JP7564194B2 - Ｘ線発生装置 - Google Patents

Ｘ線発生装置 Download PDF

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Publication number
JP7564194B2
JP7564194B2 JP2022515217A JP2022515217A JP7564194B2 JP 7564194 B2 JP7564194 B2 JP 7564194B2 JP 2022515217 A JP2022515217 A JP 2022515217A JP 2022515217 A JP2022515217 A JP 2022515217A JP 7564194 B2 JP7564194 B2 JP 7564194B2
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Japan
Prior art keywords
electron
diameter
passage
target
housing
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JP2022515217A
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Japanese (ja)
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JPWO2021210254A1 (https=
Inventor
綾介 藪下
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Hamamatsu Photonics KK
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Hamamatsu Photonics KK
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/20—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/147—Spot size control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
    • H01J35/153—Spot position control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/24—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof
    • H01J35/26—Tubes wherein the point of impact of the cathode ray on the anode or anticathode is movable relative to the surface thereof by rotation of the anode or anticathode
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/20—Arrangements for controlling gases within the X-ray tube

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  • X-Ray Techniques (AREA)
JP2022515217A 2020-04-13 2021-02-12 Ｘ線発生装置 Active JP7564194B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US16/846,403 US11101098B1 (en) 2020-04-13 2020-04-13 X-ray generation apparatus with electron passage
US16/846,403 2020-04-13
PCT/JP2021/005317 WO2021210254A1 (ja) 2020-04-13 2021-02-12 Ｘ線発生装置

Publications (2)

Publication Number Publication Date
JPWO2021210254A1 JPWO2021210254A1 (https=) 2021-10-21
JP7564194B2 true JP7564194B2 (ja) 2024-10-08

Family

ID=77389939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022515217A Active JP7564194B2 (ja) 2020-04-13 2021-02-12 Ｘ線発生装置

Country Status (7)

Country Link
US (1) US11101098B1 (https=)
EP (1) EP4135000A4 (https=)
JP (1) JP7564194B2 (https=)
KR (1) KR102888413B1 (https=)
CN (1) CN115380352B (https=)
TW (1) TWI876002B (https=)
WO (1) WO2021210254A1 (https=)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017022054A (ja) 2015-07-14 2017-01-26 株式会社ニコン Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム
WO2018066135A1 (ja) 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法
US20180144902A1 (en) 2016-11-23 2018-05-24 General Electric Company X-ray tube ion barrier

Family Cites Families (28)

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Publication number Priority date Publication date Assignee Title
JPS5248254B2 (https=) 1972-12-12 1977-12-08
US4130759A (en) 1977-03-17 1978-12-19 Haimson Research Corporation Method and apparatus incorporating no moving parts, for producing and selectively directing x-rays to different points on an object
JPS5619855A (en) * 1979-07-27 1981-02-24 Nippon Hoso Kyokai <Nhk> X-ray generator
JPS60142352U (ja) 1984-02-29 1985-09-20 ダイハツ工業株式会社 タイミングギヤトレイン用歯車
DE19639920C2 (de) 1996-09-27 1999-08-26 Siemens Ag Röntgenröhre mit variablem Fokus
JPH11144653A (ja) 1997-11-06 1999-05-28 Mitsubishi Heavy Ind Ltd Ｘ線発生装置
GB9906886D0 (en) * 1999-03-26 1999-05-19 Bede Scient Instr Ltd Method and apparatus for prolonging the life of an X-ray target
JP4762436B2 (ja) 2001-05-16 2011-08-31 浜松ホトニクス株式会社 カソードユニット及び開放型ｘ線発生装置
JP4772212B2 (ja) * 2001-05-31 2011-09-14 浜松ホトニクス株式会社 Ｘ線発生装置
JP2005276760A (ja) * 2004-03-26 2005-10-06 Shimadzu Corp Ｘ線発生装置
JP2006164819A (ja) 2004-12-09 2006-06-22 Hitachi Medical Corp マイクロフォーカスｘ線管およびそれを用いたｘ線装置
JP4238245B2 (ja) * 2005-09-14 2009-03-18 知平 坂部 Ｘ線発生方法及びｘ線発生装置
US7881436B2 (en) * 2008-05-12 2011-02-01 General Electric Company Method and apparatus of differential pumping in an x-ray tube
JP5248254B2 (ja) 2008-09-29 2013-07-31 知平 坂部 Ｘ線発生方法及びｘ線発生装置
JP2012104272A (ja) * 2010-11-08 2012-05-31 Hamamatsu Photonics Kk Ｘ線発生装置
US8542801B2 (en) * 2011-01-07 2013-09-24 General Electric Company X-ray tube with secondary discharge attenuation
JP5711007B2 (ja) * 2011-03-02 2015-04-30 浜松ホトニクス株式会社 開放型ｘ線源用冷却構造及び開放型ｘ線源
JP6224580B2 (ja) * 2012-05-11 2017-11-01 浜松ホトニクス株式会社 Ｘ線発生装置及びｘ線発生方法
EP2690646A1 (en) 2012-07-26 2014-01-29 Agilent Technologies, Inc. Gradient vacuum for high-flux x-ray source
EP2690645A1 (en) 2012-07-26 2014-01-29 Agilent Technologies, Inc. Tensioned flat electron emitter tape
JP2015041585A (ja) 2013-08-23 2015-03-02 株式会社ニコン Ｘ線源、ｘ線装置、及び構造物の製造方法
US10008359B2 (en) 2015-03-09 2018-06-26 Varex Imaging Corporation X-ray tube having magnetic quadrupoles for focusing and magnetic dipoles for steering
EP3063780B1 (en) * 2013-10-29 2021-06-02 Varex Imaging Corporation X-ray tube having planar emitter with tunable emission characteristics and magnetic steering and focusing
JP2016126969A (ja) * 2015-01-07 2016-07-11 株式会社東芝 Ｘ線管装置
JP6377572B2 (ja) 2015-05-11 2018-08-22 株式会社リガク Ｘ線発生装置、及びその調整方法
WO2017019782A1 (en) 2015-07-27 2017-02-02 Rensselaer Polytechnic Institute Combination of an x-ray tube and a source grating with electron beam manipulation
JP6796480B2 (ja) 2016-12-26 2020-12-09 日本電子株式会社 電子銃用の取外し工具
JP2018181768A (ja) * 2017-04-20 2018-11-15 株式会社島津製作所 Ｘ線管

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017022054A (ja) 2015-07-14 2017-01-26 株式会社ニコン Ｘ線発生装置、ｘ線装置、構造物の製造方法、及び構造物製造システム
WO2018066135A1 (ja) 2016-10-07 2018-04-12 株式会社ニコン 荷電粒子線装置、電子線発生装置、ｘ線源、ｘ線装置および構造物の製造方法
US20180144902A1 (en) 2016-11-23 2018-05-24 General Electric Company X-ray tube ion barrier

Also Published As

Publication number Publication date
US11101098B1 (en) 2021-08-24
KR102888413B1 (ko) 2025-11-20
JPWO2021210254A1 (https=) 2021-10-21
CN115380352A (zh) 2022-11-22
TW202145277A (zh) 2021-12-01
CN115380352B (zh) 2025-08-29
TWI876002B (zh) 2025-03-11
WO2021210254A1 (ja) 2021-10-21
KR20220166783A (ko) 2022-12-19
EP4135000A4 (en) 2024-04-24
EP4135000A1 (en) 2023-02-15

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