WO2009035007A1 - バナジウム酸化物薄膜パターン及びその作製方法 - Google Patents

バナジウム酸化物薄膜パターン及びその作製方法 Download PDF

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Publication number
WO2009035007A1
WO2009035007A1 PCT/JP2008/066352 JP2008066352W WO2009035007A1 WO 2009035007 A1 WO2009035007 A1 WO 2009035007A1 JP 2008066352 W JP2008066352 W JP 2008066352W WO 2009035007 A1 WO2009035007 A1 WO 2009035007A1
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Prior art keywords
vanadium oxide
fabricating
thin film
film pattern
apts
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PCT/JP2008/066352
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English (en)
French (fr)
Inventor
Yoshitake Masuda
Kunihito Koumoto
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National Institute Of Advanced Industrial Science And Technology
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Application filed by National Institute Of Advanced Industrial Science And Technology filed Critical National Institute Of Advanced Industrial Science And Technology
Priority to US12/677,633 priority Critical patent/US8715811B2/en
Publication of WO2009035007A1 publication Critical patent/WO2009035007A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G31/00—Compounds of vanadium
    • C01G31/02—Oxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/001—General methods for coating; Devices therefor
    • C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on thermo-optic effects
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/80—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70
    • C01P2002/82—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70 by IR- or Raman-data
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/04—Particle morphology depicted by an image obtained by TEM, STEM, STM or AFM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00—Coatings on glass
    • C03C2217/20—Materials for coating a single layer on glass
    • C03C2217/21—Oxides
    • C03C2217/218—V2O5, Nb2O5, Ta2O5
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24851—Intermediate layer is discontinuous or differential
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24926—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including ceramic, glass, porcelain or quartz layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Inorganic Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Optics & Photonics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Surface Treatment Of Glass (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemically Coating (AREA)

Abstract

  　本発明は、ＡＰＴＳ（３－Ａｍｉｎｏｐｒｏｐｙｌｔｒｉｅｔｈｏｘｙｓｉｌａｎｅ，Ｈ２ＮＣ３Ｈ５Ｓｉ（ＯＣＨ３）３）等を用いて、基表面にＡＰＴＳ－ＳＡＭ等を作製し、該ＡＰＴＳ－ＳＡＭに、フォトマスクを介して、真空紫外光照射を行い、露光領域を、アミノ基終端シランからシラノール基へと変性し、このアミノ基終端シラン表面とシラノール基表面を有するパターン化自己組織化単分子膜を、バナジウム酸化物のパターニングのためのテンプレートとして、液相でバナジウム酸化物を析出させてなるバナジウム酸化物薄膜パターン、その作製方法及びバナジウム酸化物系デバイス、に係るものである。
PCT/JP2008/066352 2007-09-12 2008-09-10 バナジウム酸化物薄膜パターン及びその作製方法 WO2009035007A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/677,633 US8715811B2 (en) 2007-09-12 2008-09-10 Vanadium oxide thin film pattern and method of fabricating the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-236341 2007-09-12
JP2007236341A JP5136976B2 (ja) 2007-09-12 2007-09-12 バナジウム酸化物薄膜パターン及びその作製方法

Publications (1)

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WO2009035007A1 true WO2009035007A1 (ja) 2009-03-19

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Country Link
US (1) US8715811B2 (ja)
JP (1) JP5136976B2 (ja)
WO (1) WO2009035007A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103073941A (zh) * 2012-01-19 2013-05-01 中国科学院上海硅酸盐研究所 一种二氧化钒粉体浆料及其制备方法
CN103073942A (zh) * 2012-01-19 2013-05-01 中国科学院上海硅酸盐研究所 一种二氧化钒复合粉体及其制备方法
EP2368858B1 (en) * 2009-12-03 2016-02-17 Samsung SDI Co., Ltd. Method of manufacturing smart panel and smart panel

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KR101137370B1 (ko) * 2009-11-18 2012-04-20 삼성에스디아이 주식회사 복층 창호
JP5548479B2 (ja) * 2010-02-26 2014-07-16 独立行政法人産業技術総合研究所 単結晶微粒子の製造方法
KR101202335B1 (ko) 2010-07-27 2012-11-16 삼성에스디아이 주식회사 써모크로믹 스마트 윈도우 및 그 제조 방법
CN102351431B (zh) * 2011-06-22 2013-03-13 哈尔滨工业大学 空气-水界面氧化钒纳米薄膜的自组装方法
KR101378977B1 (ko) 2011-12-28 2014-03-28 삼성코닝정밀소재 주식회사 써모크로믹 유리 및 그 제조방법
CN103346123B (zh) * 2013-06-28 2015-07-01 京东方科技集团股份有限公司 像素界定层及其制作方法、显示基板及显示装置
CN103367391B (zh) * 2013-06-28 2016-03-23 京东方科技集团股份有限公司 像素界定层的制作方法
US10333066B2 (en) 2013-06-28 2019-06-25 Boe Technology Group Co., Ltd. Pixel definition layer and manufacturing method thereof, display substrate and display device
CN103991841B (zh) * 2014-06-06 2015-12-09 中国科学院上海微系统与信息技术研究所 一种表面多功能化微流控芯片的圆片级制造方法
CN106431000A (zh) * 2015-08-07 2017-02-22 瀛石（上海）实业有限公司 具有多孔结构的氧化物薄膜及其制备方法和应用
WO2017138264A1 (ja) * 2016-02-09 2017-08-17 コニカミノルタ株式会社 二酸化バナジウム粒子の製造方法
US11062946B2 (en) 2018-11-08 2021-07-13 International Business Machines Corporation Self-aligned contact on a semiconductor device

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JPS59121121A (ja) * 1982-12-25 1984-07-13 Nippon Sheet Glass Co Ltd 基材表面に酸化バナジウム膜を形成する方法

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JPS59121121A (ja) * 1982-12-25 1984-07-13 Nippon Sheet Glass Co Ltd 基材表面に酸化バナジウム膜を形成する方法

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2368858B1 (en) * 2009-12-03 2016-02-17 Samsung SDI Co., Ltd. Method of manufacturing smart panel and smart panel
CN103073941A (zh) * 2012-01-19 2013-05-01 中国科学院上海硅酸盐研究所 一种二氧化钒粉体浆料及其制备方法
CN103073942A (zh) * 2012-01-19 2013-05-01 中国科学院上海硅酸盐研究所 一种二氧化钒复合粉体及其制备方法

Also Published As

Publication number Publication date
US20100183854A1 (en) 2010-07-22
JP2009067622A (ja) 2009-04-02
US8715811B2 (en) 2014-05-06
JP5136976B2 (ja) 2013-02-06

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