CN101449385A - 具有浪涌电流保护的半导体器件及其制造方法 - Google Patents
具有浪涌电流保护的半导体器件及其制造方法 Download PDFInfo
- Publication number
- CN101449385A CN101449385A CNA2007800160155A CN200780016015A CN101449385A CN 101449385 A CN101449385 A CN 101449385A CN A2007800160155 A CNA2007800160155 A CN A2007800160155A CN 200780016015 A CN200780016015 A CN 200780016015A CN 101449385 A CN101449385 A CN 101449385A
- Authority
- CN
- China
- Prior art keywords
- type sic
- conducting material
- semi
- type
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 144
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000000463 material Substances 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 25
- 238000005530 etching Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000003989 dielectric material Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 239000004411 aluminium Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 4
- 238000007254 oxidation reaction Methods 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 2
- 238000001020 plasma etching Methods 0.000 abstract description 7
- 238000002347 injection Methods 0.000 abstract description 3
- 239000007924 injection Substances 0.000 abstract description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 90
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 74
- 230000005684 electric field Effects 0.000 description 15
- 230000004888 barrier function Effects 0.000 description 10
- 230000002441 reversible effect Effects 0.000 description 9
- 238000009826 distribution Methods 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 239000000956 alloy Substances 0.000 description 6
- 229910045601 alloy Inorganic materials 0.000 description 6
- 238000002360 preparation method Methods 0.000 description 6
- 230000005611 electricity Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- GZPBVLUEICLBOA-UHFFFAOYSA-N 4-(dimethylamino)-3,5-dimethylphenol Chemical compound CN(C)C1=C(C)C=C(O)C=C1C GZPBVLUEICLBOA-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 101150116749 chuk gene Proteins 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011982 device technology Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- LFULEKSKNZEWOE-UHFFFAOYSA-N propanil Chemical compound CCC(=O)NC1=CC=C(Cl)C(Cl)=C1 LFULEKSKNZEWOE-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000003949 trap density measurement Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/872—Schottky diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/47—Schottky barrier electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/861—Diodes
- H01L29/868—PIN diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Abstract
Description
Claims (26)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/415,279 | 2006-05-02 | ||
US11/415,279 US7274083B1 (en) | 2006-05-02 | 2006-05-02 | Semiconductor device with surge current protection and method of making the same |
PCT/US2007/010712 WO2007130505A2 (en) | 2006-05-02 | 2007-05-01 | Semiconductor device with surge current protection and method of making the same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011104388366A Division CN102522432A (zh) | 2006-05-02 | 2007-05-01 | 具有浪涌电流保护的半导体器件及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101449385A true CN101449385A (zh) | 2009-06-03 |
CN101449385B CN101449385B (zh) | 2012-02-08 |
Family
ID=38519988
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011104388366A Pending CN102522432A (zh) | 2006-05-02 | 2007-05-01 | 具有浪涌电流保护的半导体器件及其制造方法 |
CN2007800160155A Expired - Fee Related CN101449385B (zh) | 2006-05-02 | 2007-05-01 | 具有浪涌电流保护的半导体器件及其制造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2011104388366A Pending CN102522432A (zh) | 2006-05-02 | 2007-05-01 | 具有浪涌电流保护的半导体器件及其制造方法 |
Country Status (9)
Country | Link |
---|---|
US (2) | US7274083B1 (zh) |
EP (1) | EP2013911A2 (zh) |
JP (1) | JP5357014B2 (zh) |
KR (1) | KR101412802B1 (zh) |
CN (2) | CN102522432A (zh) |
AU (1) | AU2007248544B2 (zh) |
CA (1) | CA2650470A1 (zh) |
NZ (1) | NZ572020A (zh) |
WO (1) | WO2007130505A2 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102610658A (zh) * | 2010-12-31 | 2012-07-25 | 飞兆半导体公司 | 用于输入电力保护的势垒二极管 |
CN104425630A (zh) * | 2013-09-10 | 2015-03-18 | 现代自动车株式会社 | 肖特基势垒二极管和用于制造肖特基势垒二极管的方法 |
CN104916586A (zh) * | 2014-03-14 | 2015-09-16 | 株式会社东芝 | 半导体装置的制造方法 |
CN110291646A (zh) * | 2016-12-15 | 2019-09-27 | 格里菲斯大学 | 碳化硅肖特基二极管 |
CN117174763A (zh) * | 2023-11-03 | 2023-12-05 | 山东大学 | 碳化硅混合3C-SiC接触PN结肖特基二极管及制备方法 |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7274083B1 (en) * | 2006-05-02 | 2007-09-25 | Semisouth Laboratories, Inc. | Semiconductor device with surge current protection and method of making the same |
US8193537B2 (en) | 2006-06-19 | 2012-06-05 | Ss Sc Ip, Llc | Optically controlled silicon carbide and related wide-bandgap transistors and thyristors |
US7821015B2 (en) | 2006-06-19 | 2010-10-26 | Semisouth Laboratories, Inc. | Silicon carbide and related wide-bandgap transistors on semi insulating epitaxy |
JP5261923B2 (ja) * | 2006-10-17 | 2013-08-14 | サンケン電気株式会社 | 化合物半導体素子 |
JP2009224603A (ja) * | 2008-03-17 | 2009-10-01 | Toyota Central R&D Labs Inc | ダイオードの製造方法 |
JP5546759B2 (ja) | 2008-08-05 | 2014-07-09 | トヨタ自動車株式会社 | 半導体装置及びその製造方法 |
JP5047133B2 (ja) * | 2008-11-19 | 2012-10-10 | 昭和電工株式会社 | 半導体装置の製造方法 |
US8106487B2 (en) * | 2008-12-23 | 2012-01-31 | Pratt & Whitney Rocketdyne, Inc. | Semiconductor device having an inorganic coating layer applied over a junction termination extension |
KR101051578B1 (ko) * | 2009-09-08 | 2011-07-22 | 삼성전기주식회사 | 반도체 소자 및 그 제조 방법 |
CN102754213B (zh) | 2010-02-23 | 2015-08-05 | 菅原良孝 | 半导体装置 |
JP5106604B2 (ja) * | 2010-09-07 | 2012-12-26 | 株式会社東芝 | 半導体装置およびその製造方法 |
JP2015149375A (ja) * | 2014-02-06 | 2015-08-20 | 住友電気工業株式会社 | ダイオード |
CN103904135B (zh) * | 2014-04-18 | 2018-03-30 | 苏州捷芯威半导体有限公司 | 肖特基二极管及其制造方法 |
JP2017011060A (ja) * | 2015-06-19 | 2017-01-12 | 住友電気工業株式会社 | ショットキーバリアダイオード |
US9960247B2 (en) * | 2016-01-19 | 2018-05-01 | Ruigang Li | Schottky barrier structure for silicon carbide (SiC) power devices |
EP3416184A1 (en) | 2017-06-14 | 2018-12-19 | ABB Schweiz AG | High power semiconductor device with mesa termination structure and method for manufacturing the same |
US10615292B2 (en) * | 2018-03-27 | 2020-04-07 | Hong Kong Applied Science And Technology Research Institute Co., Ltd. | High voltage silicon carbide Schottky diode flip chip array |
CN111081758B (zh) * | 2019-11-21 | 2023-06-02 | 北京绿能芯创电子科技有限公司 | 降低导通电阻的SiC MPS结构及制备方法 |
WO2022209778A1 (ja) * | 2021-03-29 | 2022-10-06 | 京セラ株式会社 | 半導体素子、半導体装置及び半導体素子の製造方法 |
CN114759080B (zh) * | 2022-06-13 | 2022-09-09 | 深圳市时代速信科技有限公司 | 一种半导体器件及其制备方法 |
Family Cites Families (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5949713B2 (ja) * | 1979-12-25 | 1984-12-04 | 日本電信電話株式会社 | シヨツトキバリヤダイオ−ド |
US4982260A (en) | 1989-10-02 | 1991-01-01 | General Electric Company | Power rectifier with trenches |
JPH04233281A (ja) * | 1990-12-28 | 1992-08-21 | Fuji Electric Co Ltd | 半導体装置 |
US5449925A (en) | 1994-05-04 | 1995-09-12 | North Carolina State University | Voltage breakdown resistant monocrystalline silicon carbide semiconductor devices |
JPH0897411A (ja) * | 1994-09-21 | 1996-04-12 | Fuji Electric Co Ltd | 横型高耐圧トレンチmosfetおよびその製造方法 |
SE9700141D0 (sv) | 1997-01-20 | 1997-01-20 | Abb Research Ltd | A schottky diode of SiC and a method for production thereof |
JP3287269B2 (ja) * | 1997-06-02 | 2002-06-04 | 富士電機株式会社 | ダイオードとその製造方法 |
FR2803103B1 (fr) * | 1999-12-24 | 2003-08-29 | St Microelectronics Sa | Diode schottky sur substrat de carbure de silicium |
DE10004983C1 (de) * | 2000-02-04 | 2001-09-13 | Infineon Technologies Ag | Schutzanordnung für Schottky-Diode |
US6686616B1 (en) * | 2000-05-10 | 2004-02-03 | Cree, Inc. | Silicon carbide metal-semiconductor field effect transistors |
FR2816113A1 (fr) | 2000-10-31 | 2002-05-03 | St Microelectronics Sa | Procede de realisation d'une zone dopee dans du carbure de silicium et application a une diode schottky |
US6573128B1 (en) | 2000-11-28 | 2003-06-03 | Cree, Inc. | Epitaxial edge termination for silicon carbide Schottky devices and methods of fabricating silicon carbide devices incorporating same |
JP4872158B2 (ja) * | 2001-03-05 | 2012-02-08 | 住友電気工業株式会社 | ショットキーダイオード、pn接合ダイオード、pin接合ダイオード、および製造方法 |
US6844251B2 (en) * | 2001-03-23 | 2005-01-18 | Krishna Shenai | Method of forming a semiconductor device with a junction termination layer |
US6524900B2 (en) | 2001-07-25 | 2003-02-25 | Abb Research, Ltd | Method concerning a junction barrier Schottky diode, such a diode and use thereof |
US6693308B2 (en) * | 2002-02-22 | 2004-02-17 | Semisouth Laboratories, Llc | Power SiC devices having raised guard rings |
US6815304B2 (en) * | 2002-02-22 | 2004-11-09 | Semisouth Laboratories, Llc | Silicon carbide bipolar junction transistor with overgrown base region |
US7095050B2 (en) * | 2002-02-28 | 2006-08-22 | Midwest Research Institute | Voltage-matched, monolithic, multi-band-gap devices |
US6683334B2 (en) * | 2002-03-12 | 2004-01-27 | Microsemi Corporation | Compound semiconductor protection device for low voltage and high speed data lines |
DE10259373B4 (de) | 2002-12-18 | 2012-03-22 | Infineon Technologies Ag | Überstromfeste Schottkydiode mit niedrigem Sperrstrom |
US6955932B2 (en) * | 2003-10-29 | 2005-10-18 | International Business Machines Corporation | Single and double-gate pseudo-FET devices for semiconductor materials evaluation |
CN100524790C (zh) * | 2004-02-02 | 2009-08-05 | 三垦电气株式会社 | 半导体发光元件与保护元件的复合半导体装置 |
US7470967B2 (en) * | 2004-03-12 | 2008-12-30 | Semisouth Laboratories, Inc. | Self-aligned silicon carbide semiconductor devices and methods of making the same |
US7202528B2 (en) * | 2004-12-01 | 2007-04-10 | Semisouth Laboratories, Inc. | Normally-off integrated JFET power switches in wide bandgap semiconductors and methods of making |
CA2576960A1 (en) * | 2004-07-08 | 2007-01-04 | Semisouth Laboratories, Inc. | Monolithic vertical junction field effect transistor and schottky barrier diode fabricated from silicon carbide and method for fabricating the same |
US7199442B2 (en) * | 2004-07-15 | 2007-04-03 | Fairchild Semiconductor Corporation | Schottky diode structure to reduce capacitance and switching losses and method of making same |
JP3914226B2 (ja) * | 2004-09-29 | 2007-05-16 | 株式会社東芝 | 高耐圧半導体装置 |
US7119380B2 (en) * | 2004-12-01 | 2006-10-10 | Semisouth Laboratories, Inc. | Lateral trench field-effect transistors in wide bandgap semiconductor materials, methods of making, and integrated circuits incorporating the transistors |
EP2161752B1 (en) * | 2005-06-22 | 2015-08-12 | Seoul Viosys Co., Ltd | Light-emitting device |
DE112006002927B4 (de) * | 2006-01-09 | 2010-06-02 | Seoul Opto Device Co. Ltd., Ansan | Licht emittierende Diode mit ITO-Schicht und Verfahren zur Herstellung einer solchen |
US9455356B2 (en) * | 2006-02-28 | 2016-09-27 | Cree, Inc. | High power silicon carbide (SiC) PiN diodes having low forward voltage drops |
US8269262B2 (en) * | 2006-05-02 | 2012-09-18 | Ss Sc Ip Llc | Vertical junction field effect transistor with mesa termination and method of making the same |
US7274083B1 (en) * | 2006-05-02 | 2007-09-25 | Semisouth Laboratories, Inc. | Semiconductor device with surge current protection and method of making the same |
JP2007305708A (ja) * | 2006-05-10 | 2007-11-22 | Rohm Co Ltd | 半導体発光素子アレイおよびこれを用いた照明用器具 |
-
2006
- 2006-05-02 US US11/415,279 patent/US7274083B1/en active Active
-
2007
- 2007-05-01 KR KR1020087029419A patent/KR101412802B1/ko not_active IP Right Cessation
- 2007-05-01 CN CN2011104388366A patent/CN102522432A/zh active Pending
- 2007-05-01 CA CA002650470A patent/CA2650470A1/en not_active Abandoned
- 2007-05-01 NZ NZ572020A patent/NZ572020A/en not_active IP Right Cessation
- 2007-05-01 CN CN2007800160155A patent/CN101449385B/zh not_active Expired - Fee Related
- 2007-05-01 EP EP07794508A patent/EP2013911A2/en not_active Withdrawn
- 2007-05-01 WO PCT/US2007/010712 patent/WO2007130505A2/en active Application Filing
- 2007-05-01 AU AU2007248544A patent/AU2007248544B2/en not_active Ceased
- 2007-05-01 JP JP2009509705A patent/JP5357014B2/ja not_active Expired - Fee Related
- 2007-06-28 US US11/819,646 patent/US7960198B2/en not_active Expired - Fee Related
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102610658A (zh) * | 2010-12-31 | 2012-07-25 | 飞兆半导体公司 | 用于输入电力保护的势垒二极管 |
CN104425630A (zh) * | 2013-09-10 | 2015-03-18 | 现代自动车株式会社 | 肖特基势垒二极管和用于制造肖特基势垒二极管的方法 |
CN104916586A (zh) * | 2014-03-14 | 2015-09-16 | 株式会社东芝 | 半导体装置的制造方法 |
CN110291646A (zh) * | 2016-12-15 | 2019-09-27 | 格里菲斯大学 | 碳化硅肖特基二极管 |
CN110291646B (zh) * | 2016-12-15 | 2023-03-28 | 格里菲斯大学 | 碳化硅肖特基二极管 |
CN117174763A (zh) * | 2023-11-03 | 2023-12-05 | 山东大学 | 碳化硅混合3C-SiC接触PN结肖特基二极管及制备方法 |
CN117174763B (zh) * | 2023-11-03 | 2024-03-01 | 山东大学 | 碳化硅混合3C-SiC接触PN结肖特基二极管及制备方法 |
Also Published As
Publication number | Publication date |
---|---|
JP5357014B2 (ja) | 2013-12-04 |
AU2007248544B2 (en) | 2013-07-18 |
WO2007130505A3 (en) | 2008-12-24 |
WO2007130505A2 (en) | 2007-11-15 |
US7960198B2 (en) | 2011-06-14 |
KR101412802B1 (ko) | 2014-06-27 |
AU2007248544A1 (en) | 2007-11-15 |
US20080160685A1 (en) | 2008-07-03 |
CA2650470A1 (en) | 2007-11-15 |
CN101449385B (zh) | 2012-02-08 |
NZ572020A (en) | 2011-09-30 |
KR20090017561A (ko) | 2009-02-18 |
CN102522432A (zh) | 2012-06-27 |
JP2009535853A (ja) | 2009-10-01 |
US7274083B1 (en) | 2007-09-25 |
EP2013911A2 (en) | 2009-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN101449385B (zh) | 具有浪涌电流保护的半导体器件及其制造方法 | |
US8269262B2 (en) | Vertical junction field effect transistor with mesa termination and method of making the same | |
Singh et al. | SiC power Schottky and PiN diodes | |
Khemka et al. | Design considerations and experimental analysis for silicon carbide power rectifiers | |
CN103563087A (zh) | 凹陷终端结构和带有凹陷终端结构的电子器件的制备方法 | |
Khemka et al. | A fully planarized 4H-SiC trench MOS barrier Schottky (TMBS) rectifier | |
Fedison et al. | Electrical characteristics of 4.5 kV implanted anode 4H-SiC pin junction rectifiers | |
CN103227193A (zh) | 具有边缘终端结构的半导体器件 | |
RU2390880C1 (ru) | ИНТЕГРИРОВАННЫЙ ШОТТКИ-pn ДИОД НА ОСНОВЕ КАРБИДА КРЕМНИЯ | |
CN114267718A (zh) | 具有埋层结构的碳化硅mps二极管及其制备方法 | |
Neugroschel et al. | Effects of grain boundaries on the current-voltage characteristics of polycrystalline silicon solar cells | |
CN216871978U (zh) | 一种终端结构以及功率器件 | |
Shenoy et al. | Planar, ion implanted, high voltage 6H-SiC PN junction diodes | |
CN112242449B (zh) | 一种基于SiC衬底沟槽型MPS二极管元胞结构 | |
Patel et al. | Phosphorus-implanted high-voltage n/sup+/p 4H-SiC junction rectifiers | |
Ramungul et al. | 6H-SiC p/sup+/-n junctions fabricated by beryllium implantation | |
Khemka et al. | Static and dynamic characteristics of a 1100 V, double-implanted, planar, 4H-SiC PiN rectifier | |
Xiang | Surface Recombination and Excess Current of Anode-Gate Mesa Sidewall in 4H-SiC Gate Turn-Off Thyristor | |
Ramungul et al. | Current-controlled negative resistance (CCNR) in SiC PiN rectifiers | |
Zhao et al. | High performance 1500V 4H-SiC junction barrier Schottky diodes | |
Liu et al. | Low forward voltage of 1.2 kV-20A 4H-SiC JBS rectifiers: the impact of thinning process | |
Mohammad et al. | Investigations of current mechanisms and electronic properties of Schottky barrier diode | |
Li et al. | Research and Development of 1200V 4H-SiC Trench JBS Diode | |
Van Iseghem | pin epitaxial structures for high power devices | |
Yuan et al. | 4H-SiC monolithic Darlington transistors with slight current gain drop at high collector current density |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: SS SC IP LLC Free format text: FORMER OWNER: SEMISOUTH LAB INC. Effective date: 20111208 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20111208 Address after: Mississippi Applicant after: SS SC IP Limited company Address before: Mississippi Applicant before: Semisouth Lab Inc. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: PI CORP. Free format text: FORMER OWNER: SS SC Effective date: 20131016 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20131016 Address after: American California Patentee after: PI Corp. Address before: Mississippi Patentee before: SS SC IP Limited company |
|
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120208 Termination date: 20150501 |
|
EXPY | Termination of patent right or utility model |