WO2018003429A1 - ブレードのドレッシング機構及び該機構を備えた切削装置及び該機構を用いたブレードのドレッシング方法 - Google Patents

ブレードのドレッシング機構及び該機構を備えた切削装置及び該機構を用いたブレードのドレッシング方法 Download PDF

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Publication number
WO2018003429A1
WO2018003429A1 PCT/JP2017/020987 JP2017020987W WO2018003429A1 WO 2018003429 A1 WO2018003429 A1 WO 2018003429A1 JP 2017020987 W JP2017020987 W JP 2017020987W WO 2018003429 A1 WO2018003429 A1 WO 2018003429A1
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WO
WIPO (PCT)
Prior art keywords
blade
dresser
dressing
axis
outer peripheral
Prior art date
Application number
PCT/JP2017/020987
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
大槻俊紀
渡辺勝行
片岡光宗
Original Assignee
株式会社リード
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社リード filed Critical 株式会社リード
Priority to CN201780038399.4A priority Critical patent/CN109414800B/zh
Priority to KR1020187037983A priority patent/KR102047717B1/ko
Publication of WO2018003429A1 publication Critical patent/WO2018003429A1/ja
Priority to PH12018502694A priority patent/PH12018502694B1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0683—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B24B53/14—Dressing tools equipped with rotary rollers or cutters; Holders therefor

Definitions

  • the present invention relates to a dressing mechanism for dressing a blade for cutting a work, a cutting device provided with such a dressing mechanism, and a dressing method of a blade using the dressing mechanism.
  • a cutting device provided with a blade for workpiece cutting has been used.
  • the blade has a blade portion formed by adhering abrasive grains to the outer peripheral edge including the outer peripheral surface of the base material, and the blade is placed on the work transfer table.
  • Abrasive grains exposed from the surface of the blade portion of the blade, that is, the surface of the abrasive particle layer become cutting edges by contacting the placed workpiece while rotating it at high speed around its rotation axis, and predetermined cutting is performed on the workpiece It is known that processing is applied.
  • the dress table since the dresser is mounted on the dress table, the dress table includes a dress position where the blade is dressed by the dresser, and a retracted position where the dresser is separated from the blade. There is a need to displace between Therefore, it is necessary to secure such a space for moving the dress table in the cutting device, resulting in an increase in the size of the device.
  • the technical problem of the present invention is to provide a dressing mechanism capable of realizing dressing of a blade for cutting work with space-saving, a cutting device provided with such a dressing mechanism, and a blade using the dressing mechanism. It is in providing a dressing method.
  • a dressing mechanism in a cutting device is a dressing mechanism for dressing a blade portion formed on an outer peripheral edge including an outer peripheral surface around an axis in a disk-like blade of a grinding device
  • the dressing mechanism includes a dresser for dressing the blade by bringing the blade into sliding contact with the blade, a dresser drive for driving the dresser, and a support frame on which the dresser and the dresser drive are mounted.
  • the dresser has an outer peripheral surface around its axis and is rotatably supported by the support frame about the axis, and the outer peripheral surface of the dresser is an outer peripheral surface of the blade.
  • a dressing area for sliding contact with the blade, and a non-contact state through an air gap with the outer peripheral surface of the blade is provided.
  • a concave relief area is provided along the circumferential direction, and the dressing state by the dressing area and the non-dressing state by the relief area are provided by rotating the dresser around the axis by the dresser drive unit. And can be selectively switched.
  • one circumference of the outer circumferential surface of the dresser is constituted by one dress area comprising an arc surface and one relief area, and the relief section is in the axial direction of the dresser. It is formed in the shape of a groove extending over the entire length, and the angular range of the dressing area around the axis of the dresser is larger than the angular range of the relief area.
  • the dresser drive unit includes a rotary drive unit that rotates the dresser about its axis, and a linear drive unit that displaces the dresser in the horizontal direction in a direction perpendicular to and parallel to the axis. It is configured.
  • a blade is formed on the outer peripheral edge including the outer peripheral surface around the axis, and the disk-like blade rotationally driven around the axis and relative to the axis of the blade And a table which is fed in a direction perpendicular to the table, and configured to cut the work of the table by the blade portion of the rotating blade, and the axis of the dresser and the axis of the blade are the dresser dress
  • the blade portion is disposed in parallel with each other while maintaining a predetermined distance in sliding contact with the dressing area, and the dresser drive portion rotates the dresser.
  • the dressing area and the relief area of the dresser can be selectively made to face the outer peripheral surface of the blade, and the dressing area of the dresser is Run the dressing of the blade portion when made to face the blade outer circumferential surface of, characterized by stopping the dressing of the blade section when the relief area of the dresser are opposed to the outer peripheral surface of the blade.
  • the dressing area of the dresser is made to face the outer peripheral surface of the blade to make the dresser
  • the blade portion of the blade is dressing by sequentially sliding the blade portion of the blade in the circumferential direction with respect to the dressing region while rotating the shaft around the axis, and the blade is not processed with the workpiece separated from the workpiece
  • the relief region of the dresser is made to face the outer peripheral surface of the blade in a non-contact manner, and the rotation of the dresser is stopped.
  • the dresser when the outer peripheral surface of the dresser is made to face the outer peripheral surface of the blade, the dress area for sliding contact with the blade of the blade, the outer peripheral surface of the blade and the air gap A concave relief area for bringing into non-contact state is provided along the circumferential direction, and the dressing state by the dress area is realized by rotating the dresser around the axis by the dresser drive unit. It is comprised so that it can switch selectively with the non-dressing state by a relief area
  • FIG. 1 is an enlarged side view schematically showing a state before cutting a work, showing an embodiment of a cutting device provided with a dressing mechanism according to the present invention. It is an enlarged side view which shows typically the state immediately after work cutting start in the above-mentioned cutting device. It is an enlarged side view which shows typically the state in the middle of work cutting in the above-mentioned cutting device. It is an enlarged side view which shows typically the state at the time of completion
  • the cutting apparatus 1 of the present embodiment includes a work transfer table 2 for mounting a work W such as a semiconductor wafer, and a disk-like blade 3 having a blade portion 3a as an outer peripheral blade around a first axis L1. ing. Then, by rotating the blade 3 around its axis L1, the work W on the table 2 can be cut by the blade portion 3a.
  • the cutting device 1 further includes a dressing mechanism 20 provided with a dresser 10 for dressing the blade portion 3 a of the blade 3. Then, by bringing the dresser 10 of the dressing mechanism 20 into sliding contact with the blade portion 3a of the blade 3, clogging of the blade portion 3a is eliminated, or the damaged blade portion 3a is spontaneously created. It can be done.
  • the dicing apparatus etc. which cut workpiece
  • the work transfer table 2 forms a plate-like body that can be linearly reciprocated by a drive unit (not shown) in the X-axis direction (horizontal direction in the drawing) in the horizontal direction.
  • a drive unit not shown
  • the work W is placed on the work mounting surface 2 a provided on the upper surface of the table 2 and fixed by an appropriate method.
  • the method of fixing the work W to the work mounting surface 2a may be, for example, vacuum suction, or may be fixed using a fixing jig, or may be fixed by bonding using an adhesive or the like. It is also good.
  • the blade 3 has the blade portion 3a formed on the outer peripheral edge including the outer peripheral surface of a thin disk-like substrate 3b made of metal such as stainless steel or aluminum. More specifically, the blade portion 3a is, for example, a diamond on the outer periphery of the substrate 3b, which comprises the outer peripheral surface around the axis L1 and the outer peripheral portions of both side surfaces orthogonal to the axis L1 across the outer peripheral surface. It is formed by fixing abrasive grains (preferably, fine superabrasive grains) made of cBN (cubic boron nitride) or the like with a suitable bonding material such as resin bond or metal bond such as plated metal.
  • abrasive grains preferably, fine superabrasive grains
  • cBN cubic boron nitride
  • an attachment hole 3c penetrating in the thickness direction of the substrate is provided at the central portion of the substrate 3b, and a tip of a spindle (not shown) is detachably attached to the attachment hole 3c. It is attached.
  • the blade 3 is configured to rotate at a predetermined rotation speed in a predetermined rotation direction around the axis L1 (around the spindle axis) by rotating the spindle by a drive unit such as a motor (not shown). There is.
  • the dressing mechanism 20 in the present embodiment will be specifically described.
  • the dressing mechanism 20 has the dresser 10 for dressing the blade portion by sliding contact with the blade portion 3 a of the blade 3 and a dresser drive portion for driving the dresser 10. 30, 40, 50, and support frames 21, 22, 23, 24 on which the dresser 10 and the dresser driving unit 30, 40, 50 are mounted.
  • the dresser drive unit rotates the dresser 10 about a second axis L2 parallel to the first axis L1 of the blade 2, and the dresser 10 in the X direction (axis L2 in the horizontal direction).
  • the first linear driving unit 30 and the second linear driving unit 40 are reciprocally displaced in the Y-axis direction (parallel to the axis L2) which forms the right angle and the right angle).
  • the support frame includes a first frame 21 on which the first linear drive unit 30 is mounted and which is disposed above the work transfer table 2 and extends in the horizontal direction, and the second linear drive unit 40
  • An X-axis slide table 22 which is mounted and is connected to the first linear drive unit 30 and displaced in the X-axis direction with respect to the first frame 21 and is connected to the second linear drive unit 40 and is X-axis
  • a Y-axis slide table 23 which is displaced in the Y-axis direction with respect to the slide table 22, and a pair of second ends of which the base end (upper end) is fixed to the Y-axis slide table 23 and which extends downward along the Z axis And frames 24 and 24.
  • both ends in the direction of the axis L 2 of the dresser 10 are rotatably and detachably supported.
  • the rotation drive unit 50 for rotating the dresser 10 is provided across the Y-axis slide table 23 and the second frame 24 as described later.
  • the first frame 21 is integrally formed from a pair of opposing plates 21a and 21a extending in the X-axis direction and parallel to each other, and a connecting plate 21b extending in the Y-axis direction and connecting the opposing plates 21a and 21a. Is formed.
  • the first linear drive unit 30 is mounted on one of the opposing plates 21a and 21a.
  • the first linear drive unit 30 includes an X-axis guide base 31 extended in the X-axis direction on one opposing plate 21 a of the first frame 21, and the X-axis guide base 31. And a motor 32 for X-axis feeding disposed at one end in the longitudinal direction. Then, one end side of the X-axis slide table 22 in the longitudinal direction (Y-axis direction) is supported on the X-axis guide base 31 so as to be capable of reciprocating in the X-axis direction.
  • the first linear drive unit 30 can be configured, for example, by a ball screw mechanism or the like by the motor 32 and a ball screw (not shown) provided inside the X-axis guide base 31.
  • the mover (not shown) connected to the X-axis slide table 22 is screwed to the internal ball screw through the long groove 31 a opened on the X-axis guide base 31 to rotate the motor 32.
  • the X-axis slide table 22 can be reciprocated in the X-axis direction and displaced by a driving force.
  • a guide rail 33 extends in the X-axis direction on the other frame 21a of the pair of opposing plates 21a, 21a, and the other end of the X-axis slide table 22 in the longitudinal direction is the guide It is slidably guided by the rails 22.
  • the second linear driving unit 40 has a Y-axis guide base 41 extended in the Y-axis direction on the X-axis slide table 22 and a Y arranged at one end of the Y-axis guide base 41 in the longitudinal direction. And a motor 42 for axis feeding.
  • the Y-axis slide table 23 is supported on the Y-axis guide base 41 so as to be capable of reciprocating in the Y-axis direction.
  • the second linear drive unit 40 can also be configured by a ball screw mechanism.
  • the mover (not shown) connected to the Y-axis slide table 23 is screwed into the internal ball screw through the long groove 41a opened on the Y-axis guide base 41.
  • the Y-axis slide table 23 can be reciprocated and displaced in the Y-axis direction by the rotational drive force of the motor 42.
  • the rotational drive unit 50 includes a motor 51 disposed on the Y-axis slide table 23 and the second frames 24 and 24 for hanging the rotational drive force of the motor 51 from the Y-axis slide table 23. It has a power transmission mechanism for transmitting to the dresser 10 rotatably supported.
  • the power transmission mechanism includes an upper pulley 52 attached to the motor shaft of the motor 51, a lower pulley 53 attached to the support shaft of the dresser 10, and an annular ring wound around the pair of pulleys. It is composed of a belt 54.
  • the rotational driving force is transmitted from the upper pulley 52 to the lower pulley 53 through the belt 54 by controlling the rotation of the motor 51, and the dresser 10 is rotated about its axis L2 at an arbitrary speed in an arbitrary rotation direction. It can be turned or stopped at any angular position.
  • the dresser 10 is moved in the X-axis direction (direction perpendicular to the axis L2) and the Y-axis direction in the horizontal direction by the first linear drive unit 30 and the second linear drive unit 40. It is linearly moved in two axial directions (parallel to the axis L2) to be displaced to an arbitrary position, and can be controlled to rotate around the axis L2 by the rotational drive unit 50 at that position. .
  • the dresser 10 is a rotary dresser having an outer peripheral surface 11 around an axis L2, and the axis L2 extending in the Y axis direction of the dresser 10 and the axis L1 of the blade 3 are The plurality of dressers 10 and the blades 3 are arranged side by side in the X-axis direction.
  • the dresser 10 is integrally formed of a dressing material formed by bonding a large number of abrasive grains with a bonding material, and the outer peripheral surface of the blade 3 is opposed to the outer peripheral surface 11 to slide the blade portion 3a.
  • the blade portion 3a can be dressed by contacting the blade portion 3a.
  • the abrasive grains for example, white alundum, green carborundum and the like can be used, and as the bonding material, for example, an appropriate bonding material such as resin bond, vitrified bond, metal bond and the like can be used.
  • the dresser 10 does not necessarily have to be integrally formed of a dress material as in the present embodiment, and even if a dress material layer of a certain depth is formed in a dress area 12 described later. Good.
  • the outer peripheral surface 11 of the dresser 10 has a dressing area 12 for dressing the blade portion 3 a by bringing it into sliding contact with the blade portion 3 a of the blade 3 when facing the outer peripheral surface of the blade 3.
  • a concave relief area 13 for bringing the outer peripheral surface of the blade 3 into a non-contact state via an air gap is formed along the circumferential direction.
  • the dress area 12 and the relief area 13 are continuous in the circumferential direction of the outer peripheral surface 11, and one circumference around the axis L2 of the outer peripheral surface is one dress area 12 made of a circular arc surface and the direction of the axis L2. It consists of one relief area consisting of a groove extending over the entire length.
  • the angular range of the dress area 12 around the axis L 2 is formed larger than the angular range of the relief area 13. That is, the angular range of the dressing area 12 is obtuse, and the angular range of the relief area 13 is acute.
  • the groove bottom 13 a is formed in an arc surface concentric with the arc surface of the dress portion 12 around the rotation axis L 2, and the pair of side walls 13 b are along the radial direction of the dresser 10. It is radially formed.
  • the blade 3a When the dressing area 12 of the dresser 10 is opposed to the outer peripheral surface of the blade 3, the blade 3a is in sliding contact with the dressing area 12 and the axis L2 of the dresser 10 and the axis L1 of the blade 3 When the region 13 is also made to face in the same manner, the blade portions 3a are arranged in parallel with each other with a predetermined distance such that the blade portions 3a are not in contact with the outer peripheral surface of the blade 3 via an air gap. Furthermore, the rotational speed of the dresser 10 at the time of dressing is determined so that the blade portion 3a of the blade 3 is always in sliding contact with the dressing area during cutting in consideration of the feed speed of the table 2 and the like. It is set sufficiently smaller than the rotational speed.
  • the blade portion 3a of the blade 3 is cut into the dressing material of the dressing region 12 and dressing of the blade portion 3a is performed. ( Figures 2 and 3).
  • the blade portion 3a of the blade is the outer peripheral surface of the dresser 10 in the relief area 13 (that is, the groove bottom 13a and the pair of side walls 13b).
  • Non-contact state is established via the gap, and dressing of the blade 3a is stopped (avoided) (FIGS. 1 and 4).
  • the angular range of the relief area 13 in the dresser 10 ie, the circumferential length of the groove bottom 13a and the groove depth, ie, the radial length of the side wall 13b, are the distance between the dresser 10 and the blade 3 between the axes L1 and L2, Alternatively, it may be appropriately set according to the diameter of the dresser 10 and the blade 3 or the like. Further, in the present embodiment, since the diameter of the dressing area 12 in the dresser 10 is smaller than the diameter of the blade 3, the axis L2 of the dresser 10 is arranged parallel to the axis L1 of the blade 3 in the horizontal direction. Even when the work W is cut, the blade 3 does not contact the work W with the work W passing the dresser 10 immediately below.
  • the dressing state of the blade 3 by the dressing area 12 and the non-rolling of the blade 3 by the relief area 13 It is possible to selectively switch between the dressing state. Therefore, dressing of the blade 3 can be realized in a space-saving manner, and an increase in size of the cutting device 1 can be suppressed.
  • a plate-like workpiece W is mounted on the workpiece mounting surface 2a of the workpiece conveyance table 2, and the number of rotations of the blade 3 and its rotational direction, the feed speed and feed amount of the workpiece conveyance table 2 in the X axis direction Set
  • the first and second linear drive units 30 and 40 adjust the amount of cutting of the blade 3 with respect to the dresser 10, the cutting position of the dresser 10 in the rotational axis L2 direction, and the like.
  • Position adjustment in the X-axis and Y-axis directions is performed.
  • the blade 3 mounted at the tip of the spindle is rotated at high speed around its axis L1.
  • the work transfer table 2 is moved toward the blade 3 along the X-axis direction at a predetermined feed rate.
  • the work transfer table 2 is further fed, and as shown in FIG. 2, when the cutting process of the work W by the blade portion 3a is started, the motor 51 of the rotational drive unit 50 is driven correspondingly. Ru.
  • the dresser 10 is rotated in the direction opposite to that of the blade 3 so that the dressing area 12 is directed horizontally to face the outer peripheral surface of the blade.
  • the rotational speed of the dresser 10 is determined such that the blade portion 3a is always in sliding contact with the dress area 12 during dressing of the workpiece W, and dressing is performed, and the necessary slide contact of the blade part 3a to the dress area 12 is performed. It is set in consideration of various parameters such as the rotational speed of the blade 3, the material of the work W, the circumferential length of the dress area 12, the cutting time, etc., so that the dressing can be performed reliably by securing the speed. .
  • the dress region 12 is sequentially brought into sliding contact with the blade portion 3a of the rotating blade 3 in the circumferential direction, as a result, The blade portion 3a is dressed while cutting the work W.
  • a cut groove having a predetermined depth is formed along the circumferential direction, whereby the entire blade portion 3a formed on the outer peripheral edge of the blade 3 is dressed.
  • the work transfer table 2 further moves in the table feed direction, and as shown in FIG. 4, when the blade portion 3a of the blade 3 is separated from the rear end (right end in the figure) of the work W in the table feed direction
  • the processing of one cutting line for W is completed.
  • the dresser 10 again turns the relief area 13 toward the blade 3 side in the horizontal direction by rotation, and stops the rotation in a state where the relief area 13 faces the outer peripheral surface of the blade 3. Stop dressing too.
  • dressing of the blade portion 3 a is performed while cutting the work W by the blade portion 3 a of the dresser 3, so that more efficient cutting can be performed. It becomes.
  • the dressing area 12 of the dresser 10 is formed on the outer peripheral surface 11 formed of a circular arc surface, and the dresser 10 is simply rotated about the axis L2 so that Since the dressing state in which the area 12 is opposed and the non-dressing state in which the relief area 13 is opposed can be selectively switched, the dressing mechanism can be miniaturized, and the dressing of the blade 3 can be space-saving. As a result, it is possible to suppress an increase in size of the cutting device 1.
  • dressing of the blade 3 using the dresser 10 is not limited during cutting of the work W, but when dressing is necessary prior to cutting such as when the blade 3 is replaced with a new one, You may carry out at the timing of FIG.
  • the dressing of the blade 3a of the blade 3 is mainly performed by the dresser 10.
  • the dresser 10 is provided with a truing property such that the outer shape of the blade 3a of the blade 3 is corrected. It can also be done.
  • the axis L2 of the dresser 10 and the axis L1 of the blade 3 are arranged substantially horizontally, but the present invention is not limited to this.
  • the axes L1 and L2 may be arranged vertically in the vertical direction (Z-axis direction).
  • the dresser 10 is disposed rearward of the blade 3 in the table feed direction, but may be disposed forward of the blade 3.
  • dressing of the blade portion 3 a of the blade 3 is performed while rotating the dresser 10 in the direction opposite to the rotation direction of the blade 3.
  • the dressing may be performed by rotating the blade 3 in the same direction as the rotation direction of the blade 3.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Dicing (AREA)
PCT/JP2017/020987 2016-06-28 2017-06-06 ブレードのドレッシング機構及び該機構を備えた切削装置及び該機構を用いたブレードのドレッシング方法 WO2018003429A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201780038399.4A CN109414800B (zh) 2016-06-28 2017-06-06 切削装置
KR1020187037983A KR102047717B1 (ko) 2016-06-28 2017-06-06 블레이드의 드레싱 기구 및 그 기구를 구비한 절삭 장치 및 그 기구를 사용한 블레이드의 드레싱 방법
PH12018502694A PH12018502694B1 (en) 2016-06-28 2018-12-19 Blade dressing mechanism, cutting device comprising same mechanism, and blade dressing method using same mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016127240A JP6270921B2 (ja) 2016-06-28 2016-06-28 ブレードのドレッシング機構を備えた切削装置
JP2016-127240 2016-06-28

Publications (1)

Publication Number Publication Date
WO2018003429A1 true WO2018003429A1 (ja) 2018-01-04

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JP (1) JP6270921B2 (zh)
KR (1) KR102047717B1 (zh)
CN (1) CN109414800B (zh)
MY (1) MY176705A (zh)
PH (1) PH12018502694B1 (zh)
TW (1) TWI633973B (zh)
WO (1) WO2018003429A1 (zh)

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JP7154690B2 (ja) * 2018-06-22 2022-10-18 株式会社ディスコ 研削砥石の目立て方法
CN113829240A (zh) * 2021-10-09 2021-12-24 瑞声精密制造科技(常州)有限公司 一种磨床以及砂轮修整方法

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JPS628065U (zh) * 1985-06-27 1987-01-19
JPH01143349U (zh) * 1988-03-23 1989-10-02
JPH0569323A (ja) * 1991-09-06 1993-03-23 Sumitomo Metal Ind Ltd 加工用砥石の形状修正方法及び装置
JP2001113462A (ja) * 1999-10-15 2001-04-24 Hitachi Seiki Co Ltd 研削盤

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JP2016215369A (ja) 2016-12-22
JP6270921B2 (ja) 2018-01-31
TWI633973B (zh) 2018-09-01
KR20190022572A (ko) 2019-03-06
MY176705A (en) 2020-08-19
KR102047717B1 (ko) 2019-11-22
CN109414800A (zh) 2019-03-01

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