DE3686878T2 - Dram-arrays hoher leistung mit graben-kondensatoren. - Google Patents
Dram-arrays hoher leistung mit graben-kondensatoren.Info
- Publication number
- DE3686878T2 DE3686878T2 DE8686905002T DE3686878T DE3686878T2 DE 3686878 T2 DE3686878 T2 DE 3686878T2 DE 8686905002 T DE8686905002 T DE 8686905002T DE 3686878 T DE3686878 T DE 3686878T DE 3686878 T2 DE3686878 T2 DE 3686878T2
- Authority
- DE
- Germany
- Prior art keywords
- trench capacitors
- dram arrays
- performance dram
- performance
- arrays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003990 capacitor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
- H01L29/92—Capacitors having potential barriers
- H01L29/94—Metal-insulator-semiconductors, e.g. MOS
- H01L29/945—Trench capacitors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75888585A | 1985-07-25 | 1985-07-25 | |
PCT/US1986/001426 WO1987000690A2 (en) | 1985-07-25 | 1986-07-08 | High-performance dram arrays including trench capacitors |
Publications (2)
Publication Number | Publication Date |
---|---|
DE3686878D1 DE3686878D1 (de) | 1992-11-05 |
DE3686878T2 true DE3686878T2 (de) | 1993-02-25 |
Family
ID=25053486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8686905002T Expired - Fee Related DE3686878T2 (de) | 1985-07-25 | 1986-07-08 | Dram-arrays hoher leistung mit graben-kondensatoren. |
Country Status (7)
Country | Link |
---|---|
US (1) | US4794091A (de) |
EP (1) | EP0232361B1 (de) |
JP (1) | JPS63500484A (de) |
KR (1) | KR880700469A (de) |
CA (1) | CA1258125A (de) |
DE (1) | DE3686878T2 (de) |
WO (1) | WO1987000690A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6207493B1 (en) | 1998-08-19 | 2001-03-27 | International Business Machines Corporation | Formation of out-diffused bitline by laser anneal |
US6977412B2 (en) | 2003-09-05 | 2005-12-20 | Micron Technology, Inc. | Trench corner effect bidirectional flash memory cell |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3387286A (en) * | 1967-07-14 | 1968-06-04 | Ibm | Field-effect transistor memory |
DE2619713C2 (de) * | 1976-05-04 | 1984-12-20 | Siemens AG, 1000 Berlin und 8000 München | Halbleiterspeicher |
DE2737073C3 (de) * | 1977-08-17 | 1981-09-17 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zum Herstellen eines Isolierschicht-Feldeffekttransistors für eine Ein-Transistor-Speicherzelle |
JPS5681968A (en) * | 1979-12-07 | 1981-07-04 | Toshiba Corp | Manufacture of semiconductor device |
US4353086A (en) * | 1980-05-07 | 1982-10-05 | Bell Telephone Laboratories, Incorporated | Silicon integrated circuits |
JPS6012752A (ja) * | 1983-07-01 | 1985-01-23 | Nippon Telegr & Teleph Corp <Ntt> | 半導体記憶装置およびその製造方法 |
JPS6074667A (ja) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | 半導体記憶装置 |
JPS60128658A (ja) * | 1983-12-15 | 1985-07-09 | Toshiba Corp | 半導体記憶装置 |
US4569701A (en) * | 1984-04-05 | 1986-02-11 | At&T Bell Laboratories | Technique for doping from a polysilicon transfer layer |
US4688063A (en) * | 1984-06-29 | 1987-08-18 | International Business Machines Corporation | Dynamic ram cell with MOS trench capacitor in CMOS |
US4672410A (en) * | 1984-07-12 | 1987-06-09 | Nippon Telegraph & Telephone | Semiconductor memory device with trench surrounding each memory cell |
US4683486A (en) * | 1984-09-24 | 1987-07-28 | Texas Instruments Incorporated | dRAM cell and array |
US4673962A (en) * | 1985-03-21 | 1987-06-16 | Texas Instruments Incorporated | Vertical DRAM cell and method |
US4649625A (en) * | 1985-10-21 | 1987-03-17 | International Business Machines Corporation | Dynamic memory device having a single-crystal transistor on a trench capacitor structure and a fabrication method therefor |
US4686552A (en) * | 1986-05-20 | 1987-08-11 | Motorola, Inc. | Integrated circuit trench cell |
-
1986
- 1986-07-08 JP JP61504378A patent/JPS63500484A/ja active Pending
- 1986-07-08 EP EP86905002A patent/EP0232361B1/de not_active Expired - Lifetime
- 1986-07-08 WO PCT/US1986/001426 patent/WO1987000690A2/en active IP Right Grant
- 1986-07-08 DE DE8686905002T patent/DE3686878T2/de not_active Expired - Fee Related
- 1986-07-17 CA CA000514070A patent/CA1258125A/en not_active Expired
-
1987
- 1987-03-24 KR KR870700263A patent/KR880700469A/ko not_active Application Discontinuation
- 1987-11-17 US US07/121,556 patent/US4794091A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
WO1987000690A2 (en) | 1987-01-29 |
DE3686878D1 (de) | 1992-11-05 |
KR880700469A (ko) | 1988-03-15 |
US4794091A (en) | 1988-12-27 |
EP0232361A1 (de) | 1987-08-19 |
WO1987000690A3 (en) | 1987-07-30 |
JPS63500484A (ja) | 1988-02-18 |
EP0232361B1 (de) | 1992-09-30 |
CA1258125A (en) | 1989-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8328 | Change in the person/name/address of the agent |
Free format text: BLUMBACH, KRAMER & PARTNER, 65193 WIESBADEN |
|
8339 | Ceased/non-payment of the annual fee |