WO2013046330A1 - マイクロダイヤフラムポンプ - Google Patents

マイクロダイヤフラムポンプ Download PDF

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Publication number
WO2013046330A1
WO2013046330A1 PCT/JP2011/072056 JP2011072056W WO2013046330A1 WO 2013046330 A1 WO2013046330 A1 WO 2013046330A1 JP 2011072056 W JP2011072056 W JP 2011072056W WO 2013046330 A1 WO2013046330 A1 WO 2013046330A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
diaphragm
plate
valve plate
micro
Prior art date
Application number
PCT/JP2011/072056
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
椛澤康成
光部崇
Original Assignee
株式会社菊池製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社菊池製作所 filed Critical 株式会社菊池製作所
Priority to CN201180073680.4A priority Critical patent/CN103906923A/zh
Priority to US14/347,535 priority patent/US20140248170A1/en
Priority to KR1020147007966A priority patent/KR20140074308A/ko
Priority to EP11873526.5A priority patent/EP2762725A4/en
Priority to PCT/JP2011/072056 priority patent/WO2013046330A1/ja
Publication of WO2013046330A1 publication Critical patent/WO2013046330A1/ja

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
PCT/JP2011/072056 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ WO2013046330A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN201180073680.4A CN103906923A (zh) 2011-09-27 2011-09-27 微型隔膜泵
US14/347,535 US20140248170A1 (en) 2011-09-27 2011-09-27 Microdiaphragm pump
KR1020147007966A KR20140074308A (ko) 2011-09-27 2011-09-27 마이크로다이어프램 펌프
EP11873526.5A EP2762725A4 (en) 2011-09-27 2011-09-27 MICRODIAPHRAGM PUMP
PCT/JP2011/072056 WO2013046330A1 (ja) 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/072056 WO2013046330A1 (ja) 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ

Publications (1)

Publication Number Publication Date
WO2013046330A1 true WO2013046330A1 (ja) 2013-04-04

Family

ID=47994445

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/072056 WO2013046330A1 (ja) 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ

Country Status (5)

Country Link
US (1) US20140248170A1 (zh)
EP (1) EP2762725A4 (zh)
KR (1) KR20140074308A (zh)
CN (1) CN103906923A (zh)
WO (1) WO2013046330A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015131033A1 (en) * 2014-02-28 2015-09-03 Marsh Stephen Alan Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016133024A1 (ja) * 2015-02-17 2016-08-25 大研医器株式会社 ポンプユニット及びその製造方法
JP6639212B2 (ja) * 2015-12-09 2020-02-05 株式会社エンプラス エミッタおよび点滴灌漑用チューブ
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203077B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelectric actuator
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10388850B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
JP6765239B2 (ja) * 2016-07-12 2020-10-07 日本ピラー工業株式会社 ダイアフラムポンプ
JP6981762B2 (ja) * 2016-08-08 2021-12-17 株式会社エンプラス 流体取扱装置および流体取扱方法
CN109891096B (zh) * 2016-10-27 2020-08-18 日东工器株式会社 液体泵
TWI686537B (zh) * 2016-11-10 2020-03-01 研能科技股份有限公司 微型氣壓動力裝置
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108506197A (zh) * 2017-02-24 2018-09-07 研能科技股份有限公司 流体输送装置
JP6551636B1 (ja) * 2017-12-22 2019-07-31 株式会社村田製作所 バルブ、アプリケーション機器
TWI663507B (zh) * 2018-04-09 2019-06-21 中原大學 微型散熱系統
US20220087064A1 (en) * 2020-09-16 2022-03-17 Frore Systems Inc. Method and system for fabricating mems-based cooling systems

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434478U (zh) * 1990-07-19 1992-03-23
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
JPH0693972A (ja) 1992-09-11 1994-04-05 Seiko Epson Corp マイクロポンプ及びその製造方法
JPH10299659A (ja) 1997-02-19 1998-11-10 Seiko Instr Inc マイクロポンプおよびマイクロポンプの製造方法
JPH11287187A (ja) * 1998-03-31 1999-10-19 Ulvac Corp 往復動式真空ポンプ
JP2000274374A (ja) * 1999-03-24 2000-10-03 Kasei Optonix Co Ltd 小型ポンプ
JP2005083212A (ja) * 2003-09-05 2005-03-31 Matsushita Electric Ind Co Ltd マイクロポンプ用逆止弁装置およびその製造方法
JP2005307858A (ja) * 2004-04-21 2005-11-04 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
JP2006161779A (ja) 2004-12-10 2006-06-22 Kanagawa Acad Of Sci & Technol マイクロポンプ及びその製造方法
JP2006242176A (ja) * 2002-08-16 2006-09-14 Nec Corp 圧電ポンプおよびこれを用いた冷却装置
JP2009236284A (ja) 2008-03-28 2009-10-15 Tokyo Metropolitan Univ マイクロバルブ及びマイクロポンプ

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Publication number Priority date Publication date Assignee Title
US2856955A (en) * 1955-08-02 1958-10-21 Winkelman James Valve structure for aerators or the like
US3814552A (en) * 1973-04-17 1974-06-04 Atomic Energy Commission Personal air sampling pump
JPS61171891A (ja) * 1985-01-25 1986-08-02 Nec Corp 圧電型ポンプ
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
JP3888015B2 (ja) * 1999-12-22 2007-02-28 松下電工株式会社 圧電ダイヤフラムポンプの密封方法
US20020155010A1 (en) * 2001-04-24 2002-10-24 Karp Christoph D. Microfluidic valve with partially restrained element
JP4396095B2 (ja) * 2002-06-03 2010-01-13 セイコーエプソン株式会社 ポンプ
JP4036834B2 (ja) * 2004-01-21 2008-01-23 松下電器産業株式会社 マイクロポンプ用逆止弁の製造方法
CN2703141Y (zh) * 2004-05-30 2005-06-01 卢启明 直流自吸泵
JP2006063960A (ja) * 2004-08-30 2006-03-09 Star Micronics Co Ltd 逆止弁及びダイヤフラムポンプ
JP4285518B2 (ja) * 2006-03-28 2009-06-24 カシオ計算機株式会社 接続構造体、流路制御部、燃料電池型発電装置及び電子機器
US8256465B2 (en) * 2006-05-01 2012-09-04 Google Inc. Microfluidic valve structure
CN101550924A (zh) * 2008-03-31 2009-10-07 研能科技股份有限公司 非对称双腔流体输送装置
WO2010035862A1 (ja) * 2008-09-29 2010-04-01 株式会社村田製作所 圧電ポンプ

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434478U (zh) * 1990-07-19 1992-03-23
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
JPH0693972A (ja) 1992-09-11 1994-04-05 Seiko Epson Corp マイクロポンプ及びその製造方法
JPH10299659A (ja) 1997-02-19 1998-11-10 Seiko Instr Inc マイクロポンプおよびマイクロポンプの製造方法
JPH11287187A (ja) * 1998-03-31 1999-10-19 Ulvac Corp 往復動式真空ポンプ
JP2000274374A (ja) * 1999-03-24 2000-10-03 Kasei Optonix Co Ltd 小型ポンプ
JP2006242176A (ja) * 2002-08-16 2006-09-14 Nec Corp 圧電ポンプおよびこれを用いた冷却装置
JP2005083212A (ja) * 2003-09-05 2005-03-31 Matsushita Electric Ind Co Ltd マイクロポンプ用逆止弁装置およびその製造方法
JP2005307858A (ja) * 2004-04-21 2005-11-04 Matsushita Electric Works Ltd 圧電ダイヤフラムポンプ
JP2006161779A (ja) 2004-12-10 2006-06-22 Kanagawa Acad Of Sci & Technol マイクロポンプ及びその製造方法
JP2009236284A (ja) 2008-03-28 2009-10-15 Tokyo Metropolitan Univ マイクロバルブ及びマイクロポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2762725A4

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015131033A1 (en) * 2014-02-28 2015-09-03 Marsh Stephen Alan Micro pump systems
AU2015222915B2 (en) * 2014-02-28 2019-03-07 Stephen Alan MARSH Micro pump systems
US10344753B2 (en) 2014-02-28 2019-07-09 Encite Llc Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing

Also Published As

Publication number Publication date
US20140248170A1 (en) 2014-09-04
CN103906923A (zh) 2014-07-02
EP2762725A4 (en) 2015-06-10
EP2762725A1 (en) 2014-08-06
KR20140074308A (ko) 2014-06-17

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