ATE451720T1 - Silizium-photovervielfacher mit zellenmatrix - Google Patents
Silizium-photovervielfacher mit zellenmatrixInfo
- Publication number
- ATE451720T1 ATE451720T1 AT05749398T AT05749398T ATE451720T1 AT E451720 T1 ATE451720 T1 AT E451720T1 AT 05749398 T AT05749398 T AT 05749398T AT 05749398 T AT05749398 T AT 05749398T AT E451720 T1 ATE451720 T1 AT E451720T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- conductance type
- cms
- agent concentration
- doping agent
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 3
- 229910052710 silicon Inorganic materials 0.000 title abstract 3
- 239000010703 silicon Substances 0.000 title abstract 3
- 239000011159 matrix material Substances 0.000 title 1
- 239000002019 doping agent Substances 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- 229920005591 polysilicon Polymers 0.000 abstract 2
- 229910052814 silicon oxide Inorganic materials 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 238000003325 tomography Methods 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Light Receiving Elements (AREA)
- Nitrogen And Oxygen Or Sulfur-Condensed Heterocyclic Ring Systems (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
RU2004113616/28A RU2290721C2 (ru) | 2004-05-05 | 2004-05-05 | Кремниевый фотоэлектронный умножитель (варианты) и ячейка для кремниевого фотоэлектронного умножителя |
PCT/RU2005/000242 WO2005106971A1 (fr) | 2004-05-05 | 2005-05-05 | Multiplicateur photoelectronique au silicium (variantes) et cellule pour multiplicateur photoelectronique au silicium |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE451720T1 true ATE451720T1 (de) | 2009-12-15 |
Family
ID=35241944
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05749398T ATE451720T1 (de) | 2004-05-05 | 2005-05-05 | Silizium-photovervielfacher mit zellenmatrix |
Country Status (9)
Country | Link |
---|---|
US (1) | US7759623B2 (de) |
EP (2) | EP1755171B8 (de) |
JP (1) | JP2007536703A (de) |
KR (1) | KR101113364B1 (de) |
CN (1) | CN1998091B (de) |
AT (1) | ATE451720T1 (de) |
DE (1) | DE602005018200D1 (de) |
RU (1) | RU2290721C2 (de) |
WO (1) | WO2005106971A1 (de) |
Families Citing this family (43)
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---|---|---|---|---|
CN101379615B (zh) | 2006-02-01 | 2013-06-12 | 皇家飞利浦电子股份有限公司 | 盖革式雪崩光电二极管 |
US20080012087A1 (en) * | 2006-04-19 | 2008-01-17 | Henri Dautet | Bonded wafer avalanche photodiode and method for manufacturing same |
TWI443817B (zh) | 2006-07-03 | 2014-07-01 | Hamamatsu Photonics Kk | Photodiode array |
US7652257B2 (en) * | 2007-06-15 | 2010-01-26 | General Electric Company | Structure of a solid state photomultiplier |
DE102007037020B3 (de) | 2007-08-06 | 2008-08-21 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Avalanche-Photodiode |
EP2176686B1 (de) * | 2007-08-08 | 2014-05-21 | Koninklijke Philips N.V. | Auslösernetzwerk für einen silicium-bildvervielfacher |
ITTO20080046A1 (it) | 2008-01-18 | 2009-07-19 | St Microelectronics Srl | Schiera di fotodiodi operanti in modalita' geiger reciprocamente isolati e relativo procedimento di fabbricazione |
ITTO20080045A1 (it) | 2008-01-18 | 2009-07-19 | St Microelectronics Srl | Schiera di fotodiodi operanti in modalita' geiger reciprocamente isolati e relativo procedimento di fabbricazione |
KR100987057B1 (ko) * | 2008-06-12 | 2010-10-11 | 한국과학기술원 | 광검출 효율이 향상된 실리콘 광전자 증배관 및 이를포함하는 감마선 검출기 |
DE102009017505B4 (de) | 2008-11-21 | 2014-07-10 | Ketek Gmbh | Strahlungsdetektor, Verwendung eines Strahlungsdetektors und Verfahren zur Herstellung eines Strahlungsdetektors |
IT1392366B1 (it) * | 2008-12-17 | 2012-02-28 | St Microelectronics Rousset | Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile, schiera di fotodiodi e relativo procedimento di fabbricazione |
WO2010080048A1 (en) * | 2009-01-11 | 2010-07-15 | Popova Elena Viktorovna | Semiconductor geiger mode microcell photodiode (variants) |
IT1393781B1 (it) | 2009-04-23 | 2012-05-08 | St Microelectronics Rousset | Fotodiodo operante in modalita' geiger con resistore di soppressione integrato e controllabile ad effetto jfet, schiera di fotodiodi e relativo procedimento di fabbricazione |
KR101148335B1 (ko) * | 2009-07-23 | 2012-05-21 | 삼성전기주식회사 | 실리콘 반도체를 이용한 광전자 증배관 및 그 구조 셀 |
WO2011015206A1 (en) * | 2009-08-03 | 2011-02-10 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Highly efficient cmos technology compatible silicon photoelectric multiplier |
KR101084940B1 (ko) * | 2009-09-28 | 2011-11-17 | 삼성전기주식회사 | 실리콘 광전자 증배관 |
KR20110068070A (ko) | 2009-12-15 | 2011-06-22 | 삼성전기주식회사 | 실리콘 광전자 증배 소자를 이용한 저조도용 촬영 장치 |
WO2011122856A2 (ko) * | 2010-03-30 | 2011-10-06 | 이화여자대학교 산학협력단 | 실리콘 광증배 소자 |
IT1399690B1 (it) | 2010-03-30 | 2013-04-26 | St Microelectronics Srl | Fotodiodo a valanga operante in modalita' geiger ad elevato rapporto segnale rumore e relativo procedimento di fabbricazione |
WO2011132015A1 (en) | 2010-04-23 | 2011-10-27 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Silicon photoelectric multiplier |
WO2012019640A1 (en) | 2010-08-10 | 2012-02-16 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Silicon photoelectric multiplier with multiple "isochronic" read-out |
CN102024863B (zh) * | 2010-10-11 | 2013-03-27 | 湘潭大学 | 高速增强型紫外硅选择性雪崩光电二极管及其制作方法 |
KR101711087B1 (ko) | 2010-12-07 | 2017-02-28 | 한국전자통신연구원 | 실리콘 포토멀티플라이어 및 그 제조 방법 |
KR101749240B1 (ko) | 2010-12-17 | 2017-06-21 | 한국전자통신연구원 | 반도체 포토멀티플라이어의 상부 광학 구조 및 그 제작 방법 |
KR101648023B1 (ko) * | 2010-12-21 | 2016-08-12 | 한국전자통신연구원 | 트렌치 분리형 실리콘 포토멀티플라이어 |
WO2012083983A1 (en) | 2010-12-21 | 2012-06-28 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Silicon photoelectric multiplier with optical cross-talk suppression due to special properties of the substrate |
US8368159B2 (en) | 2011-07-08 | 2013-02-05 | Excelitas Canada, Inc. | Photon counting UV-APD |
KR101283534B1 (ko) * | 2011-07-28 | 2013-07-15 | 이화여자대학교 산학협력단 | 실리콘 광전자 증배 소자의 제조방법 |
US8871557B2 (en) | 2011-09-02 | 2014-10-28 | Electronics And Telecommunications Research Institute | Photomultiplier and manufacturing method thereof |
JP5791461B2 (ja) * | 2011-10-21 | 2015-10-07 | 浜松ホトニクス株式会社 | 光検出装置 |
JP5984617B2 (ja) | 2012-10-18 | 2016-09-06 | 浜松ホトニクス株式会社 | フォトダイオードアレイ |
JP5963642B2 (ja) | 2012-10-29 | 2016-08-03 | 浜松ホトニクス株式会社 | フォトダイオードアレイ |
US20140159180A1 (en) * | 2012-12-06 | 2014-06-12 | Agency For Science, Technology And Research | Semiconductor resistor structure and semiconductor photomultiplier device |
KR101395102B1 (ko) | 2013-02-14 | 2014-05-16 | 한국과학기술원 | Pcb 기판을 이용한 실리콘 광전자증배관의 패키징 방법 |
JP5925711B2 (ja) | 2013-02-20 | 2016-05-25 | 浜松ホトニクス株式会社 | 検出器、pet装置及びx線ct装置 |
EP2793273B1 (de) | 2013-04-17 | 2016-12-28 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Silizium-Fotovervielfacher mit sehr niedrigem optischen Übersprechen und verbessertem Auslesen |
US9410901B2 (en) * | 2014-03-17 | 2016-08-09 | Kla-Tencor Corporation | Image sensor, an inspection system and a method of inspecting an article |
TWI757788B (zh) * | 2014-06-27 | 2022-03-11 | 日商半導體能源研究所股份有限公司 | 攝像裝置及電子裝置 |
DE102018119710A1 (de) * | 2018-08-14 | 2020-02-20 | Universität Leipzig | Vorrichtung und verfahren zur bestimmung einer wellenlänge einer strahlung |
CN109276268A (zh) * | 2018-11-21 | 2019-01-29 | 京东方科技集团股份有限公司 | X射线探测装置及其制造方法 |
US11428826B2 (en) * | 2019-09-09 | 2022-08-30 | Semiconductor Components Industries, Llc | Silicon photomultipliers with split microcells |
RU2770147C1 (ru) * | 2021-06-21 | 2022-04-14 | Садыгов Зираддин Ягуб оглы | Микропиксельный лавинный фотодиод |
CN114093962B (zh) * | 2021-11-22 | 2024-04-09 | 季华实验室 | 单光子雪崩二极管和光电探测器阵列 |
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TWI443817B (zh) | 2006-07-03 | 2014-07-01 | Hamamatsu Photonics Kk | Photodiode array |
US8188563B2 (en) | 2006-07-21 | 2012-05-29 | The Regents Of The University Of California | Shallow-trench-isolation (STI)-bounded single-photon CMOS photodetector |
GB2446185A (en) | 2006-10-30 | 2008-08-06 | Sensl Technologies Ltd | Optical assembly and method of assembly |
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-
2004
- 2004-05-05 RU RU2004113616/28A patent/RU2290721C2/ru not_active IP Right Cessation
-
2005
- 2005-05-05 JP JP2007511306A patent/JP2007536703A/ja active Pending
- 2005-05-05 WO PCT/RU2005/000242 patent/WO2005106971A1/ru active Application Filing
- 2005-05-05 DE DE602005018200T patent/DE602005018200D1/de active Active
- 2005-05-05 AT AT05749398T patent/ATE451720T1/de not_active IP Right Cessation
- 2005-05-05 EP EP05749398A patent/EP1755171B8/de not_active Not-in-force
- 2005-05-05 CN CN2005800192481A patent/CN1998091B/zh not_active Expired - Fee Related
- 2005-05-05 US US11/568,646 patent/US7759623B2/en not_active Expired - Fee Related
- 2005-05-05 EP EP09013750.6A patent/EP2144287B1/de not_active Not-in-force
- 2005-05-05 KR KR1020067025572A patent/KR101113364B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP1755171B8 (de) | 2010-05-19 |
EP2144287A1 (de) | 2010-01-13 |
EP2144287B1 (de) | 2016-12-07 |
JP2007536703A (ja) | 2007-12-13 |
CN1998091A (zh) | 2007-07-11 |
US7759623B2 (en) | 2010-07-20 |
DE602005018200D1 (de) | 2010-01-21 |
EP1755171A4 (de) | 2008-02-27 |
WO2005106971A1 (fr) | 2005-11-10 |
KR20070051782A (ko) | 2007-05-18 |
KR101113364B1 (ko) | 2012-03-02 |
EP1755171A1 (de) | 2007-02-21 |
CN1998091B (zh) | 2010-09-29 |
RU2290721C2 (ru) | 2006-12-27 |
EP1755171B1 (de) | 2009-12-09 |
US20080251692A1 (en) | 2008-10-16 |
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