SI3121823T1 - Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče - Google Patents

Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče

Info

Publication number
SI3121823T1
SI3121823T1 SI201530499T SI201530499T SI3121823T1 SI 3121823 T1 SI3121823 T1 SI 3121823T1 SI 201530499 T SI201530499 T SI 201530499T SI 201530499 T SI201530499 T SI 201530499T SI 3121823 T1 SI3121823 T1 SI 3121823T1
Authority
SI
Slovenia
Prior art keywords
vapor deposition
rare earth
magnetic material
grain boundary
permanent magnetic
Prior art date
Application number
SI201530499T
Other languages
English (en)
Inventor
Lei Zhou
Tao Liu
De Lin
Xiaojun Yu
Original Assignee
Advanced Technology & Materials Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology & Materials Co., Ltd. filed Critical Advanced Technology & Materials Co., Ltd.
Publication of SI3121823T1 publication Critical patent/SI3121823T1/sl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58—After-treatment
    • C23C14/5806—Thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15325—Amorphous metallic alloys, e.g. glassy metals containing rare earths
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0266—Moulding; Pressing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/0253—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets
    • H01F41/0293—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing permanent magnets diffusion of rare earth elements, e.g. Tb, Dy or Ho, into permanent magnets

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Dispersion Chemistry (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Hard Magnetic Materials (AREA)
  • Powder Metallurgy (AREA)
SI201530499T 2015-05-07 2015-11-06 Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče SI3121823T1 (sl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201510230782.2A CN104900359B (zh) 2015-05-07 2015-05-07 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法
PCT/CN2015/093951 WO2016176974A1 (zh) 2015-05-07 2015-11-06 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法
EP15884914.1A EP3121823B1 (en) 2015-05-07 2015-11-06 Method for preparing grain boundary diffused rare earth permanent magnetic material by vapor deposition using composite target

Publications (1)

Publication Number Publication Date
SI3121823T1 true SI3121823T1 (sl) 2019-01-31

Family

ID=54032973

Family Applications (1)

Application Number Title Priority Date Filing Date
SI201530499T SI3121823T1 (sl) 2015-05-07 2015-11-06 Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče

Country Status (7)

Country Link
US (1) US10385442B2 (sl)
EP (1) EP3121823B1 (sl)
KR (1) KR101913137B1 (sl)
CN (1) CN104900359B (sl)
ES (1) ES2699949T3 (sl)
SI (1) SI3121823T1 (sl)
WO (1) WO2016176974A1 (sl)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104900359B (zh) * 2015-05-07 2017-09-12 安泰科技股份有限公司 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法
CN105513734B (zh) * 2015-12-18 2018-04-20 江西金力永磁科技股份有限公司 钕铁硼磁体用轻重稀土混合物、钕铁硼磁体及其制备方法
EP3182423B1 (en) 2015-12-18 2019-03-20 JL Mag Rare-Earth Co., Ltd. Neodymium iron boron magnet and preparation method thereof
CN105845425A (zh) * 2016-01-08 2016-08-10 宁波宏垒磁业有限公司 一种钕铁硼磁体的制备方法
CN105938757B (zh) * 2016-04-20 2017-09-15 北京科技大学 一种提高高丰度稀土永磁材料磁性能的制备方法
JP6733398B2 (ja) * 2016-07-27 2020-07-29 日立金属株式会社 Ｒ−ｔ−ｂ系焼結磁石の製造方法
CN106887323A (zh) * 2017-03-07 2017-06-23 北京科技大学 一种晶界扩散制备高矫顽力钕铁硼磁体的方法
CN107146670A (zh) * 2017-04-19 2017-09-08 安泰科技股份有限公司 一种稀土永磁材料的制备方法
JP7251053B2 (ja) * 2017-06-27 2023-04-04 大同特殊鋼株式会社 ＲＦｅＢ系磁石及びＲＦｅＢ系磁石の製造方法
CN108183021B (zh) * 2017-12-12 2020-03-27 安泰科技股份有限公司 稀土永磁材料及其制备方法
CN108251802A (zh) * 2018-02-01 2018-07-06 包头稀土研究院 稀土金属PrNd旋转靶材的制造方法
CN108315703A (zh) * 2018-02-05 2018-07-24 宁波松科磁材有限公司 一种镀膜系统及镀膜方法及稀土磁体的制备方法
CN109360728B (zh) * 2018-07-18 2020-12-01 浙江中科磁业有限公司 一种蒸发晶界扩散增强钕铁硼磁体矫顽力的方法
CN110111961B (zh) * 2019-03-12 2024-03-12 宁波雄海稀土速凝技术有限公司 一种高矫顽力的钕铁硼磁体制备方法及其钕铁硼磁体
CN111180191A (zh) * 2020-01-15 2020-05-19 太原科技大学 一种制备高性能烧结钕铁硼磁体的方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5840375A (en) * 1995-06-22 1998-11-24 Shin-Etsu Chemical Co., Ltd. Method for the preparation of a highly corrosion resistant rare earth based permanent magnet
GB9803970D0 (en) * 1998-02-26 1998-04-22 Univ Birmingham Method of applying a corrosion-resistant coating
US6444052B1 (en) * 1999-10-13 2002-09-03 Aichi Steel Corporation Production method of anisotropic rare earth magnet powder
CN1386145A (zh) * 2000-07-17 2002-12-18 日立金属株式会社 被覆的r－t－b系磁铁及其制造方法
JP4227326B2 (ja) * 2001-11-28 2009-02-18 Ｄｏｗａホールディングス株式会社 焼結希土類磁石合金からなるリング状薄板の製法
JP2004304968A (ja) * 2003-03-31 2004-10-28 Tdk Corp ボイスコイルモータ用永久磁石部材及びボイスコイルモータ
JP2006158012A (ja) * 2004-11-25 2006-06-15 Honda Motor Co Ltd 自動車用ｉｐｍ型モータに使用される永久磁石の製造方法
CN101660126B (zh) * 2005-03-18 2012-10-10 株式会社爱发科 成膜方法和成膜装置以及永磁铁和永磁铁的制造方法
US20090020193A1 (en) * 2005-04-15 2009-01-22 Hitachi Metals, Ltd. Rare earth sintered magnet and process for producing the same
US20070016131A1 (en) * 2005-07-12 2007-01-18 Munger Gareth T Flexible magnets for navigable medical devices
MY147828A (en) * 2006-03-03 2013-01-31 Hitachi Metals Ltd R-fe-b rare earth sintered magnet and method for producing same
CN101651038B (zh) * 2006-03-03 2012-06-06 日立金属株式会社 扩散处理装置
KR101456841B1 (ko) 2006-09-14 2014-11-03 가부시키가이샤 알박 영구자석 및 영구자석의 제조방법
RU2423204C2 (ru) * 2006-09-15 2011-07-10 Интерметалликс Ко., Лтд. СПОСОБ ИЗГОТОВЛЕНИЯ СПЕЧЕННОГО МАГНИТА NdFeB
JP4840606B2 (ja) 2006-11-17 2011-12-21 信越化学工業株式会社 希土類永久磁石の製造方法
EP1975269A1 (fr) * 2007-03-30 2008-10-01 Imphy Alloys Alliage austenitique fer-nickel-chrome-cuivre
US8187392B2 (en) * 2007-07-02 2012-05-29 Hitachi Metals, Ltd. R-Fe-B type rare earth sintered magnet and process for production of the same
US20100239878A1 (en) 2007-10-31 2010-09-23 Hiroshi Nagata Method of manufacturing permanent magnet and permanent magnet
JP5401328B2 (ja) * 2008-02-20 2014-01-29 株式会社アルバック スクラップ磁石の再生方法
JP2009200179A (ja) * 2008-02-20 2009-09-03 Ulvac Japan Ltd 焼結体の製造方法
CN102473515B (zh) * 2009-07-15 2016-06-15 日立金属株式会社 R-t-b类烧结磁体的制造方法和r-t-b类烧结磁体
WO2011057552A1 (en) * 2009-11-11 2011-05-19 Byd Company Limited Zirconium-based amorphous alloy, preparing method and recycling method thereof
JP5088596B2 (ja) * 2010-09-30 2012-12-05 日立金属株式会社 Ｒ−ｔ−ｂ系焼結磁石の製造方法
CN104040655B (zh) * 2012-03-30 2016-10-12 日立金属株式会社 R－t－b系烧结磁体的制造方法
CN103050268B (zh) * 2012-12-31 2016-01-20 厦门钨业股份有限公司 基于细粉蒸着热处理的烧结Nd-Fe-B系磁铁制作方法
CN103205543B (zh) * 2013-05-05 2014-12-03 沈阳中北真空磁电科技有限公司 一种钕铁硼稀土永磁器件的真空热处理方法和设备
CN103366943B (zh) 2013-07-17 2016-01-27 宁波韵升股份有限公司 一种提高烧结钕铁硼薄片磁体性能的方法
CN103824693B (zh) 2014-03-22 2016-08-17 沈阳中北通磁科技股份有限公司 一种带有复合镀膜的钕铁硼稀土永磁器件的制造方法
CN104900359B (zh) 2015-05-07 2017-09-12 安泰科技股份有限公司 复合靶气相沉淀制备晶界扩散稀土永磁材料的方法

Also Published As

Publication number Publication date
EP3121823A4 (en) 2018-01-17
KR101913137B1 (ko) 2018-10-30
CN104900359A (zh) 2015-09-09
ES2699949T3 (es) 2019-02-13
CN104900359B (zh) 2017-09-12
WO2016176974A1 (zh) 2016-11-10
KR20160148607A (ko) 2016-12-26
US20170037504A1 (en) 2017-02-09
EP3121823B1 (en) 2018-09-05
US10385442B2 (en) 2019-08-20
EP3121823A1 (en) 2017-01-25

Similar Documents

Publication Publication Date Title
SI3121823T1 (sl) Postopek za pripravo redkozemeljskega permanentno magnetnega materiala z difuzijo po kristalnih mejah s parno depozicijo z uporabo kompozitne tarče
EP3387344A4 (en) PROCESS FOR PREPARING DETERIORATED INSULATING MATERIAL
EP3330984A4 (en) METHOD FOR PRODUCING A SINTERED R-T-B MAGNET
EP3398960A4 (en) PROCESS FOR THE PREPARATION OF SERMAGLUTIDE
SI3614403T1 (sl) Postopek za pripravo redkozemeljskega materiala za trajni magnet
EP3291264C0 (en) METHOD FOR PRODUCING A SINTERED R-IRON-BORON MAGNET
SG10201602295QA (en) Chamber components for epitaxial growth apparatus
EP3211078A4 (en) Composition for preparing tagatose and method for preparing tagatose from fructose
SI3726549T1 (sl) Metoda priprave trajnega magnetnega materiala iz redkih zemelj
EP3321272A4 (en) Method for preparing l-bpa
EP3176794A4 (en) Rapidly-quenched alloy and preparation method for rare-earth magnet
GB2556502B (en) Leak-off assembly for gravel pack system
EP3136407A4 (en) Method for producing r-t-b sintered magnet
SG11201704465WA (en) Magnetic material sputtering target and method for producing same
EP3646406C0 (en) METHOD FOR STRENGTHENING A CAMOUFLAGE MAST
IL283331A (en) Method for the preparation of n-phenylpyrazole-1-carboxamides
IL280703A (en) Method for preparing liposomes
EP3388055A4 (en) METHOD FOR PREPARING A LIPOSOME
EP3357498A4 (en) METHOD OF SUPPRESSING TUMORS BY INHIBITING THE MIR-200 FAMILY
EP3547333A4 (en) PROCESS FOR THE PREPARATION OF PERMANENT MAGNETIC MATERIAL NEEDYME-IRON-BORON
EP3279204A4 (en) Method for preparing four-coordinated organic boron compound
EP3379550A4 (en) Method for producing rare earth magnet and rare earth magnet
EP3291251A4 (en) Rare earth permanent magnet and method for producing rare earth permanent magnet
EP3250215A4 (en) Methods for inhibiting tumor growth
EP3291263A4 (en) Method for producing rare-earth magnet