Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
  • H01L21/743—Making of internal connections, substrate contacts
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
  • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
  • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
  • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
  • H01L21/8221—Three dimensional integrated circuits stacked in different levels
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10B—ELECTRONIC MEMORY DEVICES
  • H10B12/00—Dynamic random access memory [DRAM] devices
  • H10B12/01—Manufacture or treatment
  • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
  • H10B12/03—Making the capacitor or connections thereto
  • H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10B—ELECTRONIC MEMORY DEVICES
  • H10B12/00—Dynamic random access memory [DRAM] devices
  • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
  • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
  • H10B12/373—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate the capacitor extending under or around the transistor

Landscapes

• Engineering & Computer Science (AREA)
• Manufacturing & Machinery (AREA)
• Power Engineering (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Semiconductor Memories (AREA)
• Semiconductor Integrated Circuits (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=25148357

Family Applications (1)

Country Status (13)

Families Citing this family (94)

Family Cites Families (14)

• 1985
  • 1985-10-21 US US06/789,675 patent/US4649625A/en not_active Expired - Lifetime
• 1986
  • 1986-07-28 IN IN596/MAS/86A patent/IN167820B/en unknown
  • 1986-08-20 JP JP61193010A patent/JPH06101546B2/ja not_active Expired - Lifetime
  • 1986-08-22 EP EP86111645A patent/EP0220410B1/en not_active Expired - Lifetime
  • 1986-08-22 DE DE86111645T patent/DE3688231T2/de not_active Expired - Fee Related
  • 1986-08-30 KR KR1019860007237A patent/KR900002885B1/ko not_active IP Right Cessation
  • 1986-09-01 ZA ZA866625A patent/ZA866625B/xx unknown
  • 1986-09-09 CN CN86105868.2A patent/CN1005883B/zh not_active Expired
  • 1986-09-11 CA CA000518033A patent/CA1232362A/en not_active Expired
  • 1986-09-23 BR BR8604546A patent/BR8604546A/pt not_active IP Right Cessation
  • 1986-09-23 AU AU63071/86A patent/AU575499B2/en not_active Ceased
  • 1986-10-15 ES ES8602599A patent/ES2003376A6/es not_active Expired
• 1993
  • 1993-09-02 HK HK909/93A patent/HK90993A/xx not_active IP Right Cessation

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