JP4386924B2 - インクジェットヘッドの圧電アクチュエータの形成方法 - Google Patents
インクジェットヘッドの圧電アクチュエータの形成方法 Download PDFInfo
- Publication number
- JP4386924B2 JP4386924B2 JP2007009116A JP2007009116A JP4386924B2 JP 4386924 B2 JP4386924 B2 JP 4386924B2 JP 2007009116 A JP2007009116 A JP 2007009116A JP 2007009116 A JP2007009116 A JP 2007009116A JP 4386924 B2 JP4386924 B2 JP 4386924B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- piezoelectric
- film
- piezoelectric actuator
- ink jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 43
- 230000001681 protective effect Effects 0.000 claims description 28
- 238000000151 deposition Methods 0.000 claims description 9
- 239000007769 metal material Substances 0.000 claims description 9
- 238000007650 screen-printing Methods 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 9
- 239000007772 electrode material Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 238000005245 sintering Methods 0.000 claims description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 5
- 239000011368 organic material Substances 0.000 claims description 5
- 239000004205 dimethyl polysiloxane Substances 0.000 claims description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 4
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000004380 ashing Methods 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000007599 discharging Methods 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 238000009694 cold isostatic pressing Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- -1 polydimethylsiloxane Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14201—Structure of print heads with piezoelectric elements
- B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
- B41J2002/1425—Embedded thin film piezoelectric element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/43—Electric condenser making
- Y10T29/435—Solid dielectric type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
110 流路プレート
113 圧力チャンバー
120 振動板
121 絶縁膜
130 ノズルプレート
141 下部電極
142 圧電膜
143 上部電極
150 保護膜
Claims (16)
- 振動板の上部に形成されて複数の圧力チャンバーそれぞれにインクの吐出のための駆動力を提供するインクジェットヘッドの圧電アクチュエータの形成方法において、
前記振動板上に下部電極を形成するステップと、
前記下部電極上に前記複数の圧力チャンバーそれぞれに対応する位置に圧電膜を形成するステップと、
前記下部電極と前記圧電膜とを覆う保護膜を形成するステップと、
前記保護膜と圧電膜との厚さを減少させつつ前記圧電膜の上面を露出させるステップと、
前記圧電膜の上面に上部電極を形成するステップと、
前記保護膜を除去するステップと、
を含むことを特徴とするインクジェットヘッドの圧電アクチュエータの形成方法。 - 前記振動板と前記下部電極との間には、絶縁膜が形成されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記絶縁膜は、シリコン酸化膜またはシリコン窒化膜であることを特徴とする請求項2に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記下部電極は、導電性金属物質を所定の厚さまで蒸着することによって形成されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記下部電極は、スパッタリングによりTi層とPt層とを順次に蒸着することによって形成されることを特徴とする請求項4に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記圧電膜は、ペースト状態の圧電物質をスクリーンプリンティングにより塗布することによって形成されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記圧電膜を形成するステップは、前記ペースト状態の圧電膜を乾燥させた後に焼結させる工程を含むことを特徴とする請求項6に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記ペースト状態の圧電膜を乾燥させた後、前記圧電膜の組織を緻密化するためにCIP工程を行うことを特徴とする請求項7に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記保護膜は、PDMS、PMMA及び感光性ポリマーからなる群のうち選択された有機物からなることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記保護膜は、前記有機物をスピンコーティング法により塗布することによって形成されることを特徴とする請求項9に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記保護膜と圧電膜との厚さの減少は、CMPまたはラッピングにより行われることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記上部電極は、前記圧電膜の上面にペースト状態の電極材料をスクリーンプリンティングにより塗布することによって形成されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記上部電極を形成するステップは、前記ペースト状態の上部電極を乾燥させた後に焼結させる工程を含むことを特徴とする請求項12に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記上部電極は、前記圧電膜上に導電性金属物質をスパッタリングにより所定の厚さまで蒸着することによって形成されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記保護膜は、O2アッシングにより除去されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
- 前記保護膜は、硫酸溶液またはアセトンを使用して除去されることを特徴とする請求項1に記載のインクジェットヘッドの圧電アクチュエータの形成方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20060012598A KR100682964B1 (ko) | 2006-02-09 | 2006-02-09 | 잉크젯 헤드의 압전 액츄에이터 형성 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007210331A JP2007210331A (ja) | 2007-08-23 |
JP4386924B2 true JP4386924B2 (ja) | 2009-12-16 |
Family
ID=38093607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007009116A Expired - Fee Related JP4386924B2 (ja) | 2006-02-09 | 2007-01-18 | インクジェットヘッドの圧電アクチュエータの形成方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US7603756B2 (ja) |
EP (1) | EP1818995B1 (ja) |
JP (1) | JP4386924B2 (ja) |
KR (1) | KR100682964B1 (ja) |
DE (1) | DE602006019821D1 (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100682964B1 (ko) * | 2006-02-09 | 2007-02-15 | 삼성전자주식회사 | 잉크젯 헤드의 압전 액츄에이터 형성 방법 |
JP5183138B2 (ja) * | 2007-09-26 | 2013-04-17 | 富士フイルム株式会社 | 圧電アクチュエータおよび液体吐出ヘッド |
JP4784611B2 (ja) | 2008-01-31 | 2011-10-05 | ブラザー工業株式会社 | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 |
KR100997985B1 (ko) * | 2008-07-28 | 2010-12-03 | 삼성전기주식회사 | 잉크젯 헤드 구동부 및 그 제작방법 |
KR100987523B1 (ko) * | 2008-07-28 | 2010-10-13 | 삼성전기주식회사 | 잉크젯 헤드 |
KR101063450B1 (ko) * | 2009-01-21 | 2011-09-08 | 삼성전기주식회사 | 잉크젯 헤드 제조방법 |
DE102009010843B4 (de) * | 2009-02-27 | 2014-04-10 | Globalfoundries Dresden Module One Limited Liability Company & Co. Kg | Substrate und Halbleiterbauelemente hergestellt unter Einsatz einer Verformungstechnologie unter Anwendung eines piezoelektrischen Materials und Verfahren zum Einsatz einer derartigen Verformungstechnolgie |
JP2011088422A (ja) * | 2009-10-21 | 2011-05-06 | Samsung Electro-Mechanics Co Ltd | インクジェットヘッドの製造方法 |
KR20120080882A (ko) * | 2011-01-10 | 2012-07-18 | 삼성전자주식회사 | 음향 변환기 및 그 구동방법 |
US8940559B2 (en) | 2011-11-04 | 2015-01-27 | Hewlett-Packard Development Company, L.P. | Method of fabricating an integrated orifice plate and cap structure |
JP2015000560A (ja) * | 2013-06-18 | 2015-01-05 | 株式会社リコー | 電気機械変換素子及びその電気機械変換素子の製造方法、液滴吐出ヘッド、液体カートリッジ、画像形成装置、液滴吐出装置、並びに、ポンプ装置 |
KR20150023086A (ko) * | 2013-08-22 | 2015-03-05 | (주)와이솔 | 압전 소자 기반 진동 모듈 |
JP6252057B2 (ja) * | 2013-09-13 | 2017-12-27 | 株式会社リコー | 圧電体アクチュエータ、液滴吐出ヘッド、液体カートリッジ、インクジェット記録装置、及び圧電体アクチュエータの製造方法 |
JP2015074174A (ja) * | 2013-10-09 | 2015-04-20 | 株式会社リコー | 圧電素子、液滴吐出ヘッド、液滴吐出装置、画像形成装置及び圧電素子の製造方法 |
KR101473346B1 (ko) | 2013-11-12 | 2014-12-16 | 한국세라믹기술원 | 압전 섬유 복합체 및 그 제조 방법 |
JP6478266B2 (ja) * | 2014-03-18 | 2019-03-06 | ローム株式会社 | 圧電体膜利用装置 |
JP2015135980A (ja) * | 2015-03-06 | 2015-07-27 | ブラザー工業株式会社 | インクジェットヘッド |
JP6990971B2 (ja) * | 2016-11-02 | 2022-01-12 | ローム株式会社 | ノズル基板、インクジェットプリントヘッドおよびノズル基板の製造方法 |
CN110642221B (zh) * | 2019-09-18 | 2022-08-05 | 西安交通大学 | 一种压电mems结构亲水性硅硅直接键合工艺 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1268870B1 (it) * | 1993-08-23 | 1997-03-13 | Seiko Epson Corp | Testa di registrazione a getto d'inchiostro e procedimento per la sua fabbricazione. |
US6494566B1 (en) * | 1997-01-31 | 2002-12-17 | Kyocera Corporation | Head member having ultrafine grooves and a method of manufacture thereof |
WO2001072520A1 (fr) * | 2000-03-27 | 2001-10-04 | Fujitsu Limited | Tete a jet d'encre a buses multiples et son procede de fabrication |
KR100438836B1 (ko) * | 2001-12-18 | 2004-07-05 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
DE10260854A1 (de) * | 2002-12-23 | 2004-07-08 | Robert Bosch Gmbh | Piezoaktor |
KR100519764B1 (ko) * | 2003-03-20 | 2005-10-07 | 삼성전자주식회사 | 잉크젯 프린트헤드의 압전 액츄에이터 및 그 형성 방법 |
KR100590558B1 (ko) * | 2004-10-07 | 2006-06-19 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
KR100682964B1 (ko) * | 2006-02-09 | 2007-02-15 | 삼성전자주식회사 | 잉크젯 헤드의 압전 액츄에이터 형성 방법 |
-
2006
- 2006-02-09 KR KR20060012598A patent/KR100682964B1/ko not_active IP Right Cessation
- 2006-06-30 EP EP20060253465 patent/EP1818995B1/en not_active Expired - Fee Related
- 2006-06-30 DE DE200660019821 patent/DE602006019821D1/de active Active
- 2006-10-20 US US11/583,798 patent/US7603756B2/en not_active Expired - Fee Related
-
2007
- 2007-01-18 JP JP2007009116A patent/JP4386924B2/ja not_active Expired - Fee Related
-
2009
- 2009-09-03 US US12/553,511 patent/US20090322829A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1818995B1 (en) | 2011-01-26 |
KR100682964B1 (ko) | 2007-02-15 |
US20090322829A1 (en) | 2009-12-31 |
EP1818995A3 (en) | 2009-02-11 |
US20070186397A1 (en) | 2007-08-16 |
US7603756B2 (en) | 2009-10-20 |
DE602006019821D1 (de) | 2011-03-10 |
EP1818995A2 (en) | 2007-08-15 |
JP2007210331A (ja) | 2007-08-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4386924B2 (ja) | インクジェットヘッドの圧電アクチュエータの形成方法 | |
JP5037565B2 (ja) | インクジェットプリントヘッドの圧電アクチュエータ及びその形成方法 | |
JP4638750B2 (ja) | インクジェットプリントヘッドの圧電アクチュエータ、及びその形成方法 | |
KR101179335B1 (ko) | 스크린 프린팅에 의한 후막 형성 방법 및 잉크젯 헤드의압전 액츄에이터 형성 방법 | |
JP5771655B2 (ja) | インクジェットヘッド及びインクジェット記録装置 | |
JP4784611B2 (ja) | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 | |
JPH11334063A (ja) | インクジェット式記録ヘッド及びインクジェット式記録装置 | |
US7789496B2 (en) | Piezoelectric inkjet printhead and method of manufacturing the same | |
JP5522126B2 (ja) | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 | |
JP2009292003A (ja) | 液滴吐出ヘッド、インクジェットプリンタ、液滴吐出ヘッドの製造方法およびインクジェットプリンタの製造方法 | |
KR100561866B1 (ko) | 압전 방식 잉크젯 프린트헤드 및 그 제조방법 | |
JP2002052723A (ja) | 液滴吐出ヘッド | |
JP5757354B2 (ja) | 圧電アクチュエータの製造方法及び液体移送装置の製造方法 | |
JP2001113712A (ja) | インクジェットヘッドの製造方法、インクジェットヘッド及びインクジェット式記録装置 | |
JP2011189597A (ja) | 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置 | |
JP2007190911A (ja) | インクジェットプリントヘッド及びその駆動方法 | |
JPH1178010A (ja) | インクジェット式記録ヘッド | |
JP2015135980A (ja) | インクジェットヘッド | |
JP2004090260A (ja) | 液体噴射ヘッド及びその製造方法 | |
JP2008124342A (ja) | アクチュエータ装置及び液体噴射ヘッド並びに液体噴射装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20090302 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090901 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090929 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
R371 | Transfer withdrawn |
Free format text: JAPANESE INTERMEDIATE CODE: R371 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20121009 Year of fee payment: 3 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20131009 Year of fee payment: 4 |
|
LAPS | Cancellation because of no payment of annual fees |