JP5963642B2 - フォトダイオードアレイ - Google Patents
フォトダイオードアレイ Download PDFInfo
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- JP5963642B2 JP5963642B2 JP2012238337A JP2012238337A JP5963642B2 JP 5963642 B2 JP5963642 B2 JP 5963642B2 JP 2012238337 A JP2012238337 A JP 2012238337A JP 2012238337 A JP2012238337 A JP 2012238337A JP 5963642 B2 JP5963642 B2 JP 5963642B2
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- photodiode array
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- 239000004065 semiconductor Substances 0.000 claims description 162
- 238000010791 quenching Methods 0.000 claims description 55
- 230000000171 quenching effect Effects 0.000 claims description 55
- 238000001514 detection method Methods 0.000 claims description 17
- 239000000969 carrier Substances 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 133
- 239000012535 impurity Substances 0.000 description 57
- 238000000034 method Methods 0.000 description 25
- 239000000758 substrate Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 13
- 230000008054 signal transmission Effects 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 12
- 238000000926 separation method Methods 0.000 description 11
- 239000002994 raw material Substances 0.000 description 9
- 229910004298 SiO 2 Inorganic materials 0.000 description 8
- 239000000470 constituent Substances 0.000 description 8
- 238000005468 ion implantation Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 229920005591 polysilicon Polymers 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 229910001882 dioxygen Inorganic materials 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 3
- 239000005052 trichlorosilane Substances 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000000098 azimuthal photoelectron diffraction Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 2
- ZOCHARZZJNPSEU-UHFFFAOYSA-N diboron Chemical compound B#B ZOCHARZZJNPSEU-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 235000002492 Rungia klossii Nutrition 0.000 description 1
- 244000117054 Rungia klossii Species 0.000 description 1
- -1 SiCr Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910004154 TaNi Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910001120 nichrome Inorganic materials 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/107—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier working in avalanche mode, e.g. avalanche photodiodes
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Description
(タイプ1)
半導体領域12(導電型/不純物濃度/厚み)(n型/5×1011〜1×1020cm−3/30〜700μm)
半導体領域13(導電型/不純物濃度/厚み)(p型/1×1014〜1×1017cm−3/2〜50μm)
半導体領域14(導電型/不純物濃度/厚み)(p型/1×1018〜1×1020cm−3/10〜1000nm)
(タイプ2)
半導体領域12(導電型/不純物濃度/厚み)(p型/5×1011〜1×1020cm−3/30〜700μm)
半導体領域13(導電型/不純物濃度/厚み)(n型/1×1014〜1×1017cm−3/2〜50μm)
半導体領域14(導電型/不純物濃度/厚み)(n型/1×1018〜1×1020cm−3/10〜1000nm)
(タイプ3)
半導体領域12(導電型/不純物濃度/厚み)(n型/5×1011〜1×1020cm−3/30〜700μm)
半導体領域13(導電型/不純物濃度/厚み)(n型/1×1014〜1×1017cm−3/2〜50μm)
半導体領域14(導電型/不純物濃度/厚み)(p型/1×1018〜1×1020cm−3/10〜1000nm)
(タイプ4)
半導体領域12(導電型/不純物濃度/厚み)(p型/5×1011〜1×1020cm−3/30〜700μm)
半導体領域13(導電型/不純物濃度/厚み)(p型/1×1014〜1×1017cm−3/2〜50μm)
半導体領域14(導電型/不純物濃度/厚み)(n型/1×1018〜1×1020cm−3/10〜1000nm)
(タイプ1S)
半導体領域12、13、14のパラメータは、タイプ1と同一。
半導体領域15(導電型/不純物濃度/厚み)(p型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ2S)
半導体領域12、13、14のパラメータは、タイプ2と同一。
半導体領域15(導電型/不純物濃度/厚み)(n型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ3S)
半導体領域12、13、14のパラメータは、タイプ3と同一。
半導体領域15(導電型/不純物濃度/厚み)(p型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ4S)
半導体領域12、13、14のパラメータは、タイプ4と同一。
半導体領域15(導電型/不純物濃度/厚み)(n型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ1D)
半導体領域12、13、14のパラメータは、タイプ1と同一。
半導体領域15(導電型/不純物濃度/厚み)(n型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ2D)
半導体領域12、13、14のパラメータは、タイプ2と同一。
半導体領域15(導電型/不純物濃度/厚み)(p型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ3D)
半導体領域12、13、14のパラメータは、タイプ3と同一。
半導体領域15(導電型/不純物濃度/厚み)(n型/1×1014〜1×1017cm−3/2〜50μm)
(タイプ4D)
半導体領域12、13、14のパラメータは、タイプ4と同一。
半導体領域15(導電型/不純物濃度/厚み)(p型/1×1014〜1×1017cm−3/2〜50μm)
(1−1)半導体領域12:
導電型:n型(不純物:Sb(アンチモン))
不純物濃度:5.0×1011cm−3
厚み:650μm
(1−2)半導体領域13:
導電型:p型(不純物:B(ボロン))
不純物濃度:1.0×1014cm−3
厚み:30μm
(1−3)半導体領域14
導電型:p型(不純物:B(ボロン))
不純物濃度:1.0×1018cm−3
厚み:1000nm
(1−4)絶縁層16:SiO2(厚み:1000nm)
(1−5)絶縁層17:SiO2(厚み:2000nm)
(1−6)絶縁層18:SiO2(厚み:2000nm)
(1−7)接続電極3:(アルミニウム(Al))
(1−8)クエンチング抵抗4(ポリシリコン)
形状:図21に示す形状
厚み:500nm
幅:2μm
長さ:100μm
抵抗値:500kΩ
(1−9)光検出部10
1つの光検出部10の面積S:2025μm2
隣接する光検出部10の中心間の間隔X:50μm
受光領域内のフォトダイオード数(X軸方向=100個×Y軸方向100個)
受光領域のX軸方向寸法:5mm
受光領域のY軸方向寸法:5mm
(1−10)読出配線5B2
幅:5μm
X軸方向の配線の本数:101本
Y軸方向の配線の本数:101本
1つの開口内に存在する光検出部10の数:1
・半導体領域12:CZ法((001)Si半導体基板)
・半導体領域13:Siエピタキシャル成長法(原材料:気相の四塩化珪素(SiCl4)、三塩化シラン(トリクロルシラン、SiHCl3)、成長温度1200℃)
・半導体領域14:不純物の熱拡散法(不純物原材料:ジボラン(B2H6)、拡散温度1200℃)
・絶縁層16:(Si熱酸化法:酸化温度(1000℃))
・クエンチング抵抗4:スパッタ法(ターゲット材料:Si)
・絶縁層17:(プラズマCVD法:原材料ガス(テトラエトキシシラン(TEOS)及び酸素ガス):成長温度(200℃))
・第1コンタクト電極3A、表面電極3B、第2コンタクト電極3C、接続配線6、補助読出配線5A、電極パッドPad:蒸着法(原料:アルミニウム)
・絶縁層18:(プラズマCVD法:原材料ガス(テトラエトキシシラン(TEOS)及び酸素ガス):成長温度(200℃))
・コンタクト電極5B1、読出配線5B2:蒸着法(原料:アルミニウム)
Claims (4)
- ガイガーモードで動作するアバランシェフォトダイオード有する光検出部を複数備えたフォトダイオードアレイにおいて、
個々の前記光検出部は、
キャリアを出力する半導体領域を有する前記アバランシェフォトダイオードと、
前記半導体領域に電気的に接続され、且つ、その外縁に沿って前記半導体領域を囲む表面電極と、
前記表面電極と読出配線とを接続するクエンチング抵抗と、
を備え、
前記半導体領域の表面を含む平面を基準平面とした場合、この基準平面から、前記読出配線とその直下の絶縁層との間の界面までの距離tbは、この基準平面から、前記表面電極とその直下の絶縁層との間の界面までの距離taよりも大きく、
前記読出配線は、隣接する前記アバランシェフォトダイオード間に位置している、
ことを特徴とするフォトダイオードアレイ。 - 前記基準平面に垂直な方向から見た場合、前記読出配線は、前記表面電極の一部と重なっていることを特徴とする請求項1に記載のフォトダイオードアレイ。
- 前記クエンチング抵抗上に形成された第1絶縁層と、
前記第1絶縁層に設けられたコンタクトホールを介して、前記クエンチング抵抗に電気的に接続された補助読出配線と、
前記補助読出配線上に形成された第2絶縁層と、
を備え、
前記読出配線は、前記第2絶縁層に設けられたコンタクトホールを介して、前記補助読出配線に電気的に接続され、且つ、前記補助読出配線に対して並行して延びて、前記補助読出配線と共に、電極パッドに接続されている、
ことを特徴とする請求項1又は2に記載のフォトダイオードアレイ。 - 前記クエンチング抵抗上に形成された絶縁層を備え、
前記読出配線は、前記絶縁層に設けられたコンタクトホールを介して、前記クエンチング抵抗に電気的に接続され、且つ、前記クエンチング抵抗と電極パッドとを電気的に接続している、
ことを特徴とする請求項1又は2に記載のフォトダイオードアレイ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012238337A JP5963642B2 (ja) | 2012-10-29 | 2012-10-29 | フォトダイオードアレイ |
US13/710,845 US8754502B2 (en) | 2012-10-29 | 2012-12-11 | Photodiode array |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012238337A JP5963642B2 (ja) | 2012-10-29 | 2012-10-29 | フォトダイオードアレイ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014090034A JP2014090034A (ja) | 2014-05-15 |
JP5963642B2 true JP5963642B2 (ja) | 2016-08-03 |
Family
ID=50546254
Family Applications (1)
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JP2012238337A Active JP5963642B2 (ja) | 2012-10-29 | 2012-10-29 | フォトダイオードアレイ |
Country Status (2)
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US (1) | US8754502B2 (ja) |
JP (1) | JP5963642B2 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10121928B2 (en) * | 2014-07-01 | 2018-11-06 | Sensl Technologies Ltd. | Semiconductor photomultiplier and a process of manufacturing a photomultiplier microcell |
US10236155B2 (en) | 2015-09-03 | 2019-03-19 | El-Mul Technologies Ltd. | Detection assembly, system and method |
WO2017187490A1 (ja) * | 2016-04-26 | 2017-11-02 | 株式会社日立ハイテクノロジーズ | 分析装置 |
JP6938239B2 (ja) | 2017-06-23 | 2021-09-22 | 浜松ホトニクス株式会社 | 光検出器及び光検出装置 |
CN111682086A (zh) * | 2020-07-23 | 2020-09-18 | 云南大学 | 一种自由运行模式下的负反馈雪崩光电二极管 |
CN111916526A (zh) * | 2020-08-10 | 2020-11-10 | 中国电子科技集团公司第四十四研究所 | 一种负反馈型单光子雪崩光电二极管及其制作方法 |
JP2022107240A (ja) | 2021-01-08 | 2022-07-21 | 株式会社東芝 | 光検出器、光検出システム、ライダー装置、移動体及び車 |
Family Cites Families (13)
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WO2005048319A2 (en) | 2003-11-06 | 2005-05-26 | Yale University | Large-area detector |
RU2290721C2 (ru) | 2004-05-05 | 2006-12-27 | Борис Анатольевич Долгошеин | Кремниевый фотоэлектронный умножитель (варианты) и ячейка для кремниевого фотоэлектронного умножителя |
US7268369B2 (en) * | 2004-07-06 | 2007-09-11 | Fujifilm Corporation | Functional device and method for producing the same |
JP2006049874A (ja) * | 2004-07-06 | 2006-02-16 | Fuji Photo Film Co Ltd | 機能素子及びその製造方法 |
JP4677311B2 (ja) * | 2005-09-14 | 2011-04-27 | 富士フイルム株式会社 | Mos型固体撮像装置及びその製造方法 |
TWI443817B (zh) * | 2006-07-03 | 2014-07-01 | Hamamatsu Photonics Kk | Photodiode array |
JP2008103614A (ja) * | 2006-10-20 | 2008-05-01 | Mitsui Eng & Shipbuild Co Ltd | 光電変換デバイス |
JP2010021355A (ja) * | 2008-07-10 | 2010-01-28 | Sanyo Electric Co Ltd | 撮像装置 |
JP2010021348A (ja) * | 2008-07-10 | 2010-01-28 | Sanyo Electric Co Ltd | 撮像装置 |
JP5297907B2 (ja) * | 2009-06-18 | 2013-09-25 | 浜松ホトニクス株式会社 | 光検出装置 |
JP5562207B2 (ja) * | 2010-10-29 | 2014-07-30 | 浜松ホトニクス株式会社 | フォトダイオードアレイ |
KR101711087B1 (ko) * | 2010-12-07 | 2017-02-28 | 한국전자통신연구원 | 실리콘 포토멀티플라이어 및 그 제조 방법 |
KR101749240B1 (ko) * | 2010-12-17 | 2017-06-21 | 한국전자통신연구원 | 반도체 포토멀티플라이어의 상부 광학 구조 및 그 제작 방법 |
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