DE60208250D1 - Verfahren zur Bildung eines Tintenstrahldruckkopfsubstrats und Tintenstrahldruckkopfsubstrat, und Tintenstrahldruckkopfherstellungsverfahren und Tintenstrahldruckkopf - Google Patents

Verfahren zur Bildung eines Tintenstrahldruckkopfsubstrats und Tintenstrahldruckkopfsubstrat, und Tintenstrahldruckkopfherstellungsverfahren und Tintenstrahldruckkopf

Info

Publication number
DE60208250D1
DE60208250D1 DE60208250T DE60208250T DE60208250D1 DE 60208250 D1 DE60208250 D1 DE 60208250D1 DE 60208250 T DE60208250 T DE 60208250T DE 60208250 T DE60208250 T DE 60208250T DE 60208250 D1 DE60208250 D1 DE 60208250D1
Authority
DE
Germany
Prior art keywords
inkjet printhead
substrate
forming
manufacturing
printhead substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60208250T
Other languages
English (en)
Other versions
DE60208250T2 (de
Inventor
Ryoji Kanri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60208250D1 publication Critical patent/DE60208250D1/de
Publication of DE60208250T2 publication Critical patent/DE60208250T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60208250T 2001-02-28 2002-02-27 Verfahren zur Bildung eines Tintenstrahldruckkopfsubstrats und Tintenstrahldruckkopfsubstrat, und Tintenstrahldruckkopfherstellungsverfahren und Tintenstrahldruckkopf Expired - Lifetime DE60208250T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001055081 2001-02-28
JP2001055081 2001-02-28
JP2002019348A JP4054583B2 (ja) 2001-02-28 2002-01-29 インクジェットプリントヘッドの製造方法
JP2002019348 2002-01-29

Publications (2)

Publication Number Publication Date
DE60208250D1 true DE60208250D1 (de) 2006-02-02
DE60208250T2 DE60208250T2 (de) 2006-08-03

Family

ID=26610332

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60208250T Expired - Lifetime DE60208250T2 (de) 2001-02-28 2002-02-27 Verfahren zur Bildung eines Tintenstrahldruckkopfsubstrats und Tintenstrahldruckkopfsubstrat, und Tintenstrahldruckkopfherstellungsverfahren und Tintenstrahldruckkopf

Country Status (4)

Country Link
US (1) US6953530B2 (de)
EP (1) EP1236574B1 (de)
JP (1) JP4054583B2 (de)
DE (1) DE60208250T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5111477B2 (ja) * 2003-11-28 2013-01-09 キヤノン株式会社 インクジェットヘッド
JP4455282B2 (ja) 2003-11-28 2010-04-21 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
US7311386B2 (en) 2004-06-30 2007-12-25 Lexmark Interntional, Inc. Die attach methods and apparatus for micro-fluid ejection device
US7043838B2 (en) 2004-06-30 2006-05-16 Lexmark International, Inc. Process for manufacturing a micro-fluid ejection device
US7401875B2 (en) * 2004-07-09 2008-07-22 Texas Instruments Incorporated Inkjet printhead incorporating a memory array
TWI289511B (en) * 2004-11-22 2007-11-11 Canon Kk Method of manufacturing liquid discharge head, and liquid discharge head
JP2007230234A (ja) * 2006-02-02 2007-09-13 Canon Inc インクジェット記録ヘッドの製造方法
US7695111B2 (en) 2006-03-08 2010-04-13 Canon Kabushiki Kaisha Liquid discharge head and manufacturing method therefor
US8037603B2 (en) * 2006-04-27 2011-10-18 Canon Kabushiki Kaisha Ink jet head and producing method therefor
JP4974751B2 (ja) * 2006-04-27 2012-07-11 キヤノン株式会社 インクジェットヘッドおよびその製造方法
US20080196251A1 (en) * 2007-02-15 2008-08-21 The Gillette Company Support structure for a flexible razor blade assembly
JP4979641B2 (ja) * 2007-06-20 2012-07-18 キヤノン株式会社 液体吐出ヘッドの製造方法
US20090078675A1 (en) * 2007-09-26 2009-03-26 Silverbrook Research Pty Ltd Method of removing photoresist
JP5627399B2 (ja) 2010-11-05 2014-11-19 キヤノン株式会社 保護層付き基板の製造方法および基板加工方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451837A (en) 1977-09-30 1979-04-24 Ricoh Co Ltd Ink jet head device
US4601777A (en) 1985-04-03 1986-07-22 Xerox Corporation Thermal ink jet printhead and process therefor
DE69123932T2 (de) 1990-10-18 1997-05-22 Canon Kk Herstellungsverfahren eines Tintenstrahldruckkopfes
JP2744536B2 (ja) 1991-10-04 1998-04-28 株式会社テック インクジェットプリンタヘッド及びその製造方法
JP2960608B2 (ja) 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
JP3143307B2 (ja) 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US5871657A (en) * 1998-01-08 1999-02-16 Xerox Corporation Ink jet printhead with improved adhesive bonding between channel and heater substrates
JP4146933B2 (ja) 1998-06-03 2008-09-10 キヤノン株式会社 インクジェットヘッドおよびインクジェットヘッドの製造方法
DE69923033T2 (de) 1998-06-03 2005-12-01 Canon K.K. Tintenstrahlkopf, Tintenstrahlkopfträgerschicht, und Verfahren zur Herstellung des Kopfes
US6379571B1 (en) * 1998-06-11 2002-04-30 Canon Kabushiki Kaisha Etching method for processing substrate, dry etching method for polyetheramide resin layer, production method of ink-jet printing head, ink-jet head and ink-jet printing apparatus
US6743569B2 (en) * 1999-03-31 2004-06-01 Toyo Boseki Kabushiki Kaisha Photosensitive resin laminate and production method thereof

Also Published As

Publication number Publication date
EP1236574A2 (de) 2002-09-04
DE60208250T2 (de) 2006-08-03
JP2002326361A (ja) 2002-11-12
EP1236574A3 (de) 2003-07-02
EP1236574B1 (de) 2005-12-28
JP4054583B2 (ja) 2008-02-27
US6953530B2 (en) 2005-10-11
US20020118255A1 (en) 2002-08-29

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