CN101071141B - 探测单元及具有该探测单元的探测装置 - Google Patents

探测单元及具有该探测单元的探测装置 Download PDF

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Publication number
CN101071141B
CN101071141B CN2007100976019A CN200710097601A CN101071141B CN 101071141 B CN101071141 B CN 101071141B CN 2007100976019 A CN2007100976019 A CN 2007100976019A CN 200710097601 A CN200710097601 A CN 200710097601A CN 101071141 B CN101071141 B CN 101071141B
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CN
China
Prior art keywords
probe
support member
along
framework
fixed
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Expired - Fee Related
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CN2007100976019A
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English (en)
Chinese (zh)
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CN101071141A (zh
Inventor
申东沅
金昔中
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Soulbrain ENG Co Ltd
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Phicom Corp
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Publication of CN101071141A publication Critical patent/CN101071141A/zh
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Publication of CN101071141B publication Critical patent/CN101071141B/zh
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
CN2007100976019A 2006-05-09 2007-04-20 探测单元及具有该探测单元的探测装置 Expired - Fee Related CN101071141B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR20060041528 2006-05-09
KR1020060041528A KR100773732B1 (ko) 2006-05-09 2006-05-09 프로브 유닛 및 이를 포함하는 프로브 장치
KR2006-0041528 2006-05-09

Publications (2)

Publication Number Publication Date
CN101071141A CN101071141A (zh) 2007-11-14
CN101071141B true CN101071141B (zh) 2010-05-26

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ID=38898461

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CN2007100976019A Expired - Fee Related CN101071141B (zh) 2006-05-09 2007-04-20 探测单元及具有该探测单元的探测装置

Country Status (3)

Country Link
KR (1) KR100773732B1 (ko)
CN (1) CN101071141B (ko)
TW (1) TWI333071B (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101049445B1 (ko) 2009-01-12 2011-07-15 주식회사 디엠엔티 디스플레이 패널 검사를 위한 프로브 유닛
CN101498759B (zh) * 2009-03-19 2012-04-11 安徽天元电子科技有限公司 一种测试治具
CN101672863B (zh) * 2009-10-26 2012-07-04 华映光电股份有限公司 测试组件与应用其的测试装置
JP5417265B2 (ja) * 2010-06-24 2014-02-12 株式会社日本マイクロニクス プローブ組立体
KR101166107B1 (ko) 2010-12-16 2012-07-23 주식회사 디에스케이 디스플레이 패널 검사를 위한 프로브 유닛
KR101191343B1 (ko) 2010-12-30 2012-10-16 주식회사 탑 엔지니어링 어레이 테스트 장치
KR101234088B1 (ko) * 2010-12-30 2013-02-19 주식회사 탑 엔지니어링 어레이 테스트 장치
JP6184667B2 (ja) * 2012-07-26 2017-08-23 日置電機株式会社 プローブユニット、基板検査装置およびプローブユニット製造方法
CN103018505A (zh) * 2012-12-04 2013-04-03 无锡圆方半导体测试有限公司 一种探针修正装置
CN105467175A (zh) * 2015-12-10 2016-04-06 苏州世纪福智能装备股份有限公司 一种角度可调测试机
JP7237470B2 (ja) * 2018-06-07 2023-03-13 株式会社日本マイクロニクス プローブ組立体
JP7154835B2 (ja) * 2018-06-22 2022-10-18 株式会社日本マイクロニクス プローブ組立体
KR102098650B1 (ko) * 2019-07-24 2020-04-10 주식회사 프로이천 핀 타입 프로브 장치
KR102294168B1 (ko) * 2021-06-18 2021-08-25 이시훈 블레이드형 프로브 블록

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1285615A (zh) * 1999-08-19 2001-02-28 富士通株式会社 测试具有许多半导体器件的晶片的探针卡和方法
JP2002048815A (ja) * 2000-07-31 2002-02-15 Fujitsu Ltd プローブヘッド
KR20020081721A (ko) * 2001-04-19 2002-10-30 비엔엘솔루컴 (주) 액정표시장치 검사용 핀프루브조립체
WO2004049429A1 (en) * 2002-11-22 2004-06-10 Phicom Corporation Probe for testing flat panel display and manufacturing method thereof
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法
JP4184264B2 (ja) * 2001-07-16 2008-11-19 クゥアルコム・インコーポレイテッド 周波数ディスクリミネータ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09127156A (ja) * 1995-11-01 1997-05-16 Tokyo Electron Ltd 液晶表示体用プローブカード
KR100314586B1 (ko) * 1999-05-17 2001-11-15 이석행 액정디스플레이 검사용 프로브장치
KR100635524B1 (ko) * 2004-11-12 2006-10-18 주식회사 세지 반도체 웨이퍼 검사기의 프로브장치
KR100720122B1 (ko) * 2005-03-30 2007-05-22 주식회사 세지 반도체 웨이퍼 검사기의 프로브 장치
KR100610889B1 (ko) 2005-10-10 2006-08-08 (주)엠씨티코리아 초미세 피치를 갖는 평판형 디스플레이장치 검사용프로브유니트

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1285615A (zh) * 1999-08-19 2001-02-28 富士通株式会社 测试具有许多半导体器件的晶片的探针卡和方法
JP2002048815A (ja) * 2000-07-31 2002-02-15 Fujitsu Ltd プローブヘッド
KR20020081721A (ko) * 2001-04-19 2002-10-30 비엔엘솔루컴 (주) 액정표시장치 검사용 핀프루브조립체
JP4184264B2 (ja) * 2001-07-16 2008-11-19 クゥアルコム・インコーポレイテッド 周波数ディスクリミネータ
WO2004049429A1 (en) * 2002-11-22 2004-06-10 Phicom Corporation Probe for testing flat panel display and manufacturing method thereof
CN1731203A (zh) * 2005-03-09 2006-02-08 飞而康公司 液晶显示器面板的检查装置及其检查方法

Also Published As

Publication number Publication date
KR100773732B1 (ko) 2007-11-09
TW200804827A (en) 2008-01-16
TWI333071B (en) 2010-11-11
CN101071141A (zh) 2007-11-14

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Granted publication date: 20100526

Termination date: 20130420