DE60317970D1 - Verfahren zur Herstellung eines Tintenstrahlkopfes - Google Patents

Verfahren zur Herstellung eines Tintenstrahlkopfes

Info

Publication number
DE60317970D1
DE60317970D1 DE60317970T DE60317970T DE60317970D1 DE 60317970 D1 DE60317970 D1 DE 60317970D1 DE 60317970 T DE60317970 T DE 60317970T DE 60317970 T DE60317970 T DE 60317970T DE 60317970 D1 DE60317970 D1 DE 60317970D1
Authority
DE
Germany
Prior art keywords
manufacturing
ink jet
jet head
head
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60317970T
Other languages
English (en)
Other versions
DE60317970T2 (de
Inventor
Norio Ohkuma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE60317970D1 publication Critical patent/DE60317970D1/de
Publication of DE60317970T2 publication Critical patent/DE60317970T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/016—Method or apparatus with etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49169—Assembling electrical component directly to terminal or elongated conductor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE60317970T 2002-04-11 2003-04-10 Verfahren zur Herstellung eines Tintenstrahlkopfes Expired - Lifetime DE60317970T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002108794A JP2003300323A (ja) 2002-04-11 2002-04-11 インクジェットヘッド及びその製造方法
JP2002108794 2002-04-11

Publications (2)

Publication Number Publication Date
DE60317970D1 true DE60317970D1 (de) 2008-01-24
DE60317970T2 DE60317970T2 (de) 2008-12-04

Family

ID=28786542

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60317970T Expired - Lifetime DE60317970T2 (de) 2002-04-11 2003-04-10 Verfahren zur Herstellung eines Tintenstrahlkopfes

Country Status (7)

Country Link
US (1) US6766579B2 (de)
EP (1) EP1366905B1 (de)
JP (1) JP2003300323A (de)
KR (1) KR100492828B1 (de)
CN (1) CN1241744C (de)
DE (1) DE60317970T2 (de)
TW (1) TWI236430B (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4280574B2 (ja) * 2002-07-10 2009-06-17 キヤノン株式会社 液体吐出ヘッドの製造方法
US7444551B1 (en) 2002-12-16 2008-10-28 Nvidia Corporation Method and apparatus for system status monitoring, testing and restoration
AU2003249007A1 (en) * 2003-07-22 2005-02-04 Canon Kabushiki Kaisha Ink jet head and its manufacture method
WO2005007411A1 (en) * 2003-07-22 2005-01-27 Canon Kabushiki Kaisha Ink jet head and its manufacture method
CN100358721C (zh) * 2004-02-13 2008-01-02 明基电通股份有限公司 利用多重牺牲层扩张流体腔的制造方法
JP4529621B2 (ja) * 2004-09-29 2010-08-25 セイコーエプソン株式会社 液体噴射装置、及び、液体噴射ヘッドの製造方法
JP4667028B2 (ja) * 2004-12-09 2011-04-06 キヤノン株式会社 構造体の形成方法及びインクジェット記録ヘッドの製造方法
US7837299B2 (en) * 2005-11-24 2010-11-23 Ricoh Company, Ltd. Liquid ejecting head and method of manufacturing the same, image forming apparatus, liquid drop ejecting device, and recording method
US7938974B2 (en) * 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US8042908B2 (en) * 2007-07-27 2011-10-25 Hewlett-Packard Development Company, L.P. Fluid ejector device
US8012363B2 (en) 2007-11-29 2011-09-06 Silverbrook Research Pty Ltd Metal film protection during printhead fabrication with minimum number of MEMS processing steps
JP5606269B2 (ja) * 2010-10-27 2014-10-15 キヤノン株式会社 インクジェットヘッドの製造方法
US8343712B2 (en) * 2010-10-28 2013-01-01 Canon Kabushiki Kaisha Method for manufacturing inkjet recording head
JP5787603B2 (ja) * 2011-04-28 2015-09-30 キヤノン株式会社 インクジェット記録ヘッドおよびインクジェット記録装置
JP6039259B2 (ja) * 2011-07-25 2016-12-07 キヤノン株式会社 液体吐出ヘッド、およびその製造方法
JP6000715B2 (ja) 2011-09-29 2016-10-05 キヤノン株式会社 液体吐出ヘッドの製造方法
JP5449590B2 (ja) * 2012-03-14 2014-03-19 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6308751B2 (ja) * 2013-11-12 2018-04-11 キヤノン株式会社 液体吐出ヘッド用基板の製造方法、液体吐出ヘッド用基板、液体吐出ヘッド、および記録装置
JP2017185705A (ja) * 2016-04-06 2017-10-12 東芝テック株式会社 インクジェットヘッド記録装置
US9855566B1 (en) * 2016-10-17 2018-01-02 Funai Electric Co., Ltd. Fluid ejection head and process for making a fluid ejection head structure
JP2022150859A (ja) * 2021-03-26 2022-10-07 セイコーエプソン株式会社 液体吐出装置

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288247A (ja) * 1988-09-27 1990-03-28 Canon Inc インクジェット記録ヘッド
ES2073614T3 (es) 1990-04-27 1995-08-16 Canon Kk Metodo y aparato de impresion.
JPH0410941A (ja) 1990-04-27 1992-01-16 Canon Inc 液滴噴射方法及び該方法を用いた記録装置
JPH0410942A (ja) 1990-04-27 1992-01-16 Canon Inc 液体噴射方法および該方法を用いた記録装置
JPH0412859A (ja) 1990-04-28 1992-01-17 Canon Inc 液体噴射方法、該方法を用いた記録ヘッド及び該方法を用いた記録装置
JP2783647B2 (ja) 1990-04-27 1998-08-06 キヤノン株式会社 液体噴射方法および該方法を用いた記録装置
ATE136323T1 (de) * 1991-01-18 1996-04-15 Canon Kk Tinte, tintenstrahlaufzeichnungsverfahren und gerät unter verwendung desselben
JP3278186B2 (ja) 1991-03-08 2002-04-30 キヤノン株式会社 インクジェット記録ヘッド
JP2960608B2 (ja) * 1992-06-04 1999-10-12 キヤノン株式会社 液体噴射記録ヘッドの製造方法
US5798778A (en) 1992-10-19 1998-08-25 Canon Kabushiki Kaisha Ink jet head having an ink discharging outlet face and ink jet apparatus provided with said ink jet head
JP3332503B2 (ja) 1992-10-19 2002-10-07 キヤノン株式会社 改善されたインク吐出口面を備えたインクジェットヘッド、該インクジェットを備えたインクジェット装置及び該インクジェットヘッドの製造方法
DE69333056T2 (de) 1992-10-19 2004-01-29 Canon Kk Tintenstrahldruckkopf und Tintenstrahldruckvorrichtung mit diesem Tintenstrahldruckkopf
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3478669B2 (ja) * 1995-06-13 2003-12-15 キヤノン株式会社 溶剤易溶性のフッ素含有エポキシ樹脂組成物およびそれを用いた表面処理方法
JP3343875B2 (ja) 1995-06-30 2002-11-11 キヤノン株式会社 インクジェットヘッドの製造方法
EP0882593A1 (de) 1997-06-05 1998-12-09 Xerox Corporation Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes
JP3768645B2 (ja) * 1997-06-18 2006-04-19 キヤノン株式会社 インクジェット記録ヘッド
JPH1178029A (ja) 1997-09-04 1999-03-23 Canon Inc インクジェット記録ヘッド
JPH1199649A (ja) * 1997-09-30 1999-04-13 Canon Inc インクジェットヘッド、その製造方法、及びインクジェット装置
JP3559697B2 (ja) 1997-12-01 2004-09-02 キヤノン株式会社 インクジェット記録ヘッドの製造方法
JP3408130B2 (ja) 1997-12-19 2003-05-19 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
JP4592038B2 (ja) * 2000-07-10 2010-12-01 キヤノン株式会社 インクジェット記録ヘッドの製造方法

Also Published As

Publication number Publication date
TW200304874A (en) 2003-10-16
JP2003300323A (ja) 2003-10-21
KR20030081127A (ko) 2003-10-17
CN1241744C (zh) 2006-02-15
CN1449917A (zh) 2003-10-22
US20030198899A1 (en) 2003-10-23
EP1366905A1 (de) 2003-12-03
DE60317970T2 (de) 2008-12-04
US6766579B2 (en) 2004-07-27
KR100492828B1 (ko) 2005-06-07
EP1366905B1 (de) 2007-12-12
TWI236430B (en) 2005-07-21

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