200909684 九、發明說明： 【發明所屬之技術領域】 本案係關於一種流體輸送裝置之製造方法，尤指一種 適用於微幫浦結構之流體輸送裝置之製造方法。 【先前技術】 目前於各領域中無論是醫藥、電腦科技、列印、能源 f 等工業’產品均朝精緻化及微小化方向發展，其中微幫 浦、喷霧器、喷墨頭、工業列印裝置等產品所包含之流體 輸送結構為其關鍵技術’是以，如何藉創新結構突破其技 術瓶頸’為發展之重要内容。 請參閱第一圖（a)，其係為習知微幫浦結構於未作動時 之結構示意圖’習知微幫浦結構10係包含入口通道13、 微致動器15、傳動塊14、隔層膜丨2、壓縮室111、基板 U以及出口通道16,其中基板u與隔層膜12間係定義形 〇 成一壓縮室1η ’主要用來儲存液體，將因隔層膜12之形 變影響而使得壓縮室ill之體積受到改變。 產生的推力傳遞至隔層膜12, 壓變形，即如第一圖（b)所示，; 當—電壓作用在微致動器15的上下兩極時，會產生 一電％，使得微致動器15在此電場之作用下產生彎曲而 向Ik層媒12及屢縮室ηΐ方向移動，由於微致動器15係 ，又置於傳動塊14上’因此傳動塊14能將微致動器u所 向流動，200909684 IX. INSTRUCTIONS: [Technical field to which the invention pertains] The present invention relates to a method of manufacturing a fluid delivery device, and more particularly to a method of manufacturing a fluid delivery device suitable for a micro-pump structure. [Prior Art] At present, in various fields, industrial products such as medicine, computer technology, printing, energy f, etc. are developing in the direction of refinement and miniaturization, among which micro-pull, sprayer, inkjet head, industrial column The fluid transport structure contained in products such as printing devices is its key technology 'how to break through its technical bottleneck with innovative structure' as an important part of development. Please refer to the first figure (a), which is a schematic diagram of the conventional micro-pull structure when it is not in operation. The conventional micro-pull structure 10 series includes an inlet channel 13, a microactuator 15, a transmission block 14, and a partition. The film layer 2, the compression chamber 111, the substrate U and the outlet channel 16, wherein the substrate u and the interlayer film 12 are defined to form a compression chamber 1?' is mainly used for storing liquid, which will be affected by the deformation of the interlayer film 12. The volume of the compression chamber ill is changed. The generated thrust is transmitted to the interlayer film 12, and is pressure-deformed, as shown in the first figure (b). When the voltage acts on the upper and lower poles of the microactuator 15, a % of electricity is generated, so that the micro-actuation is caused. The device 15 is bent by the electric field to move toward the Ik layer medium 12 and the retracting chamber ηΐ, and is placed on the transmission block 14 due to the microactuator 15 so that the transmission block 14 can move the microactuator u is flowing,
’使得隔層膜12也跟著被擠 液體即可依圖中箭號χ之方 縮室111内的液 200909684 體受擠壓，而經由出口通道16流向其他預先設定之空間， 以達到供給流體的目的。 請再參閱第二圖，其係為第一圖⑻所示之微幫浦結構 之俯視圖，如圖所示，當微幫浦結構10作動時流體之輸 送方向係如圖中標號Y之箭頭方向所示，入口擴流器17 係為兩端開口大小不同之錐狀結構，開口較大之一端係與 入口流道191相連接，而以開口較小之一端與微壓縮室111 p 連接，同時，連接壓縮室111及出口流道192之擴流器18 係與入口擴流器17同向設置，其係以開口較大的一端連 接於壓縮室1Π，而以開口較小的一端與出口流道192相 連接，由於連接於壓縮室Π1兩端之入口擴流器Π及出口 擴流器18係為同方向設置，故可利用擴流器兩方向流阻 不同之特性，及壓縮室111體積之漲縮使流體產生單方向 之淨流率，以使流體可自入口流道191經由入口擴流器17 流入壓縮室111内，再由出口擴流器18經出口流道192 Lj 流出。 此種無實體閥門之微幫浦結構10容易產生流體大量 回流的狀況，所以爲促使流率增加，壓縮室111需要有較 大的壓縮比，以產生足夠的腔壓，故需要耗費較高的成本 在致動器15上。 因此，如何發展一種可改善上述習知技術缺失之流體 • 輸送裝置，實為目前迫切需要解決之問題。 200909684 【發明内容】 本案之主要目的在於提供一種流體輸送裝置之製造 方法，主要依序形成閥體層、閥體蓋層、可撓薄膜、致動 薄膜及致動片，且使可撓薄膜相對應設置於閥體層及閥體 蓋層之間，並將致動薄膜及致動>!相互對應貼合，藉由致 動片作動時帶動致動薄膜產生形變，使介於致動薄膜及閥 體蓋層間之壓力腔室體積改變，以產生正負之壓力差，同 時，由於可撓薄膜上之閥片結構之迅速反應，使得壓力腔 室於漲縮的瞬間可產生較大之流體吸力與推力，故可使流 體達到高效率之傳輸，並可有效阻擋流體之逆流，俾解決 習知技術之微幫浦結構於流體傳送過程中易產生流體回 流之現象。 為達上述目的，本案之較廣義實施態樣為提供一種流 體輸送裝置之製造方法，其係包含下列步驟：形成閥體 層；於該閥體層上對應形成閥體蓋層，其係具有壓力腔 室；形成可撓薄膜，其係具有至少一個閥片結構；形成致 動薄膜；形成致動器，並將致動器貼附定位於致動薄膜 上，以形成致動裝置；將可撓薄膜設置於閥體層及閥體蓋 層之間，且將閥體層、可撓薄膜與閥體蓋層相互組裝定 位；以及將致動裝置設置於閥體蓋層上，以使致動薄膜封 閉閥體蓋層之壓力腔室，俾形成流體輸送裝置。 【實施方式】 體現本案特徵與優點的一些典型實施例將在後段的 200909684 說明中詳細敘述。應理解的是本案能夠在不同的態樣上具 有各種的變化，其皆不脫離本案的範圍，且其中的說明及 圖示在本質上係當作說明之用，而非用以限制本案。 請參閱第三圖，其係為本案第一較佳實施例之流體輸 送裝置之結構示意圖，如圖所示，本案之流體輸送裝置20 可適用於醫藥生技、電腦科技、列印或是能源等工業，且 可輸送氣體或是液體，但不以此為限，流體輸送裝置20 f . 主要係由閥體座21、閥體蓋體22、閥體薄膜23、複數個 暫存室、致動裝置24及蓋體25所組成，其中閥體座21、 閥體蓋體22、閥體薄膜23係形成一流體閥座201，且在 閥體蓋體22及致動裝置24之間形成一壓力腔室226，主 要用來儲存流體。 該流體輸送裝置20之組裝方式係將閥體薄膜23設置 於閥體座21及閥體蓋體22之間，並使閥體薄膜23與閥 體座21及閥體蓋體22相對應設置，且在閥體薄膜23與 ϋ 閥體蓋體22之間形成一第一暫存室，而在閥體薄膜23與 閥體座21之間形成一第二暫存室，並且於閥體蓋體22上 之相對應位置更設置有致動裝置24，致動裝置24係由一 振動薄膜241以及一致動器242組裝而成，用以驅動流體 輸送裝置20之作動，最後，再將蓋體25設置於致動裝置 24之上方，故其係依序將閥體座21、閥體薄膜23、閥體 ' 蓋體22、致動裝置24及蓋體25相對應堆疊設置，以完成 - 流體輸送裝置20之組裝。 其中，閥體座21及閥體蓋體22係為本案流體輸送裝 200909684 置20中導引流體進出之主要結構，請參閱第四圖並配合 第三圖，其中第四圖係為第三圖所示之閥體座的側面結構 示意圖，如圖所示，閥體座21係具有一個入口流道211 以及一個出口流道212，流體係可由外界輸入，經由入口 流道211傳送至閥體座21上表面210之一開口 213,並且， 於本實施例中，閥體薄膜23及閥體座21之間所形成的第 二暫存室即為圖中所示之出口暫存腔215，但不以此為 限，其係由閥體座21之上表面210於與出口流道212相 對應之位置產生部分凹陷而形成，並與出口流道212相連 通，該出口暫存腔215係用以暫時儲存流體，並使該流體 由出口暫存腔215經由一開口 214而輸送至出口通道 212，再流出閥體座21之外。以及，在閥體座21上更具 有複數個凹槽結構，用以供一密封環26(如第七圖（a)所示） 設置於其上，於本實施例中，閥體座21係具有環繞開口 213週邊之凹槽216、218，及環繞於出口暫存腔215週 邊之凹槽217。 請參閱第五圖⑻並配合第三圖，其中第五圖⑻係為第 三圖所示之閥體蓋體之背面結構示意圖，如圖所示，閥體 蓋座22係具有一上表面220及一下表面228,以及在閥體 蓋座22上亦具有貫穿上表面220至下表面228之入口閥 門通道221及出口閥門通道222，且該入口閥門通道221 係設置於與閥體座21之開口 213相對應之位置，而出口 閥門通道222則設置於與閥體座21之出口暫存腔215内 之開口 214相對應之位置，並且，於本實施例中，閥體薄 200909684 膜23及閥體盖體22之間所形成之弟一暫存室即為圖中所 示之入口暫存腔223，且不以此為限，其係由閥體蓋體22 之下表面228於與入口閥門通道221相對應之位置產生部 份凹陷而形成，且其係連通於入口閥門通道221。 請參閱第五圖（b)，其係為第五圖（a)之剖面結構示意 圖，如圖所示，閥體蓋體22之上表面220係部份凹陷， 以形成一壓力腔室226，其係與致動裝置24之致動器242 f 相對應設置，壓力腔室226係經由入口閥門通道221連通 於入口暫存腔223，並同時與出口閥門通道222相連通， 因此，當致動器242受電壓致動使致動裝置24上凸變形， 造成壓力腔至226之體積膨服而產生負壓差，可使流體經 入口閥門通道221流至壓力腔室226内，其後，當施加於 致動器242的電場方向改變後，致動器242將使致動裝置 24下凹變形壓力腔室226收縮而體積減小，使壓力腔室 226與外界產生正壓力差，促使流體由出口閥門通道222 流出壓力腔室226之外，於此同時，同樣有部分流體會流 入入口閥門通道221及入口暫存室223内，然而由於此時 的入口閥門結構231 (如第六圖⑷所示）係為使受壓而關閉 的狀態，故該流體不會通過入口閥片231而產生倒流的現 象，至於暫時儲存於入口暫存腔223内之流體，則於致動 器2=再叉電壓致動，重複使致動裝置24再上凸變形而 日加壓力腔至226體積時，再由入口暫存腔223經至入口 閥門通道221而流入壓力腔室226内，以進行流體的輸送。 另外，閥體盍體22上同樣具有複數個凹槽結構，以 200909684 本實施例為例，在閥體蓋座22之上表面220係具有環繞 壓力腔室226而設置之凹槽227，而在下表面228上則具 有環繞設置於入口暫存腔223之凹槽224、環繞設置於出 口閥門通道222之凹槽225以及凹槽229，同樣地，上述 凹槽結構係用以供一密封環27(如第七圖⑻所示）設置於 其中。 請參閱第六圖（a)並配合第三圖，其中第六圖⑻係為第 三圖所示之閥體薄膜之結構示意圖，如圖所示，閥體薄膜 23主要係以傳統加工、或黃光蝕刻、或雷射加工、或電鑄 加工、或放電加工等方式製出，且為一厚度實質上相同之 薄片結構，其上係具有複數個鏤空閥開關，包含第一閥開 關以及第二閥開關，於本實施例中，第一閥開關係為入口 閥門結構231，而第二閥開關係為出口閥門結構232，其 中，入口閥門結構231係具有入口閥片2313以及複數個 環繞入口閥片2313週邊而設置之鏤空孔洞2312，另外， 1； 在孔洞2312之間更具有與入口閥片2313相連接之延伸部 2311，當閥體薄膜23承受一自壓力腔室226傳遞而來向 下之應力時，如第七圖（c)所示，入口閥門結構231係整個 向下平貼於閥體座21之上，此時入口閥片2313會緊靠凹 槽216上密封環26突出部分，而密封住閥體座21上之開 口 213，且其外圍的鏤空孔洞2312及延伸部2311則順勢 • 浮貼於閥體座21之上，故因此入口閥門結構231之關閉 - 作用，使流體無法流出。 而當閥體薄膜23受到壓力腔室226體積增加而產生 12 200909684 之吸力作用下，由於設置於閥體座21之凹槽216内的密 封環26已提供入口閥門結構231 —預力（Preforce)，因而 入口閥片2313可藉由延伸部2311的支撐而產生更大之預 蓋緊效果，以防止逆流，當因壓力腔室226之負壓而使入 口閥門結構231往上產生位移（如第六圖（b)所示），此時， 流體則可經由鏤空之孔洞2312由閥體座21流至閥體蓋體 22之入口暫存腔223，並經由入口暫存腔223及入口閥門 通道221傳送至壓力腔室226内，如此一來，入口閥門結 構231即可因應壓力腔室226產生之正負壓力差而迅速的 開啟或關閉，以控制流體之進出，並使流體不會回流至閥 體座21上。 同樣地，位於同一閥體薄膜23上的另一閥門結構則 為出口閥門結構232，其中之出口閥片2323、延伸部2321 以及孔洞2322之作動方式均與入口閥門結構231相同， 因而不再贅述，惟出口閥門結構232週邊之密封環26設 置方向係與入口閥門結構231之密封環27反向設置，如 第六圖⑷所示，因而當壓力腔室226壓縮而產生一推力 時，設置於閥體蓋體22之凹槽225内的密封環27將提供 出口閥門結構232 —預力（Preforce)，使得出口閥片2323 可藉由延伸部2321之支撐而產生更大之預蓋緊效果，以 防止逆流，當因壓力腔室226之正壓而使出口閥門結構232 往下產生位移，此時，流體則可經由鏤空之孔洞2322由 壓力腔室226經閥體蓋體22而流至閥體座21之出口暫存 腔215内，並可經由開口 214及出口流道212排出，如此 13 200909684 一來，則可經由出口閥門結構232開啟之機制，將流體自 壓力腔室226内洩出，以達到流體輸送之功能。 請參閱第七圖（a )，其係為本案較佳實施例之流體輸送 裝置之未作動狀態示意圖，於本實施例中，所有的凹槽結 構216、217、218分別設置密封環26，而凹槽224、225、 229内亦分別設置密封環27，其材質係為可耐化性佳之橡 膠材料，且不以此為限，其中，設置於閥體座21上環繞 f 開口 213之凹槽216内的密封環可為一圓環結構，其厚度 \ 係大於凹槽216深度，使得設置於凹槽216内之密封環26 係部分凸出於閥體座21之上表面210構成一微凸結構， 因而使得貼合設置於閥體座21上之閥體薄膜23之入口閥 門結構231之入口閥片2313因密封環26之微凸結構而形 成一向上隆起，而閥體薄膜23之其餘部分係與閥體蓋體 22相抵頂，如此微凸結構對入口閥門231頂推而產生一預 力（Preforce)作用，有助於產生更大之預蓋緊效果，以防止 〇 逆流，且由於密封環26向上隆起之微凸結構係位於閥體 薄膜23之入口閥門結構231處，故使入口閥門結構231 在未作動時使入口閥片2313與閥體座21之上表面210之 間具有一間隙，同樣地，當密封環27設置於環繞出口閥 門通道222之凹槽225内時，由於其密封環27係設置於 閥體蓋體22之下表面228，因而該密封環27係使閥體薄 • 膜23之出口閥門結構向下凸出而形成一向下隆起於閥體 . 蓋體22之微凸結構，此微凸結構僅其方向與形成於入口 閥門結構231之微凸結構係為反向設置，然而其功能均與 14 200909684 前述相同，因而不再贅述。至於其餘分別設置於凹槽結構 n 217、218及224、229以及227内之密封環26、27及28， 主要用來分別使閥體座21與閥體薄膜23、閥體薄膜23與 閥體蓋體22以及閥體蓋體22與致動裝置24之間緊密貼 合時，防止流體外洩。 當然，上述之微凸結構除了使用凹槽及密封環來搭配 形成外，於一些實施例中，閥體座21及閥體蓋體22之微 / 凸結構亦可採用半導體製程，例如：黃光蝕刻或鍍膜或電 \ 鑄技術，直接在閥體座21及閥體蓋體22上形成。 請同時參閱第七圖（a)、（b)、（c)，如圖所示，當蓋體 25、致動裝置24、閥體蓋體22、閥體薄膜23、密封環26 以及閥體座21彼此對應組裝設置後，閥體座21上之開口 213係與間體薄膜23上之入口閥門結構231以及闊體蓋體 22上之入口閥門通道221相對應，且閥體座21上之開口 214則與閥體薄膜23上之出口閥片232以及閥體蓋體22 Q 上之出口閥門通道222相對應，並且，由於密封環26設 置於凹槽216内，使得閥體薄膜23之入口閥門結構231 微凸起於閥體座21之上，並藉由位於凹槽216内之密封 環26頂觸閥體薄膜23而產生一預力（(Preforce)作用，使 得入口閥門結構231在未作動時則與閥體座21之上表面 210形成一間隙，同樣地，出口閥門結構232亦藉由將密 - 封環27設至於凹槽225中的相同方式與閥體蓋體22之下 ， 表面228形成一間隙。 當以一電壓驅動致動器242時，致動裝置24產生 15 200909684 彎曲變形，如第七圖（b)所示，致動裝置24係朝箭號a所 指之方向向上彎曲變形，使得壓力腔室226之體積增加， 因而產生一吸力，使閥體薄膜23之入口閥門結構231、出 口閥門結構232承受一向上之拉力，並使已具有一預力 (Preforce)之入口閥門結構231之入口閥片2313迅速開啟 (如第六圖（b)所示），使液體可大量地自閥體座21上之入口 通道211被吸取進來，並流經閥體座21上之開口 213、閥 f 體薄膜23上之入口閥門結構231之孔洞2312、閥體蓋體 22上之入口暫存腔223、入口閥片通道221而流入壓力腔 室226之内，此時，由於閥體薄膜23之入口閥門結構231、 出口閥門結構232承受該向上拉力，故位於另一端之出口 閥門結構232係因該向上拉力使得位於閥體薄膜23上之 出口閥片2323密封住出口閥門通道222，而使得出口閥門 結構232關閉，因而流體逆流。 當致動裝置24因電場方向改變而如第七圖（c)所示之 ί,: 箭號b向下彎曲變形時，則會壓縮壓力腔室226之體積， 使得壓力腔室226對内部之流體產生一推力，並使閥體薄 膜23之入口閥門結構231、出口閥門結構232承受一向下 推力，此時，設置於凹槽225内之密封環27上出口閥門 結構232的出口閥片2323其可迅速開啟（如第六圖（c)所 示），並使液體瞬間大量宣洩，由壓力腔室226經由閥體蓋 • 體22上之出口閥門通道222、閥體薄膜23上之出口闊門 - 結構232之孔洞2322、閥體座21上之出口暫存腔215、 開口 214及出口通道212而流出流體輸送裝置20之外， 16 200909684 因而完成流體之傳輸過程，同樣地，此時由於入口閥門結 構231係承受該向下之推力，因而使得入口閥片2313密 封住開口 213，因而關閉入口閥門結構231，使得流體不 逆流，並且，藉由入口閥門結構231及出口閥門結構232 配合設置於閥體座21及閥體蓋體22上之凹槽216、225 内的密封環26、27之設計，可使流體於傳送過程中不會 產生回流的情形，達到高效率之傳輸。 f 另外，於本實施例中，閥體座21以及閥體蓋體22之 材質係可採用熱塑性塑膠材料，例如聚碳酸酯樹酯 (Polycarbonate PC)、聚諷（Polysulfone, PSF)、ABS 樹脂 (Acrylonitrile Butadiene Styrene)、縱性低密度聚乙烯 (LLDPE)、低密度聚乙烯(LDPE)、高密度聚乙烯(HDPE)、 聚丙稀（PP)、聚苯硫醚（Polyphenylene Sulfide，PPS)、對位 性聚苯乙烯（SPS)、聚苯醚（PPO)、聚縮醛 (Polyacetal，POM)、聚對苯二曱酸二丁酯（pbt)、聚偏氟乙 〇 烯(PVDF)、乙烯四氟乙烯共聚物(ETFE)、環狀烯烴聚合物 (COC)等熱塑性塑膠材料，但不以此為限，且於本實施例 中，壓力腔室226之深度係介於100/zm至3〇〇//m之間， 直徑介於1(Γ 30mm之間’且不以此為限。 於本實施例中，遠閥體薄膜23與閥體座21及閥體蓋 體22之間的間隙距離可為1 〇 # m至790 // m，且最佳者為 ' 180" m至300/z m，且於一些實施例中，該致動裝置24 - 之振動薄膜241與閥體盍體22間的分隔距離，即間隙， 可為10/z m至790// m，較佳者為丄⑻"m至爪。 17 200909684 • 而閥體薄膜23係可以傳統加工或黃光钱刻或雷射加 工或電鑄加工或放電加工等方式製出，其材質可為任何耐 化性佳之有機高分子材料或金屬，當閥體薄膜23採用該 高分子材料，其彈性係數為2~ 20 Gpa，例如聚亞醯胺 (Polyimide，PI)，其彈性係數，即楊氏係數（E值）可為 lOGPa，當閥體薄膜23採用金屬材料時，例如鋁、鋁合金、 錄、鎮合金、銅、銅合金或不鑛鋼％•金屬材料，其楊氏係 ( 數係為2~24〇GPa，若該金屬材料為鋁金屬，其彈性係數 為70GPa’或是鎳金屬，其彈性係數為210GPa，或是不銹 鋼金屬，其彈性係數為240GPa等，且不以此為限。至於 閥體薄膜23之厚度可介於10/zm至50/zm，最佳者為21 V m 至 40 β m。 以下分別就閥體薄膜23使用不同材質時所製成之方 法提出說明。 當閥體薄膜23之材質係為聚亞醯胺（p〇lyimide，ρι) 〇 時，其製造方法主要係利用反應離子氣體乾蝕刻（reactive ion etching，RIE)之方法，以感光性光阻塗佈於閥門結構之 上’並曝光顯影出閥門結構圖案後，再以進行餘刻，由於 有光阻覆盏處會保護聚亞醯胺（p〇lyimide，ρι)>;不被蝕 刻，因而可蝕刻出閥體薄膜23上之閥門結構。 若閥體薄膜23之材質為不錄鋼金屬，則可以黃光餘 -刻、雷射加工及機械加工等製出間門結構，其中黃光钱刻 .的方式得到在不鎮鋼片上的閥門結構之光阻圖案，再浸、、包 於FeC13加HCH容液中進行濕個，與前述方法類似，有 18 200909684 光阻覆蓋處會保護不銹鋼片不被蝕刻，因而可蝕刻出閥體 « 薄膜23上之閥門結構。 以及，若是閥體薄膜23之材質係為金屬鎳，則係利 用電鑄成形的方法，同樣利用黃光蝕刻方法，得到在不銹 鋼基板上之閥門結構的光阻圖案，然後進行鎳電鑄，有光 阻覆蓋處不會電鑄，當電鑄之鎳金屬達一定厚度後，將其 從不銹鋼基板上脫離，則可得到具閥門結構231、232之 r 閥體薄膜23。 气 另外，除了上述之製造方法之外，應用於閥體薄膜23 之所有材質均可用精密衝孔之加工方法，或是應用傳統機 械加工方式、雷射加工或電鑄加工或放電加工等方式製作 出其上之閥片結構，但不以此為限。 而，致動裝置24内之致動器242係為一壓電板，可 採用高壓電係數之锆鈦酸鉛（PZT)系列的壓電粉末製造而 成，其中致動器242的厚度可介於100#m至500/z m之 〇 間，較佳厚度為150# m至250// m，揚氏係數係為100至 150GPa，且不以此為限。 而貼附致動器242之振動薄膜241之厚度為10/zm至 300 # m，較佳厚度為100 # m至250/z m，其材質可為一 單層金屬所構成，例如不錄鋼金屬，其揚氏係數係為 240Gpa，厚度係介於140/z m至160// m，例如銅，其楊氏 係數係為lOOGpa ’厚度係介於190# m至210# m，且不 - 以此為限，或其材質可為金屬材料上貼附一層耐生化高分 子薄板以構成之雙層結構，。 19 200909684 • 於一些實施例中，爲了因應大流量流體傳輸的需求， 可於致動裝置24之致動器242上施予操作頻率為 10-50Hz，並配合以下條件： 致動态242之厚度約為1 〇〇 # m至500 // m之剛性特 性’較佳厚度為150 # m至250 # m，揚氏係數約為 100-150Gpa。 以及振動薄膜241之厚度為10/ζιη至300/zm之間， ( 較佳厚度為100V m至250# m，楊氏係數為60-300GPa， 其材質可為一單層金屬所構成，例如不銹鋼金屬，其揚氏 係數係為240Gpa ’厚度係介於140" m至160// m，例如 銅’其揚氏係數係為l〇〇Gpa，厚度係介於I90^m至210 // m ’且不以此為限’或其材質可為金屬材料上貼附一層 财生化高分子薄板以構成之雙層結構。 該壓力腔室226之深度係介於i〇〇# m至300# m之 間，直徑介於1(T 30mm之間。 ί/ 以及，閥體薄膜23上之閥門結構231、232之厚度為 10/zm至50"111’杨氏係數為2~ 24〇Gpa，可為任何耐化性 佳之有機高分子材料或金屬，該閥體薄膜23採用該高分 子材料，其彈性係數為r 20 Gpa，例如聚亞酿胺(p〇lyimide， PI) ’其彈性係數’即楊氏係數(E值）可為lOGpa，該閥體 薄膜23採用金屬材料，例如紹、紹合金、錄、錄合金、 -銅、銅合金或不鏽㈣金屬材料’其楊氏係數係為 2 24GGPa，|g金屬彈性係數為7QGpa，或是鎳金屬彈性係 數為21〇GPa，或是不銹鋼金屬彈性係數為24〇Gpa以及， 20 200909684 閥體薄膜23與閥體座21及閥體蓋體22之間的間隙距離 可為10 // m至790 /zm，且最佳者為180/zm至300 // m。 由上述致動器242、振動薄膜241、壓力腔室226及 閥體薄膜23等相關參數條件搭配，則可驅動閥體薄膜23 之入口閥門結構231及出口閥門結構232進行啟閉作用， 驅使流體進行單向流動，並使流經壓力腔室226的流體能 達到每分鐘5cc以上的大流量輸出。 綜上所述，本案之流體傳輸裝置20可經由致動裝置 24之驅動，且閥體薄膜23及其上一體成形之入口閥門結 構231可配合設置於閥體座21之凹槽216内的軟性密封 環26,使入口閥門結構231開啟而將流體輸送至壓力腔室 226，再因致動裝置24改變壓力腔室226之體積，因而使 出口闕門結構232配合設置於閥體蓋體22上之凹槽225 内之軟性密封環27而開啟，以使流體輸送至壓力腔室226 之外，由於麈力腔室226於體積涨縮的瞬間可產生較大之 流體吸力與推力，配合閥體薄膜23上之閥門結構其迅速 的開合反應，使得故可使流體達到大流量之傳輸，並有效 阻擋流體之逆流。 請參閱第八圖並搭配第三圖，其中第八圖係為本案第 二較佳實施例之流體輸送裝置之製造流程圖，首先需形成 一閥體層，即如第三圖所示之閥體座21(如步驟S81所 示），其後，形成一閥體蓋層，於本實施例中，該閥體蓋層 即為第三圖所示之閥體蓋體22,且其係具有一壓力腔室 226(如步驟S82所示），接著，於閥體座21及閥體蓋體22 21 200909684 • 上刀另j开^成後凸結構（如步驟S83所示），該微凸結構之 形成方式可有兩種方式，且不以此為限：一、請參考第三 圖及本案之實施例’需先於閥體座21及閥體蓋體22上分 另J开/成至 >、、姻凹槽，如圖中所示之閥體座21上即具有 凹槽216 ’並於凹槽216内設置一密封環26(如第七圖⑷ 所示）’由於設置於凹槽216内之密封環26係部份凸出於 闕體座21之上表面210,因而可於閥體座21之上表面210 ( 形成一微凸結構，同樣地，凹槽225及密封環20亦可以 上述方式於閥體蓋體22之下表面228上形成一微凸結構 (如第五圖（b)所示）；二、可採用半導體製程，例如：黃光 蝕刻或鍍膜或電鑄技術，但不以此為限’直接於閥體座21 及閥體蓋體22上形成一微凸結構。 接著’形成一可撓薄膜，其係具有至少一閥片結構， 即為本案之閥體薄膜23以及所具有之入口闊門結構231 及出口閥門結構232 (如步驟S84所示），接著，再形成一 〇 致動薄膜’即為本案之振動薄膜241(如步驟S85所示）’ 以及形成一致動器242(如步驟S86所示），之後，將致動 器242貼附定位於振動薄膜241之上，以組裝構成一致動 裝置24 ’並使致動器242與壓力腔室226相對應設置（如 步驟S87所示），在步驟S87之後將閥體薄膜23設置於閥 體座21與閥體蓋體22之間，並且使閥體座21、閥體薄膜 • 23以及閥體蓋體22彼此相對應設置（如步驟S88所示）， - 最後’將致動裝置24對應設置於閥體蓋體22上，並使闊 體薄膜23封閉閥體蓋體22之壓力腔室226，以形成一流 22 200909684 體輸送裝置（如步驟S89所示）。 綜上所述，本案之流體輸送裝置之製造方法，主要依 序形成閥體層、閥體蓋層、可撓薄膜、致動薄膜及致動片， 且使可撓薄膜相對應設置於閥體層及閥體蓋層之間，並將 致動薄膜及致動片相互對應貼合，藉由致動片作動時帶動 致動薄膜產生形變，使介於致動薄膜及閥體蓋層間之壓力 腔室的體積改變，以產生正負之壓力差，由於使用本案製 造方法所形成之流體輸送裝置係可輸送氣體及流體，不僅 有極佳之流率與輸出壓力，可於初始狀態自我汲取液體， 更具有高精度控制性，且因其可輸送氣體，因此於流體輸 送過程更可排除氣泡，以達到高效率之傳輸。是以，本案 之流體輸送裝置之製造方法極具產業之償值，爰依法提出 申請。 本案得由熟習此技術之人士任施匠思而為諸般修 飾，然皆不脫如附申請專利範圍所欲保護者。 23 200909684 【圖式簡單說明】 第一圖（a) ··其係為習知微幫浦結構於未作動時之結構示意 圖。 第一圖（b):其係為第一圖（a)於作動時之結構示意圖。 第二圖：其係為第一圖（a)所示之微幫浦結構之俯視圖。 第三圖：其係為本案第一較佳實施例之流體輸送裝置之結 構不意圖。 第四圖：其係為第三圖所示之閥體座側面結構示意圖。 第五圖（a):其係為第三圖所示之閥體蓋體之背面結構示意 圖。 第五圖（b):其係為第五圖（a)之剖面結構示意圖。 第六圖：其係為第三圖所示之閥體薄膜結構示意圖。 第七圖（a):其係為本案較佳實施例之流體輸送裝置之未作 動狀態示意圖。 第七圖（b):其係為第七圖（a)之壓力腔室膨脹狀態示意圖。 第七圖（c):其係為第七圖（b)之壓力腔室壓縮狀態示意圖。 第八圖：其係為本案第二較佳實施例之流體輸送裝置之製 造流程圖。 24 200909684 【主要元件符號說明】 微幫浦結構：10 基板：11 壓縮室：111 隔層膜： 12 入口通道：13 傳動塊： 14 微致動器：15 出口通道 ：16 入口擴流器：17 出口擴流器：18 流動方向：X、Y 方向：a、 b 流體輸送裝置：20 流體閥座 ：201 閥體座：21 閥體蓋體 :22 閥體薄膜：23 致動裝置 ：24 蓋體：25 振動薄膜 ：241 致動器：242 入口流道 ：191 ' 211 出 口流道：192、212 開口 ： 213、214 上表面：210、220 出口暫存腔：215 下表面：228 入口暫存腔：223 入口閥門通道：221 出口閥門通道：222 凹槽：216、217、218、224、225、227、229 壓力腔室：226 密封環：26、27、28 入口閥門結構：231 出口閥門結構：232 入口閥片：2313 出口閥片：2323 延伸部：2311、2321 孔洞：2312、2322 S8卜S89 :流體輸送裝置之製造流程 25'The barrier film 12 is also squeezed with the liquid 200909684 in the square chamber 111 of the arrow χ in the figure, and flows through the outlet channel 16 to other predetermined spaces to supply the fluid. purpose. Please refer to the second figure, which is a top view of the micro-pull structure shown in the first figure (8). As shown in the figure, when the micro-push structure 10 is actuated, the direction of fluid transport is indicated by the arrow direction Y in the figure. As shown, the inlet diffuser 17 is a tapered structure having different opening sizes at both ends, and one of the larger ends is connected to the inlet flow passage 191, and one end of the smaller opening is connected to the micro compression chamber 111p. The diffuser 18 connecting the compression chamber 111 and the outlet flow passage 192 is disposed in the same direction as the inlet diffuser 17, and is connected to the compression chamber 1Π with the opening having a larger opening, and the outlet and the outlet with the smaller opening. The channel 192 is connected. Since the inlet diffuser Π and the outlet diffuser 18 connected to both ends of the compression chamber Π1 are arranged in the same direction, the flow resistance of the diffuser can be utilized in different directions, and the volume of the compression chamber 111 can be utilized. The expansion causes the fluid to produce a unidirectional net flow rate such that fluid can flow from the inlet flow passage 191 through the inlet diffuser 17 into the compression chamber 111 and from the outlet diffuser 18 through the outlet flow passage 192 Lj. Such a micro-pump structure 10 without a physical valve is prone to a large amount of fluid backflow. Therefore, in order to increase the flow rate, the compression chamber 111 needs to have a large compression ratio to generate sufficient cavity pressure, so that it is expensive. The cost is on the actuator 15. Therefore, how to develop a fluid delivery device that can improve the above-mentioned conventional technology is an urgent problem to be solved. 200909684 SUMMARY OF THE INVENTION The main object of the present invention is to provide a method for manufacturing a fluid transport device, which mainly forms a valve body layer, a valve body cover layer, a flexible film, an actuating film and an actuating plate, and correspondingly a flexible film. Provided between the valve body layer and the valve body cover layer, and the actuating film and the actuation device are correspondingly matched to each other, and the actuation film is deformed when the actuation piece is actuated, so that the actuation film and the valve are interposed. The volume of the pressure chamber between the body cap layers is changed to produce a positive and negative pressure difference. At the same time, due to the rapid reaction of the valve plate structure on the flexible film, the pressure chamber can generate a large fluid suction and thrust at the moment of expansion and contraction. Therefore, the fluid can be transported with high efficiency, and the reverse flow of the fluid can be effectively blocked, and the micro-pump structure of the prior art is easy to generate fluid reflux during the fluid transfer process. In order to achieve the above object, a broader aspect of the present invention provides a method of manufacturing a fluid delivery device comprising the steps of: forming a valve body layer; forming a valve body cover layer on the valve body layer, having a pressure chamber Forming a flexible film having at least one valve sheet structure; forming an actuation film; forming an actuator and attaching the actuator to the actuation film to form an actuation device; setting the flexible film Between the valve body layer and the valve body cover layer, and assembling the valve body layer, the flexible film and the valve body cover layer, and positioning the actuating device on the valve body cover layer, so that the actuating film closes the valve body cover The pressure chamber of the layer, the crucible forms a fluid delivery device. [Embodiment] Some exemplary embodiments embodying the features and advantages of the present invention will be described in detail in the later description of 200909684. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of Please refer to the third drawing, which is a schematic structural view of the fluid conveying device of the first preferred embodiment of the present invention. As shown in the figure, the fluid conveying device 20 of the present invention can be applied to medical technology, computer technology, printing or energy. And the like, and can transport gas or liquid, but not limited thereto, the fluid conveying device 20 f. Mainly by the valve body seat 21, the valve body cover 22, the valve body film 23, a plurality of temporary storage chambers, The moving device 24 and the cover body 25 are formed, wherein the valve body seat 21, the valve body cover 22 and the valve body film 23 form a fluid valve seat 201, and a valve body 22 and the actuating device 24 are formed. The pressure chamber 226 is primarily used to store fluid. The fluid transport device 20 is assembled by disposing the valve body film 23 between the valve body seat 21 and the valve body cover 22, and the valve body film 23 is disposed corresponding to the valve body seat 21 and the valve body cover 22, And a first temporary storage chamber is formed between the valve body film 23 and the valve body cover 22, and a second temporary storage chamber is formed between the valve body film 23 and the valve body seat 21, and the valve body cover body The corresponding position on the 22 is further provided with an actuating device 24, which is assembled by a vibrating membrane 241 and an actuator 242 for driving the fluid transport device 20, and finally, the cover 25 is set. Above the actuating device 24, the valve body seat 21, the valve body film 23, the valve body 'cover body 22, the actuating device 24 and the cover body 25 are sequentially stacked to complete the - fluid conveying device. 20 assembly. The valve body seat 21 and the valve body cover body 22 are the main structures for guiding fluid in and out of the fluid transporting device 200909684 in this case. Please refer to the fourth figure and cooperate with the third figure, wherein the fourth figure is the third figure. The side structure of the valve body seat is shown. As shown, the valve body seat 21 has an inlet flow path 211 and an outlet flow path 212. The flow system can be input from the outside and transmitted to the valve body seat via the inlet flow path 211. 21, an opening 213 of the upper surface 210, and in the present embodiment, the second temporary storage chamber formed between the valve body film 23 and the valve body seat 21 is the outlet temporary storage chamber 215 shown in the figure, but Not limited thereto, the upper surface 210 of the valve body seat 21 is partially recessed at a position corresponding to the outlet flow path 212, and communicates with the outlet flow path 212. The outlet temporary cavity 215 is used. The fluid is temporarily stored and delivered to the outlet passage 212 from the outlet temporary chamber 215 via an opening 214 and out of the valve body seat 21. And, the valve body seat 21 further has a plurality of groove structures for providing a sealing ring 26 (as shown in FIG. 7(a)). In this embodiment, the valve body seat 21 is There are grooves 216, 218 around the periphery of the opening 213, and a groove 217 surrounding the periphery of the exit temporary cavity 215. Please refer to the fifth figure (8) and cooperate with the third figure. The fifth figure (8) is a schematic view of the back structure of the valve body cover shown in the third figure. As shown, the valve body cover 22 has an upper surface 220. And a lower surface 228, and an inlet valve passage 221 and an outlet valve passage 222 extending through the upper surface 220 to the lower surface 228 on the valve body cover 22, and the inlet valve passage 221 is disposed at an opening with the valve body seat 21. 213 corresponds to the position, and the outlet valve passage 222 is disposed at a position corresponding to the opening 214 in the outlet temporary chamber 215 of the valve body seat 21, and, in the present embodiment, the valve body is thin, 200909684, the membrane 23 and the valve The temporary storage chamber formed between the body cover 22 is the inlet temporary storage chamber 223 shown in the figure, and is not limited thereto, and is connected to the inlet valve by the lower surface 228 of the valve body cover 22 The corresponding position of the passage 221 is partially recessed and communicated with the inlet valve passage 221. Referring to FIG. 5(b), which is a cross-sectional structural view of FIG. 5(a), as shown, the upper surface 220 of the valve body cover 22 is partially recessed to form a pressure chamber 226. It is disposed corresponding to the actuator 242 f of the actuating device 24, and the pressure chamber 226 is in communication with the inlet temporary chamber 223 via the inlet valve passage 221 and simultaneously communicates with the outlet valve passage 222, thus, when actuated The actuator 242 is subjected to voltage actuation to cause the actuator 24 to be convexly deformed, causing the volume of the pressure chamber to 226 to be expanded to generate a negative pressure difference, so that the fluid can flow into the pressure chamber 226 through the inlet valve passage 221, and thereafter, when After the direction of the electric field applied to the actuator 242 is changed, the actuator 242 will cause the lowering deformation pressure chamber 226 of the actuating device 24 to contract and reduce the volume, causing the pressure chamber 226 to generate a positive pressure difference from the outside, causing the fluid to be caused by The outlet valve passage 222 flows out of the pressure chamber 226. At the same time, some of the fluid also flows into the inlet valve passage 221 and the inlet temporary chamber 223, but due to the inlet valve structure 231 at this time (as shown in the sixth figure (4) Show) is to close the pressure Therefore, the fluid does not flow backward through the inlet valve piece 231. As for the fluid temporarily stored in the inlet temporary storage chamber 223, the actuator 2 = re-crossing voltage is actuated, and the actuating device 24 is repeated. When the convex pressure is deformed and the pressure chamber is increased to 226 volume, the inlet temporary storage chamber 223 passes through the inlet valve passage 221 and flows into the pressure chamber 226 to carry out fluid transportation. In addition, the valve body body 22 also has a plurality of groove structures. For example, in the embodiment of the embodiment, the upper surface 220 of the valve body cover 22 has a groove 227 disposed around the pressure chamber 226, and The surface 228 has a groove 224 disposed around the inlet temporary cavity 223, a groove 225 surrounding the outlet valve passage 222, and a groove 229. Similarly, the groove structure is used for a sealing ring 27 ( As shown in the seventh figure (8)) is set therein. Please refer to the sixth figure (a) and cooperate with the third figure. The sixth figure (8) is a schematic structural view of the valve body film shown in the third figure. As shown in the figure, the valve body film 23 is mainly processed by conventional processing, or Yellow light etching, or laser processing, or electroforming processing, or electric discharge machining, and is a sheet structure having substantially the same thickness, and has a plurality of hollow valve switches thereon, including a first valve switch and a first In the present embodiment, the first valve opening relationship is the inlet valve structure 231, and the second valve opening relationship is the outlet valve structure 232, wherein the inlet valve structure 231 has an inlet valve piece 2313 and a plurality of surrounding inlets. The hollow hole 2312 is provided around the valve piece 2313. Further, 1; between the holes 2312, there is further an extension 2311 connected to the inlet valve piece 2313. When the valve body film 23 receives a pressure from the pressure chamber 226, it is downward. During the stress, as shown in the seventh figure (c), the inlet valve structure 231 is entirely flatly attached to the valve body seat 21, and the inlet valve piece 2313 abuts against the protruding portion of the sealing ring 26 on the groove 216. And sealing the valve body seat The opening 213 on the 21, and the hollow hole 2312 and the extending portion 2311 of the outer periphery thereof are floated on the valve body seat 21, so that the closing of the inlet valve structure 231 acts to prevent the fluid from flowing out. When the valve body film 23 is subjected to the suction of the pressure chamber 226 to generate 12 200909684, the seal ring 26 disposed in the groove 216 of the valve body seat 21 has provided the inlet valve structure 231 - Preforce Therefore, the inlet valve piece 2313 can generate a larger pre-covering effect by the support of the extension portion 2311 to prevent backflow, and the inlet valve structure 231 is displaced upward due to the negative pressure of the pressure chamber 226 (eg, 6 (b)), at this time, the fluid can flow from the valve body seat 21 to the inlet temporary storage chamber 223 of the valve body cover 22 via the hollow hole 2312, and through the inlet temporary storage chamber 223 and the inlet valve passage The 221 is transferred into the pressure chamber 226, so that the inlet valve structure 231 can be quickly opened or closed in response to the positive and negative pressure difference generated by the pressure chamber 226 to control the ingress and egress of fluid and prevent the fluid from flowing back to the valve. On the body seat 21. Similarly, the other valve structure on the same valve body film 23 is the outlet valve structure 232, wherein the outlet valve piece 2323, the extension portion 2321, and the hole 2322 are operated in the same manner as the inlet valve structure 231, and thus will not be described again. However, the sealing ring 26 around the outlet valve structure 232 is disposed in a direction opposite to the sealing ring 27 of the inlet valve structure 231, as shown in the sixth diagram (4), and thus is disposed when the pressure chamber 226 is compressed to generate a thrust. The seal ring 27 in the recess 225 of the valve body cover 22 will provide an outlet valve structure 232 - Preforce, such that the outlet valve piece 2323 can be brought up by the extension 2321 to create a greater pre-tightening effect. In order to prevent backflow, when the outlet valve structure 232 is displaced downward due to the positive pressure of the pressure chamber 226, at this time, the fluid can flow from the pressure chamber 226 through the valve body cover 22 to the valve via the hollow hole 2322. The outlet of the body seat 21 is temporarily stored in the cavity 215 and can be discharged through the opening 214 and the outlet flow path 212. Thus, 13 200909684, the fluid can be self-pressure chamber 226 via the mechanism of the opening of the outlet valve structure 232. The inside is vented to achieve the function of fluid transport. Please refer to the seventh diagram (a), which is a schematic view of the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. In this embodiment, all the groove structures 216, 217, 218 are respectively provided with a sealing ring 26, and A sealing ring 27 is also disposed in the grooves 224, 225, and 229, and is made of a rubber material which is excellent in chemical resistance, and is not limited thereto. The groove is disposed on the valve body seat 21 around the opening 213 of the f. The sealing ring in 216 can be a ring structure having a thickness \ greater than the depth of the groove 216, such that the sealing ring 26 disposed in the groove 216 protrudes from the upper surface 210 of the valve body seat 21 to form a micro convex. The structure, such that the inlet valve piece 2313 of the inlet valve structure 231 of the valve body film 23 disposed on the valve body seat 21 forms an upward bulge due to the micro-convex structure of the seal ring 26, and the rest of the valve body film 23 The top of the valve body 22 abuts against the valve body cover 22, so that the micro-convex structure pushes the inlet valve 231 to generate a pre-force effect, which helps to create a larger pre-covering effect to prevent backflow and due to the seal. The micro-convex structure of the ring 26 is raised upwards The inlet valve structure 231 of the body membrane 23 is such that the inlet valve structure 231 has a gap between the inlet valve piece 2313 and the upper surface 210 of the valve body seat 21 when not in operation, and similarly, when the sealing ring 27 is disposed around When the outlet valve passage 222 is in the recess 225, since the seal ring 27 is disposed on the lower surface 228 of the valve body cover 22, the seal ring 27 is such that the valve body is thin and the outlet valve structure of the membrane 23 is convex downward. A micro-convex structure is formed which is bulged downwardly from the valve body. The micro-convex structure is disposed only in the opposite direction to the micro-convex structure formed in the inlet valve structure 231, but the functions are the same as those described in 14 200909684 And therefore will not repeat them. The remaining seal rings 26, 27 and 28 respectively disposed in the groove structures n 217, 218 and 224, 229 and 227 are mainly used to respectively form the valve body seat 21 and the valve body film 23, the valve body film 23 and the valve body. When the lid body 22 and the valve body cover 22 are in close contact with the actuating device 24, fluid leakage is prevented. Of course, the above-mentioned micro-convex structure is formed by using a groove and a sealing ring. In some embodiments, the micro/convex structure of the valve body seat 21 and the valve body cover 22 may also be a semiconductor process, for example, yellow light. Etching or coating or electroforming techniques are formed directly on the valve body seat 21 and the valve body cover 22. Please also refer to the seventh figure (a), (b), (c), as shown, when the cover body 25, the actuating device 24, the valve body cover 22, the valve body film 23, the sealing ring 26 and the valve body After the seats 21 are assembled to each other, the opening 213 of the valve body seat 21 corresponds to the inlet valve structure 231 on the interlayer film 23 and the inlet valve passage 221 on the wide body cover 22, and the valve body seat 21 is The opening 214 corresponds to the outlet valve piece 232 on the valve body membrane 23 and the outlet valve passage 222 on the valve body cover 22Q, and since the seal ring 26 is disposed in the recess 216, the inlet of the valve body membrane 23 is formed. The valve structure 231 is slightly raised above the valve body seat 21, and a pre-force is generated by the seal ring 26 located in the groove 216 contacting the valve body film 23, so that the inlet valve structure 231 is not When actuating, a gap is formed with the upper surface 210 of the valve body seat 21. Similarly, the outlet valve structure 232 is also disposed under the valve body cover 22 by the same manner as the sealing ring 27 is disposed in the recess 225. Surface 228 forms a gap. When actuator 242 is driven at a voltage, actuation device 24 produces 15 2009096 84 Bending deformation, as shown in the seventh diagram (b), the actuating device 24 is bent upwardly in the direction indicated by the arrow a, so that the volume of the pressure chamber 226 is increased, thereby generating a suction force to cause the valve body film 23 The inlet valve structure 231 and the outlet valve structure 232 are subjected to an upward pulling force, and the inlet valve piece 2313 of the inlet valve structure 231 having a pre-force (Preforce) is quickly opened (as shown in FIG. 6(b)). The liquid can be sucked in a large amount from the inlet passage 211 on the valve body seat 21, and flows through the opening 213 on the valve body seat 21, the hole 2312 of the inlet valve structure 231 on the valve body film 23, and the valve body cover. The inlet temporary chamber 223 and the inlet valve passage 221 in the 22 flow into the pressure chamber 226. At this time, since the inlet valve structure 231 of the valve body film 23 and the outlet valve structure 232 are subjected to the upward pulling force, the other end is located at the other end. The outlet valve structure 232 is such that the upward pulling force causes the outlet valve piece 2323 on the valve body film 23 to seal the outlet valve passage 222, so that the outlet valve structure 232 is closed, and thus the fluid flows backward. When the actuator device 24 is in the direction of the electric field As shown in the seventh figure (c), when the arrow b is bent downward, the volume of the pressure chamber 226 is compressed, so that the pressure chamber 226 generates a thrust to the internal fluid and causes the valve The inlet valve structure 231 of the body film 23 and the outlet valve structure 232 are subjected to a downward thrust. At this time, the outlet valve piece 2323 of the outlet valve structure 232 disposed on the seal ring 27 in the groove 225 can be quickly opened (as shown in the sixth figure). (c) shown) and allows the liquid to be vented instantaneously, from the pressure chamber 226 via the outlet valve passage 222 on the valve body cover 22, the outlet wide door on the valve body membrane 23 - the opening 2322 of the structure 232 The outlet temporary chamber 215, the opening 214 and the outlet passage 212 on the body seat 21 flow out of the fluid delivery device 20, 16 200909684 thus completing the fluid transfer process, and likewise, since the inlet valve structure 231 is subjected to the downward movement The thrust, thereby causing the inlet valve piece 2313 to seal the opening 213, thereby closing the inlet valve structure 231 so that the fluid does not flow backwards, and is disposed in the valve body seat 21 by the inlet valve structure 231 and the outlet valve structure 232 The design of the seal rings 26, 27 in the recesses 216, 225 of the valve body cover 22 allows fluid to be recirculated during transport to achieve efficient transmission. In addition, in the embodiment, the material of the valve body seat 21 and the valve body cover 22 can be made of a thermoplastic plastic material, such as polycarbonate (Polycarbonate PC), Polysulfone (PSF), ABS resin ( Acrylonitrile Butadiene Styrene), LLDPE, LDPE, HDPE, Polypropylene (PPS), PPS Polystyrene (SPS), polyphenylene oxide (PPO), polyacetal (POM), polybutylene terephthalate (pbt), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene A thermoplastic plastic material such as an ethylene copolymer (ETFE) or a cyclic olefin polymer (COC), but not limited thereto, and in the present embodiment, the depth of the pressure chamber 226 is between 100/zm and 3〇〇. Between m and m, the diameter is between 1 (Γ 30 mm' and is not limited thereto. In the present embodiment, the gap distance between the distal valve body film 23 and the valve body seat 21 and the valve body cover 22 It can be 1 〇#m to 790 // m, and the best is '180" m to 300/zm, and in some embodiments, the actuation device 24 - The separation distance between the film 241 and the valve body body 22, that is, the gap, may be 10/zm to 790//m, preferably 丄(8)"m to the claw. 17 200909684 • The valve body film 23 can be processed conventionally. Or yellow light money engraving or laser processing or electroforming processing or electric discharge machining, etc., the material of which can be any organic polymer material or metal with good chemical resistance. When the valve body film 23 is made of the polymer material, its elasticity The coefficient is 2~20 Gpa, for example, Polyimide (PI), the elastic coefficient, that is, the Young's modulus (E value) can be 10 GPa, when the valve body film 23 is made of a metal material, such as aluminum, aluminum alloy, Recording, town alloy, copper, copper alloy or non-mineral steel • Metal material, its Young series (number is 2~24〇GPa, if the metal material is aluminum metal, its modulus of elasticity is 70GPa' or nickel metal The modulus of elasticity is 210GPa, or stainless steel metal, and the modulus of elasticity is 240GPa, etc., and is not limited thereto. The thickness of the valve body film 23 can range from 10/zm to 50/zm, and the optimum is 21 V. m to 40 β m. The following is the case where the valve body film 23 is made of a different material. When the material of the valve body film 23 is polypyridamine (pιlyimide, ρι), the manufacturing method is mainly by reactive ion etching (RIE) method to sensitize. The photoresist is coated on the valve structure' and exposed to develop the valve structure pattern, and then the remaining time, because of the photoresist, the polyamine (p〇lyimide, ρι) will be protected; It is etched so that the valve structure on the valve body film 23 can be etched. If the material of the valve body film 23 is a non-recorded metal, the door structure can be made by yellow-light, engraving, laser processing and machining, and the valve structure on the non-town steel sheet is obtained by means of Huang Guangqian. The photoresist pattern, re-dip, and wrapped in FeC13 plus HCH liquid for wet, similar to the above method, there are 18 200909684 photoresist cover will protect the stainless steel sheet from being etched, thus etching the valve body « film 23 Valve structure. And if the material of the valve body film 23 is metallic nickel, the photoresist pattern of the valve structure on the stainless steel substrate is obtained by the method of electroforming, and the yellow light etching method is used, and then nickel electroforming is performed. The photoresist cover is not electroformed. When the electroformed nickel metal reaches a certain thickness and is detached from the stainless steel substrate, the valve body film 23 having the valve structures 231 and 232 can be obtained. In addition to the above-described manufacturing method, all materials applied to the valve body film 23 can be processed by precision punching, or by conventional machining, laser processing or electroforming or electric discharge machining. The valve structure above it, but not limited to this. The actuator 242 in the actuating device 24 is a piezoelectric plate, and can be fabricated by using a piezoelectric powder of a high-voltage electric coefficient lead zirconate titanate (PZT) series, wherein the thickness of the actuator 242 can be Between 100#m and 500/zm, the thickness is preferably 150#m to 250//m, and the Young's coefficient is 100 to 150GPa, and is not limited thereto. The vibrating film 241 attached to the actuator 242 has a thickness of 10/zm to 300 #m, preferably 100#m to 250/zm, and the material thereof can be composed of a single layer of metal, such as a non-recorded metal. , the Young's coefficient is 240Gpa, the thickness is between 140/zm and 160//m, such as copper, and the Young's coefficient is lOOGpa 'thickness is between 190# m and 210# m, and not - For the limit, or the material thereof may be a double-layer structure formed by attaching a layer of a biochemical resistant polymer sheet to the metal material. 19 200909684 • In some embodiments, to accommodate the need for high flow fluid transport, the operating frequency can be applied to the actuator 242 of the actuator 24 at an operating frequency of 10-50 Hz, in conjunction with the following conditions: The stiffness characteristic of about 1 〇〇# m to 500 // m is preferably 150 # m to 250 # m, and the Young's modulus is about 100-150 Gpa. And the vibrating film 241 has a thickness of 10/ζι to 300/zm, preferably a thickness of 100V m to 250# m, and a Young's modulus of 60-300 GPa, and the material may be composed of a single layer of metal, such as stainless steel. Metal, its Young's coefficient is 240Gpa 'thickness is between 140 " m to 160 / / m, for example, copper 'its Young's coefficient is l〇〇Gpa, thickness is between I90^m to 210 // m ' And not limited thereto, or the material thereof may be a double-layer structure formed by attaching a layer of biochemical polymer sheet to the metal material. The depth of the pressure chamber 226 is between i〇〇#m to 300#m Between the diameters of 1 (T 30mm. ί / and, the thickness of the valve structure 231, 232 on the valve body film 23 is 10 / zm to 50 " 111' Young's coefficient is 2 ~ 24 〇 Gpa, can be Any organic polymer material or metal having good chemical resistance, the valve body film 23 is made of the polymer material, and its modulus of elasticity is r 20 Gpa, for example, polypyramine (PI) 'the elastic coefficient' is Yang. The coefficient (E value) can be lOGpa, and the valve body film 23 is made of a metal material, such as Shao, Shao alloy, recorded, recorded alloy, - copper, copper Gold or stainless (four) metal materials' Young's coefficient is 2 24GGPa, |g metal elastic modulus is 7QGpa, or nickel metal elastic coefficient is 21〇GPa, or stainless steel metal elastic coefficient is 24〇Gpa and, 20 200909684 The gap distance between the valve body film 23 and the valve body seat 21 and the valve body cover 22 may be 10 // m to 790 /zm, and most preferably 180/zm to 300 // m. 242, the vibration film 241, the pressure chamber 226 and the valve body film 23 and other related parameter conditions, can drive the inlet valve structure 231 of the valve body film 23 and the outlet valve structure 232 to open and close, to drive the fluid to flow in one direction, And the fluid flowing through the pressure chamber 226 can reach a large flow output of more than 5 cc per minute. In summary, the fluid transfer device 20 of the present invention can be driven by the actuating device 24, and the valve body film 23 and the upper body thereof The formed inlet valve structure 231 can cooperate with a soft seal ring 26 disposed in the recess 216 of the valve body seat 21 to open the inlet valve structure 231 to deliver fluid to the pressure chamber 226, and then change the pressure chamber by the actuator 24. The volume of chamber 226, thus making The port door structure 232 is opened with a soft sealing ring 27 disposed in the recess 225 of the valve body cover 22 to allow fluid to be delivered outside the pressure chamber 226 due to the volumetric expansion and contraction of the force chamber 226. In a moment, a large fluid suction and thrust can be generated, and the valve structure on the valve body film 23 cooperates with the rapid opening and closing reaction, so that the fluid can be transported to a large flow rate and effectively block the reverse flow of the fluid. Please refer to the eighth figure and the third figure, wherein the eighth figure is a manufacturing flow chart of the fluid conveying device of the second preferred embodiment of the present invention, firstly forming a valve body layer, that is, the valve body as shown in the third figure. The seat 21 (shown in step S81), and thereafter, a valve body cover layer is formed. In the embodiment, the valve body cover layer is the valve body cover body 22 shown in the third figure, and has a valve body cover body The pressure chamber 226 (as shown in step S82), and then the valve body seat 21 and the valve body cover 22 21 200909684 • the upper blade is opened into a rear convex structure (as shown in step S83), the micro convex structure There are two ways to form the method, and the method is not limited thereto. 1. Please refer to the third figure and the embodiment of the present case, which needs to be separated from the valve body seat 21 and the valve body cover 22 to >, marriage groove, as shown in the figure, the valve body seat 21 has a groove 216 ' and a sealing ring 26 is provided in the groove 216 (as shown in the seventh figure (4)) 'because it is disposed in the concave The sealing ring 26 in the groove 216 is partially protruded from the upper surface 210 of the body seat 21, and thus can be formed on the upper surface 210 of the valve body seat 21 (forming a micro convex structure, likewise, the groove 2 25 and the sealing ring 20 can also form a micro-convex structure on the lower surface 228 of the valve body cover 22 in the above manner (as shown in FIG. 5(b)); second, a semiconductor process such as yellow etching or Coating or electroforming technology, but not limited thereto, forms a micro-convex structure directly on the valve body seat 21 and the valve body cover 22. Next, 'a flexible film is formed, which has at least one valve piece structure, ie The valve body film 23 of the present invention and the inlet valve structure 231 and the outlet valve structure 232 (shown in step S84) are followed by the formation of a diaphragm actuating film ‘the diaphragm 241 of the present invention (step S85). And the actuator 242 is formed (as shown in step S86), after which the actuator 242 is attached and positioned over the diaphragm 241 to assemble the actuator 24' and the actuator 242 and The pressure chamber 226 is correspondingly disposed (as shown in step S87), and after the step S87, the valve body film 23 is disposed between the valve body seat 21 and the valve body cover 22, and the valve body seat 21 and the valve body film are provided. 23 and the valve body cover 22 are disposed corresponding to each other (as shown in step S88). - Finally, the actuator device 24 is correspondingly disposed on the valve body cover 22, and the wide body film 23 closes the pressure chamber 226 of the valve body cover 22 to form a first-class 22 200909684 body conveying device (as in step S89). In summary, the manufacturing method of the fluid conveying device of the present invention mainly forms a valve body layer, a valve body cover layer, a flexible film, an actuating film and an actuating piece, and the flexible film is correspondingly disposed on Between the valve body layer and the valve body cover layer, and the actuating film and the actuating piece are correspondingly fitted to each other, and the actuating film is deformed by the action of the actuating piece to be interposed between the actuating film and the valve body cover layer. The volume of the pressure chamber is changed to produce a positive and negative pressure difference. Since the fluid transport device formed by the manufacturing method of the present invention can transport gas and fluid, not only has excellent flow rate and output pressure, but also self-capture liquid in the initial state. It has high precision controllability, and because it can transport gas, it can eliminate bubbles in the fluid transport process to achieve high efficiency transmission. Therefore, the manufacturing method of the fluid conveying device of the present invention is extremely industrially worthy, and the application is filed according to law. This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application. 23 200909684 [Simple description of the diagram] The first diagram (a) · · is a schematic diagram of the structure of the conventional micro-pull structure when it is not actuated. First figure (b): It is a schematic diagram of the structure of the first figure (a) at the time of actuation. Second figure: It is a top view of the micro-push structure shown in the first figure (a). Third Fig.: It is not intended to be the structure of the fluid delivery device of the first preferred embodiment of the present invention. Figure 4: It is a schematic view of the side structure of the valve body seat shown in the third figure. Fig. 5(a): Fig. 3 is a schematic view showing the structure of the back surface of the valve body cover shown in Fig. 3. Figure 5 (b): This is a schematic cross-sectional view of the fifth diagram (a). Figure 6: It is a schematic diagram of the structure of the valve body film shown in the third figure. Figure 7 (a) is a schematic view showing the unactuated state of the fluid delivery device of the preferred embodiment of the present invention. Figure 7 (b): This is a schematic diagram of the pressure chamber expansion state of the seventh diagram (a). Figure 7 (c): This is a schematic diagram of the pressure chamber compression state of the seventh diagram (b). Figure 8 is a flow chart showing the manufacture of the fluid delivery device of the second preferred embodiment of the present invention. 24 200909684 [Main component symbol description] Micro-pull structure: 10 Substrate: 11 Compression chamber: 111 Interlayer membrane: 12 Inlet channel: 13 Transmission block: 14 Microactuator: 15 Outlet channel: 16 Inlet diffuser: 17 Outlet diffuser: 18 Flow direction: X, Y direction: a, b Fluid delivery device: 20 Fluid seat: 201 Body seat: 21 Body cover: 22 Body film: 23 Actuator: 24 Cover :25 Vibrating membrane: 241 Actuator: 242 Inlet runner: 191 ' 211 Outlet runner: 192, 212 Opening: 213, 214 Upper surface: 210, 220 Exit temporary chamber: 215 Lower surface: 228 Entrance temporary chamber : 223 inlet valve passage: 221 outlet valve passage: 222 groove: 216, 217, 218, 224, 225, 227, 229 pressure chamber: 226 seal ring: 26, 27, 28 inlet valve structure: 231 outlet valve structure: 232 inlet valve piece: 2313 outlet valve piece: 2323 extension: 2311, 2321 hole: 2312, 2322 S8 Bu S89: manufacturing process of fluid conveying device 25