WO2011090262A3 - 경사 증착을 이용한 리소그래피 방법 - Google Patents

경사 증착을 이용한 리소그래피 방법 Download PDF

Info

Publication number
WO2011090262A3
WO2011090262A3 PCT/KR2010/007902 KR2010007902W WO2011090262A3 WO 2011090262 A3 WO2011090262 A3 WO 2011090262A3 KR 2010007902 W KR2010007902 W KR 2010007902W WO 2011090262 A3 WO2011090262 A3 WO 2011090262A3
Authority
WO
WIPO (PCT)
Prior art keywords
resist
lithography method
substrate
tilted evaporation
evaporating
Prior art date
Application number
PCT/KR2010/007902
Other languages
English (en)
French (fr)
Other versions
WO2011090262A2 (ko
Inventor
신용범
이승우
Original Assignee
한국생명공학연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국생명공학연구원 filed Critical 한국생명공학연구원
Priority to CN201080044742.4A priority Critical patent/CN102714140B/zh
Priority to US13/500,834 priority patent/US8894871B2/en
Publication of WO2011090262A2 publication Critical patent/WO2011090262A2/ko
Publication of WO2011090262A3 publication Critical patent/WO2011090262A3/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0035—Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B2207/00—Coding scheme for general features or characteristics of optical elements and systems of subclass G02B, but not including elements and systems which would be classified in G02B6/00 and subgroups
    • G02B2207/101—Nanooptics

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Optics & Photonics (AREA)
  • Biophysics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drying Of Semiconductors (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

본 발명은 경사 증착을 이용한 리소그래피 방법에 관한 것으로서, (1) 기판 상면에 레지스트를 도포하는 단계; (2) 리소그래피 공정을 이용하여 상기 레지스트를 패터닝하는 단계; (3) 상기 패터닝된 레지스트 상부층에 제1 박막 물질을 경사 증착하여 변형된 패턴마스크를 형성하는 단계; (4) 상기 변형된 패턴마스크를 통하여 상기 기판 상면에 제2 박막 물질을 증착하는 단계; 및 (5) 상기 기판 상면에 도포된 레지스트를 제거하는 단계를 포함하는 것을 특징으로 한다.
PCT/KR2010/007902 2010-01-22 2010-11-10 경사 증착을 이용한 리소그래피 방법 WO2011090262A2 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201080044742.4A CN102714140B (zh) 2010-01-22 2010-11-10 利用倾斜蒸镀的光刻方法
US13/500,834 US8894871B2 (en) 2010-01-22 2010-11-10 Lithography method using tilted evaporation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0006078 2010-01-22
KR1020100006078A KR101437924B1 (ko) 2010-01-22 2010-01-22 경사 증착을 이용한 리소그래피 방법

Publications (2)

Publication Number Publication Date
WO2011090262A2 WO2011090262A2 (ko) 2011-07-28
WO2011090262A3 true WO2011090262A3 (ko) 2011-10-27

Family

ID=44307351

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/007902 WO2011090262A2 (ko) 2010-01-22 2010-11-10 경사 증착을 이용한 리소그래피 방법

Country Status (4)

Country Link
US (1) US8894871B2 (ko)
KR (1) KR101437924B1 (ko)
CN (1) CN102714140B (ko)
WO (1) WO2011090262A2 (ko)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102954956A (zh) * 2011-08-25 2013-03-06 福州高意光学有限公司 一种增强型拉曼光谱测试片装置及测试片制作方法
CN102954957B (zh) * 2011-08-25 2015-05-06 福州高意光学有限公司 一种拉曼光谱仪探针及其制作方法
CN102621128A (zh) * 2012-04-11 2012-08-01 中国科学院半导体研究所 大面积有序可控表面增强拉曼活性基底的制备方法
CN102747320A (zh) * 2012-07-31 2012-10-24 武汉大学 贵金属纳米颗粒阵列的制备方法
CN103674924A (zh) * 2012-09-13 2014-03-26 福州高意光学有限公司 一种拉曼光谱测试探针及其制作方法
US20140093688A1 (en) * 2012-09-28 2014-04-03 Yindar Chuo Method for fabrication of nano-structures
CN103311386B (zh) * 2013-05-29 2016-09-28 哈尔滨工业大学深圳研究生院 一种避免图形失真的图形化蓝宝石衬底的制备方法
DE102014116076A1 (de) * 2014-11-04 2016-05-04 Osram Opto Semiconductors Gmbh Verfahren zum Aufbringen eines Materials auf einer Oberfläche
KR101707535B1 (ko) * 2015-06-09 2017-02-28 한국생명공학연구원 금속 산화물 패턴의 제조방법 및 이를 통해 제조된 금속 산화물 패턴을 포함하는 박막 트랜지스터
KR101729683B1 (ko) * 2015-09-16 2017-04-25 한국기계연구원 선격자 편광자의 제조 방법
CN105480000B (zh) * 2015-11-30 2018-05-22 苏州市金星工艺镀饰有限公司 一种金银双色图案水晶摆台的制作方法
CN108351605B (zh) 2016-01-27 2020-12-15 株式会社Lg化学 膜掩模、其制备方法、使用膜掩模的图案形成方法和由膜掩模形成的图案
WO2017131499A1 (ko) 2016-01-27 2017-08-03 주식회사 엘지화학 필름 마스크, 이의 제조방법, 이를 이용한 패턴 형성 방법 및 이를 이용하여 형성된 패턴
US10969677B2 (en) 2016-01-27 2021-04-06 Lg Chem, Ltd. Film mask, method for manufacturing same, and method for forming pattern using film mask
CN105824228B (zh) * 2016-03-15 2019-01-11 北京大学 一种基于表面等离子体耦合结构的全息成像膜
CN107452600B (zh) * 2017-08-21 2020-01-14 中国电子科技集团公司第二十研究所 一种复合抗电镀掩模的制备方法
CN108682723B (zh) * 2018-05-22 2019-07-05 中国科学院半导体研究所 制备氮化镓基纳米环结构的方法
KR102498632B1 (ko) * 2018-08-16 2023-02-10 주식회사 엘지화학 기판의 제조 방법
US20200135464A1 (en) * 2018-10-30 2020-04-30 Applied Materials, Inc. Methods and apparatus for patterning substrates using asymmetric physical vapor deposition
US10927450B2 (en) * 2018-12-19 2021-02-23 Applied Materials, Inc. Methods and apparatus for patterning substrates using asymmetric physical vapor deposition
KR20210050015A (ko) * 2019-10-25 2021-05-07 인제대학교 산학협력단 멤리스터 소자 및 이의 제조방법
US11615958B2 (en) * 2020-03-24 2023-03-28 Tokyo Electron Limited Methods to reduce microbridge defects in EUV patterning for microelectronic workpieces
CN111463106B (zh) * 2020-04-02 2023-06-02 超晶科技（北京）有限公司 一种基于光刻工艺实现阵列图案的方法
KR102356610B1 (ko) * 2020-09-21 2022-02-07 포항공과대학교 산학협력단 레지스트 마스크, 쓰러짐 제어 리소그래피 및 이를 이용해 제작된 구조체
CN118016544A (zh) * 2024-04-08 2024-05-10 浙江拓感科技有限公司 一种高深宽比铟凸点的制备方法及其应用

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030072199A (ko) * 2002-03-05 2003-09-13 후지쯔 가부시끼가이샤 레지스트 패턴 개선화 재료 및 그것을 이용한 패턴의 제조방법
KR20070091314A (ko) * 2004-11-30 2007-09-10 아구라 테크놀로지스, 인코포레이티드 대규모 와이어 그리드 편광기들에 대한 응용 및 제조기술들
KR100858137B1 (ko) * 2006-11-28 2008-09-10 제일모직주식회사 미세금속패턴의 제조방법
KR20090042136A (ko) * 2007-10-24 2009-04-29 제일모직주식회사 미세 패턴의 제조 방법 및 광학 소자

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3873361A (en) * 1973-11-29 1975-03-25 Ibm Method of depositing thin film utilizing a lift-off mask
US4275286A (en) * 1978-12-04 1981-06-23 Hughes Aircraft Company Process and mask for ion beam etching of fine patterns
DE3103615A1 (de) * 1981-02-03 1982-09-09 Siemens AG, 1000 Berlin und 8000 München Verfahren zur erzeugung von extremen feinstrukturen
EP0090615B1 (en) * 1982-03-26 1989-01-11 Hitachi, Ltd. Method for forming fine resist patterns
US4687730A (en) * 1985-10-30 1987-08-18 Rca Corporation Lift-off technique for producing metal pattern using single photoresist processing and oblique angle metal deposition
KR0138278B1 (ko) * 1995-01-24 1998-04-27 김광호 엑스레이 리소그래피용 마스크 및 그의 제조방법
DE19604242C2 (de) 1996-02-06 1999-09-02 Fraunhofer Ges Forschung Herstellungsverfahren für dreidimensional geformte Metallprofile und Anwendung des Verfahrens zur Herstellung von Metallprofilen für die Mikromechanik
US6828230B2 (en) * 1997-09-12 2004-12-07 Micron Technology, Inc. Integrated circuit having conductive paths of different heights formed from the same layer structure and method for forming the same
US6256455B1 (en) * 2000-01-21 2001-07-03 Taiwan Semiconductor Manufacturing Company, Ltd Apparatus and method for preventing fire in a liquid heating tank
CN100349259C (zh) * 2003-04-07 2007-11-14 友达光电股份有限公司 低温多晶硅薄膜的制造方法
WO2005109973A1 (en) * 2004-05-06 2005-11-17 Microbridge Technologies Inc, Trimming of embedded passive components using pulsed heating
US7351346B2 (en) 2004-11-30 2008-04-01 Agoura Technologies, Inc. Non-photolithographic method for forming a wire grid polarizer for optical and infrared wavelengths
KR100838371B1 (ko) * 2006-06-30 2008-06-13 주식회사 하이닉스반도체 위상 반전 마스크 및 그 제조 방법
WO2008140585A1 (en) * 2006-11-22 2008-11-20 Nexgen Semi Holding, Inc. Apparatus and method for conformal mask manufacturing
US7960097B2 (en) * 2007-10-30 2011-06-14 Triquint Semiconductor, Inc. Methods of minimizing etch undercut and providing clean metal liftoff

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030072199A (ko) * 2002-03-05 2003-09-13 후지쯔 가부시끼가이샤 레지스트 패턴 개선화 재료 및 그것을 이용한 패턴의 제조방법
KR20070091314A (ko) * 2004-11-30 2007-09-10 아구라 테크놀로지스, 인코포레이티드 대규모 와이어 그리드 편광기들에 대한 응용 및 제조기술들
KR100858137B1 (ko) * 2006-11-28 2008-09-10 제일모직주식회사 미세금속패턴의 제조방법
KR20090042136A (ko) * 2007-10-24 2009-04-29 제일모직주식회사 미세 패턴의 제조 방법 및 광학 소자

Also Published As

Publication number Publication date
US8894871B2 (en) 2014-11-25
KR20110086375A (ko) 2011-07-28
CN102714140B (zh) 2015-05-27
CN102714140A (zh) 2012-10-03
WO2011090262A2 (ko) 2011-07-28
KR101437924B1 (ko) 2014-09-11
US20120234792A1 (en) 2012-09-20

Similar Documents

Publication Publication Date Title
WO2011090262A3 (ko) 경사 증착을 이용한 리소그래피 방법
WO2008146869A3 (en) Pattern forming method, pattern or mold formed thereby
EP1845416A3 (en) Coating compositions for photolithography
WO2009042054A3 (en) Organosiloxane materials for selective area deposition of inorganic materials
WO2012027050A3 (en) Mask for near-field lithography and fabrication the same
WO2011139774A3 (en) Method for forming an organic device
US20130115426A1 (en) Method of manufacturing flexible electronic device
WO2011149770A3 (en) Engineering boron-rich films lithographic mask applications
FR2963342B1 (fr) Procede d'obtention d'un materiau comprenant un substrat muni d'un revetement
TW200746441A (en) Manufacturing method of thin film transistor and thin film transistor, and display
TW201129872A (en) Pattern forming method and composition for forming resist underlayer film
WO2009085598A3 (en) Photoresist double patterning
WO2010127328A3 (en) Method and apparatus for organic vapor printing
JP2008523618A5 (ko)
JP2010507261A5 (ko)
WO2010033609A3 (en) Method for transferring thin film to substrate
WO2010065252A3 (en) Methods of fabricating substrates
WO2011005887A3 (en) Patterning of thin film conductive and passivation layers
WO2009078190A1 (ja) パターン形成方法およびパターン形成体
WO2008091279A3 (en) Etching and hole arrays
WO2014120320A3 (en) Formation of a composite pattern including a periodic pattern self-aligned to a prepattern
EP2385426A3 (en) Maskless exposure apparatus and method of alignment for overlay in maskless exposure
JP2011505589A5 (ko)
WO2008105266A1 (ja) 電子線リソグラフィー用レジスト下層膜形成組成物
WO2012093807A3 (ko) 내지문 코팅 방법 및 장치

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201080044742.4

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10844058

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 13500834

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 10844058

Country of ref document: EP

Kind code of ref document: A2