JP7301655B2 - Substrate working device and its manufacturing method - Google Patents

Description

The present invention relates to a board working apparatus and its manufacturing method, and more particularly to a board working apparatus including a base and a head unit and its manufacturing method.

2. Description of the Related Art Conventionally, there has been known a substrate working apparatus that includes a base and a head unit (see, for example, Patent Document 1).

The aforementioned Patent Document 1 discloses a component mounting apparatus (substrate working apparatus) including a base and a mounting head (head unit). The component mounting apparatus also includes an X-axis beam and a pair of X-axis beam supports.

The mounting head of Patent Document 1 is configured to mount the sucked component on the substrate. The X-axis beam supports the mounting head so as to be movable in the substrate transport direction. Each of the pair of X-axis beam supports supports the X-axis beam so as to be movable in a direction orthogonal to the substrate transfer direction. The pair of X-axis beam supports and base are integrally formed.

JP 2013-219240 A

Here, although not specified in Patent Document 1, the base is generally made of cast iron. The X-axis beam support, like the base, is believed to be made of cast iron. In this case, there is an inconvenience that the pair of X-axis beam supporters tend to bend due to the load acting on the pair of X-axis beam supporters as the mounting head moves. For this reason, in the component mounting apparatus of Patent Document 1, the mounting head vibrates due to the deflection of the pair of X-axis beam supports accompanying the movement of the mounting head. There is a problem that the mounting accuracy (working accuracy) on the substrate by the head (head unit) is lowered.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and is a substrate working apparatus capable of suppressing a decrease in the accuracy of work performed on a substrate by the head unit by suppressing the vibration of the head unit. and a method for producing the same.

In order to achieve the above object, a substrate working apparatus according to a first aspect of the present invention includes a base, a head unit that moves above the substrate and performs a predetermined operation on the substrate, and a head unit that moves horizontally. a first supporting portion that supports the first support movably in a first direction of the horizontal direction; and a pair of third and fourth struts provided at positions opposed to the first and second struts of the base in the first direction and facing in the second direction, and the pair of first struts and a pair of second support and third support provided over the second support and the pair of third and fourth support, respectively, and supporting the first support so as to be movable in the second direction In addition, the second support includes a first high-rigidity portion that is provided across the first strut and the second strut and is made of a high-rigidity material having a Young's modulus higher than that of cast iron, and the third support includes: A second high-rigidity portion provided across the third support and the fourth support and formed of a high-rigidity material having a higher Young's modulus than cast iron , the first support includes the second support and the third It is attached to the upper surface of each of the supports so as to be movable in the second direction.

In the board working apparatus according to the first aspect of the present invention, as described above, the pair of first and second pillars and the pair of third and fourth pillars are provided to straddle each other, and are arranged in the second direction. A pair of second and third supports are provided for movably supporting the first support. The second support portion is provided with a first high-rigidity portion extending over the first support and the second support and formed of a high-rigidity material having a Young's modulus higher than that of cast iron. Further, the third support portion is provided with a second high-rigidity portion that is provided across the third support and the fourth support and is made of a high-rigidity material having a Young's modulus higher than that of cast iron. As a result, even when a load is applied to the pair of second and third support portions as the head unit moves, the first high-rigidity portion and the second high-rigidity portion respectively cause the pair of second support portions and third support portions to move. Deflection of the third support portion can be suppressed. As a result, by suppressing the vibration of the head unit caused by the bending of the pair of the second supporting portion and the third supporting portion, it is possible to suppress the deterioration of the work accuracy of the substrate by the head unit. In addition, by suppressing the vibration of the head unit, it is not necessary to stop the work on the substrate by the head unit until the vibration of the head unit stops. can be suppressed. Also, by suppressing the vibration of the head unit, the movement speed of the head unit can be increased, so that the working time for the substrate by the head unit can be shortened. Moreover, by providing the first high-rigidity portion and the second high-rigidity portion, it is not necessary to increase the thickness of the pair of the second support portion and the third support portion. can be done.
A substrate working apparatus according to a second aspect of the present invention comprises a base, a head unit that moves above a substrate and performs a predetermined operation on the substrate, and moves the head unit in a first horizontal direction. a first supporting part that supports the base, a pair of first and second supports provided on the base and facing in a second direction orthogonal to the first direction in the horizontal direction, and the first support of the base and second struts, a pair of third and fourth struts, a pair of first and second struts, and a pair of third A pair of second and third support sections provided over the three and fourth columns, respectively, and supporting the first support section movably in the second direction, the second support section comprising: The first high-rigidity part is provided across the first strut and the second strut and is formed of a high-rigidity material having a higher Young's modulus than cast iron, and the third support part includes the third strut and the fourth strut. and includes a second high-rigidity portion formed of a high-rigidity material having a higher Young's modulus than cast iron, and each of the first high-rigidity portion and the second high-rigidity portion is a structural steel material, a structural It is made of carbon steel or carbon material, the whole of the second support part is composed of a pair of the first support and the first high-rigidity part provided separately from the second support, and the whole of the third support is: The second high-rigidity part is provided separately from the pair of the third and fourth struts, and the second support part made up of the first high-rigidity part is attached to the pair of the first and second struts. a first fastening member; A first countersunk hole and a second countersunk hole for inserting the first fastening member and the second fastening member are formed in the upper surface of each.
As a result, the first fastening member and the second fastening member can be accommodated in the first and second counterbore holes, respectively, so that other parts arranged on the upper surfaces of the second support portion and the third support portion can be accommodated. It is possible to prevent the first fastening member and the second fastening member from interfering with the configuration. A pair of second and third support portions respectively constituted by the first high-rigidity portion and the second high-rigidity portion are formed with the first counterbore and the second counterbore, respectively. A decrease in the strength of each of the second support portion and the third support portion due to the formation of the hole and the second counterbored hole can be suppressed as much as possible, and the required strength can be secured.
A substrate working apparatus according to a third aspect of the present invention comprises a base, a head unit that moves above a substrate and performs a predetermined operation on the substrate, and moves the head unit in a first horizontal direction. a first supporting part that supports the base, a pair of first and second supports provided on the base and facing in a second direction orthogonal to the first direction in the horizontal direction, and the first support of the base and second struts, a pair of third and fourth struts, a pair of first and second struts, and a pair of third A pair of second and third support sections provided over the three and fourth columns, respectively, and supporting the first support section movably in the second direction, the second support section comprising: The first high-rigidity part is provided across the first strut and the second strut and is formed of a high-rigidity material having a higher Young's modulus than cast iron, and the third support part includes the third strut and the fourth strut. and includes a second high-rigidity portion formed of a high-rigidity material having a higher Young's modulus than cast iron, and each of the first high-rigidity portion and the second high-rigidity portion is a structural steel material, a structural It is made of carbon steel or carbon material, the whole of the second support part is composed of a pair of the first support and the first high-rigidity part provided separately from the second support, and the whole of the third support is: The second high-rigidity portion is provided separately from the pair of third and fourth struts, and each of the second support portion and the third support portion serves as a guide member that movably supports the first support portion. and a driving member projecting from the lower end of the first portion toward the side opposite to the central portion of the base in the first direction and moving the first support portion in the second direction. and a second portion to be installed.
Thus, by projecting the second portion from the lower end portion of the first portion toward the side opposite to the central portion in the first direction of the base, the second support portion is compared with the second support portion constituted only by the first portion. Therefore, the rigidity of the pair of the second support portion and the third support portion can be increased.

In the board working apparatus according to the first aspect of the present invention, preferably each of the first high-rigidity portion and the second high-rigidity portion is made of a structural steel material, a structural carbon steel material, or a carbon material. With this configuration, it is possible to easily form the high-rigidity portion having a Young's modulus higher than that of cast iron using structural steel, structural carbon steel, or carbon material. The third support can be easily realized.

In this case, preferably, the base is provided with a substrate transport section for transporting the substrate, and each of the pair of first and second pillars is arranged in the second direction so as to sandwich the substrate transport section. Each of the pair of third and fourth struts is spaced apart from each other in the second direction so as to sandwich the board transfer section, and the first high-rigidity section is located at the second In the direction, the second high-rigidity portion is provided in a range from at least the inner end of the first strut to the inner end of the second strut, and the second high-rigidity section extends at least from the inner end of the third strut to the fourth strut in the second direction. It is provided in a range extending over the inner end. According to this structure, the first high-rigidity portion and the second high-rigidity portion are provided at a portion of the pair of the second support portion and the third support portion that easily bends as the head unit moves. It is possible to effectively suppress the bending of the pair of second and third support portions due to movement. In addition, the force applied from the first support portion to the second support portion can be efficiently distributed to the first and second support columns, and bending of the second support portion can be more reliably avoided. In addition, the force applied from the first support portion to the second support portion can be efficiently distributed to the third and fourth support columns, and bending of the second support portion can be more reliably avoided.

In the board working device including the high-rigidity portion made of the structural steel material, the structural carbon steel material, or the carbon material, preferably, the base and the first, second, third, and fourth columns are , integrally formed of cast iron. With this configuration, the base and the first, second, third, and fourth struts are manufactured separately, and the first, second, third, and fourth struts are attached to the base. The number of parts of the board working device can be reduced and the structure of the board working device can be simplified as compared with the case of mounting.

In the board working device including the high-rigidity portion made of the structural steel material, the structural carbon steel material, or the carbon material, it is preferable that the entire second support portion is The entirety of the third supporting portion is constituted by the second high-rigidity portion provided separately from the pair of the third and fourth struts. With this configuration, the entire pair of second support portions and third support portions that support the head unit can be formed by the first high-rigidity portion and the second high-rigidity portion, respectively. It is possible to make the support section and the third support section more difficult to bend. As a result, the vibration of the head unit caused by the bending of the pair of second and third support portions can be further suppressed, thereby further suppressing a decrease in the accuracy of work performed on the substrate by the head unit.

In this case, preferably, a first fastening member that attaches a second support portion composed of a first high-rigidity portion to a pair of first and second columns, and a third support portion composed of a second high-rigidity portion to the pair of third and fourth struts, wherein the first and second fastening members are inserted into the upper surfaces of the second support and the third support, respectively. A first counterbore and a second counterbore are formed. With this configuration, the first fastening member and the second fastening member can be accommodated in the first and second counterbore holes, respectively, so that they are arranged on the upper surfaces of the second support portion and the third support portion. It is possible to prevent the first fastening member and the second fastening member from interfering with other configurations that are installed. A pair of second and third support portions respectively constituted by the first high-rigidity portion and the second high-rigidity portion are formed with the first counterbore and the second counterbore, respectively. A decrease in the strength of each of the second support portion and the third support portion due to the formation of the hole and the second counterbored hole can be suppressed as much as possible, and the required strength can be secured.

In the board working apparatus provided with the second support portion which is entirely composed of the high-rigidity portion, preferably, each of the second support portion and the third support portion is provided with a guide member for movably supporting the first support portion. and a drive member projecting from the lower end of the first portion toward the side opposite to the central portion of the base in the first direction and moving the first support portion in the second direction. and a second portion. According to this structure, the second support is configured by only the first portion by projecting the second portion from the lower end portion of the first portion toward the side opposite to the central portion in the first direction of the base. The rigidity of the pair of the second supporting portion and the third supporting portion can be increased compared to the portion.

In this case or in the board working apparatus according to the third aspect , preferably, the first support section is provided with a mover of a linear motor for moving the first support section in the second direction. The member is provided on the first portion and has a guide rail for guiding the movement of the first support portion in the second direction, and the driving member corresponds to the mover of the linear motor of the first support portion and moves in the second direction. and a linear motor stator for moving the first support in the second direction. With this configuration, the linearly extending guide rail and the stator of the linear motor can be arranged by the first portion and the second portion of the second support portion, thereby further suppressing an increase in size of the board working apparatus. can do.

In the board working device including the high-rigidity portion made of the structural steel material, the structural carbon steel material, or the carbon material, preferably, the pair of the second support portion and the third support portion are each composed of a support portion main body, It has a first high-rigidity portion and a second high-rigidity portion attached to the support main body as part of each of the pair of second support and third support. With this configuration, the second support portion can be made difficult to bend simply by attaching the first high-rigidity portion to the support portion main body, and the third support portion can be easily bent by simply attaching the second high-rigidity portion to the support portion main body. can be made difficult to bend, it is possible to suppress complication of the structure of the substrate working apparatus.

A method for manufacturing a board working apparatus according to a fourth aspect of the present invention includes a base, and a pair of first and second supports provided on the base and facing in a second direction perpendicular to the first direction in the horizontal direction. a step of integrally forming a support column and a pair of third and fourth support columns from cast iron; a step of forming a second support portion and a third support portion for supporting the support portions by attaching the support portions to their upper surfaces so as to be movable in the second direction; a step of assembling the second supporting portion and assembling the third supporting portion to the pair of the third and fourth supporting portions; forming a surface parallel to the upper surface of the base on each of the second support portion and the third support portion.

In the method for manufacturing a board working apparatus according to the fourth aspect of the present invention, as described above, the pair of first and second struts and the pair of third and fourth struts are provided to straddle each of the second struts. A pair of second support and third support are provided to support the first support so as to be movable in the direction. The second support portion is provided with a first high-rigidity portion extending over the first support and the second support and formed of a high-rigidity material having a Young's modulus higher than that of cast iron. Also, the third support portion includes a second high-rigidity portion that is provided across the third support and the fourth support and is made of a high-rigidity material having a Young's modulus higher than that of cast iron. As a result, even when a load is applied to the pair of second and third support portions as the head unit moves, the first high-rigidity portion and the second high-rigidity portion respectively cause the pair of second support portions and third support portions to move. Deflection of the third support portion can be suppressed. As a result, the displacement of the first support portion in the first direction caused by the flexure of the pair of the second support portion and the third support portion can be suppressed as much as possible. It is possible to obtain a board working apparatus manufacturing method capable of suppressing a decrease in work accuracy for a board by a unit. In addition, after the second support part and the third support part are assembled in the board working device manufacturing method, the upper surface of the base is processed to be flat, and the surface parallel to the upper surface of the base is formed into the second support part and the third support part. A process for forming each of the three support portions is provided. As a result, unlike the case where the second support portion and the third support portion which have been flattened are assembled to the base which has been flattened, the upper surface of the base and the respective surfaces of the second support portion and the third support portion are connected to each other. can be made parallel. As a result, it is possible to improve the positioning accuracy of the head unit, which is supported by the second support portion and the third support portion via the first support portion. can be suppressed. In addition, unlike the case where the second support portion and the third support portion which have undergone plane processing are assembled to the base which has undergone plane processing, the upper surface of the base and the respective surfaces of the second support portion and the third support portion are separated from each other. Since they can be reliably made parallel, an adjustment process for making the upper surface of the base and the surfaces of the second support portion and the third support portion parallel can be omitted.

According to the present invention, as described above, by suppressing the vibration of the head unit, it is possible to suppress the deterioration of the work accuracy of the substrate by the head unit.

1 is a plan view showing an outline of a component mounting apparatus according to first and second embodiments; FIG. BRIEF DESCRIPTION OF THE DRAWINGS It is the front view which showed the outline of the component mounting apparatus by 1st and 2nd embodiment. FIG. 2 is a perspective view showing a base, first to fourth pillars, and a second support portion of the component mounting apparatus according to the first embodiment; 4 is a plan view showing a base, first to fourth columns, and a second support of the component mounting apparatus according to the first embodiment; FIG. FIG. 5 is a cross-sectional view taken along line 110-110 of FIG. 4; 2 is a block diagram showing a control configuration of the component mounting apparatus according to the first embodiment; FIG. 4 is a flow chart showing a manufacturing method of the component mounting apparatus according to the first embodiment; FIG. 10 is a perspective view showing a state before the second support portion is assembled to the first to fourth columns in the assembly process of the manufacturing method of the component mounting apparatus according to the first embodiment; FIG. 10 is a perspective view showing a state after the second support section is assembled to the first to fourth columns in the assembly process of the manufacturing method of the component mounting apparatus according to the first embodiment; 120 is a cross-sectional view along line 120-120 of FIG. 9; FIG. FIG. 7 is a perspective view showing a state after planarizing the upper surface of the board and the upper surface of the second supporting portion in the planarizing step of the manufacturing method of the component mounting apparatus according to the first embodiment; FIG. 13 is a cross-sectional view taken along line 130-130 of FIG. 11; FIG. 11 is a perspective view showing a base, first to fourth columns, and a second support of a component mounting apparatus according to a second embodiment;

Embodiments embodying the present invention will be described below with reference to the drawings.

[First embodiment]
The configuration of a component mounting apparatus 100 according to the first embodiment will be described with reference to FIGS. 1 to 6. FIG. Note that the component mounting apparatus 100 is an example of a "board working apparatus" in the scope of claims.

As shown in FIG. 1, the component mounting apparatus 100 is configured to mount electronic components E such as ICs, transistors, capacitors and resistors on a substrate B such as a printed circuit board.

Here, in the component mounting apparatus 100, the direction in which the board B is transported is defined as the X1 direction, the direction opposite to the direction in which the board B is transported is defined as the X2 direction, and the combined direction of the X1 direction and the X2 direction is defined as the X direction. . Also, of the horizontal directions, the direction orthogonal to the X direction is the Y direction, one of the Y directions is the Y1 direction, and the other Y direction is the Y2 direction. Also, the vertical direction orthogonal to the X direction and the Y direction is defined as the Z direction. Note that the X direction is an example of the "first direction" in the scope of claims. Also, the Y direction is an example of a "second direction" in the scope of claims.

The component mounting apparatus 100 includes a base 1, a feeder placement section 2, a plurality of (four) pillars 3, a board transfer section 4, a head unit 5, a first support section 6, a linear motor 7, A pair of second support portions 8 , a fastening member 9 (see FIG. 5 ), a component recognition camera 10 , a board recognition camera 11 and a control portion 12 are provided. The pair of second support portions 8 is an example of "a pair of second support portions and a third support portion" in the scope of claims.

(base)
The base 1 is a base on which components are arranged in the component mounting apparatus 100 . The base 1 is made of cast iron. Here, the base 1 is preferably made of cast iron having a Young's modulus of about 160 [GPa] or less. The base 1 is more preferably made of FCD (Ferrum Casting Ductile) 450 (a ductile cast iron material) among cast irons.

A plurality of struts 3, a substrate transfer section 4, and a component recognition camera 10 are provided on the base 1 as constituent elements. Further, a control unit 12 is provided inside the base 1 . Further, the base 1 is provided with feeder placement portions 2 on which a plurality of tape feeders 21 can be placed on both sides in the Y direction (the Y1 direction side and the Y2 direction side).

(tape feeder)
The tape feeder 21 is a device that supplies electronic components E to be mounted on the substrate B. As shown in FIG. The tape feeder 21 holds a reel (not shown) wound with a tape holding a plurality of electronic components E at predetermined intervals. Further, the tape feeder 21 is configured to feed the tape according to the component holding operation for taking out the electronic component E by the head unit 5 . The tape feeder 21 is configured to feed the electronic component E from the leading end (suction position) on the working position side by feeding the tape.

(multiple struts)
As shown in FIG. 2 , the plurality of struts 3 are configured to support the second support portion 8 . The plurality of struts 3 and the base 1 are integrally formed of cast iron. That is, the multiple struts 3 are made of cast iron. Like the base 1, cast iron having a Young's modulus of about 160 [GPa] or less is preferably used for the plurality of columns 3. As with the base 1, the plurality of pillars 3 are more preferably made of FCD450 among cast irons.

As shown in FIG. 3 , the plurality of struts 3 includes a pair of first struts 31 and second struts 32 and a pair of third struts 33 and fourth struts 34 .

A pair of the first support 31 and the second support 32 are opposed to each other in the Y direction. A pair of the third support 33 and the fourth support 34 are opposed to each other in the Y direction. A pair of the third support column 33 and a fourth support column 34 are arranged at positions facing the pair of the first support column 31 and the second support column 32 in the X1 direction, respectively.

Specifically, the first column 31 is arranged on the X2 direction side and the Y2 direction side. The second column 32 is arranged on the X2 direction side and the Y1 direction side. The third column 33 is arranged on the X1 direction side and the Y2 direction side. The fourth column 34 is arranged on the X1 direction side and the Y1 direction side. The first pillar 31, the second pillar 32, the third pillar 33, and the fourth pillar 34 each protrude in the Z1 direction from the surface (upper surface) of the base 1 on the Z1 direction side. The first support 31, the second support 32, the third support 33, and the fourth support 34 are each formed in a substantially trapezoidal shape when viewed from the X1 direction side. That is, the first support 31, the second support 32, the third support 33, and the fourth support 34 each have a portion protruding from the end of the base 1 in the Y direction.

The first support 31 and the third support 33 are provided on the base 1 and face each other in the X direction. The second column 32 and the fourth column 34 are provided on the base 1 and face each other in the X direction. In addition, the first column 31 and the second column 32 face each other in the Y direction with a predetermined gap M1 therebetween so as to sandwich the substrate transfer section 4 . In addition, the third column 33 and the fourth column 34 face each other in the Y direction with a predetermined gap M2 interposed therebetween. Thus, between the first support 31 and the second support 32 and between the third support 33 and the fourth support 34, a transfer space 35 through which the substrate transfer section 4 passes is formed.

(substrate transfer unit)
As shown in FIG. 1, the board transfer section 4 is configured to load the board B from outside the component mounting apparatus 100 and transfer the board B in the transfer direction (X1 direction). That is, the substrate transfer section 4 is provided on the base 1 and configured to transfer the substrate B. As shown in FIG. The substrate transfer section 4 includes a pair of conveyor sections 41 and a drive motor 42 (see FIG. 6) for rotating the pair of conveyor sections 41 . Each of the pair of conveyor sections 41 has a pulley (not shown) and a loop-shaped conveying belt looped around the pulley. The transport speed of the substrate B placed on the pair of conveyors 41 is controlled by controlling the drive motor 42 by the controller 12 .

(head unit)
As shown in FIG. 2, the head unit 5 is a head unit 5 for mounting components, and moves in the Z1 direction (upward) of the board B so as to perform a predetermined work (mounting work) on the board B. It is configured. That is, the head unit 5 is configured to mount the electronic component E on the substrate B fixed at the working position. Specifically, the head unit 5 includes a plurality of (four) mounting heads 51 that hold the electronic components E and mount the electronic components E at target mounting positions (not shown) on the substrate B. .

Each of the plurality of mounting heads 51 is connected to a pressure generator (not shown), and is configured to be able to hold (adsorb) the electronic component E to the nozzle attached to the tip by the negative pressure generated by the pressure generator. It is Further, each of the plurality of mounting heads 51 is configured to be able to mount (mount) the electronic component E on the substrate B by switching the negative pressure generated by the pressure generating device to positive pressure.

Each of the plurality of mounting heads 51 is configured to be movable in the Z direction (vertical direction) by a Z-axis motor 52 . Moreover, each of the plurality of mounting heads 51 is configured to be rotatable about the rotation axis by an R-axis motor 53 (see FIG. 6).

(First support part)
As shown in FIG. 1, the first support section 6 is configured to support the head unit 5 so as to be movable in the X direction of the horizontal direction. That is, the first support section 6 is configured to support the head unit 5 so as to be movable in the transport direction of the substrate B (X1 direction) and in the direction opposite to the transport direction of the substrate B (X2 direction).

A ball screw shaft 61 extending in the X1 direction and an X-axis motor 62 for rotating the ball screw shaft 61 are attached to the first support portion 6 . The head unit 5 is provided with a ball nut (not shown) that engages with the ball screw shaft 61 of the first support portion 6 . The head unit 5 is configured to be movable in the X direction together with a ball nut that engages with the ball screw shaft 61 when the ball screw shaft 61 is rotated by the X-axis motor 62 .

The first support portion 6 is provided with a mover 71, which will be described later, of the linear motor 7 for moving the first support portion 6 in the Y direction. The mover 71 is fixed to a plate 63 provided at the end of the first support portion 6 on the X1 direction side.

(linear motor)
As shown in FIG. 2, the linear motor 7 is configured to move the first support portion 6 in the Y direction. Specifically, the linear motor 7 includes a mover 71 , a stator 72 and guide rails 73 . In other words, the linear motor 7 controls the attractive force and the repulsive force between the mover 71 and the stator 72 and causes the mover 71 to generate a driving force in the Y direction, thereby moving the first support portion along the guide rail 73 . 6 in the Y direction. The stator 72 is an example of the "driving member" in the claims. Also, the guide rail 73 is an example of a "guide member" in the claims.

With such a configuration, the head unit 5 is configured to be movable on the base 1 in the horizontal plane (in the X direction and the Y direction). As a result, the head unit 5 can be moved above the board B fixed in the working position, and the electronic component E can be mounted on the board B at a predetermined position.

(Second support part)
As shown in FIGS. 2 and 3, each of the pair of second support portions 8 is arranged to face each other in the X direction. Here, the second support portion 8 on the X2 direction side is referred to as a second support portion 8a, and the second support portion 8 on the X1 direction side is referred to as a second support portion 8b. The second support portion 8a on the X2 direction side is arranged across the first support 31 and the second support 32 . The second support portion 8b on the X1 direction side is arranged across the third support 33 and the fourth support 34 . The second support portion 8a on the X2 direction side is an example of the "second support portion" in the claims, and the second support portion 8b on the X1 direction side is the "third support portion" in the claims. is an example of

The second support portion 8a on the X2 direction side is provided on the first support 31 and the second support 32, and is configured to support the first support 6 movably in the Y direction. The second support portion 8b on the X1 direction side is provided on the third support 33 and the fourth support 34, and is configured to support the first support 6 movably in the Y direction. That is, each of the pair of second support portions 8 supports the head unit 5 so as to be movable in one direction (Y1 direction) and the other direction (Y2 direction) perpendicular to the transport direction (X direction) of the substrate B. is configured as

At least part of each of the second support portion 8b on the X1 direction side and the second support portion 8a on the X2 direction side of the present embodiment includes a high rigidity portion 83 formed of a high rigidity material having a higher Young's modulus than cast iron. contains. The high-rigidity portion 83 included in the second support portion 8b on the X1 direction side is an example of the "first high-rigidity portion" in the scope of claims. Further, the high-rigidity portion 83 included in the second support portion 8a on the X2 direction side is an example of the "second high-rigidity portion" in the scope of claims.

In the following description, since the second support portion 8b on the X1 direction side and the second support portion 8a on the X2 direction side have the same configuration, the second support portion 8a on the X2 direction side will be described.

Here, the high-rigidity portion 83 of the second support portion 8a is provided across the first support 31 and the second support 32 . Specifically, the entire second support portion 8a is configured by a high-rigidity portion 83 provided separately from the first and second struts 32 . That is, the second support portion 8a is attached separately from the first and second support columns 32 integrally provided on the base 1. As shown in FIG.

The high-rigidity portion 83 of the second support portion 8a is provided in a range extending from at least the inner end of the first support 31 to the inner end of the second support 32 in the Y direction. Specifically, the high-rigidity portion 83 of the second support portion 8a is provided in a range D extending from the outer end of the first support 31 to the outer end of the second support 32 in the Y direction. The high-rigidity portion 83 of the second support portion 8a has a range Da (Fig. 3). Also, the high-rigidity portion 83 of the second support portion 8b may be provided in the range Da similarly to the high-rigidity portion 83 of the second support portion 8a. As a result, the force applied from the first support portion 6 to the second support portion 8a with the movement of the head unit 5 can be distributed to the first support 31 and the second support 32, and the force can be distributed with the movement of the head unit 5. Therefore, the force applied from the first supporting portion 6 to the second supporting portion 8b can be distributed to the third support 33 and the fourth support 34. As shown in FIG.

In addition, the second support portion 8a as the high-rigidity portion 83 is stronger than the base 1 and the first support 31, the second support 32, the third support 33, and the fourth support 34 provided integrally with the base 1. It is made of a material with a high Young's modulus. Specifically, the second support portion 8a is made of structural steel. A structural steel material having a Young's modulus of about 210 [GPa] or more is preferably used for the second support portion 8a. Examples of structural steel materials having the above Young's modulus include SS (Steel Structure) 400, S45C, and S50C. is more preferably SS400.

The second support portion 8a has a substantially L shape when viewed from the Y2 direction side. That is, the second support portion 8a includes a first portion 81 and a second portion 82. As shown in FIG.

The first portion 81 is a portion on the Z1 direction side of the second support portion 8a. The first portion 81 is provided integrally with the end of the second portion 82 on the Z1 direction side. The first portion 81 is arranged on the side of the central portion C in the X direction of the base 1 in the second portion 82 . The first portion 81 protrudes from the second portion 82 in the Z1 direction. The width in the X direction of the first portion 81 is smaller than the width in the X direction of the upper surfaces (surfaces on the Z1 direction side) of the first support 31 and the second support 32 .

The second portion 82 is a portion on the Z2 direction side of the second support portion 8a. The second portion 82 is provided at the end of the first portion 81 on the Z2 direction side. The second portion 82 is attached to the end of each of the first support 31 and the second support 32 on the Z1 direction side. The second portion 82 is arranged over the entire upper surface of the first support 31 and the second support 32 . The X-direction width of the second portion 82 is substantially the same as the X-direction width of the upper surfaces of the first support 31 and the second support 32 .

Here, a guide rail 73 that movably supports the first support portion 6 is installed on the first portion 81 . That is, the guide rail 73 is provided on the first portion 81 and guides the movement of the first support portion 6 in the Y direction. A stator 72 for moving the first support portion 6 in the Y direction is installed on the second portion 82 . That is, the stator 72 is provided on the second portion 82 corresponding to the mover 71 of the first support section 6, and has the function of moving the first support section 6 in the Y direction.

(Fastening member)
As shown in FIGS. 4 and 5 , the fastening member 9 is configured to attach the second support portion 8a composed of the high-rigidity portion 83 to the first support 31 and the second support 32 . Further, the fastening member 9 is configured such that the second support portion 8b configured by the high-rigidity portion 83 is attached to the third support 33 and the fourth support 34 in the same manner as the second support 8a. The fastening member 9 of the second support portion 8a on the X2 direction side is an example of the "first fastening member" in the claims, and the fastening member 9 of the second support portion 8b on the X1 direction side is the is an example of the "second fastening member" in the range of

Here, a counterbored hole 84 into which the fastening member 9 is inserted is formed in the upper surface of the second support portion 8a constituted by the high-rigidity portion 83. As shown in FIG. The counterbore hole 84 of the second support portion 8a on the X2 direction side is an example of the "first counterbore hole" in the scope of claims, and the counterbore hole 84 of the second support portion 8b on the X1 direction side is an example of the is an example of the "second countersunk hole" in the range of .

A plurality of (eight) counterbore holes 84 are formed in the upper surface of the second support portion 8a. The counterbore 84 has a counterbore 84a and a through hole 84b. The counterbored portion 84a is recessed in the Z2 direction from the surface of the second portion 82 of the second support portion 8a on the Z1 direction side. The through hole 84b penetrates the second portion 82 in the Z direction from the bottom surface of the countersunk portion 84a.

The fastening member 9 is configured by a bolt. The fastening member 9 is accommodated in the counterbored hole 84 . In other words, the upper surface (surface on the Z1 direction side) of the fastening member 9 is located at a height lower than the upper surface (surface on the Z1 direction side) of the first portion 81 of the second support portion 8a while being housed in the countersunk hole 84. are placed in The counterbore hole 84 described above is formed not only in the second support portion 8a but also in the second support portion 8b, and the fastening member 9 is also accommodated in the counterbore hole 84 of the second support portion 8b.

(Component recognition camera)
The component recognition camera 10 is a camera for capturing an image of the electronic component E held (adsorbed) by the mounting head 51 prior to mounting the electronic component E on the board B, as shown in FIG. The component recognition camera 10 is fixed on the base 1 and configured to capture an image of the electronic component E held (adsorbed) by the mounting head 51 from below the electronic component E (Z2 direction).

(PCB recognition camera)
The board recognition camera 11 is attached to the head unit 5, and prior to mounting the electronic component E on the board B, the FI mark (fiducial mark) (not shown) attached to the upper surface of the board B is ) is a camera for capturing a mark. The FI mark is a mark for confirming the position of the substrate B. FIG.

(control part)
The control unit 12 is a control circuit that includes a CPU (Central Processing Unit) 12a, a storage unit 12b, and the like, and controls the operation of the component mounting apparatus 100, as shown in FIG. The controller 12 is electrically connected to the tape feeder 21 , drive motor 42 , head unit 5 , X-axis motor 62 , linear motor 7 , component recognition camera 10 and board recognition camera 11 . A mounting program for mounting the electronic component E is stored in the storage unit 12b.

(Manufacturing method of component mounting apparatus)
A method of manufacturing a component mounting apparatus will be described below with reference to FIG. The manufacturing method of the component mounting apparatus is a process of processing the base 1 and the second support portion 8a and the second support portion 8b attached to the base 1. As shown in FIG. The method for manufacturing a component mounting apparatus is an example of the "method for manufacturing a board working apparatus" in the scope of claims.

In step S1, the base 1 and the first support 31, the second support 32, the third support 33 and the fourth support 34 are integrally formed. Specifically, the base 1 and a pair of support columns provided on the base 1 and facing each other in the Y direction of the horizontal direction are integrally formed of cast iron. That is, the base 1 and the first support 31, the second support 32, the third support 33 and the fourth support 34 are formed by casting. In step S2, the second support portion 8a and the second support portion 8b are formed from structural steel. Specifically, the second support portion 8a and the second support portion 8b that support the first support portion 6 that supports the head unit 5 so as to be movable in the X direction are formed of a highly rigid material having a Young's modulus higher than that of cast iron. be.

In step S<b>3 , the second support portion 8 a is attached to the first support 31 and the second support 32 . Further, in step S3, the second support portion 8b is assembled to the third support 33 and the fourth support 34. As shown in FIG. Specifically, as shown in FIG. 8, in the assembling process, the second support portion 8a is installed so as to straddle the upper surfaces of the first support 31 and the second support 32, and the third support 33 and the fourth support 32 are mounted. A second support portion 8 b is installed across the upper surface of each of the columns 34 . In addition, as shown in FIG. 9, in the assembling process, the second support portion 8a installed across the first support 31 and the second support 32 is attached to the first support 31 and the second support 32 by the fastening member 9. The second support portion 8 b installed across the third support 33 and the fourth support 34 is fixed to the third support 33 and the fourth support 34 by the fastening member 9 . At this time, as shown in FIG. 10, in the Z direction, the height position of the countersunk hole 84 on the Z1 direction side is higher than the height position of the fastening member 9 on the Z1 direction side. In this manner, the second support portion 8a is assembled to the first support 31 and the second support 32 provided on the base 1, and the second support 8b is mounted to the third support 33 and the fourth support 34. As shown in FIG.

As shown in FIG. 7, in step S4, the upper surface of the base 1 and the upper surfaces of the second support portions 8a and 8b are each planarized. Specifically, as shown in FIG. 11, in the plane processing step, the removal of protrusions (burrs) on the top surface of the base 1 and the processing of forming a substantially horizontal plane on the top surface of the base 1 are performed. In addition, in the planarization step, the first portion 81 and the second portion 82 are formed on the second support portion 8a installed on the first support 31 and the second support 32, and the first support portion 8a is formed on the second support portion 8a. Each of the upper surface of the portion 81 and the upper surface of the second portion 82 is processed into a plane substantially parallel to the upper surface of the base 1 . Further, in the planarization process, the first portion 81 and the second portion 82 are formed on the second support portion 8b installed on the third support 33 and the fourth support 34, and the first portion of the second support portion 8b is formed. Each of the upper surface of 81 and the upper surface of second portion 82 is processed into a plane substantially parallel to the upper surface of base 1 . At this time, as shown in FIG. 12, in the Z direction, the height position of the countersunk hole 84 on the Z1 direction side is substantially the same as the height position of the fastening member 9 on the Z1 direction side. After assembling the second supporting portion 8a and the second supporting portion 8b to the first support 31 and the second support 32 and the third support 33 and the fourth support 34 in this manner, the upper surface of the base 1 is flattened. Processing and processing for forming surfaces parallel to the upper surface of the base 1 on the second support portions 8a and 8b are performed.

Accordingly, when the planarization process is completed in step S4 shown in FIG. 7, the manufacturing of the base 1 of the component mounting apparatus 100 is completed.

(Effect of the first embodiment)
The following effects can be obtained in the first embodiment.

In the first embodiment, as described above, the first strut 31 and the second strut 32 and the third strut 33 and the fourth strut 34 are provided so as to be movable in the Y direction. A pair of second support portions 8a and 8b for supporting one support portion 6 is provided. A high-rigidity portion 83 is provided on the second support portion 8a so as to straddle the first strut 31 and the second strut 32 and is made of a high-rigidity material having a Young's modulus higher than that of cast iron. Further, the second support portion 8b is provided with a high-rigidity portion 83 that is provided across the third support 33 and the fourth support 34 and is made of a high-rigidity material having a Young's modulus higher than that of cast iron. As a result, even when a load acts on the pair of second support portions 8a and 8b as the head unit 5 moves, the high-rigidity portion 83 maintains the pair of second support portions 8a and 8b. can be suppressed. As a result, by suppressing the vibration of the head unit 5 caused by the bending of the pair of the second support portions 8a and 8b accompanying the movement of the head unit 5, the accuracy of the work on the substrate B by the head unit 5 is improved. Decrease can be suppressed. In addition, by suppressing the vibration of the head unit 5, it is not necessary to stop the work on the board B by the head unit 5 until the vibration of the head unit 5 stops. Time can be shortened. Moreover, since the movement speed of the head unit 5 can be increased by suppressing the vibration of the head unit 5, it is possible to suppress the working time for the substrate B by the head unit 5 from increasing. Moreover, by providing the high-rigidity portion 83, it is not necessary to increase the thickness of the pair of the second support portions 8a and 8b, so that the component mounting apparatus 100 can be prevented from becoming large.

Further, in the first embodiment, as described above, the high-rigidity portion 83 is made of structural steel. As a result, the high-rigidity portion 83 having a higher Young's modulus than cast iron can be easily formed using a structural steel material, so that the high-rigidity second support portions 8a and 8b can be easily realized. be able to.

In addition, in the first embodiment, as described above, the second support portion 8a is provided in the range D extending at least between the inner end of the first support 31 and the inner end of the second support 32 . The second support portion 8b is provided in a range D extending at least between the inner end of the third support 33 and the inner end of the fourth support 34 . Accordingly, by providing the high-rigidity portion 83 at a portion of the second support portion 8a and the second support portion 8b that easily bends as the head unit 5 moves, the pair of second support portions 8a and 8b can be easily bent as the head unit 5 moves. Deflection of 8a and second support portion 8b can be effectively suppressed.

Further, in the first embodiment, as described above, the base 1 and the first support 31, the second support 32, the third support 33 and the fourth support 34 are integrally formed of cast iron. As a result, the base 1 and the first support 31, the second support 32, the third support 33, and the fourth support 34 are manufactured separately, and the base 1 includes the first support 31, the second support 32, and the third support 33. and the fourth support 34, the number of components of the component mounting apparatus 100 can be reduced, and the structure of the component mounting apparatus 100 can be simplified.

In addition, in the first embodiment, as described above, the entire second support portion 8a and the second support portion 8b are separated from the first support 31, the second support 32, the third support 33, and the fourth support 34. It is composed of a high-rigidity portion 83 provided. That is, as shown in FIG. 3 , the high-rigidity portion 83 extends between the Y-direction outer end of the first support 31 and the Y-direction outer end of the second support 32 and the Y-axis of the third support 33 . and the outer end of the fourth support 34 in the Y direction. As a result, the entire pair of second support portions 8a and 8b that support the head unit 5 can be formed by the high-rigidity portion 83, so that the second support portions 8a and 8b can be made more rigid. It can be made difficult to bend. As a result, the vibration of the head unit 5 caused by the bending of the pair of second support portions 8a and 8b is further suppressed, thereby further suppressing the deterioration of the work accuracy of the substrate B by the head unit 5. can be done.

Further, in the first embodiment, as described above, the component mounting apparatus 100 has the second support portion 8a configured by the high-rigidity portion 83 attached to the first support 31 and the second support 32, and the second support 8b. to the third strut 33 and the fourth strut 34. A countersunk hole 84 into which the fastening member 9 is inserted is formed in the upper surface of the second support portion 8a and the second support portion 8b constituted by the high-rigidity portion 83 . As a result, the fastening member 9 can be accommodated in the countersunk hole 84, thereby preventing the fastening member 9 from interfering with other components arranged on the upper surfaces of the second support portions 8a and 8b. can be prevented. Further, since the counterbored holes 84 are formed in the second support portions 8a and 8b, which are configured by the high-rigidity portions 83, the strength of the second support portions 8a and 8b due to the formation of the counterbore holes 84 is increased. It is possible to suppress the decrease in the strength as much as possible and secure the necessary strength.

Further, in the first embodiment, as described above, the first portion 81 and the second portion 82 are provided in the second support portion 8a and the second support portion 8b. As a result, by projecting the second portion 82 from the lower end portion of the first portion 81 toward the side opposite to the central portion C in the X direction of the base 1, the second supporting portion 82 constituted only by the first portion 81 is formed. Compared to the portion 8a and the second support portion 8b, the rigidity of the second support portion 8a and the second support portion 8b can be increased.

Further, in the first embodiment, the guide rail 73 is provided on the first portion 81 as described above. A stator 72 is provided on the second portion 82 corresponding to the mover 71 of the linear motor 7 of the first support portion 6 . As a result, the guide rail 73 and the stator 72 that extend linearly can be arranged by the first portion 81 and the second portion 82 of the second support portion 8a and the second support portion 8b. can be further suppressed.

Further, in the first embodiment, as described above, the high-rigidity portion 83 of the second support portion 8a is arranged in the range D from the outer end of the first support 31 to the outer end of the second support 32 in the Y direction. prepare. The high-rigidity portion 83 of the second support portion 8b is provided in a range D extending from the outer end of the third support 33 to the outer end of the fourth support 34 in the Y direction. As a result, the force applied from the first support portion 6 to the second support portion 8a can be efficiently distributed to the first support 31 and the second support 32, and the deflection of the second support 8a can be more reliably avoided. be able to. In addition, the force applied from the first support portion 6 to the second support portion 8b can be efficiently distributed to the third support 33 and the fourth support 34, and the deflection of the second support 8b can be more reliably avoided. be able to.

Further, in the first embodiment, as described above, the second support portion 8a is assembled to the first support 31 and the second support 32, and the second support 8b is attached to the third support 33 and the second support 33 in the manufacturing method of the component mounting apparatus. After assembly to the fourth column 34, a step of making the upper surface of the base 1 flat and forming parallel surfaces to the upper surface of the base 1 on the second support portions 8a and 8b is provided. As a result, unlike the case where the second support portion 8a and the second support portion 8b are flattened to the base 1 which is flattened, the upper surface of the base 1, the second support portion 8a and the second support portion are separated from each other. 8b can be reliably made parallel. As a result, it is possible to improve the positioning accuracy of the head unit 5, which is supported by the second support portions 8a and 8b via the first support portion 6, so that the head unit 5 can be positioned on the substrate B. A decrease in work accuracy can be further suppressed. In addition, unlike the case where the second support portion 8a and the second support portion 8b subjected to planar processing are assembled to the base 1 subjected to planar processing, the upper surface of the base 1 and the second support portion 8a and the second support portion 8b , the surface of the base 1 and the surfaces of the second support portion 8a and the second support portion 8b can be omitted.

[Second embodiment]
Next, a component mounting apparatus 200 according to a second embodiment will be described with reference to FIGS. 1, 2 and 13. FIG. More specifically, the component mounting apparatus 200 of the second embodiment differs from the component mounting apparatus 100 of the first embodiment in that the entire second support section 8 is composed of the high-rigidity section 83. The portion 208 is composed of a support portion main body 281 and a high rigidity portion 282 . In addition, in 2nd Embodiment, the same code|symbol is attached|subjected regarding the structure similar to the said 1st Embodiment, and description is abbreviate|omitted.

As shown in FIGS. 1 and 2, the component mounting apparatus 200 includes a base 1, a feeder placement section 2, a plurality of (four) support columns, a board transfer section 4, a head unit 5, a first support A portion 6 , a linear motor 7 , a pair of second support portions 208 , a fastening member 9 , a component recognition camera 10 , a board recognition camera 11 , and a control portion 12 . The pair of second support portions 208 is an example of "a pair of second support portions and a third support portion" in the scope of claims.

(Second support part)
As shown in FIG. 13, each of the pair of second support portions 208a and 208b faces each other in the X direction. Here, the second support portion 208 on the X2 direction side is referred to as a second support portion 208a, and the second support portion 208 on the X1 direction side is referred to as a second support portion 208b. The second support portion 208a on the X2 direction side is arranged across the first support 31 and the second support 32 . The second support portion 208b on the X1 direction side is arranged across the third support 33 and the fourth support 34 . The second support portion 208a on the X2 direction side is an example of the "second support portion" in the claims, and the second support portion 208b on the X1 direction side is the "third support portion" in the claims. is an example of

In the following description, since the second support portion 208a on the X2 direction side and the second support portion 208b on the X1 direction side have the same configuration, the second support portion 208a on the X2 direction side will be described.

The high-rigidity portion 282 of the present embodiment is provided across the first support 31 and the second support 32 . Here, the high-rigidity portion 282 may be provided so that one end thereof is located at the portion facing the first support 31 and the other end is located at the portion facing the second support 32 . Specifically, in the Y direction, the high-rigidity portion 282 extends over a range D from the Y2-direction end (outer end) of the first support 31 to the Y1-direction end (outer end) of the second support 32. is provided. Here, the high-rigidity portion 282 may be provided so that one end thereof is located at the portion facing the first support 31 and the other end is located at the portion facing the second support 32 . More preferably, the high-rigidity portion 282 is provided in a range from the Y2-side end (outer end) of the first support 31 to the Y1-side end (outer end) of the second support 32 .

The high-rigidity portion 282 may be integrally attached to the support portion main body 281 by welding, or may be attached to the support portion main body 281 by a plurality of bolts.

Thus, the second support portion 208a has the support portion main body 281 and the high-rigidity portion 282 attached to the support portion main body 281 as part of the second support portion 208a.

<Support body>
Further, the support body 281 is made of cast iron. Here, as with the base 1, cast iron having a Young's modulus of about 160 [GPa] or less is preferably used for the support body 281. As shown in FIG. Like the base 1, the support body 281 is more preferably made of FCD450 among cast irons.

The support body 281 has an L shape when viewed from the Y2 direction. That is, the support body 281 includes a first portion 81 and a second portion 82 .

<High rigidity part>
The high-rigidity portion 282 is made of a material having a higher Young's modulus than the base 1 and the first support 31, the second support 32, the third support 33, and the fourth support 34 provided integrally with the base 1. It is Specifically, the high-rigidity portion 282 is made of structural steel. A structural steel material having a Young's modulus of about 210 [GPa] or more is preferably used for the high-rigidity portion 282 . SS400, S45C, and S50C are exemplified as the structural steel material having the above Young's modulus, but SS400 is preferred as the structural steel material used for the high-rigidity portion 282 in terms of cost and effect. is more preferred.

The high-rigidity portion 282 has a flat plate shape when viewed from the Y2 direction side. The high-rigidity portion 282 is attached to the surface of the support portion main body 281 on the central portion C side. Specifically, the high-rigidity portion 282 is provided between the first support column 31 and the second support column 32 in the support body 281 . That is, the high-rigidity portion 282 is arranged at a portion of the support portion main body 281 corresponding to the Z1 direction side of the transfer space 35 . Other configurations of the second embodiment are the same as those of the first embodiment.

(Effect of Second Embodiment)
Effects of the second embodiment will be described.

In the second embodiment, as described above, the second support portion 208a is provided across the first strut 31 and the second strut 32, and is made of a highly rigid material having a higher Young's modulus than cast iron. A portion 282 is provided. Further, the second support portion 208b is provided with a high-rigidity portion 282 that is provided across the third support 33 and the fourth support 34 and is made of a high-rigidity material having a Young's modulus higher than that of cast iron. As a result, it is possible to prevent the head unit 5 from lowering the work accuracy of the board B. FIG.

Further, in the second embodiment, as described above, the second support portion 208a and the second support portion 208b are provided with the support portion main body 281 and the support portion as a part of the second support portion 208a and the second support portion 208b. A rigid portion 282 attached to the body 281 is provided. As a result, the second support portion 208a and the second support portion 208b can be made difficult to bend simply by attaching the high-rigidity portion 282 to the support portion main body 281, so that the structure of the component mounting apparatus 200 can be prevented from becoming complicated. can.

Further, in the second embodiment, as described above, the high-rigidity portion 282 is provided in the range D extending from the outer end of the first support 31 to the outer end of the second support 32 in the Y direction. As a result, the force applied from the first support portion 6 to the second support portion 208a can be efficiently distributed to the first support 31 and the second support 32, and the deflection of the second support 208a can be more reliably avoided. be able to. In addition, the force applied from the first support portion 6 to the second support portion 208b can be efficiently distributed to the third support 33 and the fourth support 34, and the deflection of the second support 208b can be more reliably avoided. be able to. Other effects of the second embodiment are the same as those of the first embodiment.

[Modification]
It should be noted that the embodiments disclosed this time should be considered as examples and not restrictive in all respects. The scope of the present invention is indicated by the scope of claims rather than the description of the above-described embodiments, and includes all modifications (modifications) within the scope and meaning equivalent to the scope of claims.

For example, in the above first and second embodiments, the component mounting apparatus 100 is shown as an example of the "board working apparatus" in the claims, but the present invention is not limited to this. In the present invention, the substrate working device may be a printing device, an inspection device, or the like.

Further, in the above-described first and second embodiments, the example in which the first support portion 6 is configured to be moved in the Y direction by the linear motor 7 is shown, but the present invention is not limited to this. In the present invention, the first support may be configured to move in the Y direction by a drive mechanism having a drive motor and a ball screw.

In the above-described first and second embodiments, the high-rigidity portion 83 (282) is made of structural steel, but the present invention is not limited to this. The high-rigidity portion is made of a structural carbon steel material such as S50C (carbon steel for machine structural use) or a carbon material such as a carbon composite.

In the first and second embodiments, the head unit 5 is configured to move in the X direction by the ball screw shaft 61 and the X-axis motor 62, but the present invention is not limited to this. . In the present invention, the head unit may be configured to move in the X direction by a linear motor.

In the above-described second embodiment, an example in which the high-rigidity portion 282 is attached to the surface of the support portion main body on the side of the central portion C has been described, but the present invention is not limited to this. In the present invention, the rigid portion may be attached to other surfaces such as the top surface of the second portion.

In the second embodiment, the high-rigidity portion 282 extends in the Y direction from the Y2-direction end (outer end) of the first support 31 to the Y1-direction end (outer end) of the second support 32. Although an example provided in D is shown, the present invention is not limited to this. In the present invention, the high-rigidity portion is provided in a range Db (see FIG. 13) extending from a position outside the inner end of the first support to a position outside the inner end of the second support in the Y direction. It is good if there is As a result, the force applied from the first support portion to the second support portion along with the movement of the head unit can be efficiently distributed to the first support portion and the second support portion, and the bending of the second support portion can be more reliably prevented. can be avoided.

In the above-described first and second embodiments, an example in which a plurality of (eight) counterbore holes 84 are formed on the upper surface of the second support portion 8 (208) is shown, but the present invention is not limited to this. In the present invention, 2 to 7 or 9 or more counterbore holes may be formed on the upper surface of the second support portion.

REFERENCE SIGNS LIST 1 pedestal 4 substrate transfer section 5 head unit 6 first support section 7 linear motor 8a, 208a second support section (on the X2 direction side) (second support section)
8b, 208b (X1 direction side) second support (third support)
9 Fastening member (first fastening member) (of the second support portion on the X2 direction side)
9 Fastening member (second fastening member) (of the second support portion on the X1 direction side)
31, 32 first support, second support 33, 34 third support, fourth support 71 mover 72 stator (driving member)
73 guide rail (guide member)
81 first portion 82 second portion 83, 282 high rigidity portion (first high rigidity portion) (of the second support portion on the X2 direction side)
83, 282 High-rigidity portion (second high-rigidity portion) (of the second support portion on the X1 direction side)
84 counterbored hole (first counterbore hole) (of the second support portion on the X2 direction side)
84 counterbored hole (second counterbored hole) (of the second support portion on the X1 direction side)
100, 200 Component mounting device (board working device)
281 support body B substrate D range

Claims (12)

a base;
a head unit that moves above a substrate and performs a predetermined operation on the substrate;
a first support that supports the head unit movably in a first horizontal direction;
a pair of first and second supports provided on the base and facing in a second direction orthogonal to the first direction in the horizontal direction;
a pair of third and fourth struts provided at positions opposed to the first and second struts of the base in the first direction and facing in the second direction;
A pair of struts provided over the pair of the first and second struts and the pair of the third and fourth struts and supporting the first support portion movably in the second direction A second support and a third support,
The second support section includes a first high-rigidity section provided across the first support and the second support and formed of a high-rigidity material having a higher Young's modulus than cast iron,
The third support part includes a second high-rigidity part provided across the third support and the fourth support and formed of a high-rigidity material having a Young's modulus higher than that of cast iron,
The board working apparatus, wherein the first support is attached to upper surfaces of each of the second support and the third support so as to be movable in the second direction. a base;
a head unit that moves above a substrate and performs a predetermined operation on the substrate;
a first support that supports the head unit movably in a first horizontal direction;
a pair of first and second supports provided on the base and facing in a second direction orthogonal to the first direction in the horizontal direction;
a pair of third and fourth struts provided at positions opposed to the first and second struts of the base in the first direction and facing in the second direction;
A pair of struts provided over the pair of the first and second struts and the pair of the third and fourth struts and supporting the first support portion movably in the second direction A second support and a third support,
The second support section includes a first high-rigidity section provided across the first support and the second support and formed of a high-rigidity material having a higher Young's modulus than cast iron,
The third support part includes a second high-rigidity part provided across the third support and the fourth support and formed of a high-rigidity material having a Young's modulus higher than that of cast iron,
Each of the first high-rigidity portion and the second high-rigidity portion is made of a structural steel material, a structural carbon steel material, or a carbon material,
The entire second support portion is configured by the first high-rigidity portion provided separately from the pair of the first support and the second support,
The entire third support portion is configured by the second high-rigidity portion provided separately from the pair of the third support and the fourth support,
a first fastening member that attaches the second support portion configured by the first high-rigidity portion to the pair of the first support and the second support;
a second fastening member that attaches the third support portion configured by the second high-rigidity portion to the pair of the third support and the fourth support;
A substrate, wherein a first countersunk hole and a second countersunk hole for inserting the first fastening member and the second fastening member are formed in upper surfaces of the second support portion and the third support portion, respectively. working device. a base;
a head unit that moves above a substrate and performs a predetermined operation on the substrate;
a first support that supports the head unit movably in a first horizontal direction;
a pair of first and second supports provided on the base and facing in a second direction orthogonal to the first direction in the horizontal direction;
a pair of third and fourth struts provided at positions opposed to the first and second struts of the base in the first direction and facing in the second direction;
A pair of struts provided over the pair of the first and second struts and the pair of the third and fourth struts and supporting the first support portion movably in the second direction A second support and a third support,
The second support section includes a first high-rigidity section provided across the first support and the second support and formed of a high-rigidity material having a higher Young's modulus than cast iron,
The third support part includes a second high-rigidity part provided across the third support and the fourth support and formed of a high-rigidity material having a Young's modulus higher than that of cast iron,
Each of the first high-rigidity portion and the second high-rigidity portion is made of a structural steel material, a structural carbon steel material, or a carbon material,
The entire second support portion is configured by the first high-rigidity portion provided separately from the pair of the first support and the second support,
The entire third support portion is configured by the second high-rigidity portion provided separately from the pair of the third support and the fourth support,
Each of the second support and the third support is
a first portion provided with a guide member that movably supports the first support;
A second driving member protrudes from the lower end of the first portion toward the side opposite to the central portion of the base in the first direction and is provided with a driving member for moving the first support portion in the second direction. A board working apparatus, comprising: 2. The board working apparatus according to claim 1, wherein each of said first high-rigidity portion and said second high-rigidity portion is made of a structural steel material, a structural carbon steel material, or a carbon material. further comprising a substrate transport unit provided on the base and transporting the substrate;
each of a pair of the first support column and the second support column is arranged at a predetermined interval in the second direction so as to sandwich the substrate transfer section;
each of the pair of the third support column and the fourth support column is arranged at a predetermined interval in the second direction so as to sandwich the substrate transfer section;
The first high-rigidity portion is provided in a range from at least the inner end of the first support to the inner end of the second support in the second direction,
5. The board working apparatus according to claim 4 , wherein said second high-rigidity portion is provided in a range extending from at least an inner end of said third support to an inner end of said fourth support in said second direction. 6. The board working apparatus according to claim 4 , wherein said base and said first, second, third, and fourth columns are integrally formed of cast iron. The entire second support portion is configured by the first high-rigidity portion provided separately from the pair of the first support and the second support,
7. The entirety of the third support part is configured by the second high-rigidity part provided separately from the pair of the third support and the fourth support. Board working equipment. a first fastening member that attaches the second support portion configured by the first high-rigidity portion to the pair of the first support and the second support;
a second fastening member that attaches the third support portion configured by the second high-rigidity portion to the pair of the third support and the fourth support;
A first countersunk hole and a second countersunk hole for inserting the first fastening member and the second fastening member are formed in upper surfaces of the second support portion and the third support portion, respectively. Item 8. The board working device according to item 7 . Each of the second support and the third support is
a first portion provided with a guide member that movably supports the first support;
A second driving member protrudes from the lower end of the first portion toward the side opposite to the central portion of the base in the first direction and is provided with a driving member for moving the first support portion in the second direction. 9. The board working apparatus of claim 7 or 8 , comprising two parts. The first support portion is provided with a mover of a linear motor for moving the first support portion in the second direction,
The guide member has a guide rail provided in the first portion and guiding movement of the first support portion in the second direction,
The driving member has a stator of the linear motor provided on the second portion corresponding to the mover of the linear motor of the first supporting portion and for moving the first supporting portion in the second direction. 10. The substrate working apparatus according to claim 3 or 9 . A pair of the second support and the third support, respectively,
a support body;
The first high-rigidity portion and the second high-rigidity portion attached to the support main body as part of each of the pair of the second support portion and the third support portion, according to any one of claims 4 to 6 . The board working device according to any one of claims 1 to 3. A base, a pair of first and second pillars provided on the base and facing in a second direction perpendicular to the first horizontal direction, and a pair of third and fourth pillars a step of integrally forming from cast iron;
A second support portion is made of a high-rigidity material having a Young's modulus higher than that of cast iron, and a first support portion that supports the head unit movably in the first direction is attached to the upper surface of each of the head units so that the head unit can move in the second direction. and forming a third support;
a step of assembling the second support portion to the pair of the first support and the second support provided on the base, and assembling the third support to the pair of the third support and the fourth support;
After assembling the second support portion and the third support portion, the upper surface of the base is processed to be flat, and a surface parallel to the upper surface of the base is formed by the second support portion and the third support portion. A method of manufacturing a board working device, comprising:

Images