CN101377196B

CN101377196B - Fluid valve base

Info

Publication number: CN101377196B
Application number: CN2007101472599A
Authority: CN
Inventors: 陈世昌; 郑江河; 余荣侯; 蔡志宏; 邱士哲
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2007-08-30
Filing date: 2007-08-30
Publication date: 2010-12-08
Anticipated expiration: 2027-08-30
Also published as: CN101377196A

Abstract

The present invention relates to a fluid valve seat, which comprises a valve body seat, a valve body cover, a valve body film and at least one temporary storage chamber; wherein, the valve body seat is provided with an inlet channel, an outlet channel and an inlet channel opening; the valve body cover, which is arranged on the valve body seat, is provided with an outlet channel opening; the valve body film produced by the traditional machining method, on which at least one valve switch is arranged, has a uniform thickness and is arranged between the valve body seat and the valve body cover; a plurality of holes are arranged on the periphery of each valve switch and round a sealed area, the area of which is larger than the areas of the inlet channel opening and the outlet channel opening; and the temporary storage chambers are arranged between the valve body film and the valve body cover and the valve body seat. When a pressure difference which exceeds a preset valve is generated between the fluid in the temporary storage chambers and the fluid in the outlet channel and the inlet channel, the fluid with higher pressure pushes the corresponding valve switch and flows out of or into the corresponding temporary storage chamber from the holes on the periphery of the valve switch.

Description

Fluid valve base

Technical field

The present invention relates to a kind of fluid valve base, relate in particular to a kind of fluid valve base that is applicable to fluid delivery system.

Background technique

In each field, no matter be industry such as medicine, computer technology, printing, the energy at present, product all develops towards sophistication and microminiaturization direction, wherein the fluid delivery structure that product comprised such as Micropump, sprayer, ink gun, industrial printing device are its key technology, be with, how the mat innovation structure is broken through its technical bottleneck, is the important content of development.

See also Fig. 1 a, its structural representation that is known micro-pump structure when start not, known micro-pump structure 10 comprises inlet channel 13, micro-actuator 15, drive block 14, interlayer film 12, pressing chamber 111, substrate 11 and outlet passage 16, wherein 12 definition of substrate 11 and interlayer film form a pressing chamber 111, be mainly used to storaging liquid, will make that the volume of pressing chamber 111 is changed because of the deformation influence of interlayer film 12.

When a voltage acts on the two poles of the earth up and down of micro-actuator 15, can produce an electric field, make micro-actuator 15 under this effect of electric field, produce crooked and move to interlayer film 12 and pressing chamber 111 directions, because micro-actuator 15 is arranged on the drive block 14, therefore drive block 14 can be passed to interlayer film 12 with the thrust that micro-actuator 15 is produced, make interlayer film 12 also and then be extruded distortion, promptly shown in Fig. 1 b, liquid can flow according to the direction of arrow X among the figure, make by the liquid that are stored in the pressing chamber 11 1 after inlet channel 13 inflows and be squeezed, and flow to other predefined spaces via outlet passage 16, to reach the purpose of supplying with fluid.

Please consult Fig. 2 again, it is the plan view of the micro-pump structure shown in Fig. 1 a, as shown in the figure, the throughput direction of fluid is shown in the direction of arrow of number in the figure Y when micro-pump structure 10 starts, inlet expands the cone structure that stream device 17 varies in size for both ends open, the end that opening is bigger is connected with entrance channel 191, and be connected with little pressing chamber 111 with the less end of opening, simultaneously, the expansion stream device 18 that connects pressing chamber 111 and outlet flow 192 expands stream device 17 with inlet and is provided with in the same way, it is connected in pressing chamber 111 with the bigger end of opening, and be connected with outlet flow 192 with the less end of opening, the inlet at pressing chamber 111 two ends expands stream device 17 and outlet expansion stream device 18 is equidirectional setting owing to be connected in, expand the different characteristic of stream device two direction flow resistances so can utilize, the harmomegathus that reaches pressing chamber 111 volumes makes fluid produce unidirectional net flow rate, flows in the device 17 inflow pressing chambers 111 so that fluid can expand via inlet from entrance channel 191, expands stream device 18 through outlet flow 192 outflows by exporting again.

The micro-pump structure 10 of this kind incorporeity valve is easy to generate a large amount of situations that reflux of fluid, and institute thinks and impel flow rate to increase that pressing chamber 111 needs bigger compression ratio, presses to produce enough chambeies, so need expend higher cost on actuator 15.

Therefore, how to develop a kind of fluid delivery system that improves above-mentioned known technology disappearance, real in pressing for the problem of solution at present.

Summary of the invention

The application's main purpose is to provide a kind of fluid valve base, it is applicable to fluid delivery system, mainly formed by valve block, valve body film, valve body cover, it is out of shape by actuator is subjected to voltage actuation, make pressure chamber change volume, and then open or close the inlet/outlet valve mechanism that forms on the same valve body film, cooperate soft seal ring again and be arranged at valve block or valve body cover on groove, and carry out the conveying of fluid, in the transport process of fluid, easily produce the phenomenon of fluid reflux in order to do the micro-pump structure that solves known technology.

For reaching above-mentioned purpose, the application than broad sense embodiment for a kind of fluid valve base is provided, it comprises: valve block, it has inlet channel, outlet passage and inlet channel hole; Valve body cover, it is arranged on the valve block, and has the outlet passage hole; Valve body film, it forms with the traditional mechanical manufacturing, and thickness is substantially the same, and be arranged between valve block and the valve body cover, valve body film has at least one threshold switch, the threshold switch periphery has a plurality of holes, then forms seal area around definition between hole, and the seal area area is greater than inlet channel hole area and outlet passage hole area; And at least one temporary room; Wherein, when the fluid of the fluid of temporary room and outlet passage or this inlet channel produces the pressure difference that surpasses predefined value, the fluid that pressure is bigger will promote corresponding threshold switch, and then from the hole of threshold switch periphery, flow out or flow into the temporary room of correspondence.

Description of drawings

The structural representation that Fig. 1 a is known micro-pump structure when start not.

Fig. 1 b is the structural representation of Fig. 1 a when start.

Fig. 2 is the plan view of the micro-pump structure shown in Fig. 1 a.

Fig. 3 is the structural representation of the fluid delivery system of the application's first preferred embodiment.

Fig. 4 is a valve block side structure schematic representation shown in Figure 3.

Fig. 5 a is the structure schematic representation of valve body cover shown in Figure 3.

Fig. 5 b is the cross-sectional view of Fig. 5 a.

Fig. 6 is a valve body film structural representation shown in Figure 3.

Fig. 7 a is the not actuator state schematic representation of the fluid delivery system of the application's preferred embodiment.

Fig. 7 b is pressure chamber's swelling state schematic representation of Fig. 7 a.

Fig. 7 c is pressure chamber's compressive state schematic representation of Fig. 7 b.

Fig. 8 is the manufacturing flow chart of the fluid delivery system of the application's second preferred embodiment.

The primary component symbol description:

Micro-pump structure: 10 substrates: 11

Pressing chamber: 111 interlayer films: 12

Inlet channel: 13 drive blocks: 14

Micro-actuator: 15 outlet passages: 16

Inlet expands the stream device: the stream device is expanded in 17 outlets: 17

Flow direction: X, Y direction: a, b

Fluid delivery system: 20 fluid valve bases: 201

Valve block: 21 valve body cover: 22

Valve body film: 23 actuators: 24

Lid: 25 vibration films: 241

Braking plate: 242 entrance channels: 191,211

Outlet flow: 192,212 openings: 213,214

Upper surface: 210,220 outlet temporary storage cavity: 215

Lower surface: 228 inlet temporary storage cavity: 223

Inlet valve passage: 221 outlet valve passages: 222

Groove: 216,217,218,224,225,227,229

Pressure chamber: 226 seal rings: 26,27,28

Inlet valve structure: 231 outlet valve structures: 232

Inlet valve block: 2313 outlet valve blocks: 2323

Extension part: 2311,2321 holes: 2312,2322

S81-S89: the manufacturing process of fluid delivery system

Embodiment

Some exemplary embodiments that embody feature of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and the accompanying drawing usefulness that should explain in itself, but not in order to restriction the present invention.

See also Fig. 3, it is the structural representation of the fluid delivery system of the application's first preferred embodiment, as shown in the figure, the application's fluid delivery system 20 is given birth to skill applicable to medicine, computer technology, industry such as the printing or the energy, but and conveying gas or liquid, but not as limit, fluid delivery system 20 is mainly by valve block 21, valve body cover 22, valve body film 23, a plurality of temporary rooms, actuator 24 and lid 25 are formed, wherein valve block 21, valve body cover 22, valve body film 23 forms a fluid valve seat 201, and between valve body cover 22 and actuator 24, form a pressure chamber 226, be mainly used to store fluid.

The assembling mode of this fluid delivery system 20 is arranged at valve body film 23 between valve block 21 and the valve body cover 22, and make valve body film 23 and valve block 21 and valve body cover 22 corresponding settings, and between valve body film 23 and valve body cover 22, form one first temporary room, and between valve body film 23 and valve block 21, form one second temporary room, and the opposite position on valve body cover 22 more is provided with actuator 24, actuator 24 is assembled by a vibration film 241 and an actuator 242, start in order to driving fluid feedway 20, at last, again lid 25 is arranged at the top of actuator 24, so it is in regular turn with valve block 21, valve body film 23, valve body cover 22, actuator 24 and lid 25 be corresponding to stack setting, to finish the assembling of fluid delivery system 20.

Wherein, valve block 21 and valve body cover 22 are the main structure of direct fluid turnover in the application's fluid delivery system 20, see also Fig. 4 and cooperate Fig. 3, wherein Fig. 4 is the side structure schematic representation of valve block shown in Figure 3, as shown in the figure, valve block 21 has an entrance channel 211 and an outlet flow 212, fluid can be imported by the external world, be sent to an opening 213 of valve block 21 upper surfaces 210 via entrance channel 211, and, in the present embodiment, formed second temporary room is the outlet temporary storage cavity 215 shown in the figure between valve body film 23 and the valve block 21, but not as limit, it, and is connected with outlet flow 212 in producing the part depression with outlet flow 212 corresponding positions and form by the upper surface 210 of valve block 21, and this outlet temporary storage cavity 215 is in order to temporary transient store fluid, and make this fluid be delivered to outlet passage 212 via an opening 214 by outlet temporary storage cavity 215, flow out again outside the valve block 21.And, on valve block 21, have more a plurality of groove structures, use for a seal ring 26 (shown in Fig. 7 a) to be provided with thereon, in present embodiment, valve block 21 has the groove 216,218 around opening 213 peripheries, and is surrounded on the groove 217 of outlet temporary storage cavity 215 peripheries.

See also Fig. 5 a and cooperate Fig. 3, wherein Fig. 5 a is the structure schematic representation of valve body cover shown in Figure 3, as shown in the figure, valve body cage 22 has a upper surface 220 and a lower surface 228, and on valve body cage 22, also have and run through inlet valve passage 221 and the outlet valve passage 222 of upper surface 220 to lower surface 228, and this inlet valve passage 221 is arranged at the opening 213 corresponding positions with valve block 21, outlet valve passage 222 then is arranged at the opening 214 corresponding positions in the outlet temporary storage cavity 215 with valve block 21, and, in present embodiment, formed first temporary room is the inlet temporary storage cavity 223 shown in the figure between valve body film 23 and the valve body cover 22, and not as limit, in producing partly depression with inlet valve passage 221 corresponding positions and form, and it is communicated in inlet valve passage 221 by the lower surface 228 of valve body cover 22 for it.

See also Fig. 5 b, it is the cross-sectional view of Fig. 5 a, as shown in the figure, the upper surface 220 of valve body cover 22 is depression partly, to form a pressure chamber 226, itself and the actuator 242 corresponding settings of actuator 24, pressure chamber 226 is communicated in inlet temporary storage cavity 223 via inlet valve passage 221, and be connected with outlet valve passage 222 simultaneously, therefore, when actuator 242 is subjected to voltage actuation actuator 24 epireliefs are out of shape, the volumetric expansion of build-up of pressure chamber 226 and produce Negative Pressure Difference, can make fluid in inlet valve passage 221 flow to pressure chamber 226, thereafter, after the direction of an electric field that puts on actuator 242 changes, actuator 242 will make actuator 24 concave deformation pressure chamber 226 shrink and volume reduces, make pressure chamber 226 and the extraneous positive pressure difference that produces, impel fluid by outside the outlet valve passage 222 outflow pressure chambers 226, in this simultaneously, there is segment fluid flow can flow in inlet valve passage 221 and the inlet temporary room 223 equally, yet because the inlet valve structure 231 (shown in Fig. 6 c) of this moment is for making the pressurized closing state, so this fluid can not produce the phenomenon that flows backwards by inlet valve block 231, as for the fluid that temporarily is stored in the inlet temporary storage cavity 223, then be subjected to voltage actuation again in actuator 242, repeat to make actuator 24 again when epirelief distortion and boost pressure chamber 226 volumes, again by inlet temporary storage cavity 223 through and in the feed pressure chamber 226, to carry out the conveying of fluid to inlet valve passage 221.

In addition, have a plurality of groove structures on the valve body cover 22 equally, with the present embodiment is example, upper surface 220 at valve body cage 22 has the groove 227 that is provided with around pressure chamber 226, on lower surface 228, then have around the groove 224 that is arranged at inlet temporary storage cavity 223, around groove 225 that is arranged at outlet valve passage 222 and groove 229, similarly, above-mentioned groove structure is used for a seal ring 27 (shown in Fig. 7 a) and is arranged at wherein.

See also Fig. 6 a and cooperate Fig. 3, wherein Fig. 6 a is the structural representation of valve body film shown in Figure 3, as shown in the figure, valve body film 23 is mainly processed with tradition, or gold-tinted etching, or laser beam machining, or electroforming processing, or mode such as electro discharge machining is made, and be the substantially the same flake structure of a thickness, have a plurality of hollow out threshold switchs on it, comprise first threshold switch and second threshold switch, in present embodiment, first threshold switch is an inlet valve structure 231, and second threshold switch is an outlet valve structure 232, wherein, inlet valve structure 231 has inlet valve block 2313 and a plurality of cut-out openings 2312 that is provided with around inlet valve block 2313 peripheries, in addition, between hole 2312, have more the extension part 2311 that is connected with inlet valve block 2313, bearing one when valve body film 23 transmits and when coming downward stress from pressure chamber 226, shown in Fig. 7 c, inlet valve structure 231 is whole smooth on valve block 21 downwards, entering the mouth valve block 2313 this moment can be near groove 216 upper sealing rings 26 projection, and seal up opening 213 on the

valve block

21, and 2311 of its peripheral cut-out openings 2312 and extension parts are taken advantage of a situation to float and are affixed on the valve block 21, so therefore the closing function of inlet valve structure 231 can't flow out fluid.

And under valve body film 23 is under pressure the suction that chamber 226 volumes increase and produce, owing to be arranged at seal rings 26 in the groove 216 of the valve block 21 valve mechanism 231 1 pre-power (Preforce) that provided access, thereby inlet valve block 2313 can produce the bigger tight effect of pre-lid by the support of extension part 2311, in case non-return stream, when making inlet valve structure 231, the negative pressure because of pressure chamber 226 up produces displacement (shown in Fig. 6 b), at this moment, fluid then can be flow to the inlet temporary storage cavity 223 of valve body cover 22 via the hole 2312 of hollow out by valve block 21, and be sent in the pressure chamber 226 via inlet temporary storage cavity 223 and inlet valve passage 221, thus, inlet valve structure 231 can be opened rapidly or close in response to the positive/negative pressure difference of pressure chamber's 226 generations, with the turnover of control fluid, and fluid can be back on the valve block 21.

Similarly, another valve mechanism that is positioned on the same valve body film 23 then is outlet valve structure 232, outlet valve block 2323 wherein, extension part 2321 and hole 2322 to make flowing mode all identical with inlet valve structure 231, thereby repeat no more, the seal ring 27 that the seal ring 26 of thought outlet valve structure 232 peripheries is provided with direction and inlet valve structure 231 oppositely is provided with, shown in Fig. 6 c, thereby when producing a thrust when pressure chamber 226 compression, the groove 225 interior seal rings 27 that are arranged at valve body cover 22 will provide the outlet valve mechanism 232 1 pre-power (Preforce), make outlet valve block 2323 to produce the bigger tight effect of pre-lid by the support of extension part 2321, in case non-return stream, when making outlet valve mechanism 232, the malleation because of pressure chamber 226 down produces displacement, at this moment, fluid then can be flow in the outlet temporary storage cavity 215 of valve block 21 through valve body cover 22 by pressure chamber 226 via the hole 2322 of hollow out, and can discharge via opening 214 and outlet flow 212, thus, then can be via the mechanism of outlet valve structure 232 unlatchings, fluid is released in pressure chamber 226, to reach the function of FLUID TRANSPORTATION.

See also Fig. 7 a, it is the not actuator state schematic representation of the fluid delivery system of the application's preferred embodiment, in present embodiment, all groove structures 216,217,218 are provided with seal ring 26 respectively, and groove 224,225, seal ring 27 also is set respectively in 229, but its material is the good rubber material of endurance, and not as limit, wherein, be arranged on the valve block 21 and can be a circle structure around the seal ring in the groove 216 of opening 213, its thickness system is greater than groove 216 degree of depth, make and be arranged at upper surface 210 formations one micro-convex structure that groove 216 interior seal ring 26 parts protrude from valve block 21, thereby the inlet valve block 2313 of the inlet valve structure 231 that is arranged at the valve body film 23 on the valve block 21 of make fitting forms a protuberance upwards because of the micro-convex structure of seal ring 26, and the remaining part of valve body film 23 is replaced mutually with valve body cover 22, so micro-convex structure produces a pre-power (Preforce) effect to inlet valve 231 pushing tows, help to produce the bigger tight effect of pre-lid, in case non-return stream, and because the micro-convex structure that seal ring 26 upwards swells is positioned at inlet valve structure 231 places of valve body film 23, so being made between the upper surface 210 of inlet valve block 2313 and valve block 21, inlet valve structure 231 has a gap when start not, similarly, in the time of in seal ring 27 is arranged at around the groove 225 of outlet valve passage 222, because its seal ring 27 is arranged at the lower surface 228 of valve body cover 22, thereby sealing ring 27 protrudes downwards the outlet valve structure of valve body film 23 and forms one and swell downwards in the micro-convex structure of valve body cover 22, this micro-convex structure only its direction is oppositely setting with the micro-convex structure that is formed at inlet valve structure 231, yet its function all as hereinbefore, thereby repeat no more.Be arranged at groove structure 217,218 and 224,229 and 227

interior seal rings

26,27 and 28 respectively as for all the other, be mainly used to make respectively when fitting tightly between valve block 21 and valve body film 23, valve body film 23 and valve body cover 22 and valve body cover 22 and the actuator 24, prevent that fluid from leaking.

Certainly, above-mentioned micro-convex structure is except using groove and seal ring to arrange in pairs or groups to form, in some embodiments, the micro-convex structure of valve block 21 and valve body cover 22 also can adopt manufacture of semiconductor, for example: gold-tinted etching or plated film or galvanoplastics directly form on valve block 21 and valve body cover 22.

Please consult Fig. 7 a simultaneously, 7b, 7c, as shown in the figure, when lid 25, actuator 24, valve body cover 22, valve body film 23, seal ring 26 and valve block 21 correspond to each other the assembling be provided with after, opening 213 on the valve block 21 is corresponding with inlet valve structure 231 and the inlet valve passage 221 on the valve body cover 22 on the

valve body film

23, and 214 of the openings on the valve block 21 are corresponding with outlet valve block 232 and the outlet valve passage 222 on the valve body cover 22 on the valve body film 23, and, because seal ring 26 is arranged in the groove 216, make inlet valve structure 231 dimplings of valve body film 23 arise from valve block 21 on, and ((Preforce) acts on to produce a pre-power by the seal ring 26 that is positioned at groove 216 contacts valve body film 23, make inlet valve structure 231 when start not, then form a gap with the upper surface 210 of valve block 21, similarly, outlet valve structure 232 also forms a gap by the lower surface of seal ring 27 being established as for same way as in the groove 225 and valve body cover 22 228.

When with a voltage drive actuator 242, actuator 24 produces bending deflection, shown in Fig. 7 b, actuator 24 is bent upwards distortion towards the direction of arrow a indication, make the volume of pressure chamber 226 increase, thereby produce a suction, make the inlet valve structure 231 of valve body film 23, outlet valve structure 232 is born a pulling force that makes progress, and make the inlet valve block 2313 of the inlet valve structure 231 that has a pre-power (Preforce) open (shown in Fig. 6 b) rapidly, make liquid in large quantities the inlet channel on valve block 21 211 drawn, and the opening 213 on the valve block 21 of flowing through, the hole 2312 of the inlet valve structure 231 on the valve body film 23, inlet temporary storage cavity 223 on the valve body cover 22, in inlet valve block passage 221 and the feed pressure chamber 226, at this moment, because the inlet valve structure 231 of valve body film 23, outlet valve structure 232 is born this to upper pulling force, make the outlet valve block 2323 that be positioned at valve body film 23 on seal up outlet valve passage 222 because of this to upper pulling force so be positioned at the outlet valve structure 232 of the other end, and make outlet valve structure 232 close, thereby fluid countercurrent current.

When actuator 24 is bent downwardly distortion because of the arrow b of direction of an electric field change shown in Fig. 7 c, volume that then can compression pressure chamber 226, make the fluid of 226 pairs of inside of pressure chamber produce a thrust, and make the inlet valve structure 231 of valve body film 23, outlet valve structure 232 is born a downward thrust, at this moment, be arranged at the seal ring 27 upper outlet valve mechanisms 232 in the groove 225 outlet valve block 2323 its can open (shown in Fig. 6 c) rapidly, and liquid moment is led off in a large number, by pressure chamber 226 via the outlet valve passage 222 on the valve body cover 22, the hole 2322 of the outlet valve structure 232 on the valve body film 23, outlet temporary storage cavity 215 on the valve block 21, outside opening 214 and outlet passage 212 and the effluent fluid feedway 20, thereby finish the transmission course of fluid, similarly, this moment is because inlet valve structure 231 is born this downward thrust, thereby make inlet valve block 2313 seal up opening 213, thereby close inlet valve structure 231, make not adverse current of fluid, and, be equipped with groove 216 on valve block 21 and valve body cover 22 by inlet valve structure 231 and outlet valve structure 232, seal ring 26 in 225,27 design, can make fluid in transport process, can not produce the situation of backflow, reach high efficiency transmission.

In addition, in present embodiment, the material of valve block 21 and valve body cover 22 can adopt thermoplastic plastic's material, polycarbonate resin (Polycarbonate PC) for example, poly-(the Polysulfone that mocks, PSF), ABS resin (Acrylonitrile Butadiene Styrene), vertical property low density polyethylene (LLDPE), low density polyethylene (LDPE), high density polyethylene (HDPE) (HDPE), polypropylene (PP), polyphenylene sulfide (Polyphenylene Sulfide, PPS), syndiotatic polystyrene (SPS), PPO (PPO), polyoxymethylene (Polyacetal, POM), polybutyl terapthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), cyclic olefin polymer thermoplastic plastic's materials such as (COC), but not as limit, and in present embodiment, the degree of depth of pressure chamber 226 is between 100 μ m to 300 μ m, diameter is between 10-30mm, and not as limit.

In present embodiment, clearance distance between this valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m, and in some embodiments, the separation distance that the vibration film 241 of this actuator 24 and valve body cover are 22, be the gap, can be 10 μ m to 790 μ m, the preferably is 100 μ m to 300 μ m.

And valve body film 23 can tradition processing or gold-tinted etching or laser beam machining or modes such as electroforming processing or electro discharge machining make, its material can be good high-molecular organic material of any endurance or metal, when valve body film 23 adopts this macromolecular material, its elasticity coefficient is 2-20Gpa, pi (Polyimide for example, PI), its elasticity coefficient, be that young's modulus (E value) can be 10GPa, when valve body film 23 adopts metallic material, aluminium for example, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials, its young's modulus is 2-240GPa, if this metallic material is an aluminum metal, its elasticity coefficient is 70GPa, or the nickel metal, its elasticity coefficient is 210GPa, or stainless steel metal, its elasticity coefficient is 240GPa etc., and not as limit.Thickness as for valve body film 23 can be between 10 μ m to 50 μ m, and the best is 21 μ m to 40 μ m.

Made method proposes explanation when below using unlike material with regard to valve body film 23 respectively.

When the material of valve body film 23 is pi (Polyimide; PI) time; its manufacture method is mainly utilized reactive ion gas dry etching (reactive ion etching; RIE) method is coated on the valve mechanism with the photosensitivity photoresistance, and after exposure imaging goes out the valve mechanism pattern; again to carry out etching; (Polyimide, PI) sheet is not etched, thereby can etch the valve mechanism on the valve body film 23 owing to there is photoresistance covering place can protect pi.

If the material of valve body film 23 is a stainless steel metal; then can the gold-tinted etching, laser beam machining and machining etc. makes valve mechanism; wherein the etched mode of gold-tinted obtains the photoresistance pattern of the valve mechanism on stainless steel sheets; being soaked in FeCl3 again adds and carries out wet etching in the HCl solution; similar with preceding method; there is photoresistance covering place can protect stainless steel sheets not etched, thereby can etches the valve mechanism on the valve body film 23.

And, if the material of valve body film 23 is a metallic nickel, then utilize the method for electrotyping process, utilize the gold-tinted engraving method equally, obtain the photoresistance pattern of the valve mechanism on stainless steel substrate, carry out the nickel electroforming then, there is photoresistance covering place can electroforming, after the nickel metal of electroforming reaches certain thickness, it is broken away from from stainless steel substrate, then can obtain the valve body film 23 of tool valve mechanism 231,232.

In addition, except above-mentioned manufacture method, all materials that are applied to valve body film 23 are the processing method of available accurate punching all, or uses traditional mechanical processing mode, laser beam machining or modes such as electroforming processing or electro discharge machining and produce valve structure on it, but not as limit.

And, actuator 242 in the actuator 24 is a piezoelectric board, can adopt the piezoelectricity powder manufacturing of lead zirconate titanate (PZT) series of high tension electricity coefficient to form, wherein the thickness of actuator 242 can be between 100 μ m to 500 μ m, preferred thickness is 150 μ m to 250 μ m, young's modulus is 100 to 150GPa, and not as limit.

And the thickness that attaches the vibration film 241 of actuator 242 is 10 μ m to 300 μ m, preferred thickness is 100 μ m to 250 μ m, and its material can be a single-layer metal and constitutes, for example stainless steel metal, its young's modulus is 240Gpa, thickness is between 140 μ m to 160 μ m, copper for example, and its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m, and not as limit, or its material can be on the metallic material and to attach the double layer construction of the anti-biochemical macromolecule thin plate of one deck to constitute.

In some embodiments, in response to big flow fluid transmission requirements, can bestow operating frequency on the actuator 242 of actuator 24 is 10-50Hz, and cooperates following condition:

The thickness of actuator 242 is about the rigidity characteristics of 100 μ m to 500 μ m, and preferred thickness is 150 μ m to 250 μ m, and young's modulus is about 100-150Gpa.

And the thickness of vibration film 241 is between 10 μ m to the 300 μ m, preferred thickness is 100 μ m to 250 μ m, and young's modulus is 60-300GPa, and its material can be a single-layer metal and constitutes, stainless steel metal for example, its young's modulus is 240Gpa, and thickness is between 140 μ m to 160 μ m, for example copper, its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m, and not as limit, or its material can be and attaches the double layer construction of the anti-biochemical macromolecule thin plate of one deck to constitute on the metallic material.

The degree of depth of this pressure chamber 226 is between 100 μ m to 300 μ m, and diameter is between 10-30mm.

And, valve mechanism 231 on the valve body film 23,232 thickness is 10 μ m to 50 μ m, young's modulus is 2-240Gpa, can be good high-molecular organic material of any endurance or metal, this valve body film 23 adopts this macromolecular material, its elasticity coefficient is 2-20Gpa, pi (Polyimide for example, PI), its elasticity coefficient, be that young's modulus (E value) can be 10Gpa, this valve body film 23 adopts metallic material, aluminium for example, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials, its young's modulus are 2-240GPa, and the aluminum metal elasticity coefficient is 70GPa, or nickel metallic elastic coefficient is 210GPa, or the stainless steel metal elasticity coefficient be 240Gpa and, the clearance distance between valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m.

Arrange in pairs or groups by relevant parameter conditions such as above-mentioned actuator 242, vibration film 241, pressure chamber 226 and valve body film 23, then the inlet valve structure 231 of actuatable valve body thin film 23 and outlet valve structure 232 open and close effect, order about fluid and carry out one-way flow, and make the fluid of the pressure chamber 226 that flows through to reach the above big flow output of per minute 5cc.

In sum, the application's fluid conveying device 20 can be via the driving of actuator 24, and valve body film 23 and last integrally formed inlet valve structure 231 thereof can be equipped with the soft seal ring 26 in the groove 216 of valve block 21, make 231 unlatchings of inlet valve structure and deliver the fluid to pressure chamber 226, change the volume of pressure chamber 226 again because of actuator 24, thereby make outlet valve mechanism 232 be equipped with the soft seal ring 27 in the groove 225 on valve body cover 22 and open, so that FLUID TRANSPORTATION is to pressure chamber 226, because pressure chamber 226 can produce bigger fluid suction and thrust in the moment of volume harmomegathus, its reaction of folding rapidly of valve mechanism on the proportioning valve body thin film 23, feasible event can make fluid reach the transmission of big flow, and effectively stops the adverse current of fluid.

See also Fig. 8 and the Fig. 3 that arranges in pairs or groups, wherein Fig. 8 is the manufacturing flow chart of the fluid delivery system of the present invention's second preferred embodiment, at first need form a valve body layer, i.e. valve block 21 as shown in Figure 3 (shown in step S81), thereafter, form a valve body cover layer, in present embodiment, this valve body cover layer is valve body cover shown in Figure 3 22, and it has a pressure chamber 226 (shown in step S82), then, on valve block 21 and valve body cover 22, form a micro-convex structure (shown in step S83) respectively, the generation type of this micro-convex structure can have dual mode, and not as limit: one, please refer to Fig. 3 and the application's embodiment, need prior to forming at least one groove respectively on valve block 21 and the valve body cover 22, promptly has groove 216 on the valve block 21 as shown in FIG., and in a seal ring 26 (shown in Fig. 7 a) is set in the groove 216, owing to be arranged at the upper surface 210 that groove 216 interior seal rings 26 partly protrude from valve block 21, thereby can form a micro-convex structure in the upper surface 210 of valve block 21, similarly, groove 225 and seal ring 26 can also form a micro-convex structure (shown in Fig. 5 b) by aforesaid way on the lower surface 228 of valve body cover 22; Two, can adopt manufacture of semiconductor, for example: gold-tinted etching or plated film or galvanoplastics, but, directly on valve block 21 and valve body cover 22, form a micro-convex structure not as limit.

Then, form a flexible film, it has at least one valve structure, be valve body film 23 of the present invention and the inlet valve structure 231 that is had and outlet valve structure 232 (shown in step S84), then, form one again and activate film, be the application's vibration film 241 (shown in step S85), and form an actuator 242 (shown in step S86), afterwards, actuator 242 attachings are positioned on the vibration film 241, constitute one with assembling and activate device 24, and make actuator 242 and pressure chamber's 226 corresponding settings (shown in step S87), after step S87, valve body film 23 is arranged between valve block 21 and the valve body cover 22, and makes valve block 21, the setting (shown in step S88) that corresponds to each other of valve body film 23 and valve body cover 22, at last, actuator 24 correspondences are arranged on the valve body cover 22, and make the pressure chamber 226 of valve body film 23 closed valve lids 22, to form a fluid feedway (shown in step S89).

In sum, fluid valve base of the present invention is applicable to fluid delivery system, mainly by valve block, valve body film, valve body cover is formed, it is piezoelectric actuated by actuator, make the stereomutation of pressure chamber, and then open or close the inlet/outlet valve mechanism that forms on the same valve body film, cooperate soft seal ring and be arranged at valve block or valve body cover on groove, and carry out the conveying of fluid, but because fluid delivery system conveying gas of the present invention and fluid, splendid flow rate and delivery pressure are not only arranged, can have more High Accuracy Control in original state oneself draw liquid, but and because of its conveying gas, therefore more can get rid of bubble in fluid delivery process, to reach high efficiency transmission.Be with, the application's fluid valve base has the value of industry.

The application must be appointed by those skilled in the art and executes that the craftsman thinks and be to modify right neither taking off as Protector that attached claims are desired as all.

Claims

1. fluid valve base, it comprises:

One valve block has an inlet channel, an outlet passage and an inlet channel hole;

One valve body cover is arranged on this valve block, and has an outlet passage hole;

One valve body film, its thickness is substantially the same, and be arranged between this valve block and this valve body cover, this valve body film has at least one threshold switch, this threshold switch has valve block and centers on a plurality of holes of valve block periphery, then form a seal area around definition between this hole, sealing district area is greater than this inlet channel hole area and this outlet passage hole area; And

At least one temporary room, it is arranged between this valve body film and this valve body cover and between this valve body film and this valve block;

It is characterized in that:

This fluid valve base also comprises a plurality of seal rings, and it is arranged at respectively in a plurality of grooves of this valve block and this valve body cover, and sealing ring portion part protrudes in this groove, in order to execute a pre-power in this valve body film;

The extending part that is connected with valve block is in the sealing district, and valve block is made multidirectional balanced support by extension part;

Wherein, when this fluid of the fluid of this temporary room and this outlet passage or this inlet channel produces the pressure difference that surpasses predefined value, this fluid that pressure is bigger will promote this corresponding threshold switch, and then from this hole of this threshold switch periphery, flow out or flow into this corresponding temporary room.

2. fluid valve base as claimed in claim 1 is characterized in that this fluid comprises gas and liquid.

3. fluid valve base as claimed in claim 1 is characterized in that, this valve body film is made in modes such as traditional mechanical manufacturing, gold-tinted etching, laser beam machining, electroforming processing or electro discharge machining.

4. fluid valve base as claimed in claim 1 is characterized in that, the material of sealing ring is a rubber material.

5. fluid valve base as claimed in claim 1 is characterized in that this fluid valve base more comprises a vibration film, and its periphery is fixedly arranged on this valve body cover, and when actuator state not, this vibration film separates with this valve body cover, forms a pressure chamber with definition.

6. fluid valve base as claimed in claim 1 is characterized in that, this vibration film and this valve body cover distance separating are 100 μ m to 300 μ m.

7. fluid valve base as claimed in claim 1 is characterized in that this fluid valve base more comprises an actuator, and it is connected with this vibration film, in order to activate this fluid valve base.

8. fluid valve base as claimed in claim 1 is characterized in that, the thickness of this valve body film is 10 μ m to 50 μ m.

9. fluid valve base as claimed in claim 1 is characterized in that, the optimum thickness of this valve body film is 21 μ m to 40 μ m.

10. fluid valve base as claimed in claim 1 is characterized in that, the material of this valve body film is a macromolecular material, and its Young's modulus is 2-20GPa.

11. fluid valve base as claimed in claim 10 is characterized in that, this macromolecular material is a pi, and its Young's modulus is 10GPa.

12. fluid valve base as claimed in claim 1 is characterized in that, the material of this valve body film is a metallic material, and its Young's modulus is 2GPa to 240GPa.

13. fluid valve base as claimed in claim 12 is characterized in that, this metallic material is aluminium, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel material.

14. fluid valve base as claimed in claim 1 is characterized in that, the material of this valve block and this valve body cover is thermoplastic plastic's material.

15. fluid valve base as claimed in claim 1 is characterized in that, this temporary room more is contained in and forms one first temporary room between this valve body film and this valve body cover, and forms one second temporary room between this valve body film and this valve block.

16. fluid valve base as claimed in claim 15, it is characterized in that, when the fluid of the fluid of this inlet channel of this valve block and this first temporary room produces the pressure difference that surpasses predefined value, this fluid then promotes this first threshold switch, and then from this hole of this first threshold switch periphery, flow into this first temporary room of this valve body cover, and when this fluid of the fluid of this outlet passage of this valve body cover and this second temporary room produces the pressure difference that surpasses predefined value, this fluid then promotes this second threshold switch, from this hole of this second threshold switch periphery, flow into this second temporary room.

17. a fluid valve base, it comprises:

One valve block, it has an inlet channel, an outlet passage and an inlet channel hole;

One valve body cover, it is arranged on this valve block, and has an outlet passage hole;

One valve body film, its thickness is substantially the same and be 10 μ m to 50 μ m, and be arranged between this valve block and this valve body cover, this valve body film has at least one threshold switch, this threshold switch has valve block and centers on a plurality of holes of valve block periphery, then form a seal area around definition between this hole, sealing district area is greater than this inlet channel hole area and this outlet passage hole area; And

It is characterized in that:

18. a fluid valve base, it comprises:

One valve block, it has an inlet channel, an outlet passage, an inlet channel hole and at least one groove;

One valve body cover, it is arranged on this valve block, and has an outlet passage hole and at least one groove;

One valve body film, its thickness is substantially the same, and be arranged between this valve block and this valve body cover, this valve body film has at least one threshold switch, this threshold switch has valve block and centers on a plurality of holes of valve block periphery, then form a seal area around definition between this hole, sealing district area is greater than this inlet channel hole area and this outlet passage hole area;

It is characterized in that:

This fluid valve base also comprises a plurality of seal rings, it is arranged at respectively in this groove of this valve block and this valve body cover, and sealing ring portion part protrudes in this groove, in order to execute a pre-power in the sealing district of this valve body film, and the sealing district is in the pressure at both sides difference is a predefined value time, and the sealing district separates with this valve block or this valve body cover;

19. a fluid valve base, it comprises:

One valve body film, its thickness is substantially the same and be 10 μ m to 50 μ m, and be arranged between this valve block and this valve body cover, this valve body film has at least one threshold switch, this threshold switch has valve block and centers on a plurality of holes of valve block periphery, then form a seal area around definition between this hole, sealing district area is greater than this inlet channel hole area and this outlet passage hole area;

At least one temporary room, it is arranged between this valve body film and this valve body cover and between this valve body film and this valve block; And

It is characterized in that: