CN100501948C - 半导体器件及其制造方法 - Google Patents

半导体器件及其制造方法 Download PDF

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Publication number
CN100501948C
CN100501948C CNB2006100752121A CN200610075212A CN100501948C CN 100501948 C CN100501948 C CN 100501948C CN B2006100752121 A CNB2006100752121 A CN B2006100752121A CN 200610075212 A CN200610075212 A CN 200610075212A CN 100501948 C CN100501948 C CN 100501948C
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CN
China
Prior art keywords
gate electrode
film
semiconductor device
insulating barrier
sidewall spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2006100752121A
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English (en)
Chinese (zh)
Other versions
CN1848392A (zh
Inventor
濑良田刚
榎本修治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Publication of CN1848392A publication Critical patent/CN1848392A/zh
Application granted granted Critical
Publication of CN100501948C publication Critical patent/CN100501948C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/50—Alloying conductive materials with semiconductor bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/013—Manufacturing their source or drain regions, e.g. silicided source or drain regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0135—Manufacturing their gate conductors
    • H10D84/0137—Manufacturing their gate conductors the gate conductors being silicided
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0147—Manufacturing their gate sidewall spacers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P10/00—Bonding of wafers, substrates or parts of devices

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Electrodes Of Semiconductors (AREA)
CNB2006100752121A 2005-04-14 2006-04-14 半导体器件及其制造方法 Expired - Fee Related CN100501948C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005116618 2005-04-14
JP2005116618A JP2006295025A (ja) 2005-04-14 2005-04-14 半導体装置およびその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNA2008101766741A Division CN101425540A (zh) 2005-04-14 2006-04-14 半导体器件及其制造方法

Publications (2)

Publication Number Publication Date
CN1848392A CN1848392A (zh) 2006-10-18
CN100501948C true CN100501948C (zh) 2009-06-17

Family

ID=37077886

Family Applications (2)

Application Number Title Priority Date Filing Date
CNB2006100752121A Expired - Fee Related CN100501948C (zh) 2005-04-14 2006-04-14 半导体器件及其制造方法
CNA2008101766741A Pending CN101425540A (zh) 2005-04-14 2006-04-14 半导体器件及其制造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNA2008101766741A Pending CN101425540A (zh) 2005-04-14 2006-04-14 半导体器件及其制造方法

Country Status (5)

Country Link
US (1) US20060252196A1 (enExample)
JP (1) JP2006295025A (enExample)
KR (2) KR100748906B1 (enExample)
CN (2) CN100501948C (enExample)
TW (1) TW200707586A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100755671B1 (ko) * 2006-07-14 2007-09-05 삼성전자주식회사 균일한 두께의 니켈 합금 실리사이드층을 가진 반도체 소자및 그 제조 방법
JP5315779B2 (ja) * 2008-05-09 2013-10-16 富士通セミコンダクター株式会社 半導体装置の製造方法
KR101080200B1 (ko) * 2009-04-14 2011-11-07 주식회사 하이닉스반도체 반도체 메모리 장치 및 그 리프레쉬 제어 방법
KR102301249B1 (ko) * 2015-11-16 2021-09-10 삼성전자주식회사 반도체 장치
JP7034834B2 (ja) * 2018-05-30 2022-03-14 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
KR102675935B1 (ko) * 2019-12-16 2024-06-18 삼성전자주식회사 반도체 소자

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5731239A (en) * 1997-01-22 1998-03-24 Chartered Semiconductor Manufacturing Pte Ltd. Method of making self-aligned silicide narrow gate electrodes for field effect transistors having low sheet resistance
US6376320B1 (en) * 2000-11-15 2002-04-23 Advanced Micro Devices, Inc. Method for forming field effect transistor with silicides of different thickness and of different materials for the source/drain and the gate
CN1484285A (zh) * 2002-09-18 2004-03-24 上海宏力半导体制造有限公司 形成自行对准金属硅化物的方法
US6803318B1 (en) * 2000-09-14 2004-10-12 Cypress Semiconductor Corp. Method of forming self aligned contacts

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW232751B (en) * 1992-10-09 1994-10-21 Semiconductor Energy Res Co Ltd Semiconductor device and method for forming the same
JP3382743B2 (ja) * 1995-01-27 2003-03-04 株式会社リコー 半導体装置の製造方法
US6060387A (en) * 1995-11-20 2000-05-09 Compaq Computer Corporation Transistor fabrication process in which a contact metallization is formed with different silicide thickness over gate interconnect material and transistor source/drain regions
JPH11233770A (ja) * 1997-09-02 1999-08-27 Sony Corp 半導体装置の製造方法
US6306712B1 (en) * 1997-12-05 2001-10-23 Texas Instruments Incorporated Sidewall process and method of implantation for improved CMOS with benefit of low CGD, improved doping profiles, and insensitivity to chemical processing
JP3168992B2 (ja) * 1998-09-08 2001-05-21 日本電気株式会社 半導体装置の製造方法
US20010053572A1 (en) * 2000-02-23 2001-12-20 Yoshinari Ichihashi Semiconductor device having opening and method of fabricating the same
KR100396469B1 (ko) * 2001-06-29 2003-09-02 삼성전자주식회사 반도체 장치의 게이트 전극 형성 방법 및 이를 이용한불휘발성 메모리 장치의 제조방법
JP3657915B2 (ja) * 2002-01-31 2005-06-08 株式会社東芝 半導体装置および半導体装置の製造方法
US6657244B1 (en) * 2002-06-28 2003-12-02 International Business Machines Corporation Structure and method to reduce silicon substrate consumption and improve gate sheet resistance during silicide formation
JP4057985B2 (ja) * 2003-09-19 2008-03-05 株式会社東芝 半導体装置の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5731239A (en) * 1997-01-22 1998-03-24 Chartered Semiconductor Manufacturing Pte Ltd. Method of making self-aligned silicide narrow gate electrodes for field effect transistors having low sheet resistance
US6803318B1 (en) * 2000-09-14 2004-10-12 Cypress Semiconductor Corp. Method of forming self aligned contacts
US6376320B1 (en) * 2000-11-15 2002-04-23 Advanced Micro Devices, Inc. Method for forming field effect transistor with silicides of different thickness and of different materials for the source/drain and the gate
CN1484285A (zh) * 2002-09-18 2004-03-24 上海宏力半导体制造有限公司 形成自行对准金属硅化物的方法

Also Published As

Publication number Publication date
US20060252196A1 (en) 2006-11-09
KR100748906B1 (ko) 2007-08-13
JP2006295025A (ja) 2006-10-26
KR20060108537A (ko) 2006-10-18
KR100754262B1 (ko) 2007-09-03
CN1848392A (zh) 2006-10-18
TW200707586A (en) 2007-02-16
CN101425540A (zh) 2009-05-06
TWI308779B (enExample) 2009-04-11
KR20070062957A (ko) 2007-06-18

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