‧‧‧下部框架122‧‧‧lower frame
122a‧‧‧罐材122a‧‧‧cans
122b‧‧‧罐材122b‧‧‧cans
122c‧‧‧罐材122c‧‧‧cans
122d‧‧‧罐材122d‧‧‧cans
124a‧‧‧補強材124a‧‧‧ reinforcing materials
124b‧‧‧補強材124b‧‧‧ reinforcing materials
124c‧‧‧補強材124c‧‧‧ reinforcing material
126‧‧‧分割部126‧‧‧ Division
130‧‧‧高架部130‧‧‧Elevated Department
130a‧‧‧支撐部130a‧‧‧Support
130b‧‧‧線形馬達部130b‧‧‧Linear Motor Division
130c‧‧‧移動部130c‧‧‧Mobile Department
140‧‧‧導引軌道140‧‧‧guide track
142‧‧‧永久磁鐵142‧‧‧ permanent magnet
144‧‧‧導引滑件144‧‧‧ Guide slider
146‧‧‧連結板146‧‧‧Link board
148‧‧‧電磁鐵148‧‧‧electromagnet
150‧‧‧除振組件150‧‧‧Vibration components
152‧‧‧突出片152‧‧‧ protruding film
154‧‧‧補強肋154‧‧‧ reinforcing ribs
160‧‧‧纜線載體160‧‧‧Cable carrier
160a‧‧‧一端160a‧‧‧End
160b‧‧‧另一端160b‧‧‧The other end
162‧‧‧支撐台162‧‧‧Support table
164‧‧‧連絡構件164‧‧‧Contact components
170‧‧‧架台170‧‧‧ 台台
172a‧‧‧罐材172a‧‧‧cans
172b‧‧‧罐材172b‧‧‧cans
172c‧‧‧罐材172c‧‧‧cans
172d‧‧‧罐材172d‧‧‧cans
174a‧‧‧補強材174a‧‧‧ reinforcing materials
174b‧‧‧補強材174b‧‧‧ reinforcing material
176‧‧‧分割部176‧‧‧ Division
178‧‧‧支柱178‧‧‧ pillar
[第1圖]本發明的第1實施例的載台裝置的立體圖。Fig. 1 is a perspective view of a stage device according to a first embodiment of the present invention.
[第2圖]將具備第1圖的載台裝置的基台從上方所見的立體圖。[Fig. 2] A perspective view of a base including the stage device of Fig. 1 as seen from above.
[第3圖]將基台從下方所見的立體圖。[Fig. 3] A perspective view of the base seen from below.
[第4圖]連結有連結材的基台的下部框架是被支撐在除振組件的狀態的立體圖。[Fig. 4] A perspective view of a lower frame to which a base of a connecting material is connected is supported by a vibration isolating assembly.
[第5圖]將工件壓板組裝於第1圖的載台裝置的立體圖。[Fig. 5] A perspective view of a stage plate device of Fig. 1 in which a workpiece presser is assembled.
[第6圖]顯示分割部的前視圖。[Fig. 6] A front view showing the divided portion.
[第7圖]顯示纜線載體的配置的部分擴大圖。[Fig. 7] A partially enlarged view showing the arrangement of the cable carrier.
[第8圖]如第1圖所示的載台裝置的側面圖。Fig. 8 is a side view of the stage device shown in Fig. 1.
[第9圖]顯示分割部的變形例的圖。[Fig. 9] A view showing a modification of the divided portion.
[第10圖]本發明的第2實施例的載台裝置的立體圖。Fig. 10 is a perspective view of a stage device according to a second embodiment of the present invention.
[第11圖]將具備第10圖的載台裝置的基台從上方所見的立體圖。[Fig. 11] A perspective view of a base including the stage device of Fig. 10 as seen from above.
[第12圖]將基台從下方所見的立體圖。[Fig. 12] A perspective view of the base seen from below.
[第13圖]將基台分割後的後側的塊體從上方所見的立體圖。[Fig. 13] A perspective view of the block on the rear side after the base is divided from above.
[第14圖]連結有連結材的基台的下部框架的立體圖。[Fig. 14] A perspective view of a lower frame to which a base of a connecting material is connected.
[第15圖]顯示架台及除振組件的立體圖。[Fig. 15] A perspective view showing the gantry and the vibration removing assembly.
[第16圖]顯示纜線載體的配置的部分擴大圖。[Fig. 16] A partially enlarged view showing the arrangement of the cable carrier.
[第17圖]如第10圖所示的載台裝置的側面圖。Fig. 17 is a side view of the stage device shown in Fig. 10.
10‧‧‧基台10‧‧‧Abutment
12‧‧‧上部框架12‧‧‧ upper frame
12a‧‧‧罐材12a‧‧‧cans
12b‧‧‧罐材12b‧‧‧cans
12c‧‧‧罐材12c‧‧‧cans
12d‧‧‧罐材12d‧‧‧cans
14a‧‧‧補強材14a‧‧‧ reinforcing materials
14b‧‧‧補強材14b‧‧‧ reinforcing materials
14c‧‧‧補強材14c‧‧‧ reinforcing material
14d‧‧‧補強材14d‧‧‧ reinforcing materials
16‧‧‧分割部16‧‧‧ Division
18‧‧‧連結材18‧‧‧Links
22‧‧‧下部框架22‧‧‧ Lower frame
22a‧‧‧罐材22a‧‧‧cans
22c‧‧‧罐材22c‧‧‧cans
26‧‧‧分割部26‧‧‧ Division
30‧‧‧高架部30‧‧‧Elevated Department
30a‧‧‧支撐部30a‧‧‧Support
30b‧‧‧線形馬達部30b‧‧‧Linear Motor Division
30c‧‧‧移動部30c‧‧‧Mobile Department
40‧‧‧導引軌道40‧‧‧Guided track
42‧‧‧永久磁鐵42‧‧‧ permanent magnet
44‧‧‧導引滑件44‧‧‧Guide slider
46‧‧‧連結板46‧‧‧link board
48‧‧‧電磁鐵48‧‧‧Electromagnet
50‧‧‧除振組件50‧‧‧ Vibration isolation components
52‧‧‧突出片52‧‧‧ highlights
54‧‧‧補強肋54‧‧‧ reinforcing ribs
60‧‧‧纜線載體60‧‧‧ cable carrier
60a‧‧‧一端60a‧‧‧End
60b‧‧‧另一端60b‧‧‧The other end
62‧‧‧支撐台62‧‧‧Support table
64‧‧‧連絡構件64‧‧‧Contact components
Claims (7)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007321307A JP4195497B2 (en) | 2007-12-12 | 2007-12-12 | Stage equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200926345A TW200926345A (en) | 2009-06-16 |
| TWI383467B true TWI383467B (en) | 2013-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW097109874A TWI383467B (en) | 2007-12-12 | 2008-03-20 | Stage device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4195497B2 (en) |
| KR (1) | KR100993473B1 (en) |
| CN (1) | CN101459103B (en) |
| TW (1) | TWI383467B (en) |
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| JP2010225687A (en) * | 2009-03-19 | 2010-10-07 | Shibaura Mechatronics Corp | Apparatus for processing of substrate |
| CN102378665B (en) | 2009-04-07 | 2015-01-21 | 通快公司 | A workpiece processing machine with a processing head, a suction duct and structural connecting frame section for transporting the processing machine |
| KR101387680B1 (en) | 2009-04-07 | 2014-04-23 | 트럼프 인크. | A cutting machine and a method of cutting a workpiece |
| JP5380225B2 (en) * | 2009-09-24 | 2014-01-08 | 株式会社日立ハイテクノロジーズ | Glass substrate inspection equipment |
| WO2011059003A1 (en) * | 2009-11-10 | 2011-05-19 | 株式会社アルバック | Inspecting apparatus |
| KR101055214B1 (en) * | 2010-08-02 | 2011-08-09 | 김복인 | A large-sized cutter with a field assemble |
| CN103429382B (en) | 2011-03-24 | 2016-02-24 | 村田机械株式会社 | Machine tool system |
| CN103594280B (en) * | 2013-10-31 | 2015-08-26 | 西安交通大学 | The vacuum circuit-breaker of a kind of NEW TYPE OF COMPOSITE contact vacuum interrupter and application thereof |
| DE102017007962A1 (en) * | 2017-08-24 | 2019-02-28 | Deckel Maho Seebach Gmbh | machine tool |
| JP6628950B1 (en) * | 2019-04-25 | 2020-01-15 | 三菱電機株式会社 | Laser processing machine |
| CN110000578A (en) * | 2019-04-29 | 2019-07-12 | 广船国际有限公司 | A kind of processing method of the support construction and flange of boring equipment |
| JP7223289B2 (en) * | 2020-09-24 | 2023-02-16 | 日新イオン機器株式会社 | Conveyor |
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| US6002465A (en) * | 1996-10-15 | 1999-12-14 | Canon Kabushiki Kaisha | Stage device, exposure apparatus using the same, and device production method |
| US6266133B1 (en) * | 1998-05-06 | 2001-07-24 | Canon Kabushiki Kaisha | Stage device, an exposure apparatus and a device manufacturing method using the same |
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| JP2006049384A (en) * | 2004-07-30 | 2006-02-16 | Laserfront Technologies Inc | Gantry xy stage |
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- 2007-12-12 JP JP2007321307A patent/JP4195497B2/en not_active Expired - Fee Related
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2008
- 2008-03-20 TW TW097109874A patent/TWI383467B/en not_active IP Right Cessation
- 2008-04-11 CN CN2008100870894A patent/CN101459103B/en not_active Expired - Fee Related
- 2008-09-23 KR KR1020080093188A patent/KR100993473B1/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6002465A (en) * | 1996-10-15 | 1999-12-14 | Canon Kabushiki Kaisha | Stage device, exposure apparatus using the same, and device production method |
| US6266133B1 (en) * | 1998-05-06 | 2001-07-24 | Canon Kabushiki Kaisha | Stage device, an exposure apparatus and a device manufacturing method using the same |
| JP2002365026A (en) * | 2001-06-07 | 2002-12-18 | Sigma Technos Kk | Substrate inspection apparatus |
| JP2006224039A (en) * | 2005-02-21 | 2006-08-31 | Dainippon Printing Co Ltd | Pattern forming apparatus, patterning method, apparatus and method for processing substrate |
| JP2006269509A (en) * | 2005-03-22 | 2006-10-05 | Nsk Ltd | Positioning device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4195497B2 (en) | 2008-12-10 |
| TW200926345A (en) | 2009-06-16 |
| CN101459103A (en) | 2009-06-17 |
| KR100993473B1 (en) | 2010-11-10 |
| CN101459103B (en) | 2011-11-30 |
| KR20090063076A (en) | 2009-06-17 |
| JP2008060614A (en) | 2008-03-13 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |