JP4621427B2 - CdTe/CdS薄膜太陽電池を大規模に生産する方法 - Google Patents
CdTe/CdS薄膜太陽電池を大規模に生産する方法 Download PDFInfo
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- JP4621427B2 JP4621427B2 JP2003535266A JP2003535266A JP4621427B2 JP 4621427 B2 JP4621427 B2 JP 4621427B2 JP 2003535266 A JP2003535266 A JP 2003535266A JP 2003535266 A JP2003535266 A JP 2003535266A JP 4621427 B2 JP4621427 B2 JP 4621427B2
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- 229910004613 CdTe Inorganic materials 0.000 title claims description 75
- 239000010409 thin film Substances 0.000 title claims description 67
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000000034 method Methods 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 28
- 239000000463 material Substances 0.000 claims description 22
- 238000004544 sputter deposition Methods 0.000 claims description 19
- 238000000151 deposition Methods 0.000 claims description 14
- 239000011261 inert gas Substances 0.000 claims description 11
- 238000000137 annealing Methods 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 6
- 239000011737 fluorine Substances 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 5
- 238000005092 sublimation method Methods 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- -1 fluoroalkyl compound Chemical class 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 4
- 239000005361 soda-lime glass Substances 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052810 boron oxide Inorganic materials 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000859 sublimation Methods 0.000 description 13
- 230000008022 sublimation Effects 0.000 description 13
- 230000008021 deposition Effects 0.000 description 8
- 238000005530 etching Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 5
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 235000012149 noodles Nutrition 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000011031 large-scale manufacturing process Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000005329 float glass Substances 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000011236 particulate material Substances 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000001429 visible spectrum Methods 0.000 description 1
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
- C23C14/0629—Sulfides, selenides or tellurides of zinc, cadmium or mercury
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/073—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type comprising only AIIBVI compound semiconductors, e.g. CdS/CdTe solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1828—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIBVI compounds, e.g. CdS, ZnS, CdTe
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/543—Solar cells from Group II-VI materials
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
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- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Thermal Sciences (AREA)
- Photovoltaic Devices (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Description
VOC 852mV
JSC 25mA/cm3
ff 0.66
効率 14%
Claims (11)
- CdTe/CdS薄膜太陽電池を大規模に生産する方法であって、前記薄膜は透明基板上に順次堆積されるものであって、
前記基板上に透明導電酸化物(TCO)の薄膜を堆積させるステップ、
前記TCO薄膜上にCdS薄膜を堆積させるステップ、
前記CdS薄膜上にCdTe薄膜を堆積させるステップ、
前記CdTe薄膜をCdCl2で処理するステップ、と
前記処理したCdTe薄膜上にバック接触薄膜を堆積させるステップを含む方法であって、
CdCl2によるCdTe薄膜の処理が、
基板を常温に保ちながら、CdTe薄膜上にCdCl2層を蒸発により形成するステップ、
減圧室内で不活性ガス雰囲気下、380〜420℃及び300〜1000mbarで前記CdCl2層をアニールするステップ、と
前記室から不活性ガスを除去して減圧条件を作成し、一方で基板を350〜420℃の温度に保持して、それによってCdTe薄膜表面から全ての残留CdCl2を蒸発させるステップを含むことを特徴とし、
前記透明導電酸化物がフッ素をドープしたIn2O3であり、
近接昇華法により前記CdSと前記CdTe薄膜を形成するための供給源材料として、それぞれ、緻密塊の形態のCdS又はCdTe材料が用いられ、
前記緻密塊のCdS(又はCdTe)材料は、CdS(又はCdTe)材料をホウ素酸化物片で被覆し、前記被覆された材料を不活性ガス雰囲気下、50気圧より高い圧力下で、その融点より高い温度に加熱し、続いて常温に冷却することにより形成され、それにより前記材料が緻密塊の形態に固化される、方法。 - 前記CdCl2層が100〜200nmの厚さである請求項1に記載の方法。
- CdCl2層のアニールが15〜20分間行われる請求項1又は2に記載の方法。
- 不活性ガスがArである請求項1〜3のいずれか一項に記載の方法。
- バック接触薄膜がMo層により被覆されたSb2Te3層により形成される請求項1〜4のいずれか一項に記載の方法。
- 前記Sb2Te3層が250〜300℃でスパッタにより形成される請求項5に記載の方法。
- バック接触薄膜がMo層により被覆されたAs2Te3層により形成される請求項1〜4のいずれか一項に記載の方法。
- 前記As2Te3層が200〜250℃でスパッタにより形成される請求項7に記載の方法。
- 前記TCO層が、水素と気体状のフルオロアルキル化合物を含む不活性ガス雰囲気中でスパッタにより形成される請求項1に記載の方法。
- Arと水素の混合物が用いられ、水素が1〜3容積%含まれ、かつフルオロアルキル化合物がCHF3である請求項9に記載の方法。
- 前記透明基板がソーダライムガラスである請求項1〜10のいずれか一項に記載の方法。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT2001LU000008A ITLU20010008A1 (it) | 2001-10-05 | 2001-10-05 | Procedura per realizzare un contatto non rettificante su film cdte utilizzati per fabbricare celle solari a film sottili tipo cdte/cds. |
ITLU20010012 ITLU20010012A1 (it) | 2001-10-17 | 2001-10-17 | Preparazione di un ossido trasparente e conduttore (tco) adatto alla produzione su larga scala di celle solari a film sottili tipo cdte/cds. |
ITLU20010011 ITLU20010011A1 (it) | 2001-10-17 | 2001-10-17 | Un nuovo tipo di sorgente per depositare film sottili di cdte e cds mediante css (close-spaced-sublimation). |
PCT/IT2002/000634 WO2003032406A2 (en) | 2001-10-05 | 2002-10-04 | A process for large-scale production of cdte/cds thin film solar cells |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005505938A JP2005505938A (ja) | 2005-02-24 |
JP4621427B2 true JP4621427B2 (ja) | 2011-01-26 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2003535266A Expired - Fee Related JP4621427B2 (ja) | 2001-10-05 | 2002-10-04 | CdTe/CdS薄膜太陽電池を大規模に生産する方法 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7211462B2 (ja) |
EP (1) | EP1433207B8 (ja) |
JP (1) | JP4621427B2 (ja) |
AT (1) | ATE440385T1 (ja) |
AU (1) | AU2002349822B2 (ja) |
CA (1) | CA2462590A1 (ja) |
DE (1) | DE60233418D1 (ja) |
ES (1) | ES2331606T3 (ja) |
PT (1) | PT1433207E (ja) |
WO (1) | WO2003032406A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101300790B1 (ko) | 2012-04-16 | 2013-08-29 | 고려대학교 산학협력단 | 확산방지층을 가지는 CdTe 박막 태양전지 및 이의 제조방법 |
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JP2007273455A (ja) * | 2006-03-09 | 2007-10-18 | National Institute Of Advanced Industrial & Technology | 酸化膜透明導電膜およびそれを用いた透明導電性基材、薄膜トランジスタ基板、光電変換素子、光検出素子 |
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KR100936487B1 (ko) * | 2009-01-28 | 2010-01-13 | 재근 이 | CdS/CdTe 박막 태양전지 제조 방법 |
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IT1396166B1 (it) * | 2009-10-13 | 2012-11-16 | Arendi S P A | Metodo di attivazione di film sottili di cdte per applicazioni in celle solari a film sottili del tipo cdte/cds. |
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KR101300790B1 (ko) | 2012-04-16 | 2013-08-29 | 고려대학교 산학협력단 | 확산방지층을 가지는 CdTe 박막 태양전지 및 이의 제조방법 |
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JP2005505938A (ja) | 2005-02-24 |
US20040248340A1 (en) | 2004-12-09 |
WO2003032406A2 (en) | 2003-04-17 |
DE60233418D1 (de) | 2009-10-01 |
EP1433207B8 (en) | 2009-10-07 |
ES2331606T3 (es) | 2010-01-11 |
EP1433207A2 (en) | 2004-06-30 |
AU2002349822B2 (en) | 2007-11-15 |
PT1433207E (pt) | 2009-11-24 |
WO2003032406A3 (en) | 2003-10-30 |
CA2462590A1 (en) | 2003-04-17 |
US7211462B2 (en) | 2007-05-01 |
EP1433207B1 (en) | 2009-08-19 |
ATE440385T1 (de) | 2009-09-15 |
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