WO2021230097A1 - エポキシアクリレート樹脂、アルカリ可溶性樹脂、それを含む樹脂組成物及びその硬化物 - Google Patents
エポキシアクリレート樹脂、アルカリ可溶性樹脂、それを含む樹脂組成物及びその硬化物 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/14—Polymers provided for in subclass C08G
- C08F290/144—Polymers containing more than one epoxy group per molecule
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
- C08F290/14—Polymers provided for in subclass C08G
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F299/00—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
- C08F299/02—Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/14—Polycondensates modified by chemical after-treatment
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
Definitions
- the present invention relates to an epoxy acrylate resin, a curable resin composition using the epoxy acrylate resin, an unsaturated group-containing alkali-soluble resin, a photosensitive resin composition containing the same as an essential component, and a cured product thereof.
- the curable resin composition, the photosensitive resin composition and the cured product thereof of the present invention include permanent protective films such as overcoats, undercoats and insulating coats for manufacturing circuit boards, solder resists, plating resists, etching resists, and the like. It can be applied to an insulating film for multi-layering of a wiring board on which a semiconductor element is mounted, a semiconductor gate insulating film, a photosensitive adhesive, and the like.
- Solder resist ink is used for the insulation protection film of the exposed conductor circuit of the printed wiring board and for preventing solder adhesion to the solder-free part of the circuit.
- a coating film forming method a screen printing method has been conventionally adopted, and a cured film is required to have solder heat resistance, moisture resistance, adhesion, chemical resistance, plating resistance, and electrolytic corrosion resistance.
- solder resists of this type thermosetting type and ultraviolet curable type.
- the former is mainly epoxy resin and the latter is epoxy acrylate resin.
- the insulation film formation by solder resist has become the mainstream instead of the screen printing method.
- the temperature is required to be °C or higher, which not only increases the cost of heating equipment, but also, for example, when a glass epoxy substrate is used for the core substrate, the curing temperature is too high and there is a risk of discoloration or warping of the substrate.
- the cured film obtained from these known epoxy acrylate resins or acid anhydride variants thereof is said to have insufficient solder heat resistance, moisture resistance, adhesion, chemical resistance, plating resistance, electrolytic corrosion resistance, and the like. There's a problem.
- the insulation layer for chip mounting boards such as build-up boards for multi-chip modules (MCM) and chip size packages (CSP) has reliability, pressure cooker resistance, and thermal resistance. Cycleability is required, and when the above-mentioned known epoxy acrylate resin or an acid anhydride modified product thereof is used as a resin composition for a solder resist, there is also a problem that sufficient reliability cannot be exhibited.
- the electronic components used therein are required to be smaller and have higher densities. Further, in terms of workability of the insulating materials used for them, miniaturization and optimization of the cross-sectional shape of the processed pattern are required.
- a method of patterning by exposure and development is known as an effective means for microfabrication of an insulating material, and a photosensitive resin composition has been used there. Many properties such as heat resistance and chemical resistance are required.
- various studies have been made on the use of an organic insulating material in a gate insulating film for an organic TFT, it is necessary to reduce the operating voltage of the organic TFT by thinning the gate insulating film.
- an organic insulating material having an insulating withstand voltage of about 1 MV / cm the application of a thin film having an insulating film thickness of about 0.2 ⁇ m is being studied.
- the conventional insulating material made of a photosensitive resin composition utilizes a photocuring reaction by a reaction between a photoreactive alkali-soluble resin and a photopolymerization initiator, and is mainly used as an exposure wavelength for photocuring.
- the i-line (365 nm), which is one of the line spectra of the above, is used.
- this i-ray is absorbed by the photosensitive resin itself or the colorant, and the degree of photocurability is lowered.
- the exposed portion has a difference in the cross-linking density in the film thickness direction.
- Patent Document 3 discloses that an alkali-soluble unsaturated compound having a polymerizable unsaturated group and a carboxyl group in one molecule is effective for forming a negative pattern such as a color filter.
- a negative pattern such as a color filter.
- the molecular weight and the amount of the carboxyl group of each molecule are widely distributed, the distribution of the alkali dissolution rate of the alkali-soluble resin is wide, and it is difficult to form a fine negative pattern.
- Patent Document 4 discloses polyfunctionalization of an alkali-soluble resin composition that increases the molecular weight of the carboxyl group-containing copolymer.
- the number of polymerizable unsaturated bonds is small and the crosslink density cannot be sufficiently obtained, there is room for improvement of the copolymer structure such as increasing the ratio of the polymerizable unsaturated bonds in one molecule.
- the photosensitive resin composition is also being considered to use the photosensitive resin composition as an interlayer insulating film of a semiconductor device or a flattening film for covering a TFT electrode of a liquid crystal display device.
- the photosensitive resin composition is required to have a low dielectric constant so as not to impair the function of the device.
- Japanese Unexamined Patent Publication No. 61-243869 Japanese Patent Application Laid-Open No. 2003-0267662 Japanese Unexamined Patent Publication No. 4-340965 Japanese Unexamined Patent Publication No. 9-325494
- an object of the present invention is to provide a novel epoxy acrylate resin which can be lightly or thermoset and has good dielectric properties, or to provide a photosensitive resin composition which can be patterned by alkaline development. Further, it is an object of the present invention to provide a curable resin composition having good dielectric properties and excellent reliability such as adhesion and chemical resistance required for solder resists and insulating films of printed wiring boards and cured products thereof. It is an object of the present invention to provide a cured product (cured film) that exhibits excellent chemical resistance when undergoing a processing process such as electrode formation.
- the present inventors obtained by reacting a (meth) acrylic acid with a resin obtained by epoxidizing a dicyclopentadiene-type phenol resin having a dicyclopentenyl group as a substituent.
- the curable resin composition using the epoxy acrylate resin to be obtained is suitable for obtaining a highly reliable cured product (insulating film), and the epoxy acrylate resin is composed of dicarboxylic acids, tricarboxylic acids or acid monoanhydrous thereof. It has been found that a photosensitive resin composition using an alkali-soluble resin obtained by reacting an object is suitable for a solder resist, an insulating film, or the like of a printed wiring board.
- the present invention is an epoxy acrylate resin represented by the following general formula (1).
- R 1 independently represents a hydrocarbon group having 1 to 8 carbon atoms.
- R 2 is independently a hydrogen atom or a dicyclopentenyl group, one or more is a dicyclopentenyl group.
- R 3 represents a hydrogen atom or a methyl group.
- X is an unsaturated bond-containing group represented by the above formula (1a). n indicates the number of repetitions, and the average value thereof is 1 to 5.
- the present invention is an alkali-soluble resin represented by the following general formula (2) and having a carboxyl group and a polymerizable unsaturated group in one molecule.
- R 1 , R 2 , and R 3 are in agreement with the general formula (1), respectively.
- Y represents an unsaturated bond-containing group represented by the above formula (2a)
- L represents a hydrogen atom or a carboxyl group-containing group represented by the above formula (3), and 50 mol% or more of L contains a carboxyl group. It is the basis.
- M indicates a p + 1 valent carboxylic acid residue, and p is 1 or 2.
- the present invention is a curable resin composition characterized by containing the above-mentioned epoxy acrylate resin and a polymerization initiator.
- the present invention is a photosensitive resin composition
- a photosensitive resin composition comprising the above-mentioned alkali-soluble resin, a photopolymerizable monomer having at least one polymerizable unsaturated group, and a photopolymerization initiator.
- the photosensitive resin composition preferably further contains an epoxy resin.
- Another embodiment of the present invention relates to a cured product obtained by curing the curable resin composition or the photosensitive resin composition.
- the epoxy acrylate resin of the present invention can be cured by light or heat, and is also useful as an intermediate of an alkali-soluble resin which is an acid anhydride adduct thereof.
- the alkali-soluble resin of the present invention provides a photosensitive resin composition capable of forming a fine cured film pattern by photolithography. Further, according to the present invention, since it is excellent in chemical resistance (alkali resistance, etc.) and excellent in adhesion to a substrate, heat resistance, electrical reliability, etc., a solder resist of a printed wiring board and optical patterning are required. A cured film pattern such as an insulating film can also be provided.
- R 1 represents a hydrocarbon group having 1 to 8 carbon atoms, an alkyl group having 1 to 8 carbon atoms, an aryl group having 6 to 8 carbon atoms, an aralkyl group having 7 to 8 carbon atoms, or an aralkyl group having 7 to 8 carbon atoms.
- Aryl groups are preferred.
- the alkyl group having 1 to 8 carbon atoms may be linear, branched or cyclic, and may be, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group or a sec-butyl group.
- Examples thereof include, but are not limited to, cycloalkyl groups having 5 to 8 carbon atoms such as groups.
- Examples of the aryl group having 6 to 8 carbon atoms include, but are not limited to, a phenyl group, a tolyl group, a xylyl group, an ethylphenyl group and the like.
- Examples of the aralkyl group having 7 to 8 carbon atoms include, but are not limited to, a benzyl group and an ⁇ -methylbenzyl group.
- substituents a methyl group or a phenyl group is preferable, and a methyl group is particularly preferable, from the viewpoint of easy availability and reactivity when prepared as a cured product.
- R 2 independently represents a hydrogen atom and a dicyclopentenyl group, and one or more are dicyclopentenyl groups.
- the dicyclopentenyl group is a group derived from dicyclopentadiene and is represented by the following formula (1b) or formula (1c). Due to the presence of this group, the cured product of the epoxy acrylate resin of the present invention can have a low dielectric constant.
- n is the number of repetitions, which indicates a number of 1 or more, and the average value thereof indicates a number of 1 to 5, preferably 1.1 to 4.0, more preferably 1.2 to 3.0, and 1. 3 to 2.0 is more preferable.
- the average value is a number average.
- X is an unsaturated bond-containing group represented by formula (1a)
- R 3 represents a hydrogen atom or a methyl group.
- the epoxy acrylate resin of the general formula (1) can be advantageously obtained by reacting the epoxy resin represented by the following general formula (4) with (meth) acrylic acid.
- the epoxy resin is obtained by epoxidizing a dicyclopentadiene-type phenol resin obtained by reacting 2,6-disubstituted phenols with dicyclopentadiene.
- R 1 , R 2 , and n are synonymous with the definitions in the general formula (1), respectively.
- G represents a glycidyl group.
- a known method can be used for the reaction between the epoxy resin and (meth) acrylic acid.
- equimolar (meth) acrylic acid is used for the epoxy group. Since the (meth) acrylic acid is reacted with all the epoxy groups, the (meth) acrylic acid may be used in a slightly larger amount than the equimolar of the epoxy group and the carboxyl group.
- the reaction temperature is 50 to 150 ° C. and the reaction time is 1 to 20 hours. Further, the solvent, catalyst and other reaction conditions used at this time are not particularly limited.
- the solvent for example, it is preferable that it does not have a hydroxyl group and has a boiling point higher than the reaction temperature.
- solvents include cellosolvent solvents including ethyl cellosolve acetate and butyl cellosolve acetate, and high boiling ethers or esters including diglyme, ethyl carbitol acetate, butyl carbitol acetate and propylene glycol monomethyl ether acetate.
- cellosolvent solvents including ethyl cellosolve acetate and butyl cellosolve acetate
- high boiling ethers or esters including diglyme, ethyl carbitol acetate, butyl carbitol acetate and propylene glycol monomethyl ether acetate.
- examples thereof include a based solvent, a ketone solvent containing cyclohexanone, diisobutyl ketone and the like, and aromatic compounds such as benzene, to
- the catalyst examples include amines such as triethylamine and 1,4-diaza [5,4,0] bicycloundecene-7, ammonium salts containing tetraethylammonium bromide and triethylbenzylammonium chloride, triphenylphosphine and the like.
- amines such as triethylamine and 1,4-diaza [5,4,0] bicycloundecene-7
- ammonium salts containing tetraethylammonium bromide and triethylbenzylammonium chloride triphenylphosphine and the like.
- phosphines containing tris (2,6-dimethoxyphenyl) phosphine and known catalysts such as imidazoles such as 2-methylimidazole and 2-ethyl-4-methylimidazole.
- hydroquinone, 4-methylquinoline, phenothiazine and the like can be added as a polymerization inhibitor. Further, in order to suppress the polymerization reaction due to unsaturated bonds, the reaction is sometimes carried out under an air flow such as air.
- the epoxy resin is first represented by the following general formula (5) by reacting a 2,6-di-substituted phenol compound and dicyclopentadiene in the presence of a catalyst such as boron trifluoride ether complex. Synthesize phenolic resin. Then, it can be obtained by reacting the obtained phenol resin with epichlorohydrin such as epichlorohydrin to epoxidize it.
- R 1 , R 2 , and n are synonymous with the definitions in the general formula (1), respectively.
- the above-mentioned phenol resin can be obtained by reacting 2,6-disubstituted phenol with dicyclopentadiene at a predetermined ratio, and dicyclopentadiene is added in several steps (division of two or more times). It may be added sequentially) and reacted intermittently.
- the ratio is 0.28 to 2-fold mol of dicyclopentadiene to 2,6-di-substituted phenol.
- the ratio of dicyclopentadiene to 2,6-disubstituted phenol is 0.25 to 1-fold mol, preferably 0.28 to 1-fold mol. More preferably, 0.3 to 0.5 times mol.
- dicyclopentadiene When dicyclopentadiene is sequentially added in portions and reacted, 0.8 to 2 times mol is preferable as a whole, and 0.9 to 1.7 times mol is more preferable.
- the ratio of dicyclopentadiene used at each stage is preferably 0.28 to 1-fold molar.
- Dicyclopentadiene serves as a cross-linking group for linking 2,6-di-substituted phenol, and a part thereof becomes a part or all of R 2 as a dicyclopentadienyl group.
- R 2 in one molecule has at least one dicyclopentadienyl group on average, preferably 0.5 to 1 per phenol ring. This is the same not only in the general formula (5) but also in R 2 in the general formula (1) and the general formula (2).
- the phenols as raw materials for the phenolic resin represented by the general formula (5) are 2,6-dimethylphenol, 2,6-diethylphenol, 2,6-dipropylphenol, 2,6-diisopropylphenol, 2, 6-di (n-butyl) phenol, 2,6-di (t-butyl) phenol, 2,6-dihexylphenol, 2,6-dicyclohexylphenol, 2,6-diphenylphenol and the like can be obtained. From the viewpoint of ease and reactivity when prepared as a cured product, 2,6-diphenylphenol or 2,6-dimethylphenol is preferable, and 2,6-dimethylphenol is particularly preferable.
- the acid catalyst used for reacting phenols with dicyclopentadiene is Lewis acid, specifically, boron trifluoride, boron trifluoride / phenol complex, boron trifluoride / ether complex, and the like.
- Boron trifluoride compounds metal chlorides such as aluminum chloride, tin chloride, zinc chloride, titanium tetrachloride and iron chloride, and organic sulfonic acids such as methanesulfonic acid, ethanesulfonic acid and propanesulfonic acid, among others.
- Boron trifluoride / ether complex is preferable because of its ease of handling.
- the amount of the acid catalyst used is 0.001 to 20 parts by mass, preferably 0.5 to 10 parts by mass with respect to 100 parts by mass of dicyclopentadiene.
- an electrospray mass spectrometry method ESI-MS
- FD-MS field decomposition method
- the dicyclopentenyl group has been introduced by subjecting a sample obtained by separating components having different numbers of nuclei by mass spectrometry to GPC or the like.
- a sample dissolved in an organic solvent such as THF is applied onto the KRS-5 cell, and the cell with a sample thin film obtained by drying the organic solvent is measured by FT-IR.
- a peak derived from the C—O stretching vibration in the phenol nucleus appears near 1210 cm -1 , and only when a dicyclopentadiene group is introduced, a peak derived from the CH stretching vibration of the olefin moiety of the dicyclopentadiene skeleton appears. Appears near 3040 cm -1.
- the amount of dicyclopentenyl group introduced can be quantified by the ratio of the peaks (A 1210 ) in the vicinity (A 3040 / A 1210). It has been confirmed that the larger the ratio, the better the physical property value, and the preferable ratio (A 3040 / A 1210 ) for satisfying the desired physical property is 0.05 or more, more preferably 0.1 or more.
- reaction method a method in which 2,6-di-substituted phenol and a catalyst are charged in a reactor and dicyclopentadiene is added dropwise over 1 to 10 hours is preferable.
- the reaction temperature is preferably 50 to 200 ° C, more preferably 100 to 180 ° C, and even more preferably 120 to 160 ° C.
- the reaction time is preferably 1 to 10 hours, more preferably 3 to 10 hours, still more preferably 4 to 8 hours.
- aromatic hydrocarbons such as benzene, toluene, and xylene
- halogenated hydrocarbons such as chlorobenzene and dichlorobenzene
- ethylene glycol dimethyl ether diethylene glucol dimethyl ether, etc., as necessary for adjusting the viscosity, etc.
- a solvent such as ethers may be used.
- the epoxy resin represented by the general formula (4) can be advantageously obtained by reacting the above phenol resin with epichlorohydrin such as epichlorohydrin. This reaction is carried out according to a conventionally known method.
- an alkali metal hydroxide such as sodium hydroxide is added to a mixture of a phenol resin and epihalohydrin having an excess amount with respect to the hydroxyl group of the phenol resin as a solid or concentrated aqueous solution, and the reaction temperature is 30 to 120 ° C.
- Polyhalohydro obtained by reacting for 5 to 10 hours or by adding a quaternary ammonium salt such as tetraethylammonium chloride to phenol resin and excess molar epihalohydrin as a catalyst and reacting at a temperature of 50 to 150 ° C. for 1 to 5 hours. It can be obtained by adding an alkali metal hydroxide such as sodium hydroxide to phosphorus ether as a solid or concentrated aqueous solution and reacting at a temperature of 30 to 120 ° C. for 1 to 10 hours.
- the amount of epihalohydrin used is in the range of 1 to 10 times mol, preferably 2 to 5 times mol, with respect to the hydroxyl group of the phenol resin, and the amount of alkali metal hydroxide used is in the hydroxyl group of the phenol resin. On the other hand, it is in the range of 0.85 to 1.1 times the molar amount.
- the epoxy resin obtained by these reactions contains unreacted epihalohydrin and alkali metal halide, the unreacted epihalohydrin is evaporated and removed from the reaction mixture, and the alkali metal halide is further extracted with water.
- the target epoxy resin can be obtained by removing it by a method such as filtration.
- the epoxy equivalent (g / eq.) Of the dicyclopentadiene type epoxy resin is preferably 244 to 3700, more preferably 260 to 2000, and even more preferably 270 to 700.
- the molecular weight distribution of the dicyclopentadiene type epoxy resin can be changed by changing the charging ratio of the phenol resin and epihalohydrin in the epoxidation reaction, and the amount of epihalohydrin used can be brought closer to the equimolar to the hydroxyl group of the phenol resin.
- the dicyclopentadiene type epoxy resin can be reacted with acrylic acid or methacrylic acid to obtain an epoxy acrylate resin represented by the general formula (1).
- This epoxy acrylate resin is a curable resin composition as described later, and can be a cured product.
- the alkali-soluble resin represented by the general formula (2) of the present invention can be obtained from the epoxy acrylate resin represented by the general formula (1).
- the epoxy acrylate resin represented by the general formula (1) is also an intermediate of the alkali-soluble resin represented by the general formula (2).
- R 1 , R 2 , and n agree with the general formula (1)
- Y is an unsaturated bond-containing group represented by the formula (2a)
- L is a hydrogen atom or a formula.
- the carboxyl group-containing group represented by (3) is shown.
- 50 mol% or more of L is a carboxyl group-containing group represented by the formula (3).
- R 3 agrees with formula (1a)
- M represents a p + 1 valent carboxylic acid residue
- p is 1 or 2.
- the carboxylic acid residue is a group formed by taking a carboxyl group or an acid anhydride group from a divalent or trivalent carboxylic acid or a carboxylic acid anhydride.
- All of L may be a carboxyl group-containing group represented by the formula (3), but may have both a hydrogen atom and a carboxyl group-containing group.
- the carboxyl group-containing group is 50 mol% or more in the total L, preferably 70 to 100 mol%, more preferably 90 to 100 mol%, still more preferably 100 mol%. Since the carboxyl group-containing group is reactive with alkali, it imparts alkali solubility to the alkali-soluble resin or its polymerization reaction product (uncured product). By changing the abundance ratio of the carboxyl group-containing group in L, the alkali solubility can be adjusted and the alkali developability can be optimized. Further, the resin properties such as alkali developability can also be changed by changing the type of the carboxyl group-containing group represented by the formula (3).
- the alkali-soluble resin represented by the general formula (2) is selected from the hydroxyl group of the epoxy acrylate resin represented by the general formula (1) and a dicarboxylic acid, a tricarboxylic acid or an acid anhydride thereof (acid monoanhydride). It can be obtained by reacting with carboxylic acids.
- carboxylic acids As the above-mentioned carboxylic acids, acid anhydrides are often used for the reaction, and therefore, they are exemplified as acid anhydrides.
- the carboxylic acid residue generated from the carboxylic acids may be further substituted with a substituent such as an alkyl group, a cycloalkyl group or an aromatic group.
- Saturated chain hydrocarbon dicarboxylic acid or tricarboxylic acid includes succinic acid, acetylsuccinic acid, adipic acid, azelaic acid, citralinic acid, malonic acid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimeric acid, sebacic acid, sverin.
- Acid monoanhydrides such as acid and diglycolic acid are included.
- saturated cyclic hydrocarbon dicarboxylic acid or tricarboxylic acid include acid monoanhydrides such as hexahydrophthalic acid, cyclobutanedicarboxylic acid, cyclopentanedicarboxylic acid, norbornandicarboxylic acid and hexahydrotrimellitic acid.
- the unsaturated dicarboxylic acid or tricarboxylic acid includes acid monoanhydrides such as maleic acid, itaconic acid, tetrahydrophthalic acid, methylendomethylenetetrahydrophthalic acid and chlorendic acid.
- dicarboxylic acids or tricarboxylic acids include acid anhydrides such as phthalic acid and trimellitic acid.
- acid anhydrides of succinic acid, itaconic acid, tetrahydrophthalic acid, hexahydrotrimellitic acid, phthalic acid, or trimellitic acid are preferable, and acid anhydrides of succinic acid, itaconic acid, or tetrahydrophthalic acid are preferable. More preferred. It should be noted that these carboxylic acids may be used alone or in combination of two or more.
- the reaction temperature when synthesizing the alkali-soluble resin is preferably 20 to 120 ° C, more preferably 40 to 90 ° C.
- the molar ratio of the epoxy acrylate resin to the carboxylic acids may be selected so that the ratio of the carboxyl group-containing group in L is within the above range.
- This alkali-soluble resin can be made into a photosensitive resin composition, and can be cured to make a cured product.
- the epoxy acrylate resin or alkali-soluble resin of the present invention has two or more polymerizable unsaturated groups on average, it can be a curable resin composition.
- an epoxy acrylate resin When an epoxy acrylate resin is used, it does not have alkali developability, but when an alkali-soluble resin is used, it may have alkali developability.
- the curable resin composition of the present invention contains the epoxy acrylate resin of the present invention and a polymerization initiator.
- the photosensitive resin composition of the present invention contains the alkali-soluble resin of the present invention, a photopolymerizable monomer, and a photopolymerization initiator.
- the curable resin composition of the present invention may contain a photopolymerization initiator or a radical polymerization initiator as an initiator, and may also contain other polyfunctional acrylates and the like.
- the resin component (a component that becomes an epoxy acrylate resin and a cured resin and does not contain a solvent) in the curable resin composition is preferably 30% by mass or more, more preferably 50% by mass or more, and further preferably 70% by mass or more. preferable.
- photopolymerization initiator various known photopolymerization initiators can be used.
- acetophenones such as acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, pt-butylacetophenone, benzophenone, 2-chlorobenzophenone, etc.
- Benzophenones such as p, p'-bisdimethylaminobenzophenone, benzoin ethers such as benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, and benzoin isobutyl ether, and 2- (o-chlorophenyl) -4,5-phenyl.
- Biimidazole 2- (o-chlorophenyl) -4,5-di (m-methoxyphenyl)) biimidazole, 2- (o-fluorophenyl) -4,5-diphenyl biimidazole, 2- (o-methoxyphenyl) ) -4,5-Diphenylbiimidazole, 2,4,5-triarylbiimidazole and other biimidazole compounds, 2-trichloromethyl-5-stylyl-1,3,4-oxadiazole, 2- Halomethylthiazoles such as trichloromethyl-5- (p-cyanostyryl) -1,3,4-oxadiazole, 2-trichloromethyl-5- (p-methoxystyryl) -1,3,4-oxadiazole.
- photopolymerization initiators examples thereof include organic peroxides, thiol compounds such as 2-mercaptobenzoimidazole, 2-mercaptobenzoxazole and 2-mercaptobenzothiazole, and tertiary amines such as triethanolamine and triethylamine. It should be noted that these photopolymerization initiators may be used alone or in combination of two or more.
- photopolymerization initiators and known photosensitizers can be used at the same time.
- the photosensitizer include Michler's ketone, N, N-dimethylaminobenzoic acid ethyl ester, N, N-dimethylaminobenzoic acid isoamyl ester, triethanolamine, triethylamine and the like.
- the amount of the photosensitizer used is preferably 0 to 20 parts by mass, more preferably 0.02 to 10 parts by mass, still more preferably 0.05 to 2 parts by mass with respect to 100 parts by mass of the epoxy acrylate resin.
- radical polymerization initiators include, for example, known peroxides such as benzoyl peroxide, p-chlorobenzoyl peroxide, diisopropyl peroxycarbonate, di-2-ethylhexyl peroxycarbonate, and t-butylperoxypipalate.
- the amount of the polymerization initiator used is preferably 0.01 to 100 parts by mass, more preferably 0.5 to 40 parts by mass, still more preferably 1 to 10 parts by mass with respect to 100 parts by mass of the epoxy acrylate resin.
- the thermal polymerization initiator and the photopolymerization initiator may be used at the same time, or only one of them may be used.
- the amount of the photopolymerization initiator used is preferably 0.01 to 100 parts by mass, more preferably 0.5 to 40 parts by mass, still more preferably 1 to 10 parts by mass with respect to 100 parts by mass of the epoxy acrylate resin. Further, it is usually 0.01 to 50 parts by mass, preferably 1 to 20 parts by mass with respect to 100 parts by mass of the resin composition.
- the amount of the thermal polymerization initiator used is preferably 0.01 to 100 parts by mass, more preferably 0.02 to 60 parts by mass, still more preferably 0.05 to 2 parts by mass with respect to 100 parts by mass of the epoxy acrylate resin. .. Further, 0.01 to 50 parts by mass is preferable, and 0.01 to 30 parts by mass is more preferable with respect to 100 parts by mass of the curable resin composition. stomach.
- the alkali-soluble resin represented by the general formula (2) is contained in an amount of 30% by mass in the solid content excluding the solvent (the solid content includes a monomer that becomes a solid content after curing). It is preferably contained in an amount of 50% by mass or more, and more preferably 50% by mass or more.
- the photosensitive resin composition it is preferable to contain the following components (A) to (C) as essential components, and it is more preferable to further contain the component (D).
- Examples of the photopolymerizable monomer as the component (B) include a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate and 2-ethylhexyl (meth) acrylate, and ethylene glycol.
- Methylol ethanetri (meth) acrylate pentaerythritol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, Includes (meth) acrylic acid esters such as glycerol (meth) acrylates.
- a photopolymerizable monomer having two or more polymerizable unsaturated groups, and three or more polymerizable unsaturated groups it is preferable to use a photopolymerizable monomer having the above. It should be noted that these compounds may be used alone or in combination of two or more.
- the blending ratio [(A) / (B)] (mass ratio) of these (B) components and (A) components is preferably 20/80 to 90/10, more preferably 40/60 to 80/20.
- the blending ratio of the alkali-soluble resin is small, the cured product after the photocuring reaction becomes brittle. Further, in the unexposed portion, since the acid value of the coating film is low, the solubility in the alkaline developer is lowered, so that there is a problem that the pattern edge is rattling and not sharpened.
- the compounding ratio of the alkali-soluble resin is larger than the above range, the ratio of the photoreactive functional group in the resin is small, so that the formation of the crosslinked structure by the photocuring reaction may be insufficient.
- the acid value of the resin component is too high, the exposed portion becomes highly soluble in the alkaline developer, so that the formed pattern tends to be thinner than the target line width, and the pattern is likely to be missing. Problems may occur.
- Examples of the photopolymerization initiator of the component (C) include the same photopolymerization initiators mentioned in the description of the curable resin composition of the present invention.
- the amount of the component (C) added is preferably 0.1 to 10 parts by mass, more preferably 2 to 5 parts by mass, based on 100 parts by mass of the total of the component (A) and the component (B).
- the amount of the photopolymerization initiator added is less than 0.1 parts by mass, sufficient sensitivity cannot be obtained, and if the amount of the photopolymerization initiator added exceeds 10 parts by mass, the taper shape (film in the cross section of the developing pattern). Halation is likely to occur in which the hem is pulled without sharpening the shape in the thick direction. Further, decomposition gas may be generated when exposed to a high temperature in a subsequent process.
- Examples of the (D) epoxy resin include phenol novolac type epoxy resin, cresol novolac type epoxy resin, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, biphenyl type epoxy resin, and alicyclic epoxy resin.
- Epoxy resins such as, phenylglycidyl ether, p-butylphenol glycidyl ether, triglycidyl isocyanurate, diglycidyl isocyanurate, allyl glycidyl ether, glycidyl methacrylate and other compounds having at least one epoxy group.
- a compound having at least two epoxy groups is preferable.
- the amount added is preferably in the range of 10 to 40 parts by mass with respect to 100 parts by mass in total of the component (A) and the component (B).
- one purpose of adding the epoxy resin is to reduce the amount of carboxyl groups remaining when the cured film is formed after patterning in order to improve the reliability of the cured film. In this case, If the amount of the epoxy resin used is less than 10 parts by mass, the moisture resistance and reliability when used as an insulating film may not be ensured. Further, when the amount of the epoxy resin used is more than 40 parts by mass, the amount of photosensitive groups in the resin component in the photosensitive resin composition may decrease, and sufficient sensitivity for patterning may not be obtained. ..
- the photosensitive resin composition containing the above-mentioned components (A) to (C) or (A) to (D) can be dissolved in a solvent or mixed with various additives, if necessary.
- a solvent in addition to the above essential components.
- solvents include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol and propylene glycol, terpenes such as ⁇ - or ⁇ -terpineol, acetone, methyl ethyl ketone, cyclohexanone and N-methyl-2.
- -Ketones such as pyrrolidone, aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, cellosolve, methyl cellosolve, ethyl cellosolve, carbitol, methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl.
- Glycol ethers such as ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl.
- Acetate esters such as cellosolve acetate, butyl cellosolve acetate, carbitol acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, and propylene glycol monoethyl ether acetate are included.
- a curing accelerator for example, known compounds known as curing accelerators, curing catalysts, latent curing agents and the like usually applied to epoxy resins can be used, and tertiary amines, quaternary ammonium salts and tertiary. Includes phosphine, quaternary phosphonium salt, borate ester, Lewis acid, organic metal compounds, imidazoles, diazabicyclo-based compounds and the like.
- thermal polymerization inhibitors and antioxidants examples include hydroquinone, hydroquinone monomethyl ether, pyrogallol, t-butylcatechol, phenothiazine, hindered phenolic compounds, phosphorus-based heat stabilizers and the like.
- plasticizer examples include dibutyl phthalate, dioctyl phthalate, tricresyl phosphate and the like.
- fillers include glass fiber, silica, mica, alumina and the like.
- the defoaming agent and the leveling agent include silicone-based, fluorine-based, and acrylic-based compounds.
- Examples of coupling agents include vinyltrimethoxysilane, 3-methacryloxypropyltrimethoxysilane, 3- (glycidyloxy) propyltrimethoxysilane, 3-isosyanatopropyltriethoxysilane, 3-aminopropyltriethoxysilane, Includes 3- (phenylamino) propyltrimethoxysilane and 3-ureidopropyltriethoxysilane.
- Examples of the surfactant include a fluorine-based surfactant, a silicone-based surfactant and the like.
- the photosensitive resin composition of the present invention contains 70% by mass or more, preferably 80% by mass, more preferably 90% by mass or more of the above components (A) to (D) in the solid content excluding the solvent. It is good to be.
- the amount of the solvent varies depending on the target viscosity, but is preferably 10 to 80% by mass based on the total amount.
- the coating film (cured product) of the present invention is, for example, applied to a substrate or the like with a solution of a photosensitive resin composition, dried with a solvent, and irradiated with light (including ultraviolet rays, radiation, etc.) to be cured. Obtained at.
- a coating film having a desired pattern can be obtained by providing a portion exposed to light and a portion not exposed to light using a photomask or the like, curing only the portion exposed to light, and dissolving the other portion with an alkaline solution. ..
- a known solution dipping method, a spray method, and a roller coater machine are used.
- a method using a land coater machine, a slit coat machine, a spinner machine, or the like can be adopted.
- a film is formed by applying to a desired thickness and then removing the solvent (pre-baking).
- Pre-baking is performed by heating with an oven, a hot plate, etc., vacuum drying, or a combination thereof.
- the heating temperature and heating time in the prebake can be appropriately selected depending on the solvent used, but for example, it is preferably performed at 80 to 120 ° C. for 1 to 10 minutes.
- the radiation used for exposure for example, visible light, ultraviolet light, far ultraviolet light, electron beam, g-ray, i-ray, X-ray and the like can be used, but the wavelength range of the radiation is 250 to 450 nm. preferable.
- a developer suitable for this alkaline development for example, an aqueous solution of sodium carbonate, potassium carbonate, potassium hydroxide, diethanolamine, tetramethylammonium hydroxide or the like can be used.
- These developers can be appropriately selected according to the characteristics of the resin layer, but it is also effective to add a surfactant if necessary.
- the development temperature is preferably 20 to 35 ° C., and a fine image can be precisely formed by using a commercially available developing machine, an ultrasonic cleaner, or the like. After alkaline development, it is usually washed with water.
- a shower developing method, a spray developing method, a dip (immersion) developing method, a paddle (liquid filling) developing method and the like can be applied.
- post-baking heat treatment
- This post-baking is performed for the purpose of enhancing the adhesion between the patterned coating film and the substrate. This is done by heating in an oven, hot plate, etc., similar to pre-baking.
- the patterned coating film is formed through each step by the photolithography method.
- polymerization or curing (sometimes referred to as curing together) is completed by heat to obtain a cured film such as an insulating film having a desired pattern.
- the curing temperature at this time is preferably 160 to 250 ° C.
- the cured product of the present invention can take various forms other than the cured film.
- the photosensitive resin composition of the present invention has improved photocurability because the component (A) has a large number of polymerizable unsaturated groups in one molecule, and the crosslink density after curing without increasing the amount of the photopolymerization initiator. Can be enhanced. That is, when the thick film is irradiated with ultraviolet rays or electron beams, the cured portion is cured to the bottom, and the difference in solubility in the alkaline developer between the exposed portion and the unexposed portion becomes large. The pattern adhesion is improved and the pattern can be formed with high resolution. Further, even in the case of a thin film, the increased sensitivity makes it possible to significantly improve the amount of residual film in the exposed portion and suppress peeling during development.
- the photosensitive composition of the present invention includes a solder resist, a plating resist, an etching resist for manufacturing a circuit board, an insulating film for multi-layering a wiring board on which a semiconductor element is mounted, a semiconductor gate insulating film, and a photosensitive adhesive ().
- a photosensitive adhesive In particular, it is extremely useful for adhesives that require heat-adhesive performance even after pattern formation by photolithography).
- Solid content concentration 100 ⁇ (W2-W0) / (W1-W0)
- VNA vector network analyzer
- VNA cavity resonator permittivity measuring device
- a glass substrate with a cured film is immersed in a solution of a mixture of 30 parts of 2-aminoethanol and 70 parts of glycol ether held at 80 ° C., pulled up after 10 minutes, washed with pure water, dried, and soaked in chemicals. Was prepared and the adhesion was evaluated.
- E1 Epoxy resin obtained in Synthesis Example 1
- E2 Epoxy resin obtained in Synthesis Example 2
- E3 Phenol novolac type epoxy resin (manufactured by Nittetsu Chemical & Materials Co., Ltd., YDPN-638, epoxy equivalent 177 g / eq.)
- E4 Bisphenol A type liquid epoxy resin (manufactured by Nittetsu Chemical & Materials Co., Ltd., YD-127, epoxy equivalent 182 g / eq.)
- E5 Cresol novolak type epoxy resin (manufactured by Nittetsu Chemical & Materials Co., Ltd., YDCN-700-3, epoxy equivalent 203 g / eq., Softening point 73 ° C.)
- THPA 1,2,3,6-tetrahydrophthalic anhydride
- TPP Triphenylphosphine HQ: Hydroquinone TEAB:
- Synthesis example 1 970 parts of 2,6-xylenol and 14.5 parts of 47% BF 3 ether complex were charged into a reaction device equipped with a stirrer, a temperature controller, a nitrogen introduction device, a dropping device, and a reflux condenser, and 70 parts were stirred while stirring. It was heated to ° C. While maintaining the same temperature, 300 parts of dicyclopentadiene (0.29 times mol with respect to 2,6-xylenol) was added dropwise over 2 hours. Further, the reaction was carried out at a temperature of 125 to 135 ° C. for 6 hours, and 2.3 parts of calcium hydroxide was added. Further, 4.6 parts of a 10% oxalic acid aqueous solution was added.
- Synthesis example 2 To the same reactor as in Synthesis Example 1, 95.0 parts of 2,6-xylenol, 47% BF 3 g of ether complex 6.3 parts, was heated with stirring to 70 ° C.. While maintaining the same temperature, 58.8 parts of dicyclopentadiene (0.56 times mol with respect to 2,6-xylenol) was added dropwise over 1 hour. After further reacting at a temperature of 115 to 125 ° C. for 3 hours, 69.2 parts of dicyclopentadiene (0.67 times mol with respect to 2,6-xylenol) was further added dropwise at the same temperature in 1 hour, and 115 ° C. to 125 ° C.
- the reaction was carried out at a temperature of ° C. for 2 hours. 1.0 part of calcium hydroxide was added. Further, 2.0 parts of a 10% oxalic acid aqueous solution was added. Then, it was heated to 160 ° C. and dehydrated, and then heated to 200 ° C. under a reduced pressure of 5 mmHg to evaporate and remove the unreacted raw material. 520 parts of MIBK was added to dissolve the product, 150 parts of warm water at 80 ° C. was added and washed with water, and the lower water tank was separated and removed. Then, the MIBK was evaporated and removed by heating to 160 ° C. under a reduced pressure of 5 mmHg to obtain 221 parts of a reddish brown phenol resin.
- the hydroxyl group equivalent was 377, the softening point was 102 ° C., and the absorption ratio (A 3040 / A 1210 ) was 0.18.
- M- 253, 375, 507, 629 was confirmed.
- Example 1 In a reaction vessel equipped with a stirrer, temperature controller, reflux condenser, and air introduction device, 282 parts of E1 was dissolved in 63 parts of PGMEA, and 72 parts of acrylic acid, 3.5 parts of TPP, and 0.1 part of HQ were dissolved. Was allowed to react at 110 ° C. for 8 hours while blowing air, and then 293 parts of PGMEA was added to obtain a PGMEA solution of epoxy acrylate resin (R1). The solid content concentration of the obtained resin solution was 50%.
- the solvent was removed from the obtained resin solution by distillation under reduced pressure, 100 parts of the obtained solid content was placed in a fluororesin mold, 1 part of dicumyl peroxide was added, and the mixture was placed in an oven at 100 ° C. for 30 minutes for 170. It was heated at ° C. for 1 hour and cured to obtain a cured product. From this cured product, a test piece having a thickness of 0.2 mm and a thickness of 0.2 cm ⁇ 10 cm was prepared, and the relative permittivity and the dielectric loss tangent were measured.
- Example 2 In the same apparatus as in Example 1, 446 parts of E2 were dissolved in 97 parts of PGMEA, 72 parts of acrylic acid, 3.5 parts of TPP, and 0.1 part of HQ were added, and the temperature was 110 ° C. while blowing air. After reacting for 8 hours, 450 parts of PGMEA was added to obtain a PGMEA solution of epoxy acrylate resin (R2). The solid content concentration of the obtained resin solution was 50%. The relative permittivity and the dielectric loss tangent were measured in the same manner as in Example 1.
- Comparative Example 1 In the same apparatus as in Example 1, 177 parts of E3 was dissolved in 44 parts of PGMEA, 72 parts of acrylic acid, 3.5 parts of TPP, and 0.1 part of HQ were further added, and the temperature was 110 ° C. while blowing air. After reacting for 8 hours, 208 parts of PGMEA was added to obtain a PGMEA solution of epoxy acrylate resin (HR1). The solid content concentration of the obtained resin solution was 50%. The relative permittivity and the dielectric loss tangent were measured in the same manner as in Example 1. The results are shown in Table 1.
- Example 3 450 parts of 50% PGMEA solution of R1, 95 parts of THPA, 1.8 parts of TEAB, and 38 parts of PGMEA were charged in the same apparatus as in Example 1, and the mixture was stirred at 120 to 125 ° C. for 6 hours to obtain an alkali-soluble resin solution (an alkali-soluble resin solution). A1) was obtained. The solid content concentration of the obtained resin solution was 55%.
- a photosensitive resin composition was obtained by blending 53 parts of A1, 12.5 parts of B1, 1.3 parts of C1, 0.2 parts of C2, 6.3 parts of E5, and 28 parts of PGMEA. rice field.
- the obtained photosensitive resin composition is applied onto a glass substrate of 125 mm ⁇ 125 mm using a spin coater so that the film thickness after post-baking is 30 ⁇ m, and prebaked at 110 ° C. for 5 minutes to prepare a coated plate. bottom.
- a high-pressure mercury lamp of 500 W / cm 2 was irradiated with ultraviolet rays having a wavelength of 365 nm, and a photocuring reaction was carried out with full exposure.
- this exposed coated plate was treated with a 0.8% aqueous solution of tetramethylammonium hydroxide (TMAH) in a shower at 23 ° C. for 60 seconds, and further washed with spray water. Then, it was heat-cured at 230 ° C. for 30 minutes using a hot air dryer to obtain a glass substrate with a cured film.
- TMAH tetramethylammonium hydroxide
- Example 4 450 parts of 50% PGMEA solution of R2, 62 parts of THPA, 1.8 parts of TEAB, and 11 parts of PGMEA were charged in the same apparatus as in Example 1, and the mixture was stirred at 120 to 125 ° C. for 6 hours to obtain an alkali-soluble resin solution (an alkali-soluble resin solution). A2) was obtained. The solid content concentration of the obtained resin solution was 55%.
- Example 3 The same operation as in Example 3 was performed except that A2 was used instead of A1, to obtain a photosensitive resin composition and a glass substrate with a cured film.
- Comparative Example 2 450 parts of 50% PGMEA solution of HR1, 135 parts of THPA, 1.8 parts of TEAB, and 70 parts of PGMEA were charged in the same apparatus as in Example 1, and the mixture was stirred at 120 to 125 ° C. for 6 hours to obtain an alkali-soluble resin solution (an alkali-soluble resin solution). HA1) was obtained. The solid content concentration of the obtained resin solution was 55%.
- Example 3 The same operation as in Example 3 was performed except that HA1 was used instead of A1, to obtain a photosensitive resin composition and a glass substrate with a cured film.
- Comparative Example 3 In the same apparatus as in Example 1, 182 parts of E4 was dissolved in 45 parts of PGMEA, 72 parts of acrylic acid, 3.5 parts of TPP, and 0.1 part of HQ were added, and the temperature was 110 ° C. while blowing air. After reacting for 8 hours, 212 parts of PGMEA was added to obtain a PGMEA solution of epoxy acrylate resin. The solid content concentration of the obtained resin solution was 50%. 291 parts of the obtained resin solution, 4.0 parts of dimethylolpropionic acid, 11.8 parts of 1,6-hexanediol, and 104 parts of PGMEA were charged and the temperature was raised to 45 ° C. Next, 61.8 parts of isophorone diisocyanate was added dropwise.
- the mixture was stirred at 75-80 ° C. for 6 hours. Further, 21 parts of THPA were charged and stirred at 90 to 95 ° C. for 6 hours to obtain an alkali-soluble resin solution (HA2). The solid content concentration of the obtained resin solution was 55%.
- Example 3 The same operation as in Example 3 was performed except that HA2 was used instead of A1, to obtain a photosensitive resin composition and a glass substrate with a cured film.
- Table 2 shows the results of measuring the acid value (solid content equivalent) and molecular weight (Mw) of the obtained resin solution, and the results of adhesion, alkali resistance, and acid resistance tests on the obtained glass substrate with a cured film. It was shown to.
- the curable resin composition, the photosensitive resin composition, and the cured product thereof of the present invention are a solder resist for manufacturing a circuit board, a plating resist, an etching resist, and an insulation for multi-layering of a wiring board on which a semiconductor element is mounted. It can be applied to films, semiconductor gate insulating films, photosensitive adhesives, and the like.
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Abstract
Description
R1は独立に、炭素数1~8の炭化水素基を示し、
R2は独立に、水素原子又はジシクロペンテニル基を示し、1以上はジシクロペンテニル基である。
R3は水素原子又はメチル基を示す。
Xは上記式(1a)で表される不飽和結合含有基である。
nは繰り返し数を示し、その平均値は1~5である。
Yは上記式(2a)で表される不飽和結合含有基であり、Lは水素原子又は上記式(3)で表されるカルボキシル基含有基を示し、Lの50モル%以上はカルボキシル基含有基である。Mはp+1価のカルボン酸残基を示し、pは1又は2である。
更に、本発明によれば、耐薬品性(耐アルカリ性等)に優れ、基板に対する密着性、耐熱性、電気的信頼性等について優れるため、プリント配線板のソルダーレジストや、光パターニングを必要とする絶縁膜等の硬化膜パターンも提供することができる。
本発明のエポキシアクリレート樹脂は、上記一般式(1)で表される。
一般式(1)において、R1は炭素数1~8の炭化水素基を示し、炭素数1~8のアルキル基、炭素数6~8のアリール基、炭素数7~8のアラルキル基、又はアリル基が好ましい。炭素数1~8のアルキル基としては、直鎖状、分岐状、環状のいずれでもよく、例えば、メチル基、エチル基、n-プロピル基、イソプロピル基、n-ブチル基、sec-ブチル基、イソブチル基、t-ブチル基、n-ペンチル基、イソペンチル基、ネオペンチル基、t-ペンチル基、メチルブチル基、n-ヘキシル基、ジメチルブチル基、n-ヘプチル基、メチルヘキシル基、トリメチルブチル基、n-オクチル基、ジメチルペンチル基、エチルペンチル基、イソオクチル基、エチルヘキシル基などの炭化水素基や、シクロヘキシル基、シクロヘプチル基、シクロオクチル基、メチルシクロヘキシル基、ジメチルシクロヘキシル基、エチルシクロヘキシル基、メチルシクロヘプチル基などの炭素数5~8のシクロアルキル基が挙げられるが、これらに限定されない。炭素数6~8のアリール基としては、フェニル基、トリル基、キシリル基、エチルフェニル基等が挙げられるが、これらに限定されない。炭素数7~8のアラルキル基としては、ベンジル基、α-メチルベンジル基等が挙げられるが、これらに限定されない。これらの置換基の中では、入手の容易性及び硬化物とするときの反応性の観点から、メチル基又はフェニル基が好ましく、メチル基が特に好ましい。
上記エポキシ樹脂は、まず、2,6-ジ置換フェノール化合物とジシクロペンタジエンとを三フッ化ホウ素・エーテル錯体などの触媒の存在下で反応させることにより、下記一般式(5)で表されるフェノール樹脂を合成する。そして、得られたフェノール樹脂をエピクロルヒドリンなどのエピハロヒドリンと反応させてエポキシ化することにより得ることができる。
ジシクロペンタジエンは、2,6-ジ置換フェノールを連結する架橋基となるほか、一部はジシクロペンタジエニル基として、R2の一部又は全部となる。
一分子中のR2中には、平均して少なくとも1個以上、好ましくはフェノール環1つ当たり、0.5~1個ジシクロペンタジエニル基を有する。これは、一般式(5)に限らず、一般式(1)及び一般式(2)におけるR2においても同様である。
Lは全部が式(3)で表されるカルボキシル基含有基であってもよいが、水素原子とカルボキシル基含有基の両方を有していてもよい。カルボキシル基含有基は、全L中の50モル%以上であり、70~100モル%が好ましく、90~100モル%がより好ましく、100モル%が更に好ましい。カルボキシル基含有基は、アルカリと反応性であるため、アルカリ可溶性樹脂又はその重合反応物(未硬化物)にアルカリ可溶性を与える。Lにおけるカルボキシル基含有基の存在比を変化させることにより、アルカリ可溶性を調整することができ、アルカリ現像性を最適化することができる。また、式(3)で表わされるカルボキシル基含有基の種類を変化させることによっても、アルカリ現像性を初めとする樹脂特性を変化させることができる。
飽和鎖式炭化水素ジカルボン酸又はトリカルボン酸としては、コハク酸、アセチルコハク酸、アジピン酸、アゼライン酸、シトラリンゴ酸、マロン酸、グルタル酸、クエン酸、酒石酸、オキソグルタル酸、ピメリン酸、セバシン酸、スベリン酸、ジグリコール酸等の酸一無水物が含まれる。
飽和環式炭化水素ジカルボン酸又はトリカルボン酸としては、ヘキサヒドロフタル酸、シクロブタンジカルボン酸、シクロペンタンジカルボン酸、ノルボルナンジカルボン酸、ヘキサヒドロトリメリット酸等の酸一無水物が含まれる。
不飽和ジカルボン酸又はトリカルボン酸としては、マレイン酸、イタコン酸、テトラヒドロフタル酸、メチルエンドメチレンテトラヒドロフタル酸、クロレンド酸等の酸一無水物が含まれる。
その他のジカルボン酸又はトリカルボン酸としては、フタル酸、トリメリット酸等の酸無水物が含まれる。これらのなかでは、コハク酸、イタコン酸、テトラヒドロフタル酸、ヘキサヒドロトリメリット酸、フタル酸、又はトリメリット酸の酸無水物が好ましく、コハク酸、イタコン酸、又はテトラヒドロフタル酸の酸無水物がより好ましい。なお、これらのカルボン酸類は1種類で使用することも、2種類以上を併用することもできる。
エポキシアクリレート樹脂を使用した場合はアルカリ現像性を有しないが、アルカリ可溶性樹脂を使用した場合はアルカリ現像性を有し得る。
本発明の硬化性樹脂組成物は、本発明のエポキシアクリレート樹脂と重合開始剤を含む。本発明の感光性樹脂組成物は、本発明のアルカリ可溶性樹脂と光重合性モノマーと光重合開始剤を含む
熱重合開始剤と光重合開始剤は同時に使用してもよく、どちらか一方だけを使用してもよい。
光重合開始剤の使用量はエポキシアクリレート樹脂100質量部に対して、0.01~100質量部が好ましく、0.5~40質量部がより好ましく、1~10質量部が更に好ましい。また、樹脂組成物100質量部に対して、通常0.01~50質量部であり、好ましくは1~20質量部である。
熱重合開始剤の使用量は、エポキシアクリレート樹脂100質量部に対して、0.01~100質量部が好ましく、0.02~60質量部がより好ましく、0.05~2質量部が更に好ましい。また、硬化性樹脂組成物100質量部に対して0.01~50質量部が好ましく、0.01~30質量部がより好ましい。
い。
(A)上記アルカリ可溶性樹脂、
(B)少なくとも1個の重合性不飽和基を有する光重合性モノマー、
(C)光重合開始剤、
(D)エポキシ樹脂
(C)成分添加量は、(A)成分と(B)成分の合計100質量部に対して、0.1~10質量部が好ましく、2~5質量部がより好ましい。ここで、光重合開始剤の添加量が0.1質量部未満であると感度が十分に得られず、光重合開始剤の添加量が10質量部を超えるとテーパー形状(現像パターン断面の膜厚方向形状)がシャープにならないで裾を引いた状態になるハレーションが起こりやすくなる。更に、後工程で高温に暴露した場合に分解ガスが発生するおそれがある。
溶剤の量は、目標とする粘度によって変化するが、全体量に対して10~80質量%が好ましい。
また、このアルカリ現像に適した現像液としては、例えば、炭酸ナトリウム、炭酸カリウム、水酸化カリウム、ジエタノールアミン、テトラメチルアンモニウムヒドロキシド等の水溶液を用いることができる。これらの現像液は、樹脂層の特性に合わせて適宜選択されうるが、必要に応じて界面活性剤を添加することも有効である。現像温度は、20~35℃が好ましく、市販の現像機や超音波洗浄機等を用いて微細な画像を精密に形成することができる。なお、アルカリ現像後は、通常、水洗される。現像処理法としては、シャワー現像法、スプレー現像法、ディップ(浸漬)現像法、パドル(液盛り)現像法等を適用することができる。
樹脂溶液、感光性樹脂組成物等(約1g)をガラスフィルター〔質量:W0(g)〕に含浸させて精秤し〔W1(g)〕、160℃で2時間加熱した後の質量〔W2(g)〕の値を用いて、下記式により算出した。
固形分濃度(%)=100×(W2-W0)/(W1-W0)
JIS K 0070規格に準拠して測定した。具体的には、樹脂溶液をジオキサンに溶解させ、電位差滴定装置「COM-1600」(平沼産業株式会社製)を用いて0.1N-KOH水溶液で滴定して、固形分1gあたりに必要としたKOHの量(mg)を酸価とした。
ゲルパーミュエーションクロマトグラフィー(GPC)(「HLC-8220GPC」東ソー株式会社製、カラム:TSKgelSuperH2000(2本)+TSKgelSuperH3000(1本)+TSKgelSuperH4000(1本)+TSKgelSuperH5000(1本)(いずれも東ソー株式会社製)、溶媒:テトラヒドロフラン、温度:40℃、速度:0.6mL/min)にて測定し、標準ポリスチレン(「PS-オリゴマーキット」東ソー株式会社製)換算値として求めた値を重量平均分子量(Mw)とした。
空洞共振法(ベクトルネットワークアナライザー(VNA)E8363B(アジレント・テクノロジー製)、空洞共振器摂動法誘電率測定装置(関東電子応用開発製))を用いて、絶乾後23℃、湿度50%の室内に24時間保管した後の、1GHzの値を測定した。
硬化膜付きガラス基板の膜上に少なくとも100個の碁盤目状になるようにクロスカットを入れて、次いでセロハンテープを用いてピーリング試験を行い、碁盤目の状態を目視によって評価した。
◎:全く剥離がみられないもの
○:僅かに塗膜に剥離が確認できるもの
△:一部塗膜に剥離が確認できるもの
×:膜が殆ど剥離してしまうもの
硬化膜付きガラス基板を、2-アミノエタノール30部、グリコールエーテル70部の混合液の80℃に保持した溶液に浸漬し、10分後に引き上げて純水で洗浄、乾燥して、薬品浸漬したサンプルを作製して、上記密着性を評価した。
硬化膜付きガラス基板を、王水(塩酸:硝酸=7:3)の50℃に保持した溶液に浸漬し、10分後に引き上げて純水で洗浄、乾燥して、薬品浸漬したサンプルを作製して、上記密着性を評価した。
E1:合成例1で得られたエポキシ樹脂
E2:合成例2で得られたエポキシ樹脂
E3:フェノールノボラック型エポキシ樹脂(日鉄ケミカル&マテリアル株式会社製、YDPN-638、エポキシ当量177g/eq.)
E4:ビスフェノールA型液状エポキシ樹脂(日鉄ケミカル&マテリアル株式会社製、YD-127、エポキシ当量182g/eq.)
E5:クレゾールノボラック型エポキシ樹脂(日鉄ケミカル&マテリアル株式会社製、YDCN-700-3、エポキシ当量203g/eq.、軟化点73℃)
THPA:1,2,3,6-テトラヒドロフタル酸無水物
TPP:トリフェニルホスフィン
HQ:ハイドロキノン
TEAB:臭化テトラエチルアンモニウム
MIBK:メチルイソブチルケトン
PGMEA:プロピレングリコールモノメチルエーテルアセテート
B1:ジペンタエリスリトールヘキサアクリレート
C1:光重合開始剤(BASF社製、イルガキュア184)
C2:光重合開始剤(4,4’-ビス(ジメチルアミノ)ベンゾフェノン(ミヒラーケトン))
撹拌機、温度調節装置、窒素導入装置、滴下装置、及び還流冷却管を備えた反応装置に、2,6-キシレノール970部、47%BF3エーテル錯体14.5部を仕込み、撹拌しながら70℃に加温した。同温度に保持しながら、ジシクロペンタジエン300部(2,6-キシレノールに対し0.29倍モル)を2時間で滴下した。更に125~135℃の温度で6時間反応し、水酸化カルシウム2.3部を加えた。更に10%のシュウ酸水溶液4.6部を添加した。その後、160℃まで加温して脱水した後、5mmHgの減圧下、200℃まで加温して未反応の原料を蒸発除去した。MIBK1000部を加えて生成物を溶解し、80℃の温水400部を加えて水洗し、下層の水槽を分離除去した。その後、5mmHgの減圧下、160℃に加温してMIBKを蒸発除去して、赤褐色のフェノール樹脂を540部得た。水酸基当量は213であり、軟化点は71℃であり、吸収比(A3040/A1210)は0.11であった。ESI-MS(ネガティブ)によるマススペクトルを測定したところ、M-=253、375、507、629が確認された。
合成例1と同様の反応装置に、2,6-キシレノール95.0部、47%BF3エーテル錯体6.3部を仕込み、撹拌しながら70℃に加温した。同温度に保持しながら、ジシクロペンタジエン58.8部(2,6-キシレノールに対し0.56倍モル)を1時間で滴下した。更に115~125℃の温度で3時間反応した後、更に同温度でジシクロペンタジエン69.2部(2,6-キシレノールに対し0.67倍モル)を1時間で滴下し、115℃~125℃の温度で2時間反応した。水酸化カルシウム1.0部を加えた。更に10%のシュウ酸水溶液2.0部を添加した。その後、160℃まで加温して脱水した後、5mmHgの減圧下、200℃まで加温して未反応の原料を蒸発除去した。MIBK520部を加えて生成物を溶解し、80℃の温水150部を加えて水洗し、下層の水槽を分離除去した。その後、5mmHgの減圧下、160℃に加温してMIBKを蒸発除去して、赤褐色のフェノール樹脂を221部得た。水酸基当量は377であり、軟化点は102℃であり、吸収比(A3040/A1210)は0.18であった。ESI-MS(ネガティブ)によるマススペクトルを測定したところ、M-=253、375、507、629が確認された。
撹拌機、温度調節装置、還流冷却器、及び空気導入装置を備えた反応容器に、282部のE1を63部のPGMEAに溶解し、更にアクリル酸72部、TPP3.5部、HQ0.1部を加えて、空気を吹きこみながら、110℃で8時間反応させた後、PGMEA293部加えて、エポキシアクリレート樹脂(R1)のPGMEA溶液を得た。得られた樹脂溶液の固形分濃度は50%であった。
実施例1と同様の装置に、446部のE2を97部のPGMEAに溶解し、更にアクリル酸72部、TPP3.5部、HQ0.1部を加えて、空気を吹きこみながら、110℃で8時間反応させた後、PGMEA450部加えて、エポキシアクリレート樹脂(R2)のPGMEA溶液を得た。得られた樹脂溶液の固形分濃度は50%であった。実施例1と同様にして比誘電率及び誘電正接を測定した。
実施例1と同様の装置に、177部のE3を44部のPGMEAに溶解し、更にアクリル酸72部、TPP3.5部、HQ0.1部を加えて、空気を吹きこみながら、110℃で8時間反応させた後、PGMEA208部加えて、エポキシアクリレート樹脂(HR1)のPGMEA溶液を得た。得られた樹脂溶液の固形分濃度は50%であった。実施例1と同様にして比誘電率及び誘電正接を測定した。
結果を表1に示す。
実施例1と同様の装置に、R1の50%PGMEA溶液450部と、THPA95部と、TEAB1.8部と、PGMEA38部とを仕込み、120~125℃で6時間撹拌し、アルカリ可溶性樹脂溶液(A1)を得た。得られた樹脂溶液の固形分濃度は55%であった。
実施例1と同様の装置に、R2の50%PGMEA溶液450部と、THPA62部と、TEAB1.8部と、PGMEA11部とを仕込み、120~125℃で6時間撹拌し、アルカリ可溶性樹脂溶液(A2)を得た。得られた樹脂溶液の固形分濃度は55%であった。
実施例1と同様の装置に、HR1の50%PGMEA溶液450部と、THPA135部と、TEAB1.8部と、PGMEA70部とを仕込み、120~125℃で6時間撹拌し、アルカリ可溶性樹脂溶液(HA1)を得た。得られた樹脂溶液の固形分濃度は55%であった。
実施例1と同様の装置に、182部のE4を45部のPGMEAに溶解し、更にアクリル酸72部、TPP3.5部、HQ0.1部を加えて、空気を吹きこみながら、110℃で8時間反応させた後、PGMEA212部加えて、エポキシアクリレート樹脂のPGMEA溶液を得た。得られた樹脂溶液の固形分濃度は50%であった。得られた樹脂溶液291部と、ジメチロールプロピオン酸4.0部と、1,6-ヘキサンジオール11.8部と、PGMEA104部とを仕込み、45℃に昇温した。次に、イソホロンジイソシアネート61.8部を滴下した。滴下終了後、75~80℃で6時間撹拌した。更に、THPA21部を仕込み、90~95℃で6時間撹拌し、アルカリ可溶性樹脂溶液(HA2)を得た。得られた樹脂溶液の固形分濃度は55%であった。
Claims (9)
- 請求項1に記載のエポキシアクリレート樹脂と重合開始剤とを含有することを特徴とする硬化性樹脂組成物。
- 請求項2に記載の硬化性樹脂組成物を硬化させた硬化物。
- 請求項2に記載のアルカリ可溶性樹脂と、少なくとも1個の重合性不飽和基を有する光重合性モノマーと、光重合開始剤とを含有することを特徴とする感光性樹脂組成物。
- 更にエポキシ樹脂を含有することを特徴とする請求項5に記載の感光性樹脂組成物。
- アルカリ可溶性樹脂と光重合性モノマーの合計100質量部に対して、光重合開始剤を0.1~10質量部含有する請求項5又は6に記載の感光性樹脂組成物。
- アルカリ可溶性樹脂と光重合性モノマーの合計100質量部に対して、エポキシ樹脂を10~40質量部含有する請求項6又は7に記載の感光性樹脂組成物。
- 請求項5~8のいずれか一項に記載の感光性樹脂組成物を硬化させた硬化物。
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JPWO2021230097A1 (ja) | 2021-11-18 |
KR20230008105A (ko) | 2023-01-13 |
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