CN100517658C - 具有岛状分布结构的半导体芯片及其制造方法 - Google Patents
具有岛状分布结构的半导体芯片及其制造方法 Download PDFInfo
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- CN100517658C CN100517658C CNB2006101631336A CN200610163133A CN100517658C CN 100517658 C CN100517658 C CN 100517658C CN B2006101631336 A CNB2006101631336 A CN B2006101631336A CN 200610163133 A CN200610163133 A CN 200610163133A CN 100517658 C CN100517658 C CN 100517658C
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- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
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- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma & Fusion (AREA)
- Weting (AREA)
- Element Separation (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
芯片破损缺陷 | 信息保持特性缺陷 | |
示例1 | 0.4 | 0.5 |
示例2 | 0.2 | 1.0 |
示例3 | 0.2 | 0.5 |
对比示例1 | 1.0 | 1.0 |
对比示例2 | 0.8 | 0.5 |
Claims (16)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005345056A JP4677331B2 (ja) | 2005-11-30 | 2005-11-30 | 島状の分散構造を備えた半導体チップおよびその製造方法 |
JP2005345056 | 2005-11-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1976012A CN1976012A (zh) | 2007-06-06 |
CN100517658C true CN100517658C (zh) | 2009-07-22 |
Family
ID=38086649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006101631336A Expired - Fee Related CN100517658C (zh) | 2005-11-30 | 2006-11-30 | 具有岛状分布结构的半导体芯片及其制造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7911058B2 (zh) |
JP (1) | JP4677331B2 (zh) |
KR (1) | KR100899905B1 (zh) |
CN (1) | CN100517658C (zh) |
TW (1) | TW200729347A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6098323B2 (ja) * | 2013-04-17 | 2017-03-22 | 富士電機株式会社 | 半導体装置の製造方法 |
US10700012B2 (en) | 2017-04-14 | 2020-06-30 | Qualcomm Incorporated | Porous silicon dicing |
CN107132472B (zh) * | 2017-05-23 | 2020-06-09 | 北京智芯微电子科技有限公司 | 一种用于分析深亚微米级soi工艺芯片的腐蚀溶液及方法 |
US10586751B2 (en) * | 2017-08-03 | 2020-03-10 | Advanced Semiconductor Engineering, Inc. | Semiconductor package device and method of manufacturing the same |
CN111699551B (zh) * | 2019-01-15 | 2023-10-17 | 深圳市汇顶科技股份有限公司 | 芯片及芯片的制造方法 |
GB201917988D0 (en) * | 2019-12-09 | 2020-01-22 | Spts Technologies Ltd | A semiconductor wafer dicing process |
Family Cites Families (28)
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JPS60148128A (ja) * | 1984-01-13 | 1985-08-05 | Nec Corp | 半導体基板 |
JPH03250721A (ja) | 1990-02-28 | 1991-11-08 | Elna Co Ltd | 電解コンデンサ装置 |
JPH071908B2 (ja) | 1991-01-28 | 1995-01-11 | 富士ゼロックス株式会社 | データ通信装置 |
JPH04290038A (ja) | 1991-03-19 | 1992-10-14 | Oki Electric Ind Co Ltd | Isdn一次群レイトインタフェースにおけるs点延長装置 |
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JPH08213292A (ja) | 1995-02-02 | 1996-08-20 | Hitachi Ltd | 半導体基板及びその製造方法 |
JP3250721B2 (ja) | 1995-12-12 | 2002-01-28 | キヤノン株式会社 | Soi基板の製造方法 |
TW420827B (en) | 1996-12-05 | 2001-02-01 | Canon Kk | Fabrication process of SOI substrate |
US6248664B1 (en) | 1997-05-19 | 2001-06-19 | Semiconductor Components Industries Llc | Method of forming a contact |
JP2000353797A (ja) * | 1999-06-11 | 2000-12-19 | Mitsubishi Electric Corp | 半導体ウエハおよびその製造方法 |
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KR100405194B1 (ko) | 2000-11-30 | 2003-11-10 | 텔레포스 주식회사 | 다공성 산화 실리콘층의 선택적 형성 방법, 이를 이용한 멀티칩 패키지 및 반도체 기판 |
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US8920625B2 (en) * | 2007-04-27 | 2014-12-30 | Board Of Regents Of The University Of Texas System | Electrochemical method of making porous particles using a constant current density |
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2005
- 2005-11-30 JP JP2005345056A patent/JP4677331B2/ja not_active Expired - Fee Related
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2006
- 2006-11-15 US US11/599,268 patent/US7911058B2/en not_active Expired - Fee Related
- 2006-11-29 TW TW095144130A patent/TW200729347A/zh unknown
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2010
- 2010-12-17 US US12/971,854 patent/US8088673B2/en not_active Expired - Fee Related
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背面多孔硅对SIMOX中铜杂质的吸除作用. 竺士炀,黄宜平,包宗明.固体电子学研究与进展,第18卷第4期. 1998 |
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Also Published As
Publication number | Publication date |
---|---|
KR100899905B1 (ko) | 2009-05-28 |
US8088673B2 (en) | 2012-01-03 |
TW200729347A (en) | 2007-08-01 |
JP2007150129A (ja) | 2007-06-14 |
CN1976012A (zh) | 2007-06-06 |
US20070120255A1 (en) | 2007-05-31 |
KR20070057052A (ko) | 2007-06-04 |
JP4677331B2 (ja) | 2011-04-27 |
US20110086493A1 (en) | 2011-04-14 |
US7911058B2 (en) | 2011-03-22 |
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