WO2016056300A1 - ケイ素化合物用エッチングガス組成物及びエッチング方法 - Google Patents
ケイ素化合物用エッチングガス組成物及びエッチング方法 Download PDFInfo
- Publication number
- WO2016056300A1 WO2016056300A1 PCT/JP2015/072827 JP2015072827W WO2016056300A1 WO 2016056300 A1 WO2016056300 A1 WO 2016056300A1 JP 2015072827 W JP2015072827 W JP 2015072827W WO 2016056300 A1 WO2016056300 A1 WO 2016056300A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- etching
- gas composition
- vol
- sio
- poly
- Prior art date
Links
- 238000005530 etching Methods 0.000 title claims abstract description 218
- 239000000203 mixture Substances 0.000 title claims abstract description 60
- 238000000034 method Methods 0.000 title claims abstract description 47
- 150000003377 silicon compounds Chemical class 0.000 title claims description 8
- 239000000758 substrate Substances 0.000 claims abstract description 47
- 229910052736 halogen Inorganic materials 0.000 claims abstract description 30
- 229910052801 chlorine Inorganic materials 0.000 claims abstract description 27
- 229910052794 bromium Inorganic materials 0.000 claims abstract description 25
- 229910052740 iodine Inorganic materials 0.000 claims abstract description 21
- 150000002367 halogens Chemical class 0.000 claims abstract description 16
- 239000010409 thin film Substances 0.000 claims abstract description 9
- 239000007789 gas Substances 0.000 claims description 102
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 38
- -1 halogen fluoride compound Chemical class 0.000 claims description 22
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 13
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 11
- 239000003085 diluting agent Substances 0.000 claims description 6
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 5
- 229910003465 moissanite Inorganic materials 0.000 claims description 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 150000002366 halogen compounds Chemical class 0.000 abstract description 3
- 238000001020 plasma etching Methods 0.000 abstract description 2
- 230000000052 comparative effect Effects 0.000 description 44
- 239000010408 film Substances 0.000 description 44
- 229910004298 SiO 2 Inorganic materials 0.000 description 43
- 239000000460 chlorine Substances 0.000 description 22
- 239000000463 material Substances 0.000 description 14
- VZSRBBMJRBPUNF-UHFFFAOYSA-N 2-(2,3-dihydro-1H-inden-2-ylamino)-N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]pyrimidine-5-carboxamide Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)C(=O)NCCC(N1CC2=C(CC1)NN=N2)=O VZSRBBMJRBPUNF-UHFFFAOYSA-N 0.000 description 11
- 229910052731 fluorine Inorganic materials 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- HMUNWXXNJPVALC-UHFFFAOYSA-N 1-[4-[2-(2,3-dihydro-1H-inden-2-ylamino)pyrimidin-5-yl]piperazin-1-yl]-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethanone Chemical compound C1C(CC2=CC=CC=C12)NC1=NC=C(C=N1)N1CCN(CC1)C(CN1CC2=C(CC1)NN=N2)=O HMUNWXXNJPVALC-UHFFFAOYSA-N 0.000 description 8
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- MKYBYDHXWVHEJW-UHFFFAOYSA-N N-[1-oxo-1-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propan-2-yl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(C(C)NC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 MKYBYDHXWVHEJW-UHFFFAOYSA-N 0.000 description 6
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 101100441092 Danio rerio crlf3 gene Proteins 0.000 description 5
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 5
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000009257 reactivity Effects 0.000 description 3
- LDXJRKWFNNFDSA-UHFFFAOYSA-N 2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]ethanone Chemical compound C1CN(CC2=NNN=C21)CC(=O)N3CCN(CC3)C4=CN=C(N=C4)NCC5=CC(=CC=C5)OC(F)(F)F LDXJRKWFNNFDSA-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 125000001153 fluoro group Chemical group F* 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- ZQXCQTAELHSNAT-UHFFFAOYSA-N 1-chloro-3-nitro-5-(trifluoromethyl)benzene Chemical compound [O-][N+](=O)C1=CC(Cl)=CC(C(F)(F)F)=C1 ZQXCQTAELHSNAT-UHFFFAOYSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 208000033999 Device damage Diseases 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 230000008832 photodamage Effects 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
- H01L21/31116—Etching inorganic layers by chemical means by dry-etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Definitions
- the present invention relates to an etching gas composition and an etching method, and more particularly to an etching gas composition and an etching method for selectively etching a silicon compound deposited on a semiconductor substrate without using plasma.
- the thin film formation process using CVD or vacuum deposition constitutes an indispensable important manufacturing process.
- the device and the cleaning device are operating. When these devices are used, the most serious problem is that a large amount of deposits or deposits are generated in a place other than the target substrate, and etching occurs on a portion other than the target substrate. .
- Patent Document 1 includes an interhalogen gas (for example, ClF, ClF 3 , ClF 5 , BrF, BrF 5 , IF, IF 3 , IF 5 , and IF 7 ) and a compound of oxygen and halogen.
- an interhalogen gas for example, ClF, ClF 3 , ClF 5 , BrF, BrF 5 , IF, IF 3 , IF 5 , and IF 7
- a compound of oxygen and halogen for example, ClF, ClF 3 , ClF 5 , BrF, BrF 5 , IF, IF 3 , IF 5 , and IF 7
- a compound of oxygen and halogen for example, ClF, ClF 3 , ClF 5 , BrF, BrF 5 , IF, IF 3 , IF 5 , and IF 7
- a compound of oxygen and halogen for example, ClF, ClF 3 , ClF 5 , BrF, BrF 5 , IF,
- a halogen fluoride gas selected from ClF 3 , ClF, BrF, BrF 3 , IF, and IF 3 is used to apply light (ultraviolet light or laser light) to an object to be processed.
- a technique for anisotropically etching tungsten silicide and molybdenum silicide of a processing body is disclosed. Since the halogen fluoride gas is excited by ultraviolet light or laser light, there is no need to use plasma, so there is an advantage that etching that does not cause plasma damage to the semiconductor element can be performed, but that light damages the object to be processed. There's a problem.
- Patent Document 3 discloses that a ultraviolet ray is applied to the substrate using a mixed gas of a fluorine-based gas selected from ClF 3 , ClF, NF 3 , F 2 , and HF and a chlorine-based gas selected from Cl 2 and HCl.
- a fluorine-based gas selected from ClF 3 , ClF, NF 3 , F 2 , and HF
- a chlorine-based gas selected from Cl 2 and HCl has been disclosed that excites and excites the silicon nitride film and the silicon film continuously.
- the fluorine-based gas has a higher etching rate in the order of silicon, silicon nitride, and silicon oxide, while the chlorine-based gas has a feature that silicon is etched but silicon nitride and silicon oxide are not etched at all. It is advantageous that the silicon nitride film and the silicon film can be continuously etched without damaging the base by controlling the partial pressure of the system gas. However, this method also causes damage to the object to be processed due
- Patent Document 4 ClF, ClF 3 , BrF, BrF 3 , IF, and IF 3 are used as halogen fluoride to etch only a silicon support substrate and peel off a semiconductor integrated circuit formed on the silicon substrate. Since the silicon oxide film is not etched at all by non-plasma etching using these gases, only the silicon support substrate can be selectively etched, and the semiconductor integrated circuit can be peeled off without damaging it. A method is also disclosed.
- an etching gas selected from various fluorine-based gases such as NF 3 , SF 6 , and CF 4 is used from the viewpoint of rapid etching rate and ease of operation.
- NF 3 or SF 6 usually requires a plasma atmosphere, there are significant restrictions on the apparatus, and the gas itself (impurities contained in the gas, or sub-products generated during processing and removal).
- the gas itself impurities contained in the gas, or sub-products generated during processing and removal.
- An object of the present invention is to solve the above-described problems, and to provide an etching gas composition and an etching method capable of efficiently and precisely processing an object such as a target substrate at the time of forming a thin film. There is.
- ClF a fluorinated halogen compound in order to efficiently and precisely process a deposit of a silicon-based compound generated during the formation of a thin film.
- a gas composition containing, as a main component, a halogen fluoride fluoride compound having one fluorine atom in the molecule, such as Br, IF, and IF (halogen is a halogen other than a fluorine atom) and F 2 as an accessory component is effective.
- a halogen fluoride fluoride compound having one fluorine atom in the molecule such as Br, IF, and IF (halogen is a halogen other than a fluorine atom) and F 2 as an accessory component
- [4] A method for etching or processing a semiconductor substrate by excitation of an etching gas by thermal energy, wherein the etching gas composition according to any one of [1] to [3] is used without using plasma. And selected from crystalline silicon, amorphous silicon, polycrystalline silicon, SiC, SiOC, SiOCN, SiON, SiCN, SiN, SiO m (m is a natural number), Poly-Si, and Poly-SiO m (m is a natural number).
- An etching method comprising processing or etching a silicon compound deposit or thin film.
- [5] A method for etching or processing a semiconductor substrate by excitation of an etching gas with thermal energy, wherein the etching gas composition according to any one of [1] to [3] is used without using plasma.
- an etching temperature 10 ° C. to 800 ° C.
- Poly-Si, and Poly- An etching method comprising processing or etching a deposit or thin film of a silicon compound selected from SiO m (m is a natural number).
- an etching gas composition and an etching method which can solve the problems in the conventional etching gas composition and etching method and can be selectively etched without using plasma.
- the etching gas composition and etching method of the present invention have the following effects. 1) The etching rate under high temperature (200 ° C. or higher) conditions can be controlled. 2) Since the etching gas composition is a gas having low reactivity, it exhibits excellent etching selectivity in various temperature ranges. For this reason, only the silicon compound deposited in a place other than the target semiconductor substrate can be selectively etched and removed efficiently and economically. 3) Etching under low temperature (100 ° C. or lower) conditions is possible, productivity can be improved, and it is economically advantageous.
- Example 5 is a graph showing etching rates in Example 1 and Comparative Example 1. It is a graph which shows the etching rate with respect to SiN in Example 2 and Comparative Example 2. Is a graph showing the etching rate of SiO 2 in Example 2 and Comparative Example 2. 6 is a graph showing etching rates with respect to poly-Si in Example 3 and Comparative Example 3.
- the etching gas composition of the present invention contains (1) XF (X is Cl, Br, or I) as a main component, and further includes (2) F 2 and (3) XF n ( X is Cl, Br or I, n is an integer of 3 or more), (4) HF, (5) O 2 , (6) Cl 2 , Br 2 , and I 2 And at least one selected halogen gas.
- XF n (X is Cl, Br or I, n is an integer of 3 or more) 0.000005 to 0.10 vol%, and (4) 90.
- etching gas composition comprising 0.000005 to 0.10 vol% of a halogenated fluoride compound, (4) 0.000003 to 0.30 vol% of HF, and (5) the balance O 2 and a diluent. preferable. Further, (1) 90.00 to 99.90 vol% of a halogen fluoride compound represented by XF (X is Cl, Br, or I), and (2) F 2 and (6) a total of halogen gas alone is 0.
- the etching gas composition contains 0.0005 to 0.10 vol%, (4) 0.0003 to 0.30 vol% HF, and (5) the balance O 2 and a diluent.
- an inert gas such as nitrogen gas, argon gas, or helium gas that does not affect the etching process
- nitrogen gas, argon gas, or helium gas that does not affect the etching process
- the dilution concentration is not particularly limited, it can be used as a diluent concentration of 0.001 to 99.9 vol% with respect to the entire etching gas composition, and 0.01 to 99.0 vol% with respect to the etching gas composition. It is preferable.
- the halogen fluoride compound represented by XF (X is Cl, Br, or I) contained in the etching gas composition of the present invention as a main component is more ClF 3 or BrF 3 contained in the conventional etching gas composition.
- XF is Cl, Br, or I
- the etching is easy to control because it has a high selectivity to the etching target material without being deeply etched when etching in various temperature ranges.
- the etching method of the present invention is a method of etching or processing a semiconductor substrate by excitation of an etching gas by thermal energy, and without using plasma, the etching gas composition of the present invention is used to produce crystalline silicon.
- An object or a thin film is processed or etched.
- Etching objects include a single Si film, a SiC film, a SiO m (m is a natural number) film, and a substrate on which a single layer such as a Poly-SiO m (m is a natural number) film (polysilica film) is formed, A substrate on which a SiO 2 film is formed on a SiC film, a substrate on which a SiO 2 film is formed on a SiN film, a SiN film is formed on a Si single layer film, and a SiO 2 film is formed thereon.
- a laminated substrate on which a film is formed a substrate on which a Poly-SiO m (m is a natural number) film (polysilica film) is laminated on an SiN film, or an SiN film is laminated on an SiC film, and an SiO 2 film is formed thereon.
- a substrate on which a large number of laminated films such as a Poly-SiO m (m is a natural number) film is further formed. Since the etching gas composition of the present invention exhibits excellent selectivity, it is suitable for etching a specific layer of a multilayer substrate.
- the etching temperature can be in the range of ⁇ 10 to 800 ° C., preferably in the range of 0 to 600 ° C., and more preferably in the range of 0 to 400 ° C.
- the temperature is particularly preferably 0 to 100 ° C.
- the range of 100 to 600 ° C. is particularly preferable, and the range of 100 to 400 ° C. is particularly preferable.
- the etching rate control by temperature control is easy. That is, the etching gas composition of the present invention has excellent material selectivity at 0 to 100 ° C. in etching of a Si-based compound (and its deposit). Further, at 200 ° C. or higher, particularly at 200 to 400 ° C., there is an effect that the temperature controllability is high. Since the work can be performed even at a high temperature of 200 ° C. or higher, the apparatus downtime can be reduced and the apparatus operation rate can be improved. Furthermore, even at a low temperature of 100 ° C. or lower, selective etching can be performed on a specific Si-based compound film type such as SiN, for example, without using plasma, thereby reducing device damage such as semiconductor manufacturing equipment. Can do.
- the etching pressure is preferably about 0 to 1.0 ⁇ 10 5 Pa, particularly about 0 to 5.33 ⁇ 10 4 Pa (1 to 400 torr).
- Example 1-1 An SiO 2 wafer (substrate thickness 0.725 mm) having a thickness of 1063 nm on the substrate was placed in the apparatus, and ClF: 96.500 vol%, ClF 3 : 0.038 vol%, F 2 : 0.050 vol%, HF: An etching gas composition composed of 0.012 vol% and O 2 : 3.400 vol% was filled, and an etching process was performed at 50 ° C. for 30 seconds. After the etching treatment, the thickness of SiO 2 remaining on the substrate was measured and found to be 1047 nm. When the etching rate was calculated based on the difference between the initial film thickness and the post-treatment film thickness, it was 20.1 nm / min.
- Example 1-2 The same treatment as in Example 1-1 was performed except that the etching temperature was changed to 100 ° C., and an etching rate of 30.5 nm / min and a coefficient of variation of 0.06% were obtained.
- Example 1-3 The same treatment as in Example 1-1 was performed except that the etching temperature was changed to 200 ° C., and an etching rate of 58.7 nm / min and a coefficient of variation of 0.08% were obtained.
- Example 1-4 The same treatment as in Example 1-1 was performed except that the etching temperature was changed to 300 ° C., and an etching rate of 86.1 nm / min and a coefficient of variation of 0.07% were obtained.
- Example 1-5 The same treatment as in Example 1-1 was performed except that the etching temperature was changed to 400 ° C., and an etching rate of 111.2 nm / min and a coefficient of variation of 0.09% were obtained.
- Example 1-6 The same treatment as in Example 1-1 was performed except that the etching temperature was changed to 800 ° C., and an etching rate of 243.4 nm / min and a coefficient of variation of 0.10% were obtained.
- Example 1-2 The same treatment as in Example 1-2 was performed except that the same etching gas composition as in Comparative Example 1-1 was used, and an etching rate of 26.9 nm / min and a coefficient of variation of 0.13% were obtained.
- Example 1-3 The same treatment as in Example 1-3 was performed except that the same etching gas composition as in Comparative Example 1-1 was used, and an etching rate of 52.7 nm / min and a coefficient of variation of 0.10% were obtained.
- Example 1-4 The same treatment as in Example 1-4 was performed except that the same etching gas composition as in Comparative Example 1-1 was used, and an etching rate of 75.6 nm / min and a coefficient of variation of 0.29% were obtained.
- Example 1-5 The same treatment as in Example 1-2 was performed except that the same etching gas composition as in Comparative Example 1-1 was used, and an etching rate of 431.4 nm / min and a coefficient of variation of 0.86% were obtained.
- Example 2-1 Substrate 300nm film thickness of the SiN wafer (substrate thickness: 0.775 mm) was placed in the apparatus, ClF: 92.500vol%, ClF 3 : 0.038vol%, F 2: 0.012vol%, HF: An etching gas composition of 0.050 vol%, O 2 : 3.400 vol%, N 2 : 4.000 vol% was filled, and etching treatment was performed at 100 ° C. for 30 seconds. After the etching process, the film thickness of SiN remaining on the substrate was 299.3 nm. When the etching rate was calculated based on the difference between the initial film thickness and the post-treatment film thickness, it was 1.4 nm / min.
- Example 1-2 The etching process of Example 1-2 was performed using the etching gas composition used in this example, and the etching rate was obtained. Compared with the etching rate of Example 2-1, the selection ratio SiO 2 / When SiN and SiN / SiO 2 were determined, they were 22.4 and 0.04, respectively.
- Example 2-2 The same treatment as in Example 2-1 was performed except that the etching temperature was changed to 200 ° C., and an etching rate of 3.3 nm / min and a coefficient of variation of 0.06% were obtained.
- Example 1-3 The etching process of Example 1-3 was performed using the etching gas composition used in this example, the etching rate was obtained, and compared with the etching rate of Example 2-2, the selectivity ratio to the substrate material SiO 2 / SiN and SiN / SiO 2 were determined to be 17.7 and 0.06, respectively.
- Example 2-3 The same treatment as in Example 2-1 was performed except that the etching temperature was changed to 300 ° C., and an etching rate of 13.0 nm / min and a coefficient of variation of 0.08% were obtained.
- Example 1-4 The etching process of Example 1-4 was performed using the etching gas composition used in this example, and the etching rate was obtained. Compared with the etching rate of Example 2-3, the selection ratio SiO 2 / SiN and SiN / SiO 2 were determined to be 6.62 and 0.15, respectively.
- Example 2-4 The same treatment as in Example 2-1 was performed except that the etching temperature was changed to 400 ° C., and an etching rate of 146.2 nm / min and a coefficient of variation of 0.09% were obtained.
- Example 1-5 The etching process of Example 1-5 was performed using the etching gas composition used in this example, and the etching rate was obtained. Compared with the etching rate of Example 2-2, the selectivity ratio with respect to the substrate material SiO 2 / SiN and SiN / SiO 2 were determined to be 0.78 and 1.28, respectively.
- Example 2-1 The etching gas composition ClF: 0.038vol%, ClF 3: 92.500vol%, F 2: 0.050vol%, HF: 0.012vol%, O 2: 3.400vol%, N: the 4.000Vol% Except for this, the same treatment as in Example 2-1 was performed to obtain an etching rate of 1.9 nm / min and a coefficient of variation of 0.15%.
- the etching treatment of Comparative Example 1-2 was performed using the etching gas composition used in this Comparative Example, and the etching rate was obtained. Compared with the etching rate of Comparative Example 2-1, the selection ratio SiO 2 / SiN and SiN / SiO 2 were determined to be 16.8 and 0.06, respectively.
- Comparative Example 2-2 The same treatment as in Comparative Example 2-1 was performed except that the etching temperature was changed to 200 ° C., and an etching rate of 3.1 nm / min and a variation coefficient of 0.16% were obtained.
- the etching treatment of Comparative Example 1-3 was performed using the etching gas composition used in this Comparative Example, and the etching rate was obtained. Compared with the etching rate of Comparative Example 2-2, the selectivity ratio with respect to the substrate material SiO 2 / SiN and SiN / SiO 2 were determined to be 17.1 and 0.06, respectively.
- Comparative Example 2-3 The same treatment as in Comparative Example 2-1 was performed except that the etching temperature was changed to 300 ° C., and an etching rate of 84.9 nm / min and a coefficient of variation of 0.33% were obtained.
- the etching process of Comparative Example 1-4 was performed using the etching gas composition used in this comparative example, and the etching rate was obtained. Compared with the etching rate of Comparative Example 2-3, the selectivity ratio with respect to the substrate material SiO 2 / SiN and SiN / SiO 2 were determined to be 0.89 and 1.12.
- Comparative Example 2-4 The same treatment as in Comparative Example 2-1 was performed except that the etching temperature was changed to 400 ° C., and an etching rate of 731.2 nm / min and a coefficient of variation of 0.92% were obtained.
- the etching process of Comparative Example 1-4 was performed using the etching gas composition used in this Comparative Example, the etching rate was obtained, and compared with the etching rate of Comparative Example 2-2, the selectivity ratio with respect to the substrate material SiO 2 / SiN and SiN / SiO 2 were determined to be 0.59 and 1.68, respectively.
- Table 1 shows the same process as in Examples 2-1 to 2-4 except that the etching object was changed to a SiO 2 wafer (substrate thickness: 0.725 mm) having a film thickness of 1063 nm on the substrate of Example 1. Etching rate, coefficient of variation, and selectivity were obtained.
- Example 3-1 Poly-Si wafer having a thickness of substrate 300 nm (substrate thickness: 0.725 mm) was placed in the apparatus, ClF: 92.500vol%, ClF 3 : 0.038vol%, F 2: 0.012vol%, An etching gas composition of HF: 0.050 vol%, O 2 : 3.400 vol%, N 2 : 4.000 vol% was filled, and etching treatment was performed at 100 ° C. for 30 seconds. After the etching process, the film thickness of poly-Si remaining on the substrate was 299.9 nm. When the etching rate was calculated based on the difference between the initial film thickness and the post-treatment film thickness, it was 0.2 nm / min.
- the selectivity ratio to the substrate material is SiO 2 / poly-Si, poly-Si / SiO 2 , SiN / poly-Si and poly-Si / SiN. Were found to be 157.0, 0.01, 7.0, and 0.14, respectively.
- Example 3-2 The same treatment as in Example 3-1 was performed except that the etching temperature was changed to 200 ° C., and an etching rate of 170.9 nm / min and a coefficient of variation of 0.07% were obtained.
- the selectivity ratio to the substrate material is SiO 2 / poly-Si, poly-Si / SiO 2 , SiN / poly-Si and poly-Si / SiN. Were 0.34, 2.92, 0.02 and 51.8, respectively.
- Example 3-3 The same treatment as in Example 3-1 was performed except that the etching temperature was changed to 300 ° C., and an etching rate of 375.4 nm / min and a coefficient of variation of 0.10% were obtained.
- the selectivity ratios for the substrate material are SiO 2 / poly-Si, poly-Si / SiO 2 , SiN / poly-Si and poly-Si / SiN. Were 0.23, 4.37, 0.03 and 28.9, respectively.
- Example 3-4 The same treatment as in Example 3-1 was performed except that the etching temperature was changed to 400 ° C., and an etching rate of 413.3 nm / min and a coefficient of variation of 0.12% were obtained.
- the selectivity ratio to the substrate material is SiO 2 / poly-Si, poly-Si / SiO 2 , SiN / poly-Si and poly-Si / SiN. Were 0.28, 3.61, 0.35, and 2.83, respectively.
- the selectivity for the substrate material is SiO 2 / poly-Si, poly-Si / SiO 2 , SiN / poly-Si and poly-Si / SiN. Were found to be 0.05, 18.9, 0.003 and 318.1, respectively.
- Comparative Example 3-2 Except that the etching temperature was changed to 200 ° C., the same treatment as in Comparative Example 3-1 was performed, and overetching occurred.
- the etching rate was calculated to be 604.3 nm / min, and the variation coefficient was 0.63%.
- the selectivity ratio to the substrate material is SiO 2 / poly-Si, poly-Si / SiO 2 , SiN / poly-Si and poly-Si / SiN. Were 0.09, 11.4, 0.01 and 194.9, respectively.
- the etching gas composition of the present invention has a specific Si content as compared with the conventional etching gas composition containing trifluoride gas as a main component.
- Specific temperature range for system compound film types for example, a temperature range of 100 to 800 ° C. for SiO 2 , a range of 300 to 400 ° C. for SiN, and a temperature of 100 to 300 ° C. for poly-Si It can be seen that the reactivity increases linearly and slowly in the range, and the etching rate control by temperature control is easy.
- the etching gas composition of the present invention is suitable for precision processing because it has a small coefficient of variation and a small variation in etching treatment.
- the etching gas composition of the present invention has excellent material selectivity at 0 to 100 ° C. in etching of a Si-based compound (and its deposit), and high temperature controllability at 200 ° C. or higher. There is an effect. Since it is possible to selectively process a specific Si-based compound film type at a low temperature without using plasma, it is possible to reduce damage to a device such as a semiconductor manufacturing device. Further, since the work can be performed even at a higher temperature, the apparatus downtime can be reduced and the apparatus operation rate can be improved.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
[1](1)XF(XはCl、Br又はI)で示されるフッ化ハロゲン化合物を主成分として含み、さらに、(2)F2と、(3)XFn(XはCl、Br又はI、nは3以上の整数)で示されるフッ化ハロゲン化合物と、(4)HFと、(5)O2と、(6)Cl2、Br2、及びI2より選択される1種以上のハロゲンガス単体と、を含むことを特徴とするエッチングガス組成物。
[2](1)XF(XはCl、Br又はI)で示されるフッ化ハロゲン化合物を90.00~99.999vol%と、(2)F2及び(6)ハロゲンガス単体の合計で0.000005~0.20vol%と、(3)XFn(XはCl、Br又はI、nは3以上の整数)で示されるフッ化ハロゲン化合物を0.000005~0.10vol%と、(4)HFを0.000003~0.30vol%と、(5)残部O2とを含む[1]に記載のエッチングガス組成物。
[3](1)XF(XはCl、Br又はI)で示されるフッ化ハロゲン化合物を90.00~99.999vol%と、(2)F2及び(6)ハロゲンガス単体の合計で0.000005~0.20vol%と、(3)XFn(XはCl、Br又はI、nは3以上の整数)で示されるフッ化ハロゲン化合物を0.000005~0.10vol%と、(4)HFを0.000003~0.30vol%と、(5)残部O2及び希釈剤とを含む[1]に記載のエッチングガス組成物。
[4]熱エネルギーによるエッチングガスの励起によって半導体基板をエッチング又は加工する方法であって、プラズマを使用せずに、[1]~[3]のいずれか1に記載のエッチングガス組成物を使用して、結晶シリコン、アモルファスシリコン、多結晶シリコン、SiC、SiOC、SiOCN、SiON、SiCN、SiN、SiOm(mは自然数)Poly-Si、及びPoly-SiOm(mは自然数)から選択されるケイ素化合物の堆積物又は薄膜を加工もしくはエッチングすることを特徴とするエッチング方法。
[5]熱エネルギーによるエッチングガスの励起によって半導体基板をエッチング又は加工する方法であって、プラズマを使用せずに、[1]~[3]のいずれか1に記載のエッチングガス組成物を-10℃~800℃のエッチング温度で使用して、結晶シリコン、アモルファスシリコン、多結晶シリコン、SiC、SiOC、SiOCN、SiON、SiCN、SiN、SiOm(mは自然数)、Poly-Si、及びPoly-SiOm(mは自然数)から選択されるケイ素化合物の堆積物又は薄膜を加工もしくはエッチングすることを特徴とするエッチング方法。
[6]エッチング温度は0~400℃であることを特徴とする[5]に記載のエッチング方法。
1)高温(200℃以上)条件下でのエッチング速度を制御することができる。
2)エッチングガス組成物は反応性の低いガスであるため、各種温度域で優れたエッチング選択性を呈する。このため、目的とする半導体基板以外の場所に堆積したケイ素系化合物のみを選択的にエッチングして効率的かつ経済的に除去することができる。
3)低温(100℃以下)条件下でのエッチングも可能であり、生産性を向上させることができ、経済的にも有利である。
基板上1063nmの膜厚のSiO2ウェハ(基板厚さ0.725mm)を装置内に設置し、ClF:96.500vol%、ClF3:0.038vol%、F2:0.050vol%、HF:0.012vol%、O2:3.400vol%からなるエッチングガス組成物を充填して、50℃で30秒間エッチング処理を行った。エッチング処理後、基板上に残存しているSiO2の膜厚を測定したところ1047nmであった。初期膜厚と処理後膜厚との差に基づいてエッチング速度を計算したところ、20.1nm/minであった。
エッチング温度を100℃に代えた以外は実施例1-1と同じ処理を行い、エッチング速度30.5nm/min、変動係数0.06%を得た。
エッチング温度を200℃に代えた以外は実施例1-1と同じ処理を行い、エッチング速度58.7nm/min、変動係数0.08%を得た。
エッチング温度を300℃に代えた以外は実施例1-1と同じ処理を行い、エッチング速度86.1nm/min、変動係数0.07%を得た。
エッチング温度を400℃に代えた以外は実施例1-1と同じ処理を行い、エッチング速度111.2nm/min、変動係数0.09%を得た。
エッチング温度を800℃に代えた以外は実施例1-1と同じ処理を行い、エッチング速度243.4nm/min、変動係数0.10%を得た。
エッチングガス組成物をClF:0.038vol%、ClF3:96.500vol%、F2:0.050vol%、HF:0.012vol%、O2:3.400vol%に代えた以外は実施例1-1と同じ処理を行い、エッチング速度22.4nm/min、変動係数0.09%を得た。
比較例1-1と同じエッチングガス組成物を用いた以外は実施例1-2と同じ処理を行い、エッチング速度26.9nm/min、変動係数0.13%を得た。
比較例1-1と同じエッチングガス組成物を用いた以外は実施例1-3と同じ処理を行い、エッチング速度52.7nm/min、変動係数0.10%を得た。
比較例1-1と同じエッチングガス組成物を用いた以外は実施例1-4と同じ処理を行い、エッチング速度75.6nm/min、変動係数0.29%を得た。
比較例1-1と同じエッチングガス組成物を用いた以外は実施例1-2と同じ処理を行い、エッチング速度431.4nm/min、変動係数0.86%を得た。
基板上300nmの膜厚のSiNウェハ(基板厚さ:0.775mm)を装置内に設置し、ClF:92.500vol%、ClF3:0.038vol%、F2:0.012vol%、HF:0.050vol%、O2:3.400vol%、N2:4.000vol%のエッチングガス組成物を充填して、100℃で30秒間エッチング処理を行った。エッチング処理後、基板上に残存しているSiNの膜厚は299.3nmであった。初期膜厚と処理後膜厚との差に基づいてエッチング速度を計算したところ、1.4nm/minであった。
エッチング温度を200℃に代えた以外は実施例2-1と同じ処理を行い、エッチング速度3.3nm/min、変動係数0.06%を得た。
エッチング温度を300℃に代えた以外は実施例2-1と同じ処理を行い、エッチング速度13.0nm/min、変動係数0.08%を得た。
エッチング温度を400℃に代えた以外は実施例2-1と同じ処理を行い、エッチング速度146.2nm/min、変動係数0.09%を得た。
エッチングガス組成物をClF:0.038vol%、ClF3:92.500vol%、F2:0.050vol%、HF:0.012vol%、O2:3.400vol%、N:4.000vol%に代えた以外は実施例2-1と同じ処理を行い、エッチング速度1.9nm/min、変動係数0.15%を得た。
エッチング温度を200℃に代えた以外は比較例2-1と同じ処理を行い、エッチング速度3.1nm/min、変動係数0.16%を得た。
エッチング温度を300℃に代えた以外は比較例2-1と同じ処理を行い、エッチング速度84.9nm/min、変動係数0.33%を得た。
エッチング温度を400℃に代えた以外は比較例2-1と同じ処理を行い、エッチング速度731.2nm/min、変動係数0.92%を得た。
エッチング対象物を実施例1の基板上1063nmの膜厚のSiO2ウェハ(基板厚さ0.725mm)に代えた以外は、実施例2-1~2-4と同様に行い、表1に示すエッチング速度、変動係数、及び選択比を得た。
エッチングガス組成物を比較例2-1~2-4と同じエッチングガス組成物に代えた以外は、実施例2-5~2-8と同様に行い、表1に示すエッチング速度、変動係数、及び選択比を得た。
基板上300nmの膜厚のpoly-Siウェハ(基板厚さ:0.725mm)を装置内に設置し、ClF:92.500vol%、ClF3:0.038vol%、F2:0.012vol%、HF:0.050vol%、O2:3.400vol%、N2:4.000vol%のエッチングガス組成物を充填して、100℃で30秒間エッチング処理を行った。エッチング処理後、基板上に残存しているpoly-Siの膜厚は299.9nmであった。初期膜厚と処理後膜厚との差に基づいてエッチング速度を計算したところ、0.2nm/minであった。
エッチング温度を200℃に代えた以外は実施例3-1と同じ処理を行い、エッチング速度170.9nm/min、変動係数0.07%を得た。
エッチング温度を300℃に代えた以外は実施例3-1と同じ処理を行い、エッチング速度375.4nm/min、変動係数0.10%を得た。
エッチング温度を400℃に代えた以外は実施例3-1と同じ処理を行い、エッチング速度413.3nm/min、変動係数0.12%を得た。
エッチングガス組成物をClF:0.038vol%、ClF3:92.500vol%、F2:0.050vol%、HF:0.012vol%、O2:3.400vol%、N:4.000vol%に代えた以外は実施例3-1と同じ処理を行ったところ、オーバーエッチングとなった。エッチング速度は604.4nm/minであった。
エッチング温度を200℃に代えた以外は比較例3-1と同じ処理を行ったところ、オーバーエッチングとなった。エッチング速度604.3nm/min、変動係数は0.63%と算出した。
Claims (6)
- (1)XF(XはCl、Br又はI)で示されるフッ化ハロゲン化合物を主成分として含み、さらに、(2)F2と、(3)XFn(XはCl、Br又はI、nは3以上の整数)で示されるフッ化ハロゲン化合物と、(4)HFと、(5)O2と、(6)Cl2、Br2、及びI2より選択される1種以上のハロゲンガス単体と、を含むことを特徴とするエッチングガス組成物。
- (1)XF(XはCl、Br又はI)で示されるフッ化ハロゲン化合物を90.00~99.999vol%と、(2)F2及び(6)ハロゲンガス単体の合計で0.000005~0.20vol%と、(3)XFn(XはCl、Br又はI、nは3以上の整数)で示されるフッ化ハロゲン化合物を0.000005~0.10vol%と、(4)HFを0.000003~0.30vol%と、(5)残部O2とを含む請求項1に記載のエッチングガス組成物。
- (1)XF(XはCl、Br又はI)で示されるフッ化ハロゲン化合物を90.00~99.999vol%と、(2)F2及び(6)ハロゲンガス単体の合計で0.000005~0.20vol%と、(3)XFn(XはCl、Br又はI、nは3以上の整数)で示されるフッ化ハロゲン化合物を0.000005~0.10vol%と、(4)HFを0.000003~0.30vol%と、(5)残部O2及び希釈剤とを含む請求項1に記載のエッチングガス組成物。
- 熱エネルギーによるエッチングガスの励起によって半導体基板をエッチング又は加工する方法であって、プラズマを使用せずに、請求項1~3のいずれか1に記載のエッチングガス組成物を使用して、結晶シリコン、アモルファスシリコン、多結晶シリコン、SiC、SiOC、SiOCN、SiON、SiCN、SiN、SiOm(mは自然数)、Poly-Si、及びPoly-SiOm(mは自然数)から選択されるケイ素化合物の堆積物又は薄膜を加工もしくはエッチングすることを特徴とするエッチング方法。
- 熱エネルギーによるエッチングガスの励起によって半導体基板をエッチング又は加工する方法であって、プラズマを使用せずに、請求項1~3のいずれか1に記載のエッチングガス組成物を-10℃~800℃のエッチング温度で使用して、結晶シリコン、アモルファスシリコン、多結晶シリコン、SiC、SiOC、SiOCN、SiON、SiCN、SiN、SiOm(mは自然数)、Poly-Si、及びPoly-SiOm(mは自然数)から選択されるケイ素化合物の堆積物又は薄膜を加工もしくはエッチングすることを特徴とするエッチング方法。
- エッチング温度は0~400℃であることを特徴とする請求項5に記載のエッチング方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020177012477A KR101953044B1 (ko) | 2014-10-10 | 2015-08-12 | 규소 화합물용 에칭 가스 조성물 및 에칭 방법 |
JP2016552855A JP6280655B2 (ja) | 2014-10-10 | 2015-08-12 | ケイ素化合物用エッチングガス組成物及びエッチング方法 |
CN201580055015.0A CN107112223B (zh) | 2014-10-10 | 2015-08-12 | 硅化合物用蚀刻气体组合物及蚀刻方法 |
US15/518,100 US10287499B2 (en) | 2014-10-10 | 2015-08-12 | Etching gas composition for silicon compound, and etching method |
GB1705722.5A GB2551017B (en) | 2014-10-10 | 2015-08-12 | Etching gas composition for silicon compound, and etching method |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014-208668 | 2014-10-10 | ||
JP2014208668 | 2014-10-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2016056300A1 true WO2016056300A1 (ja) | 2016-04-14 |
Family
ID=55652925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2015/072827 WO2016056300A1 (ja) | 2014-10-10 | 2015-08-12 | ケイ素化合物用エッチングガス組成物及びエッチング方法 |
Country Status (7)
Country | Link |
---|---|
US (1) | US10287499B2 (ja) |
JP (1) | JP6280655B2 (ja) |
KR (1) | KR101953044B1 (ja) |
CN (1) | CN107112223B (ja) |
GB (1) | GB2551017B (ja) |
TW (1) | TWI648429B (ja) |
WO (1) | WO2016056300A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018037739A1 (ja) * | 2016-08-22 | 2018-03-01 | 東京エレクトロン株式会社 | エッチング方法およびdramキャパシタの製造方法 |
TWI689005B (zh) * | 2018-06-01 | 2020-03-21 | 大陸商北京北方華創微電子裝備有限公司 | 非電漿蝕刻方法 |
WO2021106602A1 (ja) * | 2019-11-27 | 2021-06-03 | 昭和電工株式会社 | 紫外分光法によるハロゲンフッ化物含有ガスに含まれるフッ素ガス濃度の測定方法 |
WO2021210368A1 (ja) * | 2020-04-14 | 2021-10-21 | 昭和電工株式会社 | エッチング方法及び半導体素子の製造方法 |
KR20220028071A (ko) | 2019-10-25 | 2022-03-08 | 쇼와 덴코 가부시키가이샤 | 질화규소의 에칭 방법 및 반도체 소자의 제조 방법 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107845574B (zh) * | 2017-10-31 | 2018-11-23 | 长鑫存储技术有限公司 | 半导体上刻蚀去除氧化物的方法 |
JP7072440B2 (ja) * | 2018-05-16 | 2022-05-20 | 東京エレクトロン株式会社 | シリコン含有膜のエッチング方法、コンピュータ記憶媒体、及びシリコン含有膜のエッチング装置 |
JPWO2020129725A1 (ja) * | 2018-12-21 | 2021-11-04 | 昭和電工株式会社 | ハロゲンフッ化物によるエッチング方法、半導体の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08153711A (ja) * | 1994-11-26 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | エッチング装置 |
JP2013070012A (ja) * | 2011-09-07 | 2013-04-18 | Central Glass Co Ltd | ドライエッチング方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5350480A (en) * | 1993-07-23 | 1994-09-27 | Aspect International, Inc. | Surface cleaning and conditioning using hot neutral gas beam array |
JPH07193055A (ja) | 1993-12-27 | 1995-07-28 | Toshiba Corp | ドライエッチング方法 |
JP3234117B2 (ja) | 1994-12-12 | 2001-12-04 | 株式会社半導体エネルギー研究所 | エッチング方法 |
JPH09321025A (ja) * | 1996-05-30 | 1997-12-12 | Fujitsu Ltd | 半導体装置の製造方法 |
CN1411040A (zh) * | 2001-09-21 | 2003-04-16 | 旺宏电子股份有限公司 | 一种用于制造半导体组件的干式蚀刻方法 |
US20050241671A1 (en) * | 2004-04-29 | 2005-11-03 | Dong Chun C | Method for removing a substance from a substrate using electron attachment |
US8901699B2 (en) * | 2005-05-11 | 2014-12-02 | Cree, Inc. | Silicon carbide junction barrier Schottky diodes with suppressed minority carrier injection |
US7531461B2 (en) * | 2005-09-14 | 2009-05-12 | Tokyo Electron Limited | Process and system for etching doped silicon using SF6-based chemistry |
JP4799509B2 (ja) | 2007-08-16 | 2011-10-26 | 株式会社半導体エネルギー研究所 | 剥離方法 |
JP5434970B2 (ja) * | 2010-07-12 | 2014-03-05 | セントラル硝子株式会社 | ドライエッチング剤 |
KR101830170B1 (ko) * | 2011-05-17 | 2018-02-21 | 삼성디스플레이 주식회사 | 산화물 반도체 소자, 산화물 반도체 소자의 제조 방법, 산화물 반도체소자를 포함하는 표시 장치 및 산화물 반도체 소자를 포함하는 표시 장치의 제조 방법 |
JP6097192B2 (ja) * | 2013-04-19 | 2017-03-15 | 東京エレクトロン株式会社 | エッチング方法 |
-
2015
- 2015-08-12 JP JP2016552855A patent/JP6280655B2/ja active Active
- 2015-08-12 US US15/518,100 patent/US10287499B2/en active Active
- 2015-08-12 KR KR1020177012477A patent/KR101953044B1/ko active IP Right Grant
- 2015-08-12 GB GB1705722.5A patent/GB2551017B/en active Active
- 2015-08-12 WO PCT/JP2015/072827 patent/WO2016056300A1/ja active Application Filing
- 2015-08-12 CN CN201580055015.0A patent/CN107112223B/zh active Active
- 2015-09-04 TW TW104129379A patent/TWI648429B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08153711A (ja) * | 1994-11-26 | 1996-06-11 | Semiconductor Energy Lab Co Ltd | エッチング装置 |
JP2013070012A (ja) * | 2011-09-07 | 2013-04-18 | Central Glass Co Ltd | ドライエッチング方法 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018037739A1 (ja) * | 2016-08-22 | 2018-03-01 | 東京エレクトロン株式会社 | エッチング方法およびdramキャパシタの製造方法 |
JP2018032664A (ja) * | 2016-08-22 | 2018-03-01 | 東京エレクトロン株式会社 | エッチング方法およびdramキャパシタの製造方法 |
US10854463B2 (en) | 2016-08-22 | 2020-12-01 | Tokyo Electron Limited | Etching method and method for manufacturing DRAM capacitor |
TWI689005B (zh) * | 2018-06-01 | 2020-03-21 | 大陸商北京北方華創微電子裝備有限公司 | 非電漿蝕刻方法 |
JP7187581B2 (ja) | 2018-06-01 | 2022-12-12 | 北京北方華創微電子装備有限公司 | 非プラズマエッチング方法 |
JP2021525459A (ja) * | 2018-06-01 | 2021-09-24 | 北京北方華創微電子装備有限公司Beijing Naura Microelectronics Equipment Co., Ltd. | 非プラズマエッチング方法 |
KR20220028071A (ko) | 2019-10-25 | 2022-03-08 | 쇼와 덴코 가부시키가이샤 | 질화규소의 에칭 방법 및 반도체 소자의 제조 방법 |
CN113785190A (zh) * | 2019-11-27 | 2021-12-10 | 昭和电工株式会社 | 由紫外光谱法测定含卤素氟化物气体所含的氟气浓度的测定方法 |
KR20220005530A (ko) * | 2019-11-27 | 2022-01-13 | 쇼와 덴코 가부시키가이샤 | 자외 분광법에 의한 할로겐불화물 함유 가스에 포함되는 불소 가스 농도의 측정 방법 |
TWI769591B (zh) * | 2019-11-27 | 2022-07-01 | 日商昭和電工股份有限公司 | 利用紫外分光法之含鹵素氟化物氣體所包含之氟氣體濃度的測定方法 |
WO2021106602A1 (ja) * | 2019-11-27 | 2021-06-03 | 昭和電工株式会社 | 紫外分光法によるハロゲンフッ化物含有ガスに含まれるフッ素ガス濃度の測定方法 |
IL287814B1 (en) * | 2019-11-27 | 2023-08-01 | Showa Denko Kk | A method for measuring the concentration of fluorine gas in a gas that includes hydrofluoric acid using ultraviolet spectroscopic devices |
KR102687828B1 (ko) * | 2019-11-27 | 2024-07-24 | 가부시끼가이샤 레조낙 | 자외 분광법에 의한 할로겐불화물 함유 가스에 포함되는 불소 가스 농도의 측정 방법 |
US12066418B2 (en) | 2019-11-27 | 2024-08-20 | Resonac Corporation | Method for measuring concentration of fluorine gas contained in halogen fluoride-containing gas by ultra violet spectroscopy |
WO2021210368A1 (ja) * | 2020-04-14 | 2021-10-21 | 昭和電工株式会社 | エッチング方法及び半導体素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI648429B (zh) | 2019-01-21 |
JP6280655B2 (ja) | 2018-02-14 |
CN107112223A (zh) | 2017-08-29 |
TW201614105A (en) | 2016-04-16 |
KR101953044B1 (ko) | 2019-02-27 |
US10287499B2 (en) | 2019-05-14 |
GB201705722D0 (en) | 2017-05-24 |
GB2551017B (en) | 2020-03-11 |
GB2551017A (en) | 2017-12-06 |
CN107112223B (zh) | 2021-05-07 |
US20180251679A1 (en) | 2018-09-06 |
JPWO2016056300A1 (ja) | 2017-07-27 |
KR20170066603A (ko) | 2017-06-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6280655B2 (ja) | ケイ素化合物用エッチングガス組成物及びエッチング方法 | |
TWI381438B (zh) | 半導體處理裝置之清潔方法及矽基板之蝕刻方法 | |
KR100656770B1 (ko) | 고유전율 물질의 에칭 방법 및 고유전율 물질용 증착챔버의 세정 방법 | |
US8435419B2 (en) | Methods of processing substrates having metal materials | |
TW202208651A (zh) | 用於電漿系統之腔室構件的表面塗層 | |
US11164767B2 (en) | Integrated system for semiconductor process | |
JP2007150305A (ja) | 二フッ化キセノンを用いた窒化チタンの選択的エッチング | |
TWI508150B (zh) | 用於沉積具有低界面汙染之層的方法 | |
US20220139720A1 (en) | Etching of Metal Oxides Using Fluorine and Metal Halides | |
JP2023001302A (ja) | ドライエッチング方法 | |
CN112470258A (zh) | 用于纳米线的选择性蚀刻 | |
TWI823962B (zh) | 電漿處理期間減少微粒形成之卡盤的保護層 | |
TWI833930B (zh) | 乾式蝕刻方法及半導體裝置之製造方法 | |
WO2018181104A1 (ja) | ドライエッチング方法またはドライクリーニング方法 | |
TWI808274B (zh) | 含有具有不飽和鍵之含硫氟碳化合物的乾式蝕刻氣體組成物及使用其之乾式蝕刻方法 | |
TWI769118B (zh) | 金屬硬式罩幕蝕刻方法 | |
CN117581332A (zh) | 在半导体基板的顶表面和底表面上的选择性碳沉积 | |
WO2023166987A1 (ja) | ハードマスク、基板処理方法、およびハードマスクの除去方法 | |
TWI853827B (zh) | 用於奈米線的選擇性蝕刻 | |
CN118103950A (zh) | 选择性硅沉积 | |
US9653282B2 (en) | Silicon-containing substrate cleaning procedure |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 15848865 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2016552855 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 201705722 Country of ref document: GB Kind code of ref document: A Free format text: PCT FILING DATE = 20150812 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 15518100 Country of ref document: US |
|
ENP | Entry into the national phase |
Ref document number: 20177012477 Country of ref document: KR Kind code of ref document: A |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 15848865 Country of ref document: EP Kind code of ref document: A1 |