WO2016072250A1 - 塗布装置、塗布ヘッド及び塗布方法 - Google Patents

塗布装置、塗布ヘッド及び塗布方法 Download PDF

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Publication number
WO2016072250A1
WO2016072250A1 PCT/JP2015/079545 JP2015079545W WO2016072250A1 WO 2016072250 A1 WO2016072250 A1 WO 2016072250A1 JP 2015079545 W JP2015079545 W JP 2015079545W WO 2016072250 A1 WO2016072250 A1 WO 2016072250A1
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WO
WIPO (PCT)
Prior art keywords
coating
substrate
head
liquid
film forming
Prior art date
Application number
PCT/JP2015/079545
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
隆勇 松山
秀人 吉塚
Original Assignee
株式会社エナテック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エナテック filed Critical 株式会社エナテック
Priority to JP2016509800A priority Critical patent/JP6093480B2/ja
Priority to KR1020167032618A priority patent/KR101858246B1/ko
Priority to CN201580024186.7A priority patent/CN106664802B/zh
Publication of WO2016072250A1 publication Critical patent/WO2016072250A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C21/00—Accessories or implements for use in connection with applying liquids or other fluent materials to surfaces, not provided for in groups B05C1/00 - B05C19/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/28—Applying non-metallic protective coatings

Definitions

  • the present invention relates to a coating apparatus, a coating head, and a coating method, and more particularly to a coating apparatus, a coating head, and a coating method that apply a liquid to a peripheral portion of a substrate.
  • a printed circuit board using a glass epoxy member is generally used as a substrate for mounting electronic components.
  • the glass epoxy member is obtained by impregnating a glass fiber cloth with an epoxy resin. Therefore, when the glass epoxy member is cut, fine dust made of epoxy resin or glass fiber is generated. Such fine dust may cause poor contact of the circuit board and deterioration of the quality. Therefore, it is necessary to remove dust generated when the substrate is cut when the printed circuit board is manufactured. However, even if dust is removed from the end face of the printed circuit board, the end face portion of the printed circuit board is fragile, and there is a problem that it may collapse and generate further dust.
  • FIG. 23 is a side cross-sectional view showing the main part of the coating apparatus previously proposed by the present inventor
  • FIG. 24 is a schematic front view showing the internal mechanism of the coating apparatus with the housing omitted. .
  • a conveyor 102 extending in the front-rear direction is disposed across the carry-in port 101a and the carry-out port 101b of the housing 101.
  • the conveyor 102 is supported by the housing 101 by a support member (not shown).
  • the housing 101 is provided with an operation unit 103 including a plurality of operation switches 103a.
  • the conveyor 102 is driven and stopped by operating the operation switch 103a.
  • Application mechanisms 110 and 110 are respectively provided on the left and right sides of the conveyor 102 in the housing 101.
  • the coating mechanism 110 is fixed to a fixed plate 104 disposed to face the rear surface of the housing 101, and the lower portion of the fixed plate 104 is connected to the ball screw mechanism 120.
  • the ball screw mechanism 120 is supported on the housing 101 by a support member (not shown).
  • the coating mechanism 110 includes a coating disk 111, a motor 112, a coating liquid supply disk 113, and a motor 114.
  • the motors 112 and 112 for rotating the application disk are fixed to a support member 105 that is horizontally attached to the fixed plate 104, and the rotation shaft 112a thereof is disposed vertically downward.
  • the application disks 111 and 111 are provided with a shaft 111a that is disposed in the horizontal direction and extends upward.
  • the shaft 111 a of the application disk 111 is connected to the rotation shaft 112 a of the motor 112, and the application disk 111 is rotated by driving the motor 112.
  • the coating liquid supply disk rotating motors 114 and 114 are fixed to the fixed plate 104 via a pivot 115 extending in the front-rear direction, and the rotating shaft 114a is disposed in the horizontal direction.
  • the coating liquid supply disks 113 and 113 include a shaft 113a that is disposed in the vertical direction on the opposite side of the conveyor 102 with the coating disks 111 and 111 therebetween, and extends in the horizontal direction.
  • the shaft 113a of the coating liquid supply disk 113 is connected to the rotating shaft 114a of the motor 114, and the coating liquid supply disk 113 is rotated by driving the motor 114.
  • the shaft 113 a of the coating liquid supply disk 113 is positioned below the lower surface of the coating disk 111, and the upper side surface on the coating disk 111 side of the coating liquid supply disk 113 is in contact with the peripheral surface of the coating disk 111.
  • a box-shaped liquid supply container 117 for storing the film forming liquid 116 containing the resin component is provided below the coating liquid supply disk 113, and the lower end portion of the coating liquid supply disk 113 is inserted from above the liquid supply container 117. Then, it is immersed in the film forming liquid 116. With the rotation of the coating liquid supply disk 113, the film forming liquid 116 moves from the lower end portion of the coating liquid supply disk 113 to the upper part of the coating liquid supply disk 113 and is supplied to the outer peripheral surface of the coating disk 111. .
  • a ball screw mechanism 120 is connected to the lower end portion of the fixed plate 104.
  • the ball screw mechanisms 120 and 120 include motors 121 and 121 arranged below the conveyor 102.
  • the motor 121 includes a rotation shaft (not shown) extending in the horizontal direction that is separated from the conveyor 102, and a male screw 122 extending in the horizontal direction is connected to the rotation shaft. Further, a cylindrical female screw body 123 is fitted to the male screw 122, and the lower end center portion of the fixing plate 104 is connected to the female screw body 123.
  • a method for applying the film forming liquid 116 to the end surface 130a of the printed circuit board 130 using the above-described coating apparatus will be described.
  • the operation switch 103a of the operation unit 103 is operated to rotate the motor 121 forward and backward to adjust the left and right positions of the coating mechanisms 110 and 110 so as to match the left and right width of the printed circuit board 130.
  • the printed circuit board 130 is placed on the conveyor 102 on the carry-in port 101a side, and the operation switch 103a is operated to drive the conveyor 102, the motors 112 and 112, and the motors 114 and 114.
  • the printed circuit board 130 is conveyed to the coating mechanism 110 by the conveyor 102, and the left and right end surfaces 130a and 130a come into contact with the peripheral surfaces 111b and 111b of the coating disks 111 and 111, respectively.
  • the film forming liquid 116 adhering to the peripheral surfaces 111 b and 111 b of the application disks 111 and 111 is applied to the left and right end surfaces 130 a and 130 a of the printed circuit board 130.
  • the film forming liquid 116 is applied to the entire left and right end faces 130a, 130a of the printed circuit board 130.
  • the printed circuit board 130 is unloaded from the carry-out port 101b, and the resin contained in the film forming liquid 116 Allow ingredients to cure.
  • the coating apparatus it is possible to apply the film forming liquid 116 to the both end surfaces 130a and 130a of the printed circuit board 130 by the application disks 111 and 111, and form a coating film on the both end surfaces 130a and 130a of the printed circuit board 130. became.
  • the film forming liquid 116 is supplied to the outer peripheral surfaces 111b and 111b of the coating disks 111 and 111 through the supply disks 113 and 113, and adheres to the outer peripheral surfaces 111b and 111b of the coating disks 111 and 111. Since the film forming liquid 116 is applied to the end faces 130 a and 130 a of the printed circuit board 130, the supply state of the film forming liquid 116 to the outer peripheral surface 111 b of the application disk 111 is likely to vary.
  • the coating apparatus is configured to apply the film forming liquid 116 only to the end surface 130a of the printed circuit board 130, and the film forming liquid cannot be thinly and uniformly applied to the peripheral portion including the substrate end surface. There was a problem.
  • the present invention has been made in view of the above problems, and can form a coating film with a thin and uniform film thickness on the peripheral portion including the end face of the substrate, and can stably form a coating film with little film thickness fluctuation.
  • An object is to provide a coating apparatus, a coating head, and a coating method that can be formed.
  • a coating apparatus (1) is a coating apparatus that applies a liquid to a peripheral portion including an end face of a substrate, and includes a supporting means for supporting the substrate, and an end portion of the substrate.
  • a coating means having a pair of coating heads arranged to face each other with a gap into which the film can be inserted, a moving means for moving the coating means, and a liquid supply means for supplying a film forming liquid to the pair of coating heads The movement of the pair of coating heads along the peripheral edge of the substrate with the end of the substrate supported by the support means being inserted into the gap between the pair of coating heads.
  • Control means for controlling the means, wherein the pair of coating heads has a liquid reservoir for storing the film-forming liquid on opposite surfaces of the pair of coating heads, and an end of the substrate that has passed through the liquid reservoir. Apply the film-forming solution adhering to the part in a thin film It is characterized in that it comprises a coating unit for.
  • the end of the substrate supported by the support means is inserted into the gap between the pair of coating heads, and the liquid reservoirs of the pair of coating heads are inserted.
  • the pair of coating heads can be moved along the peripheral edge of the substrate while supplying the film forming liquid. That is, after passing the end portion of the substrate through the film forming liquid stored in the liquid reservoir, the film forming liquid attached to the end portion of the substrate is applied in a thin film form at the coating portion.
  • the pair of coating heads can be moved along the peripheral edge of the substrate.
  • the film forming liquid stored in the liquid reservoir is configured to pass the end of the substrate, the film forming liquid can be sufficiently adhered to the end of the substrate, After the film forming liquid is uniformly applied to the edge of the substrate, it can be applied in a thin film at the coating portion. Therefore, the film forming liquid can be applied thinly and uniformly on the upper and lower surfaces of the peripheral edge of the substrate and the end surface (side surface) of the substrate.
  • coating with little variation in coating quality such as film thickness variation can be continuously performed, and a frame-shaped homogeneous coating can be accurately formed on the peripheral edge of the substrate. Therefore, the generation of dust due to the collapse of the end face portion of the substrate can be prevented and the peripheral portion of the substrate can be reinforced by the coating film, the handling property of the substrate can be improved, and defective products of the substrate are generated. The rate can be reduced.
  • the coating apparatus (2) is the coating apparatus (1), wherein the coating unit is configured to remove the film forming liquid adhering to the end of the substrate. And a scraping portion for scraping off the excessive film forming liquid adhering to the end portion of the substrate that has passed through the trowel portion.
  • the film-forming liquid adhering to the end of the substrate that has passed through the liquid reservoir is a uniform film. After spreading the film thickly, the excess film forming liquid adhering to the substrate can be surely scraped off, and the film forming liquid can be applied thinly and uniformly.
  • the coating apparatus (3) according to the present invention is characterized in that, in the coating apparatus (1) or (2), the coating means includes a turning mechanism for turning the pair of coating heads. Yes.
  • the pair of coating heads can be swung by the swivel mechanism, for example, when a film forming liquid is coated on the peripheral edge of a rectangular substrate,
  • the direction of the pair of coating heads can be set to the same direction on each side of the substrate, and stable coating can be performed in the same state on each side of the substrate.
  • the coating apparatus (4) according to the present invention is characterized in that, in the coating apparatus (3), the swiveling mechanism section is equipped with a slide mechanism section that slides the pair of coating heads in a horizontal direction. .
  • the pair of coating heads can be slid in the horizontal direction with respect to the swivel mechanism. Therefore, the position control of the pair of coating heads with respect to the end surface of the substrate, such as fine adjustment of the position of the pair of coating heads, for example, fine adjustment of the width of the end of the substrate inserted into the gap between the pair of coating heads. Can be performed with higher accuracy.
  • a plurality of the coating means are disposed around the support means, and the moving means is supported by the support means.
  • the plurality of coating means are moved along the side of the substrate, and the control means controls the moving means so as to move the plurality of coating means along the side of the substrate. It is characterized by being.
  • the coating apparatus (5) it becomes possible to apply the peripheral portion of the substrate by the plurality of applying means, and the time for applying the entire periphery of the substrate can be greatly shortened. Can be increased.
  • the moving means is capable of moving in two directions: a side direction of the substrate and a direction intersecting the side direction. It is characterized by having a shaft linear motion mechanism.
  • each side of the substrate can be repeatedly coated in a stable operation by moving the respective coating means in the biaxial direction by the biaxial linear movement mechanism.
  • the coating apparatus (7) is arranged below any of the coating apparatuses (1) to (6) below a liquid storage section for storing the film forming liquid and the pair of coating heads. And a transfer means for transferring the film forming liquid received by the liquid receiving part to the liquid storage part.
  • the film forming liquid leaking from the pair of coating heads is received by the liquid receiving part and transferred to the liquid storage part by the transfer means. It can be circulated and used repeatedly, and the film forming solution can be used without waste.
  • the coating apparatus (8) includes a pad portion that is in contact with the gap between the pair of coating heads, and a lower portion of the pad section in any of the coating apparatuses (1) to (7).
  • a coating head protector further comprising: a liquid receiving portion provided; and a pad portion and a support portion that supports the liquid receiving portion, wherein the coating head protector retracts the pair of coating heads. It is characterized by being installed in a position.
  • the gap portion of the pair of coating heads is placed on the pad portion of the coating head protector. It can be made to contact. Therefore, it is possible to prevent the film forming liquid from drying and clogging due to the drying in the gap portion, and the film forming liquid can be applied to the substrate in a good state without drying or clogging. Can be continued.
  • the coating apparatus (9) includes a drying means for drying the film forming liquid applied to the peripheral portion of the substrate in any one of the coating apparatuses (1) to (8). It is characterized by.
  • the film forming liquid can be dried immediately after the film forming liquid is applied by the drying means, and the workability thereafter can be improved.
  • the effect of preventing poor coating such as peeling can be enhanced.
  • the coating apparatus (10) includes a positioning unit that positions and arranges the substrate before being supported by the support unit in a predetermined position in any of the coating apparatuses (1) to (9), And a substrate transfer means for transferring the substrate positioned by the positioning means to the support means and transferring the substrate coated with the film forming liquid from the support means.
  • the coating apparatus (10) after positioning the substrate by the positioning means, the substrate is transferred to the support means by the substrate transfer means, so that the substrate transferred to the support means Therefore, it is possible to perform coating with high accuracy without variation in the coating width of the film forming liquid.
  • the substrate transfer means includes a first transfer unit and a second transfer unit, and the first substrate holding unit. And the second substrate holding part are configured so that the operation of transferring the substrate to the support means and the operation of transferring the substrate from the support means are performed in parallel. It is a feature.
  • the substrate transport efficiency is increased. Can do.
  • An application head (1) is an application head for applying a liquid to a peripheral portion including an end surface of a substrate, and is disposed to face each other with a gap into which the end portion of the substrate can be inserted.
  • An upper liquid reservoir section formed on a surface facing the lower head, and a liquid supply path for supplying a film forming liquid to the upper liquid reservoir section.
  • an upper scraper provided adjacent to the upper liquid reservoir, and an upper scraping portion provided adjacent to the upper iron, where the lower head faces the upper liquid reservoir. It comprises a formed lower liquid reservoir, a lower iron provided adjacent to the lower liquid reservoir, and a lower scraping portion provided adjacent to the lower iron. It is said.
  • the film forming liquid is supplied from the liquid supply path to the upper liquid collecting part, and the film forming liquid is stored in the upper liquid storing part and the lower liquid storing part. Can be in a state. Then, an end portion of the substrate is inserted into the gap between the upper head and the lower head, and the end portion of the substrate is added to the film forming liquid stored in the upper liquid reservoir portion and the lower liquid reservoir portion. By passing, the film forming liquid can be sufficiently adhered to the end portion of the substrate so as not to be uneven.
  • the upper and lower iron parts spread the film forming liquid adhering to the edge of the substrate to a uniform film thickness, and then the upper scraping part and the With the lower scraping portion, it is possible to scrape off the excessive film forming liquid adhering to the substrate, and it is possible to form a thin film-like coating film with little variation in film thickness. Therefore, the film forming liquid can be applied thinly and uniformly on the upper and lower surfaces of the peripheral edge of the substrate and the end face (side surface) of the substrate, and a frame-shaped homogeneous coating film is accurately applied to the peripheral edge of the substrate. Can be formed.
  • a plurality of minute grooves are formed on a surface of the upper iron part and / or the lower iron part. It is a feature.
  • the coating head (2) since a plurality of micro grooves are formed on the upper and / or lower iron part, the iron is caused by the surface tension of the film forming liquid.
  • the film forming solution is easy to spread on the surface, and it becomes easy to stably form a thin and uniform film thickness.
  • the upper iron part is configured to be detachable from the upper head
  • the lower iron part is the lower side. It is characterized by being configured to be detachable from the head.
  • the upper iron part and the lower iron part can be attached to and detached from the upper head and the lower head, respectively, as necessary.
  • the upper iron part and the lower iron part according to the film thickness of the coating film can be attached, the film thickness can be adjusted accurately, and maintenance can be easily performed. .
  • the coating head (4) according to the present invention is the coating head (1) to (3), wherein the upper head is fixed to the lower head, and the fixing member A movable member attached so that the position thereof can be adjusted in the vertical direction, the upper liquid reservoir portion is formed in the movable member, and the upper iron portion and the upper scraping portion are provided in the movable member. It is characterized by that.
  • the moving member can be moved in the vertical direction with respect to the fixed member to adjust the position, so that the thickness of the substrate to be coated and the thickness of the coating film to be formed can be adjusted. Accordingly, it is possible to arbitrarily adjust the height position of the moving member, and it is possible to apply various film thicknesses to substrates having various thicknesses.
  • the coating head (5) according to the present invention is the coating head (1) to (3), wherein the upper head is fixed to the lower head, and the fixing member Two moving members attached so that the position of the upper liquid reservoir can be adjusted in the vertical direction, the upper liquid reservoir portion is formed on the fixed member, and the upper iron portion is attached to one moving member provided alongside the upper liquid end portion.
  • the upper scraping portion is provided on the other moving member provided to the one moving member.
  • the one moving member and the other moving member can be individually moved in the vertical direction to be attached to the fixed member by adjusting the position.
  • the height position of the one moving member equipped with the upper iron part and the other moving member equipped with the upper scraping part can be adjusted individually and can be applied to various thicknesses of the substrate.
  • the coating head (6) is the coating head (1) to (3), wherein the upper head is fixed to the lower head, and the fixing member A movable member that is attached so that its position can be adjusted in the vertical direction, and the movable member is attached to the fixed member while being urged downward by the urging means, and the upper liquid reservoir and the upper iron are attached. And the upper scraping portion are provided on the moving member.
  • the moving member can be attached to the fixed member so that the position of the movable member can be adjusted in the vertical direction. Therefore, depending on the thickness of the substrate to be coated and the thickness of the coating film to be formed, The height position of the moving member can be arbitrarily adjusted, and it becomes possible to apply various film thicknesses to various thickness substrates. Further, since the moving member is attached to the fixing member while being urged downward by the urging means, the gap size between the upper head and the lower head has a certain width. If it is within the range of the gap size, it can be appropriately applied even to substrates having different thicknesses.
  • the moving member includes a first member and a second member, and the first member is fixed to the fixed member.
  • the second member is attached to the first member in a state where it is urged downward by the urging means, and the upper liquid is attached.
  • the reservoir, the upper iron part, and the upper scraping part are provided on the two members.
  • the first member can easily adjust the vertical mounting position relative to the fixed member, and the second member into which the end of the substrate is inserted. Since only the upper iron part and the upper scraping part provided on the second member can be attached in a state of being biased downward, the film is formed even on substrates having different thicknesses.
  • the liquid can be applied thinly and uniformly.
  • the coating head (8) according to the present invention is characterized in that, in any one of the coating heads (1) to (7), the upper head includes a liquid discharge path for discharging the film forming liquid. Yes.
  • the excess film forming liquid supplied to the upper liquid reservoir can be appropriately discharged from the liquid discharge path, and the upper head and the lower head Unnecessary dripping from the gap can be prevented.
  • the coating method (1) according to the present invention is a coating method in which a film forming liquid is applied to the peripheral portion including the end face of the substrate, and is arranged to face each other with a gap into which the end portion of the substrate can be inserted. Inserting the end of the substrate into the gap between the pair of coating heads, and supplying the film forming liquid to a liquid reservoir formed on the opposing surface of the pair of coating heads, And an application step of forming a coating film on the peripheral edge of the substrate by moving along the peripheral edge of the substrate, the application step being a coating portion provided alongside the liquid reservoir, It is characterized by comprising a step of coating the film forming liquid adhering to the substrate that has passed through the portion into a thin film.
  • the film-forming liquid can be thinly and uniformly applied to the upper and lower surfaces of the peripheral portion of the substrate and the end surface of the substrate, and a frame-shaped coating film is applied to the peripheral portion of the substrate.
  • the coating method (2) according to the present invention is characterized in that, in the coating method (1), each side of the substrate is coated simultaneously using a plurality of coating heads.
  • the coating method (2) since each side of the substrate is coated in parallel using a plurality of coating heads, the time for coating the entire circumference of the substrate can be greatly shortened. The efficiency of the process can be increased.
  • FIG. 3 is a front view of the coating head viewed from the direction of arrow A in FIG. 2.
  • FIG. 4 is a sectional view taken along line IV-IV in FIG. 3.
  • FIG. 5 is a sectional view taken along line VV in FIG. 3. It is an exploded bottom view of an upper head.
  • FIG. 7 is a sectional view taken along line VII-VII in FIG. 3.
  • FIG. 16 is a cross-sectional view taken along line XVI-XVI in FIG. 15.
  • FIG. 16 is a sectional view taken along line XVII-XVII in FIG. 15.
  • FIG. 16 is a sectional view taken along line XVIII-XVIII in FIG. 15. It is an exploded bottom view of an upper head. It is a disassembled front view of an upper head.
  • FIG. 16 is a sectional view taken along line XXI-XXI in FIG. 15. It is a top view for demonstrating operation
  • FIG. 1 is a side view in which the casing is omitted to show the internal mechanism of the coating apparatus according to the embodiment (1)
  • FIG. 2 is the casing omitted to show the internal mechanism of the coating apparatus. It is the front view shown.
  • the coating apparatus 1 includes a support table 10 that supports the substrate 2, a coating unit 20 that includes a pair of coating heads 21 including an upper head 22 and a lower head 23, and a moving unit 40 that moves the coating unit 20. It is configured.
  • the coating apparatus 1 includes a liquid supply unit 50 for supplying a film forming liquid 51 containing a resin component to a pair of coating heads 21, a drying furnace 60 for drying the film forming liquid 51 applied to the substrate 2, and various parts of the apparatus.
  • the support table 10 is disposed between the transport rails 12 disposed in parallel with the transport direction of the substrate 2.
  • the transport rail 12 is configured to be slidable on the fixed rail 11 disposed in parallel with the transport direction of the substrate 2 by a linear mechanism or the like.
  • the support table 10 is supported by an elevating mechanism 13 so as to be movable up and down, and the elevating mechanism 13 is attached to a support member 14 installed between the fixed rails 11.
  • the fixed rail 11 is fixed to a housing (not shown).
  • the elevating mechanism 13 When the transport rail 12 slides on the fixed rail 11 and the substrate 2 placed on the transport rail 12 is transported onto the support table 10, the elevating mechanism 13 is operated next, and the transport rail 12 is moved.
  • the support table 10 positioned below the upper surface is raised, and the substrate 2 is raised to a predetermined application position while being supported on the support table 10. Further, after the application, the elevating mechanism 13 is operated, the support table 10 is lowered, and the substrate 2 is placed on the transport rail 12.
  • the support table 10 is provided with a suction mechanism (not shown) so that the substrate 2 can be sucked onto the upper surface of the support table 10.
  • a suction mechanism a structure in which a plurality of air intake holes are provided in the support table 10 and a vacuum pump is connected to the air intake holes via an air tube can be employed.
  • the moving unit 40 includes a two-axis (XY-axis) linear motion mechanism that horizontally moves the coating unit 20 in two-axis (XY-axis) directions.
  • the X-axis cylinder 41 and the X-axis cylinder 41 are fixed to a housing (not shown).
  • the Y-axis cylinder 42 is slidably connected to one end of the Y-axis. Yes.
  • the coating unit 20 is attached to the Y-axis slider 43.
  • the support guide 44 is fixed to a housing (not shown). The operations of the Y-axis cylinder 42 and the Y-axis slider 43 are controlled by the control unit 70.
  • the coating unit 20 includes a turning mechanism unit 30 and a pair of coating heads 21.
  • the turning mechanism 30 includes a connecting member 31 connected to the Y-axis slider 43, a turning motor 32 attached to the connecting member 31, a rotating shaft 33 connected to a rotating shaft 32a of the turning motor 32 extending in the vertical direction, And a swivel arm 34 having one end connected to the rotating shaft portion 33, and the pair of coating heads 21 can be swung around the rotating shaft 32 a of the swiveling motor 32.
  • the rotating shaft portion 33 is configured to include a rotating shaft 33a and a ball bearing (not shown) that rotatably supports the rotating shaft 33a, and the upper end side of the rotating shaft 33a is connected to the rotating shaft 32a of the turning motor 32 to rotate.
  • the lower end side of the shaft 33 a is connected to the turning arm 34.
  • the swivel arm 34 includes an arm portion 34a extending in the horizontal direction, and a pair of application heads 21 are slid in the longitudinal direction (horizontal direction) of the arm portion 34a at the lower surface intermediate portion of the arm portion 34a.
  • a slide mechanism 35 is provided.
  • the slide mechanism 35 includes an electric linear motion guide mechanism or the like, and a connecting member 36 for attaching the pair of application heads 21 is attached to the slide mechanism 35.
  • a sensor for example, a U-shaped photosensor (not shown) for detecting the turning stop position of the turning arm 34 is disposed around the rotation shaft portion 33 at intervals of 90 degrees.
  • a light shielding plate (not shown) installed on the turning arm 34 blocks the light receiving part of the sensor, and the stop position is detected.
  • FIG. 3 is a front view of the pair of coating heads 21 as viewed from the direction of arrow A in FIG. 2, and FIG. 4 is a sectional view taken along line IV-IV in FIG. 5 is a cross-sectional view taken along the line VV in FIG. 3, showing the bottom surface of the upper head (the surface facing the lower head), and FIG. 6 is an exploded bottom view of the upper head.
  • FIG. 7 is a cross-sectional view taken along the line VII-VII in FIG. 3, showing the upper surface of the lower head (the surface facing the upper head). Note that an arrow B in the figure indicates the moving direction of the coating head 21.
  • the coating head 21 includes an upper head 22 and a lower head 23 that are opposed to each other vertically with a gap into which the end of the substrate 2 can be inserted. Below the coating head 21, a liquid receiving portion 24 fixed to the lower head 23 is disposed.
  • the coating head 21 and the liquid receiving part 24 are made of a metal material such as corrosion-resistant stainless steel. Further, the surface of the coating head 21 (at least the film forming liquid flow path surface) is subjected to surface processing such as ceramic processing.
  • the upper head 22 includes a fixing member 22A fixed to the lower head 23 and a moving member 22B fixed to the fixing member 22A so as to be movable in the vertical direction.
  • a gap into which the end of the substrate 2 can be inserted is formed between the moving member 22B of the upper head 22 and the lower head 23, and the opposing surfaces of the fixing member 22A and the lower head 23 are fixed in close contact with each other. Yes.
  • An inclined guide portion 22a, an upper liquid reservoir portion 22b, an upper iron member (trowel portion) 22c, and an upper scraper portion (scraping portion) 22d are provided on the bottom surface of the moving member 22B (adjacent to each other). Is provided).
  • An upper liquid reservoir 22b, a liquid discharge groove 22e leading from the upper liquid reservoir 22b to the back surface of the fixing member 22A, and a bolt member (not shown) fixed to the lower head 23 are passed through the bottom surface of the fixing member 22A. For this purpose, a through hole 22f is formed.
  • a mounting hole 22h of a joint 22g for supplying the film forming liquid 51 is formed on the back surface of the fixing member 22A.
  • the mounting hole 22h is connected to a liquid supply path 22i formed inside, and the liquid supply path 22i is
  • the film forming liquid 51 is connected to the injection hole 22j formed in the upper liquid reservoir 22b of the moving member 22B and is supplied to the upper liquid reservoir 22b.
  • the inclined guide portion 22a is provided in order to easily guide the end portion of the substrate 2 in the gap between the upper head 22 and the lower head 23, and has a structure inclined about 30 degrees with respect to the horizontal plane.
  • the upper liquid reservoir portion 22b provided alongside the inclined guide portion 22a spans the moving member 22B and the fixed member 22A, that is, a substantially rectangular shallow groove extending from the front side end of the moving member 22B to the vicinity of the center of the fixed member 22A. It is formed in a shape.
  • the injection hole 22j formed in the upper liquid reservoir 22b can be individually covered with a screw member (not shown).
  • a screw member not shown
  • the width of the liquid film applied to the end of the substrate 2 is narrow (3 mm (When 5 mm to 10 mm)
  • the injection hole 22j near the fixing member 22A is covered (not shown), and when the width of the liquid film applied to the end of the substrate 2 is wide (when 5 mm to 10 mm), 2
  • the two injection holes 22j can be used without being covered, and the injection amount and the injection position can be adjusted according to the width of the liquid film applied to the end of the substrate 2.
  • a concave portion 22k is formed next to the upper liquid reservoir portion 22b of the moving member 22B, an upper iron member 22c is disposed near the upper liquid reservoir portion 22b of the concave portion 22k, and the wall portion at the rear end of the concave portion 22k is the upper scraper portion. It is configured to function as 22d.
  • the upper iron member 22c is provided in the upper liquid reservoir 22b, has a function of spreading to a uniform film thickness by being in close contact with the film forming liquid 51 attached to the substrate 2, and a plate-like metal having a substantially square shape in plan view.
  • a member is provided with a iron surface 22l and a mounting hole 22n for a bolt 22m, and is detachably fixed to a recess 22k of the moving member 22B with a bolt 22m.
  • a plurality of minute grooves are formed on the iron surface 22l in a direction parallel to the moving direction B of the coating head 21.
  • the interval and depth of the microgrooves can be appropriately set according to the characteristics such as the viscosity and the film thickness of the film forming liquid 51 to be used. For example, when a coating film having a thickness of about 10 ⁇ m to 50 ⁇ m is formed, it is preferable to use a film in which the groove center interval is set to about 0.2 mm to 0.3 mm and the groove depth is set to about 0.05 mm to 0.1 mm. preferable.
  • the upper scraper portion 22d has a function of scraping off excess film forming liquid 51 adhering to the substrate 2 that has passed through the upper iron member 22c, and the wall portion at the rear end of the recess 22k is applied to the coating head 21 (moving member).
  • 22B) is inclined at a predetermined angle ⁇ 1 (for example, around 30 degrees) to the rear side with respect to a plane orthogonal to the front surface.
  • the cutting of the blade portion is performed so that the height of the blade portion constituting the upper scraper portion 22d is about 100 ⁇ m lower than the upper surface of the bank portion of the upper liquid reservoir portion 22b (so that the gap is widened).
  • the height of the said blade part can be set according to the thickness of a coating film.
  • the liquid discharge groove 22e is formed so as to communicate from the end of the upper liquid reservoir 22b on the fixing member 22A side to the back surface of the fixing member 22A, and excess film forming liquid 51 supplied to the upper liquid reservoir 22b is discharged. It is discharged from the groove 22e to the outside.
  • two long holes 22o that are long in the vertical direction are formed on the front surface of the moving member 22B of the upper head 22, and screw holes are respectively formed on the side surfaces of the fixing member 22A facing the long holes 22o. (Not shown) is formed, and the moving member 22B is fixed to the fixing member 22A with bolts 22p.
  • the moving member 22B can be moved vertically with respect to the fixed member 22A by the long hole 22o, and the fixed position of the moving member 22B is formed so as to form a gap according to the thickness of the substrate 2 to be coated. Can be finely adjusted up and down.
  • an inclined guide portion 23a, a lower liquid reservoir portion 23b, a lower iron member 23c, and a lower scraper portion 23d are provided on the upper surface of the lower head 23.
  • a mounting hole 23e for fixing a bolt (not shown) passed through the through hole 22f of the head 22 is formed.
  • a suspension member 23g for suspending the coating head 21 on the support portion 25 is erected on the upper surface of the lower head 23, and a liquid receiving portion 24 is attached to the back surface of the lower head 23.
  • a mounting hole 23h and a liquid discharge groove 23f are formed.
  • a screw hole 23i for attaching the connecting bolt 26 is formed in the upper part of the rod-like suspension member 23g.
  • the inclined guide portion 23a is provided in order to easily guide the end portion of the substrate 2 in the gap between the upper head 22 and the lower head 23, and has a structure inclined about 30 degrees with respect to the horizontal plane.
  • the lower liquid reservoir portion 23b provided along with the inclined guide portion 23a is formed in a substantially rectangular shallow groove shape from the front side end portion of the lower head 23 to the vicinity of the center, and is the same as the position facing the upper liquid reservoir portion 22b. It is formed in size.
  • a hole 23j is formed adjacent to the lower liquid reservoir 23b of the lower head 23, a lower iron member 23c is disposed near the lower liquid reservoir 23b of the hole 23j, and the rear of the hole 23j.
  • the end wall portion is configured to function as the lower scraper portion 23d.
  • the lower trowel member 23c is provided alongside the lower liquid reservoir 23b, has a function of spreading the film to a uniform thickness by being in close contact with the film forming liquid 51 attached to the substrate 2, and is applied to the thin plate-like metal member.
  • the surface 23k and the mounting hole 23m of the bolt 23l are formed, and are detachably fixed to the recess 23n formed on the upper surface of the lower head 23 with the bolt 23l.
  • a plurality of minute grooves are formed in a direction parallel to the moving direction B of the coating head 21.
  • the interval and depth of the microgrooves can be appropriately set according to the characteristics such as the viscosity and the film thickness of the film forming liquid 51 to be used.
  • the groove center interval is set to about 0.2 mm to 0.3 mm and the groove depth is set to about 0.05 mm to 0.1 mm. preferable.
  • the lower scraper portion 23d has a function of scraping off excess film forming liquid 51 adhering to the substrate 2 that has passed through the lower liquid retaining portion 23b and the lower iron member 23c, and is provided at the rear end of the hole portion 23j.
  • the wall portion is inclined to the rear side by a predetermined angle ⁇ 2 (for example, around 30 degrees) with respect to the surface orthogonal to the front surface of the coating head 21 (lower head 23). By this inclination, the film forming liquid 51 scraped from the lower surface of the end portion of the substrate 2 can be scraped to the end surface side of the substrate 2 and poured into the liquid receiving portion 24 from the hole 23j.
  • the width can be controlled to be constant.
  • the height of the blade portion constituting the lower scraper portion 23d is about 100 ⁇ m lower than the upper surface of the bank portion of the lower liquid reservoir portion 23b (so that the gap is widened). Processing has been done.
  • the height of the said blade part can be set according to the thickness of a coating film.
  • a coating portion is formed including the upper iron member 22c, the upper scraper portion 22d, the lower iron member 23c, and the lower scraper portion 23d.
  • the liquid discharge groove 23f is formed at the approximate center of the back surface of the lower head 23, and the film forming liquid 51 discharged from the liquid discharge groove 22e of the upper head 22 passes through the liquid discharge groove 23f to the lower liquid receiving portion 24. It is designed to be poured.
  • the liquid receiving portion 24 includes a rectangular tray 24a in plan view and a mounting plate 24b extending upward from one side surface of the tray 24a.
  • the upper portion of the mounting plate 24b is a mounting hole 23h on the back surface of the lower head 23.
  • a tube 55 is connected to a recovery port 24c formed on the bottom surface of the tray 24a via a joint 24d.
  • the saucer 24a is attached to the lower head 23 in a slightly inclined state so that the collection port 24c side is downward.
  • FIG. 8 is a plan view showing a state in which the coating head 21 is retracted to the position of the coating head protector 27, and
  • FIG. 9 is a partial front view seen from the direction C in FIG.
  • the coating head protector 27 includes a pedestal 27a installed on a base (not shown) in the coating apparatus 1, a strip-shaped plate 27b having a substantially L-shaped side surface standing on the pedestal 27a, and an upper portion of the strip-shaped plate 27b. And a pad unit 27c attached to the head.
  • a magnet (not shown) is provided on the bottom surface of the pedestal 27a, and is fixed to the pedestal by the magnet.
  • the pad unit 27c includes a belt-plate-like attachment portion 27d attached to the belt-like plate 27b, an extending piece 27e extending obliquely in a plan view from an upper portion of one side of the attachment portion 27d, an upper portion of the attachment portion 27d, and Pad holding portions 27f attached to the extending pieces 27e, pad members 27g held by the respective pad holding portions 27f, and a liquid receiving portion having a rectangular tray shape disposed at the lower end of the attaching portion 27d 27h.
  • the angle ⁇ 3 formed by the upper end of the mounting portion 27d and the extending piece 27e is set to be substantially the same as the angle ⁇ 4 formed by the front surface (surface through which the substrate passes) of the coating head 21 and the scraper portions (22d, 23d).
  • the pad member 27g is brought into contact with a gap portion in front of the coating head 21 and a gap portion between the scraper portions (22d, 23d).
  • the pad holding portion 27f has an approximately U-shaped opening.
  • the pad member 27g is made of a porous material having a liquid absorbing property such as sponge, and is detachably fitted into the pad holding portion 27f. Since the pad member 27g has a substantially rectangular parallelepiped shape, the four surfaces of the side surface of the pad member 27g can be made into contact surfaces with the coating head 21 by changing the surface to be fitted into the pad holding portion 27f. .
  • the liquid supply unit 50 includes a liquid storage unit 52 that stores the film formation liquid 51, an electric pump 53 that supplies the film formation liquid 51 from the liquid storage unit 52 to the coating head 21 via the tube 54, and a liquid receiver An electric pump 56 that transfers (collects) the film forming liquid 51 received by the section 24 to the liquid storage section 52 via the tube 55 is configured.
  • the film forming liquid 51 in the liquid storage part 52 is supplied to the upper head 22 of the coating head 21 via the pump 53 and the tube 54, and the film forming liquid 51 received by the liquid receiving part 24 is supplied to the tube.
  • the liquid is stored in the liquid storage portion 52 via the pump 55 and the pump 56.
  • the film forming liquid 51 has a characteristic (resistance to acid and / or alkali) that does not peel off in the substrate processing step (etching step, plating step, etc.), and a plurality of resin components are used so as to have excellent adhesion to the substrate surface.
  • Liquids prepared according to the intended use such as a coating agent containing a water-based urethane resin, a water-based styrene resin and a water-based thickener can be used for a mixed solvent, for example, an aqueous medium solvent.
  • a drying furnace 60 is provided behind the coating unit 20.
  • the substrate 2 coated by the coating unit 20 is placed on the transport rail 12 and transported into the drying furnace 60, and is unloaded from the drying furnace 60 after a predetermined drying time has elapsed.
  • a heat insulating material 61 is disposed on the inner wall surface of the drying furnace 60, a rod-shaped fin heater 62 is disposed in the drying furnace 60 in a cross beam shape, and air is supplied to the drying furnace 60 on the inner surface of the drying furnace 60.
  • a supply pipe 63 in which supply holes (not shown) for feeding into the inside are formed at predetermined intervals is provided. The supply pipe 63 is connected to an air pump 64 outside the drying furnace 60.
  • the control unit 70 controls the slide movement of the transport rail 12, the XY axis linear movement control of the moving unit 40, the turning / sliding movement control of the coating unit 20, the lifting control of the support table 10 by the lifting mechanism 13, the suction control, and the liquid supply unit. It has a function of controlling each part of the coating apparatus 1 such as drive control of 50 pumps 53 and 56 and temperature control of the drying furnace 60.
  • the control unit 70 can be configured by one or a plurality of control units.
  • control unit 70 inserts the end portion of the substrate 2 supported by the support table 10 into the gap between the pair of coating heads 21 (the upper head 22 and the lower head 23), and the pair of coating heads 21 in that state.
  • the operation unit 80 includes a liquid crystal operation panel 81 and is attached to a housing (not shown). Through the liquid crystal operation panel 81, it is possible to perform various operations such as setting of operation conditions of each part of the coating apparatus 1, instruction of operation of each part, and switching of operation modes (manual, automatic, etc.). An operation signal or a setting signal input via the operation panel 81 is transmitted to the control unit 70 or the like.
  • the operation unit 80 setting of operating conditions such as the horizontal movement speed of the coating unit 20 by the XY axis linear movement mechanism of the movement unit 40, the feeding speed of the film forming liquid 51 by the pump 53 of the liquid supply unit 50, and the drying furnace 60 are performed.
  • the temperature inside the furnace and the drying time can be set by the fin heater 62.
  • the coating apparatus 1 according to the embodiment (1) Next, a method for applying the film forming liquid 51 to the peripheral portion of the substrate 2 using the coating apparatus 1 according to the embodiment (1) will be described.
  • a rectangular thin (several tens to hundreds of ⁇ m) copper-clad laminated substrate is used as an object to be coated will be described.
  • the object to be coated is not limited to this, and aluminum
  • Various substrates, such as a substrate, can be targeted for application.
  • the coating method using the coating apparatus 1 according to the embodiment (1) can be adopted as one step of the substrate manufacturing process.
  • the gap between the pair of coating heads 21 (the upper head 22 and the lower head 23) is adjusted and set. That is, a gap gauge (not shown) corresponding to a gap size (for example, substrate thickness + 10 ⁇ m) determined in consideration of the thickness of the substrate 2 to be coated, the thickness of the coating film, and the like is used as the moving member 22B of the upper head 22.
  • the moving member 22B is fixed to the fixing member 22A with a bolt 22p. Thereafter, the clearance gauge is pulled out to complete the adjustment and setting of the gap of the coating head 21, and the coating head 21 is attached to the support portion 25 with the connecting bolt 26.
  • the substrate 2 is placed at a predetermined position on the transport rail 12 moved to the carry-in side, and the operation unit 80 is operated to slide the transport rail 12 to the coating unit 20 side.
  • the transport rail 12 moves and the substrate 2 is moved to a position above the support table 10
  • the movement of the transport rail 12 stops, and then the lifting mechanism 13 operates to raise the support table 10.
  • the substrate 2 is supported on the support table 10, and the support table 10 is further raised to a predetermined position (the height position of the gap between the pair of coating heads 21 of the coating unit 20).
  • the suction mechanism (not shown) is also operated, and the substrate 2 is supported on the support table 10 while being sucked.
  • the liquid reservoirs (the upper liquid reservoir 22b and the lower liquid reservoir 23b) of the pair of coating heads 21 with the end of the substrate 2 being inserted into the gap between the pair of coating heads 21 is a step of moving the pair of coating heads 21 along the peripheral portions of the four sides of the substrate 2 while supplying the film forming solution 51 to the substrate.
  • FIG. 10 is a diagram for explaining a process of applying the peripheral edge portion of the substrate 2 with a pair of application heads 21.
  • the broken lines in the figure indicate the movement trajectories of the pair of application heads 21.
  • the coating head 21 is set at a position A, which is a predetermined retraction position, so that the direction of the end surface (right side 2a) of the substrate 2 matches the traveling direction of the coating head 21.
  • the Y-axis cylinder 42 of the moving unit 40 is moved in the a direction along the X-axis cylinder 41, whereby the pair of coating heads 21 are moved in the a direction, and the peripheral portion of the right side 2a of the substrate 2 in FIG.
  • the film forming solution 51 is applied to the substrate.
  • the end of the substrate right side 2a is inserted into the gap between the pair of coating heads 21, and the upper liquid reservoir 22b and The pair of coating heads 21 is moved in a state where the lower liquid reservoir 23b is filled with the film forming liquid 51.
  • the positions of the pair of application heads 21 are controlled so that the end of the substrate 2 does not protrude from the gap between the pair of application heads 21.
  • the slide mechanism 35 provided on the swivel arm 34 of the coating unit 20 is operated to move the pair of coating heads 21 away from the substrate 2.
  • the substrate is slid by about several mm in the (d direction), the pair of coating heads 21 are separated from the substrate 2, and the coating of the substrate right side 2a is completed.
  • the pair of coating heads 21 are separated from the substrate 2 at the B position in order to prevent the film forming liquid 51 from being applied twice to the corners of the substrate, but the pair of coating heads 21 are separated from the substrate 2 at the B position. It is also possible to apply the entire substrate right side 2a without being separated from the substrate.
  • the Y-axis cylinder 42 and the Y-axis slider 43 of the moving unit 40 are driven to move the pair of coating heads 21 to the C position, and then the pair of coating heads 21 slid by the slide mechanism 35 is restored to the original.
  • the turning motor 32 of the turning mechanism unit 30 is driven to turn the turning arm 34 counterclockwise by 90 degrees, and the direction of the end face (upper side 2b) of the substrate 2 and the traveling direction of the pair of coating heads 21 To match.
  • the Y-axis cylinder 42 and the Y-axis slider 43 of the moving unit 40 are driven to set the pair of coating heads 21 to the D position, and the Y-axis slider 43 is moved in the b direction along the Y-axis cylinder 42. Then, the pair of coating heads 21 are moved in the b direction, and the film forming liquid 51 is applied to the peripheral edge of the substrate upper side 2b by the same operation as the substrate right side 2a.
  • the slide mechanism 35 provided on the swivel arm 34 of the coating unit 20 is actuated in the same manner as the operation at the B position described above.
  • the coating head 21 is slid about several mm in the direction away from the substrate 2, the pair of coating heads 21 are separated from the substrate 2, and the coating of the substrate upper side 2 b is completed.
  • the moving unit 40 is driven to move the pair of application heads 21 to the F position, and then the pair of application heads 21 slid by the slide mechanism 35 are returned to their original positions, and the turning mechanism unit 30 is turned.
  • the turning arm 34 is turned 90 degrees counterclockwise, and the direction of the end face (left side 2c) of the substrate 2 and the traveling direction of the pair of coating heads 21 are matched.
  • the moving unit 40 is driven to set the pair of coating heads 21 to the G position, and the Y-axis cylinder 42 is moved along the X-axis cylinder 41 in the c direction, thereby moving the pair of coating heads 21 in the c direction.
  • the film forming liquid 51 is applied to the peripheral portion of the left side 2c of the substrate by the same operation as the upper side 2b of the substrate.
  • the slide mechanism 35 provided on the swivel arm 34 of the coating unit 20 is operated in the same manner as the operation at the B position described above, thereby The coating head 21 is slid about several millimeters in the direction away from the substrate 2, the pair of coating heads 21 are separated from the substrate 2, and the coating of the substrate left side 2 c is completed.
  • the moving unit 40 is driven to move the pair of coating heads 21 to the I position, and then the pair of coating heads 21 slid by the slide mechanism 35 are returned to their original positions.
  • the motor 32 is driven to turn the turning arm 34 counterclockwise by 90 degrees, so that the direction of the end surface (lower side 2d) of the substrate 2 matches the traveling direction of the coating head 21.
  • the moving unit 40 is driven to set the pair of coating heads 21 at the J position, and the Y-axis slider 43 is moved along the Y-axis cylinder 42 in the d direction, thereby moving the pair of coating heads 21 in the d direction.
  • the film forming liquid 51 is applied to the peripheral edge of the substrate lower side 2d by the same operation as the substrate left side 2c.
  • the slide mechanism 35 provided on the swivel arm 34 of the coating unit 20 is actuated in the same manner as the operation at the B position described above.
  • the coating head 21 is slid by about several millimeters in the direction away from the substrate 2, the pair of coating heads 21 is separated from the substrate 2, the coating of the lower side 2 d of the substrate is finished, and then the moving unit 40 is driven to drive the pair of coatings.
  • the coating head 21 slid by the slide mechanism 35 is returned to the original position, and the coating operation on the four sides of the substrate 2 is completed.
  • the turning motor 32 of the coating unit 20 is driven to turn the coating head 21 so that the direction of the end surface (right side 2 a) of the substrate 2 matches the traveling direction of the coating head 21, and
  • the shaft cylinder 42 and the Y-axis slider 43 are driven to set the pair of coating heads 21 at the position A.
  • a protective device 27 for the coating head is installed.
  • the pad member 27g of the coating head protector 27 abuts against the front surface (surface through which the substrate 2 is passed) of the coating head 21 and the scraper portions 22d and 23d, so that liquid leakage and drying from the clearance can be prevented. It has become.
  • the process proceeds to the drying process.
  • the elevating mechanism 13 is operated, the support table 10 is lowered, and the substrate 2 is placed on the transport rail 12. Thereafter, the transport rail 12 slides in the direction of the drying furnace 60, and the substrate 2 is transported into the drying furnace 60 set to a predetermined temperature. When a predetermined drying time has elapsed, the transport rail 12 moves, the substrate 2 is unloaded from the drying furnace 60, and the drying process is completed.
  • FIG. 11 is a view showing the vicinity of the peripheral edge of the substrate 2 coated using the coating apparatus 1 according to the embodiment (1), (a) is a partial perspective view, and (b) is in (a). It is a bb line sectional view.
  • a coating 51a made of a resin component is formed in a frame shape (end face and top and bottom faces) on the peripheral edge of the substrate 2.
  • the film thickness after drying of the coating film 51a can be controlled to be about 10 ⁇ m to 60 ⁇ m.
  • the application width of the upper and lower surfaces can be adjusted by the overlapping width between the pair of application heads 21 and the end of the substrate 2, and can be adjusted to about 1 mm to 10 mm.
  • the end of the substrate 2 supported by the support table 10 is inserted into the gap between the pair of coating heads 21, and the pair of coating heads 21.
  • the pair of coating heads 21 can be moved along the peripheral edge of the substrate 2 while supplying the film forming liquid 51 to the liquid reservoirs 22 b and 23 b. That is, after the end of the substrate 2 is passed through the film forming liquid 51 stored in the liquid reservoirs 22b and 23b, the film forming liquid 51 adhering to the end of the substrate 2 is applied to the iron members 22c and 23c serving as coating portions.
  • the pair of coating heads 21 can be moved along the peripheral edge of the substrate 2 while being applied in a thin film with the scraper portions 22b and 23b.
  • the substrate 2 since the end of the substrate 2 is passed through the film forming liquid 51 stored in the liquid reservoirs 22b and 23b, the substrate 2 is not affected by fluctuations in the supply amount due to pulsation of the pump 53 or the like.
  • the film forming liquid 51 can be sufficiently adhered to the end of the substrate, and the film forming liquid 51 is uniformly adhered to the end of the substrate 2 so that the film forming liquid 51 is thin and uniform with the trowel members 22c and 23c. After smoothing, the excessively deposited film forming liquid can be scraped off by the scraper portions 22d and 23d.
  • the film forming liquid 51 can be thinly and uniformly applied to the upper and lower surfaces of the peripheral edge of the substrate 2 and the end surface (side surface) of the substrate 2.
  • coating with little variation in coating film quality such as film thickness variation can be continuously performed, and a frame-like uniform coating film can be accurately formed on the peripheral edge of the substrate 2. Therefore, the generation of dust due to the collapse of the end surface portion of the substrate 2 can be prevented, the peripheral portion of the substrate 2 can be reinforced by the coating film, and the handling property of the substrate 2 in the subsequent process can be improved.
  • the defective product occurrence rate can be reduced.
  • the film forming solution 51 resistant to acids and alkalis it is possible to improve the workability and reduce the cost in the substrate processing step (etching step, plating step, etc.).
  • the film forming liquid 51 having plating resistance plating can be prevented from adhering to the peripheral portion of the substrate 2, masking of the peripheral portion of the substrate can be performed, and the work efficiency of masking can be improved. You can plan.
  • the pair of coating heads 21 can be swung by the swiveling mechanism unit 30, so that when the film forming liquid 51 is coated on the peripheral edge of the rectangular substrate 2,
  • the direction of the coating head 21 can be set to the same direction on each side of the substrate 2, and stable coating can be performed in the same state on each side of the substrate 2.
  • the pair of coating heads 21 can be slid in the horizontal direction with respect to the turning mechanism unit 30 by the slide mechanism 35. Therefore, the position control of the pair of coating heads 21 with respect to the end surface of the substrate 2 such as fine adjustment of the position of the pair of coating heads 21, for example, fine adjustment of the width of the end portion of the substrate 2 inserted into the gap between the pair of coating heads 21 is performed. It can be performed with higher accuracy.
  • the film forming liquid 51 leaked from the coating head 21 is received by the liquid receiving part 24, and the film forming liquid 51 collected in the receiving tray 24a is Since the liquid is collected in the liquid container 52 via 55, the film forming liquid 51 can be circulated and used repeatedly, and the film forming liquid 51 can be used without waste.
  • the application head protector 27 since the application head protector 27 is installed at the retracted position of the pair of application heads 21, the gap portion of the pair of application heads 21 is applied to the pad member 27g of the application head protector 27 at the retracted position. Can be touched. Therefore, it is possible to prevent the film forming liquid 51 from being dried or clogged in the gap portion between the pair of coating heads 21, and the coating onto the substrate 2 can be continuously performed.
  • the coating apparatus 1 since the coating apparatus 1 includes the drying furnace 60, the film forming liquid 51 can be dried immediately after the coating of the film forming liquid 51 by the drying furnace 60, and the workability thereafter can be improved. In addition, the effect of preventing coating defects such as peeling of the film forming liquid 51 can be enhanced.
  • the type of the substrate to be coated that can be handled by the coating apparatus 1 is not particularly limited, but is suitably applied to a substrate composed of various thin plate or film materials with a thickness of about several hundred ⁇ m to several tens ⁇ m. can do.
  • the moving unit 40 has a biaxial (XY axis) linear motion mechanism including an X axis cylinder 41, a Y axis cylinder 42, a Y axis slider 43, and a support guide 44.
  • XY axis X axis cylinder 41
  • Y axis cylinder 42 a Y axis cylinder 42
  • Y axis slider 43 a support guide 44
  • the form of the moving unit 40 is not limited to this form.
  • an XY axis robot type linear motion mechanism or various movement units (movement means) provided with the articulated robot mechanism etc. are employable.
  • the film forming liquid 51 is thinly and uniformly applied to the upper and lower surfaces of the peripheral portion of the substrate 2 and the end surface (side surface) of the substrate. It is possible to form a frame-like coating film on the peripheral edge of the substrate 2 with high accuracy. Therefore, the generation of dust due to the collapse of the end surface portion of the substrate 2 can be prevented in the substrate manufacturing process, and the peripheral portion of the substrate 2 can be reinforced with the coating film, thereby improving the handling property of the substrate 2 in the subsequent process. It is possible to reduce the generation rate of defective substrates.
  • the moving member 22B of the upper head 22 is configured to be movable in the vertical direction with respect to the fixed member 22A. It is not limited to this form, It can also be set as the structure which fixed the moving member 22B with respect to 22 A of fixed members. Also, the structure shown in FIG. 12 can be adopted.
  • FIG. 12 is a view showing a structure of an upper head 22C constituting a coating head according to another embodiment, where (a) is a bottom view and (b) is a plan view.
  • symbol is attached
  • An upper head 22C of a coating head includes a fixing member 22D and two moving members 22E and 22F.
  • the two moving members 22E and 22F are individually provided with respect to the fixing member 22D. It can be moved and fixed in the vertical direction.
  • An inclined guide portion 22a and an upper liquid reservoir portion 22b are formed on the bottom surface of the fixing member 22D, and an upper iron is provided on the bottom surface of one moving member 22E provided alongside the upper liquid end portion 22b of the fixing member 22D.
  • a portion 22q is formed, and an upper scraper portion 22r is formed on the bottom surface of the other moving member 22F attached to the moving member 22E.
  • the moving member 22E on which the upper iron part 22q is formed is fixed to the fixing member 22D so as to be movable in the vertical direction with bolts 22s, and the moving member 22F on which the upper scraper part 22r is formed is attached to the moving member 22E with bolts 22t. It is fixed so that it can move vertically.
  • a lower head corresponding to the upper head 22C may have the same configuration as the lower head 23 described above.
  • the upper head 22C since the upper head 22C includes the fixing member 22D and the two moving members 22E and 22F, the upper iron part 22q with respect to the fixing member 22D.
  • the moving member 22E having the above and the moving member 22F having the upper scraper portion 22r can be individually moved in the vertical direction and fixed. Therefore, the height positions of the moving member 22E and the moving member 22F can be individually adjusted according to the thickness of the substrate 2 to be applied and the thickness of the coating film. It becomes possible to apply a film thickness.
  • the gap between the upper head 22 and the lower head 23 is fixed in advance according to the substrate to be coated.
  • a condition such as the thickness of the substrate to be applied is input to the control unit 70 via the unit 80, and a predetermined gap (input) is input between the upper head 22 and the lower head 23 in accordance with the insertion timing to the substrate 2.
  • a mechanism for raising and lowering the moving member 22B of the upper head 22 is provided in the coating head 21 so that a gap corresponding to the thickness of the substrate is formed, and the moving member 22B of the upper head 22 is mechanically moved up and down.
  • a gap opening / closing mechanism that forms the gap may also be employed.
  • FIG. 13 is a plan view with the casing omitted to show the internal mechanism of the coating apparatus according to the embodiment (2), and FIG. 14 shows the casing to show the internal mechanism of the coating apparatus. It is the side view omitted and shown.
  • Components having the same functions as those of the coating apparatus according to the embodiment (1) shown in FIGS. 1 to 9 are denoted by the same reference numerals, and description thereof is omitted here.
  • the coating apparatus 1 In the coating apparatus 1 according to the embodiment (1), the form in which one coating unit 20 is disposed, that is, the form in which the four sides of the substrate 2 are coated with one coating unit 20 has been described.
  • a plurality of coating units are disposed, specifically, four coating units 20A, 20B, 20C, and 20D are disposed around the support table 10A, and the substrate. The four sides 2 are applied in parallel by the four application units 20A, 20B, 20C, and 20D.
  • the coating apparatus 1A includes a positioning unit 90, a coating unit 200, and a drying unit 600.
  • the positioning unit 90 is provided in order to position the substrate 2 before the substrate 2 is transferred onto the support table 10A of the application unit 200.
  • the positioning unit 90 includes a conveyor unit 91 that transports the substrate 2 to a predetermined position, and a positioning guide unit 92 that performs positioning (position adjustment) of the substrate 2 that has been transported to the predetermined position.
  • the substrate 2 is transported (carried in) to a predetermined position by the conveyor unit 91, and then the substrate lifting unit 91b disposed between the rollers 91a of the conveyor unit 91 is movable up and down. 2 is once lifted from the roller 91a. Thereafter, the positioning guide portions 92 provided on both sides of the conveyor portion 91 are moved in the direction in which the substrate 2 is sandwiched, the substrate 2 is sandwiched by the positioning guide portion 92, and the substrate 2 is positioned and arranged at a predetermined position. A member for gripping the substrate 2 without damaging the substrate 2 is disposed on the inner side surface of the positioning guide portion 92.
  • the substrate 2 positioned by the positioning unit 90 is transferred from the positioning unit 90 to the support table 10A by the substrate transfer unit 300 including a plurality of suction holders 305, and the substrate 2 is sucked and held by the suction holders 305. In this state, it is placed on the support table 10A.
  • the coating unit 200 supports the support table 10A that supports the substrate 2, the four coating units 20A, 20B, 20C, and 20D disposed around the support table 10A, and the coating units 20A, 20B, 20C, and 20D.
  • Four moving units 40A, 40B, 40C, and 40D that move along the sides of the table 10A are provided.
  • Each coating unit 20A, 20B, 20C, 20D is equipped with a pair of coating heads 21A including an upper head 22G and a lower head 23A.
  • the application unit 200 is equipped with liquid supply units 50A, 50B, 50C, and 50D that supply the film forming liquid 51 containing the resin component to the application heads 21A of the application units 20A, 20B, 20C, and 20D.
  • the drying unit 600 includes a conveyor unit 12A that transports the substrate 2 transferred from the coating unit 200, and a drying furnace 60A that dries the film forming liquid 51 applied to the substrate 2.
  • the drying furnace 60A has the same function as the drying furnace 60 shown in FIG.
  • a slat conveyor is adopted as the conveyor portion 12A, and the width and interval of each slat are set so that the peripheral portion of the substrate 2 does not touch the slat when the substrate 2 is placed on the slat (plate). Has been.
  • the coating apparatus 1A includes a control unit 70A that controls driving of each part of the apparatus such as the positioning unit 90, the coating unit 200, the substrate transfer unit 300, and the drying unit 600, and an operation unit 80A that operates each unit. ing.
  • the substrate transfer unit 300 has a function of transferring the substrate 2 from the positioning unit 90 to the coating unit 200 and transferring the substrate 2 from the coating unit 200 to the drying unit 900.
  • the substrate transfer unit 300 includes a first substrate holding unit 301, a second substrate holding unit 302, and a horizontal movement mechanism that reciprocates the first substrate holding unit 301 and the second substrate holding unit 302 in the substrate transport direction. 303 and a vertical movement mechanism 304 that reciprocates the first substrate holding unit 301 and the second substrate holding unit 302 in the vertical direction.
  • the first substrate holding unit 301 and the second substrate holding unit 302 are provided with a suction holder 305 that sucks and holds the substrate 2.
  • the suction holder 305 is composed of a suction nozzle or the like, and is connected to a vacuum pump via an air tube (not shown).
  • the first substrate holding unit 301 and the second substrate holding unit 302 are configured to transfer the substrate 2 from the positioning unit 90 to the support table 10A by the horizontal movement mechanism 303 and the vertical movement mechanism 304, and to support the substrate 2 on the support table.
  • the operation of transferring from 10A to the drying unit 600 is performed in parallel.
  • the support table 10 ⁇ / b> A is supported by the support 3 on the support 3.
  • the moving units 40A, 40B, 40C, and 40D are arranged in such a manner as to surround the support table 10A.
  • the moving units 40A, 40B, 40C, and 40D are configured by a biaxial (XY axis) linear motion mechanism that horizontally moves the coating units 20A, 20B, 20C, and 20D in the biaxial (XY axis) direction.
  • the moving units 40A, 40B, 40C, and 40D are attached to the X-axis cylinder 46 that is disposed in parallel with the side of the support table 10A, the X-axis slider 47 that slides on the X-axis cylinder 46, and the X-axis slider 47.
  • the Y-axis cylinder 48 and a Y-axis slider 49 that slides on the Y-axis cylinder 48 are provided.
  • Coating units 20A, 20B, 20C, and 20D are attached to the Y-axis slider 49 of the moving units 40A, 40B, 40C, and 40D, respectively.
  • the operations of the X-axis slider 47 and the Y-axis slider 49 are controlled by the control unit 70A.
  • the coating units 20A, 20B, 20C, and 20D each include a coating head mounting member 37 that is mounted on the Y-axis slider 49 and a coating head 21A that is mounted on the coating head mounting member 37.
  • FIG. 15 is a front view of the coating head 21A viewed from the direction of arrow A1 in FIG. 14,
  • FIG. 16 is a cross-sectional view taken along line XVI-XVI in FIG. 15, and
  • FIG. 17 is a cross-sectional view taken along line XVII-XVII in FIG.
  • FIG. 18 is a cross-sectional view taken along line XVIII-XVIII in FIG. 15, showing the bottom surface of the upper head (the surface facing the lower head), and
  • FIG. 19 is an exploded bottom view of the upper head.
  • FIG. 20 is an exploded front view of the upper head.
  • FIG. 21 is a cross-sectional view taken along the line XXI-XXI in FIG. 15, showing the upper surface of the lower head (the surface facing the upper head). Note that the arrow B1 shown in FIGS. 15 and 21 indicates the moving direction of the coating head 21A.
  • the pair of coating heads 21 ⁇ / b> A includes an upper head 22 ⁇ / b> G and a lower head 23 ⁇ / b> A that are vertically opposed to each other with a gap into which the end of the substrate 2 can be inserted.
  • a liquid receiving portion 24A is disposed under the coating head 21A.
  • the coating head 21A and the liquid receiving portion 24A are made of a metal material such as corrosion-resistant stainless steel.
  • the configurations of the lower head 23A and the liquid receiving portion 24A are substantially the same as those of the lower head 23 and the liquid receiving portion 24 shown in FIG. The description is omitted here.
  • surface processing such as ceramic processing is applied to the surface (at least the film forming liquid flow path surface) of the coating head 21A.
  • the upper head 22G is a fixing member 22H fixed to the lower head 23A, and a moving member attached to the fixing member 22H so as to be vertically adjustable (slidable). 22I.
  • the moving member 22I includes a first member 22J and a second member 22K.
  • the first member 22J is attached to the fixing member 22H so as to be position-adjustable (slidable) in the vertical direction.
  • the second member 22K is attached to the first member 22J in a state of being biased (pressed) downward by a leaf spring member 28e (see FIG. 16) as a biasing means.
  • a substantially concave washer member (metal plate) 22L is disposed between the first member 22J and the second member 22K.
  • an inclined guide portion 28a On the bottom surface of the second member 22K, an inclined guide portion 28a, an upper liquid reservoir portion 28b, an upper iron member (trowel portion) 28c, and an upper scraper portion (scraping portion) 28d are provided.
  • a pressing portion 28f that is urged (pressed) by a leaf spring member 28e is extended on the side where the upper scraper portion 28d is formed.
  • a protruding portion 28g (see FIG. 16) to be pressed by the leaf spring member 28e is provided on the flat surface (upper surface) of the pressing portion 28f.
  • the protrusion 28g is formed of a screw member, and the height of the protrusion 28g can be adjusted by the screwing amount. By adjusting the height of the protrusion 28g, the pressing force by the leaf spring member 28e and the gap between the upper head 22G and the lower head 23A can be adjusted.
  • an upper liquid reservoir portion 28h and a through hole 28i for allowing the suspension member 23g to pass are formed, and a leaf spring mounting portion 28j extends on the side where the through hole 28i is formed. (Bent formation).
  • One end of the leaf spring member 28e is attached to the plane (upper surface) of the leaf spring attachment portion 28j with a screw member 28k (see FIG. 16), and the other end of the leaf spring member 28e is the pressing portion 28f of the second member 22K. It is comprised so that the projection part 28g may be pressed.
  • the spring multiplier of the leaf spring member 28e is appropriately determined so that a desired coating film can be formed in consideration of the gap between the upper head 22G and the lower head 23A, the thickness of the substrate 2, the thickness of the coating film, and the like. Is set.
  • a liquid discharge groove 28l that leads from the front side to the back side of the fixing member 22H is formed at the substantially central portion of the bottom surface of the fixing member 22H, and through holes 28m are formed at both ends of the fixing member 22H.
  • a bolt 28n is inserted into the through hole 28m, and the fixing member 22H is fixed to the lower head 23A by the bolt 28n.
  • a concave portion 28p in which a tubular connecting member 28o (see FIG. 17) for supplying the film forming liquid 51 to the second member 22K is disposed at the substantially central portion of the front surface of the fixing member 22H. Is formed.
  • a convex portion 28q is formed in the vertical direction
  • a bolt hole 29a is formed at the center in the height direction of the convex portion 28q, and straddles the concave portion 28p.
  • a bolt hole 29b is formed in the front upper portion on the opposite side.
  • a concave portion 28r in which the connection member 28o is disposed is formed in the substantially central portion of the front surface of the first member 22J. Further, a groove 28s is formed on the back surface (facing the fixing member 22H) of the first member 22J so as to be fitted to the convex portion 28q of the fixing member 22H.
  • a vertically long hole 29c is formed at a position facing the bolt hole 29a of the fixing member 22H at the center in the height direction of the groove 28s.
  • a bolt mounting hole 29d is formed on the long hole 29c, and a vertically long hole 29e is formed at a position facing the bolt hole 29b of the fixing member 22H on the upper side across the recess 28r.
  • An insertion portion 28t into which the distal end portion of the connection member 28o is inserted is formed on the back side of the second member 22K.
  • the insertion portion 28t is connected to a liquid supply path 28u formed inside the second member 22K, and the liquid supply path 28u is connected to an injection hole 28v formed in the upper liquid reservoir 28b.
  • the film forming liquid 51 is supplied to the upper liquid reservoir 28b through the liquid supply path 28u and the injection hole 28v.
  • a vertically long slot 29f formed above the inclined guide portion 28a is formed on the front surface of the second member 22K at a position facing the slot 29c of the first member 22J.
  • a vertically long slot 29h formed above 28c is formed at a position facing the slot 29e of the first member 22J.
  • a bolt mounting hole 29g is formed on the long hole 29f at a position facing the bolt mounting hole 29d of the first member 22J.
  • Bolt insertion holes 29i and 29j are formed at positions facing the long holes 29c and 29e of the first member 22J at two positions on the front left and right sides of the washer member 22L.
  • the inclination guide portion 28a of the second member 22K is provided to facilitate the guidance of the end of the substrate 2 in the gap between the upper head 22G and the lower head 23A, and is inclined downward by about 30 degrees with respect to the horizontal plane. It has a structure.
  • the upper liquid reservoir portion 28b provided alongside the inclined guide portion 28a is formed in a shallow groove shape and is connected to the upper liquid reservoir portion 28h of the first member 22J.
  • the injection hole 22v formed in the upper liquid reservoir 28b can be individually covered with a screw member (not shown).
  • a lid (not shown) is applied to the injection hole 22v close to the first member 22J, and the end of the substrate 2 is covered.
  • the two injection holes 22v can be used without being covered. With this structure, the injection amount and the injection position can be adjusted according to the width of the liquid film applied to the end of the substrate 2.
  • a concave portion 28w is formed adjacent to the upper liquid reservoir portion 28b of the second member 22K, an upper iron member 28c is disposed near the upper liquid reservoir portion 28b of the concave portion 28w, and the wall portion at the rear end of the concave portion 28w is located on the upper side. It is comprised so that it may function as the scraper part 28d.
  • the upper trowel member 28c is provided in the upper liquid reservoir 28b, has a function of spreading the film to a uniform film thickness in close contact with the film forming liquid 51 attached to the substrate 2, and has a substantially square shape in plan view.
  • the member has a iron surface 28x and a mounting hole 28z for the bolt 28y, and can be attached to and detached from the recess 28w of the second member 22K with the bolt 28y.
  • the iron surface 28x is formed as a flat surface, a structure in which a plurality of minute grooves (for example, V-shaped grooves) are formed in a direction parallel to the moving direction B1 of the coating head 21A can be applied. .
  • the upper scraper portion 28d has a function of scraping off excess film forming liquid 51 adhering to the substrate 2 that has passed through the upper iron member 28c, and the wall portion at the rear end of the recess 28w is applied to the coating head 21A (second The member 22K) is inclined to the rear side by a predetermined angle ⁇ 1 (for example, around 30 degrees) with respect to the surface orthogonal to the front surface. Further, the cutting of the blade portion is performed so that the height of the blade portion constituting the upper scraper portion 28d is about 100 ⁇ m lower than the upper surface of the bank portion of the upper liquid reservoir portion 28b (so that the gap is widened). Has been made. In addition, the height of the said blade part can be set according to the thickness of a coating film.
  • the second member 22K is pivotally attached to the first member 22J with a bolt 29k, and the first member 22J is fixed to the fixing member 22H with bolts 29l and 29m. It has become.
  • the procedure for attaching the second member 22K to the first member 22J is as follows.
  • the bolt mounting hole 29g of the second member 22K is bolted from the front side (for example, an external screw provided with a head, a cylindrical body portion, and a tip screw portion).
  • (Type stripper bolt) 29k is inserted, and the tip screw portion of the bolt 29k is screwed into the bolt mounting hole 29d of the first member 22J.
  • the procedure for attaching the first member 22J to the fixing member 22H is as follows.
  • the washer member 22L is disposed between the second member 22K and the first member 22J (the front side of the first member 22J), and the bolt 29l is attached.
  • the protrusion 28q of the fixing member 22H is fitted into the groove 28s of the first member 22H through the long hole 29f of the second member 22K, the through hole 29i of the washer 22L, and the long hole 29c of the first member 22H.
  • the tip of the bolt 29l is lightly screwed into the bolt hole 29a of the fixing member 22H.
  • the bolt 29m is passed through the long hole 29h of the second member 22K, the through hole 29j of the washer member 22L, and the long hole 29e of the first member 22H, and the tip of the bolt 29m is passed through the bolt hole 29b of the fixing member 22H. Screw lightly into
  • the mounting position of the first member 22J (moving member 22I) with respect to the fixing member 22H is determined (the position adjustment amount is regulated by the length of the long holes 29c and 29e), and after positioning, the bolts 29l, 29m is further screwed in, and the first member 22J (moving member 22I) is fixed to the fixing member 22H.
  • the washer member 22L By providing the washer member 22L, the first member 22J can be prevented from being displaced when the first member 22J is fixed to the fixing member 22H with the bolts 29l and 29m.
  • the moving member 22I (the first member 22J and the second member 22K) is vertically moved with respect to the fixed member 22H by the long holes 29c and 29e of the first member 22J.
  • the gap between the upper head 22G and the lower head 23A can be adjusted.
  • the second member 22K is pivotally attached to the first member 22J with a bolt 29k (rotatably supported), and the heads of the bolts 29l and 29m are positioned above the long holes 29f and 29h, respectively.
  • the pressing portion 28f is biased downward by the leaf spring member 28e (in other words, the lower end surface of the second member 22K is slightly inclined downward from the upper liquid reservoir portion 28b toward the upper scraper portion 28d. State).
  • the second member 22K can be rotated (upward) against the urging force of the leaf spring member 28e within the range regulated by the long holes 29f and 29h with the bolt 29k as a fulcrum, the upper side
  • the gap size between the head 22G and the lower head 23A can have a certain width, and can correspond to substrates having different thicknesses.
  • the lower head 23A is provided with an inclined guide part 23a, a lower liquid reservoir part 23b, a lower iron member 23c, and a lower scraper part 23d on the upper surface. Further, an attachment hole 23e for fixing the bolt 28n passed through the through hole 28m of the fixing member 22H is formed on the upper surface of the lower head 23A, and the coating head 21A is provided on the upper surface of the lower head 23A.
  • a suspension member 23g for suspending the attachment member 37 is provided upright.
  • An attachment hole 23h for attaching the liquid receiving portion 24A and a liquid discharge groove 23f are formed on the back surface of the lower head 23A.
  • a screw hole 23i for attaching the connecting bolt 26 is formed in the upper part of the rod-like suspension member 23g.
  • the liquid receiver 24A includes a rectangular tray 24a in plan view and a mounting plate 24b extending upward from one side surface of the tray 24a.
  • the upper portion of the mounting plate 24b is a mounting hole 23h on the back surface of the lower head 23A.
  • a tube 55 is connected to a recovery port 24c formed on the bottom surface of the tray 24a via a joint 24d.
  • the saucer 24a is attached to the lower head 23 in a slightly inclined state so that the collection port 24c side is downward.
  • a coating head protector 27A is disposed at the retracted position of each coating head 21A.
  • the main part of the coating head protector 27A is substantially the same as that shown in FIGS. 8 and 9, and the description thereof will be omitted.
  • the coating head protector 27A is provided with an elevating mechanism 27i (see FIG. 14). ) Is lowered below the support table 10A at the time of application, and is moved up to the position of the application head 21A at the time of retraction, so that the pad member 27g of the pad unit 27c is separated from the gap portion in front of the application head 21A and the scraper part (28d, 23d) is in contact with the gap portion.
  • the liquid supply units 50 ⁇ / b> A, 50 ⁇ / b> B, 50 ⁇ / b> C, and 50 ⁇ / b> D are electrically operated to supply the film forming liquid 51 to the respective coating heads 21 ⁇ / b> A via the tubes 54. And an electric pump 56 that transfers (collects) the film forming liquid 51 received by each liquid receiving part 24A to the liquid storage part 52 via the tube 55.
  • the film forming liquid 51 in the liquid storage section 52 is supplied to the upper head 22G of each coating head 21A via the pump 53 and the tube 54, and is received by each liquid receiving section 24A.
  • the film forming liquid 51 is collected in the liquid storage part 52 via the tube 55 and the pump 56.
  • coating unit 20A, 20B, 20C, 20D is transferred on the conveyor part 12A by the board
  • the control unit 70A includes conveyance / positioning control in the positioning unit 90, transfer control of the substrate 2 by the substrate transfer unit 300, XY axis linear motion control of the movement units 40A, 40B, 40C, and 40D, liquid supply units 50A, 50B, It has functions to control each part of the coating apparatus 1A such as drive control of the pumps 53 and 56 of 50C and 50D and temperature control of the drying furnace 60A. (Not shown).
  • the control unit 70A can be configured by one or a plurality of control units (for example, for loading / positioning control, application unit control, drying furnace, etc.).
  • control unit 70A inserts the end portions of the four sides of the substrate 2 supported by the support table 10A into the gaps between the coating heads 21A (the upper head 22G and the lower head 23A), and in this state, the respective coatings
  • the moving unit 40A, 40B, 40C, 40D is driven and controlled so that the head 21A is moved along the peripheral edge of the substrate 2.
  • the operation unit 80A includes a liquid crystal operation panel 81 and is attached to a housing (not shown). Through the liquid crystal operation panel 81, it is possible to perform various operations such as setting operation conditions of each part of the coating apparatus 1A, operating instructions for each part, and switching operation modes (manual, automatic, etc.). An operation signal or a setting signal input via the operation panel 81 is transmitted to the control unit 70A or the like.
  • the horizontal movement speeds of the coating units 20A, 20B, 20C, and 20D by the XY axis linear motion mechanisms of the movement units 40A, 40B, 40C, and 40D, and the pumps of the liquid supply units 50A, 50B, 50C, and 50D The operation conditions such as the feeding speed of the film forming liquid 51 by 53, the furnace temperature setting and the drying time setting by the fin heater 62 of the drying furnace 60A can be set.
  • the coating apparatus 1A according to the embodiment (2) Next, a method for applying the film forming liquid 51 to the peripheral portion of the substrate 2 using the coating apparatus 1A according to the embodiment (2) will be described.
  • a rectangular thin (several tens to hundreds of ⁇ m) copper-clad laminated substrate is used as an object to be coated will be described.
  • the object to be coated is not limited to this, and aluminum
  • Various substrates such as a substrate and a glass substrate can be applied.
  • the coating method using the coating apparatus 1A according to the embodiment (2) can be adopted as one step (in-line) of the substrate manufacturing process.
  • the gap between the application head 21A (a pair of the upper head 22G and the lower head 23A) is adjusted and set. That is, a gap gauge (not shown) corresponding to a gap size (for example, substrate thickness + 10 to 500 ⁇ m) determined in consideration of the thickness of the substrate 2 to be coated, the thickness of the coating film, etc. is moved by the upper head 22G.
  • the first member 22J is fixed to the fixing member 22H with bolts 29l and 29m sandwiched between the member 22I (second member 22K) and the lower head 23A.
  • the clearance gauge is pulled out to complete the adjustment and setting of the gap of the application head 21 ⁇ / b> A, and the application head 21 ⁇ / b> A is attached to the attachment member 35 with the connecting bolt 26. Since the pressing portion 28f of the upper head 22G is urged (pressed) downward by the leaf spring member 28e, the lower end surface of the second member 22K of the upper head 22G extends from the upper liquid reservoir portion 28b to the upper scraper portion 28d. It is in a state of being slightly inclined downward.
  • the substrate carrying-in process first, the substrate 2 is transported to a predetermined position by the conveyor unit 91 of the positioning unit 90, and the substrate lifting unit 91b is actuated (lifted) to temporarily lift the substrate 2 on the roller 91a, and then the positioning guide unit 92 is operated so that the side surface of the substrate 2 is lightly sandwiched, and then the substrate lifting portion 91b is operated (lowered) to place the substrate 2 on the roller 91a.
  • the vertical moving mechanism 304 of the substrate transfer unit 300 is operated, the substrate 2 is lifted upward while being sucked by the suction holding tool 305, and the horizontal moving mechanism 303 is operated so as to be horizontally above the support table 10A.
  • the vertical movement mechanism 304 is operated to place the substrate 2 on the support table 10 ⁇ / b> A while the substrate 2 is sucked and held by the suction holder 305.
  • the liquid reservoirs (upper liquid reservoirs 28b, 28h and lower liquid reservoir 23b of the four coating heads 21A are inserted with the end of the substrate 2 inserted into the gap between the coating heads 21A. ) To move the four coating heads 21A along the peripheral edge of each side of the substrate 2 while supplying the film forming liquid 51 to the substrate.
  • FIG. 22 is a schematic diagram for explaining a process of coating the peripheral edge of the substrate 2 with the four coating heads 21A.
  • the broken lines in the figure indicate the movement trajectory of each coating head 21A. Since any coating head 21A is controlled to perform the same operation, the operation of the coating head 21A provided in the coating unit 20A will be described here.
  • the coating head 21A is set at a position A, which is a predetermined retreat position, so that the direction of the end surface (right side 2a) of the substrate 2 matches the traveling direction of the coating head 21A.
  • a position A which is a predetermined retreat position, so that the direction of the end surface (right side 2a) of the substrate 2 matches the traveling direction of the coating head 21A.
  • the end of the substrate right side 2a is inserted into the gap between the coating heads 21A, and the upper liquid reservoir 28b and the lower side
  • the coating head 21A is moved horizontally in a state where the liquid reservoir 23b is filled with the film forming liquid 51.
  • the position of the application head 21A is controlled so that the end of the substrate 2 does not protrude from the gap between the application heads 21A. Further, when driving the X-axis slider 47, control is performed to drive the lifting mechanism 27i to lower the coating head protector 27A.
  • the Y-axis slider 49 of the moving unit 40A is operated to slide the coating head 21A away from the substrate 2 (d direction) to the C position. Move.
  • the X-axis slider 47 of the moving unit 40A is driven to slide the coating head 21A to the D position, and then the Y-axis slider 49 is driven to slide the coating unit 20A to the retracted position (A position).
  • the elevating mechanism 27i is driven to raise the coating head protector 27A.
  • the pad member 27g is applied to the coating head 21A. Are in contact with each other.
  • the moving unit 40A performs the coating operation of the substrate upper side 2b by the coating unit 20B, the substrate left side 2c by the coating unit 20C, and the substrate lower side 2d by the coating unit 20D. , 40B, 40C, 40D, etc. are driven.
  • the process proceeds to the drying process.
  • the substrate 2 is lifted while the substrate 2 is adsorbed by the adsorption holder 305 of the substrate transfer unit 300, moved horizontally above the conveyor unit 12A, and then placed on the conveyor unit 12A.
  • substrate 2 is conveyed in 60 A of drying furnaces by the conveyor part 12A.
  • the substrate 2 is unloaded from the drying furnace 60A, and the drying process is completed.
  • a coating film made of a resin component is formed in a frame shape (end surface and upper and lower surfaces).
  • the four coating heads 21A can apply the four sides of the substrate 2 simultaneously in parallel, thereby reducing the coating time. Therefore, it can be incorporated in the substrate production line in-line, and high production efficiency can be maintained. In addition, since the coating film is formed on the peripheral edge of the substrate 2, the handling property in the subsequent substrate processing step can be improved, and the occurrence of defective products can be reduced. Thus, it is possible to reduce the substrate manufacturing cost.
  • the upper head 22G is configured to include the fixing member 22H, the first member 22J, and the second member 22K, and the first member 22J.
  • the moving member 22I (the first member 22J and the second member 22K) can be moved (position adjustment) in the vertical direction with respect to the fixed member 22H, and the upper head 22G and the lower head It is possible to easily adjust the gap with 23A.
  • the assembly structure of the upper head 22G the second member 22K is resisted against the urging force of the leaf spring member 28e (upward direction) within a range regulated by the long holes 29f and 29h with the bolt 29k as a fulcrum. ),
  • the gap size between the upper head 22G and the lower head 23A can have a certain width, and it can be adapted to substrates having different thicknesses.
  • the present invention can be widely used in fields such as the electronic equipment industry that handles various substrates such as printed circuit boards, metal substrates, package substrates, and glass substrates.

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  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
PCT/JP2015/079545 2014-11-06 2015-10-20 塗布装置、塗布ヘッド及び塗布方法 WO2016072250A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016509800A JP6093480B2 (ja) 2014-11-06 2015-10-20 塗布装置、塗布ヘッド及び塗布方法
KR1020167032618A KR101858246B1 (ko) 2014-11-06 2015-10-20 도포장치, 도포헤드 및 도포방법
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WO2024075620A1 (ja) * 2022-10-06 2024-04-11 株式会社エナテック 塗布装置、乾燥装置、光照射装置、及び塗布システム
KR20240048501A (ko) 2022-10-06 2024-04-15 가부시키가이샤 에나테크 도포 장치, 건조 장치, 광 조사 장치, 및 도포 시스템

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