CN100378989C - 具有对角方向线路的半导体集成电路器件及其布置方法 - Google Patents
具有对角方向线路的半导体集成电路器件及其布置方法 Download PDFInfo
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- CN100378989C CN100378989C CNB2004100348868A CN200410034886A CN100378989C CN 100378989 C CN100378989 C CN 100378989C CN B2004100348868 A CNB2004100348868 A CN B2004100348868A CN 200410034886 A CN200410034886 A CN 200410034886A CN 100378989 C CN100378989 C CN 100378989C
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 13
- 238000010276 construction Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 241001391852 Trichostigma octandrum Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
- G06F30/394—Routing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Geometry (AREA)
- Theoretical Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Networks & Wireless Communication (AREA)
- Evolutionary Computation (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003181108A JP4245418B2 (ja) | 2003-06-25 | 2003-06-25 | 斜め方向配線を有する半導体集積回路装置及びそのレイアウト方法 |
JP181108/2003 | 2003-06-25 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007101291837A Division CN100546024C (zh) | 2003-06-25 | 2004-04-15 | 具有对角方向线路的半导体集成电路器件及其布置方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1577834A CN1577834A (zh) | 2005-02-09 |
CN100378989C true CN100378989C (zh) | 2008-04-02 |
Family
ID=33535193
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004100348868A Expired - Fee Related CN100378989C (zh) | 2003-06-25 | 2004-04-15 | 具有对角方向线路的半导体集成电路器件及其布置方法 |
CNB2007101291837A Expired - Fee Related CN100546024C (zh) | 2003-06-25 | 2004-04-15 | 具有对角方向线路的半导体集成电路器件及其布置方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007101291837A Expired - Fee Related CN100546024C (zh) | 2003-06-25 | 2004-04-15 | 具有对角方向线路的半导体集成电路器件及其布置方法 |
Country Status (4)
Country | Link |
---|---|
US (4) | US7023094B2 (zh) |
JP (1) | JP4245418B2 (zh) |
CN (2) | CN100378989C (zh) |
TW (1) | TWI238494B (zh) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4245418B2 (ja) * | 2003-06-25 | 2009-03-25 | 富士通マイクロエレクトロニクス株式会社 | 斜め方向配線を有する半導体集積回路装置及びそのレイアウト方法 |
US7332817B2 (en) * | 2004-07-20 | 2008-02-19 | Intel Corporation | Die and die-package interface metallization and bump design and arrangement |
JP4801333B2 (ja) * | 2004-07-23 | 2011-10-26 | パナソニック株式会社 | 電源配線構造および該電源配線構造を備えた半導体集積回路 |
JP4316469B2 (ja) * | 2004-10-15 | 2009-08-19 | 株式会社東芝 | 自動設計装置 |
JP4936659B2 (ja) * | 2004-12-27 | 2012-05-23 | 株式会社東芝 | 半導体装置の製造方法 |
JP4488926B2 (ja) * | 2005-02-21 | 2010-06-23 | 株式会社東芝 | マスクパターンデータ形成方法、フォトマスク、及び半導体デバイスの製造方法 |
JP2007081220A (ja) * | 2005-09-15 | 2007-03-29 | Matsushita Electric Ind Co Ltd | 半導体集積回路およびそのレイアウト設計方法 |
US8125610B2 (en) * | 2005-12-02 | 2012-02-28 | ASML Metherlands B.V. | Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus |
US7446352B2 (en) | 2006-03-09 | 2008-11-04 | Tela Innovations, Inc. | Dynamic array architecture |
US8541879B2 (en) | 2007-12-13 | 2013-09-24 | Tela Innovations, Inc. | Super-self-aligned contacts and method for making the same |
US9230910B2 (en) | 2006-03-09 | 2016-01-05 | Tela Innovations, Inc. | Oversized contacts and vias in layout defined by linearly constrained topology |
US9009641B2 (en) | 2006-03-09 | 2015-04-14 | Tela Innovations, Inc. | Circuits with linear finfet structures |
US9035359B2 (en) | 2006-03-09 | 2015-05-19 | Tela Innovations, Inc. | Semiconductor chip including region including linear-shaped conductive structures forming gate electrodes and having electrical connection areas arranged relative to inner region between transistors of different types and associated methods |
US8658542B2 (en) | 2006-03-09 | 2014-02-25 | Tela Innovations, Inc. | Coarse grid design methods and structures |
US8448102B2 (en) | 2006-03-09 | 2013-05-21 | Tela Innovations, Inc. | Optimizing layout of irregular structures in regular layout context |
US8839175B2 (en) | 2006-03-09 | 2014-09-16 | Tela Innovations, Inc. | Scalable meta-data objects |
US7763534B2 (en) | 2007-10-26 | 2010-07-27 | Tela Innovations, Inc. | Methods, structures and designs for self-aligning local interconnects used in integrated circuits |
US8653857B2 (en) | 2006-03-09 | 2014-02-18 | Tela Innovations, Inc. | Circuitry and layouts for XOR and XNOR logic |
US7917879B2 (en) | 2007-08-02 | 2011-03-29 | Tela Innovations, Inc. | Semiconductor device with dynamic array section |
US9563733B2 (en) | 2009-05-06 | 2017-02-07 | Tela Innovations, Inc. | Cell circuit and layout with linear finfet structures |
US7956421B2 (en) | 2008-03-13 | 2011-06-07 | Tela Innovations, Inc. | Cross-coupled transistor layouts in restricted gate level layout architecture |
US7721235B1 (en) * | 2006-06-28 | 2010-05-18 | Cadence Design Systems, Inc. | Method and system for implementing edge optimization on an integrated circuit design |
US8667443B2 (en) | 2007-03-05 | 2014-03-04 | Tela Innovations, Inc. | Integrated circuit cell library for multiple patterning |
KR101395060B1 (ko) | 2007-09-18 | 2014-05-15 | 삼성전자주식회사 | 라인 패턴들을 포함하는 반도체 소자 |
JP2009169366A (ja) | 2008-01-21 | 2009-07-30 | Nec Electronics Corp | レチクル、配線およびビアのレイアウト方法、および半導体装置の製造方法 |
US8453094B2 (en) | 2008-01-31 | 2013-05-28 | Tela Innovations, Inc. | Enforcement of semiconductor structure regularity for localized transistors and interconnect |
US7939443B2 (en) | 2008-03-27 | 2011-05-10 | Tela Innovations, Inc. | Methods for multi-wire routing and apparatus implementing same |
SG10201608214SA (en) | 2008-07-16 | 2016-11-29 | Tela Innovations Inc | Methods for cell phasing and placement in dynamic array architecture and implementation of the same |
US9122832B2 (en) | 2008-08-01 | 2015-09-01 | Tela Innovations, Inc. | Methods for controlling microloading variation in semiconductor wafer layout and fabrication |
JP2011014576A (ja) * | 2009-06-30 | 2011-01-20 | Renesas Electronics Corp | 半導体チップ、半導体ウエハ、及び半導体チップの製造方法 |
US8661392B2 (en) | 2009-10-13 | 2014-02-25 | Tela Innovations, Inc. | Methods for cell boundary encroachment and layouts implementing the Same |
US9159627B2 (en) | 2010-11-12 | 2015-10-13 | Tela Innovations, Inc. | Methods for linewidth modification and apparatus implementing the same |
FR2978613A1 (fr) * | 2011-07-26 | 2013-02-01 | Commissariat Energie Atomique | Procede de realisation d'un reseau de vias et circuit integre comprenant un tel reseau de vias |
JP5779145B2 (ja) * | 2012-06-28 | 2015-09-16 | 株式会社Screenホールディングス | 配線データの生成装置、生成方法、そのプログラム、および描画装置 |
JP6321512B2 (ja) * | 2014-09-29 | 2018-05-09 | 株式会社Screenホールディングス | 配線データの生成装置、生成方法、および描画システム |
US10743409B1 (en) * | 2019-06-24 | 2020-08-11 | Innolux Corporation | Wiring structure and electronic device |
US11901286B2 (en) * | 2021-01-28 | 2024-02-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diagonal via pattern and method |
CN113419485B (zh) * | 2021-06-25 | 2022-07-15 | 吉安砺芯半导体有限责任公司 | 定位打孔方法、设备、存储介质及装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6262487B1 (en) * | 1998-06-23 | 2001-07-17 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit device, semiconductor integrated circuit wiring method, and cell arranging method |
CN1308369A (zh) * | 1999-11-17 | 2001-08-15 | 株式会社东芝 | 设计方法、掩模组、集成电路及其制造方法和存储介质 |
WO2002046975A2 (en) * | 2000-12-07 | 2002-06-13 | Simplex Solutions, Inc. | Routing method and apparatus |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62120042A (ja) | 1985-11-20 | 1987-06-01 | Fujitsu Ltd | 自動配線方式 |
JP3964575B2 (ja) | 1998-06-23 | 2007-08-22 | 株式会社東芝 | 半導体集積回路装置、半導体集積回路配線方法およびセル配置方法 |
JP2002312414A (ja) | 2001-04-13 | 2002-10-25 | Toshiba Corp | 半導体集積回路装置のレイアウト設計システム、配線設計方法、配線設計プログラム及び半導体集積回路装置の製造方法 |
US7155697B2 (en) * | 2001-08-23 | 2006-12-26 | Cadence Design Systems, Inc. | Routing method and apparatus |
JP4245418B2 (ja) * | 2003-06-25 | 2009-03-25 | 富士通マイクロエレクトロニクス株式会社 | 斜め方向配線を有する半導体集積回路装置及びそのレイアウト方法 |
-
2003
- 2003-06-25 JP JP2003181108A patent/JP4245418B2/ja not_active Expired - Fee Related
-
2004
- 2004-02-18 TW TW093103958A patent/TWI238494B/zh not_active IP Right Cessation
- 2004-03-16 US US10/800,659 patent/US7023094B2/en not_active Expired - Lifetime
- 2004-04-15 CN CNB2004100348868A patent/CN100378989C/zh not_active Expired - Fee Related
- 2004-04-15 CN CNB2007101291837A patent/CN100546024C/zh not_active Expired - Fee Related
-
2006
- 2006-01-25 US US11/338,775 patent/US7226855B2/en not_active Expired - Fee Related
- 2006-01-25 US US11/338,822 patent/US7183659B2/en not_active Expired - Lifetime
-
2007
- 2007-01-16 US US11/653,261 patent/US7393775B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6262487B1 (en) * | 1998-06-23 | 2001-07-17 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit device, semiconductor integrated circuit wiring method, and cell arranging method |
CN1308369A (zh) * | 1999-11-17 | 2001-08-15 | 株式会社东芝 | 设计方法、掩模组、集成电路及其制造方法和存储介质 |
WO2002046975A2 (en) * | 2000-12-07 | 2002-06-13 | Simplex Solutions, Inc. | Routing method and apparatus |
Also Published As
Publication number | Publication date |
---|---|
US7393775B2 (en) | 2008-07-01 |
TWI238494B (en) | 2005-08-21 |
TW200501322A (en) | 2005-01-01 |
JP4245418B2 (ja) | 2009-03-25 |
CN101097902A (zh) | 2008-01-02 |
US20060118967A1 (en) | 2006-06-08 |
CN1577834A (zh) | 2005-02-09 |
US20070117231A1 (en) | 2007-05-24 |
US7226855B2 (en) | 2007-06-05 |
US20060118966A1 (en) | 2006-06-08 |
US20040262640A1 (en) | 2004-12-30 |
JP2005019604A (ja) | 2005-01-20 |
US7183659B2 (en) | 2007-02-27 |
US7023094B2 (en) | 2006-04-04 |
CN100546024C (zh) | 2009-09-30 |
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