SI3121823T1 - Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče - Google Patents
Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarčeInfo
- Publication number
- SI3121823T1 SI3121823T1 SI201530499T SI201530499T SI3121823T1 SI 3121823 T1 SI3121823 T1 SI 3121823T1 SI 201530499 T SI201530499 T SI 201530499T SI 201530499 T SI201530499 T SI 201530499T SI 3121823 T1 SI3121823 T1 SI 3121823T1
- Authority
- SI
- Slovenia
- Prior art keywords
- vapor deposition
- rare earth
- magnetic material
- grain boundary
- permanent magnetic
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5806—Thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15325—Amorphous metallic alloys, e.g. glassy metals containing rare earths
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/0266—Moulding; Pressing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
- H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Electromagnetism (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Hard Magnetic Materials (AREA)
- Powder Metallurgy (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510230782.2A CN104900359B (zh) | 2015-05-07 | 2015-05-07 | 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法 |
PCT/CN2015/093951 WO2016176974A1 (zh) | 2015-05-07 | 2015-11-06 | 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法 |
EP15884914.1A EP3121823B1 (en) | 2015-05-07 | 2015-11-06 | Method for preparing grain boundary diffused rare earth permanent magnetic material by vapor deposition using composite target |
Publications (1)
Publication Number | Publication Date |
---|---|
SI3121823T1 true SI3121823T1 (sl) | 2019-01-31 |
Family
ID=54032973
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SI201530499T SI3121823T1 (sl) | 2015-05-07 | 2015-11-06 | Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče |
Country Status (7)
Country | Link |
---|---|
US (1) | US10385442B2 (sl) |
EP (1) | EP3121823B1 (sl) |
KR (1) | KR101913137B1 (sl) |
CN (1) | CN104900359B (sl) |
ES (1) | ES2699949T3 (sl) |
SI (1) | SI3121823T1 (sl) |
WO (1) | WO2016176974A1 (sl) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104900359B (zh) * | 2015-05-07 | 2017-09-12 | 安泰科技股份有限公司 | 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法 |
CN105513734B (zh) * | 2015-12-18 | 2018-04-20 | 江西金力永磁科技股份有限公司 | 钕铁硼磁体用轻重稀土混合物、钕铁硼磁体及其制备方法 |
EP3182423B1 (en) | 2015-12-18 | 2019-03-20 | JL Mag Rare-Earth Co., Ltd. | Neodymium iron boron magnet and preparation method thereof |
CN105845425A (zh) * | 2016-01-08 | 2016-08-10 | 宁波宏垒磁业有限公司 | 一种钕铁硼磁体的制备方法 |
CN105938757B (zh) * | 2016-04-20 | 2017-09-15 | 北京科技大学 | 一种提高高丰度稀土永磁材料磁性能的制备方法 |
JP6733398B2 (ja) * | 2016-07-27 | 2020-07-29 | 日立金属株式会社 | R−t−b系焼結磁石の製造方法 |
CN106887323A (zh) * | 2017-03-07 | 2017-06-23 | 北京科技大学 | 一种晶界扩散制备高矫顽力钕铁硼磁体的方法 |
CN107146670A (zh) * | 2017-04-19 | 2017-09-08 | 安泰科技股份有限公司 | 一种稀土永磁材料的制备方法 |
JP7251053B2 (ja) * | 2017-06-27 | 2023-04-04 | 大同特殊鋼株式会社 | RFeB系磁石及びRFeB系磁石の製造方法 |
CN108183021B (zh) * | 2017-12-12 | 2020-03-27 | 安泰科技股份有限公司 | 稀土永磁材料及其制备方法 |
CN108251802A (zh) * | 2018-02-01 | 2018-07-06 | 包头稀土研究院 | 稀土金属PrNd旋转靶材的制造方法 |
CN108315703A (zh) * | 2018-02-05 | 2018-07-24 | 宁波松科磁材有限公司 | 一种镀膜系统及镀膜方法及稀土磁体的制备方法 |
CN109360728B (zh) * | 2018-07-18 | 2020-12-01 | 浙江中科磁业有限公司 | 一种蒸发晶界扩散增强钕铁硼磁体矫顽力的方法 |
CN110111961B (zh) * | 2019-03-12 | 2024-03-12 | 宁波雄海稀土速凝技术有限公司 | 一种高矫顽力的钕铁硼磁体制备方法及其钕铁硼磁体 |
CN111180191A (zh) * | 2020-01-15 | 2020-05-19 | 太原科技大学 | 一种制备高性能烧结钕铁硼磁体的方法 |
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US5840375A (en) * | 1995-06-22 | 1998-11-24 | Shin-Etsu Chemical Co., Ltd. | Method for the preparation of a highly corrosion resistant rare earth based permanent magnet |
GB9803970D0 (en) * | 1998-02-26 | 1998-04-22 | Univ Birmingham | Method of applying a corrosion-resistant coating |
US6444052B1 (en) * | 1999-10-13 | 2002-09-03 | Aichi Steel Corporation | Production method of anisotropic rare earth magnet powder |
CN1386145A (zh) * | 2000-07-17 | 2002-12-18 | 日立金属株式会社 | 被覆的r-t-b系磁铁及其制造方法 |
JP4227326B2 (ja) * | 2001-11-28 | 2009-02-18 | Dowaホールディングス株式会社 | 焼結希土類磁石合金からなるリング状薄板の製法 |
JP2004304968A (ja) * | 2003-03-31 | 2004-10-28 | Tdk Corp | ボイスコイルモータ用永久磁石部材及びボイスコイルモータ |
JP2006158012A (ja) * | 2004-11-25 | 2006-06-15 | Honda Motor Co Ltd | 自動車用ipm型モータに使用される永久磁石の製造方法 |
CN101660126B (zh) * | 2005-03-18 | 2012-10-10 | 株式会社爱发科 | 成膜方法和成膜装置以及永磁铁和永磁铁的制造方法 |
US20090020193A1 (en) * | 2005-04-15 | 2009-01-22 | Hitachi Metals, Ltd. | Rare earth sintered magnet and process for producing the same |
US20070016131A1 (en) * | 2005-07-12 | 2007-01-18 | Munger Gareth T | Flexible magnets for navigable medical devices |
MY147828A (en) * | 2006-03-03 | 2013-01-31 | Hitachi Metals Ltd | R-fe-b rare earth sintered magnet and method for producing same |
CN101651038B (zh) * | 2006-03-03 | 2012-06-06 | 日立金属株式会社 | 扩散处理装置 |
KR101456841B1 (ko) | 2006-09-14 | 2014-11-03 | 가부시키가이샤 알박 | 영구자석 및 영구자석의 제조방법 |
RU2423204C2 (ru) * | 2006-09-15 | 2011-07-10 | Интерметалликс Ко., Лтд. | СПОСОБ ИЗГОТОВЛЕНИЯ СПЕЧЕННОГО МАГНИТА NdFeB |
JP4840606B2 (ja) | 2006-11-17 | 2011-12-21 | 信越化学工業株式会社 | 希土類永久磁石の製造方法 |
EP1975269A1 (fr) * | 2007-03-30 | 2008-10-01 | Imphy Alloys | Alliage austenitique fer-nickel-chrome-cuivre |
US8187392B2 (en) * | 2007-07-02 | 2012-05-29 | Hitachi Metals, Ltd. | R-Fe-B type rare earth sintered magnet and process for production of the same |
US20100239878A1 (en) | 2007-10-31 | 2010-09-23 | Hiroshi Nagata | Method of manufacturing permanent magnet and permanent magnet |
JP5401328B2 (ja) * | 2008-02-20 | 2014-01-29 | 株式会社アルバック | スクラップ磁石の再生方法 |
JP2009200179A (ja) * | 2008-02-20 | 2009-09-03 | Ulvac Japan Ltd | 焼結体の製造方法 |
CN102473515B (zh) * | 2009-07-15 | 2016-06-15 | 日立金属株式会社 | R-t-b类烧结磁体的制造方法和r-t-b类烧结磁体 |
WO2011057552A1 (en) * | 2009-11-11 | 2011-05-19 | Byd Company Limited | Zirconium-based amorphous alloy, preparing method and recycling method thereof |
JP5088596B2 (ja) * | 2010-09-30 | 2012-12-05 | 日立金属株式会社 | R−t−b系焼結磁石の製造方法 |
CN104040655B (zh) * | 2012-03-30 | 2016-10-12 | 日立金属株式会社 | R-t-b系烧结磁体的制造方法 |
CN103050268B (zh) * | 2012-12-31 | 2016-01-20 | 厦门钨业股份有限公司 | 基于细粉蒸着热处理的烧结Nd-Fe-B系磁铁制作方法 |
CN103205543B (zh) * | 2013-05-05 | 2014-12-03 | 沈阳中北真空磁电科技有限公司 | 一种钕铁硼稀土永磁器件的真空热处理方法和设备 |
CN103366943B (zh) | 2013-07-17 | 2016-01-27 | 宁波韵升股份有限公司 | 一种提高烧结钕铁硼薄片磁体性能的方法 |
CN103824693B (zh) | 2014-03-22 | 2016-08-17 | 沈阳中北通磁科技股份有限公司 | 一种带有复合镀膜的钕铁硼稀土永磁器件的制造方法 |
CN104900359B (zh) | 2015-05-07 | 2017-09-12 | 安泰科技股份有限公司 | 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法 |
-
2015
- 2015-05-07 CN CN201510230782.2A patent/CN104900359B/zh active Active
- 2015-11-06 SI SI201530499T patent/SI3121823T1/sl unknown
- 2015-11-06 EP EP15884914.1A patent/EP3121823B1/en active Active
- 2015-11-06 WO PCT/CN2015/093951 patent/WO2016176974A1/zh active Application Filing
- 2015-11-06 KR KR1020167032336A patent/KR101913137B1/ko active IP Right Grant
- 2015-11-06 US US15/300,683 patent/US10385442B2/en active Active
- 2015-11-06 ES ES15884914T patent/ES2699949T3/es active Active
Also Published As
Publication number | Publication date |
---|---|
EP3121823A4 (en) | 2018-01-17 |
KR101913137B1 (ko) | 2018-10-30 |
CN104900359A (zh) | 2015-09-09 |
ES2699949T3 (es) | 2019-02-13 |
CN104900359B (zh) | 2017-09-12 |
WO2016176974A1 (zh) | 2016-11-10 |
KR20160148607A (ko) | 2016-12-26 |
US20170037504A1 (en) | 2017-02-09 |
EP3121823B1 (en) | 2018-09-05 |
US10385442B2 (en) | 2019-08-20 |
EP3121823A1 (en) | 2017-01-25 |
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