AU5913699A - Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors - Google Patents

Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors

Info

Publication number
AU5913699A
AU5913699A AU59136/99A AU5913699A AU5913699A AU 5913699 A AU5913699 A AU 5913699A AU 59136/99 A AU59136/99 A AU 59136/99A AU 5913699 A AU5913699 A AU 5913699A AU 5913699 A AU5913699 A AU 5913699A
Authority
AU
Australia
Prior art keywords
electrostatic
dechucking method
dielectric workpieces
processors
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU59136/99A
Other languages
English (en)
Inventor
John P. Holland
Arthur M. Howald
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU5913699A publication Critical patent/AU5913699A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/23—Chucks or sockets with magnetic or electrostatic means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
  • Jigs For Machine Tools (AREA)
  • Drying Of Semiconductors (AREA)
AU59136/99A 1998-09-30 1999-09-10 Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors Abandoned AU5913699A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/163,370 US6125025A (en) 1998-09-30 1998-09-30 Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors
US09163370 1998-09-30
PCT/US1999/020615 WO2000019519A1 (en) 1998-09-30 1999-09-10 Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors

Publications (1)

Publication Number Publication Date
AU5913699A true AU5913699A (en) 2000-04-17

Family

ID=22589749

Family Applications (1)

Application Number Title Priority Date Filing Date
AU59136/99A Abandoned AU5913699A (en) 1998-09-30 1999-09-10 Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors

Country Status (6)

Country Link
US (1) US6125025A (enExample)
JP (4) JP4698025B2 (enExample)
KR (1) KR100708237B1 (enExample)
AU (1) AU5913699A (enExample)
TW (1) TW426930B (enExample)
WO (1) WO2000019519A1 (enExample)

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Also Published As

Publication number Publication date
WO2000019519A1 (en) 2000-04-06
TW426930B (en) 2001-03-21
US6125025A (en) 2000-09-26
JP4698025B2 (ja) 2011-06-08
JP5135306B2 (ja) 2013-02-06
JP2010050464A (ja) 2010-03-04
JP2002526923A (ja) 2002-08-20
WO2000019519B1 (en) 2000-05-25
KR20010083878A (ko) 2001-09-03
JP2010062570A (ja) 2010-03-18
KR100708237B1 (ko) 2007-04-16
JP2010050463A (ja) 2010-03-04

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