CA2846434C - Stripping process for hard carbon coatings - Google Patents

Stripping process for hard carbon coatings Download PDF

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Publication number
CA2846434C
CA2846434C CA2846434A CA2846434A CA2846434C CA 2846434 C CA2846434 C CA 2846434C CA 2846434 A CA2846434 A CA 2846434A CA 2846434 A CA2846434 A CA 2846434A CA 2846434 C CA2846434 C CA 2846434C
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CA
Canada
Prior art keywords
substrate
coating
oxygen
carbon
process according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2846434A
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English (en)
French (fr)
Other versions
CA2846434A1 (en
Inventor
Jurgen Ramm
Beno Widrig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Surface Solutions AG Pfaeffikon
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Publication of CA2846434A1 publication Critical patent/CA2846434A1/en
Application granted granted Critical
Publication of CA2846434C publication Critical patent/CA2846434C/en
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • ing And Chemical Polishing (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Analytical Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
CA2846434A 2011-06-07 2012-05-31 Stripping process for hard carbon coatings Active CA2846434C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011105645A DE102011105645A1 (de) 2011-06-07 2011-06-07 Entschichtungsverfahren für harte Kohlenstoffschichten
DE102011105645.2 2011-06-07
PCT/EP2012/002305 WO2012167886A1 (de) 2011-06-07 2012-05-31 Entschichtungsverfahren für harte kohlenstoffschichten

Publications (2)

Publication Number Publication Date
CA2846434A1 CA2846434A1 (en) 2013-12-13
CA2846434C true CA2846434C (en) 2019-01-15

Family

ID=47220581

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2846434A Active CA2846434C (en) 2011-06-07 2012-05-31 Stripping process for hard carbon coatings

Country Status (11)

Country Link
EP (1) EP2718481B1 (enExample)
JP (1) JP5933701B2 (enExample)
KR (2) KR20140019018A (enExample)
CN (1) CN103717788B (enExample)
BR (1) BR112013031584B1 (enExample)
CA (1) CA2846434C (enExample)
DE (1) DE102011105645A1 (enExample)
PH (1) PH12014500059A1 (enExample)
RU (1) RU2606899C2 (enExample)
SG (1) SG2014001168A (enExample)
WO (1) WO2012167886A1 (enExample)

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CN107923030A (zh) * 2015-08-18 2018-04-17 塔塔钢铁荷兰科技有限责任公司 用于清洁和涂覆金属带材的方法和设备
RU2632702C1 (ru) * 2016-10-28 2017-10-09 Арчил Важаевич Цискарашвили Антиадгезивное антибактериальное покрытие для ортопедических имплантатов из титана и нержавеющей стали
US10347463B2 (en) * 2016-12-09 2019-07-09 Fei Company Enhanced charged particle beam processes for carbon removal
CN108987255A (zh) * 2018-06-19 2018-12-11 广东先导先进材料股份有限公司 类金刚石膜表面处理工艺
CN108754520A (zh) * 2018-06-29 2018-11-06 四川大学 硬质合金表面涂层去除方法和设备
US12163213B2 (en) * 2019-07-31 2024-12-10 Oerlikon Surface Solutions Ag, Pfäffikon Graded hydrogen-free carbon-based hard material layer coated onto a substrate
JP7422540B2 (ja) * 2019-12-26 2024-01-26 東京エレクトロン株式会社 成膜方法および成膜装置
CN111871973A (zh) * 2020-07-30 2020-11-03 成都光明光电股份有限公司 Dlc膜的脱膜方法及脱膜机
CN114645281B (zh) * 2022-04-06 2023-11-24 岭南师范学院 一种褪除金属工件表面碳膜的方法
CN115954269B (zh) * 2022-12-20 2024-08-16 西安理工大学 实现离子轰击和电子轰击辅助转换的氧等离子体刻蚀方法

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Also Published As

Publication number Publication date
CN103717788A (zh) 2014-04-09
KR101784638B1 (ko) 2017-10-11
BR112013031584A8 (pt) 2018-02-06
EP2718481B1 (de) 2017-04-05
WO2012167886A8 (de) 2014-01-23
RU2013158315A (ru) 2015-07-20
JP2014525982A (ja) 2014-10-02
RU2606899C2 (ru) 2017-01-10
KR20160017662A (ko) 2016-02-16
PH12014500059A1 (en) 2014-03-24
DE102011105645A1 (de) 2012-12-13
EP2718481A1 (de) 2014-04-16
CA2846434A1 (en) 2013-12-13
SG2014001168A (en) 2014-05-29
WO2012167886A1 (de) 2012-12-13
CN103717788B (zh) 2016-06-29
BR112013031584B1 (pt) 2020-11-03
BR112013031584A2 (pt) 2016-12-13
JP5933701B2 (ja) 2016-06-15
KR20140019018A (ko) 2014-02-13

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