CA2407800C - Polishing composition - Google Patents

Polishing composition Download PDF

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Publication number
CA2407800C
CA2407800C CA 2407800 CA2407800A CA2407800C CA 2407800 C CA2407800 C CA 2407800C CA 2407800 CA2407800 CA 2407800 CA 2407800 A CA2407800 A CA 2407800A CA 2407800 C CA2407800 C CA 2407800C
Authority
CA
Canada
Prior art keywords
colloidal silica
particle
particle size
group
weight
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA 2407800
Other languages
English (en)
French (fr)
Other versions
CA2407800A1 (en
Inventor
Isao Ota
Tohru Nishimura
Gen Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Chemical Corp
Original Assignee
Nissan Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Corp filed Critical Nissan Chemical Corp
Priority to CA002607856A priority Critical patent/CA2607856C/en
Publication of CA2407800A1 publication Critical patent/CA2407800A1/en
Application granted granted Critical
Publication of CA2407800C publication Critical patent/CA2407800C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
    • B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CA 2407800 2000-05-12 2001-05-07 Polishing composition Expired - Fee Related CA2407800C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA002607856A CA2607856C (en) 2000-05-12 2001-05-07 Polishing composition

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-139671 2000-05-12
JP2000139671 2000-05-12
PCT/JP2001/003818 WO2001085868A1 (en) 2000-05-12 2001-05-07 Polishing composition

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CA002607856A Division CA2607856C (en) 2000-05-12 2001-05-07 Polishing composition

Publications (2)

Publication Number Publication Date
CA2407800A1 CA2407800A1 (en) 2001-11-15
CA2407800C true CA2407800C (en) 2008-08-05

Family

ID=18647077

Family Applications (2)

Application Number Title Priority Date Filing Date
CA002607856A Expired - Fee Related CA2607856C (en) 2000-05-12 2001-05-07 Polishing composition
CA 2407800 Expired - Fee Related CA2407800C (en) 2000-05-12 2001-05-07 Polishing composition

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CA002607856A Expired - Fee Related CA2607856C (en) 2000-05-12 2001-05-07 Polishing composition

Country Status (9)

Country Link
US (1) US6719819B2 (ja)
EP (2) EP1287088B1 (ja)
JP (2) JP4450142B2 (ja)
KR (2) KR100803876B1 (ja)
CN (1) CN1200066C (ja)
CA (2) CA2607856C (ja)
MY (1) MY130609A (ja)
TW (1) TW538111B (ja)
WO (1) WO2001085868A1 (ja)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
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TWI307712B (en) * 2002-08-28 2009-03-21 Kao Corp Polishing composition
MY134679A (en) * 2002-12-26 2007-12-31 Kao Corp Polishing composition
US7553345B2 (en) 2002-12-26 2009-06-30 Kao Corporation Polishing composition
JP3997152B2 (ja) 2002-12-26 2007-10-24 花王株式会社 研磨液組成物
TWI254741B (en) * 2003-02-05 2006-05-11 Kao Corp Polishing composition
JP2004331852A (ja) * 2003-05-09 2004-11-25 Tama Kagaku Kogyo Kk 分散安定性に優れた研磨剤スラリー及び基板の製造方法
GB2402941B (en) * 2003-06-09 2007-06-27 Kao Corp Method for manufacturing substrate
KR20030061746A (ko) * 2003-06-23 2003-07-22 신세현 혈구 유변계
TWI415926B (zh) * 2003-07-11 2013-11-21 Grace W R & Co 化學機械研磨用磨粒
JP4608196B2 (ja) * 2003-09-30 2011-01-05 株式会社フジミインコーポレーテッド 研磨用組成物
KR100850877B1 (ko) 2004-06-18 2008-08-07 주식회사 동진쎄미켐 철 함유 콜로이달 실리카를 포함하는 화학 기계적 연마슬러리 조성물
JP5090633B2 (ja) * 2004-06-22 2012-12-05 旭硝子株式会社 ガラス基板の研磨方法
EP1758962B1 (en) * 2004-06-22 2013-10-30 Asahi Glass Company, Limited Polishing method for glass substrate, and glass substrate
KR101167869B1 (ko) * 2004-06-22 2012-07-23 아사히 가라스 가부시키가이샤 유리 기판의 연마 방법 및 유리 기판
JP4761901B2 (ja) * 2004-09-22 2011-08-31 Ｈｏｙａ株式会社 マスクブランクス用基板の製造方法、マスクブランクスの製造方法、露光用マスクの製造方法、反射型マスクの製造方法及び半導体装置の製造方法
US20060196849A1 (en) * 2005-03-04 2006-09-07 Kevin Moeggenborg Composition and method for polishing a sapphire surface
JP2007179612A (ja) * 2005-12-27 2007-07-12 Kao Corp 磁気ディスク基板用研磨液組成物
TWI411667B (zh) * 2006-04-28 2013-10-11 Kao Corp 磁碟基板用之研磨液組成物
GB2454343B (en) 2007-10-29 2012-07-11 Kao Corp Polishing composition for hard disk substrate
JP2009163810A (ja) * 2007-12-28 2009-07-23 Kao Corp ハードディスク基板の製造方法
JP5407555B2 (ja) * 2008-06-11 2014-02-05 信越化学工業株式会社 合成石英ガラス基板用研磨剤
WO2009150938A1 (ja) 2008-06-11 2009-12-17 信越化学工業株式会社 合成石英ガラス基板用研磨剤
JP5396047B2 (ja) * 2008-09-03 2014-01-22 三井金属鉱業株式会社 ガラス用研摩材スラリー
GB2477067B (en) * 2008-11-06 2012-10-17 Kao Corp Polishing liquid composition for magnetic disk substrate
JP2009187657A (ja) * 2009-04-02 2009-08-20 Kao Corp 基板の製造方法
JP4941501B2 (ja) * 2009-04-20 2012-05-30 旭硝子株式会社 ガラス基板用研磨液及びその製造方法、並びに前記研磨液を用いたガラス基板の研磨方法及び前記研磨方法により得られたガラス基板
CN101693813B (zh) * 2009-09-01 2013-04-10 湖南皓志新材料股份有限公司 一种硅基精抛液
JP5251861B2 (ja) * 2009-12-28 2013-07-31 信越化学工業株式会社 合成石英ガラス基板の製造方法
CN102115633A (zh) * 2009-12-30 2011-07-06 安集微电子（上海）有限公司 一种化学机械抛光液
JPWO2012005142A1 (ja) * 2010-07-09 2013-09-02 旭硝子株式会社 研磨剤および研磨方法
JP5168387B2 (ja) * 2011-06-08 2013-03-21 旭硝子株式会社 磁気記録媒体用ガラス基板の製造方法
CN102358825B (zh) * 2011-08-05 2013-08-21 清华大学 一种用于蓝宝石晶片的抛光组合物
JP6266504B2 (ja) * 2012-02-29 2018-01-24 Hoya株式会社 磁気ディスク用ガラス基板の製造方法及び磁気ディスクの製造方法
CN104736296B (zh) 2012-08-24 2018-08-28 艺康美国股份有限公司 抛光蓝宝石表面的方法
JP6151711B2 (ja) * 2012-10-31 2017-06-21 株式会社フジミインコーポレーテッド 研磨用組成物
EP2969391B1 (en) * 2013-03-15 2018-04-25 Ecolab USA Inc. Methods of polishing sapphire surfaces
JP6156207B2 (ja) * 2013-04-02 2017-07-05 信越化学工業株式会社 合成石英ガラス基板の製造方法
US9633831B2 (en) * 2013-08-26 2017-04-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing composition for polishing a sapphire surface and methods of using same
CN104745084B (zh) * 2013-12-25 2018-09-14 安集微电子（上海）有限公司 一种用于铝的化学机械抛光液及使用方法
JP6373069B2 (ja) * 2014-05-30 2018-08-15 山口精研工業株式会社 精密研磨剤組成物
JP6316680B2 (ja) * 2014-06-30 2018-04-25 花王株式会社 磁気ディスク基板用研磨液組成物
US9551075B2 (en) * 2014-08-04 2017-01-24 Sinmat, Inc. Chemical mechanical polishing of alumina
CN104559798B (zh) * 2014-12-24 2017-08-29 上海新安纳电子科技有限公司 一种氧化铝基化学机械抛光液
CN104893587A (zh) * 2015-03-09 2015-09-09 江苏中晶科技有限公司 高效c向蓝宝石抛光液及其制备方法
WO2016194614A1 (ja) * 2015-06-03 2016-12-08 株式会社フジミインコーポレーテッド 研磨用組成物、研磨方法、及び製造方法
CN104907895B (zh) * 2015-06-16 2017-09-29 哈尔滨秋冠光电科技有限公司 蓝宝石双抛片的快速加工方法
US10144850B2 (en) * 2015-09-25 2018-12-04 Versum Materials Us, Llc Stop-on silicon containing layer additive
JP6584945B2 (ja) * 2015-12-14 2019-10-02 花王株式会社 磁気ディスク基板用研磨液組成物
CN109153889B (zh) * 2016-05-19 2021-10-29 东进世美肯株式会社 用于化学机械抛光的浆料组合物
JP6706149B2 (ja) * 2016-06-08 2020-06-03 山口精研工業株式会社 研磨剤組成物
US10377014B2 (en) 2017-02-28 2019-08-13 Ecolab Usa Inc. Increased wetting of colloidal silica as a polishing slurry
US20210130176A1 (en) * 2017-10-11 2021-05-06 Applied Material Solutions, Inc. Multimodal Particles for Retention and Drainage for Paper-Making Machines
CN108081117A (zh) * 2017-11-29 2018-05-29 浙江工业大学 一种基于软质磨料固着磨具的钽酸锂抛光方法
CN109988509B (zh) * 2017-12-29 2021-07-09 浙江新创纳电子科技有限公司 一种钽酸锂还原片抛光液及其制备方法和用途
JP7384725B2 (ja) * 2020-03-25 2023-11-21 山口精研工業株式会社 研磨剤組成物
CN114536208B (zh) * 2022-01-13 2023-05-09 北京通美晶体技术股份有限公司 一种磷化铟研磨工艺与磷化铟

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US4588421A (en) * 1984-10-15 1986-05-13 Nalco Chemical Company Aqueous silica compositions for polishing silicon wafers
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JPH11167714A (ja) * 1997-12-03 1999-06-22 Showa Alum Corp 磁気ディスク基板の製造方法
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Also Published As

Publication number Publication date
CA2607856A1 (en) 2001-11-15
US20030110711A1 (en) 2003-06-19
WO2001085868A1 (en) 2001-11-15
US6719819B2 (en) 2004-04-13
EP2045307A1 (en) 2009-04-08
JP5177445B2 (ja) 2013-04-03
CN1434846A (zh) 2003-08-06
KR20030003280A (ko) 2003-01-09
MY130609A (en) 2007-07-31
JP2002030274A (ja) 2002-01-31
KR100826072B1 (ko) 2008-04-29
CN1200066C (zh) 2005-05-04
TW538111B (en) 2003-06-21
KR20070087204A (ko) 2007-08-27
KR100803876B1 (ko) 2008-02-14
CA2407800A1 (en) 2001-11-15
EP1287088A4 (en) 2008-04-16
CA2607856C (en) 2009-10-20
JP2010042509A (ja) 2010-02-25
EP1287088A1 (en) 2003-03-05
EP1287088B1 (en) 2011-10-05
JP4450142B2 (ja) 2010-04-14

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