WO2016111293A1 - Sonde de kelvin et appareil d'inspection de kelvin la comprenant - Google Patents

Sonde de kelvin et appareil d'inspection de kelvin la comprenant Download PDF

Info

Publication number
WO2016111293A1
WO2016111293A1 PCT/JP2016/050137 JP2016050137W WO2016111293A1 WO 2016111293 A1 WO2016111293 A1 WO 2016111293A1 JP 2016050137 W JP2016050137 W JP 2016050137W WO 2016111293 A1 WO2016111293 A1 WO 2016111293A1
Authority
WO
WIPO (PCT)
Prior art keywords
probe
kelvin
contact
plunger
straight line
Prior art date
Application number
PCT/JP2016/050137
Other languages
English (en)
Japanese (ja)
Inventor
宏真 寺西
貴浩 酒井
Original Assignee
オムロン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オムロン株式会社 filed Critical オムロン株式会社
Priority to US15/541,035 priority Critical patent/US20180011127A1/en
Publication of WO2016111293A1 publication Critical patent/WO2016111293A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06722—Spring-loaded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Definitions

  • the present invention relates to a Kelvin probe and a Kelvin inspection unit including the Kelvin probe.
  • a measurement method using a Kelvin connection (four-terminal measurement method) is known as a method used for a current test of a two-terminal circuit.
  • probe pins are connected to terminals of a two-terminal circuit, and current and voltage are measured separately.
  • Kelvin inspection unit used for a measurement method by Kelvin connection, for example, there is one described in Patent Document 1.
  • This Kelvin inspection unit is provided with a plurality of Kelvin probes composed of two probe pins arranged in parallel to each other.
  • the Kelvin probe has four-point contacts at both ends of the probe pin.
  • such a four-point contact has a problem that it is difficult to reduce the size because of its complicated shape.
  • an object of the present invention is to provide a Kelvin probe suitable for miniaturization and a Kelvin inspection unit including the Kelvin probe.
  • the probe pin according to the present invention is a Kelvin probe including first and second probe pins arranged in parallel with an interval in order to solve the above-described problem, wherein each of the first and second probe pins is An elastic portion that expands and contracts along the first straight line, a first contact disposed on a second straight line parallel to the first straight line, and a second contact disposed on the first straight line.
  • the first and second contacts are directly connected to each other, and at least one of the first and second contacts is supported so as to reciprocate via the elastic force of the elastic portion.
  • the first contact of each of the first and second probe pins includes a first straight line of the first probe pin and a first straight line of the second probe pin in a plan view including the first and second straight lines. It is arranged between.
  • each of the first contacts of the first and second probe pins has the first straight line of the first probe pin and the second probe pin in plan view including the first and second straight lines. It arrange
  • the elastic portion is a coil spring
  • the first and second probe pins are provided at one end of the coil spring
  • the first contact is provided.
  • the first and second plungers may be formed by electroforming.
  • a Kelvin probe suitable for downsizing can be easily obtained.
  • the elastic portion is a bellows body having a plurality of straight portions and an arc portion connecting adjacent straight portions, and the first and second probe pins are the first and second probe pins.
  • the first contact portion provided with one contact and the second contact portion provided with the second contact, and the first and second contact portions and the elastic portion are integrally formed. Also good.
  • the assembly process can be omitted and the productivity can be increased.
  • the first and second probe pins may be formed by electroforming.
  • a Kelvin probe suitable for downsizing can be easily obtained.
  • it may be configured to further include a holding portion that holds the first and second probe pins together.
  • the first and second probe pins are integrally held by the holding portion. Therefore, since the 1st, 2nd probe pin can be positioned with high precision, it can assemble easily and can improve productivity.
  • the Kelvin inspection unit includes the Kelvin probe and a housing that houses the Kelvin probe.
  • Kelvin inspection unit of the present invention a Kelvin inspection unit equipped with a Kelvin probe suitable for miniaturization can be obtained.
  • FIG. 2 is a cross-sectional view taken along line II-II in FIG. It is a perspective view of the Kelvin probe of a 1st embodiment of the present invention.
  • FIG. 4 is a IV arrow view of the Kelvin probe shown in FIG. 3.
  • FIG. 4 is a V arrow view of the Kelvin probe shown in FIG. 3.
  • FIG. 4 is an exploded perspective view of the Kelvin probe shown in FIG. 3.
  • FIG. 8 is a sectional view taken along line VIII-VIII in FIG.
  • FIG. 10 is an X arrow view of the Kelvin probe shown in FIG. 9. It is the XI arrow directional view of the Kelvin probe shown in FIG.
  • FIG. 10 is an exploded perspective view of the Kelvin probe shown in FIG. 9. It is a perspective view of an example of the Kelvin inspection unit provided with the Kelvin probe of a 3rd embodiment of the present invention.
  • FIG. 14 is a cross-sectional view taken along line XIVI-XIV in FIG. 13. It is a perspective view of the Kelvin probe of 3rd Embodiment of this invention. It is a XVI arrow directional view of the Kelvin probe shown in FIG. It is a XVII arrow directional view of the Kelvin probe shown in FIG.
  • FIG. 1 is a perspective view of an example of a Kelvin inspection unit including a Kelvin probe according to the first embodiment of the present invention
  • FIG. 2 is a cross-sectional view taken along line II-II in FIG.
  • the Kelvin inspection unit 1 includes a housing 2 and a Kelvin probe 30 according to the first embodiment housed in the housing 2.
  • the housing 2 includes a housing body 10 and a housing cover 20 that covers the housing body 10, and the Kelvin probe 30 is accommodated in the housing body 10.
  • the housing body 10 has a planar shape in which four corners of a square are chamfered when viewed from above.
  • a plurality of storage portions 11 for storing the Kelvin probe 30 are provided in the approximate center of the housing body 10.
  • the storage unit 11 has a circular shape in a top view, and is arranged in parallel and spaced apart from each other along the X and Y directions shown in FIG. Further, contact openings 12 for projecting one end of the Kelvin probe 30 are provided on the bottom surface of the storage portion 11.
  • the contact opening 12 has a circular shape with a smaller diameter than the storage portion 11 in a top view.
  • the X direction is a direction parallel to one side of the housing body 10 in a top view
  • the Y direction is a direction orthogonal to the X direction.
  • the housing cover 20 has the same planar shape as the housing body 10 in a top view. As shown in FIG. 2, the housing cover 20 is provided with a recess 21 at the approximate center of its bottom surface.
  • the recess 21 has a rectangular shape in cross section, and a plurality of contact openings 22 for projecting the other end of the Kelvin probe 30 are provided on the bottom surface thereof.
  • the contact opening 22 has a circular shape when viewed from above, and has a one-to-one correspondence with the storage portion 11 of the housing body 10. They are spaced apart from each other. Further, the contact opening 22 is arranged so that the center thereof coincides with the center of the storage portion 11 of the corresponding housing body 10 in a top view.
  • FIG. 3 is a perspective view of the Kelvin probe 30 of the first embodiment. 4 is a view taken along the arrow IV of the Kelvin probe of FIG. 3, and FIG. 5 is a view taken along the arrow V of the Kelvin probe of FIG. FIG. 6 is an exploded perspective view of the Kelvin probe of FIG.
  • the Kelvin probe 30 of the first embodiment includes a first probe pin 40 and a second probe pin 50 as shown in FIGS.
  • the first and second probe pins 40 and 50 have the same configuration. For this reason, about the 2nd probe pin 50, the description of the 1st probe pin 40 is used.
  • the first probe pin 40 includes a first plunger 60, a second plunger 70, and a coil spring 80.
  • Each of the first and second plungers 60 and 70 has conductivity, and is formed by, for example, an electroforming method.
  • the first plunger 60 has a flat plate shape that extends linearly, and is formed with substantially the same thickness H1.
  • the first plunger 60 includes a sandwiched portion 61 that is an example of a first insertion portion, an intermediate portion 62 that is continuous with the sandwiched portion 61, and an example of contact that is a first contact portion that is continuous with the intermediate portion 62. Part 63.
  • the surface orthogonal to the thickness H1 direction of the 1st plunger 60 be a main surface, and let a surface parallel to the thickness H1 direction orthogonal to this main surface be a side surface.
  • the sandwiched portion 61 has a rectangular guide groove 64 penetrating the main surface.
  • the guide groove 64 extends from the distal end (lower end in FIG. 6) of the sandwiched portion 61 toward the proximal end (upper end in FIG. 6) continuous with the intermediate portion 62.
  • the guide groove 64 has a width W1 that is larger than the thickness H2 of the second plunger 70.
  • the intermediate portion 62 is larger than the width W2 of the sandwiched portion 61 and has a width W3 that is substantially the same as the outer diameter of the coil spring 80.
  • the contact portion 63 has a first contact 65 that protrudes from its tip (the upper end in FIG. 6).
  • the first contact 65 has a right-angled triangular shape when viewed from the main surface, and is provided on one side surface of the contact portion 63.
  • the contact portion 63 has a housing support portion 67 on the base end (lower end in FIG. 6) side.
  • the housing support portion 67 is provided so as to protrude from the other side surface facing the side surface where the first contact 65 is located.
  • the portion of the contact portion 63 where the housing support portion 67 is provided has a width W4 (shown in FIG. 5) that is larger than the diameter of the contact opening 22 of the housing cover 20.
  • the second plunger 70 has a flat plate shape extending in a straight line, and is formed with substantially the same thickness H2.
  • the second plunger 70 includes a contact portion 71 as an example of a second contact portion, and first and second elasticity as an example of a second insertion portion provided at a base end (upper end in FIG. 6) of the contact portion 71. It consists of pieces 72 and 73.
  • the surface orthogonal to the thickness H2 direction of the 2nd plunger 70 be a main surface, and let a surface parallel to the thickness H2 direction orthogonal to this main surface be a side surface.
  • the contact portion 71 has a substantially rectangular flat plate shape, and a second contact 74 having a V-shape in a main surface view is provided at the tip (lower end in FIG. 6).
  • a coil spring support portion 75 projects from the side surface of the base end (upper end in FIG. 6) of the contact portion 71.
  • the first and second elastic pieces 72 and 73 extend from the proximal end of the contact portion 71 along the longitudinal direction of the contact portion 71 at substantially intervals and in parallel with each other. Further, the first and second elastic pieces 72 and 73 are arranged at both ends of the base end of the contact portion 71 in the width W5 direction so as to have a gap larger than the thickness H1 of the first plunger 60. That is, in the first and second elastic pieces 72 and 73, the distance between the outer surfaces is substantially equal to the width W5 of the contact portion 71, and the distance between the inner surfaces is larger than the thickness H1 of the first plunger 60. Is provided. Further, the first and second elastic pieces 72 and 73 have different lengths, and the first elastic piece 72 is shorter than the second elastic piece 73.
  • a guide protrusion 76 projects from the inner surface of the first elastic piece 72 toward the second elastic piece 73. Further, a contact projection 77 is provided projecting toward the first elastic piece 72 at the tip of the inner surface of the second elastic piece 73. The contact protrusion 77 is arranged so as to always contact the sandwiched portion 61 of the first plunger 60 in a state where the guide protrusion 76 of the first elastic piece 72 is fitted in the guide groove 64 of the first plunger 60. ing.
  • the coil spring 80 is an example of an elastic portion, and is made of, for example, carbon steel or stainless steel. As shown in FIGS. 3 to 5, the coil spring 80 includes a width W2 (shown in FIG. 6) of the sandwiched portion 61 of the first plunger 60 and a width W5 (shown in FIG. 6) of the second plunger 70. It has a slightly larger inner diameter.
  • the coil spring 80 includes a width W3 (shown in FIG. 6) of the intermediate portion 62 of the first plunger 60 and a width W6 (shown in FIG. 5) of the portion where the coil spring support portion 75 of the second plunger 70 is provided. And have substantially the same outer diameter.
  • the coil spring 80 is always compressed in the state shown in FIGS. 1 and 2, that is, in the state where the first plunger 60 and the second plunger 70 are combined with each other and stored in the housing 2 of the Kelvin inspection unit 1.
  • the spring length is adjusted so that
  • the first and second probe pins 40 and 50 are assembled.
  • the first plunger 60 is inserted into the coil spring 80 from one end side of the coil spring 80 from the sandwiched portion 61 side, while the second plunger 70 is inserted into the coil spring 80 from the other end side of the coil spring 80. Is inserted from the first and second elastic pieces 72 and 73 side.
  • the first and second plungers 60 and 70 are inserted so that the main surface of the first plunger 60 and the main surface of the second plunger 70 are orthogonal to each other, as shown in FIG.
  • the sandwiched portion 61 of the first plunger 60 is interposed between the first and second elastic pieces 72 and 73 of the second plunger 70.
  • the inserted portion 61 is sandwiched between the first elastic piece 72 and the second elastic piece 73.
  • the contact protrusion 77 of the second elastic piece 73 of the second plunger 70 is on the proximal end side of the sandwiched portion 61 of the first plunger 60 (see FIG. 6). It is always in contact with the upper side of the guide groove 64. That is, in the first and second probe pins 40 and 50 in this state, the first and second contacts 65 and 74 are directly connected to each other.
  • the assembled first and second probe pins 40 and 50 are inserted into the storage portion 11 of the housing body 10 from the second plunger 70 side, and the Kelvin is inserted. A probe 30 is formed. At this time, as shown in FIG. 4, the first and second probe pins 40 and 50 are inserted into the storage portion 11 so that the side surfaces on which the first contact points 65 of the first plunger 60 are located face each other.
  • the Kelvin probe 30 has the first and second probe pins 40 on the first straight line L1 that is the center line of the coil spring 80 of the first and second probe pins 40 and 50 in the direction of arrow IV shown in FIG. , 50 second contacts 74 are arranged, and first contacts 65 of the first and second probe pins 40, 50 are arranged on a second straight line L2 parallel to the first straight line L1. Further, the second straight line L2 of the first and second probe pins 40 and 50 is disposed between the first straight lines L1 of the first and second probe pins 40 and 50.
  • the Kelvin probe 30 housed in the Kelvin inspection unit 1 a part of the contact part 63 including the first contact 65 of the first plunger 60 protrudes from the contact opening 22 of the housing cover 20 as shown in FIG. 2. . Further, a part of the contact portion 71 including the second contact 74 of the second plunger 70 protrudes from the contact opening 12 of the housing body 10.
  • the first and second probe pins 40 and 50 are parallel to each other with a space therebetween by the housing portion 11 of the housing body 10 and the contact opening 22 of the housing cover 20 corresponding to the housing portion 11. Has been placed.
  • the first and second probe pins 40 and 50 are accommodated in the Kelvin inspection unit 1 so as to operate independently from each other in such an initial state.
  • the first plunger 60 receives the restoring force of the coil spring 80 at the intermediate portion 62 and is pressed against the housing cover 20 via the housing support portion 67, and the second plunger 70 is pressed against the coil spring support portion 75.
  • the coil spring 80 is pressed against the housing body 10 via the coil spring support 75.
  • a force is applied to the first and second contacts 65 and 74 of the first and second plungers 60 and 70 of the first and second probe pins 40 and 50, and the first and second plungers 60 and 70 are connected to the Kelvin inspection unit 1.
  • the guide protrusion 76 of the first elastic piece 72 of the second plunger 70 starts to slide along the guide groove 64 of the first plunger 60.
  • the force applied to the first and second plungers 60 and 70 is transmitted to the coil spring 80 via the intermediate portion 62 of the first plunger 60 and the coil spring support portion 75 of the second plunger 70, and gradually. Compressed.
  • the guide groove 64 of the first plunger 60 and the guide protrusion 76 of the second plunger 70 come into contact with each other, and The sliding movement of the first and second plungers 60 and 70 stops.
  • the first and second contacts 65 and 74 of the first and second plungers 60 and 70 are placed in the housing 2 before the guide groove 64 of the first plunger 60 and the guide protrusion 76 of the second plunger 70 contact each other. When fully pushed, the sliding movement of the first and second plungers 60 and 70 stops.
  • the coil spring 80 The first plunger 60 is biased toward the housing cover 20 and the second plunger 70 is biased toward the housing body 10 by the restoring force. Thereby, the 1st, 2nd plunger 60 and 70 returns to the initial state shown in FIG. As described above, the first contact 65 of the first plunger 60 and the second contact 74 of the second plunger 70 are supported so as to be able to reciprocate via the elastic force of the coil spring 80.
  • the first and second probe pins 40 and 50 are parallel to each other with a space therebetween by the housing portion 11 of the housing body 10 and the contact opening 22 of the housing cover 20 corresponding to the housing portion 11. Arranged and operate independently without contacting each other.
  • each of the first contacts 65 of the first and second probe pins 40 and 50 is viewed in the direction of arrow IV, that is, the first straight line L1 and the second straight line.
  • the first probe pin 40 is disposed between the second straight line L 2 and the second straight line L 2 of the second probe pin 50.
  • the first and second contacts 65 and 74 of the first and second plungers 60 and 70 are returned to the initial state shown in FIG. For this reason, even if the first and second probe pins 40 and 50 are downsized, it is easy to obtain a spring load necessary for design.
  • the contact protrusion 77 of the 2nd elastic piece 73 of the 2nd plunger 70 is the base end side (upper side of the guide groove 64 of FIG. 6) of the clamping part 61 of the 1st plunger 60. ) Always in contact. For this reason, high contact stability can be obtained between the first and second plungers 60 and 70.
  • the guide protrusion 76 of the second plunger 70 slides along the guide groove 64 of the first plunger 60. For this reason, the contact position where the to-be-clamped part 61 of the 1st plunger 60 and the contact protrusion 77 of the 2nd plunger 70 contact can be detected correctly.
  • (Second Embodiment) 7 to 12 are diagrams illustrating an example of the Kelvin inspection unit 201 including the Kelvin probe 230 according to the second embodiment and the Kelvin probe 230 according to the second embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted. Differences from the first embodiment will be described.
  • the Kelvin inspection unit 201 provided with the Kelvin probe 230 according to the second embodiment is provided with a contact opening 222 having an elliptical shape in a top view in the housing cover 220 of the housing 202 as shown in FIGS. This is different from the inspection unit 1 including the Kelvin probe 30 of the first embodiment.
  • the contact opening 222 of the housing cover 220 has an elliptical shape with the major axis extending in the X direction shown in FIG. 7 in the top view, and along the Y direction shown in FIG. 7. Are spaced apart from each other. As shown in FIG. 2, the contact opening 222 is larger than the width W7 (shown in FIG. 10) of the contact portion 63 of the first and second probe pins 40 and 50 in the major axis direction. Two probe pins 40 and 50 have a diameter smaller than a width W8 (shown in FIG. 10) obtained by adding the protrusion length of the housing support portion 67 to the width W7 of the contact portion 63.
  • the Kelvin probe 230 according to the second embodiment is different from the Kelvin probe 30 according to the first embodiment in that it includes a holding portion 90 that integrally holds the first and second probe pins 40 and 50.
  • the holding portion 90 of the Kelvin probe 230 is made of an insulating material, provided on one main surface of the first and second probe pins 40 and 50, and the first plunger 60 of the first and second probe pins 40 and 50. It arrange
  • the first and second probe pins 40, 50 are integrally held so as to be parallel to each other with a space therebetween.
  • the holding portion 90 is formed of the same material as the insulating member used when the first and second plungers 60 and 70 of the first and second probe pins 40 and 50 are formed by electroforming, for example. ing.
  • the first and second probe pins 40 and 50 are integrally held by the holding portion 90. For this reason, compared with the case where the 1st, 2nd probe pins 40 and 50 are each accommodated in the housing 2, even if it reduces in size, it is easy to accommodate in the housing 2, and it can assemble easily.
  • a contact opening 222 through which one end of the integrated first and second probe pins 40 and 50 can be projected is provided. Therefore, the number of contact openings to be formed can be reduced and the contact openings can be reduced as compared with the Kelvin inspection unit provided with the contact openings corresponding to the contacts of the first and second probe pins 40 and 50. Can be formed large. As a result, even if the Kelvin probe 230 is downsized, the Kelvin inspection unit 201 can be easily assembled, and its productivity can be increased.
  • FIGS. 13 to 17 are diagrams illustrating an example of the Kelvin probe 330 according to the third embodiment and the Kelvin inspection unit 301 including the Kelvin probe 330 according to the third embodiment.
  • the same parts as those in the first embodiment are denoted by the same reference numerals, and the description thereof will be omitted. Differences from the first embodiment will be described.
  • the Kelvin probe 330 includes a first probe pin 340 and a second probe pin 350 as shown in FIGS.
  • the first and second probe pins 340 and 350 have the same configuration. For this reason, the description of the first probe pin 340 is used for the second probe pin 350.
  • the first probe pin 340 has a flat plate shape extending linearly, and is formed with substantially the same thickness H3.
  • the first probe pin 340 includes a first contact portion 360, a second contact portion 370, and an bellows body 380 as an example of an elastic portion connected to the first and second contact portions 360, 370. It is integrally formed by electroforming.
  • the surface seen from the arrow XVI direction shown in FIG. 16 be a main surface, and let the surface orthogonal to this main surface be a side surface.
  • the first contact portion 360 has a first contact 65 protruding from the tip (the upper end in FIG. 16), and is formed with substantially the same width W9. Further, one end of the bellows body 380 is connected to the first straight line L1 at the base end (the lower end in FIG. 16) of the first contact portion 360.
  • the second contact portion 370 has a second contact 74 having a V-shape as viewed from the main surface at the tip (lower end in FIG. 16), and is formed with the same width W10. Further, a support protrusion 375 protrudes from the side surface of the base end (the upper end in FIG. 16) of the second contact portion 370, and the bellows body 380 is placed on the first straight line L 1 of the base end of the second contact portion 370. The other end is connected.
  • the second contact portion 370 is formed such that its width W10 is smaller than the width W9 of the first contact portion 360.
  • the support protrusion 375 is formed such that a width W11 obtained by adding the protrusion length to the width W10 of the second contact portion 370 is substantially equal to the width W9 of the first contact portion 360.
  • the bellows body 380 is formed with the same width W12, and includes a straight portion 381 and an arc portion 382 connecting adjacent straight portions 381.
  • the straight line portion 381 is arranged so as to extend parallel to the width W12 direction in the natural state shown in FIG.
  • the bellows body 380 is formed such that the width W12 thereof is substantially equal to the width W9 of the first contact portion 360 and the width W11 of the support protrusion portion of the second contact portion 370.
  • the first and second probe pins 340 and 350 are inserted into the housing portion 11 of the housing body 10 from the second contact portion 370 side to form the Kelvin probe 330.
  • the process of forming the Kelvin probe 30 by inserting the first and second probe pins 340 and 350 into the housing portion 11 of the housing body 10 is repeated, and the first and second probe pins 340 are inserted into all the housing portions 11 of the housing body 10. , 350 are inserted. Thereafter, the housing cover 20 is attached to the housing body 10, and the assembly process of the Kelvin inspection unit 301 is completed.
  • the Kelvin probe 330 housed in the inspection unit 301 a part of the first contact portion 360 including the first contact 65 protrudes from the contact opening 22 of the housing cover 20 as shown in FIG. A part of the second contact portion 370 including the second contact 74 projects from the contact opening 12 of the housing body 10.
  • the first and second probe pins 340 and 350 are accommodated in the Kelvin inspection unit 1 in such an initial state.
  • the first and second probe pins 340 and 350 are locked to the bottom surface of the storage portion 11 of the housing body 10 via the support protrusions 375 of the second contact portion 370.
  • the bellows body 380 When a force is applied to the first contact 65 of the first contact portion 360 of the first and second probe pins 340 and 350 in the initial state, the bellows body 380 is compressed, and the first contact portion 360 becomes the housing 2 of the Kelvin inspection unit 301. It is pushed inward.
  • the adjacent linear portions 381 of the bellows body 380 come into contact with each other, and the first contact portion The movement of 360 stops.
  • the first contact 65 of the first contact portion 360 is completely pushed into the housing 2 and the movement of the first contact portion 360 is stopped.
  • the first contact portion 360 moves toward the housing cover 20 by the restoring force of the bellows body 380. Is energized. Thereby, the 1st contact part 360 returns to the initial state shown in FIG. Thus, the first contact 65 of the first contact portion 360 is supported so as to be able to reciprocate via the elastic force of the bellows body 380.
  • the first and second probe pins 340 and 350 are integrally formed. For this reason, the assembly process of the probe pins 340 and 350 can be omitted, and productivity can be improved. Even if the Kelvin probe 330 is downsized, the probe pins 340 and 350 can be easily housed in the housing 2, so that the Kelvin inspection unit 301 can be easily assembled and productivity can be increased.
  • the first contact 65 has a first straight line of the first probe pin 40 in a plan view in which the second straight line L2 passing through the first contact 65 includes the first straight line L1 and the second straight line L2. It suffices if it is between the straight line L1 and the first straight line L1 of the second probe pin 50, and can be arbitrarily arranged within this range.
  • the guide protrusion 76 of the first elastic piece 72 can be fitted into the guide groove 64, and the first and second plungers 60 and 70 slide when fitted into the guide groove 64. What is necessary is just to be able to restrict
  • the contact protrusion 77 of the second elastic piece 73 can be appropriately selected in shape, size, or the like according to design. By changing the shape or the like of the contact protrusion 77, the urging force of each second elastic piece 73 against each sandwiched portion can be adjusted.
  • the first and second plungers 60 and 70 and the first and second probe pins 340 and 350 have the same thickness.
  • the present invention is not limited to this.
  • the thicknesses of the first and second plungers 60 and 70 and the probe pins 340 and 350 may be appropriately changed. Further, the thickness may be different depending on the portions of the first and second plungers 60 and 70 and the first and second probe pins 340 and 350.
  • the first and second plungers 60 and 70 and the first and second probe pins 340 and 350 can be subjected to surface treatment such as plating and coating depending on the design.
  • the first and second plungers 60 and 70 and the first and second probe pins 340 and 350 in the first to third embodiments are formed by electroforming, but are not limited thereto. Any method that can form the first and second plungers 60 and 70 and the first and second probe pins 340 and 350 of the first to third embodiments can be arbitrarily selected.
  • the sandwiched portion 61 having the guide groove 64 is provided in the first plunger 60 and the first and second elastic pieces 72 and 73 are provided in the second plunger 70. Absent.
  • the first plunger may be provided with first and second elastic pieces, and the second plunger may be provided with a sandwiched portion having a guide groove.
  • first and second plungers 60 and 70 of the first and second embodiments are respectively inserted from both ends of the coil spring 80 and can be slidable and conductive with each other, the first and second plungers 60 and 70 have a guide groove 64. Not only the combination of the part 61 and the 1st, 2nd elastic pieces 72 and 73 but arbitrary structures are employable.
  • the Kelvin probe and the Kelvin inspection unit according to the present invention can be applied to an inspection unit such as a semiconductor integrated circuit and a semiconductor device.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

L'invention concerne une sonde de Kelvin (30) comportant des première et seconde broches de sonde (40, 50) qui sont disposées en parallèle et séparées par un intervalle, les première et seconde broches de sonde (40, 50) ayant chacune un ressort hélicoïdal (80) qui se dilate et se contracte le long d'une première ligne droite (L1), un premier contact (65) disposé sur une seconde ligne droite (L2) parallèle à la première ligne droite (L1), et un second contact (74) disposé sur la première ligne droite (L1), et les premier et second contacts (65, 74) étant directement raccordés électriquement l'un à l'autre et supportés de manière à être capables d'un mouvement de va-et-vient provoqué par la force élastique du ressort hélicoïdal (80). En outre, les premiers contacts (65) des première et seconde broches de sonde (40, 50) sont disposés entre les premières lignes droites (L1) des première et seconde broches de sonde (60, 70) dans une vue en plan comprenant les première et secondes lignes droites (L1, L2).
PCT/JP2016/050137 2015-01-06 2016-01-05 Sonde de kelvin et appareil d'inspection de kelvin la comprenant WO2016111293A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/541,035 US20180011127A1 (en) 2015-01-06 2016-01-05 Kelvin probe and kelvin inspection unit provided with same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015001025A JP2016125943A (ja) 2015-01-06 2015-01-06 ケルビンプローブ、および、これを備えたケルビン検査ユニット
JP2015-001025 2015-01-06

Publications (1)

Publication Number Publication Date
WO2016111293A1 true WO2016111293A1 (fr) 2016-07-14

Family

ID=56355980

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2016/050137 WO2016111293A1 (fr) 2015-01-06 2016-01-05 Sonde de kelvin et appareil d'inspection de kelvin la comprenant

Country Status (4)

Country Link
US (1) US20180011127A1 (fr)
JP (1) JP2016125943A (fr)
TW (1) TWI582433B (fr)
WO (1) WO2016111293A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI735239B (zh) * 2020-05-26 2021-08-01 中華精測科技股份有限公司 探針裝置

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6642359B2 (ja) * 2016-09-21 2020-02-05 オムロン株式会社 プローブピンおよび検査ユニット
JP2018151316A (ja) * 2017-03-14 2018-09-27 オムロン株式会社 プローブピンおよび検査ユニット
JP7098886B2 (ja) * 2017-07-04 2022-07-12 日本電産リード株式会社 接触端子、検査治具、及び検査装置
CN111033273B (zh) * 2018-01-11 2022-04-26 欧姆龙株式会社 探针、检查工具、检查单元和检查装置
JP2020034352A (ja) * 2018-08-28 2020-03-05 オムロン株式会社 プローブピン用ハウジング、検査治具、検査ユニットおよび検査装置
CN108957062A (zh) * 2018-09-04 2018-12-07 东莞市盈之宝电子科技有限公司 一种探针
CN112086765B (zh) * 2020-08-21 2022-04-01 国家电网有限公司 一种管母支撑金具及输电系统
CN112083205A (zh) * 2020-09-11 2020-12-15 苏州韬盛电子科技有限公司 超大电流开尔文测试探针
KR20230087745A (ko) * 2021-12-10 2023-06-19 (주)포인트엔지니어링 켈빈 검사용 접촉핀 어셈블리 및 이를 구비하는 켈빈 검사장치

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0327360U (fr) * 1989-04-25 1991-03-19
WO2008133089A1 (fr) * 2007-04-20 2008-11-06 Nhk Spring Co., Ltd. Unité de contact conducteur
JP2008546164A (ja) * 2005-06-10 2008-12-18 デラウェア キャピタル フォーメーション インコーポレイテッド 可撓性のある内部相互接続部を備えた電気コンタクトプローブ
WO2012070188A1 (fr) * 2010-11-22 2012-05-31 ユニテクノ株式会社 Sonde à contact de kelvin et montage d'inspection kelvin la comprenant
JP2012117845A (ja) * 2010-11-29 2012-06-21 Seiken Co Ltd 接触検査用治具

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7327033B2 (en) * 2004-08-05 2008-02-05 International Business Machines Corporation Copper alloy via bottom liner
TWM411569U (en) * 2011-03-22 2011-09-11 Micro Precise Technology Co Ltd Testing probe and probe retaining base
US20130025746A1 (en) * 2011-04-20 2013-01-31 Apple Inc. Twin roll sheet casting of bulk metallic glasses and composites in an inert environment
JP6009544B2 (ja) * 2012-04-17 2016-10-19 ユニテクノ株式会社 ケルビンコンタクトプローブおよびそれを備えたケルビン検査治具
TWI531799B (zh) * 2012-05-03 2016-05-01 Unitechno Inc Kevin touch probe and with this Kevin inspection fixture
WO2015068222A1 (fr) * 2013-11-06 2015-05-14 理化電子株式会社 Sonde de contact

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0327360U (fr) * 1989-04-25 1991-03-19
JP2008546164A (ja) * 2005-06-10 2008-12-18 デラウェア キャピタル フォーメーション インコーポレイテッド 可撓性のある内部相互接続部を備えた電気コンタクトプローブ
WO2008133089A1 (fr) * 2007-04-20 2008-11-06 Nhk Spring Co., Ltd. Unité de contact conducteur
WO2012070188A1 (fr) * 2010-11-22 2012-05-31 ユニテクノ株式会社 Sonde à contact de kelvin et montage d'inspection kelvin la comprenant
JP2012117845A (ja) * 2010-11-29 2012-06-21 Seiken Co Ltd 接触検査用治具

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI735239B (zh) * 2020-05-26 2021-08-01 中華精測科技股份有限公司 探針裝置

Also Published As

Publication number Publication date
TW201632890A (zh) 2016-09-16
JP2016125943A (ja) 2016-07-11
US20180011127A1 (en) 2018-01-11
TWI582433B (zh) 2017-05-11

Similar Documents

Publication Publication Date Title
WO2016111293A1 (fr) Sonde de kelvin et appareil d'inspection de kelvin la comprenant
KR102001349B1 (ko) 프로브 핀 및 이것을 사용한 검사 장치
KR101959696B1 (ko) 프로브 핀 및 그것을 사용한 검사 장치
KR20140043818A (ko) 접촉자
KR102152230B1 (ko) 프로브 핀 및 검사 유닛
KR20160145188A (ko) 프로브 핀, 및, 이것을 이용한 전자 디바이스
JP5033634B2 (ja) 電気的接続装置
JP2010539671A (ja) 半導体の電気機械的接点
TWI602352B (zh) Terminal connection mechanism and switch
TWI585414B (zh) Probe pin and probe unit with this probe pin
JP2013187155A (ja) 端子とその接続構造
TWI586966B (zh) Probe and electronic device with probe
WO2017047495A1 (fr) Broche de sonde et outil d'inspection comprenant celle-ci
KR20130006306A (ko) 스위치
JP6268896B2 (ja) 接触子
JP2015094755A (ja) プローブ及びプローブの製造方法
JP2018059766A (ja) プローブピンおよび検査ユニット
KR20210062046A (ko) 프로브 핀 및 검사 지그
KR20200112889A (ko) 검사 유닛 및 검사 장치
KR101468588B1 (ko) 프로브 핀
JP2013093132A (ja) 多方向スライド型電子部品

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 16735032

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 15541035

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 16735032

Country of ref document: EP

Kind code of ref document: A1