SI3121823T1 - Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče - Google Patents

Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče

Info

Publication number
SI3121823T1
SI3121823T1 SI201530499T SI201530499T SI3121823T1 SI 3121823 T1 SI3121823 T1 SI 3121823T1 SI 201530499 T SI201530499 T SI 201530499T SI 201530499 T SI201530499 T SI 201530499T SI 3121823 T1 SI3121823 T1 SI 3121823T1
Authority
SI
Slovenia
Prior art keywords
vapor deposition
rare earth
magnetic material
grain boundary
permanent magnetic
Prior art date
Application number
SI201530499T
Other languages
English (en)
Inventor
Lei Zhou
Tao Liu
De Lin
Xiaojun Yu
Original Assignee
Advanced Technology & Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology & Materials Co., Ltd. filed Critical Advanced Technology & Materials Co., Ltd.
Publication of SI3121823T1 publication Critical patent/SI3121823T1/sl

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/153Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15325Amorphous metallic alloys, e.g. glassy metals containing rare earths
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0266Moulding; Pressing
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Hard Magnetic Materials (AREA)
  • Powder Metallurgy (AREA)
SI201530499T 2015-05-07 2015-11-06 Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče SI3121823T1 (sl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201510230782.2A CN104900359B (zh) 2015-05-07 2015-05-07 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法
PCT/CN2015/093951 WO2016176974A1 (zh) 2015-05-07 2015-11-06 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法
EP15884914.1A EP3121823B1 (en) 2015-05-07 2015-11-06 Method for preparing grain boundary diffused rare earth permanent magnetic material by vapor deposition using composite target

Publications (1)

Publication Number Publication Date
SI3121823T1 true SI3121823T1 (sl) 2019-01-31

Family

ID=54032973

Family Applications (1)

Application Number Title Priority Date Filing Date
SI201530499T SI3121823T1 (sl) 2015-05-07 2015-11-06 Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče

Country Status (7)

Country Link
US (1) US10385442B2 (sl)
EP (1) EP3121823B1 (sl)
KR (1) KR101913137B1 (sl)
CN (1) CN104900359B (sl)
ES (1) ES2699949T3 (sl)
SI (1) SI3121823T1 (sl)
WO (1) WO2016176974A1 (sl)

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CN105513734B (zh) * 2015-12-18 2018-04-20 江西金力永磁科技股份有限公司 钕铁硼磁体用轻重稀土混合物、钕铁硼磁体及其制备方法
EP3182423B1 (en) 2015-12-18 2019-03-20 JL Mag Rare-Earth Co., Ltd. Neodymium iron boron magnet and preparation method thereof
CN105845425A (zh) * 2016-01-08 2016-08-10 宁波宏垒磁业有限公司 一种钕铁硼磁体的制备方法
CN105938757B (zh) * 2016-04-20 2017-09-15 北京科技大学 一种提高高丰度稀土永磁材料磁性能的制备方法
JP6733398B2 (ja) * 2016-07-27 2020-07-29 日立金属株式会社 R−t−b系焼結磁石の製造方法
CN106887323A (zh) * 2017-03-07 2017-06-23 北京科技大学 一种晶界扩散制备高矫顽力钕铁硼磁体的方法
CN107146670A (zh) * 2017-04-19 2017-09-08 安泰科技股份有限公司 一种稀土永磁材料的制备方法
JP7251053B2 (ja) * 2017-06-27 2023-04-04 大同特殊鋼株式会社 RFeB系磁石及びRFeB系磁石の製造方法
CN108183021B (zh) * 2017-12-12 2020-03-27 安泰科技股份有限公司 稀土永磁材料及其制备方法
CN108251802A (zh) * 2018-02-01 2018-07-06 包头稀土研究院 稀土金属PrNd旋转靶材的制造方法
CN108315703A (zh) * 2018-02-05 2018-07-24 宁波松科磁材有限公司 一种镀膜系统及镀膜方法及稀土磁体的制备方法
CN109360728B (zh) * 2018-07-18 2020-12-01 浙江中科磁业有限公司 一种蒸发晶界扩散增强钕铁硼磁体矫顽力的方法
CN110111961B (zh) * 2019-03-12 2024-03-12 宁波雄海稀土速凝技术有限公司 一种高矫顽力的钕铁硼磁体制备方法及其钕铁硼磁体
CN111180191A (zh) * 2020-01-15 2020-05-19 太原科技大学 一种制备高性能烧结钕铁硼磁体的方法

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CN104900359B (zh) 2015-05-07 2017-09-12 安泰科技股份有限公司 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法

Also Published As

Publication number Publication date
EP3121823A4 (en) 2018-01-17
KR101913137B1 (ko) 2018-10-30
CN104900359A (zh) 2015-09-09
ES2699949T3 (es) 2019-02-13
CN104900359B (zh) 2017-09-12
WO2016176974A1 (zh) 2016-11-10
KR20160148607A (ko) 2016-12-26
US20170037504A1 (en) 2017-02-09
EP3121823B1 (en) 2018-09-05
US10385442B2 (en) 2019-08-20
EP3121823A1 (en) 2017-01-25

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