EP0882593A1 - Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes - Google Patents

Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes Download PDF

Info

Publication number
EP0882593A1
EP0882593A1 EP98303121A EP98303121A EP0882593A1 EP 0882593 A1 EP0882593 A1 EP 0882593A1 EP 98303121 A EP98303121 A EP 98303121A EP 98303121 A EP98303121 A EP 98303121A EP 0882593 A1 EP0882593 A1 EP 0882593A1
Authority
EP
European Patent Office
Prior art keywords
hydrophobic
hydrophilic
film
printhead
ink
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98303121A
Other languages
English (en)
French (fr)
Inventor
John R. Andrews
William G. Hawkins
Ram S. Narang
Gary A. Kneezel
Daniel E. Kuhman
Timothy J. Fuller
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Publication of EP0882593A1 publication Critical patent/EP0882593A1/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber

Definitions

  • This invention relates generally to an ink jet printer and, more particularly, to a method for forming a front ink ejecting face of a thermal ink jet printhead which is hydrophobic around the periphery of the ink ejecting nozzles and hydrophilic in areas peripheral to the nozzle portions.
  • thermal drop-on-demand ink jet printheads There are two general configurations for thermal drop-on-demand ink jet printheads.
  • droplets are propelled from nozzles formed in the printhead front face in a direction parallel to the flow of ink in ink channels and parallel to the surface of the bubble-generating heating elements of the printhead, such as, for example, the printhead configuration disclosed in U.S. Patent Re. 32,572, the disclosure of which is totally incorporated herein by reference.
  • This configuration is sometimes referred to as an edge shooter or a side shooter.
  • the other thermal ink jet configuration propels droplets from nozzles in a direction normal to the surface of the bubble-generating heating elements, such as, for example, the printhead disclosed in U.S.
  • Patent 4,568,953 the disclosure of which is totally incorporated herein by reference.
  • This configuration is sometimes referred to as a roofshooter.
  • a fundamental difference between the two configurations lies in the direction of droplet ejection, in that the side shooter configuration ejects droplets in the plane of the substrate having the heating elements, whereas the roofshooter ejects droplets out of the plane of the substrate having the heating elements and in a direction normal thereto.
  • the printhead includes one or more ink filled channels, such as disclosed in U.S. Patent No. 4,463,359, to Ayata et al. At one end, these channels communicate with a relatively small ink supply chamber. At the opposite front face end, the channels have an opening referred to as a nozzle.
  • a thermal energy generator for example, a resistor, is located in each of the channels a predetermined distance from the nozzles. The resistors are individually addressed with a current pulse to momentarily vaporize ink in the respective channels and thereby form a bubble. As the bubble grows, the ink bulges from the nozzle, but it is contained by the surface tension of the ink as a meniscus.
  • the ink still in the channel between the nozzle and bubble starts to move towards the collapsing bubble causing a volumetric contraction of the ink at the nozzle resulting in the separation of the bulging ink as an ink droplet.
  • the acceleration of the ink out of the nozzle while the bubble is growing provides momentum and velocity to the droplet in a substantially straight line direction towards a recording medium, such as paper.
  • a typical printhead is made from silicon which is a high surface energy material and thus highly hydrophilic. If left completely uncoated, the water and the ink would rapidly spread over the exposed silicon surface.
  • the exposed front face of the printhead around the periphery of the nozzles is desirably made as strongly smooth and hydrophobic as possible, and microscopic irregularities are thus avoided, by providing an ink repellent (hydrophobic) coating on the front face, particularly around the nozzles, that repels the ink that is used for the printing process.
  • An ink repellent property is a quantifiable physical property that is commonly expressed in terms of the contact angle that a small ink droplet forms with this coating.
  • a large contact angle of, for instance, more than 90° indicates a repellent nature of the coating with the ink and smaller contact angles of, for instance, less than 45° indicate that the ink will cover ("wet") the coating.
  • Hydrophobic layers coated on the front face of a thermal ink jet printhead are known in the art.
  • Methods for coating the front face include spraying or dip coating low energy hydrophobic liquids onto the front face of the printhead or coating a low surface energy material onto an intermediate substrate and then transferring that material onto the front face of the printhead using some combination of pressure and heat.
  • U.S. Patents 5,212,496 and 5,218,381 disclose these techniques.
  • U.S. Patent No. 5,208,606, to Klein et al. discusses the use of a noble metal as a hydrophobic front face coating.
  • the coating may be applied, for example, by electroplating, evaporation, sputtering, ion plating, chemical vapor deposition (CVD) or plasma CVD.
  • U.S. Patent No. 5,073,785 to Jansen et al., discloses a process for minimizing or avoiding ink drop deflection in ink jet devices that comprises coating the front face of ink jet head components with amorphous carbon.
  • the amorphous or diamond-like carbon layer is subsequently fluorinated with a fluorine-containing gas by plasma enhanced chemical vapor deposition (PECVD) to render its surface stable and hydrophobic.
  • PECVD plasma enhanced chemical vapor deposition
  • Another technique is to bond a thin low surface energy polymeric film (referred to as a nozzle plate) to the printhead nozzle face and, using a mask, forming holes through the film connecting to the channels of the printhead.
  • a nozzle plate a thin low surface energy polymeric film
  • This technique is disclosed, for example, in U.S. Patent 5,378,137.
  • a remaining problem with prior art printheads is that, despite the hydrophobic treatment of the front face, ink around the nozzles is not dispersed as efficiently as desired; residual ink may still interfere to some extent with drop directionality.
  • the Canon BJC 4000 incorporates a printhead which has a unitary nozzle face with a hydrophobic region around the nozzles and a hydrophilic region around the periphery of the front face. It would be desirable to provide this hybrid type of front face wettability with a forming process which is simple and inexpensive and which can be used with various types of printhead front face coatings.
  • the invention is directed towards an ink jet printhead having a front face which is hydrophobic at areas around the periphery of the nozzles but which is hydrophilic in areas adjacent to the hydrophobic areas.
  • the front face of the printhead is coated with amorphous carbon.
  • the carbon is subsequently fluorinated to reduce the surface energy changing the wetting characteristics from hydrophilic to hydrophobic.
  • the hydrophobic coating is then patterned by UV laser ablation through a mask removing the coating from selected peripheral areas and exposing the underlying high energy hydrophilic printhead face surface.
  • the hydrophilicity of the exposed region can be further increased by ablating in the presence of a polar reactive gas such as ozone or chlorine.
  • a high surface energy polymer film is bonded to the printhead front face and the exposed surface fluorinated to reduce the top surface energy making the surface hydrophobic.
  • the film is then patterned by laser ablation through a mask removing the fluorinated top film surface from selected peripheral areas to expose remaining portions of the polymer resulting in hydrophobic areas around the nozzles contacting hydrophilic regions at the periphery enabling a wicking action.
  • the nozzles can be formed by using a separate masking step.
  • the present invention relates to a method for forming the front surface of an ink jet printhead with hydrophobic and hydrophilic regions, the front surface of the printhead having a plurality of ink channels terminating as nozzles at said surface, the method comprising the steps of:
  • the invention also relates to a method for forming the front surface of an ink jet printhead with hydrophobic and hydrophilic regions, the front surface of the printhead having a plurality of ink channels terminating in nozzles at said surface, the method comprising the steps of:
  • FIG. 1 is a front view of a printhead showing the front ink ejecting face of the printhead having hydrophobic and hydrophilic regions formed by the methods of the present invention.
  • FIG. 2 is a cross-sectional side view of the printhead of FIG. 1.
  • FIG. 3 is a perspective view of the printhead of FIG. 1 subjected to an ablating laser beam which forms the hydrophilic regions of the front face.
  • FIGS. 4A, 4B are cross-sectional side views of the printhead of FIG. 1 showing a second embodiment of hydrophobic/hydrophilic regions formed on the front face.
  • FIG. 5 is a variation of the FIG. 4 embodiment.
  • FIG. 6 is another variation of the FIG. 4 embodiment.
  • Printhead 10 includes a first or upper substrate 12 and a second or lower substrate 14.
  • the substrates are formed of a hydrophilic semiconductor material, preferably silicon.
  • Upper substrate 12 is a channel plate having elongated V-shaped channels 16 formed in the bottom surface thereof by ODE techniques, for example, as disclosed in U.S. Patents Re. 32,572 and 4,947,192, whose contents are hereby incorporated by reference.
  • Lower substrate 14 is a heater plate having a plurality of resistive heater elements 15 formed in an upper surface thereof.
  • the heater elements 15 of plate 14 correspond in number and position to the channels 16 in channel plate 12.
  • the upper surface of the heater plate typically includes a polymeric insulative layer 17 which is patterned to form recesses exposing the individual heating elements.
  • This polymeric insulative layer is referred to as a "pit layer" and is sandwiched between the channel plate and heater plate so that the nozzle-containing front face 20 has three layers: the channel plate 12, the pit layer 17 and the heater plate 14.
  • the nozzle-containing front face 20 has three layers: the channel plate 12, the pit layer 17 and the heater plate 14.
  • the elongated channels 16 may be formed as part of the polymeric insulative layer 17. If this is the case, the channels have substantially rectangular cross sections. In such cases, the nozzle openings 18 may be formed by a subsequent dicing cut. Alternatively, the design may be such that the polymer channels close at the dice cut, and the nozzles 18 may be subsequently opened by laser ablation.
  • Channel plate 12 is bonded to layer 17 and heater plate 14 such that the resistive heater elements face the channels 16.
  • Channels 16 define ink channels which communicate with an ink manifold (not shown).
  • a hydrophobic coating 22 is provided on the printhead front face 20.
  • Coating 22 thickness not to scale
  • Regions 28, 30 are portions of front face 20 which have been modified to increase the surface hydrophilicity by a process described below.
  • hydrophilic regions 28-30 can be modified by extending hydrophilic fingers 32 into hydrophobic regions 26 to enhance "wicking" away from the nozzles. As shown in FIG. 1, the hydrophilic fingers 32 may extend to regions between adjacent nozzles.
  • coating 22 is a relatively hydrophilic diamond-like carbon (DLC) film fluorinated to render it hydrophobic using, for example, the process disclosed in U.S. Patent 5,073,785.
  • the fluorinated carbon is of the formula CF x , x representing the number of fluorine atoms.
  • the coating has a thickness of between 10-100 nm and preferably 50 nm. Coating 22, when first formed, covers the entire front face of the printhead. Portions of coating 22 are selectively removed by laser ablation through a mask as shown in FIG. 3 leaving regions 28, 30.
  • an optical system 27 such as an excimer laser with beam shaping optics, directs an intense, UV ablating beam of radiation onto mask 33 which is patterned to allow light to be transmitted through the top and bottom segments aligned with region 28, 30.
  • the ablating beam removes regions 22A, 22B of initially formed coating 22 exposing the underlying regions 28, 30; e.g., the exposed hydrophilic silicon surface of printhead face 20.
  • the printhead 10 is enclosed within a chamber 50 having an inlet 31 connected to a polar reactive gas source 34 such as ozone or chlorine.
  • a polar reactive gas source 34 such as ozone or chlorine.
  • ozone is introduced into chamber 50 during the laser ablation of areas 22A, 22B.
  • the hydrophilicity of exposed regions 28, 30 is higher than before the ablation, thereby increasing the effectiveness of ink wicked away from hydrophobic areas 26.
  • the ink disposal can be further enhanced by modifying the regions 28-30 to form the fingers 32, shown in FIG. 1, using an appropriately tailored mask.
  • the nozzles 18 can be formed by a subsequent laser ablation masking step as is known in the art.
  • the FIG. 2 embodiment can have a coating applied to the front face, of a low surface energy material which is already strongly hydrophobic.
  • Preferred materials are TEFLON-like materials such as polytetrafluoroethylene (PTFE), fluorinated ethylenepropylene copolymer (FEP), perfluorovinylalkylethertetrafluoroethylene copolymer (PFA TEFLON), copolymers thereof, and the like.
  • TEFLON-like materials include those fluoropolymers sold under the tradename CYTOPTM and FLUORADTM.
  • a film 40 approximately 10-75 ⁇ thick of a high energy material is bonded to the printhead front face.
  • Preferred materials for film 40 are polymers including polysulfones, polyethersulfones, polyphenylsulfones, polyimides, polycarbonates, polyesters or mixtures thereof.
  • the bottom surface 41 of film 40 is roughened to increase bonding adhesion by a very short exposure etch to a nitrous oxide plasma. The roughening also improves the wetting characteristic of the film and reduces air entrapment at the front face - film 40 interface.
  • the exposed surface of film 40 is then fluorinated by the process described above reducing the exposed surface energy.
  • Film 40 can then be characterized as having a first surface layer 42 of approximately 50 nm, which is hydrophobic, and an underlying base layer 43.
  • FIG. 4B shows film 40 following a patterned laser ablation step which is controlled to remove fluorinated layer 42 from peripheral regions to expose the top surface of base layer 43. It will thus be appreciated that hydrophobic regions (surface of layer 43) are adjacent to hydrophilic regions (surface of layer 42) thus establishing a wicking path for ink to wick away from the areas surrounding the nozzles.
  • a variation of this embodiment shown in FIG. 5 is to bond film 40 to the printhead face, as shown in FIG. 4A and coat the top surface of the film with a very thin hydrophobic film 45 using any of the TEFLON-like materials listed for the FIG. 2 embodiment or forming a fluorinated CF x film on the film 40 surface.
  • the peripheral areas are again laser ablated to remove a portion of coating 45 (dotted line) to expose the underlying surface of film 40.
  • FIG. 6 shows an alternate embodiment where only a portion of the exposed surface of film 40' is fluorinated.
  • a hydrophobic layer 42' is formed, as shown, which is adjacent the non-fluorinated surface of the film.
  • a hydrophobic region fluorinated surface of layer 42'
  • a hydrophilic region unfluorinated surface of film 40'.
  • the narrow hydrophilic fingers 32 shown in FIG. 1 can be added to enhance the ink wicking process.
  • the laser ablation of the thin film performed with an ozone chamber could be modified to ablate the bare printhead face surface placed in contact with ozone or other polar reactive gas.
EP98303121A 1997-06-05 1998-04-23 Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes Withdrawn EP0882593A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US869945 1992-04-17
US86994597A 1997-06-05 1997-06-05

Publications (1)

Publication Number Publication Date
EP0882593A1 true EP0882593A1 (de) 1998-12-09

Family

ID=25354491

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98303121A Withdrawn EP0882593A1 (de) 1997-06-05 1998-04-23 Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes

Country Status (2)

Country Link
EP (1) EP0882593A1 (de)
JP (1) JPH10337874A (de)

Cited By (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001072423A1 (de) * 2000-03-28 2001-10-04 NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen Mikrofluidkomponente und verfahren zur oberflächenbehandlung einer solchen
EP1366905A1 (de) * 2002-04-11 2003-12-03 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Tintenstrahlkopfes
EP1426186A1 (de) * 2002-12-02 2004-06-09 Xerox Corporation Tintenstrahlgerät
WO2006036307A2 (en) * 2004-08-04 2006-04-06 Biotrove, Inc. Method and system for registering dispenser array location
WO2006105571A1 (en) * 2005-04-04 2006-10-12 Silverbrook Research Pty Ltd Method of hydrophobically coating a printhead
US7328976B2 (en) 2005-04-04 2008-02-12 Silverbrook Research Pty Ltd. Hydrophobically coated printhead
US7344226B2 (en) 2005-04-04 2008-03-18 Silverbrook Research Pty Ltd Method of hydrophobically coating a printhead
WO2008109910A1 (en) * 2007-03-12 2008-09-18 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
US7568787B2 (en) 2007-03-12 2009-08-04 Silverbrook Research Pty Ltd Printhead including seal membrane
US7605009B2 (en) 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
US7666360B2 (en) 1999-03-19 2010-02-23 Biotrove, Inc. Multi-through hole testing plate for high throughput screening
US7669967B2 (en) 2007-03-12 2010-03-02 Silverbrook Research Pty Ltd Printhead having hydrophobic polymer coated on ink ejection face
US7682565B2 (en) 2002-12-20 2010-03-23 Biotrove, Inc. Assay apparatus and method using microfluidic arrays
WO2010060129A1 (en) * 2008-11-26 2010-06-03 Silverbrook Research Pty Ltd Inkjet nozzle assembly having moving roof structure and sealing bridge
US7833719B2 (en) 2000-02-18 2010-11-16 The Board Of Trustees Of The Leland Stanford Junior University Apparatus and methods for parallel processing of micro-volume liquid reactions
US7862734B2 (en) 2008-11-26 2011-01-04 Silverbrook Research Pty Ltd Method of fabricating nozzle assembly having moving roof structure and sealing bridge
US7901054B2 (en) 2008-11-26 2011-03-08 Silverbrook Research Pty Ltd Printhead including moving portions and sealing bridges
US7938974B2 (en) 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US7976132B2 (en) 2007-03-12 2011-07-12 Silverbrook Research Pty Ltd Printhead having moving roof structure and mechanical seal
US8029097B2 (en) 2008-11-26 2011-10-04 Silverbrook Research Pty Ltd Inkjet nozzle assembly having moving roof structure and sealing bridge
US8029745B2 (en) 1998-01-12 2011-10-04 Massachusetts Institute Of Technology Systems for filling a sample array by droplet dragging
US8105554B2 (en) 2004-03-12 2012-01-31 Life Technologies Corporation Nanoliter array loading
US8448904B2 (en) 2007-03-09 2013-05-28 Macdonald Dettwiler & Associates Inc. Robotic satellite refuelling tool
US8685340B2 (en) 2002-08-23 2014-04-01 Life Technologies Corporation Microfluidic transfer pin
US20140292932A1 (en) * 2013-03-28 2014-10-02 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US8876255B2 (en) 2012-07-31 2014-11-04 Hewlett-Packard Development Company, L.P. Orifice structure for fluid ejection device and method of forming same
WO2017065774A1 (en) * 2015-10-15 2017-04-20 Hewlett-Packard Development Company, L.P. Service structures in print heads
US10213761B2 (en) 2004-08-04 2019-02-26 Life Technologies Corporation Coating process for microfluidic sample arrays
US11203202B1 (en) 2020-08-31 2021-12-21 Xerox Corporation System and method for attenuating ink smears on printhead faceplates during inkjet printhead maintenance

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4087085B2 (ja) 2001-07-06 2008-05-14 株式会社日立製作所 インクジェットヘッド
KR100468859B1 (ko) * 2002-12-05 2005-01-29 삼성전자주식회사 일체형 잉크젯 프린트헤드 및 그 제조방법
WO2006105581A1 (en) 2005-04-04 2006-10-12 Silverbrook Research Pty Ltd Printhead assembly suitable for redirecting ejected ink droplets
US7377620B2 (en) 2005-05-26 2008-05-27 Hewlett-Packard Development Company, L.P. Hydrophobic nozzle exit with improved micro fluid ejection dynamics

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4463359A (en) 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4568953A (en) 1982-12-28 1986-02-04 Canon Kabushiki Kaisha Liquid injection recording apparatus
US4947192A (en) 1988-03-07 1990-08-07 Xerox Corporation Monolithic silicon integrated circuit chip for a thermal ink jet printer
EP0389217A2 (de) * 1989-03-20 1990-09-26 Xaar Limited Vorbereitung einer Oberfläche mit Lösemittel annehmenden und nichtannehmenden Zonen
US5073785A (en) 1990-04-30 1991-12-17 Xerox Corporation Coating processes for an ink jet printhead
US5208606A (en) 1991-11-21 1993-05-04 Xerox Corporation Directionality of thermal ink jet transducers by front face metalization
US5212496A (en) 1990-09-28 1993-05-18 Xerox Corporation Coated ink jet printhead
US5218381A (en) 1992-04-28 1993-06-08 Xerox Corporation Hydrophobic coating for a front face of a printhead in an ink jet printer
JPH06344560A (ja) * 1993-06-07 1994-12-20 Canon Inc インクジェット記録ヘッドの表面処理方法
US5378137A (en) 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
EP0694400A2 (de) * 1994-07-29 1996-01-31 Canon Kabushiki Kaisha Farbstrahldruckkopf, Farbstrahldruckkopfpatrone, Farbstrahlauszeichnungsapparat und Verfahren zum Herstellen des Kopfes

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4463359A (en) 1979-04-02 1984-07-31 Canon Kabushiki Kaisha Droplet generating method and apparatus thereof
US4568953A (en) 1982-12-28 1986-02-04 Canon Kabushiki Kaisha Liquid injection recording apparatus
US4947192A (en) 1988-03-07 1990-08-07 Xerox Corporation Monolithic silicon integrated circuit chip for a thermal ink jet printer
EP0389217A2 (de) * 1989-03-20 1990-09-26 Xaar Limited Vorbereitung einer Oberfläche mit Lösemittel annehmenden und nichtannehmenden Zonen
US5073785A (en) 1990-04-30 1991-12-17 Xerox Corporation Coating processes for an ink jet printhead
US5212496A (en) 1990-09-28 1993-05-18 Xerox Corporation Coated ink jet printhead
US5208606A (en) 1991-11-21 1993-05-04 Xerox Corporation Directionality of thermal ink jet transducers by front face metalization
US5218381A (en) 1992-04-28 1993-06-08 Xerox Corporation Hydrophobic coating for a front face of a printhead in an ink jet printer
US5378137A (en) 1993-05-10 1995-01-03 Hewlett-Packard Company Mask design for forming tapered inkjet nozzles
JPH06344560A (ja) * 1993-06-07 1994-12-20 Canon Inc インクジェット記録ヘッドの表面処理方法
EP0694400A2 (de) * 1994-07-29 1996-01-31 Canon Kabushiki Kaisha Farbstrahldruckkopf, Farbstrahldruckkopfpatrone, Farbstrahlauszeichnungsapparat und Verfahren zum Herstellen des Kopfes

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 095, no. 003 28 April 1995 (1995-04-28) *

Cited By (60)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8029745B2 (en) 1998-01-12 2011-10-04 Massachusetts Institute Of Technology Systems for filling a sample array by droplet dragging
US10195579B2 (en) 1999-03-19 2019-02-05 Life Technologies Corporation Multi-through hole testing plate for high throughput screening
US7666360B2 (en) 1999-03-19 2010-02-23 Biotrove, Inc. Multi-through hole testing plate for high throughput screening
US7833719B2 (en) 2000-02-18 2010-11-16 The Board Of Trustees Of The Leland Stanford Junior University Apparatus and methods for parallel processing of micro-volume liquid reactions
WO2001072423A1 (de) * 2000-03-28 2001-10-04 NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen Mikrofluidkomponente und verfahren zur oberflächenbehandlung einer solchen
EP1366905A1 (de) * 2002-04-11 2003-12-03 Canon Kabushiki Kaisha Verfahren zur Herstellung eines Tintenstrahlkopfes
US6766579B2 (en) 2002-04-11 2004-07-27 Canon Kabushiki Kaisha Method for manufacturing an ink jet head
US8685340B2 (en) 2002-08-23 2014-04-01 Life Technologies Corporation Microfluidic transfer pin
EP1426186A1 (de) * 2002-12-02 2004-06-09 Xerox Corporation Tintenstrahlgerät
US7682565B2 (en) 2002-12-20 2010-03-23 Biotrove, Inc. Assay apparatus and method using microfluidic arrays
US8697452B2 (en) 2002-12-20 2014-04-15 Life Technologies Corporation Thermal cycling assay apparatus and method
US9428800B2 (en) 2002-12-20 2016-08-30 Life Technologies Corporation Thermal cycling apparatus and method
US8105554B2 (en) 2004-03-12 2012-01-31 Life Technologies Corporation Nanoliter array loading
US10974247B2 (en) 2004-03-12 2021-04-13 Life Technologies Corporation Nanoliter array loading
US10065189B2 (en) 2004-03-12 2018-09-04 Life Technologies Corporation Nanoliter array loading
US9266108B2 (en) 2004-03-12 2016-02-23 Life Technologies Corporation Nanoliter array loading
US8545772B2 (en) 2004-03-12 2013-10-01 Life Technologies Corporation Nanoliter array loading
US10213761B2 (en) 2004-08-04 2019-02-26 Life Technologies Corporation Coating process for microfluidic sample arrays
EP1782075B1 (de) * 2004-08-04 2023-10-04 Life Technologies Corporation Verfahren zum unterschiedlichen beschichten eines substrats
WO2006036307A2 (en) * 2004-08-04 2006-04-06 Biotrove, Inc. Method and system for registering dispenser array location
US11154834B2 (en) 2004-08-04 2021-10-26 Life Technologies Corporation Coating process for microfluidic sample arrays
WO2006036307A3 (en) * 2004-08-04 2006-08-17 Biotrove Inc Method and system for registering dispenser array location
US7469997B2 (en) 2005-04-04 2008-12-30 Silverbrook Research Pty Ltd Printhead unit cell incorporating suspended looped heater element
US7344226B2 (en) 2005-04-04 2008-03-18 Silverbrook Research Pty Ltd Method of hydrophobically coating a printhead
US7328976B2 (en) 2005-04-04 2008-02-12 Silverbrook Research Pty Ltd. Hydrophobically coated printhead
US7901050B2 (en) 2005-04-04 2011-03-08 Silverbrook Research Pty Ltd Printhead integrated circuit with suspended heater elements
WO2006105571A1 (en) * 2005-04-04 2006-10-12 Silverbrook Research Pty Ltd Method of hydrophobically coating a printhead
US7677704B2 (en) 2005-04-04 2010-03-16 Silverbrook Research Pty Ltd Printhead unit cell having welled heater element
US7984975B2 (en) 2005-04-04 2011-07-26 Silverbrook Research Pty Ltd Printhead nozzle cell having photoresist chamber
US7594713B2 (en) 2005-04-04 2009-09-29 Silverbrook Research Pty Ltd Inkjet printer with unit cells having suspended heater elements
US7984972B2 (en) 2005-04-04 2011-07-26 Silverbrook Research Pty Ltd Printhead unit cell having rimmed nozzle plate
US8448904B2 (en) 2007-03-09 2013-05-28 Macdonald Dettwiler & Associates Inc. Robotic satellite refuelling tool
EP2121330A1 (de) * 2007-03-12 2009-11-25 Silverbrook Research Pty. Ltd Verfahren zur herstellung eines druckkopfs mit hydrophober tintenausstossfläche
US7934807B2 (en) 2007-03-12 2011-05-03 Silverbrook Research Pty Ltd Printhead integrated circuit comprising polymeric cover layer
US8025365B2 (en) 2007-03-12 2011-09-27 Silverbrook Research Pty Ltd MEMS integrated circuit with polymerized siloxane layer
US7986039B2 (en) 2007-03-12 2011-07-26 Silverbrook Research Pty Ltd Wafer assembly comprising MEMS wafer with polymerized siloxane attachment surface
US8277024B2 (en) 2007-03-12 2012-10-02 Zamtec Limited Printhead integrated circuit having exposed active beam coated with polymer layer
EP2121330A4 (de) * 2007-03-12 2013-01-23 Verfahren zur herstellung eines druckkopfs mit hydrophober tintenausstossfläche
US7976132B2 (en) 2007-03-12 2011-07-12 Silverbrook Research Pty Ltd Printhead having moving roof structure and mechanical seal
US7794613B2 (en) 2007-03-12 2010-09-14 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
US7605009B2 (en) 2007-03-12 2009-10-20 Silverbrook Research Pty Ltd Method of fabrication MEMS integrated circuits
US7938974B2 (en) 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US8672454B2 (en) 2007-03-12 2014-03-18 Zamtec Ltd Ink printhead having ceramic nozzle plate defining movable portions
US7669967B2 (en) 2007-03-12 2010-03-02 Silverbrook Research Pty Ltd Printhead having hydrophobic polymer coated on ink ejection face
US7568787B2 (en) 2007-03-12 2009-08-04 Silverbrook Research Pty Ltd Printhead including seal membrane
CN101610909B (zh) * 2007-03-12 2010-12-29 西尔弗布鲁克研究股份有限公司 制造具有疏水喷墨面的打印头的方法以及打印头
WO2008109910A1 (en) * 2007-03-12 2008-09-18 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
US7862734B2 (en) 2008-11-26 2011-01-04 Silverbrook Research Pty Ltd Method of fabricating nozzle assembly having moving roof structure and sealing bridge
US8029097B2 (en) 2008-11-26 2011-10-04 Silverbrook Research Pty Ltd Inkjet nozzle assembly having moving roof structure and sealing bridge
US7901054B2 (en) 2008-11-26 2011-03-08 Silverbrook Research Pty Ltd Printhead including moving portions and sealing bridges
KR101311281B1 (ko) * 2008-11-26 2013-09-25 잼텍 리미티드 이동식 천정부 구조와 씰링 브리지를 갖는 잉크젯 노즐 조립체
US8500247B2 (en) 2008-11-26 2013-08-06 Zamtec Ltd Nozzle assembly having polymeric coating on moving and stationary portions of roof
WO2010060129A1 (en) * 2008-11-26 2010-06-03 Silverbrook Research Pty Ltd Inkjet nozzle assembly having moving roof structure and sealing bridge
US8876255B2 (en) 2012-07-31 2014-11-04 Hewlett-Packard Development Company, L.P. Orifice structure for fluid ejection device and method of forming same
US20140292932A1 (en) * 2013-03-28 2014-10-02 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US9272516B2 (en) * 2013-03-28 2016-03-01 Seiko Epson Corporation Liquid ejecting head and liquid ejecting apparatus
US10369793B2 (en) 2015-10-15 2019-08-06 Hewlett-Packard Development Company, L.P. Service structures in print heads
CN108136784A (zh) * 2015-10-15 2018-06-08 惠普发展公司，有限责任合伙企业 印刷头中的维护结构
WO2017065774A1 (en) * 2015-10-15 2017-04-20 Hewlett-Packard Development Company, L.P. Service structures in print heads
US11203202B1 (en) 2020-08-31 2021-12-21 Xerox Corporation System and method for attenuating ink smears on printhead faceplates during inkjet printhead maintenance

Also Published As

Publication number Publication date
JPH10337874A (ja) 1998-12-22

Similar Documents

Publication Publication Date Title
EP0882593A1 (de) Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes
JP3245193B2 (ja) インクジェットプリンタの印字ヘッド
US5949454A (en) Ink jet head, ink jet head cartridge, ink jet recording apparatus and method for making ink jet head
JP3340154B2 (ja) オリフィス・プレートの作成方法及びインクジェット・ペン
US5119116A (en) Thermal ink jet channel with non-wetting walls and a step structure
EP0468712B1 (de) Herstellungsverfahren eines Tintenstrahlaufzeichnungskopfes und Tintenstrahlaufzeichnungskopf
JP5317986B2 (ja) 液体射出器上の非湿潤性コーティングのパターン及び装置
JPH04234663A (ja) サーマル・インク・ジェット・ノズルの処理
EP0937579A2 (de) Tintenstrahlkopf und sein Herstellungsverfahren, Aufflussöffnungsplatte für diesen Kopf und sein Herstellungsverfahren, und Tintenstrahlgerät damit versehen
JPH10291317A (ja) インクジェット・プリンタのノズル・プレート
JP3348744B2 (ja) ノズルプレート製造方法
WO2008029650A1 (en) Liquid discharge head and method of manufacturing the same
US8708458B2 (en) Superoleophobic glass devices and their methods
KR20060082412A (ko) 액체 토출 헤드, 액체 토출 장치 및 액체 토출 헤드의 제조방법
JP2001058413A (ja) インキジェットプリントヘッド及びその製造方法
JPH0577425A (ja) ノズルプレートおよびその製造方法
IL168176A (en) Ink jet printhead incorporating an array of nozzle assemblies
EP0661158B1 (de) Tintenstrahldrucken
JP7071159B2 (ja) 液体吐出ヘッド用基板
WO1994008793A1 (en) Ink jet head having improved jet port surface, and ink jet apparatus equipped with the ink jet head
KR100530252B1 (ko) 프린트 매체 제품
JP2004042399A (ja) インクジェット記録ヘッド
JP2791228B2 (ja) インクジェットヘッドの製造方法及びインクジェットヘッド
KR100428650B1 (ko) 잉크젯 프린터의 헤드 제조방법
JP4354777B2 (ja) オリフィス板を被覆するための方法

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): DE FR GB

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

17P Request for examination filed

Effective date: 19990609

AKX Designation fees paid

Free format text: DE FR GB

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN

18W Application withdrawn

Withdrawal date: 19990329