WO2019131226A1 - 基板処理装置、基板処理方法、及びコンピュータ読み取り可能な記録媒体 - Google Patents
基板処理装置、基板処理方法、及びコンピュータ読み取り可能な記録媒体 Download PDFInfo
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- WO2019131226A1 WO2019131226A1 PCT/JP2018/046164 JP2018046164W WO2019131226A1 WO 2019131226 A1 WO2019131226 A1 WO 2019131226A1 JP 2018046164 W JP2018046164 W JP 2018046164W WO 2019131226 A1 WO2019131226 A1 WO 2019131226A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/251—Colorimeters; Construction thereof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8411—Application to online plant, process monitoring
- G01N2021/8416—Application to online plant, process monitoring and process controlling, not otherwise provided for
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
Definitions
- the present disclosure relates to a substrate processing apparatus, a substrate processing method, and a computer readable recording medium.
- Patent Document 1 As a configuration for detecting minute foreign substances (particles, air bubbles, etc.) contained in the processing liquid supplied to the substrate, the processing liquid flowing in the flow path is irradiated with laser light and irradiated with laser light. It is described that the signal output from the light receiving element in accordance with the light is acquired, and the number, the size, and the type of the foreign matter are determined based on the signal.
- the treatment liquid may be degraded by the absorption of the light (the chemical solution may be denatured).
- the present disclosure describes a substrate processing apparatus, a substrate processing method, and a computer readable recording medium capable of appropriately preventing deterioration of the processing liquid in a configuration in which the processing liquid is irradiated with light. Do.
- a substrate processing apparatus includes an optical measurement mechanism that irradiates light to a processing solution on a substrate flowing in a flow path and acquires a state of the processing liquid based on a change in the light;
- An irradiation availability determination mechanism that determines whether or not light can be applied to the processing liquid by the optical measuring mechanism based on the processing liquid on the supply source side of the processing liquid rather than the location where the processing liquid is irradiated with light from the optical measuring mechanism.
- the irradiation availability determination mechanism has a color information acquisition mechanism for acquiring color information of the processing liquid, and a control unit, and the control unit controls the wavelength of light with which the color information of the processing liquid is irradiated by the optical measurement mechanism. To determine whether or not the predetermined color information is likely to be absorbed, and to determine whether or not the treatment liquid should be irradiated with light based on the determination result, and outputting information indicating the possibility of irradiation. Is configured.
- the color information of the processing liquid tends to absorb the wavelength of the light to be irradiated based on the processing liquid on the upstream side of the portion where the processing liquid is irradiated with light by the optical measurement mechanism. It is determined whether or not it is the color information of (1), and whether or not light can be applied to the processing liquid is determined based on the determination result. Depending on the combination of the color of the treatment liquid and the wavelength band of the light to be irradiated, the treatment liquid may be degraded by the absorption of light.
- the treatment liquid is irradiated by determining whether or not the color information of the treatment liquid is the predetermined color information that easily absorbs the wavelength of light in the stage before irradiating the treatment liquid with light. It can be determined whether the light is to be altered by light. Then, based on the determination result, it is determined whether or not the treatment liquid can be irradiated with light, and information indicating the possibility of irradiation is output, so that the processing liquid flowing in the flow path may be altered by the light from the optical measurement mechanism, for example. In the case where there is a problem, it is possible to take measures such as stopping the irradiation of light from the optical measurement mechanism, and it is possible to appropriately prevent the processing solution from being deteriorated. As described above, according to the present disclosure, in the configuration in which the processing liquid is irradiated with light, the processing liquid is appropriately prevented from degenerating even when the processing liquid different from the normal flows due to some mistake or the like. be able to.
- the color information acquisition mechanism may have a colorimeter or an imaging device.
- color information of the processing liquid can be appropriately grasped.
- the color information acquisition mechanism has an irradiation unit that irradiates the treatment liquid with a light for determination that has a wavelength close to the wavelength of the light irradiated from the optical measurement mechanism to the treatment liquid, and the control unit irradiates the treatment liquid with the irradiation unit.
- the determined light is absorbed by the processing liquid at a certain level or more, it may be determined that the color information of the processing liquid is predetermined color information that easily absorbs the wavelength of the light irradiated by the optical measurement mechanism. .
- the light for discrimination When the light for discrimination is absorbed in the treatment liquid at a certain level or more, it is considered that the light irradiated to the treatment liquid from the optical measurement mechanism, which has a wavelength similar to that of the light for discrimination, is easily absorbed by the treatment liquid. For this reason, when the light for determination is absorbed in the processing liquid by a predetermined amount or more, it is determined that the color information of the processing liquid is the predetermined color information that easily absorbs the wavelength of the light irradiated by the optical measurement mechanism, By determining that irradiation of light to the treatment liquid is not possible, the above-described determination as to whether or not irradiation can be performed easily and with high accuracy.
- the irradiating unit may irradiate light having a longer wavelength than the light irradiated to the treatment liquid from the optical measurement mechanism as the light for discrimination.
- the discrimination light By setting the discrimination light to a long wavelength light, that is, a light with low energy, it is possible to suppress the deterioration of the processing liquid in the step of irradiating the discrimination light (determination step).
- the color information acquisition mechanism may have an irradiation unit that irradiates the treatment liquid with a discrimination light whose irradiation intensity is lower than the light irradiated to the treatment liquid from the optical measurement mechanism. Thereby, it is possible to suppress the deterioration of the processing liquid in the step of irradiating the discrimination light (determination step).
- the irradiation unit may irradiate the processing liquid with light for determination of wavelengths of a plurality of patterns. Thereby, the wavelength range in which the treatment liquid tends to absorb can be specified more finely.
- the control unit When it is determined that the treatment liquid can not be irradiated with light, the control unit identifies a warning indicating that the color of the treatment liquid is abnormal, and identifies a substrate being processed, as information indicating whether irradiation is possible or not. Information may be output. Thereby, based on the information which shows the irradiation propriety, the process which prevents a quality change of a process liquid can be performed appropriately.
- shutoff control to shut off the light output by the optical measurement mechanism, carry-in stop control to stop carrying in a new substrate, and flow path It may be configured to further execute at least one of liquid transfer stop control for stopping liquid transfer of the processing liquid and drainage control for discarding the processing liquid flowing in the flow path.
- the carrying-in stop control it is possible to prevent the processing liquid which has been altered from being applied to the substrate. Further, by performing the liquid feeding stop control, it is possible to prevent the liquid feeding of the treatment liquid that may be deteriorated by the light irradiation. Further, by performing the drainage control, it is possible to appropriately discard the treatment liquid that may be deteriorated.
- a substrate processing method includes acquiring color information of a processing liquid on a substrate flowing in a flow path, and color information of the processing liquid from light that is irradiated to the processing liquid from an optical measurement mechanism. It is determined whether or not the predetermined color information that easily absorbs the wavelength, and only when it is determined that the predetermined color information is not, the light is irradiated from the optical measurement mechanism to the processing liquid, and Obtaining the state of the processing solution based on the change.
- Determining whether or not the determination is made is performed by determining that the color information of the processing liquid is predetermined color information when the light for determination is absorbed by the processing liquid at a certain level or more.
- a recording medium is a computer-readable recording medium in which a program for causing a substrate processing mechanism to execute the above-described substrate processing method is recorded.
- the substrate processing apparatus the substrate processing method, and the computer readable recording medium according to the present disclosure, it is possible to appropriately prevent the processing liquid from being degraded in the configuration in which the processing liquid is irradiated with light.
- FIG. 1 is a perspective view showing a substrate processing system.
- FIG. 2 is a cross-sectional view taken along line II-II of FIG.
- FIG. 3 is a sectional view taken along line III-III of FIG.
- FIG. 4 is a schematic view showing a coating unit.
- FIG. 5 is a view showing a liquid supply system according to the present embodiment.
- FIG. 6 is a view schematically showing the constitution for preventing deterioration of the coating liquid according to the present embodiment.
- FIG. 7 is a schematic configuration view of a first laser unit according to the present embodiment.
- FIG. 8 is a hardware configuration diagram of a controller.
- FIG. 9 is a flowchart of the substrate processing procedure.
- FIG. 10 is a view schematically showing the constitution for preventing deterioration of the coating liquid according to the modification.
- the substrate processing system 1 includes a coating / developing device 2 and an exposure device 3.
- the exposure device 3 performs exposure processing of the resist film. Specifically, energy rays are irradiated to the exposure target portion of the resist film (photosensitive film) by a method such as immersion exposure. Examples of the energy ray include ArF excimer laser, KrF excimer laser, g-ray, i-ray, and extreme ultraviolet (EUV).
- the coating / developing device 2 performs processing for forming a resist film on the surface of the wafer W (substrate) before exposure processing by the exposure device 3 and performs development processing for the resist film after exposure processing.
- the wafer W has a disk shape, but a wafer may be used in which a part of a circle is cut away or a non-circular shape such as a polygon.
- the wafer W may be, for example, a semiconductor substrate, a glass substrate, a mask substrate, an FPD (Flat Panel Display) substrate, or other various substrates.
- the coating and developing apparatus 2 includes a carrier block 4, a processing block 5, an interface block 6, and a controller 100 (control unit).
- the carrier block 4, the processing block 5 and the interface block 6 are horizontally aligned.
- the carrier block 4 has a carrier station 12 and a loading / unloading unit 13.
- the loading / unloading unit 13 is interposed between the carrier station 12 and the processing block 5.
- the carrier station 12 supports a plurality of carriers 11.
- the carrier 11 accommodates, for example, a plurality of circular wafers W in a sealed state, and has an open / close door (not shown) for taking in and out the wafers W on the side surface 11 a side.
- the carrier 11 is detachably installed on the carrier station 12 so that the side surface 11 a faces the loading / unloading unit 13 side.
- the loading / unloading unit 13 has a plurality of opening / closing doors 13 a respectively corresponding to the plurality of carriers 11 on the carrier station 12.
- the loading / unloading unit 13 incorporates a delivery arm A1.
- the delivery arm A1 takes out the wafer W from the carrier 11 and delivers it to the processing block 5, receives the wafer W from the processing block 5, and returns the wafer W into the carrier 11.
- the processing block 5 includes a BCT module (lower layer film forming module) 14, a COT module (resist film forming module) 15, a TCT module (upper layer film forming module) 16, and a DEV module (development processing module) 17. These modules are arranged in the order of the DEV module 17, the BCT module 14, the COT module 15, and the TCT module 16 from the floor side.
- BCT module lower layer film forming module
- COT module resist film forming module
- TCT module upper layer film forming module
- DEV module development processing module
- the BCT module 14 is configured to form an underlayer film on the surface of the wafer W.
- the BCT module 14 incorporates a plurality of application units (not shown), a plurality of heat treatment units (not shown), and a transfer arm A2 for transferring the wafer W to these units.
- the coating unit is configured to apply a coating solution for forming the lower layer film on the surface of the wafer W.
- the heat treatment unit is configured to heat the wafer W by, for example, a hot plate, and cool the heated wafer W by, for example, a cooling plate to perform heat treatment.
- a specific example of the heat treatment performed in the BCT module 14 is a heat treatment for curing the coating liquid.
- the COT module 15 is configured to form a thermosetting and photosensitive resist film on the lower layer film.
- the COT module 15 incorporates a plurality of application units U1, a plurality of heat treatment units U2, and a transfer arm A3 for transferring the wafer W to these units.
- the coating unit U1 is configured to apply a coating solution (resist agent) for forming a resist film on the lower layer film.
- the thermal processing unit U2 is configured to heat the wafer W by, for example, a hot plate, and cool the heated wafer W by, for example, a cooling plate to perform thermal processing.
- a heat treatment PAB: Pre Applied Bake
- the TCT module 16 is configured to form an upper layer film on the resist film.
- the TCT module 16 incorporates a plurality of application units (not shown), a plurality of heat treatment units (not shown), and a transfer arm A4 for transferring the wafer W to these units.
- the coating unit is configured to apply a coating solution for forming the upper layer film on the surface of the wafer W.
- the heat treatment unit is configured to heat the wafer W by, for example, a hot plate, and cool the heated wafer W by, for example, a cooling plate to perform heat treatment.
- a specific example of the heat treatment performed in the TCT module 16 is a heat treatment for curing the coating liquid.
- the DEV module 17 is configured to perform development processing of the exposed resist film.
- the DEV module 17 includes a plurality of developing units (not shown), a plurality of heat treatment units (not shown), a transfer arm A5 for transferring the wafer W to these units, and the wafer W without passing through these units. And a direct transfer arm A6.
- the developing unit is configured to partially remove the resist film to form a resist pattern.
- the heat treatment unit heats the wafer W by, for example, a hot plate, cools the heated wafer W by, for example, a cooling plate, and performs heat treatment.
- Specific examples of the heat treatment performed in the DEV module 17 include heat treatment (PEB: Post Exposure Bake) before development treatment, heat treatment (PB: Post Bake) after development treatment, and the like.
- a shelf unit U10 is provided on the side of the carrier block 4 in the processing block 5.
- the shelf unit U10 is provided so as to extend from the floor surface to the TCT module 16, and is divided into a plurality of cells aligned in the vertical direction.
- a lift arm A7 is provided in the vicinity of the shelf unit U10. The lift arm A7 lifts and lowers the wafer W between the cells of the shelf unit U10.
- a shelf unit U11 is provided on the side of the interface block 6 in the processing block 5.
- the shelf unit U11 is provided so as to extend from the floor surface to the upper portion of the DEV module 17, and is partitioned into a plurality of cells aligned in the vertical direction.
- the interface block 6 incorporates the delivery arm A 8 and is connected to the exposure device 3.
- the transfer arm A8 is configured to take out the wafer W of the shelf unit U11 and transfer it to the exposure device 3, receive the wafer W from the exposure device 3 and return it to the shelf unit U11.
- the controller 100 is configured by one or more control computers, and controls the coating and developing apparatus 2.
- the controller 100 has a display unit (not shown) for displaying a control condition setting screen, an input unit (not shown) for inputting control conditions, and a reading unit (not shown) for reading a program from a computer readable recording medium Have.
- the recording medium stores a program for causing the coating / developing device 2 to execute processing. This program is read by the reading unit of the controller 100.
- the recording medium may be, for example, a semiconductor memory, an optical recording disk, a magnetic recording disk, or a magneto-optical recording disk.
- the controller 100 controls the coating / developing device 2 according to the control condition input to the input unit and the program read by the reading unit.
- the application unit U1 includes a rotation holding unit 20, a drive unit 30, and a liquid supply system 40, as shown in FIG.
- the rotation holding unit 20 includes a rotating unit 21 and a holding unit 23.
- the rotating portion 21 has a shaft 22 projecting upward.
- the rotating unit 21 rotates the shaft 22 using, for example, an electric motor or the like as a power source.
- the holding portion 23 is provided at the tip of the shaft 22.
- the wafer W is horizontally disposed on the holding unit 23.
- the holding unit 23 holds the wafer W substantially horizontally by, for example, suction or the like. That is, the rotation holding unit 20 rotates the wafer W around an axis (rotation axis) perpendicular to the surface of the wafer W in a state where the posture of the wafer W is substantially horizontal.
- the rotation axis passes through the center of the wafer W having a circular shape, and thus is also a central axis.
- the rotation holding unit 20 rotates the wafer W clockwise as viewed from above.
- the drive unit 30 is configured to drive the nozzle N.
- the drive unit 30 has a guide rail 31, a slide block 32, and an arm 33.
- the guide rail 31 extends in the horizontal direction above the rotation holding unit 20 (wafer W).
- the slide block 32 is connected to the guide rail 31 so as to be horizontally movable along the guide rail 31.
- the arm 33 connects the slide block 32 and the nozzle N.
- the nozzle N is disposed at the lower end of the arm 33.
- the drive unit 30 moves the slide block 32 using, for example, an electric motor or the like as a power source, and moves the nozzle N accordingly. In plan view, the nozzle N moves along a radial direction of the wafer W on a straight line perpendicular to the rotation axis of the wafer W.
- the liquid supply system 40 receives the control signal from the controller 100 and discharges the coating liquid (processing liquid) from the nozzle N to the surface Wa of the wafer W.
- the nozzle N opens downward toward the surface Wa of the wafer W.
- the coating liquid is a liquid used to form a coating film R (see FIG. 4) on the surface Wa of the wafer W.
- a coating solution for example, a resist solution for forming a resist pattern, a solution for forming an antireflective film (for example, a lower layer antireflective coating (BARC) film, a silicon-containing antireflective coating (SiARC) film), etc. Can be mentioned.
- BARC lower layer antireflective coating
- SiARC silicon-containing antireflective coating
- the liquid supply system 40 includes a liquid bottle B, a liquid tank LE, a pump device P1, a filter device F1, pipes D1 to D6 (flow paths), a valve V, three-way valves Vt1 to Vt3, and a first laser A unit 50 (optical measurement mechanism), a second laser unit 60 (color information acquisition mechanism), and cuvettes 150 and 160 are provided.
- the upstream end of the pipe D1 is connected to an N 2 gas source.
- the downstream end of the pipe D1 is connected to the upper lid portion of the liquid bottle B so as to be located in the vicinity of the upper lid of the liquid bottle B.
- the liquid bottle B functions as a supply source of the coating liquid.
- the upstream end of the pipe D2 is connected to the upper lid portion of the liquid bottle B so as to be located near the lower bottom of the liquid bottle B.
- the downstream end of the pipe D2 is connected to the upper lid portion of the liquid tank LE so as to be positioned near the upper lid of the liquid tank LE.
- a cuvette 160 is provided on the pipe D2.
- the liquid tank LE functions as a reservoir for temporarily storing the coating liquid discharged from the liquid bottle B.
- the upstream end of the pipe D3 (one form of liquid feed line) is connected to the lower bottom portion of the liquid tank LE.
- the downstream end of the pipe D3 is connected to the nozzle N.
- a filter device F1, a three-way valve Vt1, a pump device P1, a three-way valve Vt2, a cuvette 150, a valve V, and a three-way valve Vt3 are provided on the pipe D3 sequentially from the upstream side.
- the filter device F1 removes foreign matter such as particles contained in the coating liquid.
- the pump device P1 sucks the coating liquid in the liquid tank LE and sends it toward the nozzle N.
- the valve V is an air operated valve that uses air to open and close (turn on / off) the valve.
- the valve V discharges the coating liquid from the nozzle N when the valve is opened, and stops the discharge of the coating liquid from the nozzle N when the valve is closed.
- the valve V may have a function of controlling the flow rate of the coating liquid discharged from the nozzle N to a predetermined size.
- the valve V may have a function (suck back function) of sucking the coating liquid in the nozzle N so that the coating liquid does not stay in the nozzle N when stopping the discharge of the coating liquid from the nozzle N.
- the pipe D3 has portions D3a to D3d.
- the part D3a extends between the fluid tank LE and the filter device F1.
- the portion D3b extends between the three-way valve Vt1 and the pump device P1.
- the portion D3c extends between the three-way valve Vt2 and the valve V.
- the portion D3d extends between the three-way valve Vt3 and the nozzle N.
- the three-way valve Vt1 is provided on the outlet side (downstream side) of the filter device F1.
- the three-way valve Vt2 is provided on the outlet side (downstream side) of the pump device P1.
- a state in which the three-way valve Vt2 enables the flow of liquid between the pump device P1 and the portion D3c while preventing the flow of liquid between the pump device P1 and the portion D3c and the pipe D5, and the pump device P1 and the pipe It operates in the state which blocks
- the three-way valve Vt3 is provided on the outlet side (downstream side) of the valve V.
- the three-way valve Vt3 allows the fluid to flow between the valve V and the portion D3d while preventing the fluid from flowing between the valve V and the portion D3d and the pipe D6, and the valve V and the pipe D6 It operates in the state which blocks
- the upstream end of the pipe D4 is connected to the three-way valve Vt1.
- the upstream end of the pipe D5 is connected to the three-way valve Vt2.
- the upstream end of the pipe D6 is connected to the three-way valve Vt3.
- the liquid flowing through the pipes D4 to D6 is discharged out of the system (outside the system) through the pipes D4 to D6, respectively.
- the cuvette 150 is provided in the portion D3c, is a flow path portion of the coating liquid flowing in the portion D3c, and transmits the laser beam from the first laser unit 50 described later.
- the cuvette 160 is provided in the pipe D2, is a flow path portion of the coating liquid flowing in the pipe D2, and transmits the laser light from the second laser unit 60 described later.
- the cuvette 150, 160 is made of, for example, transparent quartz so as to be able to transmit laser light.
- the liquid supply system 40 irradiates a laser beam from the first laser unit 50 to the coating liquid flowing through the pipe (specifically, the portion D3c).
- the state of foreign matter (such as particles or bubbles) contained in the coating liquid is estimated from the intensity of the laser beam transmitted through the coating liquid.
- the state of the foreign matter is, for example, information indicating the particle diameter of the foreign matter, the number of the foreign matter, and the type of the foreign matter. For example, when the intensity of the acquired laser beam is small, it is estimated that the particle size of the foreign matter is large or the number of foreign matter is large.
- the coating solution may deteriorate (the change accompanied by light emission, heat generation, chemical change, etc.) as the coating solution absorbs the laser beam. This can be avoided by grasping the color information of the coating liquid before the laser light is irradiated to the coating liquid from the first laser unit 50 (details will be described later).
- the second laser is located upstream of the portion where the laser light is irradiated to the coating liquid from the first laser unit 50.
- a configuration in which the coating solution is irradiated with the laser beam from the unit 60 is employed.
- the laser beam emitted from the second laser unit 60 is a laser beam whose wavelength is similar to that of the laser beam emitted from the first laser unit 50. Therefore, when the degree of absorption of the laser beam irradiated to the coating liquid from the second laser unit 60 is high (for example, the coating liquid does not transmit the laser light), the coating liquid is irradiated from the first laser unit 50. It can be estimated that the laser beam is likely to be absorbed (it is likely to be altered by the laser beam from the first laser unit 50).
- the coating solution when the degree of absorption of the laser beam irradiated to the coating solution from the second laser unit 60 is low (for example, the coating solution transmits the laser beam), the coating solution is irradiated from the first laser unit 50 It can be estimated that the laser beam is difficult to absorb (it is difficult to deteriorate by the laser beam from the first laser unit 50).
- the controller 100 that controls the first laser unit 50, the second laser unit 60, and the liquid supply system 40 will be described.
- the first laser unit 50 irradiates a laser beam to the coating liquid flowing in the portion D3c of the pipe D3, and acquires the state of the coating liquid based on the change of the light. As shown in FIG. 5, the first laser unit 50 irradiates the laser light to the cuvette 150 which transmits the laser light, thereby irradiating the laser light to the coating liquid through the cuvette 150.
- the wavelength of the laser beam emitted from the first laser unit 50 is, for example, 532 nm.
- the irradiation intensity of the laser light emitted from the first laser unit 50 is, for example, about 800 W.
- the wavelength and energy of the laser beam emitted from the first laser unit 50 are an example, and the present invention is not limited to this.
- the first laser unit 50 includes a light source 51, a shutter 52, a fiber 53, a collimator 54, an objective lens 55, a light receiving lens 56, and a light receiving element 57.
- the light source 51 is a light supply unit that emits a laser beam.
- the laser light emitted from the light source 51 is guided to the fiber 53.
- a collimator 54 is provided at the lower end of the fiber 53.
- the shutter 52 shields the light path between the upstream side and the downstream side of the fiber 53 (the position shown by the two-dot chain line in FIG. 7), and the open position (the solid line in FIG. 7) retreats from the light path. And move the light path between the two positions.
- the actuator moves the shutter 52 according to the control of the controller 100 to open and close the light path.
- the parallel light emitted from the collimator 54 is irradiated to the cuvette 150 (that is, the coating solution flowing through the cuvette 150) through the objective lens 55 which is a condensing lens.
- the light emitted to the cuvette 150 is guided to the light receiving element 57 through the light receiving lens 56.
- the light receiving element 57 outputs an electric signal corresponding to the received light to the controller 100.
- the electric signal output from the light receiving element 57 changes in accordance with the state of foreign matter in the coating liquid flowing in the cuvette 150. Therefore, the state of the coating liquid in accordance with the electric signal (How much foreign matter is included etc.) can be grasped.
- the second laser unit 60 acquires color information of the coating liquid by irradiating the coating liquid flowing through the pipe D ⁇ b> 2 with laser light (light for discrimination).
- the color information of the coating liquid is, for example, information indicating whether the coating liquid is a color that easily absorbs the laser light emitted from the second laser unit 60.
- the second laser unit 60 irradiates the laser light to the cuvette 160 which transmits the laser light, thereby irradiating the coating liquid with the laser light through the cuvette 160.
- the second laser unit 60 has a light source 61 (irradiation unit).
- the light source 61 is a light supply unit that emits a laser beam.
- the light source 61 irradiates the coating liquid with a laser beam having a wavelength close to the wavelength of the laser beam emitted from the first laser unit 50 to the coating liquid, and more specifically, the coating liquid is irradiated from the first laser unit 50 Emits light of a wavelength longer than that of the laser light. For example, when the wavelength of the laser beam emitted from the first laser unit 50 is 532 nm, the light source 61 may emit a laser beam of about 600 to 800 nm. In addition, the light source 61 may irradiate the coating liquid with laser light whose irradiation intensity is lower than that of the laser light irradiated to the coating liquid from the first laser unit 50. For example, when the irradiation intensity of the laser light emitted from the first laser unit 50 is 1 W, the light source 61 may emit a laser light having an irradiation intensity of about 100 mW.
- the second laser unit 60 has the same configuration as the first laser unit 50 shown in FIG. That is, in addition to the light source 61, the second laser unit 60 has a configuration such as a shutter, a fiber, a collimator, an objective lens, a light receiving lens, and a light receiving element (all not shown). According to such a configuration, the electrical signal output from the light receiving element to the controller 100 changes in accordance with the degree of absorption of the laser light of the coating liquid flowing through the cuvette 160. For this reason, it is possible to grasp color information of the application liquid (for example, information indicating whether the application liquid is a color that easily absorbs the light for determination) according to the electric signal.
- color information of the application liquid for example, information indicating whether the application liquid is a color that easily absorbs the light for determination
- the coating liquid It is synonymous with "it is easy to absorb the laser beam with which a coating liquid is irradiated to a coating liquid from the 1st laser unit 50" that it is easy to absorb. That is, based on the electric signal output from the light receiving element of the second laser unit 60, grasping whether or not the coating liquid tends to absorb the laser beam irradiated to the coating liquid from the first laser unit 50 it can.
- the second laser unit 60 together with the controller 100 described below, constitutes an irradiation availability determination mechanism.
- the second laser unit 60 and the controller 100 flow in the coating liquid (specifically, in the pipe D2) in the pipe (flow path) upstream of the portion where the laser light is irradiated from the first laser unit 50 to the coating liquid.
- the irradiation availability determination mechanism is configured to determine whether the first laser unit 50 can apply the laser beam to the coating solution.
- the controller 100 determines whether the color information of the coating solution is predetermined color information that easily absorbs the wavelength of the laser beam emitted by the first laser unit 50, and based on the determination result, Determining whether or not to emit the laser beam, and outputting information indicating whether or not to emit the laser beam.
- the controller 100 causes the color information of the coating liquid to be the first laser. It is determined that the wavelength of the laser light emitted by the unit 50 is predetermined color information that is easily absorbed.
- a warning indicating that the color of the application liquid is abnormal as information indicating whether or not the application liquid is irradiated, and a wafer being processed Information for identifying W may be output.
- the shutoff control that shuts off the output of the laser light by the first laser unit 50 and the carry-in stop for stopping the loading of a new substrate
- the method may be configured to further execute control, liquid feeding stop control to stop feeding of the processing liquid to the flow path, and drainage control to discard the processing liquid flowing in the flow path.
- the controller 100 determines the function unit 101 as a functional module, an output unit 102, a shutoff control unit 103, a carry-in stop control unit 104, a liquid feeding stop control unit 105, and a drainage control unit 106. And.
- the determination unit 101 determines whether the color information of the coating liquid is predetermined color information that easily absorbs the wavelength of the laser beam irradiated by the first laser unit 50.
- the determination unit 101 determines that the color information of the application liquid is the first laser unit It is determined that the wavelength of the laser beam irradiated by the light source 50 is predetermined color information that is easily absorbed.
- the determination unit 101 receives an electrical signal from the light receiving element of the second laser unit 60.
- the electric signal is, for example, a smaller signal as the degree of absorption of the laser light in the coating liquid is larger, and a larger signal as the degree of absorption is smaller. Therefore, based on the electrical signal transmitted from the light receiving element of the second laser unit 60, the determination unit 101 can specify the degree of absorption of the laser light in the coating liquid.
- the determination unit 101 is a coating solution having predetermined color information that easily absorbs the wavelength of the laser beam emitted by the first laser unit 50 for a coating solution having a degree of absorption larger than a predetermined value (that is, the first laser It is determined that the coating liquid is deteriorated by the laser light of the unit 50).
- the output unit 102 determines whether the first laser unit 50 can irradiate the laser light to the coating liquid, and outputs information indicating the possibility of the irradiation.
- the output unit 102 determines that irradiation is not possible when it is determined that the color information of the coating liquid is the predetermined color information that easily absorbs the wavelength of the laser beam irradiated by the first laser unit 50 in the determination result. If it is determined that the color information is not the predetermined color information, it is determined that the irradiation is possible.
- the output unit 102 outputs, to at least the shutoff control unit 103, the carry-in stop control unit 104, the liquid feeding stop control unit 105, and the drainage control unit 106, information indicating whether or not irradiation is possible.
- the output unit 102 outputs, for example, a warning indicating that the color of the coating liquid is abnormal, and information specifying the wafer W being processed, as the information indicating whether or not the irradiation is possible.
- the blocking control unit 103 executes blocking control for blocking the output of the laser light by the first laser unit 50 when it is determined by the output unit 102 that irradiation is not possible. Specifically, the cutoff control unit 103 controls the actuator of the first laser unit 50 such that the shutter 52 of the first laser unit 50 moves to a position where the optical path of the fiber 53 is shielded.
- the loading stop control unit 104 executes loading stop control to stop loading a new wafer W when it is determined by the output unit 102 that irradiation can not be performed. Specifically, the carry-in stop control unit 104 controls the actuator of the transfer arm A3 (see FIG. 3) so that a new wafer W is not carried into the coating unit U1.
- the feed stop control unit 105 stops feed of the application liquid to the portion D3d of the pipe D3 which is a flow path toward the nozzle N when it is determined by the output unit 102 that irradiation is not possible. Run. Specifically, the liquid feeding stop control unit 105 stops the feeding of the coating liquid to the portion D3 d of the pipe D3 by controlling to close the valve V, and the coating liquid from the nozzle N is stopped. Stop the discharge.
- the drainage control unit 106 executes drainage control for discarding the coating liquid flowing through the pipe D3 when it is determined by the output unit 102 that irradiation can not be performed. Specifically, the drainage control unit 106 operates the three-way valve Vt1 such that the coating liquid from the filter device F1 is discarded from the pipe D4 between the filter device F1 and the pipe D4. Further, the drainage control unit 106 operates the three-way valve Vt2 so that the coating liquid from the pump device P1 is discarded from the pipe D5 between the pump device P1 and the pipe D5. Further, the drainage control unit 106 operates the three-way valve Vt3 so that the coating liquid from the valve V is discarded from the pipe D6 between the valve V and the pipe D6.
- the controller 100 is configured by one or more control computers.
- the controller 100 has a circuit 120 shown in FIG.
- the circuit 120 includes one or more processors 121, a memory 122, a storage 123, an input / output port 124, and a timer 125.
- the input / output port 124 inputs / outputs an electrical signal between the first laser unit 50, the second laser unit 60, the transfer arm A3, the three-way valves Vt1 to Vt3, the valve V, and the like.
- the timer 125 measures an elapsed time by, for example, counting reference pulses with a constant period.
- the storage 123 has a computer-readable recording medium, such as a hard disk.
- the recording medium records a program for executing a substrate processing procedure described later.
- the recording medium may be a removable medium such as a non-volatile semiconductor memory, a magnetic disk, and an optical disk.
- the memory 122 temporarily records the program loaded from the storage medium of the storage 123 and the calculation result by the processor 121.
- the processor 121 cooperates with the memory 122 to execute the program to configure each functional module described above.
- the hardware configuration of the controller 100 is not necessarily limited to one that configures each functional module by a program.
- each functional module of the controller 100 may be configured by a dedicated logic circuit or an application specific integrated circuit (ASIC).
- ASIC application specific integrated circuit
- Substrate processing procedure Next, as an example of the substrate processing method, a substrate processing procedure including the determination of the color information of the coating liquid described above and the like will be described. As shown in FIG. 9, the controller 100 sequentially executes steps S1, S2, S3, S4, S5, S6, and S7.
- step S ⁇ b> 1 the determination unit 101 acquires color information of the coating liquid from the second laser unit 60.
- the color information of the coating liquid is information specified by the second laser unit 60 based on the degree of absorption of the light for discrimination in the coating liquid, and the coating liquid is irradiated with the light for discrimination (and the irradiation from the first laser unit 50 Information indicating whether the color is apt to absorb the laser beam).
- step S2 the determination unit 101 determines, based on the acquired color information of the coating liquid, whether the coating liquid is a coating liquid that is degraded by the laser light emitted from the first laser unit 50. That is, the determination unit 101 determines whether the color information of the coating liquid is predetermined color information that easily absorbs the wavelength of the laser beam emitted from the first laser unit 50. If it is determined in step S2 that the coating solution is a coating solution that does not deteriorate by the laser beam emitted from the first laser unit 50, it is determined that the laser beam can be emitted from the first laser unit 50, End the process.
- step S2 if it is determined in step S2 that the coating solution is a coating solution that is altered by the laser beam emitted from the first laser unit 50, the laser beam can not be emitted from the first laser unit 50. It is determined and information indicating that irradiation is not possible is output. Subsequently, steps S3 to S7 are sequentially performed.
- step S3 the cutoff control unit 103 performs cutoff control so that the output of the laser light from the first laser unit 50 is blocked (the laser is turned off). Specifically, the cutoff control unit 103 controls the actuator of the first laser unit 50 such that the shutter 52 of the first laser unit 50 moves to a position where the optical path of the fiber 53 is shielded.
- step S4 the output unit 102 outputs error information (error notification).
- the output unit 102 is suspected that the coating liquid is a different kind of chemical liquid according to the color information (the degree of absorption of the laser light) of the coating liquid, and the first laser unit 50 (main laser) Informing that the normal measurement is not possible.
- the output unit 102 notifies that the coating liquid may be deteriorated.
- step S5 the liquid transfer stop control unit 105 executes liquid transfer stop control to stop the liquid transfer function. Specifically, the liquid feeding stop control unit 105 stops the feeding of the coating liquid to the portion D3 d of the pipe D3 by controlling to close the valve V, and the coating liquid from the nozzle N is stopped. Stop the discharge.
- step S6 the drainage control unit 106 performs line switching to switch the flow path, and executes drainage control for discarding the coating liquid flowing through the pipe D3.
- the drainage control unit 106 operates the three-way valve Vt1 so that the coating liquid from the filter device F1 capable of circulating the coating liquid between the filter device F1 and the pipe D4 is discarded from the pipe D4.
- the drainage control unit 106 operates the three-way valve Vt2 so that the coating liquid from the pump device P1 is discarded from the pipe D5 between the pump device P1 and the pipe D5.
- the drainage control unit 106 operates the three-way valve Vt3 so that the coating liquid from the valve V is discarded from the pipe D6 between the valve V and the pipe D6.
- step S7 the loading stop control unit 104 executes loading stop control so that loading of a new wafer W is stopped. Specifically, the carry-in stop control unit 104 controls the actuator of the transfer arm A3 (see FIG. 3) so that a new wafer W is not carried into the coating unit U1.
- steps S3 to S7 described above may not necessarily be all performed, or may not be performed in the order described above.
- the blocking control in step S3 may not be performed.
- the liquid supply stop control in step S5 may not necessarily be performed.
- the drainage control in step S6 may not necessarily be performed.
- the coating / developing apparatus 2 irradiates a laser beam to the coating solution on the wafer W flowing through the pipe D3, and obtains the state of the coating solution based on the change of the laser beam.
- a second laser unit 60 for acquiring the color information of the coating liquid, comprising: an irradiation propriety determining mechanism for determining whether to irradiate the laser light to the coating liquid by the first laser unit 50;
- the controller 100 determines whether the color information of the coating liquid is predetermined color information that easily absorbs the wavelength of the light emitted by the first laser unit 50. Is configured to perform and outputting the determined irradiation whether the laser beam information indicating the irradiation whether the coating liquid on the basis of a constant
- the color information of the coating liquid is irradiated based on the coating liquid on the upstream side of the portion where the laser light is irradiated to the coating liquid by the first laser unit 50. It is determined whether it is predetermined color information that easily absorbs a wavelength, and based on the determination result, it is determined whether or not the application liquid can be irradiated with laser light. Depending on the combination of the color of the coating solution and the wavelength range of the laser beam to be irradiated, the coating solution may be degraded by the absorption of the light.
- the coating liquid is irradiated by determining whether the color information of the coating liquid is the predetermined color information that easily absorbs the wavelength of the laser light before irradiating the coating liquid with the laser light. It can be determined whether or not the laser beam causes deterioration. Then, whether or not the application of the laser light to the application liquid is determined based on the determination result and information indicating the availability of the irradiation is output, for example, the application liquid flowing in the flow path is the laser light from the first laser unit 50 When there is a possibility of deterioration due to the above, it is possible to take measures such as stopping the irradiation of laser light from the first laser unit 50, and it is possible to appropriately prevent the deterioration of the coating liquid.
- the second laser unit 60 has a light source 61 for irradiating the coating liquid with laser light (light for discrimination) having a wavelength close to the wavelength of the laser light emitted from the first laser unit 50 to the coating liquid, and the controller 100
- the color information of the coating liquid is likely to absorb the wavelength of the laser light emitted by the first laser unit 50 when the discrimination light emitted to the coating liquid by the light source 61 is absorbed by the coating liquid at a certain level or more. It is determined that the color information of When the discrimination light is absorbed in the coating liquid at a certain level or more, the laser light irradiated to the coating liquid from the first laser unit 50 whose wavelength is similar to that of the discrimination light is also easily absorbed by the coating liquid.
- the color information of the coating liquid is the predetermined color information that easily absorbs the wavelength of the laser beam irradiated by the first laser unit 50 when the light for discrimination is absorbed in the coating liquid at a certain level or more.
- the light source 61 of the second laser unit 60 emits a laser beam having a wavelength longer than that of the laser beam irradiated to the coating liquid from the first laser unit 50 as the determination light.
- the discrimination light By setting the discrimination light to a long wavelength laser beam, that is, a laser beam with low energy, it is possible to suppress deterioration of the coating liquid in the step of irradiating the discrimination light (determination step).
- the light source 61 of the second laser unit 60 irradiates the coating liquid with a discriminating light whose irradiation intensity is lower than that of the laser beam irradiated to the coating liquid from the first laser unit 50. Thereby, it is possible to suppress the deterioration of the coating liquid in the step of irradiating the discrimination light (determination step).
- the controller 100 determines that the application liquid can not be irradiated with the laser beam, a warning indicating that the color of the application liquid is abnormal, and information indicating that the application liquid can not be irradiated, and the wafer W being processed Output information to identify. Thereby, based on the information which shows the irradiation propriety, the process which prevents a quality change of a coating liquid can be performed appropriately.
- the controller 100 determines that the application of the laser light to the coating liquid is not possible, the shutoff control that shuts off the output of the laser light by the first laser unit 50, and the loading stop control that stops loading of the new wafer W It is configured to further execute at least one of liquid supply stop control for stopping liquid supply of the coating liquid to the flow path, and drainage control for discarding the coating liquid flowing in the flow path.
- the carrying-in stop control it is possible to prevent the coating liquid that has been altered from being applied to the wafer W.
- the liquid feeding stop control it is possible to prevent the liquid feeding of the treatment liquid that may be deteriorated by the irradiation of the laser light, and it is possible to prevent the process failure.
- the drainage control it is possible to appropriately discard the treatment liquid which may be deteriorated, and to prevent the downstream side of the flow path from being contaminated with the different kind of coating liquid.
- a colorimeter 260 may be used as the color information acquisition mechanism.
- the colorimeter 260 uniquely identifies, for example, the color of the coating liquid from the 256 colors.
- an NG color (a color that easily absorbs laser light from the first laser unit 50) is set in advance, and the application specified in the colorimeter 260 is determined.
- the irradiation of the laser light from the first laser unit 50 may be stopped.
- an imaging device may be used instead of the colorimeter 260. As described above, by acquiring the color information of the coating liquid by the colorimeter or the imaging device, it is possible to appropriately grasp the color information of the coating liquid with a simple configuration.
- the light source 61 (irradiation part) of the 2nd laser unit 60 as a color information acquisition mechanism may irradiate the coating liquid with the laser beam (light for discrimination
- the light source 61 of the second laser unit 60 may irradiate a plurality of laser beams while changing the wavelength to one place, or may be provided at a plurality of places and the laser beams different in wavelength from each other at each place It may be irradiated.
- by irradiating the coating solution with laser light of a plurality of patterns of wavelengths it is possible to more finely specify the wavelength band that the coating solution tends to absorb. By this, it is possible to make the determination as to whether or not to stop the irradiation of the laser light from the first laser unit 50, and the accuracy of the content of the notification of the error information.
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Abstract
Description
基板処理システム1は、塗布・現像装置2と露光装置3とを備える。露光装置3は、レジスト膜の露光処理を行う。具体的には、液浸露光等の方法によりレジスト膜(感光性被膜)の露光対象部分にエネルギー線を照射する。エネルギー線としては、例えばArFエキシマレーザー、KrFエキシマレーザー、g線、i線又は極端紫外線(EUV:Extreme Ultraviolet)が挙げられる。
続いて、図4を参照して、塗布ユニットU1についてさらに詳しく説明する。塗布ユニットU1は、図4に示されるように、回転保持部20と、駆動部30と、液供給システム40とを備える。
液供給システム40の詳細な構成、及び、液供給システム40を制御するコントローラ100の機能について、図5を参照して説明する。
次に、基板処理方法の一例として、上述した塗布液の色情報の判定等を含む基板処理手順を説明する。図9に示すように、コントローラ100は、ステップS1,S2,S3,S4,S5,S6,S7を順に実行する。
本実施形態に係る塗布・現像装置2は、配管D3を流れるウエハWの塗布液に対してレーザ光を照射し、該レーザ光の変化に基づき塗布液の状態を取得する第1レーザユニット50と、流路における、第1レーザユニット50から塗布液にレーザ光が照射される箇所よりも塗布液の供給源である液ボトルB側の塗布液(具体的には配管D2を流れる塗布液)に基づき、第1レーザユニット50による塗布液へのレーザ光の照射可否を決定する照射可否決定機構と、を備え、照射可否決定機構は、塗布液の色情報を取得する第2レーザユニット60と、コントローラ100と、を有し、コントローラ100は、塗布液の色情報が、第1レーザユニット50によって照射される光の波長を吸収し易い所定の色情報であるか否かを判定することと、判定結果に基づき塗布液へのレーザ光の照射可否を決定し該照射可否を示す情報を出力することと、を実行するように構成されている。
Claims (11)
- 流路を流れる基板の処理液に対して光を照射し、該光の変化に基づき前記処理液の状態を取得する光学測定機構と、
前記流路における、前記光学測定機構から前記処理液に光が照射される箇所よりも前記処理液の供給源側の前記処理液に基づき、前記光学測定機構による前記処理液への光の照射可否を決定する照射可否決定機構と、を備え、
前記照射可否決定機構は、
前記処理液の色情報を取得する色情報取得機構と、
制御部と、を有し、
前記制御部は、
前記処理液の色情報が、前記光学測定機構によって照射される光の波長を吸収し易い所定の色情報であるか否かを判定することと、
判定結果に基づき前記処理液への光の照射可否を決定し該照射可否を示す情報を出力することと、を実行するように構成されている、基板処理装置。 - 前記色情報取得機構は、測色計又は撮像装置を有する、請求項1記載の基板処理装置。
- 前記色情報取得機構は、前記光学測定機構から前記処理液に照射される光の波長と近似する波長の判別用光を前記処理液に照射する照射部を有し、
前記制御部は、前記照射部によって前記処理液に照射された前記判別用光が前記処理液において一定以上吸収された場合に、前記処理液の色情報が、前記光学測定機構によって照射される光の波長を吸収し易い所定の色情報であると判定する、請求項1記載の基板処理装置。 - 前記照射部は、前記判別用光として、前記光学測定機構から前記処理液に照射される光よりも長波長の光を照射する、請求項3記載の基板処理装置。
- 前記色情報取得機構は、前記光学測定機構から前記処理液に照射される光よりも照射強度が低い判別用光を前記処理液に照射する照射部を有する、請求項3又は4記載の基板処理装置。
- 前記照射部は、複数パターンの波長の前記判別用光を前記処理液に照射する、請求項3~5のいずれか一項記載の基板処理装置。
- 前記制御部は、前記処理液への光の照射が不可であると決定した場合において、前記照射可否を示す情報として、処理液の色が異常である旨を示す警告、及び、処理中の基板を特定する情報を出力する、請求項1~6のいずれか一項記載の基板処理装置。
- 前記制御部は、前記処理液への光の照射が不可であると決定した場合において、光学測定機構による光の出力を遮断する遮断制御、新たな基板の搬入を停止する搬入停止制御、前記流路への前記処理液の送液を停止する送液停止制御、及び、前記流路を流れる前記処理液を廃棄する排液制御の少なくともいずれか一つを更に実行するように構成されている、請求項1~7のいずれか一項記載の基板処理装置。
- 流路を流れる基板の処理液の色情報を取得することと、
前記処理液の色情報が、光学測定機構から前記処理液に対して照射される光の波長を吸収し易い所定の色情報であるか否かを判定することと、
前記所定の色情報でないと判定された場合にのみ、前記光学測定機構から前記処理液に対して光を照射し、該光の変化に基づき前記処理液の状態を取得することと、を含む基板処理方法。 - 前記処理液の色情報を取得することは、前記光学測定機構から前記処理液に照射される光の波長と近似する波長の判別用光を前記処理液に照射することによって行われ、
前記所定の色情報であるか否かを判定することは、前記判別用光が前記処理液において一定以上吸収された場合に、前記処理液の色情報が前記所定の色情報であると判定することによって行われる、請求項9記載の基板処理方法。 - 請求項9又は10に記載の方法を基板処理機構に実行させるためのプログラムを記録した、コンピュータ読み取り可能な記録媒体。
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