KR102888413B1 - X선 발생 장치 - Google Patents

X선 발생 장치

Info

Publication number
KR102888413B1
KR102888413B1 KR1020227028253A KR20227028253A KR102888413B1 KR 102888413 B1 KR102888413 B1 KR 102888413B1 KR 1020227028253 A KR1020227028253 A KR 1020227028253A KR 20227028253 A KR20227028253 A KR 20227028253A KR 102888413 B1 KR102888413 B1 KR 102888413B1
Authority
KR
South Korea
Prior art keywords
electron
diameter
internal space
passage
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020227028253A
Other languages
English (en)
Korean (ko)
Other versions
KR20220166783A (ko
Inventor
료스케 야부시타
Original Assignee
하마마츠 포토닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 하마마츠 포토닉스 가부시키가이샤 filed Critical 하마마츠 포토닉스 가부시키가이샤
Publication of KR20220166783A publication Critical patent/KR20220166783A/ko
Application granted granted Critical
Publication of KR102888413B1 publication Critical patent/KR102888413B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/20—Arrangements for controlling gases within the X-ray tube

Landscapes

  • X-Ray Techniques (AREA)
KR1020227028253A 2020-04-13 2021-02-12 X선 발생 장치 Active KR102888413B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/846,403 US11101098B1 (en) 2020-04-13 2020-04-13 X-ray generation apparatus with electron passage
US16/846,403 2020-04-13
PCT/JP2021/005317 WO2021210254A1 (ja) 2020-04-13 2021-02-12 Ｘ線発生装置

Publications (2)

Publication Number Publication Date
KR20220166783A KR20220166783A (ko) 2022-12-19
KR102888413B1 true KR102888413B1 (ko) 2025-11-20

Family

ID=77389939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227028253A Active KR102888413B1 (ko) 2020-04-13 2021-02-12 X선 발생 장치

Country Status (7)

Country Link
US (1) US11101098B1 (https=)
EP (1) EP4135000A4 (https=)
JP (1) JP7564194B2 (https=)
KR (1) KR102888413B1 (https=)
CN (1) CN115380352B (https=)
TW (1) TWI876002B (https=)
WO (1) WO2021210254A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150187536A1 (en) 2013-10-29 2015-07-02 Varian Medical Systems, Inc. X-ray tube having planar emitter and magnetic focusing and steering components
JP2017022054A (ja) 2015-07-14 2017-01-26 株式会社ニコン Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム
WO2018066135A1 (ja) * 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法

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JPS5248254B2 (https=) 1972-12-12 1977-12-08
US4130759A (en) 1977-03-17 1978-12-19 Haimson Research Corporation Method and apparatus incorporating no moving parts, for producing and selectively directing x-rays to different points on an object
JPS5619855A (en) * 1979-07-27 1981-02-24 Nippon Hoso Kyokai <Nhk> X-ray generator
JPS60142352U (ja) 1984-02-29 1985-09-20 ダイハツ工業株式会社 タイミングギヤトレイン用歯車
DE19639920C2 (de) 1996-09-27 1999-08-26 Siemens Ag Röntgenröhre mit variablem Fokus
JPH11144653A (ja) 1997-11-06 1999-05-28 Mitsubishi Heavy Ind Ltd Ｘ線発生装置
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
JP4762436B2 (ja) 2001-05-16 2011-08-31 浜松ホトニクス株式会社 カソードユニット及び開放型ｘ線発生装置
JP4772212B2 (ja) * 2001-05-31 2011-09-14 浜松ホトニクス株式会社 Ｘ線発生装置
JP2005276760A (ja) * 2004-03-26 2005-10-06 Shimadzu Corp Ｘ線発生装置
JP2006164819A (ja) 2004-12-09 2006-06-22 Hitachi Medical Corp マイクロフォーカスｘ線管およびそれを用いたｘ線装置
JP4238245B2 (ja) * 2005-09-14 2009-03-18 知平 坂部 Ｘ線発生方法及びｘ線発生装置
US7881436B2 (en) * 2008-05-12 2011-02-01 General Electric Company Method and apparatus of differential pumping in an x-ray tube
JP5248254B2 (ja) 2008-09-29 2013-07-31 知平 坂部 Ｘ線発生方法及びｘ線発生装置
JP2012104272A (ja) * 2010-11-08 2012-05-31 Hamamatsu Photonics Kk Ｘ線発生装置
US8542801B2 (en) * 2011-01-07 2013-09-24 General Electric Company X-ray tube with secondary discharge attenuation
JP5711007B2 (ja) * 2011-03-02 2015-04-30 浜松ホトニクス株式会社 開放型ｘ線源用冷却構造及び開放型ｘ線源
JP6224580B2 (ja) * 2012-05-11 2017-11-01 浜松ホトニクス株式会社 Ｘ線発生装置及びｘ線発生方法
EP2690646A1 (en) 2012-07-26 2014-01-29 Agilent Technologies, Inc. Gradient vacuum for high-flux x-ray source
EP2690645A1 (en) 2012-07-26 2014-01-29 Agilent Technologies, Inc. Tensioned flat electron emitter tape
JP2015041585A (ja) 2013-08-23 2015-03-02 株式会社ニコン Ｘ線源、ｘ線装置、及び構造物の製造方法
US10008359B2 (en) 2015-03-09 2018-06-26 Varex Imaging Corporation X-ray tube having magnetic quadrupoles for focusing and magnetic dipoles for steering
JP2016126969A (ja) * 2015-01-07 2016-07-11 株式会社東芝 Ｘ線管装置
JP6377572B2 (ja) 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
WO2017019782A1 (en) 2015-07-27 2017-02-02 Rensselaer Polytechnic Institute Combination of an x-ray tube and a source grating with electron beam manipulation
US10431415B2 (en) 2016-11-23 2019-10-01 General Electric Company X-ray tube ion barrier
JP6796480B2 (ja) 2016-12-26 2020-12-09 日本電子株式会社 電子銃用の取外し工具
JP2018181768A (ja) * 2017-04-20 2018-11-15 株式会社島津製作所 Ｘ線管

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150187536A1 (en) 2013-10-29 2015-07-02 Varian Medical Systems, Inc. X-ray tube having planar emitter and magnetic focusing and steering components
JP2017022054A (ja) 2015-07-14 2017-01-26 株式会社ニコン Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム
WO2018066135A1 (ja) * 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法

Also Published As

Publication number Publication date
JP7564194B2 (ja) 2024-10-08
US11101098B1 (en) 2021-08-24
JPWO2021210254A1 (https=) 2021-10-21
CN115380352A (zh) 2022-11-22
TW202145277A (zh) 2021-12-01
CN115380352B (zh) 2025-08-29
TWI876002B (zh) 2025-03-11
WO2021210254A1 (ja) 2021-10-21
KR20220166783A (ko) 2022-12-19
EP4135000A4 (en) 2024-04-24
EP4135000A1 (en) 2023-02-15

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