WO2014119514A1 - シート状モールド及びその製造方法並びにその用途 - Google Patents
シート状モールド及びその製造方法並びにその用途 Download PDFInfo
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- WO2014119514A1 WO2014119514A1 PCT/JP2014/051673 JP2014051673W WO2014119514A1 WO 2014119514 A1 WO2014119514 A1 WO 2014119514A1 JP 2014051673 W JP2014051673 W JP 2014051673W WO 2014119514 A1 WO2014119514 A1 WO 2014119514A1
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- sheet
- mold
- silicone rubber
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- fiber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/0011—Moulds or cores; Details thereof or accessories therefor thin-walled moulds
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
- B29C33/40—Plastics, e.g. foam or rubber
- B29C33/405—Elastomers, e.g. rubber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
- B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
- B29C59/026—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing of layered or coated substantially flat surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/42—Moulds or cores; Details thereof or accessories therefor characterised by the shape of the moulding surface, e.g. ribs or grooves
- B29C33/424—Moulding surfaces provided with means for marking or patterning
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2883/00—Use of polymers having silicon, with or without sulfur, nitrogen, oxygen, or carbon only, in the main chain, as mould material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2913/00—Use of textile products or fabrics as mould materials
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/757—Moulds, cores, dies
Definitions
- the present invention relates to a sheet-like mold containing silicone rubber and fiber, a method for producing the same, and use thereof.
- a patterning technique for forming a fine pattern using a mold has attracted attention in the manufacturing process of semiconductors and optical materials.
- various methods such as soft lithography, capillary force lithography, and imprint lithography are known.
- imprint lithography an uneven pattern formed in a mold is used as an imprint resin. By stamping and transferring, a resin structure having a concavo-convex pattern can be easily produced.
- a mold made of quartz glass, a mold made of nickel, or the like is used as a mold.
- these molds are inferior in the mold release property of a resin, they are used by applying a release agent to the mold surface.
- silicone rubber has high transparency and high releasability from imprint resin, imprint resin can be photocured with the mold stamped, and then cured imprint resin is easy. Can be released.
- the curable silicone rubber having a polydimethylsiloxane (PDMS) unit is easily cured and easily available, and thus the silicone rubber made of the cured product is widely used as a material for forming a mold. .
- PDMS polydimethylsiloxane
- the PDMS cured body has low mechanical strength such as Young's modulus and tensile elastic modulus, when the mold made of the PDMS cured body is used in a large area, it may be damaged when the imprint resin is released from the mold. was there. Therefore, when producing a mold with a large area using PDMS, it is necessary to provide a sufficient thickness to ensure the mechanical strength necessary for handling, so a large amount of PDMS is required, which greatly increases the manufacturing cost. There is a problem of becoming higher. Therefore, a mold having high mechanical strength and capable of being thinned is required.
- Patent Document 1 Japanese Patent Application Laid-Open No. 2007-1288 includes a support film having a high UV transmittance formed of a sheet in two directions, and a mold that surrounds the entire support film and has unevenness formed on one surface.
- An improved mold is disclosed.
- a polyethylene terephthalate (PET) film is described as the support film
- a mold formed of a PDMS cured body is described as the mold.
- the thin film is formed while maintaining the mechanical strength of the mold by forming a thin film surrounded by a PDMS cured body using a transparent film as a core material.
- Patent Document 2 discloses a liquid precursor of cellulose fiber and matrix resin having an average fiber diameter of 4 to 200 nm as a resin composition used as a sealant, an adhesive, or a filler.
- a transparent fiber reinforced composite resin composition comprising: This document describes that as the matrix resin, highly transparent acrylic resin, methacrylic resin, epoxy resin, and silicone resin are preferable.
- water is replaced with a gel-like silicone resin (TSE3051 manufactured by GE Toshiba Silicone) in an aqueous suspension of hydrous bacterial cellulose, and a fiber-reinforced composite resin composition having a fiber content of 10%. And a cured product is prepared.
- TSE3051 manufactured by GE Toshiba Silicone
- the silicone resin used in the examples is a silicone compound called a silicone gel having a low elastic modulus, has a low handling property, and is not suitable as a mold material.
- JP 2007-1288 A (Claims) JP 2007-146143 A (Claim 1, paragraph [0086], Example)
- an object of the present invention is to provide a sheet-like mold having a high strength even when it is thin and large in area and having a low breakage rate at the time of release, and a method for producing the same.
- Another object of the present invention is to provide a sheet-like mold having a low coefficient of linear expansion and a shape of a fine pattern which is not easily deformed by a temperature change, and a method for manufacturing the same.
- Still another object of the present invention is to provide a sheet-like mold having excellent transparency and high ultraviolet transmittance and a method for producing the same.
- Another object of the present invention is a method for transferring a fine pattern even if the transfer object to be imprinted by a sheet-shaped mold has a large area, and a transfer object to which the fine pattern is transferred by the method.
- the present inventors have reinforced cured silicone rubber with fibers in a sheet-like mold having a concavo-convex pattern on the surface, thereby reducing the strength even in a thin and large area.
- the present invention has been completed by finding that a sheet-like mold having a high breakage rate at the time of mold release is low.
- the sheet-like mold of the present invention includes a cured silicone rubber containing polyorganosiloxane and fibers that reinforce the cured silicone rubber.
- the fiber may be a cellulose nanofiber.
- the sheet-like mold of the present invention may have an uneven pattern on at least one surface.
- the surface of the fiber may be treated with a hydrophobizing agent (particularly a silane coupling agent).
- the fiber may be a nonwoven fabric, and the silicone rubber may be impregnated into the nonwoven fabric and cured.
- the cured silicone rubber may include a two-component curable silicone rubber containing a polydimethylsiloxane unit.
- the average height of the convex portions of the concave / convex pattern may be 50 nm to 100 ⁇ m, and the minimum width of the convex portions or concave portions is It may be 50 nm to 100 ⁇ m.
- the sheet-shaped mold of the present invention may be a nanoimprint lithography mold (or transfer mold) using a photocurable resin (for example, a photocationic curable resin).
- a sheet-forming step in which fibers and a curable silicone rubber composition containing a polyorganosiloxane unit are combined to form a sheet, and the curable silicone rubber composition is cured to form the curable resin.
- the manufacturing method of the sheet-like mold including the hardening process of obtaining the composite sheet containing the hardened
- the method for producing a sheet-shaped mold may include a mold surface forming step of forming a target mold shape using a base mold (master mold) on one surface of an uncured composite sheet.
- the sheet forming step may include an impregnation step of impregnating a curable silicone rubber composition into a non-woven fabric made of paper.
- the master mold may be a master mold obtained by repeatedly transferring the master mold adjacent in the vertical and horizontal directions using a mold smaller than the master mold.
- the present invention also includes a method of transferring a target shape onto a transfer target using the sheet-like mold as a mold.
- the sheet-like mold of the present invention combines a cured silicone rubber and a fiber, the strength is high even in a thin and large area, and the breakage rate at the time of release is low. Further, the linear expansion coefficient is low, and the shape of the fine pattern is not easily deformed by a temperature change. Furthermore, it is excellent in transparency and has high transparency to ultraviolet rays. Furthermore, since the sheet-like mold is used, the uneven pattern can be transferred with high accuracy even if the transfer target imprinted by the sheet-like mold has a large area.
- FIG. 1 is a graph of the stress at break against the weight ratio of silicone rubber (PDMS) / cellulose nonwoven fabric of the composite sheet obtained in the example.
- PDMS silicone rubber
- the sheet-like mold of the present invention contains a cured silicone rubber containing polyorganosiloxane and fibers.
- the fiber may be an inorganic fiber, but an organic fiber is preferable from the viewpoint of easy preparation.
- Organic fibers include natural fibers (for example, cellulose, silk, wool fibers), regenerated fibers (for example, protein or polypeptide fibers, alginic acid fibers, etc.), bituminous carbonaceous fibers (such as pitch fibers), synthetic fibers (thermosetting) Resin fiber, thermoplastic resin fiber, etc.).
- natural fibers for example, cellulose, silk, wool fibers
- regenerated fibers for example, protein or polypeptide fibers, alginic acid fibers, etc.
- bituminous carbonaceous fibers such as pitch fibers
- synthetic fibers thermosetting
- Cellulose fibers are not particularly limited as long as they are polysaccharides having a ⁇ -1,4-glucan structure, and cellulose fibers derived from higher plants [eg, wood fibers (wood pulp of conifers, hardwoods, etc.), bamboo fibers, etc.
- Natural cellulose fibers such as sugarcane fibers, seed hair fibers (cotton linters, Bombax cotton, kapok, etc.), gin leather fibers (eg, hemp, mulberry, mitsumata), leaf fibers (eg, Manila hemp, New Zealand hemp) Pulp fibers) etc.], animal-derived cellulose fibers (eg, squirt cellulose), bacteria-derived cellulose fibers, chemically synthesized cellulose fibers [cellulose acetate (cellulose acetate), cellulose propionate, cellulose butyrate, cellulose acetate Propionate, cellulose acetate Organic acid esters such as tyrates; inorganic acid esters such as cellulose nitrate, cellulose sulfate, and cellulose phosphate; mixed acid esters such as cellulose nitrate acetate; hydroxyalkyl celluloses (eg, hydroxyethyl cellulose (HEC), hydroxypropyl cellulose, etc.); carboxyalkyls Cellu
- the cellulose fiber is a high-purity cellulose having a high ⁇ -cellulose content, for example, an ⁇ -cellulose content of 70 to 100% by weight (eg, 95 to 100% by weight), preferably 98 to 100, depending on applications. It may be about wt%. Furthermore, by using high-purity cellulose with a low content of lignin and hemicellulose, even if wood fibers or seed hair fibers are used, micrometer-sized fibers having a uniform fiber diameter can be prepared with a nanometer size.
- Cellulose having a low lignin or hemicellulose content is particularly a cellulose having a kappa number ( ⁇ value) of 30 or less (eg, 0 to 30), preferably 0 to 20, more preferably 0 to 10 (particularly 0 to 5). There may be.
- the kappa number can be measured by a method based on “Pulp-Kappa number test method” of JIS P8211.
- plant-derived cellulose fibers such as wood fibers (wood pulp of conifers, hardwoods, etc.) and seed hair fibers (cotton) are used because of their high productivity and moderate fiber diameter and fiber length.
- Fine cellulose fibers derived from pulp such as linter pulp) are preferred.
- the pulp is obtained by a mechanical method (pulverized wood pulp, refiner ground pulp, thermomechanical pulp, semichemical pulp, chemiground pulp, etc.), or a pulp obtained by a chemical method (craft pulp, sulfite). Pulp or the like), or beating fibers (beating pulp or the like) that have been subjected to beating (preliminary beating) as described below, if necessary.
- the cellulose fiber may be a fiber subjected to a conventional purification treatment such as degreasing treatment (for example, absorbent cotton).
- a conventional purification treatment such as degreasing treatment (for example, absorbent cotton).
- dry pulp that is, pulp having no drying history (pulp that remains wet without being dried) is particularly preferable.
- the never dry pulp is a pulp composed of wood fibers and / or seed hair fibers, and may be a pulp having a kappa number of 30 or less (particularly about 0 to 10).
- Such pulp may be prepared by bleaching wood fibers and / or seed hair fibers with chlorine.
- the cross-sectional shape of the fiber is not particularly limited.
- the cross-sectional shape of the cellulose fiber may be an anisotropic shape (flat shape) such as bacterial cellulose, but in the case of a plant-derived cellulose fiber, a substantially isotropic shape is preferable.
- the substantially isotropic shape include a substantially perfect circle shape and a substantially regular polygon shape.
- the ratio of the major axis to the minor axis of the cross section is, for example, 1 to 2, preferably Is about 1 to 1.5, more preferably about 1 to 1.3 (particularly 1 to 1.2).
- the fiber diameter of the fiber may be an average fiber diameter of 10 ⁇ m or less, and can be selected from a range of, for example, about 4 nm to 10 ⁇ m (for example, 5 nm to 5 ⁇ m). Nanometer-sized microfibers (nanofibers) are preferable from the viewpoint of improving the resistance.
- the fibers are cellulose fibers
- plant-derived microcellulose fibers obtained by microfibrillation of the raw material cellulose fibers are preferable.
- the average fiber diameter of the microfibers can be selected from a range of about 10 to 1000 nm, for example, about 10 to 800 nm, preferably 15 to 500 nm, more preferably 20 to 300 nm (particularly 25 to 100 nm). is there.
- the maximum fiber diameter of microfibers may be 2 ⁇ m or less (for example, 20 to 2000 nm), for example, 20 to 1000 nm, preferably 30 to 500 nm, more preferably 40 to 300 nm (particularly 50 to 50 nm). About 100 nm).
- the standard deviation of the fiber diameter distribution of the microfibers is, for example, 1 ⁇ m or less (for example, 5 to 1000 nm), preferably 10 to 500 nm, more preferably about 10 to 100 nm.
- Microfibers are usually obtained by a method of microfibrillating raw material fibers (particularly cellulose fibers).
- a method of microfibrillation it may be produced through a dispersion preparation step in which raw fibers are dispersed in a solvent to prepare a dispersion, and a microfibrillation step in which the dispersion is microfibrillated.
- the average fiber length of the raw fiber is, for example, about 0.01 to 5 mm, preferably about 0.03 to 4 mm, more preferably about 0.06 to 3 mm (particularly 0.1 to 2 mm), and usually 0.1 to 5 mm. It is about 5 mm.
- the average fiber diameter of the raw fiber is about 0.01 to 500 ⁇ m, preferably about 0.05 to 400 ⁇ m, more preferably about 0.1 to 300 ⁇ m (particularly about 0.2 to 250 ⁇ m).
- the solvent is not particularly limited as long as it does not cause chemical or physical damage to the raw fiber.
- water organic solvents [alcohols (C 1-4 alkanol etc. such as methanol, ethanol, 1-propanol, isopropanol etc.), Ethers (diC 1-4 alkyl ethers such as diethyl ether and diisopropyl ether, cyclic ethers such as tetrahydrofuran (cyclic C 4-6 ethers and the like)), esters (alkanoic esters such as ethyl acetate), ketones (acetone, DiC 1-5 alkyl ketones such as methyl ethyl ketone and methyl butyl ketone, C 4-10 cycloalkanones such as cyclohexanone), aromatic hydrocarbons (toluene, xylene, etc.), halogenated hydrocarbons (methyl chloride, fluoride) Methyl etc.)] etc.
- solvents may be used alone or in combination of two or more.
- water is preferable from the viewpoint of productivity and cost.
- a mixed solvent of water and a hydrophilic organic solvent (C 1-4 alkanol, acetone, etc.) may be used.
- the productivity is high, and the use of the organic solvent makes it possible to produce fine cellulose fibers without giving a burden to the environment.
- the raw material fiber used for the microfibrillation step may be at least coexisting in the solvent, and the raw fiber may be dispersed (or suspended) in the solvent prior to the microfibrillation. Dispersion may be performed using, for example, a conventional disperser (such as an ultrasonic disperser, a homodisper, or a three-one motor).
- the disperser may include mechanical stirring means (such as a stirring bar and a stirring bar).
- the concentration of the raw fiber in the solvent is, for example, about 0.01 to 20% by weight, preferably about 0.05 to 10% by weight, more preferably about 0.1 to 5% by weight (particularly about 0.5 to 3% by weight). It may be.
- the dispersion can be microfibrillated by a conventional method such as beating or homogenizing.
- a conventional beating machine such as a beater, a Jordan, a conical refiner, a single disc refiner, a double disc refiner, or the like can be used.
- a conventional homogenizer such as a homogenizer (particularly, a high-pressure homogenizer) can be used.
- the dispersion may be subjected to beating treatment (preliminary beating treatment) by the above method and then homogenized.
- JP-B-60-19921 JP-A-2011-26760, JP-A-2012-25833, JP-A-2012-36517, and JP-A-2012-36518.
- JP2011-26760A, JP2012-25833A, JP2012-36517A, JP2012-36518A in the case of producing nanofibers having a fiber diameter of about 100 nm or less, JP2011-26760A, JP2012-25833A, JP2012-36517A, JP2012-36518A.
- a homogenization process using a homogenizer equipped with a crushing type homovalve seat may be used.
- the average fiber length of the fibers is not particularly limited and may be long fibers. However, in the case of microfibrillated fibers, the average fiber length can be selected from a range of about 10 to 3000 ⁇ m. From the viewpoint of improving the mechanical properties of the mold, it may be, for example, about 100 to 1000 ⁇ m, preferably 200 to 800 ⁇ m, more preferably about 300 to 700 ⁇ m (particularly 400 to 600 ⁇ m). Further, the ratio of the average fiber length to the average fiber diameter (average fiber length / average fiber diameter) (average aspect ratio) may be 300 or more, for example, 500 or more (for example, 500 to 10,000), preferably 800 to It is about 5000, more preferably about 1000 to 3000 (particularly 1500 to 2000). The fiber may be a non-woven fiber as will be described later.
- the surface of the fibers may be treated with a hydrophobizing agent in order to improve the adhesion to the silicone rubber.
- the hydrophobizing agent is not particularly limited as long as the surface of the fiber can be hydrophobized, and various coupling agents can be used, but a silane coupling agent is preferable from the viewpoint of affinity with silicone rubber.
- silane coupling agent for example, an alkoxysilyl group-containing silane coupling agent (e.g., tetramethoxysilane, tetra-C 1-4 alkoxysilanes such as tetraethoxysilane, methyltrimethoxysilane, C 1 such as octyltriethoxysilane -12 alkyl tri C 1-4 alkoxy silanes, di C 2-4 alkyl di C 1-4 alkoxysilane such as dimethyldimethoxysilane, phenyltrimethoxysilane, and aryl C 1-4 alkoxysilanes such as diphenyldimethoxysilane), halogen containing silane coupling agent [such as trifluoroacetic C 2-4 alkyl tri C 1-4 alkoxysilane such as trifluoropropyl trimethoxy silane, Pafuruoroa such perfluorooctyl ethy
- C 1-4 alkyl trichlorosilane such as methyltrichlorosilane
- Vinyl group-containing silane coupling agents for example, vinyltri-C 1-4 alkoxysilanes such as vinyltrimethoxysilane
- ethylenically unsaturated bond group-containing silane coupling agents for example, 2- (meth) acryloxyethyl (Meth) acryloxy C 2-4 alkyl C 1-4 alkoxysilane etc.
- epoxy group-containing silane coupling agents for example, 2- (3, 4-epoxycyclohexyl) ethyltrimethoxy C 2-4 alkyl tri C 1-4 alkoxysilane having an alicyclic epoxy group such as emission, 2-glycidyloxy ethyltrimethoxysilane, 3-glycidyloxypropyltrimethoxysilane, 3-glycidyloxypropyltriethoxysilane diethoxysilane (Glycidyloxy C 1-4 alkoxy) such as 3-glycidyloxypropyl triethoxysilane, glycidyloxy C 2-4 alkyltri C 1-4 alkoxysilane, 3- (2-glycidyloxyethoxy) propyltrimethoxysilane, etc.
- amino group-containing silane coupling agents for example, amino C 2-4 alkyl C 1 such as 2-aminoethyltrimethoxysilane, 3-aminopropylmethyldimethoxysilane, etc.
- silane coupling agent for example, mercapto C 2-4 alkyl tri-C 1-4 alkoxysilane such as 3-mercaptopropyltrimethoxysilane), carboxyl group-containing silane coupling agent (carboxy C 2-4 alkyl such as 2-carboxyethyltrimethoxysilane) Tri C 1-4 alkoxysilane), silanol group-containing silane coupling agents (for example, trimethylsilanol, etc.), and the like.
- silane coupling agents can be used alone or in combination of two or more.
- vinyl group-containing silane coupling agents particularly vinyltri-C 1-4 alkoxysilanes such as vinyltrimethoxysilane, can be obtained because the adhesion and transparency between cellulose fibers and silicone rubber can be improved. Is preferred.
- the proportion of the hydrophobizing agent is, for example, 0.001 to 1 part by weight, preferably 0.005 to 0.8 part by weight, more preferably 0.01 to 100 parts by weight of the fiber. About 0.5 parts by weight. If the proportion of the hydrophobizing agent is too small, the effect of improving the mechanical properties of the sheet-shaped mold is small, and if too large, the hydrophobizing agent bleeds out from the surface of the sheet-shaped mold.
- the cured silicone rubber is a cured product obtained by curing (vulcanizing) a curable silicone rubber composition having a polyorganosiloxane structure, and may be a cured rubber having a polyorganosiloxane structure.
- the polyorganosiloxane is a linear, branched or network compound having a Si—O bond (siloxane bond), and has the formula: RaSiO (4-a) / 2 (where the coefficient a is 0 to 3).
- examples of the substituent R include a C 1-10 alkyl group such as a methyl group, an ethyl group, a propyl group, and a butyl group, a 3-chloropropyl group, and a 3,3,3-trifluoropropyl group.
- C 2-10 alkenyl groups such as halogenated C 1-10 alkyl groups, vinyl groups, allyl groups, butenyl groups, C 6-20 aryl groups such as phenyl groups, tolyl groups, naphthyl groups, cyclopentyl groups, cyclohexyl groups, etc.
- R is preferably a methyl group, a phenyl group, an alkenyl group (such as a vinyl group), or a fluoro C 1-6 alkyl group.
- polyorganosiloxane examples include polydialkyl siloxane (polydi C 1-10 alkyl siloxane such as polydimethyl siloxane), polyalkyl alkenyl siloxane (poly C 1-10 alkyl C 2-10 alkenyl siloxane such as polymethyl vinyl siloxane).
- Polyalkylaryl siloxane (poly C 1-10 alkyl C 6-20 aryl siloxane such as polymethylphenyl siloxane), polydiaryl siloxane (polydi C 6-20 aryl siloxane such as polydiphenyl siloxane), Constituted copolymers [dimethylsiloxane-methylvinylsiloxane copolymer, dimethylsiloxane-methylphenylsiloxane copolymer, dimethylsiloxane-methyl (3, 3, - trifluoropropyl) siloxane copolymer, dimethylsiloxane - methylvinylsiloxane - methylphenylsiloxane copolymer, etc.], and others. These polyorganosiloxanes can be used alone or in combination of two or more.
- the polyorganosiloxane has an epoxy group, hydroxyl group, alkoxy group, carboxyl group, amino group or substituted amino group (dialkylamino group, etc.), ether group, It may be a polyorganosiloxane having a substituent such as a (meth) acryloyl group. Further, both ends of the polyorganosiloxane may be, for example, a trimethylsilyl group, a dimethylvinylsilyl group, a silanol group, a tri C 1-2 alkoxysilyl group, or the like.
- polydiC 1-10 alkylsiloxanes particularly polydimethylsiloxane (PDMS) are preferable because they are excellent in flexibility. Furthermore, since it is difficult to reduce the thickness of PDMS, the effects of the present invention are particularly prominent.
- PDMS polydimethylsiloxane
- the polyorganosiloxane structure forming the silicone rubber may be branched or networked, but is preferably linear from the viewpoint of flexibility.
- the silicone rubber include methyl silicone rubber, vinyl silicone rubber, phenyl silicone rubber, phenyl vinyl silicone rubber, and fluorinated silicone rubber. Of these, methyl silicone rubber composed of PDMS is preferred.
- the silicone rubber may be a combination of a linear polyorganosiloxane (such as methyl silicone rubber) and a branched or network polyorganosiloxane (such as MQ resin).
- the silicone rubber may be either a room temperature curing type or a thermosetting type, and may be either a one-component curing type or a two-component curing type. Of these, two-component curable silicone rubber is preferable from the viewpoints of handleability and heat resistance.
- the two-part curable silicone rubber is a two-part curable silicone rubber utilizing a hydrosilylation reaction, such as polyorganosiloxane having an alkenyl group (particularly polydimethylsiloxane having a vinyl group) and organohydrogenpolysiloxane (particularly, Or a combination (cured product) with a plurality of hydrogen atoms (polydimethylsiloxane having a hydride group or silicon hydride) bonded to a silicon atom.
- a hydrosilylation reaction such as polyorganosiloxane having an alkenyl group (particularly polydimethylsiloxane having a vinyl group) and organohydrogenpolysiloxane (particularly, Or a combination (cured product) with a plurality of hydrogen atoms (polydimethylsiloxane having a hydride group or silicon hydride) bonded to a silicon atom.
- organohydrogenpolysiloxane is used as a curing agent, and the ratio of the curing agent is 1 to 30 weights in terms of solid content with respect to 100 parts by weight of polyorganosiloxane having an alkenyl group. Parts, preferably 3 to 20 parts by weight, more preferably about 5 to 15 parts by weight.
- the curable silicone rubber composition may contain a curing catalyst.
- a conventional catalyst such as an organic peroxide [diacyl peroxide, peroxy ester, dialkyl peroxide (dicumyl peroxide, t-butylcumyl peroxide, 1, 1-di-butylperoxy-3,3,5-trimethylcyclohexane 2,5-dimethyl-2,5-di (t-butylperoxy) -hexane, 1,3-bis (t-butylperoxy-isopropyl ) Benzene, di-t-butyl peroxide, etc.], tin salt (tin soap, etc.), platinum group metal compounds (eg platinum fine powder, platinum black, chloroplatinic acid, chloroplatinic acid alcohol solution, platinum And olefin complexes, platinum and alkenylsiloxane complexes, platinum-phosphorus complexes such as platinum catalysts, and these platinum catalysts Corresponding palladium
- the tensile elastic modulus of the cured silicone rubber is, for example, about 0.1 to 2000 MPa, preferably about 0.5 to 1000 MPa, more preferably about 1 to 100 MPa (particularly 1 to 10 MPa), for example, 1 to 5 MPa (particularly 1. About 5 to 3 MPa). If the tensile modulus is too small (too soft), handling properties will not improve even if it is combined with fibers such as cellulose fibers, and in particular, it will become a silicone gel used for potting agents, making it impossible to form a sheet. is there. On the other hand, if it is too large (too hard), the followability to the curved surface is reduced, and if it is thinned, cracks are likely to occur. In this specification, the tensile elastic modulus can be measured in accordance with JIS K7161, and in detail, it can be measured by the method of Examples described later.
- the sheet-like mold of the present invention includes cured silicone rubber and fibers.
- the ratio of the cured silicone rubber to the fiber is, for example, about 100 to 10,000 parts by weight, preferably 200 to 9000 parts by weight, more preferably 300 to 8000 parts by weight (particularly 500 to 5000 parts by weight) with respect to 100 parts by weight of the fiber. It is. If the ratio of the cured silicone rubber is too small, the mold release property and transparency of the sheet-shaped mold are lowered, and if it is too large, the mechanical strength is lowered and it is difficult to reduce the thickness.
- the fiber may be contained in the sheet mold in the form of a nonwoven fabric.
- the sheet-like mold may include a sheet-like nonwoven fabric in which silicone rubber is impregnated and cured between the nonwoven fabric fibers.
- the cured silicone rubber is filled between the intertwined fibers of the nonwoven fabric, the mechanical strength of the sheet-like mold of the present invention can be increased more efficiently, and the thinner Can be
- the nonwoven fabric can use 1 sheet or several nonwoven fabric.
- a target mold surface shape may be formed on one surface of the sheet mold.
- the shape of the mold surface may be smooth, but is usually an uneven pattern shape.
- the concavo-convex pattern is formed by a plurality of convex portions and / or concave portions and may be formed in a random form, but is usually formed in a regular or periodic pattern form.
- the form of such a pattern is not particularly limited, and may be, for example, a stripe shape, a lattice shape, or a moth eye shape.
- Such a concavo-convex pattern is usually a concavo-convex pattern used for soft lithography, capillary force lithography, imprint lithography or the like.
- imprint lithography is preferable from the viewpoint of excellent releasability from the sheet-like mold
- nanoimprint lithography is particularly preferable from the viewpoint that strength can be maintained even when the thickness is reduced.
- the concavo-convex pattern preferably has a shape corresponding to the pattern to be transferred to the transfer target.
- the concavo-convex pattern of the sheet-shaped mold may be a concavo-convex pattern shape in which the concavo-convex pattern shape of the transfer target is reversed.
- the minimum width of the convex portion or the concave portion may be about 50 nm to 100 ⁇ m.
- the concavo-convex pattern may be nanoscale, and the width of at least one convex portion or the concave portion (minimum width of the convex portion or concave portion) is, for example, 5000 nm or less (for example, 100 to 4000 nm), preferably 3000 nm. It may be about (for example, 100 to 2000 nm) or less, more preferably about 2000 nm or less (particularly 100 to 1000 nm).
- the average height of the convex portions is, for example, about 50 nm to 100 ⁇ m, preferably about 100 to 4000 nm, more preferably about 100 to 2000 nm (particularly about 100 to 1000 nm). Further, the ratio (aspect ratio) between the width and height of the concavo-convex pattern is, for example, about 0.2 to 5, preferably about 0.5 to 2.
- the sheet mold of the present invention may be formed of a single layer or a plurality of layers having different compositions.
- the sheet-like mold is formed of a plurality of layers (for example, two layers)
- one layer may be a layer containing fibers
- the other layer may be a layer not containing fibers.
- a mold surface shape (particularly a concavo-convex pattern) may be formed on the other layer that does not contain fibers.
- the fibers and the cured silicone rubber are substantially uniformly mixed from the viewpoint of strength.
- a sheet-shaped mold in which at least fibers are contained in the layer on the side where the mold surface shape is not formed is preferable, and the deformation of the pattern shape due to heating can also be suppressed.
- a sheet-shaped mold (including a sheet-shaped mold formed of a single layer, or a plurality of layers including fibers in any layer) including fibers in a layer (pattern part) in which a mold surface shape is formed A sheet mold) is particularly preferable.
- the thickness of the layer containing the fiber is the entire thickness of the sheet-like mold (when the convex portion is formed on the surface, the thickness is based on the top of the convex portion). It is preferably 30% or more, more preferably 50% or more (particularly 70% or more).
- the sheet mold of the present invention has high mechanical strength because the cured silicone rubber is reinforced with fibers.
- the tensile modulus measured in accordance with JIS K7161 of the sheet mold may be 3 MPa or more, for example, 3 to 30 MPa, preferably 4 to 25 MPa, more preferably 5 to 20 MPa (particularly 8 to 15 MPa). Degree. When the tensile modulus is too small, the strength at the time of thin wall or large area is insufficient.
- the sheet-like mold of the present invention may have a stress at break measured in accordance with JIS K6251 of 0.5 MPa or more.
- a stress at break measured in accordance with JIS K6251 of 0.5 MPa or more.
- 3.0 MPa or more for example, 3.0 to 50 MPa
- 4.0 MPa or more for example, 4.0 to 30 MPa
- 8.0 MPa or more for example, 8.0 to 20 MPa.
- the sheet-like mold of the present invention Since the sheet-like mold of the present invention has sufficient strength, it can be used by being wound into a roll. Furthermore, even a sheet-shaped mold having a large area (for example, about 9 m 2 , especially about 4 m 2 ) has little sagging and is difficult to break when releasing the transfer target.
- the sheet mold of the present invention can exhibit sufficient strength even if it is thin.
- the average thickness of the sheet-like mold (when the convex portion is formed, the thickness based on the top of the convex portion) is, for example, 5 to 1000 ⁇ m (for example, 5 to 500 ⁇ m), preferably 10 to 300 ⁇ m, and more preferably It is about 30 to 200 ⁇ m (particularly 50 to 150 ⁇ m). If the thickness of the sheet mold is too thin, it is difficult to produce the sheet mold, and if it is too thick, the effects of the present invention cannot be effectively exhibited.
- the sheet-like mold of the present invention Since the sheet-like mold of the present invention has a low coefficient of linear expansion, it has excellent heat resistance and little deformation of the concavo-convex pattern due to temperature changes.
- the linear expansion coefficient of the sheet mold is, for example, about 5 to 1000 ppm (for example, 5 to 200 ppm), preferably about 5 to 150 ppm, and more preferably about 5 to 100 ppm. If the linear expansion coefficient of the sheet mold is too high, the uneven pattern of the sheet mold is deformed by heat, and the transferred uneven pattern becomes unstable.
- the sheet-shaped mold of the present invention may have a total light transmittance of 100 ⁇ m thickness (transmittance measured according to JIS K7105) of 50% or more, for example, 50 to 99%, preferably 60 to 95%. More preferably, it is about 70 to 90%.
- a total light transmittance of 100 ⁇ m thickness transmittance measured according to JIS K7105
- the sheet-shaped mold of the present invention has high transparency, it is possible to irradiate the transferred material in a molded state with light. For this reason, it is possible to easily cure the transfer object made of the photocurable resin.
- the sheet-like mold of the present invention is a conventional additive, for example, other fibers, sizing agent, wax, inorganic filler, colorant, stabilizer (antioxidant, heat stabilizer, UV absorbers, etc.), plasticizers, antistatic agents, flame retardants and the like may be contained.
- the sheet-like mold of the present invention can be produced by a conventional production method. For example, a sheet forming step of forming a sheet by compounding fibers and a curable silicone rubber composition, and curing the curable silicone rubber composition to include a cured product of the curable silicone rubber composition and fibers. A curing step for obtaining a composite sheet is included.
- the curable silicone rubber composition is a liquid composition containing an uncured product of the curable rubber having the above polyorganosiloxane structure, and forms the above cured silicone rubber after curing.
- a solvent may be further added to the curable silicone rubber composition in order to improve the fiber permeability or fiber dispersibility.
- a hydrophilic solvent is preferable from the viewpoint of high productivity and a small environmental load.
- hydrophilic solvent examples include water, alcohols (C 1-4 alkanols such as methanol, ethanol, isopropanol, and 1-butanol), and alkanediols (C 2-4 such as ethylene glycol, propylene glycol, and butylene glycol).
- alcohols C 1-4 alkanols such as methanol, ethanol, isopropanol, and 1-butanol
- alkanediols C 2-4 such as ethylene glycol, propylene glycol, and butylene glycol
- Alkanediol, etc. cellosolves (such as C 1-4 alkyl cellosolve such as methyl cellosolve and ethyl cellosolve), cellosolve acetates (such as C 1-4 alkyl cellosolve acetate such as ethyl cellosolve acetate), carbitols (methylcarbitol) and C 1-4 alkyl carbitol such as ethyl carbitol), ketones (acetone, di C 1-4 alkyl ketones such as methyl ethyl ketone), ethers (dioxane, such as tetrahydrofuran Jo or chain C 4-6 ether, etc.) and the like.
- cellosolves such as C 1-4 alkyl cellosolve such as methyl cellosolve and ethyl cellosolve
- cellosolve acetates such as C 1-4 alkyl cellosolve acetate such as ethy
- organic solvents such as C 1-4 alkanols such as ethanol and isopropanol, acetone, methyl ethyl ketone, etc. can be used because the dispersibility of fibers (particularly cellulose fibers) can be improved and the affinity with curable silicone rubber can also be improved.
- di-C 1-4 alkyl ketones are preferred. These solvents may be used alone or in combination of two or more.
- the ratio of the solvent in the curable silicone rubber composition is, for example, about 10 to 100 parts by weight, preferably about 15 to 80 parts by weight, and more preferably about 20 to 60 parts by weight with respect to 100 parts by weight of the curable silicone rubber. is there.
- a dispersion (slurry) was prepared by dispersing fibers in a solvent, and this dispersion was mixed with a curable silicone rubber composition.
- a method of casting (or coating) the mixture (casting method) and a method (impregnation method) including an impregnation step of impregnating a curable silicone rubber composition into a non-woven fabric obtained by making fibers from paper can be used.
- a hydrophilic solvent similar to the solvent added to the curable silicone rubber composition is widely used, and in particular, water or an organic solvent, for example, Preferred are C 1-4 alkanols such as ethanol and isopropanol, and di C 1-4 alkyl ketones such as acetone and methyl ethyl ketone. These solvents may be used alone or in combination of two or more.
- the concentration of the solid content in the dispersion is, for example, about 0.1 to 50% by weight, preferably about 1 to 30% by weight, more preferably about 3 to 20% by weight (particularly 5 to 15% by weight).
- a hydrophobizing agent may be added to the dispersion, and the fibers (particularly cellulose fibers) contained in the dispersion may be hydrophobized.
- the target mold may be cast or filled with a mixture to be formed into a sheet, or coated with a conventional coater and formed into a sheet. May be.
- the nonwoven fabric can be produced by a conventional method, for example, papermaking such as wet papermaking or dry papermaking.
- the wet papermaking can be performed by a conventional method, and for example, the papermaking may be performed using a wet papermaking machine equipped with a manual papermaking machine or a perforated plate.
- Dry papermaking can also be made using conventional methods such as airlaid and card manufacturing.
- a production method including a papermaking process by wet papermaking is preferable.
- a dispersion (slurry) containing fibers (particularly cellulose fibers) used for wet papermaking is prepared by dispersing fibers in a solvent.
- a hydrophilic solvent similar to the solvent added to the curable silicone rubber composition is generally used.
- water organic solvents such as C 1-4 alkanols such as ethanol and isopropanol, acetone, methyl ethyl ketone A di-C 1-4 alkyl ketone such as These solvents may be used alone or in combination of two or more.
- the concentration of the solid content in the dispersion is, for example, 0.01 to 10% by weight, preferably 0.03 to 5% by weight, more preferably 0.05 to 3% by weight (particularly 0.1 to 1% by weight).
- the nonwoven fabric is preferably thin.
- the average thickness of the nonwoven fabric is, for example, about 5 to 50 ⁇ m, preferably about 10 to 45 ⁇ m, and more preferably about 20 to 40 ⁇ m.
- the average pore diameter of the nonwoven fabric can be selected from a range of about 0.01 to 5 ⁇ m, and for a nonwoven fabric formed of fine cellulose fibers, it is, for example, about 10 to 100 nm, preferably 20 to 90 nm, and more preferably about 30 to 80 nm. If the pore diameter is too large, it becomes difficult to support the silicone rubber.
- the basis weight of the nonwoven fabric may be, for example, about 0.1 to 50 g / m 2 , preferably 1 to 30 g / m 2 , more preferably 3 to 20 g / m 2 (particularly 5 to 15 g / m 2 ).
- the porosity of the nonwoven fabric may be, for example, about 10 to 90%, preferably 15 to 85%, and more preferably about 30 to 80%. If the porosity is too large, it will be difficult to support silicone rubber, and if it is too small, impregnation with silicone rubber will be difficult.
- the nonwoven fabric may be subjected to a hydrophobic treatment (particularly, the above-mentioned silane coupling agent) before the impregnation step.
- a hydrophobic treatment particularly, the above-mentioned silane coupling agent
- the hydrophobizing treatment include a method in which the surface of the fiber constituting the nonwoven fabric is coated with a solution containing a hydrophobizing agent, and then the solvent is removed.
- a conventional method can be used, and examples thereof include a coater method, a dip method, a spray method, and an impregnation method. Of these, spray methods, impregnation methods and the like are widely used.
- the solvent can be selected according to the type of the hydrophobizing agent, and for example, a solvent exemplified as a solvent for dispersing fibers may be used.
- the method for removing the solvent may be natural drying, but may be usually heat drying at about 50 to 200 ° C. (particularly 100 to 150 ° C.).
- the ratio of the hydrophobizing agent in the solution is, for example, about 0.1 to 10% by weight, preferably about 0.3 to 5% by weight, and more preferably about 0.5 to 3% by weight.
- a conventional method for example, a method of immersing the non-woven fabric in the curable silicone rubber composition, a method of coating the non-woven fabric with the curable silicone rubber composition, Examples include a method of spraying a curable silicone rubber composition.
- the method of immersing the nonwoven fabric in the curable silicone rubber composition is preferable because the curable silicone rubber composition can be uniformly impregnated into the nonwoven fabric by a simple method.
- the nonwoven fabric in order to suppress the bubbles contained in the cellulose nonwoven fabric from leaking to the surface and reducing the smoothness of the composite sheet surface, the nonwoven fabric (particularly the cellulose nonwoven fabric) is impregnated with the curable silicone rubber composition. May be.
- pressure is applied in the impregnation process, bubbles contained in the nonwoven fabric leak, and at the same time, the surface is smoothed by the pressurization. Generation of defects) can be suppressed.
- a non-woven fabric may be impregnated with a curable (liquid) silicone rubber composition under pressure using a pressurizing device or the like, and a physically curable silicone using a roller or a press machine. You may pressurize the nonwoven fabric containing a rubber composition.
- the pressure can be appropriately selected according to the method and temperature, and is, for example, about 0.01 to 50 MPa, preferably 0.05 to 30 MPa, and more preferably about 0.1 to 10 MPa (particularly 1 to 5 MPa).
- the pressure may be, for example, about 0.5 to 10 MPa (particularly 1 to 5 MPa).
- the pressure is, for example, about 0.03 to 1 MPa (particularly 0.05 to 0.5 MPa). There may be.
- the temperature in the pressure treatment is not particularly limited, and is, for example, 0 to 100 ° C., preferably 5 to 80 ° C., more preferably about 10 to 50 ° C., and usually about room temperature (20 to 30 ° C.).
- the sheet-shaped mold can be easily thinned even if the fiber concentration is high, and the impregnation method is excellent in productivity. Particularly preferred.
- the dispersion containing fibers such as microfibrillated microcellulose fibers (cellulose nanofibers)
- the water inside may be replaced with the above-mentioned hydrophilic organic solvent, or an organic solvent may be added to the aqueous dispersion.
- the hydrophilic organic solvent may be the same solvent as that contained in the curable silicone rubber composition, for example, ketones such as acetone, and C 1-4 alkanols such as ethanol and isopropanol from the viewpoint of substitution efficiency. (Especially isopropanol) may be used.
- a hydrophobizing agent may be added to the dispersion containing cellulose fibers to subject the cellulose fibers to a hydrophobizing treatment.
- an organic solvent equal to or more than water, and the ratio of the organic solvent is, for example, contained in the aqueous dispersion.
- the amount is, for example, about 100 to 5000 parts by weight, preferably 200 to 4000 parts by weight, and more preferably about 300 to 3000 parts by weight (particularly 500 to 2500 parts by weight) with respect to 100 parts by weight of water.
- substitution with an organic solvent may be repeated a plurality of times.
- the number of repetitions is usually about 1 to 5 times, preferably 2 to 4 times, more preferably about 2 to 3 times, from the balance between substitution efficiency and simplicity.
- the fiber and the curable silicone are used in order to remove the solvent from the mixture obtained in the sheet forming step and accelerate the addition polymerization of the curable silicone rubber before the curing step.
- a composition containing rubber or a nonwoven fabric impregnated with a curable silicone rubber composition may be allowed to stand at room temperature (for example, about 20 to 30 ° C.).
- the standing time is, for example, about 1 to 48 hours, preferably about 5 to 30 hours.
- the curing step by curing the curable silicone rubber composition, a composite sheet containing a cured product of the curable silicone rubber composition and fibers can be obtained.
- the curable silicone rubber composition may be cured at room temperature, it is preferably cured by heating from the viewpoint that the reactivity can be improved and the strength can be improved.
- the heating temperature for curing can be selected according to the type of rubber and is, for example, about 100 to 200 ° C., preferably 120 to 180 ° C., and more preferably about 130 to 160 ° C.
- the heating time is, for example, about 1 minute to 48 hours, preferably about 30 minutes to 10 hours.
- the formed nonwoven fabric may be left at room temperature (for example, about 20 to 30 ° C.).
- the standing time is, for example, about 1 to 48 hours, preferably about 5 to 30 hours.
- the method for producing a sheet-shaped mold of the present invention may include a mold surface forming step of forming a target mold shape (pattern) on one surface of the uncured composite sheet in the curing step.
- a conventional method can be used as a method for forming the target mold shape.
- an inverted concavo-convex pattern shape may be formed on the composite sheet with respect to the concavo-convex pattern shape to be formed on the imprint lithography transfer object.
- the inverted concavo-convex pattern shape may be formed by a method using a master mold. In this method, it suffices if the mold shape of the master mold can be transferred to the sheet-like mold. In the sheet-like mold having a single layer structure, the master is applied to one surface of the curable silicone rubber composition formed into a sheet shape in the above-described curing step. The mold shape of the master mold may be transferred by overlapping the mold.
- an injection step of injecting the second curable silicone rubber composition into the master mold a laminating step of overlaying the composite sheet on the injected second curable silicone rubber composition
- the laminating step when the composite sheet is brought into contact with the second curable silicone rubber composition injected into the master mold, the composite sheet may be pressed so that bubbles do not enter.
- the second curable silicone rubber composition can be cured under the same conditions as those for the curable silicone rubber composition described above.
- the sheet-shaped mold of the present invention has high mechanical strength and excellent flexibility, and therefore can be wound into a roll. For this reason, it is also possible to continuously manufacture the transfer object using a roll body.
- a large-area sheet-like mold used for a roll body or the like can be manufactured using a master mold in the mold surface forming step.
- Such a master mold is obtained by repeatedly transferring the master mold resin in the vertical and horizontal directions while positioning using a mold smaller than the master mold, and then curing the master mold resin.
- An area master mold may be used.
- the master mold resin may be an imprint resin (particularly, a photocation curable resin described later).
- the master mold obtained by the resin for master mold is electroformed to form a master mold made of metal such as nickel, or to improve durability, such as metal coating on the surface. You may give it.
- the target shape can be transferred to the transfer target using the sheet-like mold.
- the transfer method is not particularly limited, and for example, an appropriate patterning technique such as soft lithography, capillary force lithography, imprint lithography or the like can be used.
- the material of the transfer object is not particularly limited, and may be a resin component such as a thermoplastic resin or a curable resin.
- a resin component such as a thermoplastic resin or a curable resin.
- the transfer target can be irradiated with light through the sheet-shaped mold. Therefore, as a transfer object, photocurable resin, for example, photo radical curable resin (for example, photo curable polyester resin, photo curable acrylic resin, photo curable epoxy (meth) acrylate resin, photo curable resin, etc. It is preferable to use a urethane (meth) acrylate resin) or a photocation curable resin (for example, epoxy resin, oxetane resin, vinyl ether resin, etc.).
- a photocationic curable resin and an epoxy resin are particularly preferable because they are excellent in releasability from the mold and can suppress damage to the sheet-shaped mold due to adhesion with the resin forming the transfer target.
- the epoxy resin include a glycidyl ether type epoxy resin, a glycidyl ester type epoxy resin, an alicyclic epoxy resin, a glycidyl amine type epoxy resin, and a long chain aliphatic epoxy resin.
- the epoxy resin may be an epoxy resin containing at least an alicyclic epoxy compound from the viewpoint of low viscosity and excellent releasability.
- the photocurable resin may contain a conventional additive, for example, a curing agent, a polymerization initiator (such as a photocationic polymerization initiator).
- a transfer body precursor and a sheet form are obtained by laminating a transfer body precursor (uncured or semi-cured photocurable resin) on the mold surface of the sheet-like mold, and curing the precursor.
- the method may include a curing step of forming a laminate with the mold and a release step of releasing the sheet-shaped mold from the transfer target.
- the transferred object precursor may be preliminarily laminated with a base material such as water glass in order to improve handling properties, or the laminated body may be dried to be prepared in a semi-cured state.
- the sheet mold may be cured by irradiating ultraviolet rays or the like from the sheet mold side.
- the present invention will be described in more detail based on examples.
- this invention is not limited by these Examples.
- the fiber diameter of the cellulose fiber and the fiber used in Examples and Comparative Examples, fiber length, and average thickness and tensile modulus of nonwoven fabric, composite sheet, sheet mold, handling property, ultraviolet (UV) curability, stress at break was measured by the following method.
- the transferability of the sheet molds of Examples 1 to 6 and Comparative Examples 1 to 3 was evaluated by the following method.
- the method of drawing a line is not particularly limited as long as the number of fibers crossing the line is 20 or more.
- Fiber length was measured using a fiber length measuring device (“FS-200” manufactured by Kajaani).
- Nonwoven fabric, composite sheet, sheet-shaped mold and weight of each component Based on JIS B7611, the weight of a nonwoven fabric, a composite sheet, a sheet-like mold, and each component was measured using the weight measuring device ("XP205" by METTLER TOLEDO Co., Ltd.).
- ⁇ The UV curable resin is cured to such an extent that the composite sheet can be peeled off without any problem.
- ⁇ When the composite sheet is peeled off, the UV curable resin is in a semi-cured state.
- ⁇ When the composite sheet is peeled off, the UV curable resin becomes liquid. Present.
- the obtained resin for imprinting was diluted with propylene glycol methyl ether acetate ("MMPGAC” manufactured by Daicel Corporation) so that the solid content concentration would be 60% by weight, and on a 40 mm square water glass at 3000 rpm for 30 seconds.
- the resin layer for imprinting having a thickness of 2 ⁇ m was formed by spin-coating and drying on a hot plate at 90 ° C. for 5 minutes.
- Transfer rate is 70% or more (transferability is very good)
- ⁇ Transfer rate is 30% or more and less than 70% (good transferability)
- X Transfer rate is less than 30% (transferability is poor)
- the transfer rate was calculated by the following formula using the pattern height (H1) of the mold and the pattern height (H2) transferred in the fine structure. The pattern height was obtained using AFM.
- ⁇ The change rate of the transfer rate is within ⁇ 20% of the initial value (continuous transfer property is good).
- X The change rate of the transfer rate is outside the range of ⁇ 20% of the initial value (the continuous transfer property is poor).
- the change amount and initial value of the transfer rate are as follows.
- Change amount of transfer rate (transfer rate of fine structure obtained at the first time) ⁇ (transfer rate of fine structure obtained at the 50th time)
- Initial value transfer rate in the fine structure obtained at the first time.
- Example 1> Preparation of cellulose fiber
- NBKP pulp manufactured by Marusumi Paper Co., Ltd., solid content of about 50% by weight, copper number of about 0.3
- 100 liters of a slurry liquid (aqueous dispersion) containing 1% by weight of pulp is prepared.
- a slurry liquid aqueous dispersion
- a refiner-treated product was obtained by beating 10 times with a clearance of 0.15 mm and a disk rotation speed of 1750 rpm.
- PANDA2K manufactured by Niroso Avi Corp.
- the average fiber diameter of the obtained microfiber was 29.0 nm, the standard deviation of the fiber diameter distribution was 14.1 nm, the maximum fiber diameter was 64.3 nm, the average fiber length was 158 ⁇ m, and the aspect ratio (average fiber length / average fiber diameter). was 5440.
- PDMS Liquid silicone rubber
- CX-32-3212 manufactured by Shin-Etsu Chemical Co., Ltd.
- the obtained cellulose nonwoven fabric was stretched and fixed to an aluminum frame having an opening of 50 mm square.
- a cellulose nonwoven fabric was put into a liquid silicone rubber composition placed in a vat together with the fixed aluminum frame and allowed to stand for 30 minutes, so that the cellulose nonwoven fabric was impregnated with the liquid silicone rubber composition.
- the aluminum frame was pulled up, the excess liquid silicone rubber composition was handled with a squeegee and suspended vertically, and left at 23 ° C. for 24 hours, and then cured at 150 ° C. for 2 hours.
- the average thickness of the obtained composite sheet was 73 ⁇ m.
- a mold provided with a concavo-convex pattern (Ni, concave and convex pattern width 500 nm, convex part height 500 nm) was fixed to a 50 mm square aluminum frame, and the liquid silicone rubber composition was poured into the mold. Furthermore, the obtained composite sheet was placed on the liquid level of the liquid silicone rubber composition that had flowed in, and pressed against the liquid level so that no bubbles would enter. As it was, it was allowed to stand at 23 ° C. for 24 hours, and then cured at 150 ° C. for 2 hours.
- the weight of the sheet mold was 0.024 g, and the average thickness was 100 ⁇ m.
- Example 2 Paper making was performed in the same manner as in Example 1 except that cellulose fibers (“Serish KY-100G” manufactured by Daicel Corporation, average fiber diameter of 300 nm) were used as the fine cellulose fibers, to produce a cellulose nonwoven fabric having a basis weight of 10 g / m 2 . .
- the average thickness of the cellulose nonwoven fabric was 34 ⁇ m.
- a composite sheet and a sheet-like mold were produced in the same manner as in Example 1 using this cellulose nonwoven fabric. The average thickness of the composite sheet was 87 ⁇ m, the weight of the sheet-like mold was 0.026 g, and the average thickness was 114 ⁇ m.
- Example 3 Paper making is performed in the same manner as in Example 1 except that the refiner-treated product (average fiber diameter of 5 ⁇ m) obtained in the preparation of the cellulose fiber of Example 1 is used as the fine cellulose fiber to produce a cellulose nonwoven fabric having a basis weight of 10 g / m 2. did. The average thickness of the cellulose nonwoven fabric was 40 ⁇ m. A composite sheet and a sheet-like mold were produced in the same manner as in Example 1 using this cellulose nonwoven fabric. The average thickness of the composite sheet was 95 ⁇ m, the weight of the sheet-like mold was 0.032 g, and the average thickness was 145 ⁇ m.
- Example 4 A composite sheet was produced in the same manner as in Example 1 except that a cellulose nonwoven fabric subjected to hydrophobic treatment was used as the cellulose nonwoven fabric. The average thickness of the composite sheet was 75 ⁇ m.
- a silane coupling agent (vinyltrimethoxysilane, “KBM-1003” manufactured by Shin-Etsu Chemical Co., Ltd.) is used as a hydrophobizing agent for the cellulose non-woven fabric after paper making in the preparation of the cellulose non-woven fabric.
- the solution prepared so as to be 1% by weight with respect to isopropanol was spray-coated so that the entire nonwoven fabric was sufficiently wetted with the solution, and then dried at 110 ° C. for 5 minutes.
- Example 2 a sheet-like mold was obtained in the same manner as in Example 1 except that the composite sheet was used.
- the weight of the sheet mold was 0.022 g, and the average thickness was 98 ⁇ m.
- Example 5 A composite sheet and a sheet-shaped mold were produced in the same manner as in Example 4 except that the average thickness of the cellulose nonwoven fabric was 100 ⁇ m.
- the average thickness of the composite sheet was 158 ⁇ m, the weight of the sheet-like mold was 0.035 g, and the average thickness was 185 ⁇ m.
- Example 6 The aqueous dispersion of fine cellulose fibers obtained in the preparation of cellulose fibers in Example 1 was dispersed in acetone, and the liquid removal was repeated twice to obtain an acetone dispersion.
- a silane coupling agent (KBM-1003) was further added to the acetone dispersion at a ratio of 0.5 part by weight to 100 parts by weight of the fine cellulose fiber, and the acetone dispersion of the fine cellulose fiber having a solid content of 10% by weight. was made.
- a liquid silicone rubber (X-32-3212), a curing agent (CX-32-3212), acetone, and a fine cellulose fiber dispersion are mixed into a liquid silicone rubber / curing agent.
- the composition was poured into a space (liquid dam) surrounded by four sides with a 200 ⁇ m-thick polytetrafluoroethylene sheet (Teflon (registered trademark) sheet) on a glass plate, left at 23 ° C. for 24 hours, and then 150 ° C. And cured for 2 hours.
- the average thickness of the obtained composite sheet was 97 ⁇ m.
- a sheet-like mold (sheet-like mold containing fibers in the uneven pattern) is obtained in the same manner as in Example 1. It was.
- the weight of the sheet mold was 0.025 g, and the average thickness was 115 ⁇ m.
- Example 3 A composite sheet was produced in the same manner as in Example 1 except that a polypropylene porous membrane having an average thickness of 30 ⁇ m (“Celguard 2500” manufactured by Polypore Corporation) was used instead of the cellulose nonwoven fabric. The average thickness of the composite sheet was 88 ⁇ m. Next, a sheet-like mold was obtained in the same manner as in Example 1 except that the obtained composite sheet was used. The weight of the sheet mold was 0.024 g, and the average thickness was 105 ⁇ m.
- Example 4 A composite sheet was produced in the same manner as in Example 1 except that silicone potting gel (“TSE3051” manufactured by Momentive Performance Materials Japan GK) was used as the liquid silicone rubber composition.
- TSE3051 silicone potting gel manufactured by Momentive Performance Materials Japan GK
- the average thickness of the composite sheet was approximately 130 ⁇ m, although the film strength was too weak (the resin portion was too soft) and could not be measured accurately.
- Table 1 shows the evaluation results of the sheet-like molds obtained in the examples and comparative examples.
- the sheet-like molds of the examples have high tensile elastic modulus and excellent transferability and continuous transferability.
- the sheet-like molds of Comparative Examples 1 and 2 had a low tensile elastic modulus and were difficult to transfer continuously.
- the sheet-like mold of Comparative Example 3 has low UV resin curability and low transferability.
- the composite sheet of Comparative Example 4 had a tensile modulus of 7.0 MPa, but the resin portion was too soft to handle and a sheet-like mold could not be produced.
- Examples 7 to 21 A composite sheet was produced in the same manner as in Example 1 except that the thickness of the cellulose nonwoven fabric, the silicone rubber (PDMS), the weight of the cellulose nonwoven fabric and the composite sheet were adjusted to the thickness and weight (solid content weight) shown in Table 2.
- PDMS silicone rubber
- Table 2 shows the stress at break of the composite sheets obtained in Examples 7 to 21. The results of measuring the stress at break for the composite sheets obtained in Examples 1 to 5 are shown in Table 2 together with the thickness and weight of the composite sheet and the weights of the constituent components.
- Example 1 after preparing a cellulose nonwoven fabric and a liquid silicone rubber composition having a thickness of 120 ⁇ m, composite sheets were prepared by the methods described in Examples 22 to 24 below.
- Example 22 pressure impregnation method
- a cellulose nonwoven fabric thickness: 120 ⁇ m
- a liquid silicone rubber composition was charged.
- the petri dish was placed in a stainless steel pressure device, pressurized to 3 MPa with nitrogen, and allowed to stand at 23 ° C. for 24 hours to impregnate and cure the liquid silicone rubber composition in a cellulose nonwoven fabric.
- the petri dish was taken out from the apparatus and cured at 150 ° C. for 1 hour.
- the average thickness of the obtained composite sheet was 243 ⁇ m, and no decrease in surface smoothness due to bubbles was observed.
- Example 23 roller method> A cellulose nonwoven fabric (thickness: 120 ⁇ m) was placed in a glass petri dish having an opening of 90 mm ⁇ , a liquid silicone rubber composition was charged, and allowed to stand at 23 ° C. for 1 hour to impregnate the cellulose nonwoven fabric with the liquid silicone rubber composition. Next, after taking out the cellulose nonwoven fabric from the petri dish and sandwiching it with a polyimide film, the excess resin was removed using a biaxial rubber roller (manufactured by Kumagai Riki Kogyo Co., Ltd.), followed by curing at 23 ° C. for 23 hours. I let you. Further, the cured product was taken out and cured at 150 ° C. for 1 hour. The average thickness of the obtained composite sheet was 235 ⁇ m, and no decrease in surface smoothness due to bubbles was observed.
- Example 24 (hot press method)> A cellulose nonwoven fabric (thickness: 120 ⁇ m) was placed in a glass petri dish having an opening of 90 mm ⁇ , a liquid silicone rubber composition was charged, and allowed to stand at 23 ° C. for 1 hour to impregnate the cellulose nonwoven fabric with the liquid silicone rubber composition. Next, the cellulose nonwoven fabric was taken out from the petri dish and sandwiched between polyimide films. Furthermore, after sandwiching from above the polyimide film with a hot press machine at a pressure of 0.1 MPa to remove excess resin, it was allowed to stand at 23 ° C. for 23 hours to be cured. Finally, it was cured for 1 hour at 150 ° C. while being sandwiched by a hot press. The average thickness of the obtained composite sheet was 233 ⁇ m, and no decrease in surface smoothness due to bubbles was observed.
- Example 25 (Preparation of resin for master mold) 100 parts by weight of an epoxy resin (“EHPE3150” manufactured by Daicel Corporation) as a photocationically polymerizable compound, 6 parts by weight of a photocationic polymerization initiator (“CPI-300K” manufactured by San Apro Co., Ltd.), an antioxidant (double 1 part by weight of “CHINOX 1010” manufactured by Bond Chemical Co., 1 part by weight of stabilizer (“HP-10” manufactured by ADEKA Corporation), and 270 parts by weight of propylene glycol methyl ether acetate (“MMPGAC” manufactured by Daicel Corporation) It stirred at (25 degreeC), each component was dissolved uniformly, and the liquid photocurable composition (resin for master molds) was obtained at room temperature.
- EHPE3150 an epoxy resin
- CPI-300K manufactured by San Apro Co., Ltd.
- an antioxidant double 1 part by weight of “CHINOX 1010” manufactured by Bond Chemical Co., 1 part by weight of stabilizer
- HP-10
- the obtained resin for master molding was applied on a 1 m long by 1 m wide Ni substrate so that the thickness was 5 ⁇ m. Then, it heated at 90 degreeC for 5 minute (s), the solvent was removed, and the resin layer for master molds was obtained.
- a mold having a concavo-convex pattern of 5 cm in length and 5 cm in width (made of Ni, width of concave and convex pattern 500 nm, height of convex part 500 nm) is fixed to an imprint apparatus, and the obtained resin layer for master mold is used. Pressure was applied at 10 MPa for 60 seconds, and the mold was released.
- a transfer process using a mold is repeated on the resin layer for the master mold, the pattern is transferred to 1 m in length and 1 m in width, and then irradiated with UV (365 nm, 100 mW / cm 2 , 300 seconds) and heated at 90 ° C. for 10 minutes.
- UV 365 nm, 100 mW / cm 2 , 300 seconds
- a cellulose nonwoven fabric having a basis weight of 10 g / m 2 at 1.5 m ⁇ was made.
- the average thickness of the cellulose nonwoven fabric was 22 ⁇ m.
- This cellulose non-woven fabric is formed into a 1 m square, fixed in an aluminum frame with an opening of 1 m square in a stretched state, impregnated with a liquid silicone rubber composition and cured in the same manner as in Example 1, and a composite sheet Manufactured.
- the average thickness of the composite sheet was 73 ⁇ m.
- the master mold (concave and convex pattern width 500 nm, convex part height 500 nm) provided with the concave / convex pattern was fixed to a 1 m square aluminum frame, and in the same manner as in Example 1, a liquid silicone rubber composition The material was allowed to flow and cured and peeled to obtain a sheet-like mold.
- the weight of the sheet mold was 20.68 g, and the average thickness was 100 ⁇ m.
- the imprinting resin used in the transferability evaluation was applied onto 1 m square water glass, and further dried in an oven at 90 ° C. for 5 minutes to form an imprinting resin layer having a thickness of 2 ⁇ m.
- the obtained sheet-shaped mold was arranged so that the concave / convex pattern was on the lower side, and the upper surface of the sheet-shaped mold was vacuumed from the suction surface of the imprint apparatus to be sucked to the imprint apparatus. At this time, the sheet-like mold was held on the suction surface of the imprint apparatus without sagging.
- the imprint resin layer was taken out of the imprint apparatus, and after releasing the sheet-like mold, it was confirmed that the uneven pattern was transferred to the imprint resin layer. At this time, peeling of the silicone rubber was not confirmed in the sheet-like mold.
- Example 25 a sheet-like mold was obtained in the same manner as in Example 25 except that the resin sheet obtained instead of the composite sheet was used.
- the weight of the sheet-like mold was 12.36 g, and the average thickness was 103 ⁇ m.
- the sheet-like mold of the present invention can be used in manufacturing processes in the optical field and semiconductor field, and is useful for various patterning techniques such as soft lithography, capillary force lithography, and imprint lithography.
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Abstract
Description
本発明のシート状モールドは、ポリオルガノシロキサンを含む硬化シリコーンゴムと繊維とを含む。
繊維は無機繊維であってもよいが、調製し易い点などから、有機繊維が好ましい。有機繊維としては、天然繊維(例えば、セルロース、シルク、羊毛繊維など)、再生繊維(例えば、タンパク質又はポリペプチド繊維、アルギン酸繊維など)、瀝青炭質繊維(ピッチ系繊維など)、合成繊維(熱硬化性樹脂繊維、熱可塑性樹脂繊維など)などが挙げられる。なかでも、線膨張率が低く、温度変化に対して安定である点から、セルロース繊維が好ましい。
硬化シリコーンゴムは、ポリオルガノシロキサン構造を有する硬化性シリコーンゴム組成物を硬化(加硫)して得られる硬化体であり、ポリオルガノシロキサン構造を有する硬化ゴムであればよい。ポリオルガノシロキサンは、Si-O結合(シロキサン結合)を有する直鎖状、分岐鎖状又は網目状の化合物であって、式:RaSiO(4-a)/2(式中、係数aは0~3の数である)で表される単位で構成されている。
本発明のシート状モールドは、硬化シリコーンゴムと繊維とを含む。繊維に対する硬化シリコーンゴムの割合は、例えば、繊維100重量部に対して、100~10000重量部、好ましくは200~9000重量部、さらに好ましくは300~8000重量部(特に500~5000重量部)程度である。硬化シリコーンゴムの割合が少なすぎると、シート状モールドの離型性や透明性が低下し、多すぎると、機械的強度が低下し、薄肉化が困難となる。
本発明のシート状モールドは、慣用の製造方法で製造できる。例えば、繊維と硬化性シリコーンゴム組成物とを複合化してシート状に成形するシート化工程と、硬化性シリコーンゴム組成物を硬化させて、硬化性シリコーンゴム組成物の硬化物と繊維とを含む複合シートを得る硬化工程を含む。
シート化工程では、繊維と硬化性シリコーンゴム組成物(第1の硬化性シリコーンゴム組成物)とを複合化してシート状に成形する。硬化性シリコーンゴム組成物は、上述のポリオルガノシロキサン構造を有する硬化性ゴムの未硬化物を含む液状組成物であり、硬化後に上述の硬化シリコーンゴムを形成する。
キャスト法において、分散液に含まれる溶媒としては、硬化性シリコーンゴム組成物に添加される溶媒と同様の親水性溶媒が汎用され、なかでも、水や、有機溶媒、例えば、エタノールやイソプロパノールなどのC1-4アルカノール、アセトン、メチルエチルケトンなどのジC1-4アルキルケトンなどが好ましい。これらの溶媒は、単独で又は二種以上組み合わせて使用してもよい。
含浸法において、不織布は、慣用の方法、例えば、湿式抄紙又は乾式抄紙などの抄紙により製造できる。湿式抄紙は、慣用の方法で行うことができ、例えば、手抄き抄紙器や多孔板などを備えた湿式抄紙機などを用いて抄紙してもよい。乾式抄紙も、慣用の方法、例えば、エアレイド製法、カード製法などを用いて抄紙することができる。これらのうち、湿式抄紙による抄紙工程を含む製造方法が好ましい。
硬化工程では、硬化性シリコーンゴム組成物を硬化させることにより、硬化性シリコーンゴム組成物の硬化物と繊維とを含む複合シートを得ることができる。硬化性シリコーンゴム組成物は、室温で硬化させてもよいが、反応性を高め、強度を向上できる点から、加熱して硬化することが好ましい。硬化のための加熱温度は、ゴムの種類に応じて選択でき、例えば、100~200℃、好ましくは120~180℃、さらに好ましくは130~160℃程度である。加熱時間は、例えば、1分~48時間、好ましくは30分~10時間程度である。
本発明では、前記シート状モールドを用いて被転写体に目的の形状を転写できる。転写方法は特に限定されず、例えば、ソフトリソグラフィ、キャピラリーフォースリソグラフィ、インプリントリソグラフィなどの適宜のパターニング技術を用いることができる。
繊維について50000倍の走査型電子顕微鏡(SEM)写真を撮影し、撮影した写真上において、写真を横切る任意の位置に2本の線を引き、線と交差する全ての繊維径をカウントして平均繊維径(n=20以上)を算出した。線の引き方は、線と交差する繊維の数が20以上となれば、特に限定されない。
繊維長は、繊維長測定器(カヤーニ社製「FS-200」)を用いて測定した。
JIS L1085に準拠し、厚み測定器((株)尾崎製作所製「FFA-12」、測定子16mmφ)を用いて、不織布、複合シートまたはシート状モールドの任意の箇所10点を測定し、その平均値を求めた。
JIS B7611に準拠し、重量測定器(メトラー・トレド(株)製「XP205」)を用いて、不織布、複合シート、シート状モールド及び各成分の重量を測定した。
JIS K7161に準じて、シート状モールドを、幅10mm、長さ100mmに切り出し、引張試験機(エー・アンド・デー(株)製「RTM-1350」)を用いて、20mm/分の速度で引張り、引張弾性率を測定した。
70mm角の大きさのフィルムを作成し、ガラス板にローラーで押し付け、手で剥離する工程において、何回再剥離できるかカウントした。
カチオン性UV硬化性樹脂((株)ダイセル製「NICT825」)を用い、UV硬化性樹脂の上に、複合シートでマスクを行い(2500mm2の全面を覆い)、UV照射を行った。照射条件(λ=365nm、35mW/cm2、30秒後)での硬化性を確認した。硬化性の目安として、UV硬化性樹脂から剥離したときの剥離性を以下の指標で確認した。
△:複合シートを剥離するとUV硬化性樹脂が半硬化状態である
×:複合シートを剥離するとUV硬化性樹脂が液状を呈する。
JIS K6251に準拠し、複合シートを用いて、7号ダンベルにて試験用サンプルを調製した。引張試験機(エーアンドデイ社製「テンシロンRTF-1350」)を用いて、得られたサンプルの引張試験を行い、破断点応力の測定を行った。
実施例及び比較例で得られたシート状モールドについて、以下の方法で転写性を評価した。
光カチオン重合性化合物としてのエポキシ化合物((株)ダイセル製「EHPE3150」)20重量部、エポキシ化合物(三菱化学(株)製「JER YX8000」)20重量部、3,4,3’,4’-ジエポキシビシクロヘキシル30重量部、脂環式エポキシ化合物((株)ダイセル製「セロキサイド2021P」)15重量部、オキタセン化合物(東亞合成(株)製「OXT221」)15重量部、光カチオン重合開始剤(サンアプロ(株)製「CPI-300K」)6重量部、酸化防止剤(ダブルボンドケミカル社製「CHINOX1010」)1重量部、安定剤((株)ADEKA製「HP-10」)1重量部を室温(25℃)で攪拌し、各成分を均一に溶解させて、室温で液状の光硬化性組成物(インプリント用樹脂)を得た。
得られたインプリント用樹脂をプロピレングリコールメチルエーテルアセテート((株)ダイセル製「MMPGAC」)にて固形分濃度が60重量%になるように希釈し、40mm角の水ガラス上に3000rpm、30秒でスピンコート塗布し、さらにホットプレート上において90℃で5分間乾燥させることにより、厚さ2μmのインプリント用樹脂層を形成した。
実施例及び比較例で得られた微細構造体の転写率を算出し、以下の基準で転写性(モールドのパターンが微細構造体において精度良く再現できていることを示す特性)を評価した。
○:転写率が30%以上、70%未満(転写性が良好)
×:転写率が30%未満(転写性が不良)
なお、転写率は、モールドのパターン高さ(H1)と、微細構造体において転写されたパターン高さ(H2)とを用いて、下記式により算出した。なお、パターン高さは、AFMを用いて得た。
実施例及び比較例における微細構造体の製造を連続して50回実施し、1回目に得られた微細構造体と50回目に得られた微細構造体の微細パターンを、AFMにより観察した。これら微細構造体の微細パターンの高さから、それぞれの微細構造体における転写率を算出し、その変化量にて連続転写性を評価した。なお、転写率は、上述の式により算出した。
×:転写率の変化量が初期値の±20%の範囲外である(連続転写性が不良)
なお、転写率の変化量及び初期値は、以下の通りである。
初期値=1回目に得られた微細構造体における転写率。
(セルロース繊維の調製)
NBKPパルプ(丸住製紙(株)製、固形分約50重量%、カッパー価約0.3)を用いて、パルプを1重量%の割合で含有するスラリー液(水分散液)を100リットル調製した。次いで、ディスクリファイナー(長谷川鉄工(株)製、SUPERFIBRATER 400-TFS)を用いて、クリアランス0.15mm、ディスク回転数1750rpmとして10回叩解処理し、リファイナー処理品を得た。このリファイナー処理品を、通常の非破砕型ホモバルブシート(中空円筒状凸部の下流端の内径/リング状端面の厚み=1.9/1)を備えた第1ホモジナイザー(ゴーリン社製「15M8AT」)を用いて、処理圧50MPaで20回処理した。さらに、破砕型ホモバルブシート(中空円筒状凸部の下流端の内径/リング状端面の厚み=16.8/1)を備えた第2ホモジナイザー(ニロソアビ社製「PANDA2K」)を用いて、処理圧120MPaで20回処理した。得られた微小繊維の平均繊維径は29.0nm、繊維径分布の標準偏差は14.1nm、最大繊維径は64.3nm、平均繊維長は158μm、アスペクト比(平均繊維長/平均繊維径)は5440であった。
得られた微小セルロース繊維を含む水分散液(固形分1重量%)を固形分10重量%になるまで脱液及び濃縮した分散液1kgに対して、水の10倍量のイソプロパノール10リットルを添加し、手動撹拌機(マキタ(株)製「UT1305」)で5分間撹拌して分散した。得られた分散液を、脱液用濾布を用いて手絞りで固形分が30重量%になるまで脱液した。この溶媒置換処理を再度繰り返し、得られた固形分30重量%の分散液を、手抄きマシン(東洋精機製作所(株)製「シートマシン」)を用いて、110mmφで坪量10g/m2のセルロース不織布を抄紙した。セルロース不織布の平均厚みは22μmであった。
液状シリコーンゴム(PDMS)(信越化学工業(株)製「X-32-3212」)と、硬化剤(信越化学工業(株)製「CX-32-3212」)と、アセトンとを、液状シリコーンゴム/硬化剤/アセトン=10/1/3の割合(重量比)で混合し、液状シリコーンゴム組成物を調製した。
得られたセルロース不織布を張った状態で開口部が50mm角のアルミニウム製の枠に固定した。固定化されたアルミニウム製枠ごとバットに入れた液状シリコーンゴム組成物の中にセルロース不織布を投入し、30分間放置し、前記液状シリコーンゴム組成物を前記セルロース不織布に含浸させた。アルミニウム製枠を引き上げ、余分な液状シリコーンゴム組成物をスキージで扱き落として縦に吊り下げた状態で、23℃で24時間放置した後、150℃で2時間かけて硬化した。得られた複合シートの平均厚みは73μmであった。
凹凸パターンが施された金型(Ni製、凹及び凸パターンの幅500nm、凸部の高さ500nm)を、50mm角のアルミニウム製の枠に固定し、前記液状シリコーンゴム組成物を流し入れた。さらに、得られた複合シートを、流入した液状シリコーンゴム組成物の液面に設置し、気泡が入らないように液面に押し付けた。そのままの状態で、23℃で24時間放置した後、150℃で2時間かけて硬化した。その後、流入した液状シリコーンゴム組成物の硬化体と複合シートとが一体となったシート状モールドを前記金型から剥離することで、表面に凹凸パターン(凹及び凸パターンの幅500nm、凸部の高さ500nm)が形成されたシート状モールドを得た。シート状モールドの重量は0.024g、平均厚みは100μmであった。
微小セルロース繊維として、セルロース繊維((株)ダイセル製「セリッシュKY-100G」、平均繊維径300nm)を用いる以外は実施例1と同様に抄紙し、坪量10g/m2のセルロース不織布を製造した。セルロース不織布の平均厚みは34μmであった。このセルロース不織布を用いて実施例1と同様にして複合シート及びシート状モールドを製造した。複合シートの平均厚みは87μmであり、シート状モールドの重量は0.026g、平均厚みは114μmであった。
微小セルロース繊維として、実施例1のセルロース繊維の調製で得られたリファイナー処理品(平均繊維径5μm)を用いる以外は実施例1と同様に抄紙し、坪量10g/m2のセルロース不織布を製造した。セルロース不織布の平均厚みは40μmであった。このセルロース不織布を用いて実施例1と同様にして複合シート及びシート状モールドを製造した。複合シートの平均厚みは95μmであり、シート状モールドの重量は0.032g、平均厚みは145μmであった。
セルロース不織布として、疎水化処理したセルロース不織布を用いる以外は実施例1と同様にして複合シートを製造した。複合シートの平均厚みは75μmであった。なお、疎水化処理としては、セルロース不織布の調製において、抄紙後のセルロース不織布に対して、疎水化剤としてシランカップリング剤(ビニルトリメトキシシラン、信越化学工業(株)製「KBM-1003」)をイソプロパノールに対して1重量%になるように調整した溶液を、不織布全体が前記溶液で十分に濡れるようにスプレーコートした後、110℃で5分間乾燥した。
セルロース不織布の平均厚みを100μmとする以外は実施例4と同様にして複合シート及びシート状モールドを製造した。複合シートの平均厚みは158μmであり、シート状モールドの重量は0.035g、平均厚みは185μmであった。
実施例1におけるセルロース繊維の調製で得られた微小セルロース繊維の水分散液をアセトンに分散し、脱液を2回繰り返し、アセトン分散液を得た。このアセトン分散液に、さらにシランカップリング剤(KBM-1003)を微小セルロース繊維100重量部に対して0.5重量部の割合で添加し、固形分10重量%の微小セルロース繊維のアセトン分散体を作製した。
セルロース不織布を用いることなく、液状シリコーンゴム組成物のみを50mm角のアルミニウム製の枠に流し入れ、平均厚み100μmの樹脂シートを製造した。次に、複合シートの代わりに前記樹脂シートを用いる以外は実施例1と同様にしてシート状モールドを得た。シート状モールドの重量は0.031g、平均厚みは127μmであった。
セルロース不織布を用いることなく、液状シリコーンゴム組成物のみを50mm角のアルミニウム製の枠に流し入れ、平均厚み1mmの樹脂シートを製造した。次に、複合シートの代わりに前記樹脂シートを用いる以外は実施例1と同様にしてシート状モールドを得た。シート状モールドの重量は0.243g、平均厚みは1027μmであった。
セルロース不織布の代わりに、平均厚み30μmのポリプロピレン多孔膜(ポリポア(株)製「セルガード2500」)を用いる以外は実施例1と同様にして複合シートを製造した。複合シートの平均厚みは88μmであった。次に、得られた複合シートを用いる以外は実施例1と同様にしてシート状モールドを得た。シート状モールドの重量は0.024g、平均厚みは105μmであった。
液状シリコーンゴム組成物として、シリコーンポッティングゲル(モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社製「TSE3051」)を用いる以外は実施例1と同様にして複合シートを製造した。複合シートの平均厚みは、フィルム強度が弱すぎて(樹脂部分が軟らかすぎて)、正確に計測できなかったが、概ね130μmであった。
セルロース不織布の厚み、シリコーンゴム(PDMS)、セルロース不織布及び複合シートの重量を表2に示す厚み及び重量(固形分重量)に調整する以外は実施例1と同様にして複合シートを製造した。
複合シートを任意の厚みに調整するため、セルロース不織布(厚み120μm)を開口部が90mmφのガラス製のシャーレに入れ、液状シリコーンゴム組成物を投入した。次に、シャーレをステンレス製の加圧装置の中に入れ窒素で3MPaまで昇圧し、23℃で24時間放置し液状シリコーンゴム組成物をセルロース不織布に含浸、硬化させた。さらに、シャーレを装置から取り出し、150℃で1時間かけて硬化した。得られた複合シートの平均厚みは243μmであり、気泡による表面平滑性の低下は見られなかった。
セルロース不織布(厚み120μm)を開口部が90mmφのガラス製のシャーレに入れ、液状シリコーンゴム組成物を投入し、23℃で1時間放置し液状シリコーンゴム組成物をセルロース不織布に含浸させた。次に、シャーレからセルロース不織布を取り出し、ポリイミドフィルムで挟んだ後、2軸ゴムローラー(熊谷理機工業(株)製)を用いて余計な樹脂を除去した後、23℃で23時間放置し硬化させた。さらに硬化物を取り出し、150℃1時間かけて硬化した。得られた複合シートの平均厚みは235μmであり、気泡による表面平滑性の低下は見られなかった。
セルロース不織布(厚み120μm)を開口部が90mmφのガラス製のシャーレに入れ、液状シリコーンゴム組成物を投入し、23℃で1時間放置し液状シリコーンゴム組成物をセルロース不織布に含浸させた。次に、シャーレからセルロース不織布を取り出し、ポリイミドフィルムで挟んだ。さらに、ホットプレス機にて0.1MPaの圧力でポリイミドフィルムの上から挟み、余計な樹脂を除去した後、23℃で23時間放置し硬化させた。最後に、ホットプレス機で挟んだまま150℃1時間かけて硬化した。得られた複合シートの平均厚みは233μmであり、気泡による表面平滑性の低下は見られなかった。
(マスターモールド用樹脂の調製)
光カチオン重合性化合物としてのエポキシ樹脂((株)ダイセル製「EHPE3150」)を100重量部、光カチオン重合開始剤(サンアプロ(株)製「CPI-300K」)6重量部、酸化防止剤(ダブルボンドケミカル社製「CHINOX1010」)1重量部、安定剤((株)ADEKA製「HP-10」)1重量部、プロピレングリコールメチルエーテルアセテート((株)ダイセル製「MMPGAC」)270重量部を室温(25℃)で攪拌し、各成分を均一に溶解させて、室温で液状の光硬化性組成物(マスターモールド用樹脂)を得た。
縦1m×横1mのNi基板上に厚みが5μmとなるように、得られたマスターモールド用樹脂を塗布した。その後、90℃で5分間加熱して、溶剤を除去し、マスターモールド用樹脂層を得た。縦5cm×横5cmの凹凸パターンが施された金型(Ni製、凹及び凸パターンの幅500nm、凸部の高さ500nm)をインプリント装置に固定し、得られたマスターモールド用樹脂層に10MPaで60秒間加圧し、金型を離型した。同様にしてマスターモールド用樹脂層に金型による転写処理を繰り返し、縦1m×横1mにパターンを転写した後、UV照射し(365nm、100mW/cm2、300秒)、90℃で10分間加熱し、縦1m×横1mのパターン転写体(マスターモールド)を得た。
実施例1と同様にして、1.5mφで坪量10g/m2のセルロース不織布を抄紙した。セルロース不織布の平均厚みは22μmであった。このセルロース不織布を1m角に成形し、張った状態で開口部が1m角のアルミニウム製の枠に固定し、実施例1と同様にして、液状シリコーンゴム組成物を含浸させて硬化し、複合シートを製造した。複合シートの平均厚みは73μmであった。
1m角の水ガラス上に、転写性評価で用いたインプリント用樹脂を塗布し、さらにオーブン内で90℃で5分間乾燥させることにより、厚さ2μmのインプリント用樹脂層を形成した。
セルロース不織布を用いることなく、液状シリコーンゴム組成物のみを1m角のアルミニウム製の枠に流し入れ、平均厚み75μmの樹脂シートを製造した。
実施例25と同様にして、得られたシート状モールドをインプリント装置の吸着面に吸着させたが、シート状モールドにたるみが確認された。
Claims (13)
- ポリオルガノシロキサンを含む硬化シリコーンゴムと、この硬化シリコーンゴムを補強する繊維とを含むシート状モールド。
- 繊維がセルロースナノファイバーである請求項1に記載のシート状モールド。
- シート状モールドの少なくとも一方の面に凹凸パターンを有する請求項1又は2に記載のシート状モールド。
- 繊維の表面が疎水化剤で処理されている請求項1~3のいずれかに記載のシート状モールド。
- 繊維が不織布であり、シリコーンゴムが前記不織布に含浸し、かつ硬化している請求項1~4のいずれかに記載のシート状モールド。
- 硬化シリコーンゴムがポリジメチルシロキサン単位を含む二液硬化型シリコーンゴムを含む請求項1~5のいずれかに記載のシート状モールド。
- 凹凸パターンの凸部の平均高さが50nm~100μmであり、凸部又は凹部の最小幅が50nm~100μmである請求項3~6のいずれかに記載のシート状モールド。
- 光硬化性樹脂を用いたナノインプリントリソグラフィの金型である請求項1~7のいずれか1項に記載のシート状モールド。
- 繊維と、ポリオルガノシロキサン単位を含む硬化性シリコーンゴム組成物とを複合化してシート状に成形するシート化工程と、
前記硬化性シリコーンゴム組成物を硬化させて、前記硬化性シリコーンゴム組成物の硬化物と、前記繊維とを含む複合シートを得る硬化工程とを含む請求項1~8のいずれかに記載のシート状モールドの製造方法。 - 未硬化の複合シートの一方の面にマスターモールドを用いて目的の型形状を形成する型面形成工程を含む請求項9に記載のシート状モールドの製造方法。
- シート化工程が、繊維を抄紙した不織布に硬化性シリコーンゴム組成物を含浸させる含浸工程を含む請求項9又は10記載のシート状モールドの製造方法。
- 型面形成工程において、マスターモールドが、このマスターモールドよりも小型のモールドを用いて、縦横方向に隣接させて繰り返し転写して得られたマスターモールドである請求項10又は11記載のシート状モールドの製造方法。
- 請求項1~8のいずれかに記載のシート状モールドを金型として用いて被転写体に目的の形状を転写する方法。
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CN107207764A (zh) * | 2015-02-16 | 2017-09-26 | 道康宁东丽株式会社 | 海绵可成形的硅橡胶组合物和硅橡胶海绵 |
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CN107207764B (zh) * | 2015-02-16 | 2020-03-10 | 陶氏东丽株式会社 | 海绵可成形的硅橡胶组合物和硅橡胶海绵 |
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US10808361B2 (en) | 2015-11-30 | 2020-10-20 | Oji Holdings Corporation | Sheets and method for producing sheets |
TWI746489B (zh) * | 2015-11-30 | 2021-11-21 | 日商王子控股股份有限公司 | 片材及片材之製造方法 |
JP2018104567A (ja) * | 2016-12-27 | 2018-07-05 | 王子ホールディングス株式会社 | シート |
WO2018179842A1 (ja) * | 2017-03-27 | 2018-10-04 | 株式会社ダイセル | シリコーンモールド |
JP2018161798A (ja) * | 2017-03-27 | 2018-10-18 | 株式会社ダイセル | シリコーンモールド |
US11247368B2 (en) | 2017-03-27 | 2022-02-15 | Daicel Corporation | Silicone mold |
Also Published As
Publication number | Publication date |
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TW201438864A (zh) | 2014-10-16 |
EP2952318A1 (en) | 2015-12-09 |
EP2952318B1 (en) | 2018-11-28 |
KR20150113085A (ko) | 2015-10-07 |
US10118322B2 (en) | 2018-11-06 |
EP2952318A4 (en) | 2016-10-19 |
CN105102198A (zh) | 2015-11-25 |
US20160009006A1 (en) | 2016-01-14 |
JP6046505B2 (ja) | 2016-12-14 |
JP2014146695A (ja) | 2014-08-14 |
TWI616296B (zh) | 2018-03-01 |
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