DE602004020826D1 - Verfahren zur Herstellung von einem piezoelektrischen Aktuator eines Tintenstrahldruckkopfes - Google Patents

Verfahren zur Herstellung von einem piezoelektrischen Aktuator eines Tintenstrahldruckkopfes

Info

Publication number
DE602004020826D1
DE602004020826D1 DE200460020826 DE602004020826T DE602004020826D1 DE 602004020826 D1 DE602004020826 D1 DE 602004020826D1 DE 200460020826 DE200460020826 DE 200460020826 DE 602004020826 T DE602004020826 T DE 602004020826T DE 602004020826 D1 DE602004020826 D1 DE 602004020826D1
Authority
DE
Germany
Prior art keywords
making
ink jet
piezoelectric actuator
jet printhead
printhead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE200460020826
Other languages
English (en)
Inventor
Seung-Mo Lim
Jae-Chang Lee
Jae-Woo Chung
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of DE602004020826D1 publication Critical patent/DE602004020826D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047—Membrane type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
DE200460020826 2003-03-20 2004-03-19 Verfahren zur Herstellung von einem piezoelektrischen Aktuator eines Tintenstrahldruckkopfes Expired - Lifetime DE602004020826D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR10-2003-0017388A KR100519764B1 (ko) 2003-03-20 2003-03-20 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법

Publications (1)

Publication Number Publication Date
DE602004020826D1 true DE602004020826D1 (de) 2009-06-10

Family

ID=32822745

Family Applications (1)

Application Number Title Priority Date Filing Date
DE200460020826 Expired - Lifetime DE602004020826D1 (de) 2003-03-20 2004-03-19 Verfahren zur Herstellung von einem piezoelektrischen Aktuator eines Tintenstrahldruckkopfes

Country Status (5)

Country Link
US (1) US7364275B2 (de)
EP (1) EP1459900B1 (de)
JP (3) JP4522116B2 (de)
KR (1) KR100519764B1 (de)
DE (1) DE602004020826D1 (de)

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WO2007001063A1 (ja) * 2005-06-29 2007-01-04 Ngk Insulators, Ltd. 圧電／電歪膜型素子
KR100745758B1 (ko) 2006-01-21 2007-08-02 삼성전자주식회사 압전 액츄에이터를 채용한 잉크젯 프린트헤드
KR100682964B1 (ko) * 2006-02-09 2007-02-15 삼성전자주식회사 잉크젯 헤드의 압전 액츄에이터 형성 방법
KR101179335B1 (ko) * 2006-02-17 2012-09-03 삼성전기주식회사 스크린 프린팅에 의한 후막 형성 방법 및 잉크젯 헤드의압전 액츄에이터 형성 방법
KR101153690B1 (ko) 2006-02-20 2012-06-18 삼성전기주식회사 잉크젯 헤드의 압전 액츄에이터 및 그 형성 방법
KR101257840B1 (ko) * 2006-07-19 2013-04-29 삼성디스플레이 주식회사 리스트릭터용 압전 액츄에이터를 구비한 잉크젯 헤드
TWI318894B (en) * 2006-08-07 2010-01-01 Ind Tech Res Inst System for fabricating nano particles
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US8245135B2 (en) * 2009-09-08 2012-08-14 International Business Machines Corporation Producing a visual summarization of text documents
JP5556514B2 (ja) * 2010-09-06 2014-07-23 日立金属株式会社 圧電体薄膜ウェハの製造方法、圧電体薄膜素子、及び圧電体薄膜デバイス
JP5743069B2 (ja) * 2011-03-15 2015-07-01 セイコーエプソン株式会社 圧電素子、液体噴射ヘッド、および液体噴射装置
JP5766003B2 (ja) * 2011-04-26 2015-08-19 京セラ株式会社 液体吐出ヘッド、およびそれを用いた記録装置
KR20130060501A (ko) 2011-11-30 2013-06-10 삼성전기주식회사 압전 액추에이터, 잉크젯 헤드 어셈블리 및 그 제조방법
JP6182968B2 (ja) * 2012-08-14 2017-08-23 株式会社リコー 電気機械変換素子、液滴吐出ヘッド、画像形成装置及び電気機械変換素子の製造方法
KR20140081571A (ko) 2012-12-21 2014-07-01 삼성전기주식회사 압전 액추에이터, 잉크젯 헤드 어셈블리 및 그 제조방법
JP6332738B2 (ja) * 2013-06-19 2018-05-30 株式会社リコー アクチュエータ及びその製造方法、並びに、そのアクチュエータを備えた液滴吐出ヘッド、液滴吐出装置及び画像形成装置
KR20150023086A (ko) * 2013-08-22 2015-03-05 (주)와이솔 압전 소자 기반 진동 모듈
JP2015074174A (ja) 2013-10-09 2015-04-20 株式会社リコー 圧電素子、液滴吐出ヘッド、液滴吐出装置、画像形成装置及び圧電素子の製造方法
JP6311339B2 (ja) * 2014-02-13 2018-04-18 セイコーエプソン株式会社 流路構造体、液体噴射ヘッドおよび液体噴射装置
JP6256101B2 (ja) * 2014-02-28 2018-01-10 セイコーエプソン株式会社 液体噴射ヘッド、及び、液体噴射装置
GB2550411B (en) * 2016-05-20 2019-04-03 Hp1 Tech Ltd Device for detecting a force
JP6690431B2 (ja) * 2016-06-22 2020-04-28 株式会社リコー アクチュエータ、液体吐出ヘッド、液体吐出ユニット、液体を吐出する装置
EP4275032A1 (de) 2021-01-11 2023-11-15 Vib Vzw Mittel und verfahren zur zeitaufgelösten abtastung

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Also Published As

Publication number Publication date
JP4522116B2 (ja) 2010-08-11
JP2010132008A (ja) 2010-06-17
JP2004284363A (ja) 2004-10-14
JP5037565B2 (ja) 2012-09-26
US20040246313A1 (en) 2004-12-09
KR100519764B1 (ko) 2005-10-07
KR20040082740A (ko) 2004-09-30
US7364275B2 (en) 2008-04-29
EP1459900A1 (de) 2004-09-22
EP1459900B1 (de) 2009-04-29
JP2009196376A (ja) 2009-09-03
JP5002030B2 (ja) 2012-08-15

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Owner name: SAMSUNG ELECTRO-MECHANICS CO., LTD., SUWON, GY, KR