WO2016176974A1 - 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法 - Google Patents
复合靶气相沉淀制备晶界扩散稀土永磁材料的方法 Download PDFInfo
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Abstract
Description
Claims (10)
- 一种复合靶气相沉淀制备晶界扩散稀土永磁材料的方法,其特征在于,包括如下操作步骤:步骤一,复合靶材的制备,所述复合靶材具有如下化学式H100-x-yMxQy,其中,H为Dy或/和Tb,M为Nd或/和Pr,Q为Cu、Al、Zn和Sn中的一种或多种,x、y为所述复合靶材中各成分的原子百分含量,x=0-20、y=0-40且x和y不同时为零;步骤二,将烧结NdFeB磁体加工成规定形状和尺寸,随后进行表面清理及干燥,从而得到待处理NdFeB磁体;步骤三,将所述复合靶材和所述待处理NdFeB磁体依次交替叠置于处理设备中,且最上层和最底层均为所述复合靶材,以所述复合靶材作为蒸发源,在规定条件下使所述待处理NdFeB磁体表面包覆金属膜并发生晶界扩散,之后随炉冷却,从而得到扩散后的NdFeB磁体;步骤四,将所述扩散后的NdFeB磁体进行回火处理,使晶界相均匀包裹在主相粒子外,从而得到性能提高的磁体。
- 根据权利要求1所述的方法,其特征在于,在所述步骤一中,所述复合靶材H100-x-yMxQy中x=0-5、y=1-10。
- 根据权利要求2所述的方法,其特征在于,所述复合靶材为Tb95Cu5、Tb98Al2或Tb95.9Dy0.4Nd0.7Zn2Sn1。
- 根据权利要求1所述的方法,其特征在于,在所述步骤一中,所述复合靶材是通过如下方法制备的:按照所述复合靶材各成分的原子百分含量称取相应原料,依次经冶炼、浇铸、锻造、热轧、冷轧以及机械加工,形成规定尺寸的复合靶材;优选地,所述冶炼采用真空中频感应炉冶炼,真空度不高于10-2Pa。
- 根据权利要求4所述的方法,其特征在于,所述复合靶材的规定尺寸为:厚度为0.5-3mm、长度为180-300mm和宽度为100-240mm。
- 根据权利要求1所述的方法,其特征在于,在所述步骤二中,所述表面清理的过程如下:首先将所述NdFeB磁体放入除油槽中浸泡10-15min以去除磁体表面的油污,然后依次经第一次水洗、酸洗、第二次水洗及超声波处理,最后风干所述NdFeB磁体表面;优选地,所述酸洗的时间为20-45s,所述超声波处理的时间为20-45s。
- 根据权利要求1所述的方法,其特征在于,所述待处理NdFeB磁体的取向方向控制在1-8mm厚度。
- 根据权利要求1所述的方法,其特征在于,在所述步骤三中,一块所述待处理NdFeB磁体夹置于两块所述复合靶材之间,且所述复合靶材的表面积大于所述待处理NdFeB磁体的表面积。
- 根据权利要求1所述的方法,其特征在于,在所述步骤三中,所述规定条件如下:真空度不大于10-3Pa,保温温度为650-900℃,保温时间为5-50h;所述随炉冷却至不高于50℃;优选地,在所述步骤三中,所述保温温度为700-850℃,保温时间为5-35h。
- 根据权利要求1所述的方法,其特征在于,在所述步骤四中,所述回火处理条件为:回火温度为420-640℃,回火时间为2-10h,之后采用自然冷却的方式冷却至室温。
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EP15884914.1A EP3121823B1 (en) | 2015-05-07 | 2015-11-06 | Method for preparing grain boundary diffused rare earth permanent magnetic material by vapor deposition using composite target |
ES15884914T ES2699949T3 (es) | 2015-05-07 | 2015-11-06 | Procedimiento para preparar un material magnético permanente de tierras raras con una difusión intercristalina utilizando una diana compuesta mediante deposición en fase vapor |
SI201530499T SI3121823T1 (sl) | 2015-05-07 | 2015-11-06 | Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče |
US15/300,683 US10385442B2 (en) | 2015-05-07 | 2015-11-06 | Method for preparing rare-earth permanent magnetic material with grain boundary diffusion using composite target by vapor deposition |
KR1020167032336A KR101913137B1 (ko) | 2015-05-07 | 2015-11-06 | 혼합 타겟 기상 증착에 의해 입계 확산의 희토류 영구 자석 재료를 제조하는 방법 |
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US20170037504A1 (en) | 2017-02-09 |
SI3121823T1 (sl) | 2019-01-31 |
KR20160148607A (ko) | 2016-12-26 |
EP3121823B1 (en) | 2018-09-05 |
US10385442B2 (en) | 2019-08-20 |
CN104900359A (zh) | 2015-09-09 |
EP3121823A1 (en) | 2017-01-25 |
CN104900359B (zh) | 2017-09-12 |
KR101913137B1 (ko) | 2018-10-30 |
EP3121823A4 (en) | 2018-01-17 |
ES2699949T3 (es) | 2019-02-13 |
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