BR0016095A - Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos - Google Patents

Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos

Info

Publication number
BR0016095A
BR0016095A BR0016095-4A BR0016095A BR0016095A BR 0016095 A BR0016095 A BR 0016095A BR 0016095 A BR0016095 A BR 0016095A BR 0016095 A BR0016095 A BR 0016095A
Authority
BR
Brazil
Prior art keywords
silicone
relief
vector
wave
nanostructure
Prior art date
Application number
BR0016095-4A
Other languages
English (en)
Inventor
Valery K Smirnov
Dmitri S Kibalov
Original Assignee
Sceptre Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sceptre Electronics Ltd filed Critical Sceptre Electronics Ltd
Publication of BR0016095A publication Critical patent/BR0016095A/pt

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26Bombardment with radiation
    • H01L21/263Bombardment with radiation with high-energy radiation
    • H01L21/2633Bombardment with radiation with high-energy radiation for etching, e.g. sputteretching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/12Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/122Single quantum well structures
    • H01L29/125Quantum wire structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007Multistep manufacturing processes
    • H01L29/66075Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409Unipolar field-effect transistors
    • H01L29/66439Unipolar field-effect transistors with a one- or zero-dimensional channel, e.g. quantum wire FET, in-plane gate transistor [IPG], single electron transistor [SET], striped channel transistor, Coulomb blockade transistor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
  • Thin Film Transistor (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

"MéTODOS PARA A MOLDAGEM DE UMA NANOESTRUTURA DE SILICONE, UM VETOR DE FIOS QUâNTICOS DE SILICONE E DISPOSITIVOS BASEADOS NOS MESMOS". Um processo para a moldagem controlável de nanoestruturas de silicone tais como um vetor de fios quanticos de silicone. Uma superfície de silicone é borrifada por um fluxo uniforme de íons moleculares de nitrogênio dentro de um vácuo extremo de maneira a formar um alívio periódico similar a uma onda no qual os recóncavos do referido alívio estão nivelados com a fronteira entre o silicone e o isolante do material SOI. A energia iónica, o ângulo de incidência iónica em relação à superfície do referido material, a temperatura da camada de silicone, a profundidade de moldagem do alívio similar a uma onda, a altura do referido alívio similar a uma onda e a faixa de penetração iónica dentro do silicone são todos determinados com base num comprimento de onda selecionado do alívio similar a uma onda dentro da faixa de 9 a 120 nm. Uma máscara de nitreto de silicone apresentando bordas pendentes é utilizada para definir a área da superfície de silicone sobre a qual o vetor é formado. As impurezas são removidas da superfície de silicone dentro da janela de máscara antes do espirramento. A fim de moldar um vetor de fios quânticos de silicone, a espessura da camada de silicone SOI é selecionada para ser maior do que a soma das referidas profundidade de moldagem, da referida altura e da referida faixa de penetração iónica, sendo a fabricação dos fios de silicone controlada por um valor limite de um sinal de emissão de íon secundário a partir do isolante SOI. A nano-estrutura pode ser empregada em dispositivos opto-electrónicos e nano-eletrónicos tais como um FET.
BR0016095-4A 1999-11-25 2000-10-02 Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos BR0016095A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU99124768/28A RU2173003C2 (ru) 1999-11-25 1999-11-25 Способ образования кремниевой наноструктуры, решетки кремниевых квантовых проводков и основанных на них устройств
PCT/IB2000/001397 WO2001039259A1 (en) 1999-11-25 2000-10-02 Methods of formation of a silicon nanostructure, a silicon quantum wire array and devices based thereon

Publications (1)

Publication Number Publication Date
BR0016095A true BR0016095A (pt) 2004-03-23

Family

ID=20227346

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0016095-4A BR0016095A (pt) 1999-11-25 2000-10-02 Métodos para a moldagem de uma nanoestrutura de silicone, um vetor de fios quânticos de silicone e dispositivos baseados nos mesmos

Country Status (23)

Country Link
US (1) US6274007B1 (pt)
EP (1) EP1104011A1 (pt)
JP (1) JP2001156050A (pt)
KR (1) KR20020069195A (pt)
CN (1) CN1399791A (pt)
AU (1) AU7547400A (pt)
BG (1) BG106739A (pt)
BR (1) BR0016095A (pt)
CA (1) CA2392307A1 (pt)
CZ (1) CZ20021824A3 (pt)
EE (1) EE200200261A (pt)
HR (1) HRP20020459A2 (pt)
HU (1) HUP0203517A2 (pt)
IL (1) IL149832A0 (pt)
IS (1) IS6393A (pt)
MX (1) MXPA02005281A (pt)
NO (1) NO20022427L (pt)
PL (1) PL355890A1 (pt)
RU (1) RU2173003C2 (pt)
SK (1) SK7442002A3 (pt)
WO (1) WO2001039259A1 (pt)
YU (1) YU38202A (pt)
ZA (1) ZA200204822B (pt)

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CN110137254B (zh) * 2019-04-30 2021-07-09 中国科学技术大学 半导体栅极电控量子点及其制备方法
CN114497275A (zh) * 2021-12-29 2022-05-13 昆明物理研究所 硅量子点光伏异质结制备方法

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