JP5002030B2 - インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 - Google Patents
インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 Download PDFInfo
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- JP5002030B2 JP5002030B2 JP2010061365A JP2010061365A JP5002030B2 JP 5002030 B2 JP5002030 B2 JP 5002030B2 JP 2010061365 A JP2010061365 A JP 2010061365A JP 2010061365 A JP2010061365 A JP 2010061365A JP 5002030 B2 JP5002030 B2 JP 5002030B2
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- piezoelectric
- piezoelectric film
- pressure chamber
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- piezoelectric actuator
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Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
111 ベース基板
112 チャンバ形成基板
113 振動板
114 圧力チャンバ
115 シリコン酸化膜
121 下部電極
121a Ti層
121b Pt層
122 圧電膜
123 上部電極
Claims (2)
- 圧力チャンバの上部壁をなす振動板の上部に形成され、前記振動板を変形させることによって前記圧力チャンバにインクの吐き出しのための駆動力を提供するインクジェットプリントヘッドの圧電アクチュエータにおいて、 前記振動板上に形成される下部電極と、 前記下部電極上の前記圧力チャンバに対応する位置に前記下部電極よりも狭い範囲で形成され、周辺部の下面に垂直方向に所定の高さを有する段差が設けられ、前記段差により周辺部の下面が前記下部電極の上面よりも高い位置に位置することでその周辺部と前記下部電極との間に空間が形成された圧電膜と、 前記圧電膜の上部面の一部又は全体に形成されて前記圧電膜に電圧を印加する上部電極と、
を備えることを特徴とするインクジェットプリントヘッドの圧電アクチュエータ。 - 前記圧電膜の前記下部電極に接触する部位の幅は、前記圧力チャンバの幅の70〜90%であることを特徴とする請求項1に記載のインクジェットプリントヘッドの圧電アクチュエータ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2003-017388 | 2003-03-20 | ||
KR10-2003-0017388A KR100519764B1 (ko) | 2003-03-20 | 2003-03-20 | 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004081701A Division JP4522116B2 (ja) | 2003-03-20 | 2004-03-19 | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010132008A JP2010132008A (ja) | 2010-06-17 |
JP5002030B2 true JP5002030B2 (ja) | 2012-08-15 |
Family
ID=32822745
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004081701A Expired - Fee Related JP4522116B2 (ja) | 2003-03-20 | 2004-03-19 | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 |
JP2009139666A Expired - Fee Related JP5037565B2 (ja) | 2003-03-20 | 2009-06-10 | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 |
JP2010061365A Expired - Fee Related JP5002030B2 (ja) | 2003-03-20 | 2010-03-17 | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004081701A Expired - Fee Related JP4522116B2 (ja) | 2003-03-20 | 2004-03-19 | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 |
JP2009139666A Expired - Fee Related JP5037565B2 (ja) | 2003-03-20 | 2009-06-10 | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7364275B2 (ja) |
EP (1) | EP1459900B1 (ja) |
JP (3) | JP4522116B2 (ja) |
KR (1) | KR100519764B1 (ja) |
DE (1) | DE602004020826D1 (ja) |
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US6478412B1 (en) * | 1999-01-22 | 2002-11-12 | Kansai Research Institute | Piezoelectric thin film device, its production method, and ink-jet recording head |
IT1321312B1 (it) * | 2000-07-06 | 2004-01-08 | Casa Dolce Casa S P A | Tozzetto e metodo per la sua realizzazione. |
EP1338672B1 (en) * | 2000-10-03 | 2012-01-11 | Panasonic Corporation | Piezoelectric thin film and method for preparation thereof, piezoelectric element, ink-jet head, and ink-jet recording device |
JP3582475B2 (ja) * | 2000-10-27 | 2004-10-27 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
WO2002073710A1 (fr) * | 2001-03-12 | 2002-09-19 | Ngk Insulators,Ltd. | Actionneur a films piezo-electriques/electrostrictifs et son procede de fabrication |
JP3903936B2 (ja) * | 2002-03-18 | 2007-04-11 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエータ、及び、液体噴射ヘッド |
JP4305016B2 (ja) * | 2002-03-18 | 2009-07-29 | セイコーエプソン株式会社 | 圧電アクチュエータユニット、及び、それを用いた液体噴射ヘッド |
-
2003
- 2003-03-20 KR KR10-2003-0017388A patent/KR100519764B1/ko not_active IP Right Cessation
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2004
- 2004-03-19 DE DE200460020826 patent/DE602004020826D1/de not_active Expired - Lifetime
- 2004-03-19 EP EP20040251611 patent/EP1459900B1/en not_active Expired - Fee Related
- 2004-03-19 JP JP2004081701A patent/JP4522116B2/ja not_active Expired - Fee Related
- 2004-03-22 US US10/805,430 patent/US7364275B2/en not_active Expired - Fee Related
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2009
- 2009-06-10 JP JP2009139666A patent/JP5037565B2/ja not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
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JP2009196376A (ja) | 2009-09-03 |
KR100519764B1 (ko) | 2005-10-07 |
DE602004020826D1 (de) | 2009-06-10 |
JP5037565B2 (ja) | 2012-09-26 |
US7364275B2 (en) | 2008-04-29 |
US20040246313A1 (en) | 2004-12-09 |
JP2010132008A (ja) | 2010-06-17 |
KR20040082740A (ko) | 2004-09-30 |
JP4522116B2 (ja) | 2010-08-11 |
JP2004284363A (ja) | 2004-10-14 |
EP1459900A1 (en) | 2004-09-22 |
EP1459900B1 (en) | 2009-04-29 |
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