SG2014001168A - Method for removing hard carbon layers - Google Patents

Method for removing hard carbon layers

Info

Publication number
SG2014001168A
SG2014001168A SG2014001168A SG2014001168A SG2014001168A SG 2014001168 A SG2014001168 A SG 2014001168A SG 2014001168 A SG2014001168 A SG 2014001168A SG 2014001168 A SG2014001168 A SG 2014001168A SG 2014001168 A SG2014001168 A SG 2014001168A
Authority
SG
Singapore
Prior art keywords
hard carbon
carbon layers
removing hard
layers
hard
Prior art date
Application number
SG2014001168A
Other languages
English (en)
Inventor
Jürgen Ramm
Beno Widrig
Original Assignee
Oerlikon Trading Ag Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading Ag Trübbach filed Critical Oerlikon Trading Ag Trübbach
Publication of SG2014001168A publication Critical patent/SG2014001168A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Vapour Deposition (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physical Vapour Deposition (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • ing And Chemical Polishing (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Analytical Chemistry (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
SG2014001168A 2011-06-07 2012-05-31 Method for removing hard carbon layers SG2014001168A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102011105645A DE102011105645A1 (de) 2011-06-07 2011-06-07 Entschichtungsverfahren für harte Kohlenstoffschichten
PCT/EP2012/002305 WO2012167886A1 (de) 2011-06-07 2012-05-31 Entschichtungsverfahren für harte kohlenstoffschichten

Publications (1)

Publication Number Publication Date
SG2014001168A true SG2014001168A (en) 2014-05-29

Family

ID=47220581

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2014001168A SG2014001168A (en) 2011-06-07 2012-05-31 Method for removing hard carbon layers

Country Status (11)

Country Link
EP (1) EP2718481B1 (enExample)
JP (1) JP5933701B2 (enExample)
KR (2) KR20140019018A (enExample)
CN (1) CN103717788B (enExample)
BR (1) BR112013031584B1 (enExample)
CA (1) CA2846434C (enExample)
DE (1) DE102011105645A1 (enExample)
PH (1) PH12014500059A1 (enExample)
RU (1) RU2606899C2 (enExample)
SG (1) SG2014001168A (enExample)
WO (1) WO2012167886A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6381984B2 (ja) * 2014-06-13 2018-08-29 学校法人 芝浦工業大学 脱膜方法及び脱膜装置
KR101864877B1 (ko) * 2015-04-08 2018-06-07 신메이와 고교 가부시키가이샤 이온 조사에 의한 피복재의 탈막 방법 및 탈막 장치
CN107923030A (zh) * 2015-08-18 2018-04-17 塔塔钢铁荷兰科技有限责任公司 用于清洁和涂覆金属带材的方法和设备
RU2632702C1 (ru) * 2016-10-28 2017-10-09 Арчил Важаевич Цискарашвили Антиадгезивное антибактериальное покрытие для ортопедических имплантатов из титана и нержавеющей стали
US10347463B2 (en) * 2016-12-09 2019-07-09 Fei Company Enhanced charged particle beam processes for carbon removal
CN108987255A (zh) * 2018-06-19 2018-12-11 广东先导先进材料股份有限公司 类金刚石膜表面处理工艺
CN108754520A (zh) * 2018-06-29 2018-11-06 四川大学 硬质合金表面涂层去除方法和设备
US12163213B2 (en) * 2019-07-31 2024-12-10 Oerlikon Surface Solutions Ag, Pfäffikon Graded hydrogen-free carbon-based hard material layer coated onto a substrate
JP7422540B2 (ja) * 2019-12-26 2024-01-26 東京エレクトロン株式会社 成膜方法および成膜装置
CN111871973A (zh) * 2020-07-30 2020-11-03 成都光明光电股份有限公司 Dlc膜的脱膜方法及脱膜机
CN114645281B (zh) * 2022-04-06 2023-11-24 岭南师范学院 一种褪除金属工件表面碳膜的方法
CN115954269B (zh) * 2022-12-20 2024-08-16 西安理工大学 实现离子轰击和电子轰击辅助转换的氧等离子体刻蚀方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU375326A1 (ru) * 1971-02-01 1973-03-23 ПОТОЧНАЯ ЛИНИЯ ДЛЯ очистки ДЕТАЛЕЙ
SU1227280A1 (ru) * 1984-06-26 1986-04-30 Магнитогорский горно-металлургический институт им.Г.И.Носова Способ очистки поверхности металлических изделий
JPS63211630A (ja) * 1988-01-29 1988-09-02 Hitachi Ltd プラズマ処理装置
JP3513811B2 (ja) * 1988-08-11 2004-03-31 株式会社半導体エネルギー研究所 炭素または炭素を主成分とする被膜の形成方法
JP2763172B2 (ja) * 1990-03-19 1998-06-11 株式会社神戸製鋼所 ダイヤモンド薄膜のエッチング方法
DE59202116D1 (de) 1991-04-23 1995-06-14 Balzers Hochvakuum Verfahren zur Abtragung von Material von einer Oberfläche in einer Vakuumkammer.
JPH0598412A (ja) * 1991-10-07 1993-04-20 Nippon Steel Corp 被溶射材料の前処理方法
JPH05339758A (ja) * 1992-06-08 1993-12-21 Nachi Fujikoshi Corp ダイヤモンド被覆工具の再研磨・再被覆方法
US5401543A (en) 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
DE4401986A1 (de) 1994-01-25 1995-07-27 Dresden Vakuumtech Gmbh Verfahren zum Betreiben eines Vakuumlichtbogenverdampfers und Stromversorgungseinrichtung dafür
US5993680A (en) * 1996-08-15 1999-11-30 Citizen Watch Co., Ltd. Method of removing hard carbon film formed on inner circumferential surface of guide bush
DE19831914A1 (de) 1998-07-16 2000-01-20 Laser & Med Tech Gmbh Verfahren und Vorrichtung zur Säuberung und Entschichtung transparenter Werkstücke
US6605175B1 (en) * 1999-02-19 2003-08-12 Unaxis Balzers Aktiengesellschaft Process for manufacturing component parts, use of same, with air bearing supported workpieces and vacuum processing chamber
CN1138020C (zh) 1999-09-29 2004-02-11 永源科技股份有限公司 阴极电弧蒸镀方式淀积类金刚石碳膜的制备方法
JP3439423B2 (ja) * 2000-04-11 2003-08-25 オーエスジー株式会社 ダイヤモンド被膜除去方法およびダイヤモンド被覆部材の製造方法
JP3997084B2 (ja) 2001-12-27 2007-10-24 株式会社不二越 硬質炭素被覆膜の脱膜方法及び再生方法並びに再生基材
US6902774B2 (en) 2002-07-25 2005-06-07 Inficon Gmbh Method of manufacturing a device
US7381311B2 (en) 2003-10-21 2008-06-03 The United States Of America As Represented By The Secretary Of The Air Force Filtered cathodic-arc plasma source
JP4680066B2 (ja) * 2004-01-28 2011-05-11 東京エレクトロン株式会社 基板処理装置の処理室清浄化方法、基板処理装置、および基板処理方法
ATE453739T1 (de) 2004-01-29 2010-01-15 Oerlikon Trading Ag Entschichtungsverfahren
DE112005002085A5 (de) * 2004-09-23 2007-08-16 Cemecon Ag Zerspanungswerkzeug und Verfahren zu seiner Herstellung
JP2007134425A (ja) * 2005-11-09 2007-05-31 Sony Corp 半導体装置および半導体装置の製造方法
DE102006032568A1 (de) * 2006-07-12 2008-01-17 Stein, Ralf Verfahren zur plasmagestützten chemischen Gasphasenabscheidung an der Innenwand eines Hohlkörpers
US7914692B2 (en) * 2006-08-29 2011-03-29 Ngk Insulators, Ltd. Methods of generating plasma, of etching an organic material film, of generating minus ions, of oxidation and nitriding
CN101308764B (zh) 2007-05-15 2011-03-23 中芯国际集成电路制造(上海)有限公司 消除蚀刻工序残留聚合物的方法
WO2008149824A1 (ja) * 2007-06-01 2008-12-11 Onward Ceramic Coating Co., Ltd. Ｄｌｃ被覆工具
MX347701B (es) 2008-05-02 2017-05-09 Oerlikon Surface Solutions Ag Pfäffikon Procedimiento para decapar piezas de trabajo y solucion de decapado.
DE102008053254A1 (de) * 2008-10-25 2010-04-29 Ab Solut Chemie Gmbh Verfahren zum substratschonenden Entfernen von Hartstoffschichten

Also Published As

Publication number Publication date
CN103717788A (zh) 2014-04-09
KR101784638B1 (ko) 2017-10-11
BR112013031584A8 (pt) 2018-02-06
EP2718481B1 (de) 2017-04-05
WO2012167886A8 (de) 2014-01-23
RU2013158315A (ru) 2015-07-20
JP2014525982A (ja) 2014-10-02
RU2606899C2 (ru) 2017-01-10
KR20160017662A (ko) 2016-02-16
PH12014500059A1 (en) 2014-03-24
DE102011105645A1 (de) 2012-12-13
CA2846434C (en) 2019-01-15
EP2718481A1 (de) 2014-04-16
CA2846434A1 (en) 2013-12-13
WO2012167886A1 (de) 2012-12-13
CN103717788B (zh) 2016-06-29
BR112013031584B1 (pt) 2020-11-03
BR112013031584A2 (pt) 2016-12-13
JP5933701B2 (ja) 2016-06-15
KR20140019018A (ko) 2014-02-13

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