DE602007004770D1 - Verfahren zur Herstellung einer Siliciumdüsenplatte und Verfahren zur Herstellung eines Tintenstrahlkopfs - Google Patents

Verfahren zur Herstellung einer Siliciumdüsenplatte und Verfahren zur Herstellung eines Tintenstrahlkopfs

Info

Publication number
DE602007004770D1
DE602007004770D1 DE602007004770T DE602007004770T DE602007004770D1 DE 602007004770 D1 DE602007004770 D1 DE 602007004770D1 DE 602007004770 T DE602007004770 T DE 602007004770T DE 602007004770 T DE602007004770 T DE 602007004770T DE 602007004770 D1 DE602007004770 D1 DE 602007004770D1
Authority
DE
Germany
Prior art keywords
manufacturing
silicon substrate
film
pattern
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007004770T
Other languages
English (en)
Inventor
Kazuhiko Tsuboi
Tohru Hirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of DE602007004770D1 publication Critical patent/DE602007004770D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1609—Production of print heads with piezoelectric elements of finger type, chamber walls consisting integrally of piezoelectric material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE602007004770T 2006-05-31 2007-05-22 Verfahren zur Herstellung einer Siliciumdüsenplatte und Verfahren zur Herstellung eines Tintenstrahlkopfs Active DE602007004770D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006151376 2006-05-31

Publications (1)

Publication Number Publication Date
DE602007004770D1 true DE602007004770D1 (de) 2010-04-01

Family

ID=38458133

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007004770T Active DE602007004770D1 (de) 2006-05-31 2007-05-22 Verfahren zur Herstellung einer Siliciumdüsenplatte und Verfahren zur Herstellung eines Tintenstrahlkopfs

Country Status (4)

Country Link
US (1) US8034247B2 (de)
EP (1) EP1862312B1 (de)
AT (1) ATE457873T1 (de)
DE (1) DE602007004770D1 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008155986A1 (ja) 2007-06-20 2010-08-26 コニカミノルタホールディングス株式会社 液体吐出ヘッド用ノズルプレートの製造方法、液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド
EP2697068B1 (de) * 2011-04-13 2015-04-08 OCE-Technologies B.V. Verfahren zur herstellung einer düse einer flüssigkeitsausstossvorrichtung
JP5410486B2 (ja) 2011-09-21 2014-02-05 富士フイルム株式会社 液体吐出ヘッド、液体吐出装置及び液体吐出ヘッドの異常検知方法
JP6164908B2 (ja) * 2013-04-23 2017-07-19 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6456049B2 (ja) * 2014-06-16 2019-01-23 キヤノン株式会社 貫通基板の形成方法
KR20210006565A (ko) * 2019-07-08 2021-01-19 삼성전자주식회사 플라즈마 다이싱 방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5204690A (en) * 1991-07-01 1993-04-20 Xerox Corporation Ink jet printhead having intergral silicon filter
JPH0536825A (ja) 1991-07-31 1993-02-12 Toshiba Corp 半導体チツプの切り出し方法
JP3515830B2 (ja) * 1994-07-14 2004-04-05 富士写真フイルム株式会社 インク噴射記録ヘッドチップの製造方法、インク噴射記録ヘッドの製造方法および記録装置
JPH10157149A (ja) 1996-12-05 1998-06-16 Canon Inc 液体噴射記録ヘッドの製造方法
WO1998051506A1 (fr) * 1997-05-14 1998-11-19 Seiko Epson Corporation Procede de formation d'ajutage pour injecteurs et procede de fabrication d'une tete a jet d'encre
US6184109B1 (en) * 1997-07-23 2001-02-06 Kabushiki Kaisha Toshiba Method of dividing a wafer and method of manufacturing a semiconductor device
EP1065059B1 (de) 1999-07-02 2007-01-31 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes, damit hergestellter Flüssigkeitsausstosskopf, Kopfkassette, Flüssigkeitsausstossvorrichtung, Verfahren zur Herstellung einer Siliziumplatte und damit hergestellte Siliziumplatte
US7052117B2 (en) * 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
JP2004253695A (ja) 2003-02-21 2004-09-09 Ricoh Co Ltd シリコンチップ及びその製造方法及び該シリコンチップを用いた装置

Also Published As

Publication number Publication date
US8034247B2 (en) 2011-10-11
ATE457873T1 (de) 2010-03-15
US20070278181A1 (en) 2007-12-06
EP1862312A1 (de) 2007-12-05
EP1862312B1 (de) 2010-02-17

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