WO2021210254A1 - Ｘ線発生装置 - Google Patents

Ｘ線発生装置 Download PDF

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Publication number
WO2021210254A1
WO2021210254A1 PCT/JP2021/005317 JP2021005317W WO2021210254A1 WO 2021210254 A1 WO2021210254 A1 WO 2021210254A1 JP 2021005317 W JP2021005317 W JP 2021005317W WO 2021210254 A1 WO2021210254 A1 WO 2021210254A1
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WO
WIPO (PCT)
Prior art keywords
diameter
electron
internal space
target
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2021/005317
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English (en)
French (fr)
Japanese (ja)
Inventor
綾介 藪下
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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Filing date
Publication date
Application filed by Hamamatsu Photonics KK filed Critical Hamamatsu Photonics KK
Priority to KR1020227028253A priority Critical patent/KR102888413B1/ko
Priority to CN202180024407.6A priority patent/CN115380352B/zh
Priority to EP21788610.0A priority patent/EP4135000A4/en
Priority to JP2022515217A priority patent/JP7564194B2/ja
Publication of WO2021210254A1 publication Critical patent/WO2021210254A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/20—Arrangements for controlling gases within the X-ray tube

Definitions

  • One aspect of this disclosure relates to an X-ray generator.
  • Patent Document 1 An X-ray generator that generates X-rays by incidenting an electron beam emitted from a cathode onto a target is known.
  • Patent Document 1 describes that a part of an electron beam incident on a target is emitted from the target as reflected electrons.
  • some X-ray generators use a magnetic field generator that deflects reflected electrons by Lorentz force to re-enter the target.
  • a relatively large space is required to accommodate the magnetic field generator. This may increase the manufacturing cost.
  • This specification discloses an example of an X-ray generator capable of suppressing the deterioration of the cathode caused by the reflected electrons emitted from the target.
  • An exemplary X-ray generator houses an electron gun having a cathode that emits an electron beam, a first housing that houses the electron gun, a target that receives the electron beam emitted from the electron gun, and a target.
  • a second housing may be provided.
  • the electron gun may be mounted in a first housing, or at least partially located in the first housing
  • the target may be mounted in a second housing, or at least partially second. It may be arranged in the housing.
  • the X-ray generator is provided over the first housing and the second housing, and allows the electron beam to pass from the first internal space of the first housing to the second internal space of the second housing.
  • the electron passage has a reduced diameter portion that is reduced in diameter toward the target.
  • the first housing is provided with a first exhaust flow path for vacuum exhausting the first internal space in the first housing.
  • the second housing is provided with a second exhaust flow path for vacuum exhausting the second internal space in the second housing.
  • the number of reflected electrons generated by the electron beam incident on the target in the second housing and reaching the inside of the first housing via the electron passage path can be reduced.
  • gas may be generated due to the collision of electrons with the target.
  • the second housing since the entrance of the electron passage path on the target side is narrow, the gas is sucked into the first housing side through the electron passage path, and the gas is sucked from the first exhaust flow path provided in the first housing. It is difficult to exhaust the above gas. Therefore, the second housing itself is provided with the gas discharge path (second exhaust flow path). As a result, deterioration of the cathode due to reflected electrons can be suppressed or prevented while performing vacuum exhaust in each housing.
  • the exemplary X-ray generator may further include a magnetic focusing lens that surrounds the electron passage and focuses the electron beam after the electron gun.
  • a part of the electron passage is located between the electron gun and the pole piece of the magnetically focused lens and has a diameter-expanded portion that expands in diameter toward the target. According to this, even if the reflected electrons enter the electron passage from the end of the electron passage on the target side, the diameter is expanded toward the target (that is, the diameter is reduced toward the cathode side). It is possible to suppress or prevent the movement of reflected electrons to the cathode side through the electron passage path).
  • the enlarged diameter portion may change discontinuously from the first diameter to the second diameter larger than the first diameter. According to this, even if there are reflected electrons traveling from the target side to the electron gun side in the electron passage path, the reflected electrons are made to collide with a portion that discontinuously changes from the first diameter to the second diameter. Can be done.
  • the enlarged diameter portion that changes from the first diameter to the second diameter includes an annular wall having the first diameter as the inner diameter and the second diameter as the outer diameter. Thereby, the movement of the reflected electrons to the cathode side can be suppressed or prevented more effectively.
  • the exemplary X-ray generator may further include a magnetic focusing lens that surrounds the electron passage and focuses the electron beam after the electron gun.
  • the diameter of the region of the electron passage path surrounded by the pole piece of the magnetic focusing lens may be equal to the maximum diameter of the electron passage path.
  • the diameter of the region of the electron path surrounded by the pole piece is equal to the maximum diameter of the electron path, which has the effect of causing the electron beam toward the target to collide with the inner wall of the electron path. Can be suppressed or prevented.
  • the region of the electron path surrounded by the pole piece may include a region where the spread of the electron beam emitted from the electron gun increases.
  • An exemplary X-ray generator evacuates the first internal space of the first housing through the first exhaust flow path and evacuates the second internal space of the second housing through the second exhaust flow path.
  • An exhaust unit for vacuum exhaust may be further provided.
  • the first exhaust flow path and the second exhaust flow path may communicate with each other.
  • the common exhaust unit can evacuate both the first internal space in the first housing and the second internal space in the second housing, so that the device can be miniaturized. can.
  • FIG. 1 is a schematic configuration diagram of an exemplary X-ray generator.
  • FIG. 2 is a schematic cross-sectional view showing a configuration example of a magnetic lens of an X-ray generator.
  • FIG. 3 is a front view of an exemplary magnetic quadrupole lens.
  • FIG. 4 is a schematic diagram of a configuration (doublet) of Examples and Comparative Examples including a magnetic focusing lens and a magnetic quadrupole lens.
  • FIG. 5 is a diagram showing an example of the relationship between the cross-sectional shape of the electron beam and the shape of the effective focal point of the X-ray.
  • FIG. 6 is a diagram showing a first modification of the cylindrical tube.
  • FIG. 7 is a diagram showing a second modification of the cylindrical tube.
  • FIG. 8 is a schematic configuration diagram of an X-ray generator according to a modified example.
  • an exemplary X-ray generator 1 defines an electron gun 2, a rotating anode unit 3, a magnetic lens 4, an exhaust section 5, and an internal space S1 that houses the electron gun 2.
  • a housing 6 (first housing) and a housing 7 (second housing) that defines an internal space S2 for accommodating the rotating anode unit 3 are provided.
  • the housing 6 and the housing 7 may be configured to be removable from each other, may be integrally connected in a non-removable manner, or may be integrally formed from the beginning. May be good.
  • the electron gun 2 emits an electron beam EB.
  • the electron gun 2 has a cathode C that emits an electron beam EB.
  • the cathode C is a circular planar cathode that emits an electron beam EB having a circular cross-sectional shape.
  • the cross-sectional shape of the electron beam EB is a cross-sectional shape in a direction perpendicular to the X-axis direction (first direction), which is a direction parallel to the traveling direction of the electron beam EB, which will be described later. That is, the cross-sectional shape of the electron beam EB is a shape in the YZ plane.
  • the electron emission surface of the cathode C itself is viewed from a position facing the electron emission surface of the cathode C (the electron emission surface of the cathode C is oriented in the X-axis direction). (Seen from), it may have a circular shape.
  • the rotary anode unit 3 has a target 31, a rotary support 32, and a drive unit 33 that rotationally drives the rotary support 32 around the rotation axis A.
  • the target 31 is provided along the peripheral edge of the rotary support 32 formed in a flat truncated cone shape with the rotary shaft A as the central axis.
  • the rotation axis A is the central axis of the rotation support 32, and the side surface of the truncated cone-shaped rotation support 32 has a surface inclined with respect to the rotation axis A.
  • the rotation support 32 may be formed in an annular shape with the rotation axis A as the central axis.
  • the material constituting the target 31 is, for example, a heavy metal such as tungsten, silver, rhodium, molybdenum, and an alloy thereof.
  • the rotation support 32 is rotatable around the rotation axis A.
  • the material constituting the rotary support 32 is, for example, a metal such as copper or a copper alloy.
  • the drive unit 33 has a drive source such as a motor, and drives the rotation support 32 to rotate around the rotation axis A.
  • the target 31 receives the electron beam EB while rotating with the rotation of the rotation support 32, and generates X-ray XR.
  • the X-ray XR is emitted to the outside of the housing 7 from the X-ray passing hole 7a formed in the housing 7.
  • the X-ray passage hole 7a is airtightly closed by the window member 8.
  • the axial direction of the rotation axis A is parallel to the incident direction of the electron beam EB on the target 31.
  • the rotation axis A may be inclined so as to extend in a direction intersecting the incident direction with respect to the incident direction of the electron beam EB on the target 31.
  • the target 31 may be of a so-called reflection type, and emits X-ray XR in a direction intersecting the traveling direction of the electron beam EB (the direction of incidence on the target 31).
  • the emission direction of the X-ray XR is a direction orthogonal to the traveling direction of the electron beam EB.
  • the direction parallel to the traveling direction of the electron beam EB is the X-axis direction (first direction)
  • the direction parallel to the emission direction of the X-ray XR from the target 31 is the Z-axis direction (second direction).
  • the direction orthogonal to the direction and the Z-axis direction is defined as the Y-axis direction (third direction).
  • the magnetic lens 4 controls the electron beam EB.
  • the magnetic lens 4 includes a deflection coil 41, a magnetic focusing lens 42, a magnetic quadrupole lens 43, and a housing 44.
  • the housing 44 houses the deflection coil 41, the magnetic focusing lens 42, and the magnetic quadrupole lens 43.
  • the deflection coil 41, the magnetic focusing lens 42, and the magnetic quadrupole lens 43 are arranged in this order from the electron gun 2 side toward the target 31 side along the X-axis direction.
  • An electron passage P through which the electron beam EB passes is formed between the electron gun 2 and the target 31.
  • the electron passage P may be formed by a cylindrical tube 9 (cylindrical portion).
  • the cylindrical tube 9 is a non-magnetic metal member extending along the X-axis direction between the electron gun 2 and the target 31. Details of the additional exemplary configuration of the cylindrical tube 9 will be described later.
  • the deflection coil 41, the magnetic focusing lens 42, and the magnetic quadrupole lens 43 are directly or indirectly connected to the cylindrical tube 9.
  • the deflection coil 41, the magnetic focusing lens 42, and the magnetic quadrupole lens 43 are assembled with reference to the cylindrical tube 9, so that their central axes are arranged coaxially with high accuracy.
  • the central axes of the deflection coil 41, the magnetic focusing lens 42, and the magnetic quadrupole lens 43 coincide with the central axis of the cylindrical tube 9 (the axis parallel to the X axis).
  • the deflection coil 41 is arranged between the electron gun 2 and the magnetic focusing lens 42.
  • the deflection coil 41 is arranged so as to surround the electron passage path P.
  • the deflection coil 41 is indirectly connected to the cylindrical tube 9 via the tubular member 10.
  • the tubular member 10 is a non-magnetic metal member extending coaxially with the cylindrical tube 9.
  • the tubular member 10 is provided so as to cover the outer periphery of the cylindrical tube 9.
  • the deflection coil 41 is positioned by a surface of the wall portion 44a on the target 31 side and an outer peripheral surface of the tubular member 10.
  • the wall portion 44a is a part of the housing 44 provided at a position facing the internal space S1 and is made of a non-magnetic material.
  • the deflection coil 41 adjusts the traveling direction of the electron beam EB emitted from the electron gun 2.
  • the deflection coil 41 may be composed of one (one set) of deflection coils or two (two sets) of deflection coils. In the former case where the deflection coil 41 includes one deflection coil, the deflection coil 41 is the emission axis of the electron beam EB emitted from the electron gun 2 and the central axis of the magnetic focusing lens 42 and the magnetic quadrupole lens 43. It may be configured to correct the angular deviation from the axis parallel to the X axis). For example, the angular deviation can occur when the exit axis and the central axis intersect at a predetermined angle.
  • the angular deviation can be eliminated by changing the traveling direction of the electron beam EB in the direction along the central axis with the deflection coil 41.
  • the deflection coil 41 can perform two-dimensional deflection, so that not only the above-mentioned angle deviation but also the above-mentioned exit axis and the above-mentioned central axis can be performed.
  • Lateral deviations (for example, when the emission axis and the central axis are parallel to each other in the X-axis direction and are separated from each other in one or both of the Y-axis direction and the Z-axis direction) are also appropriately corrected. be able to.
  • the magnetic focusing lens 42 is arranged after the electron gun 2 and the deflection coil 41.
  • the magnetic focusing lens 42 focuses the electron beam EB while rotating the electron beam EB around an axis along the X-axis direction.
  • the electron beam EB passing through the magnetic focusing lens 42 focuses while rotating in a spiral manner.
  • the magnetic focusing lens 42 has a coil 42a arranged so as to surround the electron passage P, a pole piece 42b, a yoke 42c, and a yoke 42d.
  • the yoke 42c also functions as a wall portion 44b of the housing 44 provided so as to connect a part of the outside of the coil 42a and the tubular member 10.
  • the yoke 42d is a tubular member provided so as to cover the outer periphery of the cylindrical member 10.
  • the coil 42a is indirectly connected to the cylindrical tube 9 via the tubular member 10 and the yoke 42d.
  • the pole piece 42b is composed of a yoke 42c and a yoke 42d.
  • the yoke 42c and the yoke 42d are ferromagnets such as iron.
  • the pole piece 42b may be composed of a notch (gap) provided between the yoke 42c and the yoke 42d, and a part of the yoke 42c and the yoke 42d located in the vicinity of the notch.
  • the inner diameter D of the pole piece 42b is equal to the inner diameter of the gap adjacent region in the yoke 42c or the yoke 42d.
  • the magnetic focusing lens 42 may be configured so that the magnetic field of the coil 42a leaks from the pole piece 42b to the cylindrical tube 9 side.
  • the magnetic quadrupole lens 43 is arranged after the magnetic focusing lens 42.
  • the magnetic quadrupole lens 43 deforms the cross-sectional shape of the electron beam EB into an elliptical shape having a major axis along the Z-axis direction and a minor axis along the Y-axis direction.
  • the magnetic quadrupole lens 43 is arranged so as to surround the electron passage path P.
  • the magnetic quadrupole lens 43 is indirectly connected to the cylindrical tube 9 via the wall portion 44c of the housing 44.
  • the wall portion 44c is provided so as to be connected to the wall portion 44b and to cover the outer periphery of the cylindrical tube 9.
  • the wall portion 44c is made of a non-magnetic metal material.
  • an exemplary magnetic quadrupole lens 43 includes an annular yoke 43a, four columnar yokes 43b provided on the inner peripheral surface of the yoke 43a, and a tip of each yoke 43b. It has a yoke 43c provided in the. A coil 43d is wound around the yoke 43b. Each yoke 43c has a substantially semicircular cross-sectional shape in the YZ plane. The inner diameter d of the magnetic quadrupole lens 43 is the diameter of the inscribed circle passing through the innermost end of each yoke 43c.
  • the magnetic quadrupole lens 43 functions as a concave lens on the XZ plane (plane orthogonal to the Y-axis direction) and as a convex lens on the XY plane (plane orthogonal to the Z-axis direction). Due to the function of the magnetic quadrupole lens 43, the length of the electron beam EB along the Z-axis direction is larger than the length along the Y-axis direction along the Z-axis direction of the electron beam EB.
  • the aspect ratio between the diameter (major axis X1) and the diameter along the Y-axis direction (minor axis X2) is adjusted. Therefore, the aspect ratio can be selectively adjusted by adjusting the amount of current flowing through the coil 43d. As an example, the aspect ratio of the major axis X1 and the minor axis X2 is adjusted to "10: 1".
  • the exhaust unit 5 includes a vacuum pump 5a (first vacuum pump) and a vacuum pump 5b (second vacuum pump).
  • the housing 6 has an exhaust flow path E1 (first exhaust flow path) for vacuum exhausting the space inside the housing 6 (that is, the internal space S1 defined by the housing 6 and the housing 44 of the magnetic lens 4). ) Is provided.
  • the vacuum pump 5b and the internal space S1 communicate with each other via the exhaust flow path E1.
  • the housing 7 is provided with an exhaust flow path E2 (second exhaust flow path) for vacuum exhausting the space inside the housing 7 (that is, the internal space S2 defined by the housing 7).
  • the vacuum pump 5a and the internal space S2 communicate with each other via the exhaust flow path E2.
  • the vacuum pump 5b evacuates the internal space S1 via the exhaust flow path E1.
  • the vacuum pump 5a evacuates the internal space S2 through the exhaust flow path E2.
  • the internal space S1 and the internal space S2 are maintained in a vacuum state or a partial vacuum state in order to remove the gas generated by the electron gun or the target, for example.
  • the internal pressure of the internal space S1 may be preferably maintained in a partial vacuum of 10 -4 Pa or less, and more preferably maintained in a partial vacuum of 10 -5 Pa or less.
  • the internal pressure of the interior space S2 may be preferably maintained in a partial vacuum between 10-6 Pa and 10-3 Pa.
  • the internal space of the cylindrical tube 9 (the space in the electron passage P) is also evacuated by the exhaust unit 5 via the internal space S1 or the internal space S2.
  • one exhaust pump (here, as an example, the vacuum pump 5b) is used as shown in FIG. 8 without using the vacuum pump 5a and the vacuum pump 5b and the two exhaust pumps as shown in FIG.
  • a structure (X-ray generator 1A) capable of evacuating both the internal space S1 and the internal space S2 may be adopted.
  • the exhaust flow path E1 and the exhaust flow path E2 may be connected by a connecting path E3 located outside the housing 6 and the housing 7.
  • the connecting path E3 has a through hole continuously provided from the inside of the wall portion of the housing 7 to the inside of the wall portion of the housing 6 so as to connect the exhaust flow path E1 and the exhaust flow path E2. It may be included.
  • Either the vacuum pump 5a or the vacuum pump 5b may be used as one exhaust pump, but by using the vacuum pump 5b coupled to the exhaust flow path E1 as the exhaust pump, more efficient vacuum exhaust can be achieved. It will be possible.
  • a voltage is applied to the electron gun 2 in a state where the internal spaces S1 and S2 and the electron passage P are evacuated.
  • the electron beam EB having a circular cross section is emitted from the electron gun 2.
  • the electron beam EB is focused on the target 31 by the magnetic lens 4, deformed into an elliptical cross-sectional shape, and incident on the rotating target 31.
  • X-ray XR is generated at the target 31, and X-ray XR having a substantially circular effective focal shape is emitted from the X-ray passing hole 7a to the outside of the housing 7.
  • the configuration example of the cylindrical tube 9 has a shape in which the size of the diameter changes stepwise along the X-axis direction.
  • the cylindrical tube 9 has six cylindrical portions 91 to 96 arranged along the X-axis direction. Each of the cylindrical portions 91 to 96 has a constant diameter along the X-axis direction.
  • the outer diameter of the cylindrical tube 9 does not have to change in synchronization with the inner diameter of the cylindrical tube 9. That is, the outer diameter of the cylindrical tube 9 may be constant.
  • the cylindrical portion 91 (first cylindrical portion) includes the first end portion 9a of the cylindrical tube 9 on the electron gun 2 side.
  • the cylindrical portion 91 extends from the first end portion 9a to the second end portion 91a surrounded by the electron gun 2 side portion of the coil 42a at the boundary portion 9c.
  • the first end portion 92a of the cylindrical portion 92 (second cylindrical portion) is connected to the second end portion 91a of the cylindrical portion 91 on the target 31 side.
  • the cylindrical portion 92 extends from the second end portion 91a of the cylindrical portion 91 to the second end portion 92b of the second cylindrical portion 92 that is slightly closer to the target 31 than the pole piece 42b.
  • the second end portion 92b of the second cylindrical portion 92 may be located between the pole piece 42b and the target 31 along the X-axis direction. Further, the first end portion 93a of the cylindrical portion 93 (third cylindrical portion) is connected to the second end portion 92b of the cylindrical portion 92 on the target 31 side.
  • the cylindrical portion 93 extends from the second end portion 92b of the cylindrical portion 92 to the second end portion 93b of the cylindrical portion 93 surrounded by the magnetic quadrupole lens 43.
  • the first end portion of the cylindrical portion 94 (fourth cylindrical portion) is connected to the second end portion 93b of the cylindrical portion 93 on the target 31 side.
  • the cylindrical portion 94 extends from the second end portion 93b of the cylindrical portion 93 to the housing 7 side of the wall portion 44c.
  • the cylindrical portion 95 (fifth cylindrical portion) and the cylindrical portion 96 (sixth cylindrical portion) pass through the inside of the wall portion 71 of the housing 7.
  • the wall portion 71 is arranged at a position facing the target 31, and extends so as to intersect in the X-axis direction.
  • the cylindrical portion 95 is connected to the second end portion of the cylindrical portion 94 on the target 31 side.
  • the cylindrical portion 95 extends from the end portion of the cylindrical portion 94 to an intermediate portion inside the wall portion 71.
  • the cylindrical portion 96 is connected to the end portion of the cylindrical portion 95 on the target 31 side in the middle portion inside the wall portion 71.
  • the cylindrical portion 96 extends from the end portion of the cylindrical portion 95 to the second end portion 9b of the cylindrical tube 9 on the target 31 side. As shown in FIG.
  • an exemplary X-ray passage hole 7a is provided in the wall portion 72 which is connected to the wall portion 71 and extends so as to intersect in the Z-axis direction.
  • the X-ray passage hole 7a penetrates the wall portion 72 along the Z-axis direction.
  • the diameters of the cylindrical portions 91 to 96 are expressed as d1 to d6, the relationship of "d2> d3> d1> d4> d5> d6" is established.
  • the diameter d1 is 6 to 12 mm
  • the diameter d2 is 10 to 14 mm
  • the diameter d3 is 8 to 12 mm
  • the diameter d4 is 4 to 6 mm
  • the diameter d5 is 4 to 6 mm
  • the diameter d6 Is 0.5 to 4 mm.
  • At least a part of the cylindrical portion 91 and the cylindrical portion 92 is the electron gun 2 rather than the portion of the electron passage P surrounded by the pole piece 42b (particularly the gap between the yoke 42c and the yoke 42d) of the magnetic focusing lens 42.
  • at least a portion of the cylindrical portion 91 and the cylindrical portion 92 is "a portion of the electron passage P that is closer to the electron gun 2 than the portion of the magnetic focusing lens 42 surrounded by the pole piece 42b" ( Hereinafter, it is referred to as a "first cylindrical portion").
  • the diameter d2 of the cylindrical portion 92 is larger than the diameter d1 of the cylindrical portion 91 (d2> d1).
  • the diameter of the cylindrical portion 92 is larger than that of the cylindrical portion 91 adjacent to the electron gun 2 side.
  • at least a part of the cylindrical portion 92 constitutes a diameter-expanded portion that expands in diameter toward the target 31 side.
  • the cylindrical portion 96 includes an end portion 9b of the electron passage P on the target 31 side.
  • the diameter d6 of the cylindrical portion 96 is smaller than the diameter d5 of the cylindrical portion 95 (d6 ⁇ d5). That is, the cylindrical portion 96 has a smaller diameter than the cylindrical portion 95 adjacent to the electron gun 2 side, and the cylindrical portion 96 constitutes a reduced diameter portion whose diameter decreases toward the target 31 side.
  • the diameter d2 of the cylindrical portion 92 is the maximum diameter of the cylindrical tube 9, and the diameter is sequentially reduced from the cylindrical portion 92 toward the target 31 side. Therefore, it can be considered that the portion including the cylindrical portions 93 to 96 constitutes the reduced diameter portion.
  • the magnetic focusing lens 42 located after the electron gun 2 adjusts the size of the electron beam EB and the magnetic quadrupole magnet placed after the magnetic focusing lens 42.
  • the lens 43 deforms the cross-sectional shape of the electron beam EB into an elliptical shape. Therefore, the size of the electron beam EB and the cross-sectional shape can be adjusted independently.
  • FIG. 4A is a schematic diagram of a configuration example including the magnetic focusing lens 42 and the magnetic quadrupole lens 43 shown in FIGS. 1 and 2.
  • FIG. 4B is a schematic diagram of a configuration (doublet) of a comparative example.
  • FIGS. 4A and 4B are diagrams schematically showing an example of an optical system that acts on the electron beam EB between the cathode C (electron gun 2) and the target 31.
  • the cross-sectional shape of the electron beam is formed by a combination of two-stage magnetic quadrupole lenses in which a surface acting as a concave lens and a surface acting as a convex lens are interchanged with each other. The size and aspect ratio are adjusted.
  • the lens that determines the size of the cross-sectional shape of the electron beam and the lens that determines the aspect ratio are not independent of each other. Therefore, it is necessary to adjust the size and aspect ratio at the same time by combining two-stage magnetic quadrupole lenses. Therefore, the adjustment of the focal dimension and the focal shape becomes complicated.
  • the size of the cross-sectional shape of the electron beam EB is adjusted by the magnetic focusing lens 42 in the previous stage. That is, the magnetic focusing lens 42 narrows the cross-sectional shape of the electron beam EB to a certain size.
  • the aspect ratio of the cross-sectional shape of the electron beam EB is adjusted by the magnetic quadrupole lens 43 in the subsequent stage.
  • a lens (magnetic focusing lens 42) for determining the size of the cross-sectional shape of the electron beam EB and a lens (magnetic quadrupole lens 43) for determining the aspect ratio are used.
  • the focal dimension and the focal shape can be easily and flexibly adjusted.
  • the electron beam EB passing through the magnetic focusing lens 42 rotates around an axis along the X-axis direction, but the electron beam EB emitted by the electron gun 2 has a circular cross-sectional shape, so that the electron beam EB is magnetic.
  • the cross-sectional shape of the electron beam from the focusing lens 42 to the magnetic quadrupole lens 43 is constant (circular shape) regardless of the amount of rotation of the electron beam EB in the magnetic focusing lens 42.
  • the cross-sectional shape F1 (cross-sectional shape along the YZ plane) of the electron beam EB is consistently and surely, the major axis X1 along the Z direction and the short axis along the Y-axis direction. It can be formed into an elliptical shape having a diameter X2.
  • the aspect ratio and the size of the cross-sectional shape of the electron beam EB can be easily and flexibly adjusted.
  • the performance of the X-ray generator 1 according to the embodiment provided with the electron gun 2 and the magnetic lens 4 was evaluated experimentally. At that time, a high voltage was applied to the electron gun 2 to set the target 31 as the ground potential. An X-ray XR having an effective focal dimension of "40 ⁇ m ⁇ 40 ⁇ m" was obtained at a desired output (voltage applied to the cathode C). When the focal dimension changes in 1000 hours of operation, the above effective focal dimension can be achieved again by simply adjusting the current amount of the coil 43d of the magnetic quadrupole lens 43 without changing the operating conditions on the cathode C side. Was easily obtained. As described above, according to the X-ray generator 1, it has been confirmed that the effective focal dimension of the X-ray XR can be easily corrected according to the dynamic change only by adjusting the current amount of the coil 43d. rice field.
  • the target 31 has an electron incident surface 31a on which the electron beam EB is incident.
  • the electron incident surface 31a is inclined with respect to the X-axis direction and the Z-axis direction.
  • the cross-sectional shape F1 that is, the ratio of the major axis X1 and the minor axis X2
  • the electron incident surface with respect to the X-axis direction and the Y-axis direction.
  • the inclination angle of 31a is adjusted so that the focal shape F2 of the X-ray XR viewed from the X-ray XR extraction direction (Z-axis direction) has a substantially circular shape.
  • the shape of the focal point (effective focal point) of the X-ray XR taken out by adjusting the tilt angle of the electron incident surface 31a of the target 31 and the molding conditions (aspect ratio) by the magnetic quadrupole lens 43. can have a substantially circular shape.
  • the length of the magnetic condensing lens 42 along the X-axis direction is longer than the length of the magnetic quadrupole lens 43 along the X-axis direction.
  • the length of the magnetic focusing lens 42 along the X-axis direction means the total length of the yoke 42c surrounding the coil 42a. In some embodiments, it becomes easier to secure the number of turns of the coil 42a of the magnetic focusing lens 42. As a result, by generating a relatively large magnetic field in the magnetic focusing lens 42, the electron beam EB can be effectively focused small in order to further increase the reduction ratio. Further, in order to reduce the size of the electron beam EB incident on the electron incident surface 31a of the target 31, the distance from the electron gun 2 to the lens center (the portion provided with the pole piece 42b) formed by the magnetic focusing lens 42. The distance can be increased.
  • the inner diameter D of the pole piece 42b of the magnetic focusing lens 42 is larger than the inner diameter d of the magnetic quadrupole lens 43 (see FIG. 3).
  • the spherical aberration of the lens configured by the magnetic focusing lens 42 can be reduced by relatively increasing the inner diameter D of the pole piece 42b of the magnetic focusing lens 42.
  • the inner diameter d of the magnetic quadrupole lens 43 relatively small, the number of turns of the coil 43d in the magnetic quadrupole lens 43 and the amount of current flowing through the coil 43d can be reduced. As a result, the amount of heat generated by the magnetic quadrupole lens 43 can be suppressed.
  • the X-ray generator 1 includes a cylindrical tube 9 extending along the X-axis direction and forming an electron passage P through which the electron beam EB passes.
  • the magnetic focusing lens 42 and the magnetic quadrupole lens 43 are directly or indirectly connected to the cylindrical tube 9.
  • the magnetic focusing lens 42 and the magnetic quadrupole lens 43 can be arranged or attached with reference to the cylindrical tube 9, and thus the central axis of the magnetic focusing lens 42 and the magnetic quadrupole lens 43. Can be placed coaxially with high accuracy. As a result, it is possible to suppress the occurrence of distortion in the profile (cross-sectional shape) of the electron beam EB after passing through the inside of the magnetic focusing lens 42 and the inside of the magnetic quadrupole lens 43.
  • the X-ray generator 1 includes a deflection coil 41.
  • the angular deviation generated between the emission axis of the electron beam EB emitted from the electron gun 2 and the central axis of the magnetic focusing lens 42 and the magnetic quadrupole lens 43 is determined. , Can be corrected appropriately.
  • the deflection coil 41 is arranged between the electron gun 2 and the magnetic focusing lens 42.
  • the traveling direction of the electron beam EB can be appropriately adjusted before the electron beam EB passes through the magnetic focusing lens 42 and the magnetic quadrupole lens 43. As a result, the cross-sectional shape of the electron beam EB incident on the target 31 can be maintained in the intended elliptical shape.
  • an electron passage P is formed so as to extend between the housing 6 accommodating the cathode C (electron gun 2) and the housing 7 accommodating the target 31.
  • the portion of the electron passage P including the end portion on the target 31 side (end portion 9b of the cylindrical tube 9) is reduced in diameter toward the target 31 side.
  • the cylindrical portion 96 (or cylindrical portion 93-96) constitutes a reduced diameter portion that reduces in diameter toward the target 31 side.
  • the reflected electrons are electrons of the electron beam EB incident on the target 31 that are reflected without being absorbed by the target 31.
  • gas is generated by the electron gun 2.
  • the gas may remain in the space in which the cathode C is housed.
  • gas for example, gas by-products such as H 2 , H 2 O, N 2 , CO, CO 2 , CH 4 , Ar and the like
  • gas can be generated in the housing 7 due to the collision of electrons with the target 31.
  • electrons may be reflected from the surface of the target 31.
  • the entrance (that is, the end 9b) of the electron passage P on the target 31 side is narrowed, so that the electron passage P goes to the housing 6 side (that is, the internal space S1) via the electron passage P.
  • the amount of gas sucked is small, and the amount of gas discharged from the exhaust flow path E1 provided in the housing 6 is small. Therefore, in the X-ray generator 1, the housing 7 itself is provided with the gas discharge path (exhaust flow path E2). As a result, deterioration of the cathode C due to reflected electrons can be suppressed or prevented while appropriately performing vacuum exhaust in each of the housings 6 and 7.
  • the portion of the electron passage P on the electron gun 2 side (the first cylindrical portion described above) with respect to the portion of the magnetic focusing lens 42 surrounded by the pole piece 42b has an enlarged diameter that increases toward the target 31 side. It has a portion (at least a part of the cylindrical portion 92).
  • the diameter-expanded portion (that is, the diameter-expanded portion) expands toward the target 31 side.
  • the portion whose diameter is reduced toward the cathode C side) can suppress the movement of the reflected electrons to the cathode C side through the electron passage path P. Further, it is possible to effectively prevent the electron beam EB toward the target 31 from colliding with the inner wall (inner surface of the cylindrical tube 9) of the electron passage P.
  • the diameter-expanded portion has a diameter d2 (second diameter) larger than the diameter d1 from the portion having the diameter d1 (first diameter) (that is, the cylindrical portion 91) from the electron gun 2 side to the target 31 side of the cylindrical tube 9.
  • a portion that is, a boundary portion between the cylindrical portion 91 and the cylindrical portion 92) that changes discontinuously to a portion having a diameter) (that is, the cylindrical portion 92) is included.
  • the diameter of the cylindrical tube 9 changes in a stepped manner at the boundary between the cylindrical portion 91 and the cylindrical portion 92.
  • the boundary portion 9c is formed by an annular wall having a diameter d1 as an inner diameter and a diameter d2 as an outer diameter (see FIG. 2).
  • the reflected electrons can collide with the boundary portion 9c. As a result, the movement of the reflected electrons toward the cathode C side can be suppressed or prevented even more effectively.
  • the diameter of the portion of the electron passage P surrounded by the pole piece 42b of the magnetic focusing lens 42 is equal to or larger than the diameter of the other portion of the electron passage P. That is, the electron passage P has the maximum diameter in the portion of the magnetic focusing lens 42 surrounded by the pole piece 42b.
  • the target is made by increasing the diameter of the portion of the electron beam EB emitted from the electron gun 2 where the spread is large (that is, the portion surrounded by the pole piece 42b) to be larger than the diameter of the other portion. It is possible to effectively prevent the electron beam EB heading toward 31 from colliding with the inner wall (inner surface of the cylindrical tube 9) of the electron passage P.
  • the exhaust flow path E1 and the exhaust flow path E2 communicate with each other. Then, the exhaust unit 5 evacuates the inside of the housing 6 through the exhaust flow path E1 and evacuates the inside of the housing 7 through the exhaust flow path E2. In some embodiments, the common exhaust unit 5 can evacuate both the internal space S1 in the housing 6 and the internal space S2 in the housing 7, so that the X-ray generator 1 can be miniaturized. Can be planned.
  • the deflection coil 41 may be omitted when the emission axis of the electron beam EB from the electron gun 2 and the central axis of the magnetic focusing lens 42 are aligned with high accuracy. Further, the deflection coil 41 may be arranged between the magnetic focusing lens 42 and the magnetic quadrupole lens 43, or may be arranged between the magnetic quadrupole lens 43 and the target 31.
  • the shape of the electron passage P may have a single diameter over the entire area. Further, the electron passage P may be formed by a single cylindrical tube 9. In another example, the cylindrical tube 9 is provided only in the housing 6, and the electron passage P passing through the housing 7 may be formed by a through hole provided in the wall portion 71 of the housing 7. .. Further, the electron passage P may be formed by the through hole of the tubular member 10 and the through hole provided in the housing 44 and the housing 7 without separately providing the cylindrical tube 9.
  • FIG. 6 shows a first modification of the cylindrical tube (cylindrical tube 9A).
  • the cylindrical tube 9A differs from the cylindrical tube 9 shown in FIG. 2 in that it has cylindrical portions 91A-93A instead of cylindrical portions 91-96.
  • the cylindrical portion 91A extends from the end portion 9a of the cylindrical tube 9 to a position surrounded by the electron gun 2 side of the coil 42a.
  • the cylindrical portion 91A has a tapered shape.
  • the diameter of the cylindrical portion 91A gradually increases from the diameter d1 to the diameter d2 from the end portion 9a toward the target 31 side.
  • the cylindrical portion 92A extends from the end of the cylindrical portion 91A on the target 31 side to a position slightly closer to the target 31 than the pole piece 42b.
  • the cylindrical portion 92A has a constant diameter (diameter d2).
  • the cylindrical portion 93A extends from the end portion of the cylindrical portion 92A on the target 31 side to the end portion 9b of the cylindrical tube 9.
  • the cylindrical portion 93A has a tapered shape.
  • the diameter of the cylindrical portion 93A gradually decreases from the diameter d2 to the diameter d6 from the end portion of the cylindrical portion 92A toward the target 31 side.
  • the cylindrical portion 91A corresponds to the enlarged diameter portion
  • the cylindrical portion 93A corresponds to the reduced diameter portion.
  • FIG. 7 shows a second modification of the cylindrical tube (cylindrical tube 9B).
  • the cylindrical tube 9B differs from the cylindrical tube 9 shown in FIG. 2 in that it has cylindrical portions 91B, 92B instead of cylindrical portions 91-96.
  • the cylindrical portion 91B extends from the end portion 9a of the cylindrical tube 9 to a position surrounded by the pole piece 42b.
  • the cylindrical portion 91B has a tapered shape.
  • the diameter of the cylindrical portion 91B gradually increases from the diameter d1 to the diameter d2 from the end portion 9a toward the target 31 side.
  • the cylindrical portion 92B extends from the end portion of the cylindrical portion 91B on the target 31 side to the end portion 9b of the cylindrical tube 9.
  • the cylindrical portion 92B has a tapered shape. In some embodiments, the diameter of the cylindrical portion 92B gradually decreases from diameter d2 to diameter d6 from the end of the cylindrical portion 91B toward the target 31 side. In the cylindrical tube 9B, the cylindrical portion 91B corresponds to the enlarged diameter portion, and the cylindrical portion 92B corresponds to the reduced diameter portion.
  • the reduced diameter portion and the expanded diameter portion of the cylindrical tube do not have to be formed in a stepped shape (discontinuous) as in the cylindrical tube 9, and the cylindrical tubes 9A and 9B It may be formed in a tapered shape as in. Further, like the cylindrical tube 9B, the cylindrical tube may be composed of only the tapered portion. Further, the cylindrical tube may have both a portion whose diameter is changed in a stepped shape and a portion whose diameter is changed in a tapered shape. For example, the enlarged diameter portion may be formed in a tapered shape like the cylindrical tube 9A, while the reduced diameter portion may be formed in a stepped shape like the cylindrical tube 9.
  • the target does not have to be a rotating anode.
  • the target may be configured to not rotate and the electron beam EB may be configured to always incident at the same position on the target.
  • the target by using the target as a rotating anode, the local load due to the electron beam EB on the target can be reduced. As a result, it is possible to increase the amount of electron beam EB and increase the dose of X-ray XR emitted from the target.
  • the electron gun 2 may be configured to emit an electron beam EB having a circular cross-sectional shape. In another example, the electron gun 2 may be configured to emit an electron beam having a cross-sectional shape other than the circular shape.
  • the exhaust system includes a first vacuum exhaust pump (vacuum pump 5b) communicated with a first exhaust flow path (exhaust flow path E1) and a second vacuum exhaust system communicated with a second exhaust flow path (exhaust flow path E2). Includes a pump (vacuum pump 5a).
  • the exhaust system has one or more pumps (vacuum pumps 5a, 5b) communicated with a first exhaust flow path (exhaust flow path E1) and a second exhaust flow path (exhaust flow path E2).
  • the exhaust system is configured to remove gas by-products from the first internal space (internal space S1) and the second internal space (internal space S2).
  • At least a part of the electron gun 2 is located in the first internal space (internal space S1), and at least a part of the target 31 is located in the second internal space (internal space S2).
  • the X-ray generator 1 is an electron gun 2 configured to emit an electron beam EB, and is at least partially contained in a first internal space (internal space S1) in a first housing (housing 6).
  • the electron gun 2 arranged in, the target 31 of the electron beam EB, which is at least partially arranged in the second internal space (internal space S2) in the second housing (housing 7), and the first inside.
  • An electron passage P passing between a space (internal space S1) and a second internal space (internal space S2), and a first end portion 9a located in the first internal space (internal space S1) and a second.
  • It has a second end portion 9b located in an internal space (internal space S2), and the second end portion 9b has a reduced diameter portion (for example, a cylindrical portion 93 to 96) whose diameter is reduced toward the target 31. It includes an electron passage P and an exhaust system that evacuates both the first internal space and the second internal space.
  • a reduced diameter portion for example, a cylindrical portion 93 to 96
  • the first end portion 9a of the electron passage P has a diameter-expanded portion (for example, an end portion of the cylindrical portion 92 on the cylindrical portion 91 side) that expands in diameter toward the target 31.
  • the diameter-expanded portion is gradually expanded from the first diameter (for example, the diameter d1 of the cylindrical portion 91) to the second diameter larger than the first diameter (for example, the diameter d2 of the cylindrical portion 92).
  • the annular wall (boundary 9c) faces the target 31 and in order to reduce the number of reflected electrons that pass through the electron passage P and reach the electron gun 2 in the first internal space (internal space S1). , The electron beam EB is configured to collide with the reflected electrons emitted from the second internal space (internal space S2) when it enters the target 31.
  • the minimum diameter of the enlarged diameter portion at the first end 9a of the electron passage P (for example, the diameter d1 of the cylindrical portion 91) is the minimum diameter of the reduced diameter portion at the second end 9b of the electron passage P (for example, the cylinder). It is larger than the diameter d6) of the part 96.
  • the electron passage P includes an intermediate portion (for example, a cylindrical portion 92) located between the first end portion 9a and the second end portion 9b.
  • the portion having the maximum diameter of the electron passage P is located in the intermediate portion.
  • the electron passage P has a first cylindrical portion (for example, a cylindrical portion 91) having a first diameter at the first end portion 9a and a reduced diameter portion having a diameter reduced toward the second diameter at the second end portion 9b.
  • 3 includes a second cylindrical portion (for example, cylindrical portions 93 to 96) and an intermediate cylindrical portion (for example, cylindrical portion 92) located between the first cylindrical portion and the second cylindrical portion and having an intermediate diameter. It has the above cylindrical portion.
  • the first diameter (for example, the diameter d1 of the cylindrical portion 91) is larger than the second diameter (for example, the diameter d6 of the cylindrical portion 96), and the intermediate diameter (for example, the diameter d2 of the cylindrical portion 92) is larger than the first diameter. ..

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KR1020227028253A KR102888413B1 (ko) 2020-04-13 2021-02-12 X선 발생 장치
CN202180024407.6A CN115380352B (zh) 2020-04-13 2021-02-12 X射线产生装置
EP21788610.0A EP4135000A4 (en) 2020-04-13 2021-02-12 X-RAY GENERATION DEVICE
JP2022515217A JP7564194B2 (ja) 2020-04-13 2021-02-12 Ｘ線発生装置

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US16/846,403 US11101098B1 (en) 2020-04-13 2020-04-13 X-ray generation apparatus with electron passage
US16/846,403 2020-04-13

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KR102888413B1 (ko) 2025-11-20
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CN115380352A (zh) 2022-11-22
TW202145277A (zh) 2021-12-01
CN115380352B (zh) 2025-08-29
TWI876002B (zh) 2025-03-11
KR20220166783A (ko) 2022-12-19
EP4135000A4 (en) 2024-04-24
EP4135000A1 (en) 2023-02-15

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