CN101377191B

CN101377191B - Method for manufacturing fluid delivery device

Info

Publication number: CN101377191B
Application number: CN2007101472546A
Authority: CN
Inventors: 陈世昌; 郑江河; 余荣侯; 蔡志宏; 邱士哲
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2007-08-30
Filing date: 2007-08-30
Publication date: 2012-02-15
Anticipated expiration: 2027-08-30
Also published as: CN101377191A

Abstract

The present invention relates to a fabrication method of a fluid-conveying device. The method includes the following steps: a valve body layer is formed; a valve body cover layer, which is provided with a pressure chamber, is correspondingly formed on the valve body layer; a flexible film, which is provided with a plurality of valve plate structures, is formed; an actuating film is formed; an actuating plate is formed and attached on the actuating film to form an actuator; the flexible film is arranged between the valve body layer and the valve body cover layer; the valve body layer, the flexible film and the valve body cover layer are assembled together and positioned; and the actuator is arranged on the valve body cover layer, so that the actuating film can seal the pressure chamber of the valve body cover layer to form the fluid-conveying device.

Description

The production method of fluid delivery system

Technical field

The invention relates to a kind of production method of fluid delivery system, refer to a kind of production method that is applicable to the fluid delivery system of micro-pump structure especially.

Background technique

In each field, no matter be industry such as medicine, computer are scientific and technological, printing, the energy at present; Product all develops towards sophistication and microminiaturization direction; Wherein the fluid delivery structure that product comprised such as Micropump, sprayer, ink gun, industrial printing device are its key technology; Therefore, how to break through its technical bottleneck, be the important content of development by innovation structure.

See also Fig. 1 (a); Its structural representation that is known micro-pump structure when start not; Known micro-pump structure 10 comprises inlet channel 13, micro-actuator 15, drive block 14, partition film 12, pressing chamber 111, substrate 11 and outlet passage 16; Wherein 12 of substrate 11 and partition film form a pressing chamber 111, mainly are used for storaging liquid, will make that the volume of pressing chamber 111 is changed because of the deformation influence of partition film 12.

When a voltage acts on the two poles of the earth up and down of micro-actuator 15, can produce an electric field, make micro-actuator 15 under this effect of electric field, produce crooked and move to partition film 12 and pressing chamber 111 directions; Because micro-actuator 15 is arranged on the drive block 14; Therefore drive block 14 can be passed to partition film 12 with the thrust that micro-actuator 15 is produced, and makes partition film 12 also and then be extruded distortion, promptly shown in Fig. 1 (b); Liquid can flow according to the direction of arrow X among the figure; Make by the liquid that are stored in the pressing chamber 111 after inlet channel 13 inflows to be squeezed, and flow to other predefined space, to reach the purpose of supplying with fluid via outlet passage 16.

Please consult Fig. 2 again; It is the plan view of the micro-pump structure shown in Fig. 1 (a), and is as shown in the figure, and the throughput direction of fluid is shown in the direction of arrow of label Y among the figure when micro-pump structure 10 starts; Inlet expands the cone structure that stream device 17 varies in size for both ends open; The end that opening is bigger is to be connected with entrance channel 191, and is connected with little pressing chamber 111 with the less end of opening, simultaneously; The expansion stream device 18 that connects pressing chamber 111 and outlet flow 192 is to expand stream device 17 with inlet to be provided with in the same way; It is to be connected in pressing chamber 111 with the bigger end of opening, and is connected with outlet flow 192 with the less end of opening, and the inlet at pressing chamber 111 two ends expands stream device 17 and outlet expansion stream device 18 is equidirectional setting owing to be connected in; So expansion stream device two direction flow resistance different characteristic capable of using; The harmomegathus that reaches pressing chamber 111 volumes makes fluid produce unidirectional net flow rate, flows in the device 17 inflow pressing chambers 111 so that fluid can expand via inlet from entrance channel 191, expands stream device 18 through outlet flow 192 outflows by exporting again.

The micro-pump structure 10 of this kind incorporeity valve is easy to generate a large amount of situations that reflux of fluid, and institute thinks and impel flow rate to increase that pressing chamber 111 needs bigger compression ratio, presses to produce enough chambeies, so need expend higher cost on actuator 15.

Therefore, how to develop a kind of fluid delivery system that improves above-mentioned known technology disappearance, real in pressing for the problem of solution at present.

Summary of the invention

Main purpose of the present invention is to provide a kind of production method of fluid delivery system, mainly forms valve body layer, valve body cover layer, flexible film in regular turn, activates film and braking plate, and make that the flexible film is corresponding to be arranged between valve body layer and the valve body cover layer; And will activate film and the corresponding each other applying of braking plate; Drive during through the braking plate start and activate film generation deformation, make between the pressure chamber's stereomutation that activates between film and valve body cover layer, to produce positive and negative pressure difference; Simultaneously; Because the rapid reaction of the valve structure on the flexible film makes pressure chamber can produce bigger fluid suction and thrust in the moment of harmomegathus, so can make fluid reach high efficiency transmission; And can effectively stop the adverse current of fluid, in fluid transfer process, be prone to produce the phenomenon of fluid reflux with the micro-pump structure that solves known technology.

For reaching above-mentioned purpose, of the present invention is the production method that a kind of fluid delivery system is provided than broad sense enforcement aspect, and it comprises the following step: form the valve body layer; The corresponding valve body cover layer that forms on this valve body layer, it has pressure chamber; Respectively at forming a micro-convex structure on this valve body layer and this valve body cover layer; Form the flexible film, it has at least one valve structure; Form and activate film; Form actuator, and the actuator attaching is positioned to activate on the film, to form actuator; The flexible film is arranged between valve body layer and the valve body cover layer; And valve body layer, flexible film and valve body cover layer are assembled the location each other; This valve structure that makes this flexible film respectively with this valve body layer and this valve body cover layer on this micro-convex structure inconsistent; And bestow a precompose firmly, and make the table interplanar of this valve structure and this valve body layer form one at interval, and the table interplanar of this valve structure and this valve body cover layer forms a gap; And actuator is arranged on the valve body cover layer, so that activate the pressure chamber of membrane sealed valve body cover layer, to form fluid delivery system.

Description of drawings

The structural representation that Fig. 1 (a) is known micro-pump structure when start not.

Fig. 1 (b) is the structural representation of Fig. 1 (a) when start.

Fig. 2 is the plan view of the micro-pump structure shown in Fig. 1 (a).

Fig. 3 is the structural representation of the fluid delivery system of the present invention's first preferred embodiment.

Fig. 4 is a valve block side structure schematic representation shown in Figure 3.

Fig. 5 (a) is the structure schematic representation of valve body cover shown in Figure 3.

Fig. 5 (b) is the cross-sectional view of Fig. 5 (a).

Fig. 6 is a valve body film structural representation shown in Figure 3.

Fig. 7 (a) is the not actuator state schematic representation of the fluid delivery system of preferred embodiment of the present invention.

Fig. 7 (b) is pressure chamber's swelling state schematic representation of Fig. 7 (a).

Fig. 7 (c) is pressure chamber's compressive state schematic representation of Fig. 7 (b).

Fig. 8 is the manufacturing flow chart of the fluid delivery system of the present invention's second preferred embodiment.

Embodiment

Some exemplary embodiments that embody characteristic of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and icon be the usefulness of being used as explanation in itself, but not in order to restriction the present invention.

See also Fig. 3; It is for the structural representation of the fluid delivery system of the present invention's first preferred embodiment, and is as shown in the figure, and fluid delivery system 20 of the present invention is given birth to industry such as skill, computer science and technology, printing or the energy applicable to medicine; But and conveying gas or liquid; But not as limit, fluid delivery system 20 mainly is made up of valve block 21, valve body cover 22, valve body film 23, a plurality of temporary room, actuator 24 and 25 of lids, and wherein valve block 21, valve body cover 22, valve body film 23 form a fluid valve seat 201; And between valve body cover 22 and actuator 24, form a pressure chamber 226, mainly be used for store fluid.

The assembling mode of this fluid delivery system 20 is that valve body film 23 is arranged between valve block 21 and the valve body cover 22; And make valve body film 23 and valve block 21 and valve body cover 22 corresponding settings; And between valve body film 23 and valve body cover 22, form one first temporary room, and between valve body film 23 and valve block 21, form one second temporary room, and the opposite position on valve body cover 22 more is provided with actuator 24; Actuator 24 is to be assembled by a vibration film 241 and an actuator 242; In order to the start of driving fluid feedway 20, at last, again lid 25 is arranged at the top of actuator 24; So it is in regular turn with valve block 21, valve body film 23, valve body cover 22, actuator 24 and lid 25 corresponding storehouse settings, to accomplish the assembling of fluid delivery system 20.

Wherein, valve block 21 and valve body cover 22 see also Fig. 4 and cooperate Fig. 3 for the main structure of direct fluid turnover in the fluid delivery system 20 of the present invention; Wherein Fig. 4 is the side structure schematic representation of valve block shown in Figure 3, and as shown in the figure, valve block 21 has an entrance channel 211 and an outlet flow 212; Fluid can be imported by the external world, is sent to an opening 213 of valve block 21 upper surfaces 210 via entrance channel 211, and; In present embodiment; Formed second temporary room is the outlet temporary storage cavity 215 shown in the figure between valve body film 23 and the valve block 21, but not as limit, and it is that upper surface 210 by valve block 21 is in producing the part depression with outlet flow 212 corresponding positions and forming; And be connected with outlet flow 212; This outlet temporary storage cavity 215 is in order to temporary transient store fluid, and makes this fluid be delivered to outlet passage 212 by outlet temporary storage cavity 215 via an opening 214, flows out outside the valve block 21 again.And; On valve block 21, also have a plurality of groove structures, use for a seal ring 26 (shown in Fig. 7 (a)) to be provided with on it, in present embodiment; Valve block 21 has the groove 216,218 around opening 213 peripheries, and is surrounded on the groove 217 of outlet temporary storage cavity 215 peripheries.

See also Fig. 5 (a) and cooperate Fig. 3; Wherein Fig. 5 (a) is the structure schematic representation of valve body cover shown in Figure 3; As shown in the figure, valve body cage 22 has a upper surface 220 and a lower surface 228, and on valve body cage 22, also has inlet valve passage 221 and the outlet valve passage 222 that runs through upper surface 220 to lower surface 228; And this inlet valve passage 221 is arranged at the opening 213 corresponding positions with valve block 21; Outlet valve passage 222 then be arranged at the outlet temporary storage cavity of valve block 21 215 in opening 214 corresponding positions, and, in present embodiment; Formed first temporary room is the inlet temporary storage cavity 223 shown in the figure between valve body film 23 and the valve body cover 22; And not as limit, its be by the lower surface 228 of valve body cover 22 in producing partly depression with inlet valve passage 221 corresponding positions and form, and it is communicated in inlet valve passage 221.

See also Fig. 5 (b), it is the cross-sectional view of Fig. 5 (a), and is as shown in the figure; The upper surface 220 of valve body cover 22 is depressions partly, and forming a pressure chamber 226, it is the actuator 242 corresponding settings with actuator 24; Pressure chamber 226 is communicated in inlet temporary storage cavity 223 through inlet valve passage 221, and is connected with outlet valve passage 222 simultaneously, therefore; When actuator 242 receives voltage actuation actuator 24 epireliefs are out of shape, the volumetric expansion of build-up of pressure chamber 226 and produce Negative Pressure Difference can make fluid in inlet valve passage 22 1 flow to pressure chamber 226; Thereafter, after the direction of an electric field that puts on actuator 242 changes, actuator 242 will make actuator 24 concave deformation pressure chamber 226 shrink and volume reduces; Make pressure chamber 226 and the extraneous positive pressure difference that produces, impel fluid by outside the outlet valve passage 222 outflow pressure chambers 226, simultaneously in this; There is segment fluid flow can flow in inlet valve passage 221 and the inlet temporary room 223 equally; Yet because the inlet valve structure 231 (shown in Fig. 6 (c)) of this moment is for making the pressurized closing state, so this fluid can not produce the phenomenon that flows backwards through inlet valve block 231, as for the fluid that temporarily is stored in the inlet temporary storage cavity 223; Then receive voltage actuation again in actuator 242; Repeat to make actuator 24 again when epirelief distortion and boost pressure chamber 226 volumes, again by inlet temporary storage cavity 223 through and in the feed pressure chamber 226, to carry out the conveying of fluid to inlet valve passage 221.

In addition; Have a plurality of groove structures on the valve body cover 22 equally; With the present embodiment is example, has the groove 227 that is provided with around pressure chamber 226 at the upper surface 220 of valve body cage 22, on lower surface 228, then has around the groove 224 that is arranged at inlet temporary storage cavity 223, around groove that is arranged at outlet valve passage 222 225 and groove 229; Likewise, above-mentioned groove structure is to use for a seal ring 27 (shown in Fig. 7 (a)) to be arranged at wherein.

See also Fig. 6 (a) and cooperate Fig. 3, wherein Fig. 6 (a) is the structural representation of valve body film shown in Figure 3, and is as shown in the figure; Valve body film 23 main therefore tradition processing or photoetching or laser beam machining or modes such as electroforming processing or electro discharge machining are made, and are the identical in fact flake structure of a thickness, have a plurality of hollow out threshold switchs on it; Comprise first threshold switch and second threshold switch, in present embodiment, first threshold switch is an inlet valve structure 231; And second threshold switch is an outlet valve structure 232, and wherein, inlet valve structure 231 has inlet valve block 2313 and a plurality of cut-out openings 2312 that is provided with around inlet valve block 2313 peripheries; In addition; Between hole 2312, also have and the extension part 2311 that is connected of inlet valve block 2313, bear one when valve body film 23 and transmit and when coming downward stress, shown in Fig. 7 (c) from pressure chamber 226; Inlet valve structure 231 is whole smooth on valve block 21 downwards; Entering the mouth valve block 2313 this moment can be near groove 216 upper sealing rings 26 projection, and seals up the opening 213 on the valve block 21, and its peripheral cut-out

openings

2312 and 2311 of extension parts floating being affixed on the valve block 21 of taking advantage of a situation; So therefore the closing function of inlet valve structure 231 can't flow out fluid.

And under valve body film 23 is under pressure the suction that chamber 226 volumes increase and produce; Owing to be arranged at seal rings 26 in the groove 216 of valve block 21 valve mechanism 231 1 precomposes firmly (Preforce) that provided access; Thereby inlet valve block 23 13 can produce the bigger tight effect of preparatory lid through the support of extension part 2311; In case non-return stream up produces displacement (shown in Fig. 6 (b)) when the negative pressure because of pressure chamber 226 makes inlet valve structure 231, at this moment; Fluid then can be flow to the inlet temporary storage cavity 223 of valve body cover 22 through the hole 2312 of hollow out by valve block 21; And be sent in the pressure chamber 226 through inlet temporary storage cavity 223 and inlet valve passage 221, thus, the positive/negative pressure difference that inlet valve structure 231 can produce in response to pressure chamber 226 and open rapidly or close; With the turnover of control fluid, and fluid can be back on the valve block 21.

Likewise, be positioned at another valve mechanism on the same valve body film 23 then for outlet valve structure 232, outlet valve block 2323 wherein, extension part 2321 and hole 2322 to make flowing mode all identical with inlet valve structure 231; Thereby repeat no more, only direction is set is that seal ring 27 with inlet valve structure 231 oppositely is provided with to outlet valve structure 232 peripheral seal rings 26, shown in Fig. 6 (c); Thereby when producing a thrust when pressure chamber 226 compression; The groove 225 interior seal rings 27 that are arranged at valve body cover 22 will provide outlet valve mechanism 232 1 precomposes firmly (Preforce), make outlet valve block 2323 can produce the bigger tight effect of preparatory lid through the support of extension part 2321, in case non-return stream; When making outlet valve mechanism 232, the malleation because of pressure chamber 226 down produces displacement; At this moment, the hole 2322 that fluid then can be through hollow out, and can be discharged through opening 214 and outlet flow 212 in valve body cover 22 flow to the outlet temporary storage cavity 215 of valve block 21 by pressure chamber 226; Thus; Then can fluid be released in pressure chamber 226, to reach the function of FLUID TRANSPORTATION through the mechanism of outlet valve structure 232 unlatchings.

See also Fig. 7 (a), it is for the not actuator state schematic representation of the fluid delivery system of preferred embodiment of the present invention, in present embodiment; All groove structures 216,217,218 are provided with seal ring 26 respectively; And seal ring 27 also is set respectively in the groove 224,225,229, but its material is the good rubber material of endurance, and not as limit; Wherein, Be arranged on the valve block 21 around the seal rings in the groove 216 of opening 213 and can be a circle structure, its thickness is greater than groove 216 degree of depth, makes that being arranged at seal rings 26 in the groove 216 is that part protrudes from that surface 210 constitutes a micro-convex structure on the valve block 21; Thereby the inlet valve block 2313 of the inlet valve structure 231 that is arranged at the valve body film 23 on the valve block 21 of make fitting forms a protuberance upwards because of the micro-convex structure of seal ring 26; And the remaining part of valve body film 23 is to replace mutually with valve body cover 22, and so micro-convex structure produces firmly (Preforce) effect of a precompose to inlet valve 231 pushing tows, helps to produce the bigger tight effect of preparatory lid; In case non-return stream; And since seal ring 26 upwards the micro-convex structure of protuberance be inlet valve structure 231 places that are positioned at valve body film 23, have a gap so inlet valve structure 231 is made on inlet valve block 2313 and the valve block 21 between surperficial 210 when start not, likewise; In the time of in seal ring 27 is arranged at around the groove 225 of outlet valve passage 222; Because its seal ring 27 is arranged at the lower surface 228 of valve body cover 22, thereby sealing ring 27 is the outlet valve structure protrusions and form and swell downwards in the micro-convex structure of valve body cover 22 downwards that make valve body film 23, and this micro-convex structure only its direction is provided with for reverse with the micro-convex structure that is formed at inlet valve structure 231; Yet its function is all with aforementioned identical, thereby repeats no more.Be arranged at the

seal ring

26,27 and 28 in groove structure 217,218 and 224,229 and 227 respectively as for all the other; Mainly be used for making respectively when fitting tightly between valve block 21 and valve body film 23, valve body film 23 and valve body cover 22 and valve body cover 22 and the actuator 24, anti-fluid leaks.

Certainly; Above-mentioned micro-convex structure is except using groove and seal ring to arrange in pairs or groups to form, and in some embodiments, the micro-convex structure of valve block 21 and valve body cover 22 also can adopt semiconductor technology; For example: photoetching or plated film or galvanoplastics directly form on valve block 21 and valve body cover 22.

Please consult Fig. 7 (a), 7 (b), 7 (c) simultaneously; As shown in the figure; When lid 25, actuator 24, valve body cover 22, valve body film 23, seal ring 26 and valve block 21 correspond to each other the assembling be provided with after; Opening 213 on the valve block 21 be with valve body film 23 on inlet valve structure 231 and the inlet valve passage 221 on the valve body cover 22 corresponding; And 214 of openings on the valve block 21 are corresponding with outlet valve block 232 and the outlet valve passage 222 on the valve body cover 22 on the valve body film 23; And,, make inlet valve structure 231 dimplings of valve body film 23 arise from the valve block 21 because seal ring 26 is arranged in the groove 216; And contact valve body film 23 through the seal ring 26 that is positioned at groove 216 and produce firmly ((Preforce) effect of a precompose; Make inlet valve structure 231 when start not, then form a gap with the upper surface 210 of valve block 21, likewise, outlet valve structure 232 is also through establishing seal ring 27 in lower surface 228 formation one gap as for the same way as in the groove 225 and valve body cover 22.

When with a driven actuator 242; Actuator 24 produces bending deflection; Shown in Fig. 7 (b), actuator 24 is that the direction towards arrow a indication is bent upwards distortion, makes the volume of pressure chamber 226 increase; Thereby produce a suction; Make inlet valve structure 231, the outlet valve structure 232 of valve body film 23 bear the pulling force that makes progress, and make have a precompose firmly the inlet valve block 2313 of the inlet valve structure 231 of (Preforce) opens (shown in Fig. 6 (b)) rapidly, make liquid in large quantities the inlet channel on valve block 21 211 come in by absorptions; And the hole 2312 of the opening 213 on the valve block 21 of flowing through, the inlet valve structure 231 on the valve body film 23, the inlet temporary storage cavity 223 on the valve body cover 22, inlet valve block passage 221 and feed pressure chamber 226 in; At this moment, because inlet valve structure 231, the outlet valve structure 232 of valve body film 23 are born this to upper pulling force, be to make the outlet valve block 2323 that is positioned on the valve body film 23 seal up outlet valve passage 222 to upper pulling force because of this so be positioned at the outlet valve structure 232 of the other end; And make outlet valve structure 232 close, thereby fluid countercurrent current.

When actuator 24 changes the arrow b downwarping distortion shown in Fig. 7 (c) because of direction of an electric field; Volume that then can compression pressure chamber 226 makes the fluid of 226 pairs of inside of pressure chamber produce a thrust, and makes inlet valve structure 231, the outlet valve structure 232 of valve body film 23 bear a downward thrust; At this moment; Be arranged at the seal ring 27 upper outlet valve mechanisms 232 in the groove 225 outlet valve block 2323 its can open (shown in Fig. 6 (c)) rapidly, and liquid moment is led off in a large number, by pressure chamber 226 through the outlet valve passage 222 on the valve body cover 22, on the valve body film 23 outlet valve structure 232 hole 2322, on the valve block 21 outlet temporary storage cavity 215, opening 214 and outlet passage 212 and outside the effluent fluid feedway 20; Thereby the transmission course of completion fluid; Likewise, this moment is because inlet valve structure 231 is to bear this downward thrust, thereby feasible inlet valve block 2313 seals up opening 213; Thereby close inlet valve structure 231; Make not adverse current of fluid, and, be equipped with the design of the

seal ring

26,27 in the groove 216,225 on valve block 21 and valve body cover 22 through inlet valve structure 231 and outlet valve structure 232; Can make fluid in transport process, can not produce the situation of backflow, reach high efficiency transmission.

In addition; In present embodiment; The material of valve block 21 and valve body cover 22 can adopt thermoplastic material; For example polycarbonate resin (Polycarbonate PC), gather and mock (Polysulfone, PSF), ABS resin (Acrylonitrile Butadiene Styrene), vertical property low density polyethylene (LLDPE), low density polyethylene (LDPE), high density polyethylene (HDPE) (HDPE), polypropylene (PP), polyphenylene sulfide (Polyphenylene Sulfide, PPS), syndiotatic polystyrene (SPS), PPO (PPO), polyoxymethylene (Polyacetal; POM), polybutyl terapthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), cyclic olefin polymer thermoplastic materials such as (COC); But not as limit, and in present embodiment, the degree of depth of pressure chamber 226 is between 100 μ m to 300 μ m; Diameter is between 10mm～30mm, and not as limit.

In present embodiment; Clearance distance between this valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m, and in some embodiments; The separation distance that the vibration film 241 of this actuator 24 and valve body cover are 22; Be the gap, can be 10 μ m to 790 μ m, the preferably is 100 μ m to 300 μ m.

And valve body film 23 be can traditional processing or photoetching or laser beam machining or modes such as electroforming processing or electro discharge machining make, its material can be good high-molecular organic material of any endurance or metal, when valve body film 23 adopts these macromolecular materials; Its elasticity coefficient is 2Gpa～20Gpa, for example pi (Polyimide, PI); Its elasticity coefficient, promptly young's modulus (E value) can be 10GPa, when valve body film 23 adopts metallic material; For example aluminium, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials, its young's modulus is 2GPa～240GPa, if this metallic material is an aluminum metal; Its elasticity coefficient is 70GPa, or the nickel metal, and its elasticity coefficient is 210GPa; Or stainless steel metal, its elasticity coefficient is 240GPa etc., and not as limit.Thickness as for valve body film 23 can be between 10 μ m to 50 μ m, and the best is 21 μ m to 40 μ m.

Made method proposes explanation when below using unlike material with regard to valve body film 23 respectively.

When the material of valve body film 23 be pi (Polyimide, in the time of PI), its production method mainly is to utilize reactive ion gas dry etching (reactive ion etching; RIE) method is coated on the valve mechanism with the rotation-sensitivity optical resist, and after exposure imaging goes out the valve mechanism pattern; Again to carry out etching; (Polyimide, PI) sheet is not etched, thereby can etch the valve mechanism on the valve body film 23 owing to there is optical resist covering place can protect pi.

If the material of valve body film 23 is a stainless steel metal; Then can photoetching, laser beam machining and machining etc. makes valve mechanism; Wherein the mode of photoetching obtains the optical resist pattern of the valve mechanism on stainless steel sheets, is soaked in FeCl3 again and adds and carry out wet etching in the HCl solution, and is similar with preceding method; There is optical resist covering place can protect stainless steel sheets not to be etched, thereby can etches the valve mechanism on the valve body film 23.

And, if the material of valve body film 23 is a metallic nickel, then be the method for utilizing electrotyping process; Utilize photoetching method equally, obtain the optical resist pattern of the valve mechanism on stainless steel substrate, carry out the nickel electroforming then; There is optical resist covering place can electroforming; After the nickel metal of electroforming reaches certain thickness, it is broken away from from stainless steel substrate, then can obtain the valve body film 23 of tool valve mechanism 231,232.

In addition; Except above-mentioned production method; All materials that are applied to valve body film 23 are the processing method of available accurate punching all, or uses traditional mechanical processing mode, laser beam machining or modes such as electroforming processing or electro discharge machining and produce the valve structure on it, but not as limit.

And; Actuator 242 in the actuator 24 is a piezoelectric board; Can adopt the piezoelectricity powder manufacturing of lead zirconate titanate (PZT) series of high tension electricity coefficient to form, wherein the thickness of actuator 242 can be between 100 μ m to 500 μ m, and preferred thickness is 150 μ m to 250 μ m; Young's modulus is 100GPa to 150GPa, and not as limit.

And the thickness that attaches the vibration film 241 of actuator 242 is 10 μ m to 300 μ m, and preferred thickness is 100 μ m to 250 μ m, and its material can be a single-layer metal and constitutes; Stainless steel metal for example, its young's modulus is 240Gpa, thickness is between 140 μ m to 160 μ m; Copper for example, its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m; And not as limit, or its material can be on the metallic material and to attach the double layer construction of the anti-biochemical macromolecule thin plate of one deck to constitute.

In some embodiments, in response to big flow fluid transmission requirements, can on the actuator 242 of actuator 24, bestow operating frequency is 10-50Hz, and cooperates following condition:

The thickness of actuator 242 is about the rigidity characteristics of 100 μ m to 500 μ m, and preferred thickness is 150 μ m to 250 μ m, and young's modulus is about 100GPa-150Gpa.

And the thickness of vibration film 241 is between 10 μ m to the 300 μ m, and preferred thickness is 100 μ m to 250 μ m, and young's modulus is 60-300GPa; Its material can be a single-layer metal and constitutes, stainless steel metal for example, and its young's modulus is 240Gpa; Thickness is between 140 μ m to 160 μ m; Copper for example, its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m; And not as limit, or its material can be the double layer construction of the anti-biochemical macromolecule thin plate of attaching one deck to constitute on the metallic material.

The degree of depth of this pressure chamber 226 is that diameter is between 10mm～30mm between 100 μ m to 300 μ m.

And the thickness of the valve mechanism 231,232 on the valve body film 23 is 10 μ m to 50 μ m, and young's modulus is 2GPa～240Gpa; Can be good high-molecular organic material of any endurance or metal, this valve body film 23 adopts this macromolecular material, and its elasticity coefficient is 2GPa～20Gpa; For example pi (Polyimide, PI), its elasticity coefficient; Be that young's modulus (E value) can be 10Gpa, this valve body film 23 adopts metallic material, for example aluminium, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials; Its young's modulus is 2GPa～240GPa; The aluminum metal elasticity coefficient is 70GPa, or nickel metallic elastic coefficient is 210GPa, or the stainless steel metal elasticity coefficient be 240Gpa and; Clearance distance between valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m.

By the collocation of relevant parameter conditions such as above-mentioned actuator 242, vibration film 241, pressure chamber 226 and valve body film 23; Then the inlet valve structure 231 of actuatable valve body thin film 23 and outlet valve structure 232 open and close effect; Order about fluid and carry out one-way flow, and make the fluid of the pressure chamber 226 that flows through to reach the above big flow output of per minute 5cc.

In sum; Fluid conveying device 20 of the present invention can be through the driving of actuator 24; And valve body film 23 and last integrally formed inlet valve structure 231 thereof can be equipped with the soft seal ring 26 in the groove 216 of valve block 21, make inlet valve structure 231 open and deliver the fluid to pressure chamber 226, change the volume of pressure chamber 226 again because of actuator 24; Thereby make outlet valve mechanism 232 be equipped with the soft seal ring 27 in the groove 225 on valve body cover 22 and open; So that outside FLUID TRANSPORTATION to the pressure chamber 226, because pressure chamber 226 can produce bigger fluid suction and thrust in the moment of volume harmomegathus, its reaction of folding rapidly of the valve mechanism on the proportioning valve body thin film 23; Feasible event can make fluid reach the transmission of big flow, and effectively stops the adverse current of fluid.

See also Fig. 8 and the Fig. 3 that arranges in pairs or groups, wherein Fig. 8 at first need form a valve body layer for the manufacturing flow chart of the fluid delivery system of the present invention's second preferred embodiment; Be valve block 21 (shown in step S81) as shown in Figure 3, thereafter, form a valve body cover layer; In present embodiment, this valve body cover layer is valve body cover shown in Figure 3 22, and it has a pressure chamber 226 (shown in step S82); Then, on valve block 21 and valve body cover 22, form a micro-convex structure (shown in step S83) respectively, the generation type of this micro-convex structure can have dual mode; And not as limit: one, please refer to Fig. 3 and embodiments of the invention; Need promptly have groove 216 on the valve block 21 shown in figure prior to forming at least one groove respectively on valve block 21 and the valve body cover 22, and in a seal ring 26 (shown in Fig. 7 (a)) is set in the groove 216; Because the seal ring 26 that is arranged in the groove 216 is the upper surfaces 210 that partly protrude from valve block 21; Thereby can form a micro-convex structure in the upper surface 210 of valve block 21, likewise, groove 225 and seal ring 26 also can form a micro-convex structure (shown in Fig. 5 (b)) in the above described manner on the lower surface 228 of valve body cover 22; Two, can adopt semiconductor technology, for example: photoetching or plated film or galvanoplastics, but, directly on valve block 21 and valve body cover 22, form a micro-convex structure not as limit.

Then, form a flexible film, it has at least one valve structure; Be valve body film 23 of the present invention and the inlet valve structure 231 that is had and outlet valve structure 232 (shown in step S84), then, form one again and activate film; Be vibration film 241 of the present invention (shown in step S85), and form an actuator 242 (shown in step S86), afterwards; Actuator 242 attachings are positioned on the vibration film 241, constitute one with assembling and activate device 24, and make actuator 242 and pressure chamber's 226 corresponding settings (shown in step S87); After step S87, valve body film 23 is arranged between valve block 21 and the valve body cover 22; And make the setting (shown in step S88) that corresponds to each other of valve block 21, valve body film 23 and valve body cover 22, last, actuator 24 correspondences are arranged on the valve body cover 22; And make the pressure chamber 226 of valve body film 23 closed valve lids 22, to form a fluid feedway (shown in step S89).

In sum, the production method of fluid delivery system of the present invention mainly forms valve body layer, valve body cover layer, flexible film in regular turn, activates film and braking plate; And make that the flexible film is corresponding to be arranged between valve body layer and the valve body cover layer, and will activate film and braking plate is corresponding each other fits, drive during through the braking plate start and activate film and produce deformation; Make between the stereomutation that activates the pressure chamber between film and valve body cover layer, producing positive and negative pressure difference, but owing to use formed fluid delivery system conveying gas of production method of the present invention and fluid; Splendid flow rate and delivery pressure are not only arranged; Can also have High Accuracy Control property in original state oneself draw liquid, but and because of its conveying gas; Therefore more can get rid of bubble in fluid delivery process, to reach high efficiency transmission.

Claims

1. fluid delivery system production method is characterized in that comprising the following step:

Form a valve body layer;

The corresponding valve body cover layer that forms on this valve body layer, this valve body cover layer has a pressure chamber;

Respectively at forming a micro-convex structure on this valve body layer and this valve body cover layer;

Form a flexible film, it has at least one valve structure;

Form one and activate film;

Form an actuator, and this actuator attaching is positioned on this actuating film, activate device to form one;

This flexible film is arranged between this valve body layer and this valve body cover layer; And this valve body layer, this flexible film and this valve body cover layer are assembled the location each other; This valve structure that makes this flexible film respectively with this valve body layer and this valve body cover layer on this micro-convex structure inconsistent; And bestow a precompose firmly, and make the table interplanar of this valve structure and this valve body layer form one at interval, and the table interplanar of this valve structure and this valve body cover layer forms a gap; And

This actuator is arranged on this valve body cover layer, so that should activate this pressure chamber of this valve body cover layer of membrane sealed, to form a fluid feedway.

2. the production method of fluid delivery system according to claim 1 is characterized in that this valve body layer and this valve body cover layer are to penetrate and form with thermoplastic material.

3. the production method of fluid delivery system according to claim 1; The formation that it is characterized in that this micro-convex structure is to form a plurality of grooves in this valve body layer and this valve body cover layer; And respectively in these a plurality of grooves a seal ring being set; And make sealing ring portion part protrude in this groove, to form this micro-convex structure, in order to execute a precompose firmly in this flexible film.

4. the production method of fluid delivery system according to claim 3, the material that it is characterized in that the sealing ring is the good rubber material of endurance.

5. the production method of fluid delivery system according to claim 1 is characterized in that this micro-convex structure is directly to adopt semiconductor technology to be formed on valve body layer and the valve body cover layer.

6. the production method of fluid delivery system according to claim 5 is characterized in that this semiconductor technology is photoetching or plated film or galvanoplastics.

7. the production method of fluid delivery system according to claim 1, the thickness that it is characterized in that this flexible film is 10 μ m to 50 μ m.

8. the production method of fluid delivery system according to claim 1, the thickness that it is characterized in that this flexible film is 21 μ m to 40 μ m.

9. the production method of fluid delivery system according to claim 1, the material that it is characterized in that this flexible film is the good high-molecular organic material of endurance, and its Young's modulus is 2GPa～20GPa.

10. the production method of fluid delivery system according to claim 9, the material that it is characterized in that this flexible film is a pi.

11. the production method of fluid delivery system according to claim 1 is characterized in that this flexible film is to utilize reactive ion gas dry-etching method to make.

12. the production method of fluid delivery system according to claim 1, the material that it is characterized in that this flexible film is a metallic material, and its Young's modulus is 2GPa to 240GPa.

13. the production method of fluid delivery system according to claim 12, the material that it is characterized in that this flexible film is a stainless steel material, and it is to make this valve structure with photoetching or machining.

14. the production method of fluid delivery system according to claim 12, the material that it is characterized in that this flexible film is the nickel metal, and it is to make this valve structure with electrotyping process method and photoetching method.

15. the production method of fluid delivery system according to claim 1, the thickness that it is characterized in that this actuating film are 10 μ m to 300 μ m.

16. the production method of fluid delivery system according to claim 1, the thickness that it is characterized in that this actuating film are 100 μ m to 250 μ m.

17. the production method of fluid delivery system according to claim 1 is characterized in that this actuating film is the single-layer metal structure.

18. the production method of fluid delivery system according to claim 1 is characterized in that this actuating film is a double layer construction, is attached by metallic material and macromolecular material to form.

19. the production method of fluid delivery system according to claim 1 is characterized in that this actuator is a piezoelectric board.

20. the production method of fluid delivery system according to claim 1, the thickness that it is characterized in that this actuator are 100 μ m to 500 μ m.

21. the production method of fluid delivery system according to claim 1, the thickness that it is characterized in that this actuator are 150 μ m to 250 μ m.

22. the production method of fluid delivery system according to claim 1, the degree of depth that it is characterized in that this pressure chamber of this valve body cover layer are 100 μ m to 300 μ m, diameter is 10mm to 30mm.

23. the production method of fluid delivery system according to claim 12, the material that it is characterized in that this flexible film is a stainless steel material, and it is to make this valve structure with laser beam machining.