ATE448507T1 - Verfahren zur herstellung eines stempel für mikro/nano imprint-lithographie - Google Patents

Verfahren zur herstellung eines stempel für mikro/nano imprint-lithographie

Info

Publication number
ATE448507T1
ATE448507T1 AT06021860T AT06021860T ATE448507T1 AT E448507 T1 ATE448507 T1 AT E448507T1 AT 06021860 T AT06021860 T AT 06021860T AT 06021860 T AT06021860 T AT 06021860T AT E448507 T1 ATE448507 T1 AT E448507T1
Authority
AT
Austria
Prior art keywords
micro
imprint lithography
stamp
nano imprint
resist
Prior art date
Application number
AT06021860T
Other languages
English (en)
Inventor
Jun-Ho Jeong
Young-Suk Sim
Kin-Don Kim
Dae-Geun Choi
Eung-Sug Lee
Original Assignee
Korea Mach & Materials Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Korea Mach & Materials Inst filed Critical Korea Mach & Materials Inst
Application granted granted Critical
Publication of ATE448507T1 publication Critical patent/ATE448507T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
AT06021860T 2005-10-18 2006-10-18 Verfahren zur herstellung eines stempel für mikro/nano imprint-lithographie ATE448507T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050098080A KR100772639B1 (ko) 2005-10-18 2005-10-18 다이아몬드상 카본 박막을 이용한 미세 임프린트리소그래피용 스탬프 및 그 제조방법

Publications (1)

Publication Number Publication Date
ATE448507T1 true ATE448507T1 (de) 2009-11-15

Family

ID=37814633

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06021860T ATE448507T1 (de) 2005-10-18 2006-10-18 Verfahren zur herstellung eines stempel für mikro/nano imprint-lithographie

Country Status (6)

Country Link
US (1) US7914693B2 (de)
EP (1) EP1785770B1 (de)
JP (1) JP2007116163A (de)
KR (1) KR100772639B1 (de)
AT (1) ATE448507T1 (de)
DE (1) DE602006010307D1 (de)

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Also Published As

Publication number Publication date
KR100772639B1 (ko) 2007-11-02
EP1785770A2 (de) 2007-05-16
JP2007116163A (ja) 2007-05-10
US7914693B2 (en) 2011-03-29
EP1785770A3 (de) 2007-07-11
DE602006010307D1 (de) 2009-12-24
US20070158872A1 (en) 2007-07-12
KR20070042309A (ko) 2007-04-23
EP1785770B1 (de) 2009-11-11

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