CN101375397B - 成像设备和辐射成像设备 - Google Patents
成像设备和辐射成像设备 Download PDFInfo
- Publication number
- CN101375397B CN101375397B CN200780003606.9A CN200780003606A CN101375397B CN 101375397 B CN101375397 B CN 101375397B CN 200780003606 A CN200780003606 A CN 200780003606A CN 101375397 B CN101375397 B CN 101375397B
- Authority
- CN
- China
- Prior art keywords
- conductive layer
- conversion element
- switch
- reset switch
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003384 imaging method Methods 0.000 title claims description 103
- 230000005855 radiation Effects 0.000 title claims description 102
- 238000006243 chemical reaction Methods 0.000 claims abstract description 143
- 230000008054 signal transmission Effects 0.000 claims abstract description 29
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 239000010409 thin film Substances 0.000 claims abstract description 6
- 239000004065 semiconductor Substances 0.000 claims description 32
- 230000005540 biological transmission Effects 0.000 claims description 14
- 239000012535 impurity Substances 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 106
- 239000011295 pitch Substances 0.000 description 16
- 230000002950 deficient Effects 0.000 description 10
- 239000010408 film Substances 0.000 description 10
- 239000011229 interlayer Substances 0.000 description 9
- 238000007689 inspection Methods 0.000 description 8
- 230000007547 defect Effects 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 5
- 238000002161 passivation Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052711 selenium Inorganic materials 0.000 description 3
- 239000011669 selenium Substances 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000003745 diagnosis Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000002601 radiography Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002059 diagnostic imaging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000009546 plain radiography Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/026—Wafer-level processing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
- H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/802—Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006019032A JP2007201246A (ja) | 2006-01-27 | 2006-01-27 | 光電変換装置及び放射線撮像装置 |
| JP019032/2006 | 2006-01-27 | ||
| PCT/JP2007/050629 WO2007086292A1 (en) | 2006-01-27 | 2007-01-11 | Imaging apparatus and radiation imaging apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101375397A CN101375397A (zh) | 2009-02-25 |
| CN101375397B true CN101375397B (zh) | 2011-07-13 |
Family
ID=38309086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200780003606.9A Expired - Fee Related CN101375397B (zh) | 2006-01-27 | 2007-01-11 | 成像设备和辐射成像设备 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8067743B2 (enExample) |
| JP (1) | JP2007201246A (enExample) |
| CN (1) | CN101375397B (enExample) |
| WO (1) | WO2007086292A1 (enExample) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5196739B2 (ja) | 2006-06-09 | 2013-05-15 | キヤノン株式会社 | 放射線撮像装置及び放射線撮像システム |
| JP2009252835A (ja) * | 2008-04-02 | 2009-10-29 | Fujifilm Corp | 電磁波検出素子 |
| JP5489542B2 (ja) * | 2008-07-01 | 2014-05-14 | キヤノン株式会社 | 放射線検出装置及び放射線撮像システム |
| TWI415283B (zh) * | 2009-02-18 | 2013-11-11 | Au Optronics Corp | X射線感測器及其製作方法 |
| JP2011238897A (ja) * | 2010-04-13 | 2011-11-24 | Canon Inc | 検出装置及びその製造方法並びに検出システム |
| JP2012079820A (ja) * | 2010-09-30 | 2012-04-19 | Canon Inc | 検出装置及び放射線検出システム |
| JP2012227263A (ja) * | 2011-04-18 | 2012-11-15 | Canon Inc | 検出装置の製造方法、その製造方法で製造された検出装置を用いた放射線検出装置、及び、検出システム |
| JP5848047B2 (ja) * | 2011-07-07 | 2016-01-27 | 富士フイルム株式会社 | 放射線検出素子、放射線画像撮影装置、及び放射線画像撮影システム |
| JP5954983B2 (ja) | 2011-12-21 | 2016-07-20 | キヤノン株式会社 | 撮像装置及び放射線撮像システム、並びに撮像装置の製造方法 |
| JP6057511B2 (ja) | 2011-12-21 | 2017-01-11 | キヤノン株式会社 | 撮像装置及び放射線撮像システム |
| JP6463136B2 (ja) | 2014-02-14 | 2019-01-30 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
| JP6378573B2 (ja) | 2014-08-06 | 2018-08-22 | キヤノン株式会社 | 放射線撮像装置及び放射線撮像システム |
| US9526468B2 (en) | 2014-09-09 | 2016-12-27 | General Electric Company | Multiple frame acquisition for exposure control in X-ray medical imagers |
| JP6570315B2 (ja) | 2015-05-22 | 2019-09-04 | キヤノン株式会社 | 放射線撮像装置及び放射線撮像システム |
| JP6929104B2 (ja) | 2017-04-05 | 2021-09-01 | キヤノン株式会社 | 放射線撮像装置、放射線撮像システム、放射線撮像装置の制御方法及びプログラム |
| JP6990986B2 (ja) | 2017-04-27 | 2022-01-12 | キヤノン株式会社 | 放射線撮像装置、放射線撮像システム、放射線撮像装置の制御方法及びプログラム |
| JP6853729B2 (ja) | 2017-05-08 | 2021-03-31 | キヤノン株式会社 | 放射線撮像装置、放射線撮像システム、放射線撮像装置の制御方法及びプログラム |
| JP6788547B2 (ja) | 2017-05-09 | 2020-11-25 | キヤノン株式会社 | 放射線撮像装置、その制御方法、制御装置、及び、放射線撮像システム |
| JP6877289B2 (ja) | 2017-07-31 | 2021-05-26 | キヤノン株式会社 | 放射線検出装置、放射線検出システム、及び放射線出装置の製造方法 |
| JP7045834B2 (ja) | 2017-11-10 | 2022-04-01 | キヤノン株式会社 | 放射線撮像システム |
| JP7079113B2 (ja) | 2018-02-21 | 2022-06-01 | キヤノン株式会社 | 放射線撮像装置及び放射線撮像システム |
| JP7198003B2 (ja) | 2018-06-22 | 2022-12-28 | キヤノン株式会社 | 放射線撮像装置、放射線撮像システム、放射線撮像装置の制御方法およびプログラム |
| JP6659182B2 (ja) | 2018-07-23 | 2020-03-04 | キヤノン株式会社 | 放射線撮像装置、その製造方法及び放射線撮像システム |
| EP3661190B1 (en) | 2018-11-27 | 2024-05-22 | Canon Kabushiki Kaisha | Radiation imaging apparatus and radiation imaging system |
| JP7344769B2 (ja) | 2019-11-22 | 2023-09-14 | キヤノン株式会社 | 放射線検出装置及び出力方法 |
| JP7397635B2 (ja) | 2019-11-22 | 2023-12-13 | キヤノン株式会社 | 放射線検出装置、放射線検出システム、制御方法及びプログラム |
| CN114447002A (zh) * | 2020-11-05 | 2022-05-06 | 睿生光电股份有限公司 | 光检测装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1501758A (zh) * | 2002-11-13 | 2004-06-02 | ������������ʽ���� | 摄象装置、放射线摄象装置和放射线摄象系统 |
| CN1527393A (zh) * | 2003-03-07 | 2004-09-08 | ���µ�����ҵ��ʽ���� | 固态成像装置 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2768524B1 (fr) | 1997-09-12 | 1999-10-22 | France Telecom | Amplificateur a large surface avec recombineur a interferences multimodes |
| JP4011734B2 (ja) * | 1998-06-02 | 2007-11-21 | キヤノン株式会社 | 2次元光センサ、それを用いた放射線検出装置及び放射線診断システム |
| JP2001296363A (ja) * | 2000-04-14 | 2001-10-26 | Fuji Photo Film Co Ltd | 放射線検出装置 |
| US7034309B2 (en) * | 2001-11-13 | 2006-04-25 | Canon Kabushiki Kaisha | Radiation detecting apparatus and method of driving the same |
| JP4500488B2 (ja) * | 2001-11-13 | 2010-07-14 | キヤノン株式会社 | 放射線検出装置及びその駆動方法、光電変換装置 |
| US7214945B2 (en) * | 2002-06-11 | 2007-05-08 | Canon Kabushiki Kaisha | Radiation detecting apparatus, manufacturing method therefor, and radiation image pickup system |
| EP1388740B1 (en) * | 2002-08-09 | 2014-11-05 | Canon Kabushiki Kaisha | Radiation imaging method and apparatus |
| JP4938961B2 (ja) * | 2002-11-13 | 2012-05-23 | キヤノン株式会社 | 撮像装置、放射線撮像装置及び放射線撮像システム |
| JP4266656B2 (ja) | 2003-02-14 | 2009-05-20 | キヤノン株式会社 | 固体撮像装置及び放射線撮像装置 |
| JP4323827B2 (ja) | 2003-02-14 | 2009-09-02 | キヤノン株式会社 | 固体撮像装置及び放射線撮像装置 |
| US7541617B2 (en) | 2003-02-14 | 2009-06-02 | Canon Kabushiki Kaisha | Radiation image pickup device |
| JP4418720B2 (ja) | 2003-11-21 | 2010-02-24 | キヤノン株式会社 | 放射線撮像装置及び方法、並びに放射線撮像システム |
| JP4845352B2 (ja) | 2004-06-15 | 2011-12-28 | キヤノン株式会社 | 放射線撮像装置、その製造方法及び放射線撮像システム |
| US7557355B2 (en) | 2004-09-30 | 2009-07-07 | Canon Kabushiki Kaisha | Image pickup apparatus and radiation image pickup apparatus |
| JP5159065B2 (ja) | 2005-08-31 | 2013-03-06 | キヤノン株式会社 | 放射線検出装置、放射線撮像装置および放射線撮像システム |
| JP5173234B2 (ja) | 2006-05-24 | 2013-04-03 | キヤノン株式会社 | 放射線撮像装置及び放射線撮像システム |
-
2006
- 2006-01-27 JP JP2006019032A patent/JP2007201246A/ja active Pending
-
2007
- 2007-01-11 US US12/095,674 patent/US8067743B2/en not_active Expired - Fee Related
- 2007-01-11 WO PCT/JP2007/050629 patent/WO2007086292A1/en not_active Ceased
- 2007-01-11 CN CN200780003606.9A patent/CN101375397B/zh not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1501758A (zh) * | 2002-11-13 | 2004-06-02 | ������������ʽ���� | 摄象装置、放射线摄象装置和放射线摄象系统 |
| CN1527393A (zh) * | 2003-03-07 | 2004-09-08 | ���µ�����ҵ��ʽ���� | 固态成像装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007086292A1 (en) | 2007-08-02 |
| US20100277630A1 (en) | 2010-11-04 |
| US8067743B2 (en) | 2011-11-29 |
| CN101375397A (zh) | 2009-02-25 |
| JP2007201246A (ja) | 2007-08-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101375397B (zh) | 成像设备和辐射成像设备 | |
| JP5043373B2 (ja) | 変換装置、放射線検出装置、及び放射線検出システム | |
| JP4845352B2 (ja) | 放射線撮像装置、その製造方法及び放射線撮像システム | |
| US8368027B2 (en) | Radiation detection apparatus and radiographic imaging system | |
| JP5159065B2 (ja) | 放射線検出装置、放射線撮像装置および放射線撮像システム | |
| JP5043374B2 (ja) | 変換装置、放射線検出装置、及び放射線検出システム | |
| JP5043380B2 (ja) | 放射線検出装置および放射線検出システム | |
| EP1420453B1 (en) | Image pickup apparatus, radiation image pickup apparatus and radiation image pickup system | |
| US7655920B2 (en) | Conversion apparatus, radiation detection apparatus, and radiation detection system | |
| JP5328169B2 (ja) | 撮像装置及び放射線撮像システム | |
| JP5700973B2 (ja) | 検出装置及び放射線検出システム | |
| JP4067055B2 (ja) | 撮像装置及びその製造方法、放射線撮像装置、放射線撮像システム | |
| JP4498283B2 (ja) | 撮像装置、放射線撮像装置及びこれらの製造方法 | |
| JP2004179645A (ja) | 撮像装置、放射線撮像装置及び放射線撮像システム | |
| JP2012079860A (ja) | 検出装置及び放射線検出システム | |
| JP5677353B2 (ja) | 放射線検出装置および放射線撮像システム | |
| JP4393085B2 (ja) | 放射線検出装置 | |
| US20080087834A1 (en) | Radiation image detector | |
| CN100539171C (zh) | 转换设备、放射检测设备和放射检测系统 | |
| CN100565894C (zh) | 转换设备,放射线检测设备和放射线检测系统 | |
| JP2006186031A (ja) | 光電変換装置及び放射線撮像装置 | |
| JP2005136330A (ja) | 撮像装置及び放射線撮像システム | |
| JP2003347534A (ja) | 放射線検出装置及びその製造方法 | |
| JP2006128645A (ja) | 撮像装置、放射線撮像装置、及び放射線撮像システム | |
| JP2002124684A (ja) | 半導体装置、それを備えた放射線検出装置および放射線検出システム |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110713 Termination date: 20200111 |