JP2013140920A - Structural member and method for reinforcing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structural member which is capable of satisfactorily coping with temperature variation while achieving rigidity improvement and weight reduction, and to provide a method for reinforcing the structural member.SOLUTION: A structural member 100 includes a body member 101 and a reinforcing member 103 attached to the body member 101. The reinforcing member 103 has specific rigidity higher than that of the body member 101, extends along the longitudinal direction (Y direction) of the body member 101, is supported by the body member 101 so as to reinforce rigidity against bending in an A direction of the body member 101, and is supported by the body member 101 so as to freely expand/contract in the extending direction (Y direction).

Description

  The present invention relates to a structural member and a method for reinforcing the structural member.

  In a mechanical structure or the like, it is usually preferable that the elastic deformation of the structural member when a load is applied is small, and thus high rigidity is desired for the structural member. In addition, it is often desirable that the structural member is lightweight. As described above, in order to improve the rigidity and the weight of the structural member, the technique of Patent Document 1 below has been proposed. The substage of the rubbing stage disclosed in this document has a structure in which an aluminum flat plate is sandwiched between two CFRP (Carbon Fiber Reinforced Plastics) plates. Patent Document 1 proposes to improve the rigidity and weight of the substage by the above structure.

JP 2007-163769 A

  However, in the case of a member in which different materials such as metal and CFRP are combined, when temperature fluctuation occurs, the entire member may be deformed due to temperature distortion due to the difference in thermal expansion between the two materials. . Therefore, it is difficult to cope with temperature fluctuations in the above-described substage. In this type of structural member, it has been required not only to improve rigidity and weight but also to cope with temperature fluctuations.

  It is an object of the present invention to provide a structural member and a structural member reinforcement method that can cope with temperature fluctuations while improving rigidity and reducing weight.

  The structural member of the present invention is a structural member comprising a main body member and a reinforcing member attached to the main body member, and the reinforcing member has a specific rigidity greater than that of the main body member, and is in the longitudinal direction of the main body member. The main body member extends along the body, is supported by the main body member so as to reinforce the rigidity against bending of the main body member, and is supported by the main body member so as to be extendable in the extending direction.

  In this structural member, the rigidity against bending is reinforced by the reinforcing member having a higher specific rigidity than the main body member, and the weight can be reduced. Further, since the reinforcing member is supported so as to be stretchable in the extending direction, even if a stretching dimension difference in the extending direction occurs between the reinforcing member and the main body member due to temperature fluctuation, the reinforcing member Expansion and contraction relative to the body member is allowed. Therefore, temperature distortion is unlikely to occur in the main body member and the reinforcing member, and as a result, this structural member can cope with temperature fluctuations well.

  As a specific configuration, the main body member includes two end support portions that support side surfaces in the vicinity of both ends in the extending direction of the reinforcing member in a direction orthogonal to the extending direction, and a portion in the vicinity of the center in the extending direction of the reinforcing member. It is good also as having a center support part which supports a side surface in the direction which opposes the support direction of an edge part support part. According to this configuration, when a bending force is applied to the main body member, the bending force is also transmitted to the reinforcing member via the end support portion and the central support portion, so that the rigidity of the entire structural member as a whole is improved. improves.

  Further, the reinforcing member is housed in a hollow portion provided inside the main body member, and the end support portion and the central support portion are located on the inner wall surface of the hollow portion, and the end surface in the extending direction of the reinforcing member A gap may be provided between the inner wall surface of the hollow portion facing the end surface. According to this configuration, even when the reinforcing member expands and contracts relative to the main body member, the difference in expansion and contraction between the two members is absorbed by the gap g, and the end surface of the reinforcing member can be prevented from hitting the inner wall surface. Therefore, the reinforcing member can be expanded and contracted in the extending direction.

  The end support portion may include a wedge-shaped member sandwiched between the side surface of the reinforcing member extending in parallel with the extending direction and the inner wall surface of the hollow portion inclined with respect to the extending direction. . According to this configuration, the bending shape of the structural member can be adjusted by moving the wedge-shaped member in the extending direction. In this case, a moving mechanism that moves the wedge-shaped member in the extending direction may be further provided.

  Specifically, the main body member is a member that is included in the machine structure and extends in the horizontal direction, and the reinforcing member includes a central support portion that contacts the upper surface, an end support portion that contacts the lower surface, It is good also as sandwiched and supported by the up-and-down direction. Since a member extending in the horizontal direction in a mechanical structure is often subjected to a bending force due to gravity, it is highly necessary to reinforce the rigidity against the load, and the configuration as described above is preferably applied. Is done.

  The mechanical structure may be a mask frame that holds an exposure mask in the exposure apparatus, and the main body member may be a member included in a mask holder that sucks and supports the mask on the lower surface. A particularly high positional accuracy is required for the exposure mask of the exposure apparatus. Therefore, in the exposure apparatus, it is highly necessary to reduce the deflection of the mask holder due to the mask weight, and the configuration as described above is preferably applied.

  The structural member reinforcing method of the present invention is a structural member reinforcing method for reinforcing a structural member by attaching the reinforcing member to the main body member of the structural member, and the reinforcing member having a specific rigidity larger than that of the main body member. Attached to the main body member so as to be supported by the main body member so as to reinforce the rigidity against bending of the main body member, and to be supported by the main body member so as to be extendable in the extending direction. It is characterized by that.

  In this reinforcing method, the rigidity against bending is reinforced by the reinforcing member having a specific rigidity higher than that of the main body member, and the weight can be reduced. Further, since the reinforcing member is supported so as to be extendable and contractible in the extending direction, the main body of the reinforcing member can be used even if a stretching dimension difference in the extending direction occurs between the reinforcing member and the main body member due to temperature fluctuation. Expansion and contraction relative to the member is allowed. Therefore, temperature distortion hardly occurs in the main body member and the reinforcing member, and as a result, the structural member by this reinforcing method can cope with temperature fluctuations well.

  ADVANTAGE OF THE INVENTION According to this invention, the structural member which can respond also to a temperature fluctuation favorably while aiming at a rigid improvement and weight reduction, and the reinforcement method of a structural member can be provided.

It is sectional drawing of the structural member which concerns on 1st Embodiment of this invention. It is a partially broken perspective view of the mask frame to which the structural member of FIG. 1 is applied. It is a perspective view of the stage apparatus to which the structural member of FIG. 1 was applied. FIG. 2 is a perspective view of a gantry type stage apparatus to which the structural member of FIG. 1 is applied. It is sectional drawing of the structural model of the structural member which concerns on 2nd Embodiment of this invention. It is a perspective view of the stage apparatus to which the structural member of FIG. 5 is applied. FIG. 6 is a perspective view of an inspection apparatus to which the structural member of FIG. 5 is applied. It is a perspective view of the structural member which concerns on 3rd Embodiment of this invention.

  Hereinafter, embodiments of a structural member and a structural member reinforcing method according to the present invention will be described in detail with reference to the drawings. In the following, as shown in each drawing, an XYZ orthogonal coordinate system in which the Z axis is the vertical axis and the XY plane is the horizontal plane is set, and X, Y, and Z may be used for explaining the positional relationship of each part.

(First embodiment)
A structural member 100 according to a first embodiment of the present invention will be described with reference to FIG. The structural member 100 is a member that extends horizontally with the Y direction as a longitudinal direction and receives a bending force in the direction indicated by the arrow A due to its own weight or external load. For example, a beam on which a heavy part is mounted in the mechanical structure corresponds to the structural member 100. Since the structural member 100 bends in the YZ plane so as to be convex downward (−Z direction) by the bending force, the rigidity with respect to bending is enhanced in order to reduce this bending.

  Specifically, the structural member 100 includes a main body member 101 made of, for example, aluminum, and a reinforcing member 103 that is attached to the main body member 101 and reinforces the rigidity of the main body member 101. The reinforcing member 103 is formed of a material having a specific rigidity greater than that of the main body member 101. Here, the specific rigidity is a value obtained by dividing the elastic coefficient of a material by the specific gravity of the material (specific rigidity = elastic coefficient / specific gravity). The reinforcing member 103 has a rectangular parallelepiped shape, and is made of, for example, CFRP (Carbon Fiber Reinforced Plastics). By adopting a material having a specific rigidity higher than that of the main body member 101 as the material of the reinforcing member 103, the rigidity of the main body member 101 can be reinforced without excessively increasing the weight.

  Here, if the CFRP reinforcing member 103 has a complicated shape, a molding process is required, and thus the manufacturing process becomes complicated. Manufacturing costs also increase. On the other hand, if the reinforcing member 103 has a rectangular parallelepiped shape, the reinforcing member 103 can be manufactured by cutting a plate-like CFRP material linearly, and the manufacturing process can be simplified. Further, as the plate-like CFRP material, there are general-purpose products that are commercially available at a relatively low cost, and thus the above configuration contributes to a reduction in manufacturing cost. Similarly, the CFRP reinforcing member 103 may have a square pipe shape or a round pipe shape. Also in this case, the reinforcing member 103 can be manufactured by cutting a general-purpose square pipe-shaped or round pipe-shaped CFRP material in the longitudinal direction.

  The material of the reinforcing member 103 is not limited to CFRP as long as it has a higher specific rigidity than the main body member 101, and various materials can be employed. Since a so-called “composite material” such as CFRP generally has a high specific rigidity, it is preferable to employ it as a material for the reinforcing member 103. Here, the composite material means a material composed of a reinforcing material such as a fiber and a base material (matrix) such as a resin. For example, as a material for the reinforcing member 103, a glass fiber reinforced resin, an aramid fiber Reinforcing resins, boron fiber reinforced resins, and the like are included in the composite material. Further, as the material of the reinforcing member 103, ceramics, high-functional resin, or the like may be employed in addition to the composite material.

  A hollow portion 105 extending in the Y direction is formed inside the main body member 101, and the reinforcing member 103 is accommodated in the hollow portion 105 so as to extend in the Y direction. The main body member 101 has two wedge-shaped members 107 provided on the inner wall surface 105 b that is the bottom surface of the hollow portion 105. The wedge-shaped member 107 supports the lower side surface 103b of the reinforcing member 103 in the + Z direction in the vicinity of both ends of the reinforcing member 103 in the Y direction. The wedge-shaped member 107 is sandwiched between the lower side surface 103b of the reinforcing member 103 and the inner wall surface 105b. The inner wall surface 105b on which the wedge-shaped member 107 is arranged is formed as an inclined surface inclined with respect to the Y axis. According to this configuration, by moving the wedge-shaped member 107 in the Y direction, the force in the + Z direction acting on the reinforcing member 103 from the wedge-shaped member 107 can be increased or decreased. Therefore, according to this configuration, the bending shape of the structural member 100 can be adjusted. In addition, for example, when a load is applied to the structural member 100, an operation of moving the wedge-shaped member 107 so as to cancel the bending of the structural member 100 is possible.

  The wedge member 107 is connected to a rod 113 that penetrates the end surface 111 of the main body member 101 and extends in the Y direction. The rod 113 is threaded, and the rod 113 is screwed into the through hole portion of the main body member 101. By rotating the knob 115 provided at the other end of the rod 113, the rod 113 can be rotated and the wedge-shaped member 107 can be moved in the + Y direction or the −Y direction. Thus, the mechanism including the rod 113 functions as a moving mechanism for moving the wedge-shaped member 107 in the Y direction.

  Further, the main body member 101 has a central support portion 109 provided on the inner wall surface 105 a that is the ceiling surface of the hollow portion 105. The center support portion 109 is formed so as to protrude downward from the inner wall surface 105a in a trapezoidal shape. The center support portion 109 supports the upper side surface 103a of the reinforcing member 103 in the -Z direction at the center in the Y direction of the reinforcing member 103. The lower end surface of the center support portion 109 may be bonded to the upper side surface 103 a of the reinforcing member 103.

  The reinforcing member 103 is supported by being sandwiched in the Z direction (vertical direction) by the center support portion 109 and the two wedge-shaped members 107. With the support structure as described above, the bending force in the direction of arrow A applied to the structural member 100 is transmitted to the reinforcing member 103 and is also borne by the reinforcing member 103, so that the reinforcing member 103 is in the direction of arrow A of the main body member 101. It can be said that it is supported by the body member 101 so as to reinforce the rigidity against bending.

  Here, when the temperature around the structural member 100 fluctuates, thermal expansion / shrinkage occurs in both the main body member 101 and the reinforcing member 103. In this case, due to the difference in thermal expansion coefficient between the materials forming both members, a difference occurs in the expansion and contraction dimensions of both members. The expansion / contraction dimensional difference is particularly prominent in the longitudinal direction (Y direction) of each member. Therefore, the reinforcing member 103 is supported by the main body member 101 so as to be relatively expandable and contractible in the Y direction.

  Specifically, a gap g is provided between both end surfaces 103c in the Y direction (extending direction) of the reinforcing member 103 and the inner wall surface 105c of the hollow portion 105 facing the end surface 103c. According to this structure, the reinforcing member 103 can be expanded and contracted relative to the main body member 101 in the Y direction. That is, even when the reinforcing member 103 expands and contracts relative to the main body member 101 in the Y direction, the expansion / contraction dimension difference between the two members is absorbed by the gap g, and the end surface 103c can be prevented from hitting the inner wall surface 105c. .

  Further, when the reinforcing member 103 expands and contracts due to temperature fluctuations, it is also possible to prevent the upper surface of the wedge-shaped member 107 and the lower side surface 103b of the reinforcing member 103 from sliding in the Y direction and the wedge-shaped member 107 preventing the reinforcing member 103 from expanding and contracting. Therefore, the main body member 101 does not hinder the relative expansion and contraction of the reinforcing member 103. As a result, even when the temperature around the structural member 100 fluctuates, unnecessary thermal stress or temperature distortion occurs in the structural member 100. Bugs can be avoided. Note that when the lower end surface of the center support portion 109 and the upper side surface 103a of the reinforcing member 103 are bonded together by bonding or the like, the length of the bonding surface is smaller than the total length of the reinforcing member 103, so the bonding surface It is considered that the expansion / contraction dimensional difference between the two members can be ignored.

  A case where CFRP is used as the material of the reinforcing member 103 is considered. The CFRP material has such a property that when a bolt hole or the like is provided, strength reduction due to stress concentration appears remarkably. Therefore, it is preferable to avoid providing bolt holes or the like in the reinforcing member 103 as much as possible. On the other hand, the structural member 100 has a structure in which the reinforcing member 103 is supported by being sandwiched in the Z direction (vertical direction) by the center support portion 109 and the wedge-shaped member 107. Therefore, there is no need to fix the reinforcing member 103 to the main body member 101 by bolting or the like. Therefore, the reinforcing member 103 made of CFRP can be used, for example, in the shape of a rectangular parallelepiped without forming a stress concentration portion such as a bolt hole in the reinforcing member 103. As a result, damage to the reinforcing member 103 can be suppressed, and as a result, the strength of the structural member 100 can be maintained.

  As described above, in the structural member 100, the rigidity against bending is reinforced by the reinforcing member 103 having a specific rigidity larger than that of the main body member 101, and the weight can be reduced. Further, since the reinforcing member 103 is supported so as to be extendable and contractible in the extending direction, an expansion / contraction dimension difference in the extending direction (Y direction) occurs between the reinforcing member 103 and the main body member 101 due to temperature fluctuation. Even if it does, relative expansion-contraction with respect to the main body member 101 of the reinforcement member 103 is accept | permitted. Therefore, temperature distortion hardly occurs in the main body member 101 and the reinforcing member 103, and as a result, the structural member 100 can cope with temperature fluctuations well.

  Then, the example of the form which applies the structural member 100 mentioned above as a beam of a mechanical structure is demonstrated.

[Application Example 1]
FIG. 2 is a partially broken perspective view of the mask frame 1 to which the structural member 100 is applied. The mask frame 1 is provided in a positioning device for positioning an exposure mask in the exposure apparatus. The mask frame 1 suspends and holds the exposure mask M in a horizontal posture, and is driven by a positioning actuator (not shown).

  The mask frame 1 includes two mask holders 3 extending in parallel to the Y direction and a girder 5 that connects the mask holders 3 to each other. A suction port 3 a for sucking the upper surface of the exposure mask M is provided on the lower surface of the mask holder 3. By exposing and holding one exposure mask M on the lower surfaces of the two mask holders 3, the exposure mask M spreading on the XY plane is suspended.

  In a state where the exposure mask M is held, the gravity of the exposure mask M acts on the entire longitudinal direction of the mask holder 3. When the mask holder 3 bends due to the gravity of the exposure mask M, the flatness of the exposure mask M decreases, and the positional accuracy of the exposure mask M decreases. Since the exposure apparatus is required to position the exposure mask M with high accuracy, it is required to reduce the deflection of the mask holder 3 in order to increase the flatness of the exposure mask M. That is, the mask holder 3 is required to have high bending rigidity.

  Therefore, in the mask frame 1, the structure of the structural member 100 described above is employed as the structure of the mask holder 3. That is, as shown in the figure, the mask holder 3 includes an aluminum main body member 101 and a CFRP reinforcing member 103 disposed in the hollow portion 105 of the main body member 101. The reinforcing member 103 is supported by the central support portion 109 and the two wedge-shaped members 107 at a total of three locations. In the mask holder 3, the same or equivalent components as those of the structural member 100 described above are denoted by the same reference numerals and redundant description is omitted.

  As described above, the exposure mask M of the exposure apparatus is required to have particularly high positional accuracy. Therefore, it is highly necessary to reduce the deflection of the mask holder 3 due to the weight of the exposure mask M. The mask holder 3 has a structure. The configuration of the member 100 is preferably applied.

[Application Example 2]

  FIG. 3 is a perspective view showing the stage device 21 to which the structural member 100 is applied. The stage device 21 includes a pair of X sliders 22 that move in the X direction, a pair of guides 23 that guide the X sliders 22, an X stage 24 that is horizontally mounted between the X sliders 22, and the X stage 24 on the Y direction. And a flat movable table 25 that moves to the right.

  The stage device 21 includes a stone surface plate 26 that supports a pair of guides 23, a vibration isolation mount 27 that supports the stone surface plate 26, a pair of gantry frames 28 mounted on the stone surface plate 26, And a head support member 29 laid horizontally between the gantry frames 28. The X slider 22 is provided with an X-direction linear motor (not shown) that drives the movable table 25 in the X direction, and a Y-direction linear motor that drives the movable table 25 in the Y direction on the X stage 24. (Not shown) is provided.

  The head support member 29 is fixed so as to be horizontally mounted at a substantially intermediate position between a pair of gantry frames 28 spanned on both the left and right sides of the stone surface plate 26. The head support member 29 is equipped with a plurality of heads 30 arranged in a line at predetermined intervals and a head operation control device 31 that operates the plurality of heads 30. The head 30 performs processing such as laser irradiation on the workpiece placed on the movable table 25.

  In such a stage device 21, the structure of the structural member 100 described above is adopted as the structure of the head support member 29. Thereby, the rigidity with respect to the bending of the head support member 29 is improved, and the deflection of the head support member 29 is reduced. Therefore, the positional accuracy of the head 30 is improved, and as a result, the machining accuracy of the workpiece is improved.

[Application Example 3]
FIG. 4 is a perspective view of a gantry stage device 41 to which the structural member 100 is applied. The stage device 41 includes a gantry 42, a suction table 43 (shown by an alternate long and short dash line) supported on the gantry 42, a pair of X-direction linear motors 44 disposed on both sides of the suction table 43, and a pair of X-direction linears. A gantry section (moving body) 45 driven on the gantry 42 by the motor 44.

  The gantry 42 has a strong structure in which steel frames are joined in a lattice shape, and an adsorption table 43 that adsorbs a substrate is placed and fixed on the upper surface thereof. Further, a pair of X-direction linear motors 44 are attached on the gantry 42 in a direction extending in parallel with the suction table 43.

  The X-direction linear motor 44 is an actuator having a configuration called a so-called open-core linear motor, and is provided on a fixed base 46 fixed to the gantry 42. An X-direction linear guide 47 for guiding the moving direction of the gantry unit 45 is attached on the fixed base 46.

  The gantry unit 45 is formed to extend in the Y direction orthogonal to the moving direction (X direction), and the cross-sectional shape viewed from the side is formed in a quadrangular shape or a rectangular shape. The gantry 45 is attached with a moving bracket 49 supported so as to be movable in the Y direction. For example, a processing device that processes the substrate sucked on the suction table 43 or an inspection device that inspects the processing surface of the substrate is appropriately attached to the moving bracket 49.

  When the substrate is increased in size (increased in area), the length of the gantry portion 45 in the Y direction is increased and the gantry portion 45 becomes longer. In this case, since the entire length of the gantry unit 45 with respect to the size of the longitudinal section is long, the gantry unit 45 may be distorted due to its own weight or the weight of various devices attached to the gantry unit 45. Therefore, the gantry unit 45 is required to have a rigidity capable of withstanding the loads of various devices to be mounted as the size of the gantry unit 45 increases. Therefore, in the stage apparatus 41, the configuration of the structural member 100 described above is adopted as the configuration of the gantry unit 45. Thereby, the rigidity with respect to the bending of the gantry part 45 is improved and the bending of the gantry part 45 is reduced, so that the positional accuracy of the processing apparatus mounted on the movable bracket 49 is improved, and as a result, the processing accuracy of the substrate is improved. To do.

(Second Embodiment)
Next, the structural member 200 according to the second embodiment of the present invention will be described with reference to FIG. FIG. 5 is a cross-sectional view showing the structure of the structural member 200 of the present embodiment that resists bending. Note that among the constituent elements of the structural member 200, the same or equivalent constituent elements as those of the structural member 100 described above are denoted by the same reference numerals, and redundant description is omitted.

  The structural member 200 is a member that extends horizontally with the Y direction as a longitudinal direction, and receives a bending force in the directions indicated by the arrows P and Q by a load due to acceleration in the + X direction and the −X direction. For example, a beam subjected to acceleration in the mechanical structure corresponds to the structural member 200. Since the structural member 200 bends in the XY plane so that the + X direction or the −X direction is convex by the bending force, the rigidity with respect to the bending is reinforced to reduce this bending.

  Specifically, the structural member 200 includes a main body member 101 and a reinforcing member 103 accommodated in the hollow portion 105 of the main body member 101. Six support points for supporting the reinforcing member 103 are provided on the inner wall surface of the hollow portion 105. Among them, the center fulcrums 209p and 209q are located opposite to each other, and support the central side surface of the reinforcing member 103 in the + X direction and the −X direction, respectively. Specifically, the center fulcrums 209p and 209q may be similar to the center support portion 109 shown in FIG. Further, the paired end fulcrums 207p and 207q are positioned to face each other and support the end side surfaces of the reinforcing member 103 in the −X direction and the + X direction, respectively. The end fulcrums 207p and 207q are configured to slide on the surface of the reinforcing member 103 in the Y direction, and specifically, may be the wedge-shaped member 107 shown in FIG.

  With the above-described support structure, the bending force in the direction of arrow P applied to the structural member 200 is transmitted to the reinforcing member 103 via the center fulcrum 209p and the end fulcrums 207p and 207p, and is also borne by the reinforcing member 103. The Also, the bending force in the direction of arrow Q applied to the structural member 200 is transmitted to the reinforcing member 103 via the center fulcrum 209q and the end fulcrums 207q and 207q, and is also borne by the reinforcing member 103. Therefore, it can be said that the reinforcing member 103 is supported by the main body member 101 so as to reinforce the rigidity of the main body member 101 with respect to bending in the arrow P direction and the Q direction.

  Further, a gap g is provided between both end surfaces of the reinforcing member 103 in the Y direction and the inner wall surface of the hollow portion 105 facing the both end surfaces. Due to this structure, the reinforcing member 103 can be expanded and contracted relatively with respect to the main body member 101, so that the main body member 101 and the reinforcing member 103 hardly undergo temperature distortion. It can respond well.

  In addition, the structural member 200 can also be applied to a “column” extending in the vertical direction (Z direction) by rotating, for example, 90 ° around the X axis in FIG.

  Then, the example of the form which applies the structural member 200 mentioned above as a beam of a mechanical structure is demonstrated.

[Application Example 1]
FIG. 6 is a perspective view of the stage device 61 to which the structural member 200 is applied. The stage device 61 includes a base 62, an X-axis driving unit 63 including a pair of shaft motors 63 </ b> A and 63 </ b> B, an X-axis moving body 64 that moves in the X-axis direction by the X-axis driving unit 63, and an X-axis moving body 64. The Y-axis drive part 66 which consists of a provided Y-axis shaft motor 66A, 66B provided, and the Y-axis moving body 67 which moves to a Y-axis direction with the Y-axis drive part 66 are provided. The X-axis moving body 64 includes a guide beam 69 that extends in the Y direction and guides the movement of the Y-axis moving body 67.

  Since the X-axis moving body 64 reciprocates at a high speed in the X direction with the Y-axis moving body 67 mounted, a load in the X direction due to the acceleration of the movement acts on the guide beam 69. Therefore, in the stage device 61, the structure of the structural member 200 described above is employed as the structure of the guide beam 69. As a result, the rigidity of the guide beam 69 against bending in the XY plane is improved, and the deflection of the guide beam 69 due to the acceleration is reduced, so that the positioning accuracy of the workpiece mounted on the Y-axis moving body 67 is improved. To do.

  Then, the example of the form which applies the structural member 200 mentioned above as a pillar of a mechanical structure is demonstrated.

[Application Example 2]
FIG. 7 is a perspective view of an inspection apparatus 81 to which the structural member 200 is applied as a column. The inspection apparatus 81 includes a base 82 and a moving frame 83 that reciprocates on the base 82 in the X direction. A pair of guide rails 84 are provided on the top surface of the base 82 to guide the movement frame 83 in the X direction. The moving frame 83 is a beam constructed so as to connect the leg portions 83a and 83a traveling on the guide rail 84, the column portions 83b and 83b extending vertically upward from the foot portion 83a, and the upper ends of the column portions 83b and 83b. Part 83c. An imaging camera 85 for inspection is installed on the lower surface of the beam portion 83c. An inspection object (for example, a semiconductor substrate) 86 is placed at a position sandwiched between the guide rails 84 on the upper surface of the base 82. The imaging camera 85 images the lower inspection object 86 while moving in the X direction by the moving frame 83.

  When the moving frame 83 reciprocates in the X direction at high speed, a load in the X direction due to the acceleration of the movement acts on the column part 83b, and as a result, a bending force in the XZ plane acts. Therefore, in the inspection apparatus 81, the configuration of the structural member 200 described above is employed as the configuration of the column portion 83b. That is, for example, the reinforcing member 103 is built in a hollow portion provided inside the column portion 83b. As shown in FIG. 5, the reinforcing member 103 is moved in the X direction by the center fulcrums 209p and 209q and the end fulcrums 207p and 207q. It is sandwiched between and supported. As a result, the rigidity of the column part 83b against bending in the XZ plane is improved, and the deflection of the column part 83b due to the acceleration is reduced, so that the positional accuracy of the imaging camera 85 is improved. The inspection performance of 81 is improved.

(Third embodiment)
Subsequently, a structural member 300 according to a third embodiment of the present invention will be described with reference to FIG. The structural member 300 includes support protrusions 307, 307, and 309 protruding from the surface of the side surface 101j parallel to the YZ plane of the main body member 101. The reinforcing member 103 is installed on the side surface 101j and is supported by being sandwiched between the support protrusion 309 and the support protrusions 307 and 307 in the vertical direction (Z direction). Further, since the reinforcing member 103 is not constrained in the Y direction, expansion and contraction in the Y direction relative to the main body member 101 of the reinforcing member 103 is allowed. Since such a support structure is equivalent to the support structure of the reinforcing member 103 in the above-described structural member 100 (FIG. 1), the structural member 300 has the same effect as the structural member 100, and the structural member 100 as described above. Instead of this, the structural member 300 can be applied to various mechanical structures. Note that the reinforcing member 103 may be installed on the back side facing the side surface 101j with a similar structure.

  Furthermore, the structural member 300 includes two sets of six support protrusions 307p, 307p, 309p, 307q, 307q, and 309q protruding from the surface of the upper surface 101k parallel to the XZ plane of the main body member 101. The reinforcing member 103 is installed on the upper surface 101k and supported by being sandwiched in the horizontal direction (X direction) by the support protrusions 309p, 307q, 307q and the support protrusions 309q, 307p, 307p. Further, since the reinforcing member 103 is not restrained in the Y direction, expansion and contraction of the reinforcing member 103 relative to the main body member 101 in the Y direction is allowed. Since such a support structure is equivalent to the support structure of the reinforcing member 103 in the above-described structural member 200 (FIG. 5), the structural member 300 further exhibits the same operational effects as the structural member 200, and the structural member as described above. Instead of 200, the structural member 300 can be applied to various mechanical structures. Note that the reinforcing member 103 may be installed on the lower surface side facing the upper surface 101k with the same structure.

  Note that it is not necessary to provide both the reinforcing members 103 installed on the side surface 101j or the upper surface 101k, and either one may be omitted as necessary.

  As mentioned above, although 1st-3rd embodiment of this invention was described, this invention is not restricted to the said embodiment, Even if it changed in the range which does not change the summary described in each claim. Good. For example, you may comprise so that the center support part 109 (FIG. 1) may slide to the Y direction with respect to the upper side surface 103a of the reinforcement member 103. FIG. In this case, in order to prevent the reinforcing member 103 from being greatly displaced in the Y direction, an elastic member such as a compression spring or an elastic material may be installed at the position of the gap g. Thereby, the reinforcing member 103 is prevented from greatly deviating from the central reference position of the hollow portion 105. Further, in the embodiment, the example in which the reinforcing member 103 and the main body member 101 are bonded to each other at the central support portion 109 has been described. However, at any one of the support portions that support the reinforcing member 103, the reinforcing member 103 is used. May be fixed to the main body member 101. In the embodiment, the case where there are three and six support portions (center support portion and end support portion) that support the reinforcing member 103 is described as an example. However, the support portions include three or more support portions. It is sufficient that the number of supporting portions is increased as appropriate.

  Further, the structural member of the present invention can be applied to structures of various machines (for example, robots, transfer devices, transport vehicles, other industrial machines) other than the exposure apparatus, inspection apparatus, or stage apparatus.

  DESCRIPTION OF SYMBOLS 1 ... Mask frame, 3 ... Mask holder, 100, 200, 300 ... Structural member, 101 ... Main body member, 103 ... Reinforcement member, 103a, 103b ... Side surface of reinforcement member, 105 ... Hollow part, 107 ... Wedge-like member, 107, 207p, 207q, 307, 307p, 307q ... end support, 109, 209p, 209q, 309, 307p, 307q ... central support, 105a, 105b, 105c ... hollow inner wall, 113 ... rod, 115 ... knob (Moving mechanism), g: gap, M: exposure mask.

Claims (8)

A structural member comprising a main body member and a reinforcing member attached to the main body member,
The reinforcing member is
Having a higher specific rigidity than the body member;
Extending along the longitudinal direction of the body member,
Supported by the body member to reinforce the rigidity of the body member against bending,
A structural member, which is supported by the main body member so as to be stretchable in an extending direction. The body member is
Two end support portions for supporting side surfaces in the vicinity of both ends in the extending direction of the reinforcing member in a direction orthogonal to the extending direction;
The structural member according to claim 1, further comprising: a central support portion that supports a side surface in the vicinity of the center in the extending direction of the reinforcing member in a direction opposite to a support direction of the end portion support portion. The reinforcing member is housed in a hollow portion provided inside the main body member,
The end support part and the central support part are located on the inner wall surface of the hollow part,
The structural member according to claim 2, wherein a gap is provided between an end surface in the extending direction of the reinforcing member and an inner wall surface of the hollow portion facing the end surface. The end support portion is
4. A wedge-shaped member sandwiched between a side surface of the reinforcing member extending parallel to the extending direction and an inner wall surface of the hollow portion inclined with respect to the extending direction. The structural member as described in.   The structural member according to claim 4, further comprising a moving mechanism that moves the wedge-shaped member in the extending direction. The main body member is a member that is included in the machine structure and extends in the horizontal direction,
The reinforcing member is
The structure according to any one of claims 2 to 5, wherein the structure is sandwiched and supported by the center support portion in contact with the upper surface and the end support portion in contact with the lower surface. Element. The mechanical structure is a mask frame that holds an exposure mask in an exposure apparatus,
The structural member according to claim 6, wherein the main body member is a member included in a mask holder that adsorbs and supports the mask on a lower surface. A structural member reinforcement method for reinforcing a structural member by attaching a reinforcing member to a main body member,
The reinforcing member having a specific rigidity greater than that of the body member;
Extending along the longitudinal direction of the body member,
Supported by the body member to reinforce the rigidity of the body member against bending,
A method for reinforcing a structural member, wherein the structural member is attached to the main body member so as to be supported by the main body member so as to be stretchable in an extending direction.

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