ATE440385T1 - Verfahren zur grosstechnischen herstellung von cdte/cds dünnschicht-solarzellen - Google Patents
Verfahren zur grosstechnischen herstellung von cdte/cds dünnschicht-solarzellenInfo
- Publication number
- ATE440385T1 ATE440385T1 AT02785901T AT02785901T ATE440385T1 AT E440385 T1 ATE440385 T1 AT E440385T1 AT 02785901 T AT02785901 T AT 02785901T AT 02785901 T AT02785901 T AT 02785901T AT E440385 T1 ATE440385 T1 AT E440385T1
- Authority
- AT
- Austria
- Prior art keywords
- film
- sub
- cdte
- cdcl
- depositing
- Prior art date
Links
- 238000011031 large-scale manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000010408 film Substances 0.000 abstract 12
- 229910004613 CdTe Inorganic materials 0.000 abstract 7
- 238000000151 deposition Methods 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000011261 inert gas Substances 0.000 abstract 2
- 238000000137 annealing Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
- C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/073—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Thermal Sciences (AREA)
- Photovoltaic Devices (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2001LU000008A ITLU20010008A1 (it) | 2001-10-05 | 2001-10-05 | Procedura per realizzare un contatto non rettificante su film cdte utilizzati per fabbricare celle solari a film sottili tipo cdte/cds. |
ITLU20010012 ITLU20010012A1 (it) | 2001-10-17 | 2001-10-17 | Preparazione di un ossido trasparente e conduttore (tco) adatto alla produzione su larga scala di celle solari a film sottili tipo cdte/cds. |
ITLU20010011 ITLU20010011A1 (it) | 2001-10-17 | 2001-10-17 | Un nuovo tipo di sorgente per depositare film sottili di cdte e cds mediante css (close-spaced-sublimation). |
PCT/IT2002/000634 WO2003032406A2 (en) | 2001-10-05 | 2002-10-04 | A process for large-scale production of cdte/cds thin film solar cells |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE440385T1 true ATE440385T1 (de) | 2009-09-15 |
Family
ID=27274234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02785901T ATE440385T1 (de) | 2001-10-05 | 2002-10-04 | Verfahren zur grosstechnischen herstellung von cdte/cds dünnschicht-solarzellen |
Country Status (10)
Country | Link |
---|---|
US (1) | US7211462B2 (de) |
EP (1) | EP1433207B8 (de) |
JP (1) | JP4621427B2 (de) |
AT (1) | ATE440385T1 (de) |
AU (1) | AU2002349822B2 (de) |
CA (1) | CA2462590A1 (de) |
DE (1) | DE60233418D1 (de) |
ES (1) | ES2331606T3 (de) |
PT (1) | PT1433207E (de) |
WO (1) | WO2003032406A2 (de) |
Families Citing this family (48)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ES2467161T3 (es) * | 2004-08-18 | 2014-06-12 | Calyxo Gmbh | Deposición química en fase vapor a presión atmosférica |
ITLU20050002A1 (it) * | 2005-02-08 | 2006-08-09 | Solar Systems & Equipments Srl | UN NUOVO PROCESSO PER IL TRATTAMENTO IN AMBIENTE DI CLORO DELLE CELLE SOLARI A FILM SOTTILI DI CdTe/CdS senza l'uso di CdC12. |
US20100186810A1 (en) * | 2005-02-08 | 2010-07-29 | Nicola Romeo | Method for the formation of a non-rectifying back-contact a cdte/cds thin film solar cell |
US20070184573A1 (en) * | 2006-02-08 | 2007-08-09 | Guardian Industries Corp., | Method of making a thermally treated coated article with transparent conductive oxide (TCO) coating for use in a semiconductor device |
JP2007273455A (ja) * | 2006-03-09 | 2007-10-18 | National Institute Of Advanced Industrial & Technology | 酸化膜透明導電膜およびそれを用いた透明導電性基材、薄膜トランジスタ基板、光電変換素子、光検出素子 |
US20080115821A1 (en) * | 2006-11-22 | 2008-05-22 | Li Xu | Multilayer transparent conductive oxide for improved chemical processing |
AU2007355717A1 (en) | 2007-06-28 | 2008-12-31 | Solar Systems & Equipments S.R.L. | Method for the formation of a non-rectifying back-contact in a CdTe /CdS thin film solar cell |
KR101614554B1 (ko) | 2007-11-02 | 2016-04-21 | 퍼스트 솔라, 인코포레이티드 | 도핑된 반도체 막을 포함하는 광기전 장치 |
DE102008057075A1 (de) * | 2007-11-22 | 2009-08-27 | Antec Solar Gmbh | Wirkungsgradoptimierte CdS/CdTe Module |
US20090223551A1 (en) * | 2008-03-04 | 2009-09-10 | Solexant Corp. | Process for making solar cells |
KR20090131841A (ko) * | 2008-06-19 | 2009-12-30 | 삼성전자주식회사 | 광전 소자 |
EP2377166A4 (de) * | 2008-12-18 | 2015-06-24 | First Solar Inc | Pv-module mit rückseitigen metallkontakten |
KR100936487B1 (ko) * | 2009-01-28 | 2010-01-13 | 재근 이 | CdS/CdTe 박막 태양전지 제조 방법 |
JP5878465B2 (ja) * | 2009-07-13 | 2016-03-08 | ファースト ソーラー インコーポレイテッド | 太陽電池フロントコンタクトのドーピング |
IT1396166B1 (it) * | 2009-10-13 | 2012-11-16 | Arendi S P A | Metodo di attivazione di film sottili di cdte per applicazioni in celle solari a film sottili del tipo cdte/cds. |
US20110143489A1 (en) * | 2009-12-11 | 2011-06-16 | General Electric Company | Process for making thin film solar cell |
CN102199752B (zh) * | 2010-03-22 | 2013-02-20 | 昆明物理研究所 | 非晶态碲化镉薄膜的磁控溅射生长法 |
US8524524B2 (en) * | 2010-04-22 | 2013-09-03 | General Electric Company | Methods for forming back contact electrodes for cadmium telluride photovoltaic cells |
US8409407B2 (en) | 2010-04-22 | 2013-04-02 | Primestar Solar, Inc. | Methods for high-rate sputtering of a compound semiconductor on large area substrates |
US8361229B2 (en) | 2010-04-22 | 2013-01-29 | Primestar Solar, Inc. | Seal configuration for a system for continuous deposition of a thin film layer on a substrate |
DE102010028277B4 (de) | 2010-04-27 | 2013-04-18 | Calyxo Gmbh | Verfahren und Vorrichtung zur Herstellung einer mit einem Halbleitermaterial beschichteten Glasscheibe und nach dem Verfahren erhältliche Solarzelle oder Solarmodul |
US20110265874A1 (en) * | 2010-04-29 | 2011-11-03 | Primestar Solar, Inc. | Cadmium sulfide layers for use in cadmium telluride based thin film photovoltaic devices and methods of their manufacture |
KR20130100907A (ko) * | 2010-04-30 | 2013-09-12 | 다우 글로벌 테크놀로지스 엘엘씨 | 칼코게나이드계 태양광발전 셀의 제조 방법 |
US8187963B2 (en) * | 2010-05-24 | 2012-05-29 | EncoreSolar, Inc. | Method of forming back contact to a cadmium telluride solar cell |
US20110315220A1 (en) * | 2010-06-29 | 2011-12-29 | General Electric Company | Photovoltaic cell and methods for forming a back contact for a photovoltaic cell |
US8525019B2 (en) | 2010-07-01 | 2013-09-03 | Primestar Solar, Inc. | Thin film article and method for forming a reduced conductive area in transparent conductive films for photovoltaic modules |
US8771421B2 (en) | 2010-12-23 | 2014-07-08 | First Solar, Inc. | Entrance and exit roll seal configuration for a vapor deposition system |
DE102011004441B4 (de) * | 2011-02-21 | 2016-09-01 | Ctf Solar Gmbh | Verfahren und Vorrichtung zur Beschichtung von auf Transformationstemperatur temperierten Glassubstraten |
US8188562B2 (en) | 2011-05-31 | 2012-05-29 | Primestar Solar, Inc. | Multi-layer N-type stack for cadmium telluride based thin film photovoltaic devices and methods of making |
US8247686B2 (en) | 2011-05-31 | 2012-08-21 | Primestar Solar, Inc. | Multi-layer N-type stack for cadmium telluride based thin film photovoltaic devices and methods of making |
US8241930B2 (en) | 2011-05-31 | 2012-08-14 | Primestar Solar, Inc. | Methods of forming a window layer in a cadmium telluride based thin film photovoltaic device |
CH705074A1 (de) * | 2011-06-07 | 2012-12-14 | Von Roll Solar Ag | Verfahren zur Herstellung von Dünnschichtsolarzellen mit gesinterten Halbleiterschichten sowie nach diesem Verfahren hergestellte Dünnschichtsolarzellen. |
US9054245B2 (en) | 2012-03-02 | 2015-06-09 | First Solar, Inc. | Doping an absorber layer of a photovoltaic device via diffusion from a window layer |
CN104334767B (zh) | 2012-03-05 | 2017-06-09 | 第一太阳能有限公司 | 利用氢形成透明导电氧化物的方法和设备 |
KR101300790B1 (ko) | 2012-04-16 | 2013-08-29 | 고려대학교 산학협력단 | 확산방지층을 가지는 CdTe 박막 태양전지 및 이의 제조방법 |
CN102800719B (zh) * | 2012-07-27 | 2015-08-26 | 中国科学院电工研究所 | 一种柔性CdTe薄膜太阳能电池及其制备方法 |
US9117956B2 (en) | 2012-08-31 | 2015-08-25 | First Solar, Inc. | Method of controlling the amount of Cu doping when forming a back contact of a photovoltaic cell |
US9159864B2 (en) | 2013-07-25 | 2015-10-13 | First Solar, Inc. | Back contact paste with Te enrichment and copper doping control in thin film photovoltaic devices |
US9093599B2 (en) | 2013-07-26 | 2015-07-28 | First Solar, Inc. | Vapor deposition apparatus for continuous deposition of multiple thin film layers on a substrate |
US9306105B2 (en) | 2013-07-31 | 2016-04-05 | First Solar Malaysia Sdn. Bhd. | Finger structures protruding from absorber layer for improved solar cell back contact |
ES2527976B1 (es) * | 2013-08-02 | 2015-11-12 | Universidad Autónoma de Madrid | Sistema para la fabricación de multicapas para células solares y procedimiento para la fabricación de éstas |
CN104518044B (zh) * | 2013-09-26 | 2019-07-23 | 中国建材国际工程集团有限公司 | 用来制造CdTe薄层太阳能电池的背接触层的方法 |
DE102014208029A1 (de) | 2014-04-29 | 2015-10-29 | China Triumph International Engineering Co., Ltd. | Zusätzlicher Temperaturbehandlungsschritt für Dünnschichtsolarzellen |
GB201618474D0 (en) * | 2016-11-02 | 2016-12-14 | Univ Loughborough | Improvements to the deposition and formation of coatings for photovoltaic cells for use in the generation of solar power |
CN106711242A (zh) * | 2017-01-17 | 2017-05-24 | 中国科学技术大学 | 一种碲化镉薄膜太阳电池及其制备方法 |
CN111081812A (zh) * | 2019-11-18 | 2020-04-28 | 深圳第三代半导体研究院 | 一种透明导电氧化物薄膜的制备方法及应用 |
CN114645257A (zh) * | 2022-03-15 | 2022-06-21 | 北京大学深圳研究生院 | 一种硒化亚锡p型半导体薄膜及其制备方法和应用 |
CN115287593A (zh) * | 2022-07-20 | 2022-11-04 | 中建材浚鑫科技有限公司 | 一种使用锌基金属合金作为蒸发源制备azo膜的方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4132882C2 (de) * | 1991-10-03 | 1996-05-09 | Antec Angewandte Neue Technolo | Verfahren zur Herstellung von pn CdTe/CdS-Dünnschichtsolarzellen |
JPH0685297A (ja) * | 1992-09-03 | 1994-03-25 | Matsushita Electric Ind Co Ltd | 太陽電池の製造法 |
JP3497249B2 (ja) * | 1994-09-16 | 2004-02-16 | 松下電池工業株式会社 | 太陽電池の製造法 |
US5916375A (en) * | 1995-12-07 | 1999-06-29 | Japan Energy Corporation | Method of producing photoelectric conversion device |
US6137048A (en) * | 1996-11-07 | 2000-10-24 | Midwest Research Institute | Process for fabricating polycrystalline semiconductor thin-film solar cells, and cells produced thereby |
JP2001015777A (ja) * | 1999-07-01 | 2001-01-19 | Matsushita Battery Industrial Co Ltd | 太陽電池の製造方法 |
EP1130880A1 (de) | 2000-02-29 | 2001-09-05 | Silicomp SPA | Kopfhörer und Kopfstütze für Kopfhörer |
US6251701B1 (en) * | 2000-03-01 | 2001-06-26 | The United States Of America As Represented By The United States Department Of Energy | All-vapor processing of p-type tellurium-containing II-VI semiconductor and ohmic contacts thereof |
US6423565B1 (en) * | 2000-05-30 | 2002-07-23 | Kurt L. Barth | Apparatus and processes for the massproduction of photovotaic modules |
ATE321364T1 (de) * | 2000-09-11 | 2006-04-15 | Antec Solar Energy Ag | Recycling-verfahren für cdte/cds- dünnschichtsolarzellenmodule |
-
2002
- 2002-10-04 EP EP02785901A patent/EP1433207B8/de not_active Expired - Lifetime
- 2002-10-04 US US10/491,938 patent/US7211462B2/en not_active Expired - Fee Related
- 2002-10-04 WO PCT/IT2002/000634 patent/WO2003032406A2/en active Application Filing
- 2002-10-04 JP JP2003535266A patent/JP4621427B2/ja not_active Expired - Fee Related
- 2002-10-04 AT AT02785901T patent/ATE440385T1/de not_active IP Right Cessation
- 2002-10-04 ES ES02785901T patent/ES2331606T3/es not_active Expired - Lifetime
- 2002-10-04 PT PT02785901T patent/PT1433207E/pt unknown
- 2002-10-04 AU AU2002349822A patent/AU2002349822B2/en not_active Ceased
- 2002-10-04 DE DE60233418T patent/DE60233418D1/de not_active Expired - Lifetime
- 2002-10-04 CA CA002462590A patent/CA2462590A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP4621427B2 (ja) | 2011-01-26 |
EP1433207A2 (de) | 2004-06-30 |
JP2005505938A (ja) | 2005-02-24 |
WO2003032406A3 (en) | 2003-10-30 |
PT1433207E (pt) | 2009-11-24 |
WO2003032406A2 (en) | 2003-04-17 |
AU2002349822B2 (en) | 2007-11-15 |
DE60233418D1 (de) | 2009-10-01 |
EP1433207B1 (de) | 2009-08-19 |
US7211462B2 (en) | 2007-05-01 |
ES2331606T3 (es) | 2010-01-11 |
CA2462590A1 (en) | 2003-04-17 |
EP1433207B8 (de) | 2009-10-07 |
US20040248340A1 (en) | 2004-12-09 |
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