JP6256101B2 - 液体噴射ヘッド、及び、液体噴射装置 - Google Patents
液体噴射ヘッド、及び、液体噴射装置 Download PDFInfo
- Publication number
- JP6256101B2 JP6256101B2 JP2014037678A JP2014037678A JP6256101B2 JP 6256101 B2 JP6256101 B2 JP 6256101B2 JP 2014037678 A JP2014037678 A JP 2014037678A JP 2014037678 A JP2014037678 A JP 2014037678A JP 6256101 B2 JP6256101 B2 JP 6256101B2
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- JP
- Japan
- Prior art keywords
- pressure chamber
- width
- electrode film
- piezoelectric layer
- lower electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/14266—Sheet-like thin film type piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14459—Matrix arrangement of the pressure chambers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14491—Electrical connection
Description
前記圧力室形成部材における前記空間の開口を封止して圧力室を区画した振動板に対し、前記振動板側から順に第1の電極層、圧電体層および第2の電極層が積層された圧電素子と、を備え、
前記圧力室に対応する領域において、前記第1の方向に前記圧力室の幅の50%以上、80%以下の幅で形成された前記第1の電極層と、前記第1の方向に前記第1の電極層を覆い且つ前記圧力室の幅の90%以下の幅で形成された前記圧電体層と、を備えたことを特徴とする。
すなわち、ノズルに連通して圧力室となるべき空間が第1の方向に複数並設された圧力室形成基板と、
前記圧力室形成部材における前記空間の開口を封止して圧力室を区画した振動板に対し、前記振動板側から順に第1の電極層、圧電体層および第2の電極層が積層された圧電素子と、を備え、
前記圧力室に対応する領域において、前記第1の方向に前記圧力室の幅の54%以上、72%以下の幅で形成された前記第1の電極層と、前記第1の方向に前記第1の電極層を覆い且つ前記圧力室の幅の80%以下の幅で形成された前記圧電体層と、を備えたことが望ましい。
Claims (2)
- ノズルに連通して圧力室となるべき空間が第1の方向に複数並設された圧力室形成基板と、
前記圧力室形成部材における前記空間の開口を封止して圧力室を区画した振動板に対し、前記振動板側から順に第1の電極層、圧電体層および第2の電極層が積層された圧電素子と、を備え、
前記圧力室に対応する領域において、前記第1の方向に前記圧力室の幅の54%以上、72%以下の幅で形成された前記第1の電極層と、前記第1の方向に前記第1の電極層を覆い且つ前記圧力室の幅の80%以下の幅で形成された前記圧電体層と、を備えたことを特徴とする液体噴射ヘッド。 - 請求項1に記載の液体噴射ヘッドを備えたことを特徴とする液体噴射装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014037678A JP6256101B2 (ja) | 2014-02-28 | 2014-02-28 | 液体噴射ヘッド、及び、液体噴射装置 |
US14/627,845 US9266327B2 (en) | 2014-02-28 | 2015-02-20 | Liquid ejecting head and liquid ejecting apparatus |
EP15156943.1A EP2913187B1 (en) | 2014-02-28 | 2015-02-27 | Liquid ejecting head and liquid ejecting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014037678A JP6256101B2 (ja) | 2014-02-28 | 2014-02-28 | 液体噴射ヘッド、及び、液体噴射装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017227387A Division JP6418311B2 (ja) | 2017-11-28 | 2017-11-28 | アクチュエーター、及び、センサー |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015160395A JP2015160395A (ja) | 2015-09-07 |
JP6256101B2 true JP6256101B2 (ja) | 2018-01-10 |
Family
ID=52577780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014037678A Active JP6256101B2 (ja) | 2014-02-28 | 2014-02-28 | 液体噴射ヘッド、及び、液体噴射装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9266327B2 (ja) |
EP (1) | EP2913187B1 (ja) |
JP (1) | JP6256101B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017052254A (ja) * | 2015-09-11 | 2017-03-16 | セイコーエプソン株式会社 | 圧電デバイス、液体噴射ヘッド、液体噴射装置及び圧電デバイスの製造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3221470B2 (ja) * | 1993-11-29 | 2001-10-22 | セイコーエプソン株式会社 | インクジェットヘッド、及びその製造方法 |
JP3196811B2 (ja) * | 1994-10-17 | 2001-08-06 | セイコーエプソン株式会社 | 積層型インクジェット式記録ヘッド、及びその製造方法 |
JPH10217466A (ja) * | 1997-02-12 | 1998-08-18 | Ricoh Co Ltd | インクジェットヘッド |
ATE303250T1 (de) * | 1998-06-08 | 2005-09-15 | Seiko Epson Corp | Tintenstrahlaufzeichnungskopf und tintenstrahlaufzeichnungsvorrichtung |
US6478412B1 (en) | 1999-01-22 | 2002-11-12 | Kansai Research Institute | Piezoelectric thin film device, its production method, and ink-jet recording head |
JP2001026106A (ja) * | 1999-07-15 | 2001-01-30 | Fujitsu Ltd | インクジェットヘッドおよびインクジェットプリンタ |
DE10161388A1 (de) | 2001-12-14 | 2003-07-03 | Bayer Ag | Ventil |
KR100519764B1 (ko) | 2003-03-20 | 2005-10-07 | 삼성전자주식회사 | 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법 |
JP5278654B2 (ja) | 2008-01-24 | 2013-09-04 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置 |
JP5061990B2 (ja) | 2008-03-27 | 2012-10-31 | セイコーエプソン株式会社 | 液体噴射ヘッド及び液体噴射装置並びにアクチュエータ |
US8348396B2 (en) * | 2011-06-09 | 2013-01-08 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
-
2014
- 2014-02-28 JP JP2014037678A patent/JP6256101B2/ja active Active
-
2015
- 2015-02-20 US US14/627,845 patent/US9266327B2/en active Active
- 2015-02-27 EP EP15156943.1A patent/EP2913187B1/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20150246538A1 (en) | 2015-09-03 |
US9266327B2 (en) | 2016-02-23 |
EP2913187B1 (en) | 2019-07-17 |
EP2913187A3 (en) | 2015-12-30 |
EP2913187A2 (en) | 2015-09-02 |
JP2015160395A (ja) | 2015-09-07 |
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