TWI876002B - X光產生裝置 - Google Patents

X光產生裝置 Download PDF

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Publication number
TWI876002B
TWI876002B TW110110549A TW110110549A TWI876002B TW I876002 B TWI876002 B TW I876002B TW 110110549 A TW110110549 A TW 110110549A TW 110110549 A TW110110549 A TW 110110549A TW I876002 B TWI876002 B TW I876002B
Authority
TW
Taiwan
Prior art keywords
aforementioned
electron
diameter
internal space
path
Prior art date
Application number
TW110110549A
Other languages
English (en)
Chinese (zh)
Other versions
TW202145277A (zh
Inventor
藪下綾介
Original Assignee
日商濱松赫德尼古斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商濱松赫德尼古斯股份有限公司 filed Critical 日商濱松赫德尼古斯股份有限公司
Publication of TW202145277A publication Critical patent/TW202145277A/zh
Application granted granted Critical
Publication of TWI876002B publication Critical patent/TWI876002B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/20—Arrangements for controlling gases within the X-ray tube

Landscapes

  • X-Ray Techniques (AREA)
TW110110549A 2020-04-13 2021-03-24 X光產生裝置 TWI876002B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/846,403 US11101098B1 (en) 2020-04-13 2020-04-13 X-ray generation apparatus with electron passage
US16/846,403 2020-04-13

Publications (2)

Publication Number Publication Date
TW202145277A TW202145277A (zh) 2021-12-01
TWI876002B true TWI876002B (zh) 2025-03-11

Family

ID=77389939

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110110549A TWI876002B (zh) 2020-04-13 2021-03-24 X光產生裝置

Country Status (7)

Country Link
US (1) US11101098B1 (https=)
EP (1) EP4135000A4 (https=)
JP (1) JP7564194B2 (https=)
KR (1) KR102888413B1 (https=)
CN (1) CN115380352B (https=)
TW (1) TWI876002B (https=)
WO (1) WO2021210254A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW580721B (en) * 2001-05-31 2004-03-21 Hamamatsu Photonics Kk Device for generating X-ray
US20050213711A1 (en) * 2004-03-26 2005-09-29 Shimadzu Corporation X-ray generating apparatus
US20090279667A1 (en) * 2008-05-12 2009-11-12 Carey Shawn Rogers Method and apparatus of differential pumping in an x-ray tube
TW201403649A (zh) * 2012-05-11 2014-01-16 Hamamatsu Photonics Kk Ｘ線產生裝置及ｘ線產生方法
WO2018066135A1 (ja) * 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法
US20180308656A1 (en) * 2017-04-20 2018-10-25 Shimadzu Coproation X-ray tube

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248254B2 (https=) 1972-12-12 1977-12-08
US4130759A (en) 1977-03-17 1978-12-19 Haimson Research Corporation Method and apparatus incorporating no moving parts, for producing and selectively directing x-rays to different points on an object
JPS5619855A (en) * 1979-07-27 1981-02-24 Nippon Hoso Kyokai <Nhk> X-ray generator
JPS60142352U (ja) 1984-02-29 1985-09-20 ダイハツ工業株式会社 タイミングギヤトレイン用歯車
DE19639920C2 (de) 1996-09-27 1999-08-26 Siemens Ag Röntgenröhre mit variablem Fokus
JPH11144653A (ja) 1997-11-06 1999-05-28 Mitsubishi Heavy Ind Ltd Ｘ線発生装置
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
JP4762436B2 (ja) 2001-05-16 2011-08-31 浜松ホトニクス株式会社 カソードユニット及び開放型ｘ線発生装置
JP2006164819A (ja) 2004-12-09 2006-06-22 Hitachi Medical Corp マイクロフォーカスｘ線管およびそれを用いたｘ線装置
JP4238245B2 (ja) * 2005-09-14 2009-03-18 知平 坂部 Ｘ線発生方法及びｘ線発生装置
JP5248254B2 (ja) 2008-09-29 2013-07-31 知平 坂部 Ｘ線発生方法及びｘ線発生装置
JP2012104272A (ja) * 2010-11-08 2012-05-31 Hamamatsu Photonics Kk Ｘ線発生装置
US8542801B2 (en) * 2011-01-07 2013-09-24 General Electric Company X-ray tube with secondary discharge attenuation
JP5711007B2 (ja) * 2011-03-02 2015-04-30 浜松ホトニクス株式会社 開放型ｘ線源用冷却構造及び開放型ｘ線源
EP2690646A1 (en) * 2012-07-26 2014-01-29 Agilent Technologies, Inc. Gradient vacuum for high-flux x-ray source
EP2690645A1 (en) 2012-07-26 2014-01-29 Agilent Technologies, Inc. Tensioned flat electron emitter tape
JP2015041585A (ja) 2013-08-23 2015-03-02 株式会社ニコン Ｘ線源、ｘ線装置、及び構造物の製造方法
WO2015066246A1 (en) * 2013-10-29 2015-05-07 Varian Medical Systems, Inc. X-ray tube having planar emitter with tunable emission characteristics and magnetic steering and focusing
US10008359B2 (en) 2015-03-09 2018-06-26 Varex Imaging Corporation X-ray tube having magnetic quadrupoles for focusing and magnetic dipoles for steering
JP2016126969A (ja) * 2015-01-07 2016-07-11 株式会社東芝 Ｘ線管装置
JP6377572B2 (ja) 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
JP2017022054A (ja) 2015-07-14 2017-01-26 株式会社ニコン Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム
WO2017019782A1 (en) 2015-07-27 2017-02-02 Rensselaer Polytechnic Institute Combination of an x-ray tube and a source grating with electron beam manipulation
US10431415B2 (en) 2016-11-23 2019-10-01 General Electric Company X-ray tube ion barrier
JP6796480B2 (ja) 2016-12-26 2020-12-09 日本電子株式会社 電子銃用の取外し工具

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW580721B (en) * 2001-05-31 2004-03-21 Hamamatsu Photonics Kk Device for generating X-ray
US20050213711A1 (en) * 2004-03-26 2005-09-29 Shimadzu Corporation X-ray generating apparatus
US20090279667A1 (en) * 2008-05-12 2009-11-12 Carey Shawn Rogers Method and apparatus of differential pumping in an x-ray tube
TW201403649A (zh) * 2012-05-11 2014-01-16 Hamamatsu Photonics Kk Ｘ線產生裝置及ｘ線產生方法
WO2018066135A1 (ja) * 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法
US20180308656A1 (en) * 2017-04-20 2018-10-25 Shimadzu Coproation X-ray tube

Also Published As

Publication number Publication date
WO2021210254A1 (ja) 2021-10-21
EP4135000A4 (en) 2024-04-24
US11101098B1 (en) 2021-08-24
JP7564194B2 (ja) 2024-10-08
CN115380352B (zh) 2025-08-29
CN115380352A (zh) 2022-11-22
JPWO2021210254A1 (https=) 2021-10-21
EP4135000A1 (en) 2023-02-15
KR20220166783A (ko) 2022-12-19
KR102888413B1 (ko) 2025-11-20
TW202145277A (zh) 2021-12-01

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